CN102623375B

CN102623375B - Z-axis lifting mechanism with stress state balancing function

Info

Publication number: CN102623375B
Application number: CN201210068623.3A
Authority: CN
Inventors: 刘延杰; 吴明月; 荣伟彬; 孙立宁
Original assignee: Harbin Institute of Technology
Current assignee: Harbin Institute of Technology
Priority date: 2012-03-15
Filing date: 2012-03-15
Publication date: 2014-03-05
Anticipated expiration: 2032-03-15
Also published as: WO2013135052A1; CN102623375A

Abstract

A Z-axis lifting mechanism with a stress state balancing function relates to the manufacturing field of semiconductor silicon wafer transmission robots, and solves the problems of a conventional Z-axis transmission lifting mechanism, such as poor structural stress state and larger micro-deformation of ball guide rails. The Z-axis lifting mechanism with the stress state balancing function adopts the structure that an upper mounting cover and a lower mounting cover are oppositely arranged up and down, a Z-axis driving device component is connected with a lower mounting seat, a pre-tightening wheel support frame is sleeved on the Z-axis driving device component and connected with the lower mounting seat, three lead screw transmission mechanisms are uniformly distributed between the upper mounting cover and the lower mounting cover along the same circumference, the center end of a synchronous gear transmission belt is sleeved on a synchronous transmission driving gear, three outer side ends of the synchronous gear transmission belt are respectively sleeved on three synchronous transmission driven gears, three ball screws are respectively in threaded connected with three turn-screws; a lower deep-groove ball bearing is mounted in a lower bearing mounting hole of the lower mounting seat, and an upper deep-groove ball bearing is mounted in an upper bearing mounting hole. The Z-axis lifting mechanism provided by the invention is used on a silicon chip transmission robot.

Description

A kind of Z-axis lifting mechanism that can force balance state

Technical field

The present invention relates to a kind of semi-conductor silicon chip transferring robot and manufacture field, relate in particular to the Z-axis transmission elevating mechanism on a kind of wafer-handling robot.

Background technology

In the Z-axis transmission elevating mechanism of wafer-handling robot, more use be column Z-axis transmission elevating mechanism, use spherical guide as the motion benchmark of Z axis lifting, spherical guide is arranged on the datum level of column.But this transmission mechanism exists following shortcoming: the one, and structural stress state is bad.Column Z-axis transmission elevating mechanism be subject to force direction in the axis of movement direction along spherical guide, and the best of guide rail is subject to force direction, be in the vertical direction with spherical guide plane; The 2nd, because the total weight of superstructure all passes to spherical guide by support slipper with the form of cantilever beam, spherical guide is outside the gravity normally bearing, also additionally bear very large turning torque, make spherical guide produce larger microdeformation, gently motion-affecting flexibility, heavy shorten useful life of spherical guide; The 3rd, between installed surface and lateral register face due to spherical guide, the installing up and down between locating surface, all exist complicated shaped position tolerance relation between spherical guide installed surface and the reference for installation of ball-screw of column, therefore column processing technology is complicated, rate of finished products is lower, and processing cost is high; The 4th, because the weight of column is generally all at tens kilograms, be arranged on the side direction in cabinet, inevitably cause crank, easily make main frame produce and topple; The 5th, because contact area between the installed surface up and down of column and the upper lower installation board of main frame is very large, make it when assembling, be difficult for adjusting, waste time and energy.

Summary of the invention

Useful life of the object of the invention is to have for solving the Z-axis transmission elevating mechanism of existing wafer-handling robot that structural stress state is bad, spherical guide produces larger microdeformation, spherical guide is short, column processing technology complicated, rate of finished products is lower, crank, main frame easily produce the problem that is difficult for adjustment when toppling, assemble, and a kind of Z-axis lifting mechanism that can force balance state is provided.

The present invention includes lower mount pad, Z axis drive set component, pre-bearing up pulley supporting mechanism, synchronous gear driving-belt, screw transmission mechanism, upper mounting cover, two connecting plates, three lead-screw drive mechanisms, Z axis drive set component comprises Z axis motor cabinet, encoder positioning pipe, encoder, Z axis servomotor, the friction type brake, Synchronous Transmission driving gear and connecting plate, the upper end of described Z axis servo motor shaft is output shaft, lower end is motor shaft, described Z axis servomotor is arranged in Z axis motor cabinet, and the output shaft of Z axis servomotor is positioned at the outside of Z axis motor cabinet, the upper end of output shaft is provided with transmission external tooth, described the friction type brake and Synchronous Transmission driving gear are arranged on the output shaft of Z axis servomotor from the bottom to top successively, and the center internal tooth of Synchronous Transmission driving gear and the engagement of transmission external tooth, connecting plate is arranged on the end face of Synchronous Transmission driving gear, described encoder is arranged in Z axis motor cabinet, and encoder is arranged on the motor shaft on Z axis servomotor, encoder positioning pipe is arranged on Z axis motor cabinet outside, and encoder positioning pipe is arranged between the elasticity spacer and the flange of Z axis motor cabinet lower end on encoder, pre-bearing up pulley supporting mechanism comprises pretension wheeling supporting frame, pretension wheeling supporting frame upper cover, three pretension wheel travelling carriage mechanisms, pretension wheeling supporting frame upper cover is arranged on the upper surface of pretension wheeling supporting frame, three pretensions wheel travelling carriage mechanism is uniform to be arranged on the upper surface of pretension wheeling supporting frame upper cover, and each pretension wheel travelling carriage mechanism is arranged on pretension wheeling supporting frame and covers, each pretension wheel travelling carriage mechanism comprises pre-bearing up pulley locating piece outside plate, pre-bearing up pulley locating piece, pre-bearing up pulley positioning sliding block, pre-bearing up pulley rotating turret back shaft, pre-bearing up pulley rotating turret, two thrust jackscrews, two locking nuts and two pretension wheel mechanisms, the upper surface of pre-bearing up pulley locating piece is provided with T-slot, the lower end of pre-bearing up pulley positioning sliding block is provided with the T shape head matching with T-slot, T shape head coordinates installation with T-slot, pre-bearing up pulley locating piece outside plate is arranged on the outside end face of pre-bearing up pulley locating piece, two thrust jackscrews are threaded with the screw on pre-bearing up pulley locating piece outside plate by locking nut, the end face of screw and T shape head over against, on pre-bearing up pulley positioning sliding block, towards the side at Z axis center, be provided with rotating turret mounting groove, the pre-bearing up pulley positioning sliding block of rotating turret mounting groove upside is provided with rotating shaft unthreaded hole, the pre-bearing up pulley positioning sliding block of rotating turret mounting groove downside is provided with rotating shaft screwed hole, pre-bearing up pulley rotating turret is arranged in rotating turret mounting groove, pre-bearing up pulley rotating turret back shaft is threaded with rotating shaft screwed hole through rotating shaft unthreaded hole and pre-bearing up pulley rotating turret, in two symmetrical dome portions on pre-bearing up pulley rotating turret, be separately installed with pretension wheel mechanism, and the pretension wheel shaft on pretension wheel mechanism is arranged in the shrinkage pool on the pre-bearing up pulley rotating turret corresponding with it, each lead-screw drive mechanism comprises lower bearing baffle ring, lower circlip for shaft, lower deep groove ball bearing, thrust shaft block, thrust bearing, thrust bearing flap, Synchronous Transmission driven gear, turn-screw axle, upper bearing (metal) baffle ring, upper deep groove ball bearing, upper circlip for shaft, the top of described turn-screw axle is turn-screw, the bottom of described turn-screw axle is optical axis, Synchronous Transmission driven gear is arranged on optical axis, upper bearing (metal) baffle ring, upper deep groove ball bearing and upper circlip for shaft are arranged on the upper end of turn-screw axle from the bottom to top successively, thrust bearing flap, thrust bearing, thrust shaft block, lower deep groove ball bearing, lower circlip for shaft and lower bearing baffle ring are arranged on the lower end of turn-screw axle from top to bottom successively, described screw transmission mechanism comprises Z axis movable bracket and three ball screws, Z axis movable bracket is by spider and three screw brackets, three screw brackets are along the uniform setting of outer surface of spider, the outside end face of each screw bracket is provided with screw installing hole, a ball screw is housed in each screw installing hole, the place, axle center of each ball screw is provided with the spiral shell coordinating with turn-screw and buckles, upper mounting cover and lower mount pad are up and down over against setting, on the end face of lower mount pad, the place of keeping to the side is provided with three lower bearing installing holes along same circumference uniform distribution, on the end face of upper mounting cover, along same circumference uniform distribution, be provided with three upper bearing (metal) installing holes, and three upper bearing (metal) installing holes and three lower bearing installing holes one by one over against, Z axis drive set component, pre-bearing up pulley supporting mechanism, synchronous gear driving-belt, screw transmission mechanism, two connecting plates and three lead-screw drive mechanisms are all arranged between mounting cover and lower mount pad, Z axis motor cabinet is connected with lower mount pad, pretension wheeling supporting frame is sleeved on Z axis drive set component, and pretension wheeling supporting frame is connected with lower mount pad, three lead-screw drive mechanisms are arranged between upper mounting cover and lower mount pad along same circumference uniform distribution, the center-side of synchronous gear driving-belt is sleeved on Synchronous Transmission driving gear, three outboard ends of synchronous gear driving-belt are set on three Synchronous Transmission driven gears, six pretension wheel mechanisms on pre-bearing up pulley supporting mechanism paste on the flank of tooth of Synchronous Transmission driving gear, Z axis movable bracket is arranged on the top of pre-bearing up pulley supporting mechanism, and three ball wire mother stocks on pre-bearing up pulley supporting mechanism are not threaded with three turn-screws, lower deep groove ball bearing on each lead-screw drive mechanism is arranged in the corresponding lower bearing installing hole of lower mount pad, upper deep groove ball bearing on each lead-screw drive mechanism is arranged in corresponding upper bearing (metal) installing hole, two connecting plates are symmetrical arranged with the axial line of Z axis servomotor.

The present invention compared with prior art has following beneficial effect: one, compare with column Z-axis transmission mechanism, the present invention is by the lead-

screw drive mechanism

4 and 61 transmissions of ball screw that rotatablely move and be 120 ° of layouts by three of 15 outputs of Z axis servomotor, Z axis servomotor 15 rotatablely moving of output are converted into the rectilinear motion of ball screw 61, realize Z axis movable bracket 59 along Z-direction rectilinear motion up or down, transmission principle of the present invention has very high transmission accuracy, and the weight that the present invention only bears upper mechanism equably, and can not produce extra turning torque because of unbalance stress, improved greatly stress, make Z-axis transmission mechanism more reasonable.Two, because Z axis drive set component 2 of the present invention is design placed in the middle, three are 120 ° of uniform lead-screw drive mechanisms 4 and make the load capacity of whole system have larger lifting, therefore Z-axis lifting mechanism load capacity of the present invention is strong, is applicable to the article that transmission weight is heavier, volume is larger.Three, because the present invention has cancelled the heavier column of weight, and load is along even circumferential distribution, has corrected the crank problem that column easily produces, and makes main frame steadily of centre of gravity.Four, because the key mounting holes of Z-axis lifting mechanism of the present invention has all been stipulated accordingly with station processing request, therefore, in assembling, adjustment process is relatively simple.

Accompanying drawing explanation

Fig. 1 is the overall structure stereogram of Z-axis lifting mechanism of the present invention; Fig. 2 is the three-dimensional exploded view of Z-axis lifting mechanism of the present invention; Fig. 3 is the structural perspective of Z axis drive set component 2; Fig. 4 is the three-dimensional exploded view of Z axis drive set component 2; Fig. 5 is the structural perspective of pre-bearing up pulley supporting mechanism 3; Fig. 6 is the three-dimensional exploded view of No. 27 parts of pretension wheel travelling carriage mechanism; Fig. 7 is the three-dimensional exploded view of lead-screw drive mechanism 4; Fig. 8 is the three-dimensional exploded view of screw transmission mechanism 8.

Embodiment

Embodiment one: present embodiment is described in conjunction with Fig. 1～Fig. 8, present embodiment comprises lower mount pad 1, Z axis drive set component 2, pre-bearing up pulley supporting mechanism 3, synchronous gear driving-belt 7, screw transmission mechanism 8, upper mounting cover 9, two connecting plates 6 and three lead-screw drive mechanisms 4, see Fig. 3 and Fig. 4: Z axis drive set component 2 comprises Z axis motor cabinet 10, encoder positioning pipe 12, encoder 14, Z axis servomotor 15, the friction type brake 17, Synchronous Transmission driving gear 19 and connecting plate 20, the upper end of described Z axis servomotor 15 axles is output shaft 15-1, lower end is motor shaft 15-2, described Z axis servomotor 15 is arranged in Z axis motor cabinet 10 by screw 16, and the output shaft 15-1 of Z axis servomotor 15 is positioned at the outside of Z axis motor cabinet 10, the upper end of output shaft 15-1 is provided with transmission external tooth 15-1-1, described the friction type brake 17 and Synchronous Transmission driving gear 19 are arranged on the output shaft 15-1 of Z axis servomotor 15 from the bottom to top successively, and Synchronous Transmission driving gear 19 center internal tooth and transmission external tooth 15-1-1 engagement, the friction type brake 17 is fixedly connected with the ground plane of Z axis servomotor 15 upper ends by screw 18, connecting plate 20 is arranged on the end face of Synchronous Transmission driving gear 19 by mounting screw 21, mounting screw 22 is threaded with the center screw of output shaft 15-1 end face through the centre bore of connecting plate 20, the effect of connecting plate 20 is that Synchronous Transmission driving gear 19 and Z axis servomotor 15 are fixed in electrical axis direction, described encoder 14 is arranged in Z axis motor cabinet 10, and encoder 14 is arranged on the motor shaft 15-2 on Z axis servomotor 15, encoder 14 clamps to carry jackscrew, encoder positioning pipe 12 is arranged on Z axis motor cabinet 10 outsides, and encoder positioning pipe 12 is arranged between the elasticity spacer 14-1 and the flange of Z axis motor cabinet 10 lower ends on encoder 14, the radial location of encoder 14 by mounting screw 13 successively through the location hole on elasticity spacer 14-1, the centre bore of encoder positioning pipe 12, fastening with mount pad 1 after the installing hole of Z axis motor cabinet 10, the effect of the friction type brake 17 is when system burst power outage, can react rapidly, to continue the Z axis servomotor 15 of rotation because of inertia, brakes, and has prevented from making upper mechanism automatic descending because of the Action of Gravity Field of system, causes equipment breakdown, see Fig. 5: pre-bearing up pulley supporting mechanism 3 comprises pretension wheeling supporting frame 24, pretension wheeling supporting frame upper cover 25, three pretension wheel travelling carriage mechanisms 27, pretension wheeling supporting frame upper cover 25 is arranged on the upper surface of pretension wheeling supporting frame 24 by mounting screw 26, three pretensions wheel travelling carriage mechanism 27 is uniform to be arranged on the upper surface of pretension wheeling supporting frame upper cover 25, and each pretension wheel travelling carriage mechanism 27 is arranged on pretension wheeling supporting frame upper cover 25 by mounting screw 32, see Fig. 6: each pretension wheel travelling carriage mechanism 27 comprises pre-bearing up pulley locating piece outside plate 31, pre-bearing up pulley locating piece 33, pre-bearing up pulley positioning sliding block 34, pre-bearing up pulley rotating turret back shaft 35, pre-bearing up pulley rotating turret 37, two thrust jackscrews 28, two locking nuts 29 and two pretension wheel mechanisms 38, the upper surface of pre-bearing up pulley locating piece 33 is provided with T-slot 33-1, the lower end of pre-bearing up pulley positioning sliding block 34 is provided with a T shape 34-1 who matches with T-slot 33-1, a T shape 34-1 coordinates installation with T-slot 33-1, and pre-bearing up pulley positioning sliding block 34 can slide along T-slot 33-1, pre-bearing up pulley locating piece outside plate 31 is arranged on the outside end face of pre-bearing up pulley locating piece 33 by mounting screw 30, two thrust jackscrews 28 are threaded with the screw 3-1 on pre-bearing up pulley locating piece outside plate 31 by locking nut 29, the end face of screw 3-1 and a T shape 34-1 over against, during clockwise direction rotary thrust jackscrew 28, along with thrust jackscrew 28 screws in pre-bearing up pulley locating piece outside plate 31, pre-bearing up pulley positioning sliding block 34 can be ejected the radial direction along pretension wheeling supporting frame 24, the effect of described locking nut 29 is that the screw-in position of thrust jackscrew 28 is locked, on pre-bearing up pulley positioning sliding block 34, towards the side at Z axis center, be provided with rotating turret mounting groove 34-2, the pre-bearing up pulley positioning sliding block 34 of rotating turret mounting groove 34-2 upside is provided with rotating shaft unthreaded hole 34-3, the pre-bearing up pulley positioning sliding block 34 of rotating turret mounting groove 34-2 downside is provided with rotating shaft screwed hole 34-4, pre-bearing up pulley rotating turret 37 is arranged in rotating turret mounting groove 34-2, pre-bearing up pulley rotating turret back shaft 35 is threaded with rotating shaft screwed hole 34-4 through rotating shaft unthreaded hole 34-3 and pre-bearing up pulley rotating turret 37, two fastening jackscrews 36 are symmetricly set on pre-bearing up pulley positioning sliding block 34 both sides, and with pre-bearing up pulley rotating turret back shaft 35 vertical direction, pre-bearing up pulley rotating turret back shaft 35 is locked, the effect of fastening jackscrew 36 is the thread looseness that prevent pre-bearing up pulley rotating turret back shaft 35 and pre-bearing up pulley positioning sliding block 34, pre-bearing up pulley rotating turret 37 can rotate freely on pre-bearing up pulley rotating turret back shaft 35, in two symmetrical dome portions on pre-bearing up pulley rotating turret 37, be separately installed with pretension wheel mechanism 38, and the pretension wheel shaft 39 on pretension wheel mechanism 38 is arranged in the shrinkage pool 37-1 on the pre-bearing up pulley rotating turret 37 corresponding with it, the effect of pre-bearing up pulley supporting mechanism 3: the one, for pretension wheel mechanism 38 provides the correct location of short transverse, the 2nd, for pretension wheel mechanism 38 provides the adjusting of radial direction, guarantee by pretension wheel mechanism 38 on the flank of tooth of synchronous gear driving-belt 7 flank of tooth that is fitted in Synchronous Transmission driving gear 19 tightly, see Fig. 7: each lead-screw drive mechanism 4 comprises lower bearing baffle ring 44, lower circlip for shaft 45, lower deep groove ball bearing 46, thrust shaft block 47, thrust bearing 49, thrust bearing flap 50, Synchronous Transmission driven gear 53, turn-screw axle 54, upper bearing (metal) baffle ring 56, upper deep groove ball bearing 57, upper circlip for shaft 58, the top of described turn-screw axle 54 is turn-screw 54-1, the bottom of described turn-screw axle 54 is optical axis 54-2, Synchronous Transmission driven gear 53 is arranged on optical axis 54-2, and Synchronous Transmission driven gear 53 is fixedly connected with the flange on turn-screw axle 54 by mounting screw 52, upper bearing (metal) baffle ring 56, upper deep groove ball bearing 57 and upper circlip for shaft 58 are arranged on the upper end of turn-screw axle 54, thrust bearing flap 50 from the bottom to top successively, thrust bearing 49, thrust shaft block 47, lower deep groove ball bearing 46, lower circlip for shaft 45 and lower bearing baffle ring 44 are arranged on the lower end of turn-screw axle 54 from top to bottom successively, and thrust bearing flap 50 is fixedly connected with thrust shaft block 47 by mounting screw 51, the effect of lower deep groove ball bearing 46 and upper deep groove ball bearing 57 is that the rotation for turn-screw axle 54 provides accurate location, the effect of thrust bearing 49 is system weights of bearing from carrying on Z axis movable bracket 59, prevents from causing because of weight the damage of lower deep groove ball bearing 46, see Fig. 8: described screw transmission mechanism 8 comprises Z axis movable bracket 59 and three ball screws 61, Z axis movable bracket 59 is by spider 59-1 and three screw bracket 59-2, three screw bracket 59-2 are along the uniform setting of outer surface of spider 59-1, the outside end face of each screw bracket 59-2 is provided with screw installing hole 59-2-1, in each screw installing hole 59-2-1, a ball screw 61 is housed, the place, axle center of each ball screw 61 is provided with the spiral shell coordinating with turn-screw 54-1 and buckles 61-1, and ball screw 61 is fixedly connected with screw bracket 59-2 by mounting screw 60, see Fig. 1 and Fig. 2: upper mounting cover 9 and lower mount pad 1 are up and down over against setting, on the end face of lower mount pad 1, the place of keeping to the side is provided with three lower bearing installing hole 1-1 along same circumference uniform distribution, on the end face of upper mounting cover 9, along same circumference uniform distribution, be provided with three upper bearing (metal) installing hole 9-1, and three upper bearing (metal) installing hole 9-1 and three lower bearing installing hole 1-1 one by one over against, Z axis drive set component 2, pre-bearing up pulley supporting mechanism 3, synchronous gear driving-belt 7, screw transmission mechanism 8, two connecting plates 6 and three lead-screw drive mechanisms 4 are all arranged between mounting cover 9 and lower mount pad 1, Z axis motor cabinet 10 on Z axis drive set component 2 is connected with lower mount pad 1 by mounting screw 11, pretension wheeling supporting frame 24 on pre-bearing up pulley supporting mechanism 3 is sleeved on Z axis drive set component 2, and pretension wheeling supporting frame 24 is connected with lower mount pad 1 by mounting screw 23, three lead-screw drive mechanisms 4 are arranged between upper mounting cover 9 and lower mount pad 1 along same circumference uniform distribution, the center-side 7-1 of synchronous gear driving-belt 7 is sleeved on Synchronous Transmission driving gear 19, three outboard end 7-2 of synchronous gear driving-belt 7 are set on three Synchronous Transmission driven gears 53, under the effect of the pretightning force of pre-bearing up pulley supporting mechanism 3, the pasting on the flank of tooth of Synchronous Transmission driving gear 19 tightly of six pretension wheel mechanisms 38 on pre-bearing up pulley supporting mechanism 3, to realize the Synchronous Transmission of synchronous gear driving-belt 7 and Synchronous Transmission driving gear 19, Z axis movable bracket 59 is arranged on the top of pre-bearing up pulley supporting mechanism 3, and three ball screws 61 on pre-bearing up pulley supporting mechanism 3 are threaded with three turn-screw 54-1 respectively, lower deep groove ball bearing 46 on each lead-screw drive mechanism 4 is arranged in the corresponding lower bearing installing hole 1-1 of lower mount pad 1, lower bearing baffle ring 44 is fixedly connected with lower mount pad 1 by mounting screw 43, upper deep groove ball bearing 57 on each lead-screw drive mechanism 4 is arranged in corresponding upper bearing (metal) installing hole 9-1, upper bearing (metal) baffle ring 56 is fixedly connected with upper mounting cover 9 by mounting screw 55, thrust shaft block 47 is fixedly connected with lower mount pad 1 by mounting screw 48, two connecting plates 6 are symmetrical arranged with the axial line of Z axis servomotor 15, and the two ends of each connecting plate 6 are fixedly connected with upper mounting cover 9 by the mounting screw 5 lower mount pad 1 corresponding with it.

Embodiment two: present embodiment is described in conjunction with Fig. 6, each pretension wheel mechanism 38 of present embodiment comprises pretension wheel shaft 39, pre-bearing up pulley 41, circlip for shaft 42 and two pretension wheel bearings 40, described on the inner chamber of pre-bearing up pulley 41 recessed edge place a pretension wheel bearing 40 is respectively installed, pre-bearing up pulley 41 is arranged on pretension wheel shaft 39, circlip for shaft 42 is installed on the outer pretension that is exposed at and takes turns in the groove of pretension wheel shaft 39 upper ends of 41 upper surfaces, and circlip for shaft 42 is in order to the fixing relative position of pretension wheel bearing 40.Other composition and annexation are identical with embodiment one.

Operation principle of the present invention is: during 15 running of Z axis servomotor, the encoder 14 being arranged on Z axis servomotor 15 lower end motor shaft 15-2 is started working, the operating state to host computer feedback data with control Z axis servomotor 15, due to the internal tooth of Synchronous Transmission driving gear 19 and the engagement of the transmission external tooth 15-1-1 on Z axis servomotor 15, therefore, the output shaft 15-1 run-in synchronism of Synchronous Transmission driving gear 19 and Z axis servomotor 15, and drive synchronous gear driving-belt 7, Synchronous Transmission driven gear 53, three turn-screw axles 54 carry out run-in synchronism, because buckleing 61-1 with the spiral shell on ball screw 61, the turn-screw 54-1 on turn-screw axle 54 coordinates, therefore, Z axis movable bracket 59 moves up and down along turn-screw axle 54, be that Z axis servomotor 15 rotatablely moving of output are converted into the rectilinear motion of ball screw 61, realize Z axis movable bracket 59 along Z-direction rectilinear motion up or down.

Claims

One kind can force balance state Z-axis lifting mechanism, described Z-axis lifting mechanism comprises lower mount pad (1), Z axis drive set component (2), pre-bearing up pulley supporting mechanism (3), synchronous gear driving-belt (7), screw transmission mechanism (8), upper mounting cover (9), two connecting plates (6), three lead-screw drive mechanisms (4), Z axis drive set component (2) comprises Z axis motor cabinet (10), encoder positioning pipe (12), encoder (14), Z axis servomotor (15), the friction type brake (17), Synchronous Transmission driving gear (19) and connecting plate (20), it is characterized in that: the upper end of described Z axis servomotor (15) axle is output shaft (15-1), lower end is motor shaft (15-2), described Z axis servomotor (15) is arranged in Z axis motor cabinet (10), and the output shaft (15-1) of Z axis servomotor (15) is positioned at the outside of Z axis motor cabinet (10), the upper end of output shaft (15-1) is provided with transmission external tooth (15-1-1), described the friction type brake (17) and Synchronous Transmission driving gear (19) are arranged on the output shaft (15-1) of Z axis servomotor (15) from the bottom to top successively, and the center internal tooth of Synchronous Transmission driving gear (19) and transmission external tooth (15-1-1) engagement, connecting plate (20) is arranged on the end face of Synchronous Transmission driving gear (19), described encoder (14) is arranged in Z axis motor cabinet (10), and encoder (14) is arranged on the motor shaft (15-2) on Z axis servomotor (15), encoder positioning pipe (12) is arranged on Z axis motor cabinet (10) outside, and encoder positioning pipe (12) is arranged between the elasticity spacer (14-1) and the flange of Z axis motor cabinet (10) lower end on encoder (14), pre-bearing up pulley supporting mechanism (3) comprises pretension wheeling supporting frame (24), pretension wheeling supporting frame upper cover (25), three pretension wheel travelling carriage mechanisms (27), pretension wheeling supporting frame upper cover (25) is arranged on the upper surface of pretension wheeling supporting frame (24), three pretensions wheel travelling carriage mechanisms (27) are uniform to be arranged on the upper surface of pretension wheeling supporting frame upper cover (25), and each pretension wheel travelling carriage mechanism (27) is arranged on pretension wheeling supporting frame upper cover (25), each pretension wheel travelling carriage mechanism (27) comprises pre-bearing up pulley locating piece outside plate (31), pre-bearing up pulley locating piece (33), pre-bearing up pulley positioning sliding block (34), pre-bearing up pulley rotating turret back shaft (35), pre-bearing up pulley rotating turret (37), two thrust jackscrews (28), two locking nuts (29) and two pretension wheel mechanisms (38), the upper surface of pre-bearing up pulley locating piece (33) is provided with T-slot (33-1), the lower end of pre-bearing up pulley positioning sliding block (34) is provided with the T shape head (34-1) matching with T-slot (33-1), T shape head (34-1) coordinates installation with T-slot (33-1), pre-bearing up pulley locating piece outside plate (31) is arranged on the outside end face of pre-bearing up pulley locating piece (33), two thrust jackscrews (28) are threaded with the screw (3-1) on pre-bearing up pulley locating piece outside plate (31) by locking nut (29), the end face of screw (3-1) and T shape head (34-1) over against, the upper rotating turret mounting groove (34-2) that is provided with towards the side at Z axis center of pre-bearing up pulley positioning sliding block (34), the pre-bearing up pulley positioning sliding block (34) of rotating turret mounting groove (34-2) upside is provided with rotating shaft unthreaded hole (34-3), the pre-bearing up pulley positioning sliding block (34) of rotating turret mounting groove (34-2) downside is provided with rotating shaft screwed hole (34-4), pre-bearing up pulley rotating turret (37) is arranged in rotating turret mounting groove (34-2), pre-bearing up pulley rotating turret back shaft (35) is threaded with rotating shaft screwed hole (34-4) through rotating shaft unthreaded hole (34-3) and pre-bearing up pulley rotating turret (37), in two symmetrical dome portions on pre-bearing up pulley rotating turret (37), be separately installed with pretension wheel mechanism (38), and the pretension wheel shaft (39) on pretension wheel mechanism (38) is arranged in the shrinkage pool (37-1) on the pre-bearing up pulley rotating turret (37) corresponding with it, each lead-screw drive mechanism (4) comprises lower bearing baffle ring (44), lower circlip for shaft (45), lower deep groove ball bearing (46), thrust shaft block (47), thrust bearing (49), thrust bearing flap (50), Synchronous Transmission driven gear (53), turn-screw axle (54), upper bearing (metal) baffle ring (56), upper deep groove ball bearing (57), upper circlip for shaft (58), the top of described turn-screw axle (54) is turn-screw (54-1), the bottom of described turn-screw axle (54) is optical axis (54-2), and it is upper that Synchronous Transmission driven gear (53) is arranged on optical axis (54-2), upper bearing (metal) baffle ring (56), upper deep groove ball bearing (57) and upper circlip for shaft (58) are arranged on the upper end of turn-screw axle (54) from the bottom to top successively, thrust bearing flap (50), thrust bearing (49), thrust shaft block (47), lower deep groove ball bearing (46), lower circlip for shaft (45) and lower bearing baffle ring (44) are arranged on the lower end of turn-screw axle (54) from top to bottom successively, described screw transmission mechanism (8) comprises Z axis movable bracket (59) and three ball screws (61), Z axis movable bracket (59) is by spider (59-1) and three screw brackets (59-2), three screw brackets (59-2) are along the uniform setting of outer surface of spider (59-1), the outside end face of each screw bracket (59-2) is provided with screw installing hole (59-2-1), in each screw installing hole (59-2-1), a ball screw (61) is housed, the place, axle center of each ball screw (61) is provided with the spiral shell coordinating with turn-screw (54-1) and buckles (61-1), upper mounting cover (9) and lower mount pad (1) are up and down over against setting, on the end face of lower mount pad (1), the place of keeping to the side is provided with three lower bearing installing holes (1-1) along same circumference uniform distribution, on the end face of upper mounting cover (9), along same circumference uniform distribution, be provided with three upper bearing (metal) installing holes (9-1), and three upper bearing (metal) installing holes (9-1) and three lower bearing installing holes (1-1) one by one over against, Z axis drive set component (2), pre-bearing up pulley supporting mechanism (3), synchronous gear driving-belt (7), screw transmission mechanism (8), two connecting plates (6) and three lead-screw drive mechanisms (4) are all arranged between mounting cover (9) and lower mount pad (1), Z axis motor cabinet (10) is connected with lower mount pad (1), pretension wheeling supporting frame (24) is sleeved on Z axis drive set component (2), and pretension wheeling supporting frame (24) is connected with lower mount pad (1), three lead-screw drive mechanisms (4) are arranged between upper mounting cover (9) and lower mount pad (1) along same circumference uniform distribution, the center-side (7-1) of synchronous gear driving-belt (7) is sleeved on Synchronous Transmission driving gear (19), three outboard ends (7-2) of synchronous gear driving-belt (7) are set on three Synchronous Transmission driven gears (53), six pretension wheel mechanisms (38) on pre-bearing up pulley supporting mechanism (3) paste on the flank of tooth of Synchronous Transmission driving gear (19), Z axis movable bracket (59) is arranged on the top of pre-bearing up pulley supporting mechanism (3), and three the ball screws (61) on pre-bearing up pulley supporting mechanism (3) are threaded with three turn-screws (54-1) respectively, lower deep groove ball bearing (46) on each lead-screw drive mechanism (4) is arranged in the corresponding lower bearing installing hole (1-1) of lower mount pad (1), upper deep groove ball bearing (57) on each lead-screw drive mechanism (4) is arranged in corresponding upper bearing (metal) installing hole (9-1), two connecting plates (6) are symmetrical arranged with the axial line of Z axis servomotor (15).
2. a kind of Z-axis lifting mechanism that can force balance state according to claim 1, it is characterized in that: each pretension wheel mechanism (38) comprises pretension wheel shaft (39), pre-bearing up pulley (41), circlip for shaft (42) and two pretension wheel bearings (40), described on the inner chamber of pre-bearing up pulley (41) recessed edge place a pretension wheel bearing (40) is respectively installed, pre-bearing up pulley (41) is arranged on pretension wheel shaft (39), and circlip for shaft (42) is installed in the groove of pretension wheel shaft (39) upper end that is exposed at pretension wheel (41) upper surface outward.