CN102200181B - Z-axis transmission structure - Google Patents
Z-axis transmission structure Download PDFInfo
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- CN102200181B CN102200181B CN201110062758.4A CN201110062758A CN102200181B CN 102200181 B CN102200181 B CN 102200181B CN 201110062758 A CN201110062758 A CN 201110062758A CN 102200181 B CN102200181 B CN 102200181B
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Abstract
The invention relates to a Z-axis transmission structure. A triangular support sliding sleeve (6) and three sets of LF-type linear roll ball spline shafts/linear roll ball bushing combinations (3) are used to replace a vertical post and serve as a main body support structure. Since the LF-type linear roll ball spline shafts/linear roll ball bushing combinations (3) have higher transmission precision and are uniformly distributed in the circumference at an angle of 120 degrees, the triangular support sliding sleeve (6) only uniformly bears the weight of a T-axis mechanism and an R-axis mechanism, cannot generate an extra turning torque due to non-uniform applied force, and the stress state is greatly improved to make the Z-axis transmission structure more reasonable.
Description
Technical field
The present invention relates in semi-conductor silicon chip transferring robot manufacture field, a kind ofly compare with upright post type Z-axis transmission structure, have higher transmission accuracy, driven load at circumference uniform distribution, lightweight, volume is little, joint space-efficient triangle supporting Z-axis transmission structure.
Background technique
In the Z-axis transmission structure of wafer-handling robot, domestic most use upright post type Z-axis transmission structure, is used spherical guide as the motion benchmark of Z-axis transmission, spherical guide is arranged on the reference level of column.But this drive mechanism exists following shortcoming: the one, and structural stress state is bad.Because the total weight of T axle and R axle all passes to spherical guide by T axle supporting slider with the form of overhang, spherical guide is outside the gravity normally bearing, also additionally bear very large turning torque, make spherical guide produce larger microdeformation, gently motion-affecting flexibility, heavy shorten working life of spherical guide.The 2nd, between attachment face and lateral register face due to spherical guide, the installing up and down between locating face, all exist complicated shaped position tolerance between spherical guide attachment face and the reference for installation of ball screw of column, therefore column processing technology is complicated, yield rate is lower, and processing cost is high.The 3rd, because the weight of column is generally all at tens kilograms, face is arranged on the side direction in cabinet, inevitably causes crank, easily makes main frame produce and topples.The 4th, because area of contact between the attachment face up and down of column and the upper lower installation board of main frame is very large, make it when assembling, be difficult for adjusting, waste time and energy.
Summary of the invention
The object of the present invention is to provide a kind of rational in infrastructure, have higher transmission accuracy, driven load at circumference uniform distribution, lightweight, volume is little, joint space-efficient triangle supporting Z-axis transmission structure.
Goal of the invention of the present invention is achieved in that a kind of Z-axis transmission structure, comprises lower fitting seat 1, Z axis combination of drive means 2, LF type straight-line ball splined shaft/straight-line ball lining combination 3, flexible coupling 4, ball screw 5, three-support sliding sleeve 6, ball wire female component 7, T axis mechanism combination 8, upper mounting cover 9 etc.The feature of the Z-axis transmission structure of described highi degree of accuracy, equal load is: use three-support sliding sleeve 6 and three cover LF type straight-line ball splined shaft/straight-line ball linings combinations 3 to substitute columns.Because LF type straight-line ball splined shaft/straight-line ball lining combination 3 has very high transmission accuracy, and in circumference is installed, be 120 ° uniform, therefore make 6 of three-support sliding sleeves bear equably the weight of T axle and R axis mechanism, and can not produce extra turning torque because of unbalance stress, improved greatly stress, made Z-axis transmission structure more reasonable.
3 LF type straight-line ball splined shafts 3 are arranged in the mounting hole of lower fitting seat 1, and fastening in the counter sink of lower fitting seat 1 is screwed into the screw of spline axle head with fastening screw trip bolt.
3 LF type straight-line ball lining combinations 3 are packed in the mounting hole of three-support sliding sleeve 6, and tighten and put in place with fastening screw trip bolt.Again ball wire female component 7 is packed in the matching hole of three-support sliding sleeve 6, with fastening screw trip bolt, tighten fastening.Finally ball screw 5 is screwed in to ball wire female component 7 interior stand-by.
Z axis combination of drive means 2 is arranged on to the relevant position of lower fitting seat 1, and the counterbore by lower fitting seat 1 connects with Z axis combination of drive means 2 with fastening screw trip bolt fastening.Then at the output terminal of Z axis combination of drive means 2, flexible coupling 4 is installed.
The three-support sliding bush combination 6 that 3 LF type straight-line ball lining combinations 3 and ball wire female component 7, ball screw 5 are housed is contained on 3 LF type straight-line ball splined shafts 3, and the lower end of ball screw 5 is packed in the hole of flexible coupling 4, with Cock screw, tighten fastening.
After the positioning hole of 3 LF type straight-line ball splined shaft 3 upper end positioning cylinders and upper mounting cover 9 is aligned, with fastening screw trip bolt, by the counterbore on upper mounting cover 9, the screw that is screwed into axle head on LF type straight-line ball splined shaft 3 is interior fastening.Then T axis mechanism combination 8 is installed.As needed, adjust, unclamp fastening screw trip bolt, to corresponding spline axle head, be encased inside certain thickness pad, then after fastening screw trip bolt is tightened.
If the now motor shaft of Z axis combination of drive means 2 rotation, moment drives ball screw 5 rotations by coupling 4, drives ball wire female component 7 to make upper and lower straight line motion.Ball screw 5 drives straight-line ball lining along LF type straight-line ball splined shaft 3 moving linearlies by three-support sliding sleeve 6.
The Z-axis transmission structure of a kind of highi degree of accuracy of the present invention, equal load, tool has the following advantages:
1, compare with upright post type Z-axis transmission structure, owing to using three-support sliding sleeve and three cover LF type straight-line ball splined shaft/straight-line ball lining combination replacement columns, and the combination of LF type straight-line ball splined shaft/straight-line ball lining has very high transmission accuracy, and in circumference is installed, be 120 ° uniform, therefore the weight that makes three-support sliding sleeve only bear equably T axle and R axis mechanism, and can not produce extra turning torque because of unbalance stress, improved greatly stress, made Z-axis transmission structure more reasonable.
2, very complicated owing to having cancelled manufacturing process, the column that difficulty of processing is very high, use the highi degree of accuracy LF type straight-line ball splined shaft/straight-line ball lining combination that can purchase instead on market, as long as lower fitting seat, on the corresponding installation position of mounting cover and 3 matching holes of three-support sliding sleeve carry out same work step fine finishing, can guarantee assembly precision.Therefore effectively reduce cost.
3, owing to having cancelled the heavier column of weight, and load is along even circumferential distribution, has corrected the crank problem that column easily produces, and makes main frame steadily of centre of gravity.
4,, because the upper lower shaft end diameter of LF type straight-line ball splined shaft wants little many compared with the attachment face up and down of column, make it when assembling, can use adjustment pad to adjust, so adjustment process is relatively simple.
Accompanying drawing explanation
Fig. 1 is the stereogram of the Z-axis transmission structure of a kind of highi degree of accuracy of the present invention, equal load.
In Fig. 1, concrete numeral: fitting seat, the combination of 2-Z axial brake device, the combination of 3-LF type straight-line ball splined shaft/straight-line ball lining, 4-flexible coupling, 5-ball screw, 6-three-support sliding sleeve, 7-ball wire female component, the combination of 8-T axis mechanism, the upper mounting cover of 9-etc. under 1-.
Embodiment
The invention will be further described by reference to the accompanying drawings:
Shown in Fig. 1, the Z-axis transmission structure of a kind of highi degree of accuracy, equal load comprises lower fitting seat 1, Z axis combination of drive means 2, LF type straight-line ball splined shaft/straight-line ball lining combination 3, flexible coupling 4, ball screw 5, three-support sliding sleeve 6, ball wire female component 7, T axis mechanism combination 8, upper mounting cover 9 etc.
The feature of the Z-axis transmission structure of a kind of highi degree of accuracy, equal load is: use three-support sliding sleeve 6 and three cover LF type straight-line ball splined shaft/straight-line ball linings combinations 3 to substitute columns.Because LF type straight-line ball splined shaft/straight-line ball lining combination 3 has very high transmission accuracy, and in circumference is installed, be 120 ° uniform, therefore make 6 of three-support sliding sleeves bear equably the weight of T axle and R axis mechanism, and can not produce extra turning torque because of unbalance stress, improved greatly stress, made Z-axis transmission structure more reasonable.
3 LF type straight-line ball splined shafts 3 are arranged in the mounting hole of lower fitting seat 1, and fastening in the counter sink of lower fitting seat 1 is screwed into the screw of spline axle head with fastening screw trip bolt; 3 LF type straight-line ball lining combinations 3 are packed in the mounting hole of three-support sliding sleeve 6, and tighten and put in place with fastening screw trip bolt.Again ball wire female component 7 is packed in the matching hole of three-support sliding sleeve 6, with fastening screw trip bolt, tighten fastening.Finally ball screw 5 is screwed in to ball wire female component 7 interior stand-by; Z axis combination of drive means 2 is arranged on to the relevant position of lower fitting seat 1, and fastening by counterbore and the Z axis combination of drive means 2 of lower fitting seat 1 with fastening screw trip bolt.Then at the output terminal of Z axis drive unit 2, flexible coupling 4 is installed.Three-support sliding sleeve 6 combinations that 3 LF type straight-line ball lining combinations 3 and ball screw 7, ball screw 5 are housed are contained on 3 LF type straight-line ball splined shafts 3, and the lower end of ball screw 5 is packed in the hole of flexible coupling 4, with Cock screw, tighten fastening.After the positioning hole of 3 LF type straight-line ball splined shaft 3 upper end positioning cylinders and upper mounting cover 9 is aligned, with fastening screw trip bolt, by the counterbore on upper mounting cover 9, the screw that is screwed into axle head on LF type straight-line ball splined shaft 3 is interior fastening.Then T axis mechanism combination 8 is installed.As needed, adjust, unclamp fastening screw trip bolt, to corresponding spline axle head, be encased inside certain thickness pad, then after fastening screw trip bolt is tightened.
If the now motor shaft of Z axis combination of drive means 2 rotation, moment drives ball screw 5 rotations by coupling 4, drives 7 of ball screw groups to make upper and lower straight line motion.Ball screw 7 drives straight-line ball lining 3 along LF type straight-line ball splined shaft 3 moving linearlies by three-support sliding sleeve 6.
Claims (2)
1. a Z-axis transmission structure, comprises lower fitting seat (1), Z axis combination of drive means (2), the combination of LF type straight-line ball splined shaft/straight-line ball lining (3), flexible coupling (4), ball screw (5), three-support sliding sleeve (6), ball wire female component (7), the combination of T axis mechanism (8), upper mounting cover (9); It is characterized in that: described Z-axis transmission structure is used three-support sliding sleeve (6) and three cover LF type straight-line ball splined shaft/straight-line ball lining combinations (3) as main body supporting structure; Described LF type straight-line ball splined shaft/straight-line ball lining combination (3) install on circumference, be 120 ° uniform; LF type straight-line ball splined shaft in described 3 LF type straight-line ball splined shaft/straight-line ball linings combinations (3) is arranged in the mounting hole of lower fitting seat (1), and fastening in the counter sink of lower fitting seat (1) is screwed into the screw of spline axle head with fastening screw trip bolt; LF type straight-line ball lining combination in described 3 LF type straight-line ball splined shaft/straight-line ball linings combinations (3) packs in the mounting hole of three-support sliding sleeve (6), and tightens and put in place with fastening screw trip bolt; Described ball wire female component (7) packs in the matching hole of three-support sliding sleeve (6), tightens fastening with fastening screw trip bolt; Described ball screw (5) screws in ball wire female component (7); Described Z axis combination of drive means (2) is arranged on the relevant position of lower fitting seat (1), and fastening by counterbore and the Z axis combination of drive means (2) of lower fitting seat (1) with fastening screw trip bolt; The output terminal of described Z axis drive unit (2), installs flexible coupling (4); Three-support sliding sleeve (6) combination of the LF type straight-line ball lining combination in described 3 LF type straight-line ball splined shaft/straight-line ball linings combinations (3) and ball screw (7), ball screw (5) is contained on the LF type straight-line ball splined shaft in 3 LF type straight-line ball splined shaft/straight-line ball lining combinations (3), and the lower end of ball screw (5) is packed in the hole of flexible coupling (4), with Cock screw, tighten fastening; After LF type straight-line ball splined shaft upper end positioning cylinder in described 3 LF type straight-line ball splined shaft/straight-line ball linings combinations (3) and the positioning hole of upper mounting cover (9) align, with fastening screw trip bolt, by the counterbore on upper mounting cover (9), the screw that is screwed into axle head on the LF type straight-line ball splined shaft in LF type straight-line ball splined shaft/straight-line ball lining combination (3) is interior fastening; T axis mechanism combination (8) is finally installed.
2. Z-axis transmission structure according to claim 1, it is characterized in that: lower fitting seat (1) is installed the location and installation hole of LF type straight-line ball splined shaft in LF type straight-line ball splined shaft/straight-line ball lining combination (3), the location and installation hole that upper mounting cover (9) is installed LF type straight-line ball splined shaft in LF type straight-line ball splined shaft/straight-line ball lining combination (3), and 3 matching holes of three-support sliding sleeve (6), be arranged on and on same positioning fixture, carry out same work step fine finishing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110062758.4A CN102200181B (en) | 2011-03-16 | 2011-03-16 | Z-axis transmission structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110062758.4A CN102200181B (en) | 2011-03-16 | 2011-03-16 | Z-axis transmission structure |
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| Publication Number | Publication Date |
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| CN102200181A CN102200181A (en) | 2011-09-28 |
| CN102200181B true CN102200181B (en) | 2014-02-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110062758.4A Expired - Fee Related CN102200181B (en) | 2011-03-16 | 2011-03-16 | Z-axis transmission structure |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103192275A (en) * | 2012-01-06 | 2013-07-10 | 沈阳新松机器人自动化股份有限公司 | Upright post structure |
| CN102623375B (en) * | 2012-03-15 | 2014-03-05 | 哈尔滨工业大学 | Z-axis lifting mechanism with stress state balancing function |
| CN103196685B (en) * | 2013-03-04 | 2015-04-01 | 重庆大学 | Two-wheel differential wheel type mobile robot experimental platform with adjustable gravity center |
| CN103846931B (en) * | 2014-02-21 | 2016-03-30 | 上海大学 | Detachable tubular supporting construction |
| CN106886228B (en) * | 2017-04-29 | 2018-08-28 | 吉林大学 | A kind of 3 Shaft angle micro-adjusting mechanisms |
| CN108858120B (en) * | 2018-07-12 | 2021-04-02 | 北京理工大学 | Parallel type compliant wheel foot device for wheel foot robot |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1779936A (en) * | 2005-10-19 | 2006-05-31 | 哈尔滨工业大学 | Silicon wafer carrying robot with two-dimensional parallel driven |
| CN1970246A (en) * | 2005-11-23 | 2007-05-30 | 沈阳新松机器人自动化股份有限公司 | Planar multiple-articulation robot |
| CN101436562A (en) * | 2008-12-12 | 2009-05-20 | 哈尔滨工业大学 | Large elevating magnification ratio double-arm crystal transmission manipulator |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001157974A (en) * | 1999-11-30 | 2001-06-12 | Assist Japan Kk | Double arm type substrate carrying arm |
| JP5078738B2 (en) * | 2008-05-07 | 2012-11-21 | 新電元工業株式会社 | Robot for workpiece transfer |
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2011
- 2011-03-16 CN CN201110062758.4A patent/CN102200181B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1779936A (en) * | 2005-10-19 | 2006-05-31 | 哈尔滨工业大学 | Silicon wafer carrying robot with two-dimensional parallel driven |
| CN1970246A (en) * | 2005-11-23 | 2007-05-30 | 沈阳新松机器人自动化股份有限公司 | Planar multiple-articulation robot |
| CN101436562A (en) * | 2008-12-12 | 2009-05-20 | 哈尔滨工业大学 | Large elevating magnification ratio double-arm crystal transmission manipulator |
Non-Patent Citations (2)
| Title |
|---|
| JP特开2001-157974A 2001.06.12 |
| JP特开2009-269122A 2009.11.19 |
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