CN103972136B - Wafer transport robot - Google Patents
Wafer transport robot Download PDFInfo
- Publication number
- CN103972136B CN103972136B CN201310047597.0A CN201310047597A CN103972136B CN 103972136 B CN103972136 B CN 103972136B CN 201310047597 A CN201310047597 A CN 201310047597A CN 103972136 B CN103972136 B CN 103972136B
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- CN
- China
- Prior art keywords
- screw rod
- top board
- column
- circuit boards
- rolling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a kind of wafer transport robot, comprise: a pedestal has top board, base plate, additional circuit boards, portable plate and support column；Top board is linked by support column with base plate, and top board has a perforating, additional circuit boards and portable plate between top board and base plate, and portable plate is provided with a supporting part and three stackers；One is fixed on supporting part and is arranged in the column of perforating；One ball screw comprises screw rod and the nut linked with one stacker, and screw rod, nut are provided with relative rolling channel, rolling groove, are provided with rolling member between rolling channel and rolling groove；Two linear bearings comprise rail axle and ring-like slide block, and ring slider is provided with interior rolling groove, is provided with rolling member between interior rolling groove and rail axle；Two ring sliders link with other two stackers respectively；One is fixed on additional circuit boards and the power source being connected with screw rod；By the angle configurations relation of two linear bearings Yu ball screw, to reduce the produced moment when driving column, and the running precision of column is made to promote.
Description
Technical field
The present invention relates to a kind of industrial robot, refer in particular to a kind of wafer conveying robot being applied to semiconductor industry
People.
Background technology
In manufacture of semiconductor in order to reduce human cost and improve output, utilize multiple robot to assist moving object,
And mechanism's such as Patent Publication TaiWan, China 2009-500865 patent of existing common wafer transport robot, robot
Pedestal in there is drive division, drive division is provided with a king-post, and this drive division can drive this king-post to rotate, and this drive division is respectively
Make to be connected with a ball screw and two linear slide rails, and when driving this ball screw to run by linear drives portion, drive this to drive
Dynamic portion makees Z-axis direction linear translation, and two these linear slide rails provide the function guided；
And aforementioned prior art there are problems with point:
Because this ball screw is in the same plane with the relative position of linear slide rail, therefore the power that linear slide rail is born
Square influences whether more greatly and also smooth degree when ball screw runs, and the configuration the most therefore planting pattern makes linear slide rail to use
Two, therefore add processing and the cost of parts of pedestal, also extend the group vertical correction time-histories of ball screw and linear slide rail,
There is necessity of improvement in fact.
In view of this, the present inventor is perfect caused many for not attaining in the design of above-mentioned wafer transport robot structure
Disappearance and inconvenience, and deeply conceive, and actively research improvement has a fling at and develops and design this case.
Summary of the invention
It is an object of the invention to provide one to be easy to assemble and rigidity preferably wafer transport robot, it can reduce
Produced moment when driving this column, and make the running precision of this column promote；And reduce assembly cost and promote quality.
In order to reach above-mentioned purpose, the solution of the present invention is:
A kind of wafer transport robot, it comprises:
One pedestal, has a top board, base plate, additional circuit boards, portable plate and support column；By this between this top board and base plate
Support column links, and this top board has a perforating, and this additional circuit boards and portable plate are between this top board and base plate, and this adds
Circuit board is fixed on this base plate setting at a distance with this base plate, this portable plate between this additional circuit boards and top board it
Between, this portable plate is provided with a supporting part and three stackers, this stacker with equal angles array around this supporting part；One
Column, it is strip structure, and this column is fixed on this supporting part and is arranged in again this perforating, and this perforating is past relatively
Multiple mobile；One ball screw, comprises: a screw rod and a nut, and this screw rod extends to strip structure along a direction, defines this and prolongs
Stretching direction is direction of principal axis, and the axial two ends of this screw rod are respectively defined as the first end and the second end, and this first end is hubbed at this
Top board, this second end is hubbed at this additional circuit boards, and it is provided with spiral helicine rolling channel；This nut is provided with and supplies this screw rod to wear
Through hole, the inner edge surface of this through hole is provided with the rolling groove of this rolling channel relatively, is provided with multiple between this rolling channel and rolling groove
Rolling member；This nut links with wherein this stacker；Two linear bearings, it comprises respectively: a rail axle and a ring-like slide block, should
Rail axle extends to strip structure along a direction, and defining this bearing of trend is direction of principal axis, and the axial two ends of this rail axle are respectively
Being defined as the first end and the second end, this first end is fixedly arranged on this top board, and this second end is fixedly arranged on this additional circuit boards；This annular is sliding
Block is provided with multiple interior rolling groove arranged towards direction of principal axis, is provided with multiple rolling member between this interior rolling groove and this rail axle；Two these lines
Property bearing ring slider respectively with other two these stackers link；One power source, it is fixed on this additional circuit boards, this power
Source is connected with the second end of this screw rod and drives this screw rod to rotate；Wherein, respectively angle between this stacker is 120 degree；This spiral shell
Bar drives via this power source when rotating, and this nut drives this portable plate displacement, and this ring slider is relative to this rail axis linear position
Move, and drive this column relative to this perforating displacement.
Above-mentioned column is provided with an accommodation space, and this power source is arranged relative to this accommodation space, and this column shrinks in this pedestal
During portion, this power source has local can be placed in this accommodation space.
After using said structure, wafer transport robot of the present invention, when this power source starts, by this belt by power
It is transferred to the belt pulley of this second end, and drives this screw rod to rotate；This screw rod drives via this power source when rotating, this nut band
This portable plate displacement dynamic, and this ring slider is relative to this rail axis linear displacement, and drive this column relative to this perforating displacement, enter
And reach to drive the purpose of this resetting of post.
The following description present invention relatively commonly uses in place of improving and practical way:
1, the present invention is by the angle configurations relation of two these linear bearings Yu ball screw, to reduce when driving this column
Produced moment, and make the running precision of this column promote.
2, when this column shrinks in this base interior, this power source has local can be placed in this accommodation space and accommodating hole,
So, the volume that this pedestal is overall can be reduced, and simplify the structure design of this pedestal.
Accompanying drawing explanation
Fig. 1 is wafer transport robot constitutional diagram of the present invention；
Fig. 2 is the column drive mechanism axonometric chart of wafer transport robot of the present invention；
Fig. 3 is wafer transport robot top view of the present invention；
Fig. 3 A is the enlarged drawing in Fig. 3 at I；
Fig. 4, Fig. 5 are the straight to sectional view of wafer transport robot operating state of the present invention.
Main element symbol description
1 pedestal 11 top board 111 perforating
12 base plate 13 support column 14 additional circuit boards
15 spacer 16 portable plate 161 stackers
162 supporting part 3 linear bearing 31 rail axles
31A the first end 31B the second end 32 ring slider
Rolling groove 43,33 rolling member 4 ball screw in 321
41 screw rod 41A the first end 41B the second ends
411 rolling channel 42 nut 421 through holes
422 rolling groove 5 column 51 accommodation spaces
52 drive motor 6 fixture 7 bearing block
8 belt pulley 9 power source 91 axle center
X belt W1, W2, W3 angle A direction of principal axis.
Detailed description of the invention
In order to technical scheme is explained further, below by specific embodiment, the present invention is explained in detail
State.
First, referring to Fig. 1 to Fig. 5 is a preferred embodiment of the present invention, and the present invention is a kind of wafer transport robot, bag
Contain:
One pedestal 1, has a top board 11, base plate 12, additional circuit boards 14, portable plate 16 and support column 13, this top board 11
And being linked by this support column 13 between base plate 12, make to keep a distance to arrange between this top board 11 and base plate 12, this top board 11 has
Have a perforating 111, this additional circuit boards 14 and portable plate 16 between this top board 11 and base plate 12, this additional circuit boards 14
Linking with this base plate 12 by multiple spacers 15, make this additional circuit boards 14 and this base plate 12 setting at a distance, this is lived
Dynamic plate 16 is between this additional circuit boards 14 and top board 11, and this portable plate 16 is provided with a supporting part 162 and three stackers
161, with equal angles W1, W2, W3 array in this supporting part 162 around, and this angle W1, W2, W3 are optimal for this stacker 161
Being about 120 degree of each differential seat angles can be positive and negative 3 degree；
One column 5, it is strip structure, and this column 5 is fixed on this supporting part 162 and is arranged in again this perforating
111, and can relatively move back and forth by this perforating 111, and this column 5 provides multiple driving motor 52 to arrange wherein, and it is positioned at the end
Portion is provided with an accommodation space 51, as shown in Figure 4；
One ball screw 4, comprises: screw rod 41 and a nut 42, and this screw rod 41 extends to strip structure along a direction,
Defining this bearing of trend is direction of principal axis A, and the two ends of the direction of principal axis A of this screw rod 41 are respectively defined as the first end 41A and the second end
41B, this first end 41A are hubbed at this top board 11 by a bearing block 7, and it is attached that this second end 41B is hubbed at this by a bearing block 7
Adding circuit board 14, this screw rod 41 is provided with spiral helicine rolling channel 411；This nut 42 is provided with the through hole worn for this screw rod 41
421, the inner edge surface of this through hole 421 is provided with the rolling groove 422 of this rolling channel 411 relatively, this rolling channel 411 and rolling groove 422
Between be provided with multiple rolling member 43；This nut 42 links with wherein one this stacker 161；
Two linear bearings 3, it comprises respectively: rail axle 31 and a ring-like slide block 32, this rail axle 31 extends to along a direction
Strip structure, defining this bearing of trend is direction of principal axis A, and the two ends of the direction of principal axis A of this rail axle 31 are respectively defined as the first end 31A
And second end 31B, this first end 31A be fixedly arranged on this top board 11 by a fixture 6, this second end 31B is solid by a fixture 6
It is located at this additional circuit boards 14；This ring slider 32 is provided with multiple interior rolling groove 321 arranged towards direction of principal axis A, this interior rolling groove
Multiple rolling member 33 it is provided with between 321 and this rail axle 31；The ring slider 32 of two these linear bearings 3 respectively with other two these undertakings
Seat 161 links；
One power source 9, it is fixed on this additional circuit boards 14, and this power source 9 has an axle center 91 and is arranged in this additional electrical
Between road plate 14 and base plate 12, this axle center 91 is provided with a belt pulley 8, and the second end 41B of this screw rod 41 is also provided with a belt pulley
8, two these belt pulleys 8 link by a belt X, and when this power source 9 starts, by this belt X power is transferred to this
The belt pulley 8 of two end 41B, and drive this screw rod 41 to rotate；This screw rod 41 drives via this power source 9 when rotating, this nut 42
Drive this portable plate 16 displacement, and this ring slider 32 this rail axle 31 linear displacement relative, and this wears relatively to drive this column 5
Hole 111 displacement, and then reach to drive the purpose of this column 5 displacement.
Finally, what deserves to be explained is, power source 9 this accommodation space 51 relative of the present invention is arranged, therefore when this column 5 shrinks in
When this pedestal 1 is internal, this power source 9 has local can be placed in this accommodation space 51, so, can reduce this pedestal 5 entirety
Volume, and simplify the structure design of this pedestal.
The implementation feature of the present invention is described for clarity, and the following description present invention relatively commonly uses in place of improving and practical way:
1, by the angle configurations relation of two these linear bearings Yu ball screw, produced when driving this column to reduce
Moment, and make the running precision of this column promote.
2, when this column shrinks in this base interior, this power source has local can be placed in this accommodation space and accommodating hole,
So, the volume that this pedestal is overall can be reduced, and simplify the structure design of this pedestal.
Above-described embodiment and accompanying drawing the product form of the non-limiting present invention and style, any art common
Technical staff is suitably changed what it did or modifies, and all should be regarded as the patent category without departing from the present invention.
Claims (1)
1. a wafer transport robot, comprises: a pedestal, has a top board, base plate, portable plate, support column and an additional electrical
Road plate；Being linked by this support column between this top board and base plate, this top board has a perforating, and this portable plate is provided with a supporting part；
One column, it is strip structure, and this column is fixed on this supporting part and is arranged in again this perforating, and this is worn relatively
Apertured moves back and forth；One ball screw, comprises: a screw rod and a nut, and this screw rod extends to strip structure along a direction, fixed
This bearing of trend of justice is direction of principal axis, and the axial two ends of this screw rod are respectively defined as the first end and the second end, this first end pivot
Being located at this top board, the second end is pivoted with spiral helicine rolling channel；This nut is provided with the through hole worn for this screw rod, this through hole
Inner edge surface be provided with the rolling groove of relatively this rolling channel；
One power source, it is fixed on this additional circuit boards, and this power source is connected with the second end of this screw rod and drives this screw rod to revolve
Turn；It is characterized in that:
The additional circuit boards of this pedestal and portable plate between this top board and base plate, this additional circuit boards be fixed on this base plate,
And setting at a distance with this base plate, this portable plate is between this additional circuit boards and top board, and described portable plate is additionally provided with
Three stackers, this stacker with equal angles array around this supporting part；Described column is provided with an accommodation space, described
Power source is arranged relative to this accommodation space；Second end of described screw rod is hubbed at this additional circuit boards, described rolling channel and rolling
Being provided with multiple rolling member between groove, described nut links with wherein this stacker；
Described wafer transport robot also includes two linear bearings, and it comprises respectively: a rail axle and a ring-like slide block, this rail axle edge
One direction extends to strip structure, and defining this bearing of trend is direction of principal axis, and the axial two ends of this rail axle are respectively defined as
First end and the second end, the first end of this rail axle is fixedly arranged on this top board, and this rail axle second end is fixedly arranged on this additional circuit boards；This ring
Type slide block is provided with multiple interior rolling groove arranged towards direction of principal axis, is provided with multiple rolling member between this interior rolling groove and this rail axle；Two
The ring-like slide block of linear bearing links with other two stackers respectively；
Wherein, the angle between each stacker is 120 degree；This screw rod drives via this power source when rotating, and this nut drives should
Portable plate displacement, and this ring-like slide block is relative to this rail axis linear displacement, and drive this column relative to this perforating displacement, this column
When shrinking in this base interior, this power source has local can be placed in this accommodation space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310047597.0A CN103972136B (en) | 2013-02-06 | 2013-02-06 | Wafer transport robot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310047597.0A CN103972136B (en) | 2013-02-06 | 2013-02-06 | Wafer transport robot |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103972136A CN103972136A (en) | 2014-08-06 |
| CN103972136B true CN103972136B (en) | 2016-09-21 |
Family
ID=51241490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310047597.0A Active CN103972136B (en) | 2013-02-06 | 2013-02-06 | Wafer transport robot |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103972136B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10335413A (en) * | 1997-05-29 | 1998-12-18 | Dainippon Screen Mfg Co Ltd | Substrate treating apparatus |
| CN2463108Y (en) * | 2001-02-19 | 2001-12-05 | 上银科技股份有限公司 | High-load guiding actuating platform |
| CN1344194A (en) * | 1999-01-15 | 2002-04-10 | 阿西斯特技术公司 | Workpiece handling robot |
| CN102623375A (en) * | 2012-03-15 | 2012-08-01 | 哈尔滨工业大学 | Z-axis lifting mechanism with stress state balancing function |
| CN202357438U (en) * | 2011-11-01 | 2012-08-01 | 全冠(福建)机械工业有限公司 | Driving device for pull rod of bottle blowing machine |
-
2013
- 2013-02-06 CN CN201310047597.0A patent/CN103972136B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10335413A (en) * | 1997-05-29 | 1998-12-18 | Dainippon Screen Mfg Co Ltd | Substrate treating apparatus |
| CN1344194A (en) * | 1999-01-15 | 2002-04-10 | 阿西斯特技术公司 | Workpiece handling robot |
| CN2463108Y (en) * | 2001-02-19 | 2001-12-05 | 上银科技股份有限公司 | High-load guiding actuating platform |
| CN202357438U (en) * | 2011-11-01 | 2012-08-01 | 全冠(福建)机械工业有限公司 | Driving device for pull rod of bottle blowing machine |
| CN102623375A (en) * | 2012-03-15 | 2012-08-01 | 哈尔滨工业大学 | Z-axis lifting mechanism with stress state balancing function |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103972136A (en) | 2014-08-06 |
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