CN103573815B - Micropositioner and gas bearing - Google Patents
Micropositioner and gas bearing Download PDFInfo
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- CN103573815B CN103573815B CN201210270601.5A CN201210270601A CN103573815B CN 103573815 B CN103573815 B CN 103573815B CN 201210270601 A CN201210270601 A CN 201210270601A CN 103573815 B CN103573815 B CN 103573815B
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Abstract
The invention provides a micropositioner and a gas bearing. The micropositioner adopts a tile type static-pressure gas bearing to support and guide silicon slices or glass substrates on the micropositioner with high precision, a driving motor set is adopted to carry out micro stroke movement on a micromotion plate in Z, theta x, theta y and theta z directions. The tile type static-pressure gas bearing comprises a bearing fixed shaft and a plurality of tile block devices which are uniformly arranged around the fixed shaft. The tile block devices and the bearing fixed shaft ventilate to form a gas film, the tile block devices can move together with the micropositioner, and the manufactured gas film can also incline to play supporting and guiding roles.
Description
Technical field
The present invention relates to photoetching process, more particularly, to a kind of micropositioner and air-bearing.
Background technology
Litho machine micropositioner mainly carries silicon chip or glass substrate carries out the motion of Z, θ x, θ y, θ z micro travel, and carries out essence
Determine position, thus realizing the Real-time Focusing to silicon chip or glass substrate, levelling function.In order to reach high position precision, micropositioner
Carry out support, the guiding of silicon chip or glass substrate using air-bearing.
The air-bearing of micropositioner in prior art, uses one-dimensional rotation flexible piece and guides as air supporting, same to seasonal epidemic pathogens
Stream must enter gap between flexible piece and annulus stator through flexible piece, forms air film, air-film thickness unadjustable it is impossible to compensate
Manufacture, alignment error, and this air-bearing only have one-dimensional rotation flexibility it is impossible to meet the accurate of four-degree-of-freedom in radial direction
Positioning, and because gas channel is through different flexible pieces, the difference of each flexible piece sensitivity therefore can be caused.
Content of the invention
It is an object of the invention to provide a kind of micropositioner and air-bearing, with supporting silicon chip or glass substrate, and it is transported
Move and guided.
For solving above-mentioned technical problem, the present invention provides a kind of air-bearing, and it is arranged at the base of micropositioner and fine motion
Between plate, described fine motion plate can be Z, θ x, θ y, θ z and move to micro travel, and described air-bearing includes bearing dead axle and some
Tile fragment device, described bearing dead axle is fixedly installed on described base, and described fine motion plate is provided with an opening, described bearing dead axle
One end away from described base passes through described opening, and described some tile fragment device weeks are outside the excircle of described bearing dead axle
Side, described some tile fragment devices are all connected with described fine motion plate, and the direction of air film that described air-bearing produces and thickness can
Change with the change of described fine motion Board position.
Optionally, described some tile fragment devices all include tile fragment, the first joint, bearing, screw rod and fixed seat, described tile fragment
Near the shape of the described bearing dead axle side and the mating shapes of described bearing dead axle, described first joint is arranged at described
On tile fragment, the side away from bearing dead axle of described tile fragment is connected with described bearing, and described screw rod is arranged in described bearing
And be threaded connection with described bearing, described screw rod is fixed on described fine motion plate described fixed seat, and described screw rod is in institute
State and rotarily drive described tile fragment around the central shaft of its own in fixed seat and move along described central axis direction, reach described tile fragment with
Behind required gap between bearing dead axle, described bearing is connected to described fine motion plate.
Further, described tile fragment device also includes lock-screw, and described lock-screw is arranged in described bearing, is used for
Stop described screw rod rotation.
Further, described tile fragment device also includes hinge, and described tile fragment is connected with described bearing by described hinge.
Further, described hinge is flexible hinge.
Further described bearing passes through screw connection on described fine motion plate, and described bearing is provided with waist-shaped hole, described
Screw is placed in described waist-shaped hole, and described screw can move in described waist-shaped hole.
Optionally, described some tile fragment devices all include tile fragment, the first joint, bearing, fixed block and screw rod, described tile fragment
Near the shape of the side of described bearing dead axle and the mating shapes of described bearing dead axle, described first joint is arranged at institute
State on tile fragment, the side away from bearing dead axle of described tile fragment is connected with one end of described screw rod, and described screw rod is arranged in institute
State in fixed block and be threaded connection with described fixed block, described fixed block is arranged on described bearing, and described screw rod is in institute
State and rotarily drive described tile fragment around the central shaft of its own in fixed seat and move along described central axis direction, reach described tile fragment with
Behind required gap between bearing dead axle, described bearing is connected to described fine motion plate.
Further, described tile fragment device also includes nut, and described nut is used for locking described screw rod.
Further, the quantity of described nut is two, is separately positioned on the both sides of described fixed block, by described in two
Screw rod described in nut check.
Further, described screw rod is provided with bulb near one end of described tile fragment, and described tile fragment is near the one of described screw rod
Side is provided with the Internal Spherical Surface matching with described bulb, and described bulb is placed in described Internal Spherical Surface, and described tile fragment can be around described ball
The center of circle of head rotates freely without deviating from described screw rod.
Further, described tile fragment device also includes the second joint, and described second joint is arranged on described tile fragment, its with
One end of described tile fragment contact is communicated with described Internal Spherical Surface.
Further, described tile fragment device also includes briquetting, and described briquetting is fixed on the position on described tile fragment near bulb
Put, it is used for limiting the motion of described bulb, prevent described tile fragment from departing from described screw rod.
The present invention also provides a kind of micropositioner, and described micropositioner includes above-mentioned air-bearing, fine motion plate, base and drives electricity
Unit, described air-bearing is fixedly installed on described base, and described fine motion plate is by described motor group and described base
Connect, described motor group can drive described fine motion plate to be Z, θ x, θ y, θ z and move to micro travel.
Further, described motor group includes Z-direction motor and θ z motor, and described Z-direction motor and θ z motor are respectively provided with
Between described fine motion plate and described base.
Further, described motor group also includes gravity compensator, and described gravity compensator is arranged at described fine motion
Between plate and described base.
Further, the quantity of described Z-direction motor is three, and the quantity of described θ z motor is two, described gravity compensation
The quantity of device is three, and described θ z motor is symmetrically arranged in the both sides of described air-bearing, described three Z-direction motors and three weights
Force compensating device is all symmetrically arranged in triangular shape on two angles and the opposite side between described fine motion plate and described base.
Compared with prior art, the invention has the advantages that：
The present invention provides a kind of micropositioner and air-bearing, and this micropositioner is using a tile-type static-pressure air bearing to micropositioner
On silicon chip or glass substrate carry out high-precision support and guiding work, Z, θ x, θ are carried out to fine motion plate using motor group
Y, θ z moves to micro travel, and this tile-type static-pressure air bearing includes bearing dead axle and several tile fragment being evenly arranged around dead axle
Device, ventilation between described tile fragment device and described bearing dead axle forms air film, and described tile fragment device can be with described fine motion
Platform moves together, and the air film of manufacture also can tilt therewith to play the effect supporting and guiding.
Brief description
The invention will be further described below in conjunction with the accompanying drawings：
Fig. 1 is the structural representation of micropositioner provided in an embodiment of the present invention；
Fig. 2 is the structural representation of air-bearing provided in an embodiment of the present invention；
The structural representation of tile fragment device in the air-bearing that Fig. 3 provides for the embodiment of the present invention one；
The sectional view of tile fragment device in the air-bearing that Fig. 4 provides for the embodiment of the present invention one；
The structural representation of tile fragment device in the air-bearing that Fig. 5 provides for the embodiment of the present invention two；
The sectional view of tile fragment device in the air-bearing that Fig. 6 provides for the embodiment of the present invention two.
In Fig. 1 to Fig. 6,
1：Air-bearing；11：Bearing dead axle；12：Tile fragment device；121：Tile fragment；122：First joint；123：Bearing；
124：Screw rod；125：Fixed seat；126：Screw；127：Lock-screw；128：Hinge；129：Waist-shaped hole；121′：Tile fragment；122′：
First joint；123′：Bearing；124′：Screw rod；125′：Fixed block；126′：Screw；127′：Nut；128′：Bulb；129′：
Briquetting；2：Fine motion plate；21：Opening；3：Base；4：Motor group；41：Z-direction motor；42：θ z motor；43：Gravity compensator.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, micropositioner proposed by the present invention and air-bearing shafts are made further specifically
Bright.According to following explanation and claims, advantages and features of the invention will become apparent from.It should be noted that, accompanying drawing all adopts
The very form of simplification and all using non-accurately ratio, only in order to mesh that is convenient, lucidly aiding in illustrating the embodiment of the present invention
's.
The core concept of the present invention is, provides a kind of micropositioner and air-bearing, and this micropositioner is using a tile-type static pressure
Air-bearing carries out high-precision support and guiding work, using motor group pair to the silicon chip on micropositioner or glass substrate
Fine motion plate carries out Z, θ x, θ y, θ z and moves to micro travel, and this tile-type static-pressure air bearing includes bearing dead axle and several cincture is fixed
The tile fragment device that axle is evenly arranged, ventilation between described tile fragment device and described bearing dead axle forms air film, described tile fragment dress
Put and can move with described micropositioner, the air film of manufacture also can tilt therewith to play the effect supporting and guiding.
Refer to Fig. 1 to Fig. 6, Fig. 1 is the structural representation of micropositioner provided in an embodiment of the present invention；Fig. 2 is the present invention
The structural representation of the air-bearing that embodiment provides；Tile fragment device in the air-bearing that Fig. 3 provides for the embodiment of the present invention one
Structural representation；The sectional view of tile fragment device in the air-bearing that Fig. 4 provides for the embodiment of the present invention one；Fig. 5 is the present invention
The structural representation of tile fragment device in the air-bearing that embodiment two provides；The air-bearing shafts that Fig. 6 provides for the embodiment of the present invention two
Hold the sectional view of middle tile fragment device.
Embodiment one
Please emphasis with reference to Fig. 1, as shown in figure 1, the embodiment of the present invention provides a kind of micropositioner, described micropositioner includes air supporting
Bearing 1, fine motion plate 2, base 3 and motor group 4, described air-bearing 1 is fixedly installed on described base 3, described fine motion
Plate 2 is connected with described base 3 by described motor group 4, and described motor group 4 can drive described fine motion plate 2 to be Z, θ
X, θ y, θ z moves to micro travel, and the direction of air film that described air-bearing 1 produces and thickness can be with described fine motion plate 2 positions
Change and change.
Further, described motor group 4 includes 41, three gravity compensators 43 of three Z-direction motors and two θ z electricity
Machine 42, described Z-direction motor 41, gravity compensator 43 and θ z motor 42 may be contained between described fine motion plate 2 and described base 3,
And be rigidly connected with described base 3 with described fine motion plate 2, for driving fine motion plate 2 and its object to be above Z, θ x, θ y, θ z
Move to micro travel, described θ z motor 42 is symmetrically arranged in the both sides of described air-bearing 1, described three Z-direction motors 41 and three
Individual gravity compensator 43 is all symmetrically arranged in triangular shape on two angles and the opposite side between described fine motion plate 2 and described base 3,
Described three Z-direction motors 41 and three gravity compensators 43 are used for driving the side of fine motion plate 2 or entirety to move along Z-direction, make institute
State fine motion plate 2 can be Z, θ x, θ y to motion, described gravity compensator 43 can also play damping with buffering effect, prolong
The service life of this micropositioner long, described two θ z motors 42 when driving respectively along Y-axis two contrary directions to fine motion
Plate 2 applying power is so as to move along θ z direction.
Please emphasis with reference to Fig. 2, as shown in Fig. 2 the embodiment of the present invention also provides a kind of air-bearing 1, described air-bearing 1
Including bearing dead axle 11 and some tile fragment devices 12, described bearing dead axle 11 is fixedly installed on described base 3, described fine motion plate
2 are provided with an opening 21, and described bearing dead axle 11 passes through described opening 21, described some tile fragments away from one end of described base 3
Outside 12 weeks excircles located at described bearing dead axle 11 of device, described some tile fragment devices 12 are all connected with described fine motion plate 2,
Ventilate to form air film between described tile fragment device 12 and described bearing dead axle 11, this air film can support and guide micropositioner
Object on 2.
Please emphasis with reference to Fig. 3 and Fig. 4, as shown in Figure 3 and Figure 4, described some tile fragment devices 12 all include tile fragment 121, the
One joint 122, bearing 123, screw rod 124, fixed seat 125 and screw 126, described tile fragment 121 is near described bearing dead axle 11
The mating shapes of the bearing dead axle 11 of the shape of the side and described correspondence position, described first joint 122 is arranged at described
On tile fragment 121, the side away from bearing dead axle 11 of described tile fragment 121 is connected with described bearing 123, and described screw rod 124 is worn
It is threaded connection in described bearing 123 and with described bearing 123, described screw rod 124 is fixed on by described fixed seat 125
On described fine motion plate 2, described screw rod 124 can rotarily drive described watt around the central shaft of its own in described fixed seat 125
Block 12 moves along described central axis direction, after reaching required gap between described tile fragment 12 and bearing dead axle 11, by described
Seat 123 is connected to described fine motion plate 2 by screw 126, and described screw 126 is arranged on described bearing 123, described fine motion plate
2 correspondence position is provided with screwed hole corresponding with described screw 126.
Further, described tile fragment device 12 also includes lock-screw 127, and described lock-screw 127 is arranged at described
In seat 123, it is used for stoping described screw rod 124 from rotating.
Further, described tile fragment device 12 also includes hinge 128, described tile fragment 121 pass through described hinge 128 with described
Bearing 123 connects.
Further, described hinge 128 is flexible hinge.
Further, described bearing 123 is provided with waist-shaped hole 129, and described screw 126 is placed in described waist-shaped hole 129, institute
State screw 126 to move in described waist-shaped hole 129.
By turn adjusting screw rod 124, bearing 123 is made to move radially, so that tile fragment 121 is near bearing dead axle 11
Produce gap between the side and bearing dead axle 11 to required separation distance, lock adjusting screw rod with lock-screw 127, be arranged on bearing
Waist-shaped hole 129 on 123 can make screw 126 movable within, and is moved at corresponding screwed hole, and then using will again
Screw 126 is screwed into hold-down support 123 in corresponding screwed hole on fine motion plate 2.During micropositioner work, start each Z-direction motor
41 and θ z motors 42, opening gas circuit simultaneously, compressed air passes through the first joint 122 of each tile fragment device 12, enters tile fragment 121
In, and form certain thickness air film between dead axle 11 and tile fragment 121, thus bearing load.Now in the driving of each motor
Under, be guiding with tile-type static-pressure air bearing 1, fine motion plate 2 is made Z, θ x, θ y, θ z and moved to micro travel, due to tile fragment 121 and
Flexible hinge 128 is flexibly connected, and in motor process, tile fragment 121 freely tilts with the change of load, thus realizing height
The guide-localization of precision.When meet burst die situation when, unclamp screw 126, shed fixed seat 125, rotate adjusting screw rod
126, remove tile fragment 121, to avoid damage to the loading end of tile fragment 121.
Embodiment two
The area of micropositioner and air-bearing in the micropositioner providing in the embodiment of the present invention and air-bearing and embodiment one
Other point is：Please emphasis with reference to Fig. 5 and Fig. 6, as shown in Figure 5 and Figure 6, described some tile fragment devices all include tile fragment 121 ', first
Joint 122 ', bearing 123 ', fixed block 125 ', screw rod 124 ' and screw 126 ', described tile fragment 121 ' is near described bearing dead axle
The mating shapes of the bearing dead axle 11 of the shape of 11 side and described correspondence position, described first joint 122 ' is arranged at
On described tile fragment 121 ', the side away from bearing dead axle 11 of described tile fragment 121 ' is connected with one end of described screw rod 124 ',
Described screw rod 124 ' is arranged in described fixed block 125 ' and is threaded connection with described fixed block 125 ', described fixed block
125 ' are arranged on described bearing 123 ', and described screw rod 124 ' can revolve around the central shaft of its own in described fixed seat 125 '
Turn and drive described tile fragment 12 to move along described central axis direction, reach required gap between described tile fragment 12 and bearing dead axle 11
Afterwards, described bearing 123 ' is connected to described fine motion plate 2 by screw 126 ', described screw 126 ' is arranged at described bearing
On 123 ', the correspondence position of described fine motion plate 2 is provided with screwed hole corresponding with described screw 126 '.
Further, described tile fragment device 12 also includes two nuts 127 ', and the both sides of described fixed block 125 ' lead to respectively
Cross described two nuts 127 ' and lock described screw rod 124 '.
Further, described screw rod 124 ' is provided with bulb 128 ' near one end of described tile fragment 121 ', described tile fragment 121 '
Side near described screw rod 124 ' is provided with the Internal Spherical Surface matching with described bulb 128 ', and described bulb 128 ' is placed in described interior
In sphere, described tile fragment 121 ' can rotate freely without deviating from described screw rod 124 ' around the center of circle of described bulb 128 '.
Further, described tile fragment device 12 also includes the second joint (not shown), and described second joint is arranged at institute
State on tile fragment 121 ', one end that it is contacted with described tile fragment 121 is communicated with described Internal Spherical Surface.
Further, described tile fragment device 12 also includes briquetting 129 ', and described briquetting 129 ' is fixed on described tile fragment 121 '
Upper on the position of bulb 128 ', it is used for limiting the motion of described bulb 128 ', prevents described tile fragment 121 ' from departing from described
Screw rod 124 '.
According to magnitude of load, rotate screw rod 124 ', moving radially using screw rod 124 ', drive tile fragment 121 ' together along footpath
To movement, thus realizing adjusting the purpose of air-film thickness, after the completion of regulation, locked from the two ends of fixed block 125 ' with nut 127 '
Screw rod 124 ', screw 126 ' is screwed in corresponding screwed hole on fine motion plate 2, passes through the second joint on tile fragment 121 ' simultaneously
(not shown) compressed air enters between bulb 128 ' and the Internal Spherical Surface of tile fragment 121 ' and screw rod 124 ', forms air film,
It is that tile fragment 121 ' can be freely rotatable with the center of circle of bulb 128 ', to adapt to deformation or the coaxial error of bearing dead axle 11, realize
Hi-Fix, and so that tile fragment 121 ' is not affected by frictional force when rotating, reduce its frictionally damage.During work, start each
Individual Z-direction drives 41 and θ z motors 42, opening gas circuit simultaneously, and compressed air passes through the first joint 122 ' on each tile fragment 121 ', enters
Enter in the tile fragment 121 ' of tile fragment device 12, between bearing dead axle 11 and tile fragment 121 ', form certain thickness air film, thus holding
By the load on fine motion plate 2.Fine motion plate 2, under the driving of each motor, is Z, θ x, θ y, θ z to motion, on fine motion plate 2
Silicon chip or glass substrate just can the support of this air-bearing 1 hard to bear and guiding, enable silicon chip or glass substrate with fine motion plate 2 one
Play motion.When meet burst die situation when, outer nut 127 ' can be screwed out, and rotary screw 124 ', by screw rod 124 ' with
Tile fragment 121 ' removes the fixed joint of bearing 123 ' and fixed block 125 ' composition together, to avoid damage to the loading end of tile fragment 121 '.
The micropositioner providing in the embodiment of the present invention and air-bearing are with respect to the micropositioner in embodiment one and air-bearing shafts
Hold all unchanged in other structures, therefore here just repeats no more.
Obviously, those skilled in the art can carry out the various changes and deformation essence without deviating from the present invention to the present invention
God and scope.So, if these modifications of the present invention and modification belong to the scope of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to comprise these changes and modification.
Claims (15)
1. a kind of air-bearing, it is arranged between the base of micropositioner and fine motion plate, and described fine motion plate can be Z, θ x, θ y, θ
Z moves to micro travel it is characterised in that including bearing dead axle and some tile fragment devices, and described bearing dead axle is fixedly installed on institute
State on base, described fine motion plate is provided with an opening, described bearing dead axle passes through described opening, institute away from one end of described base
State some tile fragment device weeks outside the excircle of described bearing dead axle, described some tile fragment devices are all with described fine motion plate even
Connect, described tile fragment device can move with described micropositioner so that described air-bearing produce the direction of air film and thickness
Degree changes with the change of described fine motion Board position；
Described some tile fragment devices all include tile fragment, the first joint, bearing, screw rod and fixed seat, and described tile fragment is near described axle
Hold the shape of the dead axle side and the mating shapes of described bearing dead axle, described first joint is arranged on described tile fragment, institute
The side away from bearing dead axle stating tile fragment is connected with described bearing, described screw rod be arranged in described bearing and with described
Seat is threaded connection, and described screw rod is fixed on described fine motion plate described fixed seat, and described screw rod is in described fixed seat
Rotarily drive described tile fragment around the central shaft of its own to move along described central axis direction, reach described tile fragment and bearing dead axle it
Between behind required gap, described bearing is connected to described fine motion plate.
2. according to claim 1 air-bearing it is characterised in that described tile fragment device also includes lock-screw, described lock
Tight screw is arranged in described bearing, for stoping described screw rod rotation.
3. according to claim 1 air-bearing it is characterised in that described tile fragment device also includes hinge, described tile fragment lead to
Cross described hinge to be connected with described bearing.
4. according to claim 3 air-bearing it is characterised in that described hinge be flexible hinge.
5. according to claim 1 air-bearing it is characterised in that described bearing pass through screw connection in described fine motion plate
On, described bearing is provided with waist-shaped hole, and described screw is placed in described waist-shaped hole, and described screw can move in described waist-shaped hole
Dynamic.
6. a kind of air-bearing, it is arranged between the base of micropositioner and fine motion plate, and described fine motion plate can be Z, θ x, θ y, θ
Z moves to micro travel it is characterised in that including bearing dead axle and some tile fragment devices, and described bearing dead axle is fixedly installed on institute
State on base, described fine motion plate is provided with an opening, described bearing dead axle passes through described opening, institute away from one end of described base
State some tile fragment device weeks outside the excircle of described bearing dead axle, described some tile fragment devices are all with described fine motion plate even
Connect, described tile fragment device can move with described micropositioner so that described air-bearing produce the direction of air film and thickness
Degree changes with the change of described fine motion Board position；
Described some tile fragment devices all include tile fragment, the first joint, bearing, fixed block and screw rod, and described tile fragment is near described axle
Hold the shape of the side of dead axle and the mating shapes of described bearing dead axle, described first joint is arranged on described tile fragment,
The side away from bearing dead axle of described tile fragment is connected with one end of described screw rod, and described screw rod is arranged in described fixed block
And be threaded connection with described fixed block, described fixed block is arranged on described bearing, and described screw rod is on described fixed block
Rotarily drive described tile fragment around the central shaft of its own to move along described central axis direction, reach described tile fragment and bearing dead axle it
Between behind required gap, described bearing is connected to described fine motion plate.
7. according to claim 6 air-bearing it is characterised in that described tile fragment device also includes nut, described nut is used
In the described screw rod of locking.
8. air-bearing, it is characterised in that the quantity of described nut is two, is separately positioned on institute according to claim 7
State the both sides of fixed block, by screw rod described in two described nut checks.
9. air-bearing according to claim 6 is it is characterised in that described screw rod is provided with ball near one end of described tile fragment
Head, described tile fragment is provided with, near the side of described screw rod, the Internal Spherical Surface matching with described bulb, and described bulb is placed in described interior
In sphere, described tile fragment can rotate freely without deviating from described screw rod around the center of circle of described bulb.
10. air-bearing according to claim 9 is it is characterised in that described tile fragment device also includes the second joint, described
Second joint is arranged on described tile fragment, and one end that it is contacted with described tile fragment is communicated with described Internal Spherical Surface.
11. air-bearings according to claim 9 it is characterised in that described tile fragment device also includes briquetting, described briquetting
It is fixed on described tile fragment on the position of bulb, it is used for limiting the motion of described bulb, prevent described tile fragment from departing from institute
State screw rod.
A kind of 12. micropositioners are it is characterised in that include air-bearing, fine motion plate, bottom as described in any one of claim 1 to 11
Seat and motor group, described air-bearing is fixedly installed on described base, and described fine motion plate is by described motor group
It is connected with described base, described motor group can drive described fine motion plate to be Z, θ x, θ y, θ z and move to micro travel.
13. according to claim 12 micropositioner it is characterised in that described motor group includes Z-direction motor and θ z motor,
Described Z-direction motor and θ z motor may be contained between described fine motion plate and described base.
14. according to claim 13 micropositioner it is characterised in that described motor group also includes gravity compensator, institute
State gravity compensator to be arranged between described fine motion plate and described base.
15. according to claim 14 micropositioner it is characterised in that described Z-direction motor quantity be three, described θ z motor
Quantity be two, the quantity of described gravity compensator is three, and described θ z motor is symmetrically arranged in the two of described air-bearing
Side, described three Z-direction motors and three gravity compensators be all symmetrically arranged in triangular shape described fine motion plate and described base it
Between two angles and opposite side on.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210270601.5A CN103573815B (en) | 2012-07-31 | 2012-07-31 | Micropositioner and gas bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210270601.5A CN103573815B (en) | 2012-07-31 | 2012-07-31 | Micropositioner and gas bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103573815A CN103573815A (en) | 2014-02-12 |
| CN103573815B true CN103573815B (en) | 2017-02-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210270601.5A Active CN103573815B (en) | 2012-07-31 | 2012-07-31 | Micropositioner and gas bearing |
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| CN (1) | CN103573815B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105651163A (en) * | 2015-12-28 | 2016-06-08 | 威申精密仪器(上海)有限公司 | Image measuring instrument with high measurement precision |
| CN111025855A (en) * | 2019-12-23 | 2020-04-17 | 中国科学院光电技术研究所 | Non-contact automatic center alignment overlay projection photoetching machine |
| CN112096739B (en) * | 2020-08-05 | 2021-12-21 | 佛山市华道超精科技有限公司 | Air-floatation guide rail type switchable rigid-flexible coupling motion platform |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0729073A1 (en) * | 1995-02-24 | 1996-08-28 | Canon Kabushiki Kaisha | Positioning system and method and apparatus for device manufacture |
| CN102043351A (en) * | 2009-10-12 | 2011-05-04 | 上海微电子装备有限公司 | Leveling and focusing mechanism and mask platform with same |
| CN102537049A (en) * | 2010-12-30 | 2012-07-04 | 上海微电子装备有限公司 | Radial air floatation guide module and photoetching machine motion platform applying same |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4136363B2 (en) * | 2001-11-29 | 2008-08-20 | キヤノン株式会社 | Positioning apparatus and exposure apparatus using the same |
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2012
- 2012-07-31 CN CN201210270601.5A patent/CN103573815B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0729073A1 (en) * | 1995-02-24 | 1996-08-28 | Canon Kabushiki Kaisha | Positioning system and method and apparatus for device manufacture |
| CN102043351A (en) * | 2009-10-12 | 2011-05-04 | 上海微电子装备有限公司 | Leveling and focusing mechanism and mask platform with same |
| CN102537049A (en) * | 2010-12-30 | 2012-07-04 | 上海微电子装备有限公司 | Radial air floatation guide module and photoetching machine motion platform applying same |
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| Publication number | Publication date |
|---|---|
| CN103573815A (en) | 2014-02-12 |
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