CN102557037B - Heat-insulation corrosion-resistant structure of hydrogenation furnace - Google Patents
Heat-insulation corrosion-resistant structure of hydrogenation furnace Download PDFInfo
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- CN102557037B CN102557037B CN 201110440440 CN201110440440A CN102557037B CN 102557037 B CN102557037 B CN 102557037B CN 201110440440 CN201110440440 CN 201110440440 CN 201110440440 A CN201110440440 A CN 201110440440A CN 102557037 B CN102557037 B CN 102557037B
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- warm case
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Abstract
A heat-insulation corrosion-resistant structure of a hydrogenation furnace comprises an outer heat-insulation layer and an inner corrosion-resistant layer. The outer heat-insulation layer is a heat-insulation cover formed by an upper heat-insulation cover, a middle heat-insulation cover and a lower heat-insulation cover. The heat-insulation cover is arranged on a base of the heat-insulation cover, and a heat-insulation cover top cover is arranged on the top portion of the heat-insulation cover. The inner corrosion-resistant layer comprises an upper heat-insulation screen compounded on the inner side of the upper heat-insulation cover, a middle heat-insulation screen compounded on the inner side of the middle heat-insulation cover and a lower heat-insulation screen compounded on the inner side of the lower heat-insulation cover. A heat-insulation cover screen top cover is compounded on the inner side of the heat-insulation cover top cover, and a corrosion-resistant lining is arranged on the inner side of the base of the heat-insulation cover. The heat-insulation corrosion-resistant structure of the hydrogenation furnace is good in heat-insulation performance and corrosion resistance, capable of greatly reducing equipment consumption and simultaneously simple in assembly and maintenance and greatly prolongs service life of a heat-insulation field.
Description
Technical field
The present invention relates to a kind of hydrogenation furnace, especially relate to a kind of heat-insulation corrosion-resistant structure of hydrogenation furnace.
Background technology
Production of polysilicon is mainly to adopt Siemens Method.This method is at hydrogen (H
2) under atmosphere, the trichlorosilane (SiHCl of purification
3) be heated to the silicon wicking surface reactive deposition of certain temperature, produce polysilicon.Early stage Siemens Method production model: the production of polysilicon producer outsourcing SiHCl that slightly purifies
3(this SiHCl
3To generate at the fluidized-bed internal reaction of certain temperature with hydrogenchloride (HCl) and silicon powder); Trichlorosilane after rectifying enters reduction furnace, deposition growing polycrystalline silicon rod on the high temperature silicon plug.Due to the difference of the transformation efficiency of silicon in the polysilicon vapour deposition, produce the silicon tetrachloride (SiCl that the 1kg polysilicon can produce 15kg-17.4kg
4).Send outside after the tail gas " hydrometallurgic recovery " that reduction furnace generates, have for the production of White Carbon black.Now widely used " improved Siemens " is on former basis, increased hydrogenation and the reduction tail gas dry process recovery system of tetrachloro silicane.
Silicon tetrachloride claims again tetrachloro silicane, or is called for short silane, and 57.6 ℃ of boiling points have strong corrosion and irritating smell, and easily deliquescence, meet the water decomposition heat release, discharges poisonous corrosive fume.In polysilicon production process, the discharging of silicon tetrachloride causes severe environmental pollution.Simultaneously, silicon cost of material increasingly high also makes hydrogenation of silicon tetrachloride recycle in polysilicon production process, improves the utilization ratio of silicon raw material, becomes the only way of improving the environmental protection friendly, reducing costs.
Hot hydrogenation process is with SiCl
4And H
2The hydrogenation furnace internal reaction that passes into 1250 ℃ of temperature, pressure 1.0-1.5Mpa generates SiHCl
3, aerogenesis generates polysilicon through sending back to after purification process in reduction furnace, form the closed cycle of improved Siemens, has both guaranteed the high purity of gas, can guarantee again without discharging.
As the heat insulation thermal field of the key part of hydrogenation furnace, affect the work reliability of hydrogenation furnace equipment always.Because hydrogenation furnace is in High Temperature High Pressure, work under the severe corrosive atmosphere surrounding, need simultaneously to guarantee that reactant gases is not subjected to the pollution of other gas and volatile matter, the optimal selection of present heat insulation thermal field is to adopt carbon materials.
The primary structure of the heat insulation thermal field of present hot hydrogenation furnace is that internal layer adopts charcoal cloth to be wound around, and the outer carbon felt that adopts is wound around, and makes the heat insulation thermal field of composite structure.This thermal field structure has heat insulating effect preferably, but, due under high temperature and high pressure environment, the etch resistant properties of carbon felt and charcoal cloth is poor, charcoal layer of cloth and carbon carpet veneer thermal expansion coefficient difference are large simultaneously, be prone to layering and carbon felt slump phenomenon in use procedure between carbon felt and charcoal cloth, heat insulation work-ing life is short.The end face connecting portion of various air inlet/outlets and electrode hole, heat-preservation cylinder in existing thermal field simultaneously, corrosion and erosion effect due to high temperature and high pressure gas very easily cause damage.
Summary of the invention
The technical problem to be solved in the present invention is, overcome the existing deficiency that the heat insulation thermal field etch resistant properties of hydrogenation furnace is poor, work-ing life is short, unit consumption of energy is high, provide a kind of heat-proof quality and etch resistant properties good, the heat-insulation corrosion-resistant structure of hydrogenation furnace of the few and long service life of heat dissipation.
The technical scheme that the present invention solve the technical problem employing is, a kind of heat-insulation corrosion-resistant structure of hydrogenation furnace, comprise outer thermal insulation separation thermosphere and interior erosion resistance layer, described outer thermal insulation separation thermosphere is namely the stay-warm case that is made of upper stay-warm case, middle stay-warm case, lower stay-warm case, described stay-warm case is placed on the stay-warm case base, and the stay-warm case top is provided with the stay-warm case top cover; Interior erosion resistance layer comprises the upper thermoscreen that is compound in the stay-warm case inboard, the middle thermoscreen that is compound in middle stay-warm case inboard, is compound in the lower thermoscreen of lower stay-warm case inboard, and stay-warm case top cover inboard is compounded with the thermoscreen top cover; Stay-warm case base inboard is provided with the Anti-erosion liner.
Further, described stay-warm case processes through resin solidification and chemical vapour deposition (hereinafter to be referred as CVD) the composite curing insulation carbon cloth carbon felt blanket body formation of making by carbon felt and carbon cloth; For avoiding carbon felt and carbon cloth layering and carbon felt slump phenomenon to occur, the stay-warm case base substrate has been carried out puncture processed; Be to improve erosion wear resistance, carbon felt and stay-warm case base substrate end have been carried out the etch-resistant coating processing; Anti-corrosive coating is mixed by silica flour and furane resin and makes, and the weight ratio that is mixed of silica flour and furane resin is 0.1-0.5:1.
Further, described stay-warm case top cover is provided with the pressure relief opening that discharges be used to carrying out superpressure; Preferred 45 ° of the angle of described pressure relief opening and axis; Described pressure relief opening is provided with the Anti-erosion liner compound with lid; Stay-warm case top cover edge is provided with the lifting breach, is convenient to installation and maintenance.
Further, described upper stay-warm case, middle stay-warm case, lower stay-warm case are provided with erection opening, so that installation and maintenance.
Further, the upper thermoscreen of described interior erosion resistance layer, middle thermoscreen, lower thermoscreen adopt three-dimensional Nomex system base, and the carbon-carbon composite that utilizes the density of CVD technique to make after resin solidification is made, and surface-coated has erosion resistant coating.
Further, the stay-warm case top cover of described thermal insulation separation thermosphere and upper stay-warm case, upper stay-warm case and middle stay-warm case, middle stay-warm case and lower stay-warm case, lower stay-warm case and stay-warm case base, thermoscreen lid and upper thermoscreen, upper thermoscreen and middle thermoscreen, middle thermoscreen is connected by female end, male end location sealing with lower thermoscreen, with effective raising Assembly stability.
Further, the thermoscreen top cover of described erosion resistance layer also is provided with the pressure relief opening that discharges for superpressure, and described pressure relief opening is provided with the Anti-erosion liner, and the centre also is provided with superpressure gravity relief valve;
Described stay-warm case base is provided with electrode hole and turnover feed channel hole, and the hole inwall is compounded with the Anti-erosion liner.
Further, described Anti-erosion liner is made the Anti-erosion carbon-carbon composite by adopting charcoal cloth to add resin forming through CVD technique thickening technology.
The present invention's hydrogenation furnace heat insulating Anti-erosion structure, adopt the good thermoscreen of density high resistance to corrosion to consist of endothecium structure, adopt the low curing carbon felt of density low thermal conductivity to consist of the layer structure of thermal field, cover is designed with the superpressure preventing release aperture, the porose inwall of institute and stay-warm case base upper surface all are provided with high temperature resistant Anti-erosion liner, inner lining surface also is coated with erosion resistant coating, and heat insulation life-span significantly improved, and significantly reduces equipment energy consumption simultaneously; Upper stay-warm case, middle stay-warm case, lower stay-warm case are respectively equipped with erection opening, stay-warm case top cover and upper stay-warm case, upper stay-warm case and middle stay-warm case, middle stay-warm case and lower stay-warm case, lower stay-warm case and stay-warm case base, thermoscreen lid are designed with respectively the location sealing seam with upper thermoscreen, upper thermoscreen and middle thermoscreen, middle thermoscreen and lower thermoscreen, assembling, easy maintenance.
Description of drawings
Description of drawings
Fig. 1 is the present invention's heat-insulation corrosion-resistant structure of hydrogenation furnace schematic diagram;
Fig. 2 is the present invention's stay-warm case cap structure schematic diagram;
Fig. 3 is Fig. 2 A-A place sectional view;
Fig. 4 is the present invention's stay-warm case seam and hoisting hole structure schematic diagram.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
With reference to accompanying drawing, the present embodiment comprises outer thermal insulation separation thermosphere and interior erosion resistance layer, described outer thermal insulation separation thermosphere is namely the stay-warm case that is made of upper stay-warm case 3, middle stay-warm case 5, lower stay-warm case 8, and described stay-warm case is placed on stay-warm case base 9, and the stay-warm case top is provided with stay-warm case top cover 1; Interior erosion resistance layer comprises the upper thermoscreen 4 that is compound in stay-warm case 3 inboards, the middle thermoscreen 6 that is compound in middle stay-warm case 5 inboards, is compound in the lower thermoscreen 7 of lower stay-warm case 8 inboards, and stay-warm case top cover 1 inboard is compounded with thermoscreen top cover 2; Stay-warm case base 9 inboards are provided with Anti-erosion liner 11.
Described stay-warm case is processed through resin solidification and chemical vapor deposition (CVD) the composite curing insulation carbon cloth carbon felt blanket body of making by carbon felt and carbon cloth and is consisted of; For avoiding carbon felt and carbon cloth layering and carbon felt slump phenomenon to occur, the stay-warm case base substrate has been carried out puncture processed; Be to improve erosion wear resistance, carbon felt and stay-warm case base substrate end have been carried out the etch-resistant coating processing; Anti-corrosive coating is mixed by silica flour and furane resin and makes, and the weight ratio that is mixed of silica flour and furane resin is 0.2:1.
Described stay-warm case top cover 1 is provided with three and is used for carrying out the pressure relief opening that superpressure discharges; The angle of described pressure relief opening and axis is 45 °; Described pressure relief opening is provided with the Anti-erosion liner 10 compound with lid; Stay-warm case top cover 1 edge is provided with lifting breach 14, is convenient to installation and maintenance.
Described upper stay-warm case 3, middle stay-warm case 5, lower stay-warm case 8 are provided with erection opening 15, so that installation and maintenance.
The upper thermoscreen 4 of described interior erosion resistance layer, middle thermoscreen 6, lower thermoscreen 7 adopt three-dimensional Nomex system base, and the carbon-carbon composite that utilizes the density of CVD technique to make after resin solidification is made, and surface-coated has erosion resistant coating.
Stay-warm case top cover 1 and the upper stay-warm case 3 of described thermal insulation separation thermosphere, upper stay-warm case 3 and middle stay-warm case 5, middle stay-warm case 5 and lower stay-warm case 8, lower stay-warm case 8 and stay-warm case base 9, thermoscreen lid 2 and upper thermoscreen 4, upper thermoscreen 4 and middle thermoscreen 6, middle thermoscreen 6 is connected by female end 17, male end 16 location sealings with lower thermoscreen 7, with effective raising Assembly stability.
The thermoscreen top cover 2 of described erosion resistance layer also is provided with the pressure relief opening that discharges for superpressure, and described pressure relief opening is provided with the Anti-erosion liner, and the centre also is provided with superpressure gravity relief valve 13;
Described stay-warm case base 9 is provided with electrode hole and turnover feed channel hole, and the hole inwall is compounded with Anti-erosion liner 12.
Described each Anti-erosion liner is made the Anti-erosion carbon-carbon composite through CVD technique thickening technology and is made by adopting charcoal cloth to add resin forming.
Multilayered and graded structure of the present invention design had both guaranteed the high temperature resistant and etch resistant properties of internal layer high temperature face, improved again outer heat insulation and preservation effect, reduce the temperature rise of hydrogenation furnace tank body, significantly reduced the FU energy consumption of hydrogenation furnace, the work-ing life of effectively improving the hydrogenation furnace thermal field.
Claims (8)
1. heat-insulation corrosion-resistant structure of hydrogenation furnace, it is characterized in that, comprise outer thermal insulation separation thermosphere and interior erosion resistance layer, described outer thermal insulation separation thermosphere is namely the stay-warm case that is made of upper stay-warm case, middle stay-warm case, lower stay-warm case, described stay-warm case is placed on the stay-warm case base, and the stay-warm case top is provided with the stay-warm case top cover; Interior erosion resistance layer comprises the upper thermoscreen that is compound in the stay-warm case inboard, the middle thermoscreen that is compound in middle stay-warm case inboard, is compound in the lower thermoscreen of lower stay-warm case inboard, and stay-warm case top cover inboard is compounded with the thermoscreen top cover; Stay-warm case base inboard is provided with the Anti-erosion liner;
The composite curing insulation carbon cloth carbon felt blanket body that described stay-warm case is made through resin solidification and chemical vapor deposition process by carbon felt and carbon cloth consists of; To the processing of puncturing of stay-warm case base substrate; Carbon felt and stay-warm case base substrate end have been carried out the etch-resistant coating processing; Anti-corrosive coating is mixed by silica flour and furane resin and makes, and the weight ratio that is mixed of silica flour and furane resin is 0.1-0.5:1;
The upper thermoscreen of described interior erosion resistance layer, middle thermoscreen, lower thermoscreen adopt three-dimensional Nomex system base, and the carbon-carbon composite that utilizes the chemical vapor deposition method density to make after resin solidification is made, and surface-coated has erosion resistant coating.
2. heat-insulation corrosion-resistant structure of hydrogenation furnace according to claim 1, is characterized in that, described stay-warm case top cover is provided with the pressure relief opening that discharges be used to carrying out superpressure; Described pressure relief opening is provided with the Anti-erosion liner compound with lid; Stay-warm case top cover edge is provided with the lifting breach.
3. heat-insulation corrosion-resistant structure of hydrogenation furnace according to claim 2, is characterized in that, the angle of described pressure relief opening and axis is 45 °.
4. heat-insulation corrosion-resistant structure of hydrogenation furnace according to claim 1 and 2, is characterized in that, described upper stay-warm case, middle stay-warm case, lower stay-warm case are provided with erection opening.
5. heat-insulation corrosion-resistant structure of hydrogenation furnace according to claim 1 and 2, it is characterized in that, the stay-warm case top cover of described thermal insulation separation thermosphere and upper stay-warm case, upper stay-warm case and middle stay-warm case, middle stay-warm case and lower stay-warm case, lower stay-warm case and stay-warm case base, thermoscreen lid and upper thermoscreen, upper thermoscreen and middle thermoscreen, middle thermoscreen is connected by female end, male end location sealing with lower thermoscreen.
6. heat-insulation corrosion-resistant structure of hydrogenation furnace according to claim 1 and 2, it is characterized in that, the thermoscreen top cover of described erosion resistance layer is provided with the pressure relief opening that discharges for superpressure, and described pressure relief opening is provided with the Anti-erosion liner, and the centre is provided with superpressure gravity relief valve.
7. heat-insulation corrosion-resistant structure of hydrogenation furnace according to claim 1 and 2, is characterized in that, described stay-warm case base is provided with electrode hole and turnover feed channel hole, and the hole inwall is compounded with the Anti-erosion liner.
8. heat-insulation corrosion-resistant structure of hydrogenation furnace according to claim 1 and 2, is characterized in that, described Anti-erosion liner adopts charcoal cloth to add resin forming, the Anti-erosion carbon-carbon composite that density is made through CVD technique.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110440440 CN102557037B (en) | 2011-12-26 | 2011-12-26 | Heat-insulation corrosion-resistant structure of hydrogenation furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110440440 CN102557037B (en) | 2011-12-26 | 2011-12-26 | Heat-insulation corrosion-resistant structure of hydrogenation furnace |
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| Publication Number | Publication Date |
|---|---|
| CN102557037A CN102557037A (en) | 2012-07-11 |
| CN102557037B true CN102557037B (en) | 2013-06-19 |
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|---|---|---|---|
| CN 201110440440 Expired - Fee Related CN102557037B (en) | 2011-12-26 | 2011-12-26 | Heat-insulation corrosion-resistant structure of hydrogenation furnace |
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Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3528653A1 (en) * | 1985-08-09 | 1987-02-12 | Hoechst Ag | METHOD FOR PRODUCING A GAS-SEAL, HEAT-INSULATED LINING FOR A FREE-STANDING CHIMNEY |
| CN101639322B (en) * | 2009-05-15 | 2011-08-17 | 西安超码科技有限公司 | method for making compound insulation structure used for high-temperature metallurgical furnace and high-temperature processing furnace |
| CN102030555B (en) * | 2010-11-18 | 2013-01-02 | 西安超码科技有限公司 | Method for preparing thick carbon/carbon heat insulation cover for polysilicon hydrogenation furnace |
| CN102167325B (en) * | 2010-12-27 | 2012-07-25 | 湖南南方搏云新材料有限责任公司 | Carbon/carbon heat screen of polysilicon hydrogenation furnace and manufacture method thereof |
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