CN102557037A - Heat-insulation corrosion-resistant structure of hydrogenation furnace - Google Patents
Heat-insulation corrosion-resistant structure of hydrogenation furnace Download PDFInfo
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- CN102557037A CN102557037A CN2011104404405A CN201110440440A CN102557037A CN 102557037 A CN102557037 A CN 102557037A CN 2011104404405 A CN2011104404405 A CN 2011104404405A CN 201110440440 A CN201110440440 A CN 201110440440A CN 102557037 A CN102557037 A CN 102557037A
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- warm case
- thermoscreen
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Abstract
A heat-insulation corrosion-resistant structure of a hydrogenation furnace comprises an outer heat-insulation layer and an inner corrosion-resistant layer. The outer heat-insulation layer is a heat-insulation cover formed by an upper heat-insulation cover, a middle heat-insulation cover and a lower heat-insulation cover. The heat-insulation cover is arranged on a base of the heat-insulation cover, and a heat-insulation cover top cover is arranged on the top portion of the heat-insulation cover. The inner corrosion-resistant layer comprises an upper heat-insulation screen compounded on the inner side of the upper heat-insulation cover, a middle heat-insulation screen compounded on the inner side of the middle heat-insulation cover and a lower heat-insulation screen compounded on the inner side of the lower heat-insulation cover. A heat-insulation cover screen top cover is compounded on the inner side of the heat-insulation cover top cover, and a corrosion-resistant lining is arranged on the inner side of the base of the heat-insulation cover. The heat-insulation corrosion-resistant structure of the hydrogenation furnace is good in heat-insulation performance and corrosion resistance, capable of greatly reducing equipment consumption and simultaneously simple in assembly and maintenance and greatly prolongs service life of a heat-insulation field.
Description
Technical field
The present invention relates to a kind of hydrogenation furnace, especially relate to a kind of hydrogenation furnace heat insulating structure against corrosion.
Background technology
Production of polysilicon mainly is to adopt Siemens Method.This method is at hydrogen (H
2) under the atmosphere, the trichlorosilane (SiHCl of purification
3) be heated to the silicon wicking surface reactive deposition of certain temperature, produce polysilicon.Early stage Siemens Method production model: the production of polysilicon producer outsourcing SiHCl that slightly purifies
3(this SiHCl
3Be to generate at the fluidized-bed internal reaction of certain temperature) with hydrogenchloride (HCl) and silicon powder; Trichlorosilane after the rectifying gets into reduction furnace, deposition growing polycrystalline silicon rod on the high temperature silicon plug.Because the difference of the transformation efficiency of silicon in the polysilicon vapour deposition is produced the silicon tetrachloride (SiCl that the 1kg polysilicon can produce 15kg-17.4kg
4).Send outside behind the tail gas " hydrometallurgic recovery " that reduction furnace generates, what have is used to produce white carbon black.Widely used at present " improvement Siemens Method " is on former basis, increased the hydrogenation and reduction tail gas dry process recovery system of tetrachloro silicane.
Silicon tetrachloride is claimed tetrachloro silicane again, or is called for short silane, and 57.6 ℃ of boiling points have strong corrosion property and irritating smell, is prone to deliquescence, meets the water decomposition heat release, discharges poisonous corrosive fume.In polysilicon production process, the discharging of silicon tetrachloride causes severe environmental pollution.Simultaneously, silicon cost of material high day by day, also make hydrogenation of silicon tetrachloride recycle in the polysilicon production process, improve the silicon utilization ratio of raw materials, become the only way of improving the environmental protection friendly, reducing cost.
Hot hydrogenation process is with SiCl
4And H
2The hydrogenation furnace internal reaction that feeds 1250 ℃ of temperature, pressure 1.0-1.5Mpa generates SiHCl
3, aerogenesis generates polysilicon through sending back to after the purification process in the reduction furnace, form the closed cycle of improvement Siemens Method, has both guaranteed the high purity of gas, and can guarantee does not again have discharging.
As the heat insulation thermal field of the key part of hydrogenation furnace, affect the work reliability of hydrogenation furnace equipment always.Because hydrogenation furnace is at HTHP, the work down of severe corrosive atmosphere surrounding need guarantee that simultaneously reactant gases does not receive the pollution of other gas and volatile matter, and the optimal selection of present heat insulation thermal field is to adopt carbon materials.
The primary structure of the heat insulation thermal field of present hot hydrogenation furnace is that internal layer adopts charcoal cloth to twine, and the outer carbon felt that adopts twines, and processes the heat insulation thermal field of composite structure.This thermal field structure has good heat insulating effect; But; Because under high temperature and high pressure environment, the etch resistant properties of carbon felt and charcoal cloth is poor, charcoal layer of cloth and carbon carpet veneer thermal expansion coefficient difference are big simultaneously; Be prone to layering and carbon felt slump phenomenon in the use between carbon felt and the charcoal cloth, heat insulation work-ing life is short.The end face connecting portion of various air inlet/outlets and electrode hole, heat-preservation cylinder in the existing simultaneously thermal field is because the corrosion and the erosion effect of high temperature and high pressure gas very easily cause damage.
Summary of the invention
The technical problem that the present invention will solve is; Overcome the existing deficiency that the heat insulation thermal field etch resistant properties of hydrogenation furnace is poor, work-ing life is short, unit consumption of energy is high; Provide a kind of heat-proof quality and etch resistant properties good, heat dissipates less and the hydrogenation furnace heat insulating structure against corrosion of long service life.
The technical scheme that the present invention solve the technical problem employing is; A kind of hydrogenation furnace heat insulating structure against corrosion; Comprise outer heat insulating layer and interior erosion resistance layer; Said outer heat insulating layer promptly is the stay-warm case that is made up of last stay-warm case, middle stay-warm case, following stay-warm case, and said stay-warm case places on the stay-warm case base, and the stay-warm case top is provided with the stay-warm case top cover; Interior erosion resistance layer comprises the middle thermoscreen that is compound in the inboard last thermoscreen of stay-warm case, is compound in middle stay-warm case inboard, is compound in down the inboard following thermoscreen of stay-warm case, and stay-warm case top cover inboard is compounded with the thermoscreen top cover; Stay-warm case base inboard is provided with anti-impact erosion liner.
Further, said stay-warm case is handled the composite curing insulation carbon cloth carbon felt base substrate formation of processing by carbon felt and carbon cloth through resin solidification and chemical vapour deposition (hereinafter to be referred as CVD); For avoiding carbon felt and carbon cloth layering and carbon felt slump phenomenon to take place, the stay-warm case base substrate has been carried out puncture handled; For improving erosion wear resistance, carbon felt and stay-warm case base substrate end have been carried out the etch-resistant coating processing; Anti-corrosive coating is mixed by silica flour and furane resin and processes, and the weight ratio that is mixed of silica flour and furane resin is 0.1-0.5:1.
Further, said stay-warm case top cover is provided with and is used to carry out the pressure relief opening that superpressure discharges; Preferred 45 ° of the angle of said pressure relief opening and axis; Said pressure relief opening is provided with and lid compound anti-impact erosion liner; Stay-warm case top cover edge is provided with the lifting breach, is convenient to installation and maintenance.
Further, said upward stay-warm case, middle stay-warm case, following stay-warm case are provided with erection opening, so that installation and maintenance.
Further, the last thermoscreen of said interior erosion resistance layer, middle thermoscreen, following thermoscreen adopt three-dimensional Nomex system base, and the carbon-carbon composite that utilizes the density of CVD technology to process behind the resin solidification is processed, and surfaces coated is covered with the anti-impact erosion resisting coating.
Further, the stay-warm case top cover of said heat insulating layer and last stay-warm case, last stay-warm case and middle stay-warm case; Middle stay-warm case and following stay-warm case; Following stay-warm case and stay-warm case base, thermoscreen lid and last thermoscreen, last thermoscreen and middle thermoscreen; Middle thermoscreen is tightly connected through female end, male end location with following thermoscreen, with effective raising assembling stability.
Further, the thermoscreen top cover of said erosion resistance layer also is provided with and is used for the pressure relief opening that superpressure discharges, and said pressure relief opening is provided with anti-impact erosion liner, and the centre also is provided with superpressure gravity relief valve;
Said stay-warm case base is provided with electrode hole and turnover feed channel hole, and the hole inwall is compounded with anti-impact erosion liner.
Further, described anti-impact erosion liner is processed anti-impact erosion carbon-carbon composite by adopting charcoal cloth to add resin forming through CVD technology thickening technology.
The present invention's hydrogenation furnace heat insulating anti-impact arbor; Adopt the good thermoscreen of the high corrosion stability of density to constitute endothecium structure, adopt the low curing carbon felt of density low thermal conductivity to constitute the layer structure of thermal field, cover is designed with the superpressure preventing release aperture; Porose inwall of institute and stay-warm case base upper surface all are provided with high temperature resistant anti-impact erosion liner; Inner lining surface also is coated with the anti-impact erosion resisting coating, and heat insulation life-span significantly improved, and significantly reduces equipment energy consumption simultaneously; Last stay-warm case, middle stay-warm case, following stay-warm case are respectively equipped with erection opening; Stay-warm case top cover and last stay-warm case, go up stay-warm case and middle stay-warm case, middle stay-warm case and following stay-warm case, down stay-warm case and stay-warm case base, thermoscreen lid and last thermoscreen, go up thermoscreen and be designed with respectively to locate with middle thermoscreen, middle thermoscreen and following thermoscreen and seal seam, assemble, easy maintenance.
Description of drawings
Fig. 1 is the present invention's a hydrogenation furnace heat insulating structural representation against corrosion;
Fig. 2 is the present invention's a stay-warm case cap structure synoptic diagram;
Fig. 3 is Fig. 2 A-A place sectional view;
Fig. 4 is the present invention's stay-warm case seam and an erection opening structural representation.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment the present invention is done further explain.
With reference to accompanying drawing; Present embodiment comprises outer heat insulating layer and interior erosion resistance layer; Said outer heat insulating layer promptly is that said stay-warm case places on the stay-warm case base 9 by last stay-warm case 3, middle stay-warm case 5, the stay-warm case that constitutes of stay-warm case 8 down, and the stay-warm case top is provided with stay-warm case top cover 1; Interior erosion resistance layer comprises the last thermoscreen 4 that is compound in stay-warm case 3 inboards, the middle thermoscreen 6 that is compound in middle stay-warm case 5 inboards, is compound in down the following thermoscreen 7 of stay-warm case 8 inboards, and stay-warm case top cover 1 inboard is compounded with thermoscreen top cover 2; Stay-warm case base 9 inboards are provided with anti-impact erosion liner 11.
Said stay-warm case is handled the composite curing of processing by carbon felt and carbon cloth through resin solidification and chemical vapor deposition (CVD) and is incubated carbon cloth carbon felt base substrate and constitutes; For avoiding carbon felt and carbon cloth layering and carbon felt slump phenomenon to take place, the stay-warm case base substrate has been carried out puncture handled; For improving erosion wear resistance, carbon felt and stay-warm case base substrate end have been carried out the etch-resistant coating processing; Anti-corrosive coating is mixed by silica flour and furane resin and processes, and the weight ratio that is mixed of silica flour and furane resin is 0.2:1.
Said stay-warm case top cover 1 is provided with three and is used to carry out the pressure relief opening that superpressure discharges; The angle of said pressure relief opening and axis is 45 °; Said pressure relief opening is provided with and lid compound anti-impact erosion liner 10; Stay-warm case top cover 1 edge is provided with lifting breach 14, is convenient to installation and maintenance.
Said upward stay-warm case 3, middle stay-warm case 5, following stay-warm case 8 are provided with erection opening 15, so that installation and maintenance.
The last thermoscreen 4 of erosion resistance layer, middle thermoscreen 6, following thermoscreen 7 adopt three-dimensional Nomex system base in said, and the carbon-carbon composite that utilizes the density of CVD technology to process behind the resin solidification is processed, and surfaces coated is covered with the anti-impact erosion resisting coating.
The stay-warm case top cover 1 and the last stay-warm case 3 of said heat insulating layer; Last stay-warm case 3 and middle stay-warm case 5, middle stay-warm case 5 and following stay-warm case 8, following stay-warm case 8 and stay-warm case base 9; Thermoscreen lid 2 and last thermoscreen 4; Last thermoscreen 4 and middle thermoscreen 6, middle thermoscreen 6 is tightly connected through female end 17, male end 16 location with following thermoscreen 7, with effective raising assembling stability.
The thermoscreen top cover 2 of said erosion resistance layer also is provided with and is used for the pressure relief opening that superpressure discharges, and said pressure relief opening is provided with anti-impact erosion liner, and the centre also is provided with superpressure gravity relief valve 13;
Said stay-warm case base 9 is provided with electrode hole and turnover feed channel hole, and the hole inwall is compounded with anti-impact erosion liner 12.
Said each anti-impact erosion liner is processed anti-impact erosion carbon-carbon composite through CVD technology thickening technology and is processed by adopting charcoal cloth to add resin forming.
The multi-gradient structure design that the present invention adopted had both guaranteed the high temperature resistant and etch resistant properties of internal layer high temperature face; Improved outer heat insulation and preservation effect again; Reduce the temperature rise of hydrogenation furnace tank body, significantly reduced the FU energy consumption of hydrogenation furnace, the work-ing life of effectively improving the hydrogenation furnace thermal field.
Claims (10)
1. hydrogenation furnace heat insulating structure against corrosion; It is characterized in that; Comprise outer heat insulating layer and interior erosion resistance layer; Said outer heat insulating layer promptly is the stay-warm case that is made up of last stay-warm case, middle stay-warm case, following stay-warm case, and said stay-warm case places on the stay-warm case base, and the stay-warm case top is provided with the stay-warm case top cover; Interior erosion resistance layer comprises the middle thermoscreen that is compound in the inboard last thermoscreen of stay-warm case, is compound in middle stay-warm case inboard, is compound in down the inboard following thermoscreen of stay-warm case, and stay-warm case top cover inboard is compounded with the thermoscreen top cover; Stay-warm case base inboard is provided with anti-impact erosion liner.
2. hydrogenation furnace heat insulating according to claim 1 structure against corrosion is characterized in that, the composite curing that said stay-warm case is processed through resin solidification and chemical vapor deposition process by carbon felt and carbon cloth is incubated carbon cloth carbon felt base substrate and constitutes; To the processing of puncturing of stay-warm case base substrate; Carbon felt and stay-warm case base substrate end have been carried out the etch-resistant coating processing; Anti-corrosive coating is mixed by silica flour and furane resin and processes, and the weight ratio that is mixed of silica flour and furane resin is 0.1-0.5:1.
3. hydrogenation furnace heat insulating according to claim 1 and 2 structure against corrosion is characterized in that, said stay-warm case top cover is provided with and is used to carry out the pressure relief opening that superpressure discharges; Said pressure relief opening is provided with and lid compound anti-impact erosion liner; Stay-warm case top cover edge is provided with the lifting breach.
4. hydrogenation furnace heat insulating according to claim 3 structure against corrosion is characterized in that the angle of said pressure relief opening and axis is 45 °.
5. hydrogenation furnace heat insulating according to claim 1 and 2 structure against corrosion is characterized in that, said upward stay-warm case, middle stay-warm case, following stay-warm case are provided with erection opening.
6. hydrogenation furnace heat insulating according to claim 1 and 2 structure against corrosion; It is characterized in that; The last thermoscreen of erosion resistance layer, middle thermoscreen, following thermoscreen adopt three-dimensional Nomex system base in said; The carbon-carbon composite that utilizes the chemical vapor deposition method density to process behind the resin solidification is processed, and surfaces coated is covered with the anti-impact erosion resisting coating.
7. hydrogenation furnace heat insulating according to claim 1 and 2 structure against corrosion is characterized in that, the stay-warm case top cover of said heat insulating layer and last stay-warm case; Last stay-warm case and middle stay-warm case; Middle stay-warm case and following stay-warm case, following stay-warm case and stay-warm case base, thermoscreen lid and last thermoscreen; Last thermoscreen and middle thermoscreen, middle thermoscreen is tightly connected through female end, male end location with following thermoscreen.
8. hydrogenation furnace heat insulating according to claim 1 and 2 structure against corrosion; It is characterized in that; The thermoscreen top cover of said erosion resistance layer is provided with and is used for the pressure relief opening that superpressure discharges, and said pressure relief opening is provided with anti-impact erosion liner, and the centre is provided with superpressure gravity relief valve.
9. hydrogenation furnace heat insulating according to claim 1 and 2 structure against corrosion is characterized in that, said stay-warm case base is provided with electrode hole and turnover feed channel hole, and the hole inwall is compounded with anti-impact erosion liner.
10. hydrogenation furnace heat insulating according to claim 1 and 2 structure against corrosion is characterized in that, said anti-impact erosion liner is by adopting charcoal cloth to add resin forming, and the anti-impact that density is processed through CVD technology is lost carbon-carbon composite.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110440440 CN102557037B (en) | 2011-12-26 | 2011-12-26 | Heat-insulation corrosion-resistant structure of hydrogenation furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110440440 CN102557037B (en) | 2011-12-26 | 2011-12-26 | Heat-insulation corrosion-resistant structure of hydrogenation furnace |
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|---|---|
| CN102557037A true CN102557037A (en) | 2012-07-11 |
| CN102557037B CN102557037B (en) | 2013-06-19 |
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|---|---|---|---|
| CN 201110440440 Expired - Fee Related CN102557037B (en) | 2011-12-26 | 2011-12-26 | Heat-insulation corrosion-resistant structure of hydrogenation furnace |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4745851A (en) * | 1985-08-09 | 1988-05-24 | Hoechst Aktiengesellschaft | Process for the construction of a gas-tight, thermally insulated lining for a free-standing stack |
| CN101639322A (en) * | 2009-05-15 | 2010-02-03 | 西安超码科技有限公司 | High-temperature metallurgical furnace and method for making compound insulation structure used for high-temperature metallurgical furnace |
| CN102030555A (en) * | 2010-11-18 | 2011-04-27 | 西安超码科技有限公司 | Method for preparing thick carbon/carbon heat insulation cover for polysilicon hydrogenation furnace |
| CN102167325A (en) * | 2010-12-27 | 2011-08-31 | 蒋建纯 | Carbon/carbon heat screen of polysilicon hydrogenation furnace and manufacture method thereof |
-
2011
- 2011-12-26 CN CN 201110440440 patent/CN102557037B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4745851A (en) * | 1985-08-09 | 1988-05-24 | Hoechst Aktiengesellschaft | Process for the construction of a gas-tight, thermally insulated lining for a free-standing stack |
| CN101639322A (en) * | 2009-05-15 | 2010-02-03 | 西安超码科技有限公司 | High-temperature metallurgical furnace and method for making compound insulation structure used for high-temperature metallurgical furnace |
| CN102030555A (en) * | 2010-11-18 | 2011-04-27 | 西安超码科技有限公司 | Method for preparing thick carbon/carbon heat insulation cover for polysilicon hydrogenation furnace |
| CN102167325A (en) * | 2010-12-27 | 2011-08-31 | 蒋建纯 | Carbon/carbon heat screen of polysilicon hydrogenation furnace and manufacture method thereof |
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| CN102557037B (en) | 2013-06-19 |
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