CN210374645U

CN210374645U - Gas distribution box for preparing simple substance two-dimensional material and other composite materials

Info

Publication number: CN210374645U
Application number: CN201920937543.4U
Authority: CN
Inventors: 刘建军
Original assignee: Individual
Current assignee: Individual
Priority date: 2019-06-10
Filing date: 2019-06-10
Publication date: 2020-04-21
Anticipated expiration: 2029-06-10

Abstract

The utility model provides a gas distribution box for preparing simple substance two-dimensional material and other combined material, relates to new material preparation technical field, the utility model discloses a set up intake pipe (4) and exhaust tube (5) respectively on gas distribution box main part (3), can take out the carbide of deposit in gas distribution box main part from gas distribution box main part, and further, in order to better prevent to deposit too much carbide in gas distribution box main part, be equipped with at least one gas blow mouth above or below or left end or right-hand member of gas distribution box main part, gas blow mouth connection gas blow pipe (6), through one blow one of gas blow pipe, exhaust tube take out the carbide in the gas distribution box main part, and then improve the life etc. of gas distribution box main part, can also prevent the phenomenon of jam venthole simultaneously, the utility model discloses simple structure has, good use effect and the like, and is suitable for large-scale popularization and application.

Description

Gas distribution box for preparing simple substance two-dimensional material and other composite materials

[ technical field ] A method for producing a semiconductor device

The utility model relates to a new material preparation technical field, concretely relates to a gas distribution box for preparing simple substance two-dimensional material and other combined material.

[ background of the invention ]

It is known that simple substance two-dimensional materials and composite materials play an important role in the development of modern science and technology. The research depth and the application range of the simple substance two-dimensional material and the composite material, and the speed and the scale of the production development of the simple substance two-dimensional material and the composite material become one of the important marks for measuring the advanced level of the national science and technology. Since the 21 st century, two-dimensional materials of global simple substances andthe market for composite materials is growing rapidly, and asia, especially the china market, is growing rapidly. The composite material is commonly silicon-coated carbon composite material, carbon-coated silicon composite material and the like, and the elementary substance two-dimensional material is graphene, high-quality BN and MOS₂Taking graphene growth as an example, graphene is a two-dimensional carbon nanomaterial with a honeycomb lattice of hexagons composed of carbon atoms with sp2 hybridized orbitals. The graphene has excellent optical, electrical and mechanical properties, has important application prospects in the aspects of materials science, micro-nano processing, energy, biomedicine, drug delivery and the like, and is considered to be a revolutionary material in the future. The physicists andrelim and consuding norworth schloff, manchester university, uk, successfully separated graphene from graphite by micromechanical exfoliation, thus collectively awarding the 2010 nobel prize for physics, the common methods for the production of graphene are mechanical exfoliation, redox, SiC epitaxial growth and Chemical Vapor Deposition (CVD).

Chemical Vapor Deposition (CVD) is a method of producing graphene by vapor deposition using a carbon-containing organic gas as a raw material. This is currently the most efficient method for producing graphene. The graphene prepared by the method has the characteristics of large area and high quality, but at the present stage, the main defects of high production cost, low production efficiency and the like exist, the process conditions need to be further improved, so that how to provide a device for preparing the simple substance two-dimensional material and other composite materials becomes a long-term technical appeal for technical personnel in the field, and in the whole device, a gas distribution box is one of key components, and how to provide a gas distribution box for preparing the simple substance two-dimensional material and other composite materials is a long-term technical appeal for technical personnel in the field.

[ summary of the invention ]

In order to realize the purpose of the invention, the utility model provides a gas distribution box for preparing simple substance two-dimensional material and other combined material, the utility model discloses a set up intake pipe and exhaust tube respectively at the gas distribution box main part, can take out the carbide that deposits in the gas distribution box main part from the gas distribution box main part, the utility model has the characteristics of simple structure, excellent in use effect etc.

In order to achieve the purpose, the utility model adopts the following technical scheme:

a gas distribution box for preparing simple substance two-dimensional materials and other composite materials comprises gas outlets, a gas distribution box main body, gas inlet pipes and gas extraction pipes, wherein a plurality of gas outlets are arranged on the gas distribution box main body at intervals, and the gas distribution box main body is respectively connected with at least one gas inlet pipe and at least one gas extraction pipe to form the gas distribution box for preparing the simple substance two-dimensional materials and other composite materials.

The gas distribution box for preparing the simple substance two-dimensional material and other composite materials is characterized in that the main body of the gas distribution box is of a hollow structure.

The gas distribution box for preparing the simple substance two-dimensional material and other composite materials is characterized in that the upper port of the gas outlet is connected with a vent nozzle.

The gas distribution box for preparing the elemental two-dimensional material and other composite materials is characterized in that at least one gas blowing opening is formed in the upper side or the lower side or the left end or the right end of the gas distribution box main body and is connected with a gas blowing pipe.

The gas distribution box for preparing the elemental two-dimensional material and other composite materials is characterized in that at least one air suction opening is formed in the upper surface, the lower surface, the left end or the right end of the main body of the gas distribution box, and the air suction opening is connected with an air suction pipe.

The gas distribution box for preparing the elemental two-dimensional material and other composite materials is characterized in that at least one gas inlet is arranged on the upper surface or the lower surface or the left end or the right end of the gas distribution box main body, and the gas inlet is connected with a gas inlet pipe.

The gas distribution box for preparing the elemental two-dimensional material and other composite materials is characterized in that the outer end of the gas inlet pipe is connected with a gas mixing valve, and the gas mixing valve is connected with a gas source.

The gas distribution box for preparing the simple substance two-dimensional material and other composite materials is characterized in that a heat insulation layer is arranged on the upper end face of the gas distribution box main body.

The gas distribution box for preparing the simple substance two-dimensional material and other composite materials is characterized in that a heat insulation layer is arranged on the outer edge surface of the gas distribution box main body.

The gas distribution box for preparing the simple substance two-dimensional material and other composite materials has the main body of which the shape is any one of a circle, an ellipse, a polygon or a snake.

Due to the adoption of the technical scheme, the utility model discloses following beneficial effect has:

the utility model discloses a set up intake pipe and exhaust tube in the gas distribution box main part respectively, can take out the carbide of deposit in the gas distribution box main part from the gas distribution box main part, it is further, in order better to prevent at the too much carbide of gas distribution box main part deposit, be equipped with at least one gas blow mouth above or below or left end or right-hand member of gas distribution box main part, the gas blow mouth is connected the gas blow pipe, and through one of gas blow pipe, exhaust tube blow one take out, take out the carbide in the gas distribution box main part, and then improve the life etc. of gas distribution box main part, can also prevent to block up the phenomenon of venthole simultaneously, the utility model has the characteristics of simple structure, excellent in use effect etc. are fit for on a large scale popularization and application.

[ description of the drawings ]

Fig. 1 is a schematic structural diagram of the present invention;

FIG. 2 is a schematic view of an alternative construction of the gas distribution box body of the present invention;

in the figure: 1. a breather nozzle; 2. an air outlet; 3. a gas distribution box body; 4. an air inlet pipe; 5. an air exhaust pipe; 6. an air blowing pipe; 7. an insulating layer.

[ detailed description ] embodiments

The present invention will be explained in more detail by the following examples, which are intended to protect all the changes and improvements within the scope of the present invention, and are not limited to the following examples;

it should be noted that the directions and positional relationships indicated by "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc. used in describing the structure of the present invention are only for convenience of description and simplification of description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and thus, should not be construed as limiting the present invention.

The gas distribution box for preparing the elemental two-dimensional material and other composite materials described with reference to fig. 1-2 comprises gas outlets 2, a gas distribution box main body 3, gas inlets 4 and gas exhaust pipes 5, wherein the gas distribution box main body 3 is of a hollow structure, the shape of the gas distribution box main body 3 is any one of circular, oval, polygonal or serpentine, in specific implementation, the gas distribution box main body 3 is selected according to actual conditions, a plurality of gas outlets 2 are arranged at intervals on the gas distribution box main body 3, the diameters of the gas outlets 2 are 0.1-1.5 mm, and the gas distribution box main body 3 is respectively connected with at least one gas inlet pipe 4 and at least one gas exhaust pipe 5 to form the gas distribution box for preparing the elemental two-dimensional material and other composite materials.

The utility model discloses when concrete implementation, breather 1 is connected to the last port of venthole 2, sets up breather 1 in order to make and keep the certain distance between crucible body and the gas distribution box main part 3, makes the heat of crucible body bottom as little as possible transmit to gas distribution box main part 3 on, the distance between crucible body and the gas distribution box main part 3 can make cooling gas pass through simultaneously, makes gas distribution box main part 3 by abundant cooling etc, breather 1 can select the welding at the last port of venthole 2.

Further, in order to better prevent excessive carbide deposition on the gas distribution box main body 3, at least one gas blowing port may be provided on the upper or lower surface or left or right end of the gas distribution box main body 3, and the gas blowing port is connected to the gas blowing pipe 6. Then, at least one air extraction opening is arranged on the upper surface or the lower surface or the left end or the right end of the gas distribution box main body 3, the air extraction opening is connected with the air extraction pipe 5, and the carbide in the gas distribution box main body 3 is extracted out of the gas distribution box main body 3 through one-blowing-one-pumping of the air blowing pipe 6 and the air extraction pipe 5, so that the service life of the gas distribution box main body 3 is prolonged, and the like. During specific implementation, the air blowing pipe 6 can be connected with a nitrogen gas source, the air exhaust pipe 5 is connected with an air exhaust device, wherein the air exhaust device is not the key point of protection of the invention, and the air exhaust device can be purchased directly from the market, so detailed description on the specific structure of the air exhaust device is not required.

Further, at least one air inlet is arranged on the upper surface or the lower surface or the left end or the right end of the gas distribution box main body 3, and the air inlet is connected with an air inlet pipe 4. The outer end of the air inlet pipe 4 is connected with an air mixing valve, and the air mixing valve is connected with an air source. In specific implementation, the gas source may be a single methane gas, a silane gas, an acetylene gas or other gases, or a mixed gas of methane or acetylene and nitrogen or other inert gases, or a mixed gas of methane and silane, and in implementation, the type and combination of the gases should be selected according to specific products, for example, the mixed gas of methane and silane is introduced, and a silicon-carbon composite material can be prepared.

Further, in order to prevent carbonization of the gas in the gas distribution box main body 3, a heat insulating layer 7 is provided on the upper end surface of the gas distribution box main body 3. And a heat insulation layer 7 is arranged on the outer edge surface of the gas distribution box main body 3. The heat insulating layer 7 can insulate the heat radiation of the heating body or the temperature in the shell to the gas distribution box main body 3, and further, the purpose of reducing the temperature of the gas distribution box main body 3 is achieved.

The utility model discloses when concrete implementation, gas blow pipe 6 can operate with a pipeline of intake pipe 4 sharing, also can separately set up, and concrete selection can be selected according to actual conditions.

The utility model discloses an application embodiment as follows:

take graphite alkene preparation as an example, the utility model discloses when implementing, the crucible body is in the casing, then sets up the heat-generating body in the periphery of crucible body, for the heat preservation effect that increases the casing this moment, is equipped with the heat preservation on the inner wall of casing, then sets up the metal block in the crucible body, the preferred copper of metal block, the preferred more than 99.9% of purity of copper, when concrete implementation, can add catalysts such as nickel, iron, cobalt in the copper melt, the purpose is to accelerate reaction rate;

then starting a power supply, introducing argon into the shell, wherein the pressure is 0.1mpa, heating the crucible body through a heating body, starting a gas source after metal in the crucible body is melted into molten metal, introducing gas in the gas source into the gas distribution box main body 3 through the gas inlet pipe 4, placing the gas distribution box main body 3 into a cooling chamber at the moment, introducing cooling gas into the cooling chamber through the cooling gas inlet pipe, and then flowing out through the cooling gas outlet pipe to play a role in cooling the gas distribution box main body 3, so that the phenomenon that the mixed gas of methane or acetylene and nitrogen or inert gas is cracked into carbon in the gas distribution box main body 3 due to overhigh temperature to cause blockage is avoided;

the mixed gas entering the metal solution is discharged into the metal solution through the gas outlet holes 2 on the gas distribution box main body 3 to form a plurality of bubbles, the gas is decomposed into carbon atoms on the surfaces of the bubbles, the carbon atoms are reassembled into graphene on the surfaces of the bubbles, and then the graphene reaches the surface of the molten solution along with the bubbles and is gathered together; the gas in the gas source is a mixed gas obtained by mixing hydrocarbon gas and inert gas or any one of hydrogen or nitrogen; the hydrocarbon gas in the mixed gas accounts for 2-5% of the total weight of the mixed gas; the hydrocarbon gas is any one of methane, acetylene and natural gas; the pressure of the air source is 0.1-1 mpa.

The utility model discloses not only be applicable to the preparation of graphite alkene, still be adapted to the preparation of other simple substance two-dimensional material materials, like high-quality BN, MOS₂And the like, and simultaneously the utility model discloses still be applicable to composite's preparation, like silicon-coated carbon composite, carbon-coated silicon composite's preparation etc.

The details of the above are not described in detail since they are prior art.

The embodiments selected for the purpose of disclosing the invention, are presently considered to be suitable, it being understood, however, that the invention is intended to cover all variations and modifications of the embodiments, which fall within the scope of the concept and invention.

Claims

1. The utility model provides a gas distribution box for preparing simple substance two-dimensional material and other combined material, includes venthole (2), gas distribution box main part (3), intake pipe (4) and exhaust tube (5), characterized by: the gas distribution box comprises a gas distribution box main body (3), wherein a plurality of gas outlet holes (2) are formed in the upper surface of the gas distribution box main body (3) at intervals, and the gas distribution box main body (3) is respectively connected with at least one gas inlet pipe (4) and at least one gas extraction pipe (5) to form the gas distribution box for preparing simple substance two-dimensional materials and other composite materials.

2. The gas distribution box for the preparation of elemental two-dimensional materials and other composite materials of claim 1, wherein: the gas distribution box main body (3) is of a hollow structure.

3. The gas distribution box for the preparation of elemental two-dimensional materials and other composite materials of claim 1, wherein: the upper end opening of the air outlet hole (2) is connected with the air nozzle (1).

4. The gas distribution box for the preparation of elemental two-dimensional materials and other composite materials of claim 1, wherein: at least one air blowing opening is formed in the upper side or the lower side or the left end or the right end of the air distribution box main body (3), and the air blowing opening is connected with an air blowing pipe (6).

5. The gas distribution box for the preparation of elemental two-dimensional materials and other composite materials of claim 1, wherein: at least one air pumping hole is arranged on the upper surface or the lower surface or the left end or the right end of the gas distribution box main body (3), and the air pumping hole is connected with an air pumping pipe (5).

6. The gas distribution box for the preparation of elemental two-dimensional materials and other composite materials of claim 1, wherein: at least one air inlet is arranged on the upper surface or the lower surface or the left end or the right end of the gas distribution box main body (3), and the air inlet is connected with an air inlet pipe (4).

7. The gas distribution box for the preparation of elemental two-dimensional materials and other composite materials of claim 1, wherein: the outer end of the air inlet pipe (4) is connected with an air mixing valve, and the air mixing valve is connected with an air source.

8. The gas distribution box for the preparation of elemental two-dimensional materials and other composite materials of claim 1, wherein: the upper end face of the gas distribution box main body (3) is provided with a heat insulation layer (7).

9. The gas distribution box for the preparation of elemental two-dimensional materials and other composite materials of claim 1, wherein: and a heat insulation layer (7) is arranged on the outer edge surface of the gas distribution box main body (3).

10. The gas distribution box for the preparation of elemental two-dimensional materials and other composite materials of claim 1, wherein: the shape of the external shape of the gas distribution box main body (3) is any one of circular or oval or polygonal or snake-shaped.