CN202786419U - Gas phase depositing furnace used for preparing pyrolytic boron nitride products and provided with separated air inlets - Google Patents
Gas phase depositing furnace used for preparing pyrolytic boron nitride products and provided with separated air inlets Download PDFInfo
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- CN202786419U CN202786419U CN 201220429022 CN201220429022U CN202786419U CN 202786419 U CN202786419 U CN 202786419U CN 201220429022 CN201220429022 CN 201220429022 CN 201220429022 U CN201220429022 U CN 201220429022U CN 202786419 U CN202786419 U CN 202786419U
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- inlet mouth
- boron nitride
- gaseous phase
- phase deposition
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Abstract
The utility model discloses a gas phase depositing furnace used for preparing pyrolytic boron nitride products and provided with separated air inlets. The gas phase depositing furnace comprises a furnace body and a furnace cover, wherein a first air inlet for the access of a first raw material gas is formed at the bottom of the furnace body, and second air inlets for the access of a second raw material gas are formed on the side wall of the furnace body. According to the utility model, the obtained product is uniform in quality; and product quality and qualification rate can be effectively improved.
Description
Technical field
The utility model relates to the technical field of the equipment of preparation pyrolitic boron nitride goods, specifically a kind ofly prepares the gaseous phase deposition stove that the separate type inlet mouth is arranged that the pyrolitic boron nitride goods are used.
Background technology
Pyrolitic boron nitride (be called for short PBN) has that purity is high, nontoxic, high temperature resistant, acid and alkali-resistance, salt tolerant and organic solvent-resistant, stable in properties; At high temperature nonwetting with most molten metals, semiconductor material, do not react; Inclusion-free volatilization under the good and high temperature of electrical insulation capability; Heat-shock resistance is excellent, heat conductance is good and thermal expansivity is low; Resistance is high, dielectric strength is high, specific inductivity is little, the magnetic loss tangent is low and have good saturating microwave and infrared rays performance etc. plurality of advantages.Be widely used as crucible, the pedestal of the synthetic usefulness of semiconductor monocrystal and III-V group compound; Original position is synthesized the liquid encapsulate Czochralski technique series crucible of the monocrystalline such as gallium arsenide, indium phosphide, gallium phosphide; The serial crucible of molecular beam epitaxy (MBE) usefulness; VGF (VGF), vertical Bu Shi (VB) genealogy of law row crucible; Pyrolitic boron nitride/pyrolytic graphite (PBN/PG) composite heater coating; The high-temperature insulation fluid tip; The graphite heater insulating coating; Metal organic chemical vapor deposition (MOCVD) system insulation plate; Special-shaped crucible and abnormal graphite spare coating; Annealing of wafer technique composite heater etc.
Gaseous phase deposition stove is the nucleus equipment of preparation pyrolitic boron nitride goods.The key for preparing high-quality pyrolitic boron nitride goods is that the pyrolitic boron nitride that generates after the pyroreaction is deposited on die surface equably, thereby obtains homogeneous pyrolitic boron nitride goods.The inlet mouth of existing gaseous phase deposition stove is arranged at the bottom of deposit cavity, and inlet mouth is the sleeve-shaped inlet mouth, and namely two kinds of unstripped gases enter from interior ring and the outer shroud of inlet mouth respectively.It is the mixed occurrence reaction that such setting makes unstripped gas enter deposit cavity, and when this differed larger with regard to the distance that causes die surface and inlet mouth, the pyrolitic boron nitride that reaction generates can not be deposited on die surface equably.The deposit thickness of the position of close inlet mouth can be greater than the position away from inlet mouth.This will have a strong impact on quality and the qualification rate of product.
Because the problems that above-mentioned existing gaseous phase deposition stove exists, designer's dependence of the present utility model working experience is for many years actively studied with abundant expertise and is innovated, finally develop and a kind ofly prepare the gaseous phase deposition stove that the separate type inlet mouth is arranged that the pyrolitic boron nitride goods are used, but the quality of Effective Raise product and qualification rate.
The utility model content
In order to solve the above-mentioned problems in the prior art, the utility model provides a kind of gaseous phase deposition stove that the separate type inlet mouth is arranged that the pyrolitic boron nitride goods are used for preparing, and products obtained therefrom is homogeneous, but the quality of Effective Raise product and qualification rate.
In order to solve the problems of the technologies described above, the utility model has adopted following technical scheme:
The gaseous phase deposition stove that the separate type inlet mouth is arranged that preparation pyrolitic boron nitride goods are used is made of body of heater and bell, and wherein bottom of furnace body is provided with the first inlet mouth that the first unstripped gas enters, and sidewall of the furnace body is provided with the second inlet mouth that the second unstripped gas enters.
Further, the individual number average of described the first inlet mouth and the second inlet mouth is at least one.
Further, described body of heater is followed successively by graphite tube, well heater, thermal insulation separation thermosphere and the tool shell with dissection with deposit cavity from the inside to the outside, and graphite tube is provided with graphite cover.
Further, described thermal insulation separation thermosphere is that carbon fiber or stupalith are made.
Further, described bell is made of the thermal insulation separation thermosphere of outer field steel housing and internal layer.
Compared with prior art, the beneficial effects of the utility model are:
The gaseous phase deposition stove that the separate type inlet mouth is arranged that preparation pyrolitic boron nitride goods of the present utility model are used is by arranging respectively the first inlet mouth and the second inlet mouth into different material gas at the bottom of body of heater and sidewall.Such two kinds of different unstripped gases enter from bottom and sidewall respectively, make it in the middle part of deposit cavity hybrid reaction.Thereby make the pyrolitic boron nitride of generation be evenly distributed in die surface.The quality of products obtained therefrom is more even.Qualification rate and the quality of product have been improved.
Description of drawings
Fig. 1 is the cross-sectional view of the gaseous phase deposition stove that the separate type inlet mouth is arranged used of preparation pyrolitic boron nitride goods of the present utility model.
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is described in further detail, but not as to restriction of the present utility model.
Fig. 1 is that the structure of the gaseous phase deposition stove that the separate type inlet mouth is arranged used of preparation pyrolitic boron nitride goods of the present utility model is cutd open figure.As shown in Figure 1, the gaseous phase deposition stove with phase-transition heat-preserving layer that preparation pyrolitic boron nitride goods are used, be made of body of heater and bell, body of heater is followed successively by thermal insulation separation thermosphere 3 and the tool shell 4 with dissection that graphite tube 1, well heater 2, carbon fiber or stupalith with deposit cavity 101 made from the inside to the outside.Bottom of furnace body is provided with the first inlet mouth 5 that the first unstripped gas enters, and sidewall of the furnace body is provided with the second inlet mouth 6 that the second unstripped gas enters.The individual number average of the first inlet mouth 5 and the second inlet mouth 6 is at least one, and the number of preferred the first inlet mouth 5 and the second inlet mouth 6 is a plurality of.A plurality of the second inlet mouths 6 distribute along circumferential and axial on the sidewall of body of heater.Passing into recirculated cooling water in the interlayer in the shell 4 lowers the temperature.Has recirculated cooling water entry and exit (not shown) on the shell 4.Bell is made of the thermal insulation separation thermosphere 8 of being made by carbon fiber or pottery of outer field steel housing 7 and internal layer.Equally, outer field steel housing 7 is sandwich structure also, enters recirculated cooling water in the interlayer and lowers the temperature.Which is provided with recirculated cooling water entry and exit (not shown).Graphite tube 1 is provided with graphite cover 9.Has air outlet 10 on the bell.The due miscellaneous part of not shown gaseous phase deposition stove all can be learnt in the prior art, is not giving unnecessary details at this.
The gaseous phase deposition stove that the separate type inlet mouth is arranged that preparation pyrolitic boron nitride goods of the present utility model are used in use, two kinds of unstripped gas BCl
3And NH
3Enter in the deposit cavity from bottom and sidewall respectively, make two kinds of gases in deposit cavity middle part hybrid reaction.Thereby make the pyrolitic boron nitride of generation be deposited on equably die surface, improved qualification rate and quality product.
Above embodiment is exemplary embodiment of the present utility model only, is not used in restriction the utility model, and protection domain of the present utility model is defined by the claims.Those skilled in the art can make various modifications or be equal to replacement the utility model in essence of the present utility model and protection domain, this modification or be equal to replacement and also should be considered as dropping in the protection domain of the present utility model.
Claims (5)
1. prepare the gaseous phase deposition stove that the separate type inlet mouth is arranged that the pyrolitic boron nitride goods are used, consisted of by body of heater and bell, it is characterized in that, wherein bottom of furnace body is provided with the first inlet mouth that the first unstripped gas enters, and sidewall of the furnace body is provided with the second inlet mouth that the second unstripped gas enters.
2. the gaseous phase deposition stove that the separate type inlet mouth is arranged used of preparation pyrolitic boron nitride goods according to claim 1 is characterized in that, the individual number average of described the first inlet mouth and the second inlet mouth is at least one.
3. the gaseous phase deposition stove that the separate type inlet mouth is arranged used of preparation pyrolitic boron nitride goods according to claim 1, it is characterized in that, described body of heater is followed successively by graphite tube, well heater, thermal insulation separation thermosphere and the tool shell with dissection with deposit cavity from the inside to the outside, and graphite tube is provided with graphite cover.
4. the gaseous phase deposition stove that the separate type inlet mouth is arranged used of preparation pyrolitic boron nitride goods according to claim 3 is characterized in that, described thermal insulation separation thermosphere is that carbon fiber or stupalith are made.
5. the gaseous phase deposition stove that the separate type inlet mouth is arranged used of preparation pyrolitic boron nitride goods according to claim 1 is characterized in that, described bell is made of the thermal insulation separation thermosphere of outer field steel housing and internal layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220429022 CN202786419U (en) | 2012-08-27 | 2012-08-27 | Gas phase depositing furnace used for preparing pyrolytic boron nitride products and provided with separated air inlets |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220429022 CN202786419U (en) | 2012-08-27 | 2012-08-27 | Gas phase depositing furnace used for preparing pyrolytic boron nitride products and provided with separated air inlets |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202786419U true CN202786419U (en) | 2013-03-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220429022 Expired - Fee Related CN202786419U (en) | 2012-08-27 | 2012-08-27 | Gas phase depositing furnace used for preparing pyrolytic boron nitride products and provided with separated air inlets |
Country Status (1)
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| CN (1) | CN202786419U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105296960A (en) * | 2015-10-28 | 2016-02-03 | 上海大学 | Preparation method of homogenized boron nitride coating |
| CN106544626A (en) * | 2016-11-25 | 2017-03-29 | 大连圣洁热处理科技发展有限公司 | A kind of cartridge of ion-nitriding furnace |
| CN108330465A (en) * | 2018-04-04 | 2018-07-27 | 博宇（朝阳）半导体科技有限公司 | A kind of boron nitride crucible production system |
-
2012
- 2012-08-27 CN CN 201220429022 patent/CN202786419U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105296960A (en) * | 2015-10-28 | 2016-02-03 | 上海大学 | Preparation method of homogenized boron nitride coating |
| CN106544626A (en) * | 2016-11-25 | 2017-03-29 | 大连圣洁热处理科技发展有限公司 | A kind of cartridge of ion-nitriding furnace |
| CN108330465A (en) * | 2018-04-04 | 2018-07-27 | 博宇（朝阳）半导体科技有限公司 | A kind of boron nitride crucible production system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190610 Address after: 101101 No. 108 Binhe Road, Tongzhou District, Beijing Co-patentee after: Bo Yu (Chaoyang) semiconductor technology Co., Ltd. Patentee after: Beijing Boyu Semiconductor Process Containers Technology Co., Ltd. Co-patentee after: Bo Yu (Tianjin) semiconductor materials Co., Ltd. Address before: 101101 No. 108 Binhe Road, Tongzhou District, Beijing Patentee before: Beijing Boyu Semiconductor Process Containers Technology Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20200827 |