CN102449433B - 一种用于测定围绕三个相互垂直的坐标x、y与z中至少一个坐标旋转运动的微陀螺仪 - Google Patents
一种用于测定围绕三个相互垂直的坐标x、y与z中至少一个坐标旋转运动的微陀螺仪 Download PDFInfo
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- CN102449433B CN102449433B CN201080023084.0A CN201080023084A CN102449433B CN 102449433 B CN102449433 B CN 102449433B CN 201080023084 A CN201080023084 A CN 201080023084A CN 102449433 B CN102449433 B CN 102449433B
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- oscillating mass
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- gyroscope
- spring
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- 230000033001 locomotion Effects 0.000 title claims abstract description 119
- 239000000758 substrate Substances 0.000 claims abstract description 64
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
- G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
Description
Claims (28)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009026511A DE102009026511A1 (de) | 2009-05-27 | 2009-05-27 | Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um mindestens eine von drei senkrecht aufeinanderstehenden Raumachsen |
DE102009026511.2 | 2009-05-27 | ||
PCT/EP2010/056959 WO2010136379A1 (de) | 2009-05-27 | 2010-05-20 | Mikro-gyroskop zur ermittlung von rotationsbewegungen um mindestens eine von drei senkrecht aufeinanderstehenden raumachsen |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102449433A CN102449433A (zh) | 2012-05-09 |
CN102449433B true CN102449433B (zh) | 2015-01-07 |
Family
ID=42341328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201080023084.0A Active CN102449433B (zh) | 2009-05-27 | 2010-05-20 | 一种用于测定围绕三个相互垂直的坐标x、y与z中至少一个坐标旋转运动的微陀螺仪 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8904866B2 (zh) |
EP (1) | EP2435788B1 (zh) |
CN (1) | CN102449433B (zh) |
DE (1) | DE102009026511A1 (zh) |
WO (1) | WO2010136379A1 (zh) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9097524B2 (en) | 2009-09-11 | 2015-08-04 | Invensense, Inc. | MEMS device with improved spring system |
US8534127B2 (en) | 2009-09-11 | 2013-09-17 | Invensense, Inc. | Extension-mode angular velocity sensor |
FI124020B (fi) * | 2011-03-04 | 2014-02-14 | Murata Electronics Oy | Jousirakenne, resonaattori, resonaattorimatriisi ja anturi |
DE102011057032B4 (de) * | 2011-12-23 | 2019-09-19 | Hanking Electronics, Ltd. | Mikro-Gyroskop und Verfahren zum Betreiben eines Mikro-Gyroskops |
DE102011057081A1 (de) * | 2011-12-28 | 2013-07-04 | Maxim Integrated Products, Inc. | Mikro-Drehratensensor und Verfahren zum Betreiben eines Mikro-Drehratensensors |
US9506756B2 (en) * | 2013-03-15 | 2016-11-29 | Freescale Semiconductor, Inc. | Multiple axis rate sensor |
US9360319B2 (en) | 2013-09-05 | 2016-06-07 | Freescale Semiconductor, Inc. | Multiple sense axis MEMS gyroscope having a single drive mode |
FI125695B (en) * | 2013-09-11 | 2016-01-15 | Murata Manufacturing Co | Improved gyroscope construction and gyroscope |
EP2887013B1 (en) * | 2013-12-18 | 2016-08-10 | Tronic's Microsystems | MEMS sensor for measuring z-axis angular rate |
US10234476B2 (en) | 2015-05-20 | 2019-03-19 | Google Llc | Extracting inertial information from nonlinear periodic signals |
DE102015213450A1 (de) * | 2015-07-17 | 2017-01-19 | Robert Bosch Gmbh | MEMS Drehratensensor mit kombiniertem Antrieb und Detektion |
US20180031602A1 (en) * | 2016-07-27 | 2018-02-01 | Lumedyne Technologies Incorporated | Converting rotational motion to linear motion |
US10234477B2 (en) | 2016-07-27 | 2019-03-19 | Google Llc | Composite vibratory in-plane accelerometer |
JP6639377B2 (ja) | 2016-12-08 | 2020-02-05 | 株式会社東芝 | 振動装置 |
CN107478224B (zh) * | 2017-08-17 | 2019-12-24 | 深圳市道通智能航空技术有限公司 | 惯性测量装置以及机械设备 |
US11041726B2 (en) | 2017-08-17 | 2021-06-22 | Autel Robotics Co., Ltd. | Inertial measurement apparatus and mechanical device |
DE102017216010A1 (de) * | 2017-09-12 | 2019-03-14 | Robert Bosch Gmbh | Mikromechanische Drehraten-Sensoranordnung und entsprechendes Herstellungsverfahren |
JP6741113B2 (ja) * | 2018-05-08 | 2020-08-19 | 株式会社村田製作所 | ジャイロスコープのための同期構造 |
EP3671116B1 (en) * | 2018-12-19 | 2021-11-17 | Murata Manufacturing Co., Ltd. | Synchronized multi-axis gyroscope |
EP3671118B1 (en) | 2018-12-19 | 2021-08-25 | Murata Manufacturing Co., Ltd. | Vibration-robust multiaxis gyroscope |
US11891297B2 (en) * | 2019-07-05 | 2024-02-06 | Aac Acoustic Technologies (Shenzhen) Co., Ltd. | Motion control structure and actuator |
CN111879303B (zh) * | 2020-06-16 | 2022-04-05 | 深迪半导体(绍兴)有限公司 | 电容式mems陀螺仪及其加快起振速度的方法 |
CN111969888B (zh) * | 2020-08-07 | 2022-05-31 | 深圳市汇顶科技股份有限公司 | 压电电机和芯片的防抖装置 |
CN112611529B (zh) * | 2020-11-20 | 2021-12-21 | 南京航空航天大学 | 一种振动试验能力提升夹具 |
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CN101027536A (zh) * | 2004-09-27 | 2007-08-29 | 康蒂特米克微电子有限公司 | 旋转速度传感器 |
DE102007012163A1 (de) * | 2006-03-10 | 2007-10-25 | Continental Teves Ag & Co. Ohg | Drehratensensor mit Kopplungsbalken |
CN101319899A (zh) * | 2008-07-24 | 2008-12-10 | 北京大学 | 一种电容式水平轴微机械音叉陀螺 |
CN101324434A (zh) * | 2008-08-01 | 2008-12-17 | 北京航空航天大学 | 一种高性能谐振硅微机械陀螺 |
DE102007030120A1 (de) * | 2007-06-29 | 2009-01-02 | Litef Gmbh | Drehratensensor |
DE102007054505A1 (de) * | 2007-11-15 | 2009-05-20 | Robert Bosch Gmbh | Drehratensensor |
Family Cites Families (12)
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DE19500800A1 (de) * | 1994-06-16 | 1995-12-21 | Bosch Gmbh Robert | Beschleunigungssensor |
DE10040418A1 (de) * | 2000-08-18 | 2002-03-07 | Hahn Schickard Ges | Drehratensensor und Drehratensensorsystem |
US6859751B2 (en) * | 2001-12-17 | 2005-02-22 | Milli Sensor Systems & Actuators, Inc. | Planar inertial measurement units based on gyros and accelerometers with a common structure |
US6837107B2 (en) * | 2003-04-28 | 2005-01-04 | Analog Devices, Inc. | Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing |
FR2859528B1 (fr) * | 2003-09-09 | 2006-01-06 | Thales Sa | Gyrometre micro-usine a double diapason et a detection dans le plan de la plaque usinee |
US7168317B2 (en) * | 2003-11-04 | 2007-01-30 | Chung-Shan Institute Of Science And Technology | Planar 3-axis inertial measurement unit |
JP4887034B2 (ja) * | 2005-12-05 | 2012-02-29 | 日立オートモティブシステムズ株式会社 | 慣性センサ |
EP1832841B1 (en) | 2006-03-10 | 2015-12-30 | STMicroelectronics Srl | Microelectromechanical integrated sensor structure with rotary driving motion |
TWI286201B (en) | 2006-08-18 | 2007-09-01 | Nan-Chyuan Tsai | Three-axis sensing micro gyroscope |
US7461552B2 (en) * | 2006-10-23 | 2008-12-09 | Custom Sensors & Technologies, Inc. | Dual axis rate sensor |
DE102009001922A1 (de) * | 2009-03-26 | 2010-09-30 | Sensordynamics Ag | Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um drei senkrecht aufeinanderstehende Raumachsen x, y und z |
ITTO20091042A1 (it) * | 2009-12-24 | 2011-06-25 | St Microelectronics Srl | Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento |
-
2009
- 2009-05-27 DE DE102009026511A patent/DE102009026511A1/de not_active Withdrawn
-
2010
- 2010-05-20 WO PCT/EP2010/056959 patent/WO2010136379A1/de active Application Filing
- 2010-05-20 EP EP10721784.6A patent/EP2435788B1/de active Active
- 2010-05-20 CN CN201080023084.0A patent/CN102449433B/zh active Active
- 2010-05-20 US US13/319,234 patent/US8904866B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101027536A (zh) * | 2004-09-27 | 2007-08-29 | 康蒂特米克微电子有限公司 | 旋转速度传感器 |
DE102007012163A1 (de) * | 2006-03-10 | 2007-10-25 | Continental Teves Ag & Co. Ohg | Drehratensensor mit Kopplungsbalken |
DE102007030120A1 (de) * | 2007-06-29 | 2009-01-02 | Litef Gmbh | Drehratensensor |
DE102007054505A1 (de) * | 2007-11-15 | 2009-05-20 | Robert Bosch Gmbh | Drehratensensor |
CN101319899A (zh) * | 2008-07-24 | 2008-12-10 | 北京大学 | 一种电容式水平轴微机械音叉陀螺 |
CN101324434A (zh) * | 2008-08-01 | 2008-12-17 | 北京航空航天大学 | 一种高性能谐振硅微机械陀螺 |
Also Published As
Publication number | Publication date |
---|---|
US8904866B2 (en) | 2014-12-09 |
WO2010136379A1 (de) | 2010-12-02 |
DE102009026511A1 (de) | 2010-12-02 |
EP2435788B1 (de) | 2016-07-06 |
US20120055248A1 (en) | 2012-03-08 |
EP2435788A1 (de) | 2012-04-04 |
CN102449433A (zh) | 2012-05-09 |
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Address after: Austria - Graz A8403 Hotel Fende Aibei lebu Ling Applicant after: MAXIM INTEGRATED GmbH Address before: Austria - Graz A8403 Hotel Fende Aibei lebu Ling Applicant before: Induction Power Corp. |
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Effective date of registration: 20180803 Address after: Ohio, USA Patentee after: Hanking Microelectronics Co.,Ltd. Address before: Austria - Graz A8403 Hotel Fende Aibei lebu Ling Patentee before: Maxim Integrated GmbH |
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Effective date of registration: 20231109 Address after: Room A, 12th Floor, 300 Lockhart Road, Wan Chai, Hong Kong, China Patentee after: Hanwang Microelectronics Hong Kong Ltd. Address before: Ohio, USA Patentee before: Hanking Microelectronics Co.,Ltd. |