CN103175982B - 微机械科氏转速传感器 - Google Patents
微机械科氏转速传感器 Download PDFInfo
- Publication number
- CN103175982B CN103175982B CN201210563246.0A CN201210563246A CN103175982B CN 103175982 B CN103175982 B CN 103175982B CN 201210563246 A CN201210563246 A CN 201210563246A CN 103175982 B CN103175982 B CN 103175982B
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- Prior art keywords
- axis
- module
- speed probe
- micromechanics
- drive module
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- 239000000523 sample Substances 0.000 title claims abstract description 50
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- 230000010355 oscillation Effects 0.000 claims abstract description 9
- 238000004873 anchoring Methods 0.000 claims description 37
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 4
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- 238000010276 construction Methods 0.000 description 3
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/02—Rotary gyroscopes
- G01C19/04—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
- G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/12—Gyroscopes
- Y10T74/1293—Flexure hinges for gyros
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
Abstract
Description
Claims (16)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102011056971.5 | 2011-12-23 | ||
DE102011056971A DE102011056971A1 (de) | 2011-12-23 | 2011-12-23 | Mikromechanischer Coriolis-Drehratensensor |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103175982A CN103175982A (zh) | 2013-06-26 |
CN103175982B true CN103175982B (zh) | 2018-03-09 |
Family
ID=47358002
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210563246.0A Active CN103175982B (zh) | 2011-12-23 | 2012-12-21 | 微机械科氏转速传感器 |
Country Status (6)
Country | Link |
---|---|
US (2) | US9279681B2 (zh) |
EP (1) | EP2607850B1 (zh) |
JP (1) | JP6190587B2 (zh) |
KR (1) | KR102032732B1 (zh) |
CN (1) | CN103175982B (zh) |
DE (1) | DE102011056971A1 (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120285275A1 (en) * | 2011-05-10 | 2012-11-15 | Kongsberg Defence & Aerospace As | Stabilization platform |
FI125696B (en) * | 2013-09-11 | 2016-01-15 | Murata Manufacturing Co | Gyroscope structure and gyroscope with improved quadrature compensation |
FI125695B (en) | 2013-09-11 | 2016-01-15 | Murata Manufacturing Co | Improved gyroscope construction and gyroscope |
CN107289920B (zh) * | 2017-05-10 | 2021-02-09 | 中国航空工业集团公司西安飞行自动控制研究所 | 一种角速率敏感方向直接耦合的四质量块微机械陀螺 |
DE102017213802A1 (de) * | 2017-08-08 | 2019-02-14 | Robert Bosch Gmbh | Drehratensensor, Verfahren zur Herstellung eines Drehratensensors |
DE102017216010A1 (de) * | 2017-09-12 | 2019-03-14 | Robert Bosch Gmbh | Mikromechanische Drehraten-Sensoranordnung und entsprechendes Herstellungsverfahren |
DE102020202158A1 (de) * | 2020-02-19 | 2021-08-19 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikromechanische Drehraten-Sensoranordnung, Drehraten-Sensorarray und entsprechendes Herstellungsverfahren |
US11525680B2 (en) * | 2021-02-17 | 2022-12-13 | Nxp Usa, Inc. | Angular rate sensor with centrally positioned coupling structures |
CN115727840A (zh) * | 2021-08-31 | 2023-03-03 | 华为技术有限公司 | 惯性传感器和电子设备 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5635640A (en) * | 1995-06-06 | 1997-06-03 | Analog Devices, Inc. | Micromachined device with rotationally vibrated masses |
CN1813194A (zh) * | 2003-04-28 | 2006-08-02 | 模拟器件公司 | 提供一个加速度检测轴和两个角速度检测轴的微加工多传感器 |
CN101120232B (zh) * | 2004-12-31 | 2011-07-06 | Vti技术有限公司 | 振荡微机械角速度传感器 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11325905A (ja) * | 1998-05-08 | 1999-11-26 | Fuji Electric Co Ltd | 振動ジャイロ |
DE10051973A1 (de) * | 2000-10-20 | 2002-05-02 | Bosch Gmbh Robert | Mikromechanisches Bauelement |
US6823733B2 (en) * | 2002-11-04 | 2004-11-30 | Matsushita Electric Industrial Co., Ltd. | Z-axis vibration gyroscope |
US6837107B2 (en) * | 2003-04-28 | 2005-01-04 | Analog Devices, Inc. | Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing |
US6892575B2 (en) * | 2003-10-20 | 2005-05-17 | Invensense Inc. | X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging |
EP1794543B1 (de) * | 2004-09-27 | 2009-11-04 | Contitemic Microelectronic GmbH | Drehratensensor |
US7240552B2 (en) * | 2005-06-06 | 2007-07-10 | Bei Technologies, Inc. | Torsional rate sensor with momentum balance and mode decoupling |
WO2008032415A1 (fr) * | 2006-09-15 | 2008-03-20 | Hitachi, Ltd. | Détecteur de vitesse angulaire |
US20100095768A1 (en) * | 2008-10-20 | 2010-04-22 | Custom Sensors & Technologies, Inc. | Micromachined torsional gyroscope with anti-phase linear sense transduction |
DE102009000606A1 (de) * | 2009-02-04 | 2010-08-05 | Robert Bosch Gmbh | Mikromechanische Strukturen |
DE102009002066A1 (de) * | 2009-03-31 | 2010-10-07 | Sensordynamics Ag | Verfahren zum Erfassen von Beschleunigungen und Drehraten sowie MEMS-Sensor |
DE102009027897B4 (de) * | 2009-07-21 | 2023-07-20 | Robert Bosch Gmbh | Mikromechanischer Drehratensensor |
US8266961B2 (en) * | 2009-08-04 | 2012-09-18 | Analog Devices, Inc. | Inertial sensors with reduced sensitivity to quadrature errors and micromachining inaccuracies |
DE102010040516A1 (de) * | 2009-09-09 | 2011-03-10 | Continental Teves Ag & Co. Ohg | Doppelaxialer, schockrobuster Drehratensensor mit ineinanderliegenden, linear schwingenden seismischen Elementen |
DE102010029634B4 (de) * | 2010-06-02 | 2024-04-11 | Robert Bosch Gmbh | Drehratensensor |
DE102010029630A1 (de) * | 2010-06-02 | 2011-12-08 | Robert Bosch Gmbh | Drehratensensor |
DE102010062095A1 (de) * | 2010-11-29 | 2012-05-31 | Robert Bosch Gmbh | Drehratensensor und Verahren zum Betrieb eines Drehratensensors |
US9759563B2 (en) * | 2012-01-31 | 2017-09-12 | Nxp Usa, Inc. | Vibration robust x-axis ring gyro transducer |
US9506756B2 (en) * | 2013-03-15 | 2016-11-29 | Freescale Semiconductor, Inc. | Multiple axis rate sensor |
-
2011
- 2011-12-23 DE DE102011056971A patent/DE102011056971A1/de not_active Withdrawn
-
2012
- 2012-12-14 EP EP12197111.3A patent/EP2607850B1/en active Active
- 2012-12-19 US US13/720,217 patent/US9279681B2/en active Active
- 2012-12-20 JP JP2012277887A patent/JP6190587B2/ja active Active
- 2012-12-20 KR KR1020120149396A patent/KR102032732B1/ko active IP Right Grant
- 2012-12-21 CN CN201210563246.0A patent/CN103175982B/zh active Active
-
2016
- 2016-02-19 US US15/048,020 patent/US10024663B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5635640A (en) * | 1995-06-06 | 1997-06-03 | Analog Devices, Inc. | Micromachined device with rotationally vibrated masses |
CN1813194A (zh) * | 2003-04-28 | 2006-08-02 | 模拟器件公司 | 提供一个加速度检测轴和两个角速度检测轴的微加工多传感器 |
CN101120232B (zh) * | 2004-12-31 | 2011-07-06 | Vti技术有限公司 | 振荡微机械角速度传感器 |
Also Published As
Publication number | Publication date |
---|---|
JP6190587B2 (ja) | 2017-08-30 |
EP2607850A2 (en) | 2013-06-26 |
US20130269469A1 (en) | 2013-10-17 |
KR20130073832A (ko) | 2013-07-03 |
EP2607850A3 (en) | 2016-05-18 |
JP2013140147A (ja) | 2013-07-18 |
EP2607850B1 (en) | 2021-04-14 |
CN103175982A (zh) | 2013-06-26 |
US10024663B2 (en) | 2018-07-17 |
DE102011056971A1 (de) | 2013-06-27 |
KR102032732B1 (ko) | 2019-10-16 |
US9279681B2 (en) | 2016-03-08 |
US20160169676A1 (en) | 2016-06-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C53 | Correction of patent of invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Alessandro Rocky Inventor after: Eleonora Marchetti Inventor after: Lorenzo Bertini Inventor before: Alessandro Rocky Inventor before: Adolf Janbastiani |
|
COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: VERZINI MASSIMO GIAMBASTIANI ADOLFO TO: VERZINI MASSIMO ROCCHI ALESSANDRO BERTINI LORENZO |
|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180807 Address after: Ohio, USA Patentee after: Hanking Microelectronics Co.,Ltd. Address before: California, USA Patentee before: Maxim Integrated Products, Inc. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20231012 Address after: Hong-Kong Patentee after: Hanwang Microelectronics Hong Kong Ltd. Address before: Ohio, USA Patentee before: Hanking Microelectronics Co.,Ltd. |