CN101660532B - 一种多级干式真空泵的水冷*** - Google Patents
一种多级干式真空泵的水冷*** Download PDFInfo
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- CN101660532B CN101660532B CN2008100130207A CN200810013020A CN101660532B CN 101660532 B CN101660532 B CN 101660532B CN 2008100130207 A CN2008100130207 A CN 2008100130207A CN 200810013020 A CN200810013020 A CN 200810013020A CN 101660532 B CN101660532 B CN 101660532B
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CN2008100130207A CN101660532B (zh) | 2008-08-29 | 2008-08-29 | 一种多级干式真空泵的水冷*** |
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CN2008100130207A CN101660532B (zh) | 2008-08-29 | 2008-08-29 | 一种多级干式真空泵的水冷*** |
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CN101660532A CN101660532A (zh) | 2010-03-03 |
CN101660532B true CN101660532B (zh) | 2012-04-18 |
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101871714B (zh) * | 2010-06-24 | 2011-12-07 | 宁波明欣化工机械有限责任公司 | 抽真空循环水冷却工艺*** |
CN101922441B (zh) * | 2010-08-26 | 2015-01-07 | 常州亿晶光电科技有限公司 | 分流式真空泵机组水冷却装置 |
CN102619047B (zh) * | 2012-04-25 | 2013-12-11 | 黑牡丹(集团)股份有限公司 | 化料桶水冷却*** |
CN104632630B (zh) * | 2013-11-13 | 2017-01-11 | 中国科学院沈阳科学仪器股份有限公司 | 一种罗茨干泵热膨胀的控制***及方法 |
CN105649953A (zh) * | 2014-11-11 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | 一种用于多级干式真空泵的气路*** |
CN105334893A (zh) * | 2015-11-11 | 2016-02-17 | 成都九十度工业产品设计有限公司 | 基于热电制冷技术的营养液温控***及方法 |
CN106401976A (zh) * | 2016-10-21 | 2017-02-15 | 珠海格力电器股份有限公司 | 空调器及其螺杆压缩机 |
CN109681400A (zh) * | 2018-12-27 | 2019-04-26 | 广州通辉泵业有限公司 | 一种具有冷却装置的管中泵 |
JP7392593B2 (ja) * | 2020-07-01 | 2023-12-06 | マツダ株式会社 | 車両 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6599097B2 (en) * | 2001-08-14 | 2003-07-29 | Woosung Vacuum Co., Ltd. | Dry vacuum pump with improved gas discharging speed and pump cooling |
CN2764980Y (zh) * | 2004-12-27 | 2006-03-15 | 日扬电子科技(上海)有限公司 | 光电设备用干式真空泵冷却*** |
CN200961582Y (zh) * | 2006-10-17 | 2007-10-17 | 曾伟胜 | 一种水循环式真空泵的冷却装置 |
CN201265531Y (zh) * | 2008-08-29 | 2009-07-01 | 中国科学院沈阳科学仪器研制中心有限公司 | 一种多级干式真空泵的水冷*** |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6599097B2 (en) * | 2001-08-14 | 2003-07-29 | Woosung Vacuum Co., Ltd. | Dry vacuum pump with improved gas discharging speed and pump cooling |
CN2764980Y (zh) * | 2004-12-27 | 2006-03-15 | 日扬电子科技(上海)有限公司 | 光电设备用干式真空泵冷却*** |
CN200961582Y (zh) * | 2006-10-17 | 2007-10-17 | 曾伟胜 | 一种水循环式真空泵的冷却装置 |
CN201265531Y (zh) * | 2008-08-29 | 2009-07-01 | 中国科学院沈阳科学仪器研制中心有限公司 | 一种多级干式真空泵的水冷*** |
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CN101660532A (zh) | 2010-03-03 |
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Address after: Hunnan Shenyang 110168 Liaoning province Xinyuan street, No. 1 Patentee after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Address before: Hunnan Shenyang 110168 Liaoning province Xinyuan street, No. 1 Patentee before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S |
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Effective date of registration: 20201201 Address after: 226399 west side of Shuangfu road and south side of Wenzhen Road, high tech Zone, Nantong City, Jiangsu Province Patentee after: Zhongkeyi (Nantong) semiconductor equipment Co., Ltd Address before: Hunnan Shenyang 110168 Liaoning province Xinyuan street, No. 1 Patentee before: SKY TECHNOLOGY DEVELOPMENT Co.,Ltd. OF CHINESE ACADEMY OF SCIENCES |