CN101276773A - 悬挂型运输车和运输*** - Google Patents
悬挂型运输车和运输*** Download PDFInfo
- Publication number
- CN101276773A CN101276773A CNA2008100852595A CN200810085259A CN101276773A CN 101276773 A CN101276773 A CN 101276773A CN A2008100852595 A CNA2008100852595 A CN A2008100852595A CN 200810085259 A CN200810085259 A CN 200810085259A CN 101276773 A CN101276773 A CN 101276773A
- Authority
- CN
- China
- Prior art keywords
- fixture
- holder device
- transported object
- attitude
- supporting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000014759 maintenance of location Effects 0.000 claims description 29
- 230000032258 transport Effects 0.000 description 52
- 238000005516 engineering process Methods 0.000 description 20
- 238000012545 processing Methods 0.000 description 20
- 239000004065 semiconductor Substances 0.000 description 20
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000012546 transfer Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000011796 hollow space material Substances 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C1/00—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles
- B66C1/10—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by mechanical means
- B66C1/22—Rigid members, e.g. L-shaped members, with parts engaging the under surface of the loads; Crane hooks
- B66C1/28—Duplicate, e.g. pivoted, members engaging the loads from two sides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C11/00—Trolleys or crabs, e.g. operating above runways
- B66C11/12—Trolleys or crabs, e.g. operating above runways having hoisting gear adapted to special load-engaging elements and not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (8)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-060512 | 2007-03-09 | ||
JP2007060512A JP5088468B2 (ja) | 2007-03-09 | 2007-03-09 | 懸垂式搬送台車を用いた搬送システム |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101276773A true CN101276773A (zh) | 2008-10-01 |
CN101276773B CN101276773B (zh) | 2010-08-25 |
Family
ID=39740585
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008100852595A Expired - Fee Related CN101276773B (zh) | 2007-03-09 | 2008-03-10 | 悬挂型运输车和运输*** |
Country Status (5)
Country | Link |
---|---|
US (1) | US7686176B2 (zh) |
JP (1) | JP5088468B2 (zh) |
KR (1) | KR20080082928A (zh) |
CN (1) | CN101276773B (zh) |
TW (1) | TWI419823B (zh) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102234064A (zh) * | 2010-04-29 | 2011-11-09 | 达丰(上海)电脑有限公司 | 可实现集成下载操作的天车***及其下载操作方法 |
CN102234017A (zh) * | 2010-04-29 | 2011-11-09 | 达丰(上海)电脑有限公司 | 集成若干条组装产出线的天车***及其架设方法 |
CN102785821A (zh) * | 2012-08-24 | 2012-11-21 | 深圳市怡美工业设计有限公司 | 用于自动存取***中的悬挂式物品容器 |
CN102951435A (zh) * | 2011-08-22 | 2013-03-06 | 本田技研工业株式会社 | 车身升降装置 |
CN103295944A (zh) * | 2012-02-22 | 2013-09-11 | 三星电子株式会社 | 载体传输器以及利用其传输基板载体的方法 |
WO2014032300A1 (zh) * | 2012-08-31 | 2014-03-06 | 深圳市华星光电技术有限公司 | 一种玻璃基板的仓储***以及玻璃基板仓储方法 |
CN105984687A (zh) * | 2015-03-16 | 2016-10-05 | 株式会社大福 | 在天花板上存储和处理物品的装置 |
CN106794566A (zh) * | 2014-09-05 | 2017-05-31 | 富士机械制造株式会社 | 制造*** |
CN107428466A (zh) * | 2015-03-24 | 2017-12-01 | J·波拉特 | 用于高架仓储的***与方法 |
CN107857064A (zh) * | 2016-09-21 | 2018-03-30 | 株式会社大福 | 物品搬运设备 |
CN109153517A (zh) * | 2016-03-15 | 2019-01-04 | 阿莫瓦有限公司 | 用于在高架仓库中贮存和移除或重置贮存品的运输和移交***,以及贮存和获取机器 |
CN109987557A (zh) * | 2019-04-16 | 2019-07-09 | 李传聪 | 一种货架取料装置 |
CN110371556A (zh) * | 2013-08-09 | 2019-10-25 | 奥卡多创新有限公司 | 从存储***中取回部件的装置 |
CN110753667A (zh) * | 2017-06-30 | 2020-02-04 | 村田机械株式会社 | 搬运***以及搬运方法 |
WO2022021994A1 (zh) * | 2020-07-28 | 2022-02-03 | 长鑫存储技术有限公司 | 转运***及转运方法 |
US11858738B2 (en) | 2013-08-09 | 2024-01-02 | Ocado Innovation Limited | Apparatus for retrieving units from a storage system |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4831521B2 (ja) | 2002-06-19 | 2011-12-07 | 村田機械株式会社 | 縦型輪状コンベヤ及びオーバーヘッドホイストを基にした半導体製造のためのマテリアルの自動化処理システム |
US20070092359A1 (en) * | 2002-10-11 | 2007-04-26 | Brooks Automation, Inc. | Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position |
KR101544699B1 (ko) | 2002-10-11 | 2015-08-18 | 무라다기카이가부시끼가이샤 | 오버헤드 호이스트를 탑재한 오버헤드 호이스트 수송 차량 |
JP5062485B2 (ja) * | 2008-04-09 | 2012-10-31 | 株式会社ダイフク | 物品搬送設備 |
JP5284808B2 (ja) | 2009-01-26 | 2013-09-11 | 株式会社Sokudo | ストッカー装置及び基板処理装置 |
JP2010184760A (ja) * | 2009-02-10 | 2010-08-26 | Muratec Automation Co Ltd | 移載システム |
JP5212200B2 (ja) * | 2009-03-17 | 2013-06-19 | 村田機械株式会社 | 天井搬送システム |
EP2433300B1 (en) * | 2009-05-18 | 2021-07-07 | Crossing Automation, Inc. | Integrated systems for interfacing with substrate container storage systems |
WO2010135202A2 (en) * | 2009-05-18 | 2010-11-25 | Crossing Automation, Inc. | Substrate container storage system |
JP2011029550A (ja) * | 2009-07-29 | 2011-02-10 | Muratec Automation Co Ltd | 搬送システム及びその設定方法 |
TWI496732B (zh) * | 2009-07-31 | 2015-08-21 | Murata Machinery Ltd | 供工具利用之緩衝儲存和運輸裝置 |
CN102785882B (zh) * | 2012-08-24 | 2015-04-15 | 深圳市怡美工业设计有限公司 | 悬挂式自动存取*** |
US9287150B2 (en) | 2012-10-09 | 2016-03-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reticle transfer system and method |
JP6278751B2 (ja) * | 2014-03-04 | 2018-02-14 | 東京エレクトロン株式会社 | 搬送方法及び基板処理装置 |
JP6149805B2 (ja) * | 2014-06-05 | 2017-06-21 | 株式会社ダイフク | 搬送装置 |
KR101676795B1 (ko) * | 2015-03-16 | 2016-11-16 | 크린팩토메이션 주식회사 | 웨이퍼 캐리어 반송 로봇 |
JP6185619B2 (ja) * | 2015-10-30 | 2017-08-23 | トーヨーカネツソリューションズ株式会社 | 立体自動倉庫 |
KR102453197B1 (ko) * | 2015-10-30 | 2022-10-12 | 삼성전자주식회사 | 기판 이송 용기 저장 장치 |
US10850923B2 (en) * | 2016-10-07 | 2020-12-01 | Murata Machinery, Ltd. | Transporter and transporting method |
DE102017114643A1 (de) * | 2017-06-30 | 2019-01-03 | Psb Intralogistics Gmbh | Regalbediengerät geeignet für den Einsatz in einem Hochregallager |
SG11202108085UA (en) * | 2019-01-25 | 2021-08-30 | Murata Machinery Ltd | Transport system |
CN111268570B (zh) * | 2020-03-25 | 2024-07-09 | 中国五冶集团有限公司 | 一种幕墙玻璃吊装运输平台 |
JP7215457B2 (ja) * | 2020-04-28 | 2023-01-31 | 株式会社ダイフク | 物品搬送設備 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2102995A (en) * | 1935-10-22 | 1937-12-21 | James W Coombs | Article filing and delivery system |
US3750804A (en) * | 1969-03-07 | 1973-08-07 | Triax Co | Load handling mechanism and automatic storage system |
US3786942A (en) * | 1970-02-09 | 1974-01-22 | E Dane | Dry sail marina |
US3743115A (en) * | 1971-08-08 | 1973-07-03 | Rack Eng Co | Rack storage apparatus |
US4113119A (en) * | 1977-02-10 | 1978-09-12 | Si Handling Systems, Inc. | Apparatus for loading articles onto vertically spaced horizontally disposed shelves |
US4265583A (en) * | 1978-08-15 | 1981-05-05 | General Electric Company | Lift truck for facilitating insertion and removal of horizontal draw-out switchgear unit |
JPH0315807U (zh) * | 1989-06-28 | 1991-02-18 | ||
US5228820A (en) * | 1990-09-21 | 1993-07-20 | Advanced Technology And Research Corporation | Article handling system with distributed storage |
US5829942A (en) * | 1997-02-10 | 1998-11-03 | Automation Technologies Industries | Apparatus for loading and unloading circuit boards along a conveyor system |
US6726429B2 (en) * | 2002-02-19 | 2004-04-27 | Vertical Solutions, Inc. | Local store for a wafer processing station |
US7867444B2 (en) * | 2002-05-30 | 2011-01-11 | Siemens Healthcare Diagnostics, Inc. | Lab cell centrifuging module |
US7090457B2 (en) * | 2002-06-07 | 2006-08-15 | Celeritas Technologies | Portable lift for installing and uninstalling computer-related equipment into a storage cabinet |
JP4831521B2 (ja) | 2002-06-19 | 2011-12-07 | 村田機械株式会社 | 縦型輪状コンベヤ及びオーバーヘッドホイストを基にした半導体製造のためのマテリアルの自動化処理システム |
US6848882B2 (en) * | 2003-03-31 | 2005-02-01 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system |
JP2005150129A (ja) * | 2003-11-11 | 2005-06-09 | Asyst Shinko Inc | 移載装置及び移載システム |
JP4045451B2 (ja) | 2003-12-26 | 2008-02-13 | 村田機械株式会社 | 天井走行車システム |
JP4915051B2 (ja) * | 2005-03-28 | 2012-04-11 | ムラテックオートメーション株式会社 | 自動搬送システム |
-
2007
- 2007-03-09 JP JP2007060512A patent/JP5088468B2/ja not_active Expired - Fee Related
-
2008
- 2008-03-07 TW TW097108009A patent/TWI419823B/zh not_active IP Right Cessation
- 2008-03-07 KR KR1020080021426A patent/KR20080082928A/ko not_active Application Discontinuation
- 2008-03-10 US US12/045,060 patent/US7686176B2/en not_active Expired - Fee Related
- 2008-03-10 CN CN2008100852595A patent/CN101276773B/zh not_active Expired - Fee Related
Cited By (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102234064A (zh) * | 2010-04-29 | 2011-11-09 | 达丰(上海)电脑有限公司 | 可实现集成下载操作的天车***及其下载操作方法 |
CN102234017A (zh) * | 2010-04-29 | 2011-11-09 | 达丰(上海)电脑有限公司 | 集成若干条组装产出线的天车***及其架设方法 |
CN102234064B (zh) * | 2010-04-29 | 2013-05-08 | 达丰(上海)电脑有限公司 | 可实现集成下载操作的天车***及其下载操作方法 |
CN102234017B (zh) * | 2010-04-29 | 2015-03-04 | 达丰(上海)电脑有限公司 | 集成若干条组装产出线的天车***及其架设方法 |
CN102951435A (zh) * | 2011-08-22 | 2013-03-06 | 本田技研工业株式会社 | 车身升降装置 |
CN103295944A (zh) * | 2012-02-22 | 2013-09-11 | 三星电子株式会社 | 载体传输器以及利用其传输基板载体的方法 |
CN102785821A (zh) * | 2012-08-24 | 2012-11-21 | 深圳市怡美工业设计有限公司 | 用于自动存取***中的悬挂式物品容器 |
WO2014032300A1 (zh) * | 2012-08-31 | 2014-03-06 | 深圳市华星光电技术有限公司 | 一种玻璃基板的仓储***以及玻璃基板仓储方法 |
US10913602B2 (en) | 2013-08-09 | 2021-02-09 | Ocado Innovation Limited | Apparatus for retrieving units from a storage system |
US11066237B2 (en) | 2013-08-09 | 2021-07-20 | Ocado Innovation Limited | Apparatus for retrieving units from a storage system |
US11939157B2 (en) | 2013-08-09 | 2024-03-26 | Ocado Innovation Limited | Robotic service device and handling method |
US11858738B2 (en) | 2013-08-09 | 2024-01-02 | Ocado Innovation Limited | Apparatus for retrieving units from a storage system |
CN110371556A (zh) * | 2013-08-09 | 2019-10-25 | 奥卡多创新有限公司 | 从存储***中取回部件的装置 |
CN110371556B (zh) * | 2013-08-09 | 2021-12-31 | 奥卡多创新有限公司 | 从存储***中取回部件的装置 |
US10961051B1 (en) | 2013-08-09 | 2021-03-30 | Ocado Innovation Limited | Apparatus for retrieving units from a storage system |
CN106794566A (zh) * | 2014-09-05 | 2017-05-31 | 富士机械制造株式会社 | 制造*** |
CN105984687B (zh) * | 2015-03-16 | 2019-03-22 | 株式会社大福 | 在天花板上存储和处理物品的装置 |
CN105984687A (zh) * | 2015-03-16 | 2016-10-05 | 株式会社大福 | 在天花板上存储和处理物品的装置 |
CN107428466A (zh) * | 2015-03-24 | 2017-12-01 | J·波拉特 | 用于高架仓储的***与方法 |
CN107428466B (zh) * | 2015-03-24 | 2018-07-31 | J·波拉特 | 用于高架仓储的***与方法 |
CN109153517A (zh) * | 2016-03-15 | 2019-01-04 | 阿莫瓦有限公司 | 用于在高架仓库中贮存和移除或重置贮存品的运输和移交***,以及贮存和获取机器 |
CN107857064A (zh) * | 2016-09-21 | 2018-03-30 | 株式会社大福 | 物品搬运设备 |
CN110753667A (zh) * | 2017-06-30 | 2020-02-04 | 村田机械株式会社 | 搬运***以及搬运方法 |
CN109987557A (zh) * | 2019-04-16 | 2019-07-09 | 李传聪 | 一种货架取料装置 |
WO2022021994A1 (zh) * | 2020-07-28 | 2022-02-03 | 长鑫存储技术有限公司 | 转运***及转运方法 |
Also Published As
Publication number | Publication date |
---|---|
US20080217278A1 (en) | 2008-09-11 |
JP2008222346A (ja) | 2008-09-25 |
US7686176B2 (en) | 2010-03-30 |
CN101276773B (zh) | 2010-08-25 |
KR20080082928A (ko) | 2008-09-12 |
JP5088468B2 (ja) | 2012-12-05 |
TW200920670A (en) | 2009-05-16 |
TWI419823B (zh) | 2013-12-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101276773B (zh) | 悬挂型运输车和运输*** | |
WO2019017292A1 (ja) | 搬送車及び搬送設備(transport vehicle and transport facility) | |
US11952213B2 (en) | Ceiling suspended shelf | |
US8374719B2 (en) | Article processing facility and its control method | |
JP2019043753A (ja) | 搬送車、及び、搬送設備 | |
EP3476772B1 (en) | Conveyance system | |
US8757955B2 (en) | Storage, transporting system and storage set | |
TW200918437A (en) | Storage, storage set and transporting system | |
CN108290687B (zh) | 保管装置以及输送*** | |
JP2020065015A (ja) | 物品搬送車 | |
US11942347B2 (en) | Storage system | |
TW200807490A (en) | Transportation system and transportation method | |
CN105314345B (zh) | 搬运装置 | |
JP5217416B2 (ja) | 保管庫及び入出庫方法 | |
CN102683251A (zh) | 基板处理装置 | |
WO2012014561A1 (ja) | 搬送システム | |
JP2011246223A (ja) | 自動倉庫 | |
US9056718B2 (en) | Transfer device | |
KR20200100982A (ko) | 스토커 유닛 및 이를 갖는 물품 이송 장치 | |
US11876009B2 (en) | Overhead transport vehicle | |
JP4534801B2 (ja) | 基板収納容器 | |
JP2009062154A (ja) | 保管庫及び保管庫付き搬送システム | |
JP2008066534A (ja) | 基板搬送システムおよび基板搬送方法 | |
TWI481539B (zh) | 保管庫以及出入庫方法 | |
JP2009012965A (ja) | ストッカ装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: MURATA AUTOMATIC MACHINERY CO., LTD. Free format text: FORMER OWNER: JAPAN AXIST TECHNOLOGY CO., LTD. Effective date: 20091225 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20091225 Address after: Kyoto Japan Applicant after: Asyst Technologies Address before: Mie, Japan Applicant before: Asyst Technologies Japan Inc. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: MURATA MACHINERY CO., LTD. Free format text: FORMER OWNER: ASYST TECHNOLOGIES Effective date: 20130513 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20130513 Address after: Kyoto Japan Patentee after: Murata Machinery Co., Ltd. Address before: Kyoto Japan Patentee before: Asyst Technologies |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100825 Termination date: 20190310 |
|
CF01 | Termination of patent right due to non-payment of annual fee |