CN100569441C - 切削装置 - Google Patents
切削装置 Download PDFInfo
- Publication number
- CN100569441C CN100569441C CNB200610139548XA CN200610139548A CN100569441C CN 100569441 C CN100569441 C CN 100569441C CN B200610139548X A CNB200610139548X A CN B200610139548XA CN 200610139548 A CN200610139548 A CN 200610139548A CN 100569441 C CN100569441 C CN 100569441C
- Authority
- CN
- China
- Prior art keywords
- cutting
- hole
- object lens
- clamping platform
- curtain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Dicing (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Auxiliary Devices For Machine Tools (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005277944A JP4664788B2 (ja) | 2005-09-26 | 2005-09-26 | 切削装置 |
JP277944/2005 | 2005-09-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1939661A CN1939661A (zh) | 2007-04-04 |
CN100569441C true CN100569441C (zh) | 2009-12-16 |
Family
ID=37958326
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB200610139548XA Active CN100569441C (zh) | 2005-09-26 | 2006-09-26 | 切削装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4664788B2 (ja) |
CN (1) | CN100569441C (ja) |
TW (1) | TWI392004B (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5060195B2 (ja) * | 2007-08-01 | 2012-10-31 | 株式会社ディスコ | 切削装置 |
JP5198910B2 (ja) * | 2008-03-24 | 2013-05-15 | 株式会社ディスコ | 切削装置 |
DE102008040071A1 (de) * | 2008-07-02 | 2010-01-07 | Robert Bosch Gmbh | Werkzeugmaschine, insbesondere handgehaltene Werkzeugmaschine |
JP5467816B2 (ja) * | 2009-08-25 | 2014-04-09 | 株式会社ディスコ | 撮像装置 |
JP5405972B2 (ja) * | 2009-10-07 | 2014-02-05 | 株式会社ディスコ | 撮像装置 |
JP5984038B2 (ja) * | 2011-04-06 | 2016-09-06 | 株式会社東京精密 | ダイシング装置 |
JP5955530B2 (ja) * | 2011-11-02 | 2016-07-20 | 株式会社ディスコ | 切削装置 |
JP6218511B2 (ja) * | 2013-09-02 | 2017-10-25 | Towa株式会社 | 切断装置及び切断方法 |
JP6985034B2 (ja) | 2017-06-21 | 2021-12-22 | 株式会社ディスコ | 切削装置 |
JP2024072973A (ja) | 2022-11-17 | 2024-05-29 | 株式会社ディスコ | 切削装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0371644U (ja) * | 1989-11-15 | 1991-07-19 | ||
US6152803A (en) * | 1995-10-20 | 2000-11-28 | Boucher; John N. | Substrate dicing method |
JP2000108119A (ja) * | 1998-10-08 | 2000-04-18 | Disco Abrasive Syst Ltd | 加工装置 |
JP3485816B2 (ja) * | 1998-12-09 | 2004-01-13 | 太陽誘電株式会社 | ダイシング装置 |
JP4694675B2 (ja) * | 2000-06-28 | 2011-06-08 | 株式会社ディスコ | 切削装置の撮像機構 |
JP3956643B2 (ja) * | 2001-04-27 | 2007-08-08 | 株式会社東京精密 | ダイシングマシン |
JP4216565B2 (ja) * | 2002-10-28 | 2009-01-28 | 株式会社ディスコ | 切削装置 |
-
2005
- 2005-09-26 JP JP2005277944A patent/JP4664788B2/ja active Active
-
2006
- 2006-08-24 TW TW95131173A patent/TWI392004B/zh active
- 2006-09-26 CN CNB200610139548XA patent/CN100569441C/zh active Active
Also Published As
Publication number | Publication date |
---|---|
TW200721290A (en) | 2007-06-01 |
JP4664788B2 (ja) | 2011-04-06 |
JP2007088361A (ja) | 2007-04-05 |
CN1939661A (zh) | 2007-04-04 |
TWI392004B (zh) | 2013-04-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant |