CN100569441C - 切削装置 - Google Patents

切削装置 Download PDF

Info

Publication number: CN100569441C
Authority: CN; China
Prior art keywords: cutting; hole; object lens; clamping platform; curtain
Prior art date: 2005-09-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

Application number

CNB200610139548XA

Other languages

English (en)

Chinese (zh)

Other versions

CN1939661A (zh

Inventor

藤波孝一

伊藤直之

吴斌

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Disco Corp

Original Assignee

Disco Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2005-09-26

Filing date

2006-09-26

Publication date

2009-12-16

2006-09-26 Application filed by Disco Corp filed Critical Disco Corp

2007-04-04 Publication of CN1939661A publication Critical patent/CN1939661A/zh

2009-12-16 Application granted granted Critical

2009-12-16 Publication of CN100569441C publication Critical patent/CN100569441C/zh

Status Active legal-status Critical Current

2026-09-26 Anticipated expiration legal-status Critical

Links

Images

Landscapes

Dicing (AREA)
Machine Tool Sensing Apparatuses (AREA)
Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Auxiliary Devices For Machine Tools (AREA)

CNB200610139548XA 2005-09-26 2006-09-26 切削装置 Active CN100569441C (zh)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2005277944A JP4664788B2 (ja)	2005-09-26	2005-09-26	切削装置
JP277944/2005		2005-09-26

Publications (2)

Publication Number	Publication Date
CN1939661A CN1939661A (zh)	2007-04-04
CN100569441C true CN100569441C (zh)	2009-12-16

Family

ID=37958326

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CNB200610139548XA Active CN100569441C (zh)	2005-09-26	2006-09-26	切削装置

Country Status (3)

Country	Link
JP (1)	JP4664788B2 (ja)
CN (1)	CN100569441C (ja)
TW (1)	TWI392004B (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP5060195B2 (ja) *	2007-08-01	2012-10-31	株式会社ディスコ	切削装置
JP5198910B2 (ja) *	2008-03-24	2013-05-15	株式会社ディスコ	切削装置
DE102008040071A1 (de) *	2008-07-02	2010-01-07	Robert Bosch Gmbh	Werkzeugmaschine, insbesondere handgehaltene Werkzeugmaschine
JP5467816B2 (ja) *	2009-08-25	2014-04-09	株式会社ディスコ	撮像装置
JP5405972B2 (ja) *	2009-10-07	2014-02-05	株式会社ディスコ	撮像装置
JP5984038B2 (ja) *	2011-04-06	2016-09-06	株式会社東京精密	ダイシング装置
JP5955530B2 (ja) *	2011-11-02	2016-07-20	株式会社ディスコ	切削装置
JP6218511B2 (ja) *	2013-09-02	2017-10-25	Ｔｏｗａ株式会社	切断装置及び切断方法
JP6985034B2 (ja)	2017-06-21	2021-12-22	株式会社ディスコ	切削装置
JP2024072973A (ja)	2022-11-17	2024-05-29	株式会社ディスコ	切削装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0371644U (ja) *	1989-11-15	1991-07-19
US6152803A (en) *	1995-10-20	2000-11-28	Boucher; John N.	Substrate dicing method
JP2000108119A (ja) *	1998-10-08	2000-04-18	Disco Abrasive Syst Ltd	加工装置
JP3485816B2 (ja) *	1998-12-09	2004-01-13	太陽誘電株式会社	ダイシング装置
JP4694675B2 (ja) *	2000-06-28	2011-06-08	株式会社ディスコ	切削装置の撮像機構
JP3956643B2 (ja) *	2001-04-27	2007-08-08	株式会社東京精密	ダイシングマシン
JP4216565B2 (ja) *	2002-10-28	2009-01-28	株式会社ディスコ	切削装置

2005
- 2005-09-26 JP JP2005277944A patent/JP4664788B2/ja active Active
2006
- 2006-08-24 TW TW95131173A patent/TWI392004B/zh active
- 2006-09-26 CN CNB200610139548XA patent/CN100569441C/zh active Active

Also Published As

Publication number	Publication date
TW200721290A (en)	2007-06-01
JP4664788B2 (ja)	2011-04-06
JP2007088361A (ja)	2007-04-05
CN1939661A (zh)	2007-04-04
TWI392004B (zh)	2013-04-01

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Legal Events

Date	Code	Title
2007-04-04	C06	Publication
2007-04-04	PB01	Publication
2008-09-10	C10	Entry into substantive examination
2008-09-10	SE01	Entry into force of request for substantive examination
2009-12-16	C14	Grant of patent or utility model
2009-12-16	GR01	Patent grant