CN100493731C - 双流体喷射喷嘴装置 - Google Patents
双流体喷射喷嘴装置 Download PDFInfo
- Publication number
- CN100493731C CN100493731C CNB2005100930942A CN200510093094A CN100493731C CN 100493731 C CN100493731 C CN 100493731C CN B2005100930942 A CNB2005100930942 A CN B2005100930942A CN 200510093094 A CN200510093094 A CN 200510093094A CN 100493731 C CN100493731 C CN 100493731C
- Authority
- CN
- China
- Prior art keywords
- fluid
- spray
- hole
- nozzle
- nozzle head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
- B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
Landscapes
- Nozzles (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004245263A JP4870342B2 (ja) | 2004-08-25 | 2004-08-25 | 二流体噴射ノズル装置 |
JP2004245263 | 2004-08-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1739862A CN1739862A (zh) | 2006-03-01 |
CN100493731C true CN100493731C (zh) | 2009-06-03 |
Family
ID=36092475
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100930942A Active CN100493731C (zh) | 2004-08-25 | 2005-08-25 | 双流体喷射喷嘴装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4870342B2 (ja) |
KR (1) | KR101188293B1 (ja) |
CN (1) | CN100493731C (ja) |
TW (1) | TWI344862B (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007134056A2 (en) * | 2006-05-08 | 2007-11-22 | Akrion Technologies, Inc. | Spray jet cleaning apparatus and method |
DE102007058835A1 (de) * | 2007-11-30 | 2009-06-04 | Hansgrohe Ag | Belüftungsanordnung für Brausestrahlen |
JP2015192956A (ja) * | 2014-03-31 | 2015-11-05 | ダイキン工業株式会社 | 二流体噴霧器及びこれを備えた空気調和装置の室外機 |
CN104384037B (zh) * | 2014-10-28 | 2017-01-25 | 亿川科技(成都)有限责任公司 | 双流体雾化喷嘴 |
CN105080974A (zh) * | 2015-08-24 | 2015-11-25 | 江苏省冶金设计院有限公司 | 一种轧辊水气冷却喷嘴组件 |
KR101915287B1 (ko) * | 2016-12-07 | 2018-11-05 | (주)엔피홀딩스 | 혼합 유체 분사 장치 |
CN107684986A (zh) * | 2017-08-10 | 2018-02-13 | 深圳市华星光电技术有限公司 | 一种新型双流体喷嘴装置 |
CN107442313B (zh) * | 2017-09-19 | 2019-08-02 | 深圳市华星光电技术有限公司 | 一种喷涂装置、喷涂***以及喷涂方法 |
CN107497605B (zh) * | 2017-09-28 | 2023-08-22 | 广东美的厨房电器制造有限公司 | 油烟机用喷头、喷淋清洗装置和油烟机 |
CN111940159B (zh) * | 2019-05-14 | 2023-05-26 | 沈阳芯源微电子设备股份有限公司 | 一种晶圆表面颗粒清洗双旋喷嘴 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3488006A (en) * | 1968-01-05 | 1970-01-06 | Steinen Mfg Co Wm | High pressure nozzle |
JPS53413B2 (ja) * | 1971-08-07 | 1978-01-09 | ||
JPS58193010A (ja) * | 1982-05-04 | 1983-11-10 | Yamamura Glass Kk | 重油燃焼用バ−ナ− |
JPS59169555A (ja) * | 1983-03-15 | 1984-09-25 | Kyoritsu Gokin Seisakusho:Kk | 噴霧用ノズル |
JP4005326B2 (ja) * | 2000-09-22 | 2007-11-07 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
JP4312997B2 (ja) * | 2002-06-04 | 2009-08-12 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及びノズル |
-
2004
- 2004-08-25 JP JP2004245263A patent/JP4870342B2/ja active Active
-
2005
- 2005-07-21 TW TW094124706A patent/TWI344862B/zh active
- 2005-08-12 KR KR1020050074346A patent/KR101188293B1/ko active IP Right Grant
- 2005-08-25 CN CNB2005100930942A patent/CN100493731C/zh active Active
Also Published As
Publication number | Publication date |
---|---|
JP2006061786A (ja) | 2006-03-09 |
JP4870342B2 (ja) | 2012-02-08 |
CN1739862A (zh) | 2006-03-01 |
KR101188293B1 (ko) | 2012-10-09 |
TWI344862B (en) | 2011-07-11 |
KR20060050448A (ko) | 2006-05-19 |
TW200607571A (en) | 2006-03-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100493731C (zh) | 双流体喷射喷嘴装置 | |
KR100663133B1 (ko) | 기판처리방법 및 기판처리장치 | |
JP4763575B2 (ja) | 基板処理装置および基板処理方法 | |
KR100760893B1 (ko) | 기판 세정용 2 유체 노즐 및 기판 세정 장치 | |
KR101122289B1 (ko) | 내부 혼합식 분무 노즐 | |
USRE30004E (en) | Low drift spray nozzle | |
CN105921295B (zh) | 一种进料雾化喷嘴 | |
CN106409657B (zh) | 喷嘴和包括该喷嘴的基板处理设备 | |
KR101275760B1 (ko) | 광학렌즈 또는 다른 기판의 세척 장치용 고압 액체 분사노즐 | |
KR101060686B1 (ko) | 세척 효율이 향상된 기판 세정 장치 | |
EP0515515A1 (en) | REGULATION OF DEFLECTION OF A JET OF LIQUID DURING ITS DISTRIBUTION. | |
RU2150336C1 (ru) | Мелкодисперсный распылитель жидкости | |
JPH09220495A (ja) | 流体噴出ノズル | |
KR100221699B1 (ko) | 기판회전식 처리방법 및 기판회전식 처리장치 | |
KR20190019600A (ko) | 2-유체 노즐 및 이를 포함하는 기판 처리 장치 | |
KR102604406B1 (ko) | 노즐 유닛 및 이를 구비한 기판 처리 장치 | |
CN100541707C (zh) | 气体注射装置 | |
JPH02119963A (ja) | 気体流体で液体を送り出す噴射装置 | |
KR102389224B1 (ko) | 기판 세정용 2류체 노즐 | |
KR20200056045A (ko) | 이류체 분사노즐 | |
US3948444A (en) | Low drift spray method | |
CN105070676B (zh) | 一种双氮气保护喷射装置及使用该装置的晶片清洗方法 | |
KR102602586B1 (ko) | 유체 혼합물 분사 장치 | |
JP6069398B2 (ja) | 2流体ノズル及び基板液処理装置並びに基板液処理方法 | |
JPS6121755A (ja) | スプレー・ポスト |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant |