CN100493731C - 双流体喷射喷嘴装置 - Google Patents

双流体喷射喷嘴装置 Download PDF

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Publication number
CN100493731C
CN100493731C CNB2005100930942A CN200510093094A CN100493731C CN 100493731 C CN100493731 C CN 100493731C CN B2005100930942 A CNB2005100930942 A CN B2005100930942A CN 200510093094 A CN200510093094 A CN 200510093094A CN 100493731 C CN100493731 C CN 100493731C
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CN
China
Prior art keywords
fluid
spray
hole
nozzle
nozzle head
Prior art date
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Active
Application number
CNB2005100930942A
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English (en)
Chinese (zh)
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CN1739862A (zh
Inventor
矶明典
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of CN1739862A publication Critical patent/CN1739862A/zh
Application granted granted Critical
Publication of CN100493731C publication Critical patent/CN100493731C/zh
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02Spray pistols; Apparatus for discharge
    • B05B7/04Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
    • B05B7/0416Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays

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  • Nozzles (AREA)
CNB2005100930942A 2004-08-25 2005-08-25 双流体喷射喷嘴装置 Active CN100493731C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004245263A JP4870342B2 (ja) 2004-08-25 2004-08-25 二流体噴射ノズル装置
JP2004245263 2004-08-25

Publications (2)

Publication Number Publication Date
CN1739862A CN1739862A (zh) 2006-03-01
CN100493731C true CN100493731C (zh) 2009-06-03

Family

ID=36092475

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2005100930942A Active CN100493731C (zh) 2004-08-25 2005-08-25 双流体喷射喷嘴装置

Country Status (4)

Country Link
JP (1) JP4870342B2 (ja)
KR (1) KR101188293B1 (ja)
CN (1) CN100493731C (ja)
TW (1) TWI344862B (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007134056A2 (en) * 2006-05-08 2007-11-22 Akrion Technologies, Inc. Spray jet cleaning apparatus and method
DE102007058835A1 (de) * 2007-11-30 2009-06-04 Hansgrohe Ag Belüftungsanordnung für Brausestrahlen
JP2015192956A (ja) * 2014-03-31 2015-11-05 ダイキン工業株式会社 二流体噴霧器及びこれを備えた空気調和装置の室外機
CN104384037B (zh) * 2014-10-28 2017-01-25 亿川科技(成都)有限责任公司 双流体雾化喷嘴
CN105080974A (zh) * 2015-08-24 2015-11-25 江苏省冶金设计院有限公司 一种轧辊水气冷却喷嘴组件
KR101915287B1 (ko) * 2016-12-07 2018-11-05 (주)엔피홀딩스 혼합 유체 분사 장치
CN107684986A (zh) * 2017-08-10 2018-02-13 深圳市华星光电技术有限公司 一种新型双流体喷嘴装置
CN107442313B (zh) * 2017-09-19 2019-08-02 深圳市华星光电技术有限公司 一种喷涂装置、喷涂***以及喷涂方法
CN107497605B (zh) * 2017-09-28 2023-08-22 广东美的厨房电器制造有限公司 油烟机用喷头、喷淋清洗装置和油烟机
CN111940159B (zh) * 2019-05-14 2023-05-26 沈阳芯源微电子设备股份有限公司 一种晶圆表面颗粒清洗双旋喷嘴

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3488006A (en) * 1968-01-05 1970-01-06 Steinen Mfg Co Wm High pressure nozzle
JPS53413B2 (ja) * 1971-08-07 1978-01-09
JPS58193010A (ja) * 1982-05-04 1983-11-10 Yamamura Glass Kk 重油燃焼用バ−ナ−
JPS59169555A (ja) * 1983-03-15 1984-09-25 Kyoritsu Gokin Seisakusho:Kk 噴霧用ノズル
JP4005326B2 (ja) * 2000-09-22 2007-11-07 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP4312997B2 (ja) * 2002-06-04 2009-08-12 東京エレクトロン株式会社 基板処理装置、基板処理方法及びノズル

Also Published As

Publication number Publication date
JP2006061786A (ja) 2006-03-09
JP4870342B2 (ja) 2012-02-08
CN1739862A (zh) 2006-03-01
KR101188293B1 (ko) 2012-10-09
TWI344862B (en) 2011-07-11
KR20060050448A (ko) 2006-05-19
TW200607571A (en) 2006-03-01

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