TWI344862B - Nozzle device for applying two fluids - Google Patents

Nozzle device for applying two fluids Download PDF

Info

Publication number
TWI344862B
TWI344862B TW094124706A TW94124706A TWI344862B TW I344862 B TWI344862 B TW I344862B TW 094124706 A TW094124706 A TW 094124706A TW 94124706 A TW94124706 A TW 94124706A TW I344862 B TWI344862 B TW I344862B
Authority
TW
Taiwan
Prior art keywords
nozzle
nozzle head
substrate
gas
mixed fluid
Prior art date
Application number
TW094124706A
Other languages
English (en)
Chinese (zh)
Other versions
TW200607571A (en
Inventor
Akinori Iso
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of TW200607571A publication Critical patent/TW200607571A/zh
Application granted granted Critical
Publication of TWI344862B publication Critical patent/TWI344862B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
    • B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays

Landscapes

  • Nozzles (AREA)
TW094124706A 2004-08-25 2005-07-21 Nozzle device for applying two fluids TWI344862B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004245263A JP4870342B2 (ja) 2004-08-25 2004-08-25 二流体噴射ノズル装置

Publications (2)

Publication Number Publication Date
TW200607571A TW200607571A (en) 2006-03-01
TWI344862B true TWI344862B (en) 2011-07-11

Family

ID=36092475

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094124706A TWI344862B (en) 2004-08-25 2005-07-21 Nozzle device for applying two fluids

Country Status (4)

Country Link
JP (1) JP4870342B2 (ja)
KR (1) KR101188293B1 (ja)
CN (1) CN100493731C (ja)
TW (1) TWI344862B (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007134056A2 (en) * 2006-05-08 2007-11-22 Akrion Technologies, Inc. Spray jet cleaning apparatus and method
DE102007058835A1 (de) * 2007-11-30 2009-06-04 Hansgrohe Ag Belüftungsanordnung für Brausestrahlen
JP2015192956A (ja) * 2014-03-31 2015-11-05 ダイキン工業株式会社 二流体噴霧器及びこれを備えた空気調和装置の室外機
CN104384037B (zh) * 2014-10-28 2017-01-25 亿川科技(成都)有限责任公司 双流体雾化喷嘴
CN105080974A (zh) * 2015-08-24 2015-11-25 江苏省冶金设计院有限公司 一种轧辊水气冷却喷嘴组件
KR101915287B1 (ko) * 2016-12-07 2018-11-05 (주)엔피홀딩스 혼합 유체 분사 장치
CN107684986A (zh) * 2017-08-10 2018-02-13 深圳市华星光电技术有限公司 一种新型双流体喷嘴装置
CN107442313B (zh) * 2017-09-19 2019-08-02 深圳市华星光电技术有限公司 一种喷涂装置、喷涂***以及喷涂方法
CN107497605B (zh) * 2017-09-28 2023-08-22 广东美的厨房电器制造有限公司 油烟机用喷头、喷淋清洗装置和油烟机
CN111940159B (zh) * 2019-05-14 2023-05-26 沈阳芯源微电子设备股份有限公司 一种晶圆表面颗粒清洗双旋喷嘴

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3488006A (en) * 1968-01-05 1970-01-06 Steinen Mfg Co Wm High pressure nozzle
JPS53413B2 (ja) * 1971-08-07 1978-01-09
JPS58193010A (ja) * 1982-05-04 1983-11-10 Yamamura Glass Kk 重油燃焼用バ−ナ−
JPS59169555A (ja) * 1983-03-15 1984-09-25 Kyoritsu Gokin Seisakusho:Kk 噴霧用ノズル
JP4005326B2 (ja) * 2000-09-22 2007-11-07 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP4312997B2 (ja) * 2002-06-04 2009-08-12 東京エレクトロン株式会社 基板処理装置、基板処理方法及びノズル

Also Published As

Publication number Publication date
JP2006061786A (ja) 2006-03-09
JP4870342B2 (ja) 2012-02-08
CN1739862A (zh) 2006-03-01
KR101188293B1 (ko) 2012-10-09
KR20060050448A (ko) 2006-05-19
CN100493731C (zh) 2009-06-03
TW200607571A (en) 2006-03-01

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