CH631574A5 - Electron beam device for pattern projection - Google Patents

Electron beam device for pattern projection Download PDF

Info

Publication number: CH631574A5
Authority: CH; Switzerland
Prior art keywords: pattern; point; patterns; electron beam; square
Prior art date: 1977-08-10

Application number

CH740878A

Other languages

German (de)

English (en)

Inventor

Hans Christian Pfeiffer

Original Assignee

Ibm

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-08-10

Filing date

1978-07-07

Publication date

1982-08-13

1978-07-07 Application filed by Ibm filed Critical Ibm

1982-08-13 Publication of CH631574A5 publication Critical patent/CH631574A5/de

Links

238000010894 electron beam technology Methods 0.000 title claims description 20
230000004075 alteration Effects 0.000 claims description 13
238000004519 manufacturing process Methods 0.000 claims description 11
238000003384 imaging method Methods 0.000 claims description 7
230000015654 memory Effects 0.000 claims description 3
238000013500 data storage Methods 0.000 claims description 2
239000004065 semiconductor Substances 0.000 claims 5
238000000034 method Methods 0.000 claims 4
230000000694 effects Effects 0.000 claims 2
239000004922 lacquer Substances 0.000 claims 2
238000007493 shaping process Methods 0.000 claims 2
238000005516 engineering process Methods 0.000 claims 1
230000009191 jumping Effects 0.000 claims 1
230000003287 optical effect Effects 0.000 claims 1
230000003252 repetitive effect Effects 0.000 claims 1
238000010586 diagram Methods 0.000 description 3
230000002093 peripheral effect Effects 0.000 description 2
206010010071 Coma Diseases 0.000 description 1
238000009826 distribution Methods 0.000 description 1
238000013507 mapping Methods 0.000 description 1
239000011159 matrix material Substances 0.000 description 1
210000001747 pupil Anatomy 0.000 description 1
239000000758 substrate Substances 0.000 description 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Electron Beam Exposure (AREA)
Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)

CH740878A 1977-08-10 1978-07-07 Electron beam device for pattern projection CH631574A5 (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US82335277A	1977-08-10	1977-08-10

Publications (1)

Publication Number	Publication Date
CH631574A5 true CH631574A5 (en)	1982-08-13

Family

ID=25238513

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CH740878A CH631574A5 (en)	1977-08-10	1978-07-07	Electron beam device for pattern projection

Country Status (9)

Country	Link
JP (1)	JPS5429981A (sv)
BR (1)	BR7804994A (sv)
CH (1)	CH631574A5 (sv)
DE (1)	DE2834391C2 (sv)
FR (1)	FR2400256A1 (sv)
GB (1)	GB1598219A (sv)
IT (1)	IT1112285B (sv)
NL (1)	NL7808162A (sv)
SE (1)	SE425838B (sv)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5435173U (sv) *	1977-08-12	1979-03-07
JPS5463681A (en) *	1977-10-29	1979-05-22	Nippon Aviotronics Kk	Electron beam exposure device
FR2488043A1 (fr) *	1980-07-30	1982-02-05	Le N Proizv	Dispositif a optique electronique pour l'etude d'echantillons
JPS57206173A (en) *	1981-06-15	1982-12-17	Nippon Telegr & Teleph Corp <Ntt>	Focusing deflecting device for charged corpuscule beam
JPS61183926A (ja) *	1985-02-08	1986-08-16	Toshiba Corp	荷電ビ−ム照射装置
JPS62206828A (ja) *	1986-03-06	1987-09-11	Nec Corp	荷電粒子線描画装置
JPH02246318A (ja) *	1989-03-20	1990-10-02	Fujitsu Ltd	荷電粒子ビーム露光装置
JP2746098B2 (ja) *	1994-01-19	1998-04-28	日本電気株式会社	電子ビーム描画用アパーチャおよび電子ビーム描画方法
JP3206448B2 (ja)	1996-08-30	2001-09-10	日本電気株式会社	電子ビーム描画装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3644700A (en) *	1969-12-15	1972-02-22	Ibm	Method and apparatus for controlling an electron beam
DE2460716C2 (de) *	1974-12-19	1976-12-30	Siemens Ag	Korpuskularstrahloptisches geraet zur korpuskelbestrahlung eines praeparats
US3956635A (en) *	1975-06-13	1976-05-11	International Business Machines Corporation	Combined multiple beam size and spiral scan method for electron beam writing of microcircuit patterns
JPS5251871A (en) *	1975-10-23	1977-04-26	Rikagaku Kenkyusho	Projecting method for charge particle beams
JPS5283177A (en) *	1975-12-31	1977-07-11	Fujitsu Ltd	Electron beam exposure device
GB1557924A (en) *	1976-02-05	1979-12-19	Western Electric Co	Irradiation apparatus and methods
FR2351497A1 (fr) *	1976-05-14	1977-12-09	Thomson Csf	Dispositif permettant le trace programme de figures de formes differentes
JPS5357764A (en) *	1976-11-04	1978-05-25	Fujitsu Ltd	Electron beam exposure apparatus
CA1166766A (en) *	1977-02-23	1984-05-01	Hans C. Pfeiffer	Method and apparatus for forming a variable size electron beam
GB1605087A (en) *	1977-05-31	1981-12-16	Rikagaku Kenkyusho	Method for shaping a beam of electrically charged particles

1978
- 1978-05-10 GB GB18816/78A patent/GB1598219A/en not_active Expired
- 1978-06-29 FR FR7820120A patent/FR2400256A1/fr active Granted
- 1978-07-07 CH CH740878A patent/CH631574A5/de not_active IP Right Cessation
- 1978-07-12 JP JP8411578A patent/JPS5429981A/ja active Granted
- 1978-07-26 IT IT26097/78A patent/IT1112285B/it active
- 1978-08-02 SE SE7808326A patent/SE425838B/sv not_active IP Right Cessation
- 1978-08-03 NL NL787808162A patent/NL7808162A/xx not_active Application Discontinuation
- 1978-08-03 BR BR7804994A patent/BR7804994A/pt unknown
- 1978-08-05 DE DE2834391A patent/DE2834391C2/de not_active Expired

Also Published As

Publication number	Publication date
NL7808162A (nl)	1979-02-13
BR7804994A (pt)	1979-04-17
SE425838B (sv)	1982-11-15
JPS5429981A (en)	1979-03-06
GB1598219A (en)	1981-09-16
IT1112285B (it)	1986-01-13
SE7808326L (sv)	1979-02-11
IT7826097A0 (it)	1978-07-26
FR2400256B1 (sv)	1982-02-05
DE2834391C2 (de)	1986-04-17
FR2400256A1 (fr)	1979-03-09
DE2834391A1 (de)	1979-02-22
JPS5438035B2 (sv)	1979-11-19

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Legal Events

Date	Code	Title	Description
1993-03-31	PL	Patent ceased