CA2961977A1 - Systeme de pompage pour generer un vide et procede de pompage au moyen de ce systeme de pompage - Google Patents
Systeme de pompage pour generer un vide et procede de pompage au moyen de ce systeme de pompage Download PDFInfo
- Publication number
- CA2961977A1 CA2961977A1 CA2961977A CA2961977A CA2961977A1 CA 2961977 A1 CA2961977 A1 CA 2961977A1 CA 2961977 A CA2961977 A CA 2961977A CA 2961977 A CA2961977 A CA 2961977A CA 2961977 A1 CA2961977 A1 CA 2961977A1
- Authority
- CA
- Canada
- Prior art keywords
- pump
- vacuum pump
- pumping system
- auxiliary
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005086 pumping Methods 0.000 title claims abstract description 60
- 238000000034 method Methods 0.000 title claims description 20
- 239000007789 gas Substances 0.000 claims abstract description 51
- 238000007599 discharging Methods 0.000 claims abstract 2
- 239000000126 substance Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000012549 training Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C11/00—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
- F04C11/001—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle
- F04C11/003—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle having complementary function
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
- F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2/00—Rotary-piston machines or pumps
- F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C2/12—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C2/14—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C2/16—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Reciprocating Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2014/070691 WO2016045753A1 (fr) | 2014-09-26 | 2014-09-26 | Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage |
Publications (1)
Publication Number | Publication Date |
---|---|
CA2961977A1 true CA2961977A1 (fr) | 2016-03-31 |
Family
ID=51627293
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA2961977A Pending CA2961977A1 (fr) | 2014-09-26 | 2014-09-26 | Systeme de pompage pour generer un vide et procede de pompage au moyen de ce systeme de pompage |
Country Status (15)
Country | Link |
---|---|
US (1) | US20170298935A1 (pt) |
EP (1) | EP3198148B1 (pt) |
JP (1) | JP2017531125A (pt) |
KR (2) | KR20210102478A (pt) |
CN (1) | CN107002680A (pt) |
AU (1) | AU2014406724B2 (pt) |
BR (1) | BR112017005927B1 (pt) |
CA (1) | CA2961977A1 (pt) |
DK (1) | DK3198148T3 (pt) |
ES (1) | ES2780873T3 (pt) |
PL (1) | PL3198148T3 (pt) |
PT (1) | PT3198148T (pt) |
RU (1) | RU2670640C9 (pt) |
TW (1) | TWI725943B (pt) |
WO (1) | WO2016045753A1 (pt) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT201800021148A1 (it) * | 2018-12-27 | 2020-06-27 | D V P Vacuum Tech S P A | Pompa ausiliaria volumetrica per la generazione del vuoto. |
BE1027005B9 (nl) | 2019-01-30 | 2020-10-19 | Atlas Copco Airpower Nv | Werkwijze voor de sturing van een compressor naar een onbelaste toestand |
FR3094762B1 (fr) * | 2019-04-05 | 2021-04-09 | Pfeiffer Vacuum | Pompe à vide de type sèche et installation de pompage |
GB2592573A (en) * | 2019-12-19 | 2021-09-08 | Leybold France S A S | Lubricant-sealed vacuum pump, lubricant filter and method. |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE8816875U1 (de) * | 1987-12-21 | 1991-04-11 | Werner Rietschle Maschinen- Und Apparatebau Gmbh, 7860 Schopfheim | Vakuumpumpstand |
DE3842886A1 (de) * | 1987-12-21 | 1989-07-06 | Rietschle Masch App | Vakuumpumpstand |
FR2647853A1 (fr) * | 1989-06-05 | 1990-12-07 | Cit Alcatel | Pompe primaire seche a deux etages |
JP3723987B2 (ja) * | 1992-09-03 | 2005-12-07 | 松下電器産業株式会社 | 真空排気装置及び方法 |
FR2822200B1 (fr) * | 2001-03-19 | 2003-09-26 | Cit Alcatel | Systeme de pompage pour gaz a faible conductivite thermique |
DE10131516B4 (de) * | 2001-07-02 | 2004-05-06 | Boehringer Ingelheim Pharma Gmbh & Co. Kg | Steuereinheit zur Flussregulierung |
KR100876318B1 (ko) | 2001-09-06 | 2008-12-31 | 가부시키가이샤 아루박 | 진공배기장치 및 진공배기장치의 운전방법 |
JP4045362B2 (ja) | 2001-09-06 | 2008-02-13 | 株式会社アルバック | 多段式容積移送型ドライ真空ポンプ |
JP3992176B2 (ja) | 2001-10-26 | 2007-10-17 | 株式会社アルバック | 真空排気方法および真空排気装置 |
US6589023B2 (en) * | 2001-10-09 | 2003-07-08 | Applied Materials, Inc. | Device and method for reducing vacuum pump energy consumption |
JP4365059B2 (ja) | 2001-10-31 | 2009-11-18 | 株式会社アルバック | 真空排気装置の運転方法 |
JP4745779B2 (ja) * | 2005-10-03 | 2011-08-10 | 神港精機株式会社 | 真空装置 |
JP5438279B2 (ja) * | 2008-03-24 | 2014-03-12 | アネスト岩田株式会社 | 多段真空ポンプ及びその運転方法 |
TWI467092B (zh) * | 2008-09-10 | 2015-01-01 | Ulvac Inc | 真空排氣裝置 |
FR2952683B1 (fr) * | 2009-11-18 | 2011-11-04 | Alcatel Lucent | Procede et dispositif de pompage a consommation d'energie reduite |
GB201007814D0 (en) * | 2010-05-11 | 2010-06-23 | Edwards Ltd | Vacuum pumping system |
FR2993614B1 (fr) * | 2012-07-19 | 2018-06-15 | Pfeiffer Vacuum | Procede et dispositif de pompage d'une chambre de procedes |
GB2509182A (en) * | 2012-12-21 | 2014-06-25 | Xerex Ab | Vacuum ejector with multi-nozzle drive stage and booster |
-
2014
- 2014-09-26 RU RU2017114347A patent/RU2670640C9/ru active
- 2014-09-26 BR BR112017005927-4A patent/BR112017005927B1/pt active IP Right Grant
- 2014-09-26 AU AU2014406724A patent/AU2014406724B2/en active Active
- 2014-09-26 CA CA2961977A patent/CA2961977A1/fr active Pending
- 2014-09-26 EP EP14777077.0A patent/EP3198148B1/fr not_active Revoked
- 2014-09-26 PT PT147770770T patent/PT3198148T/pt unknown
- 2014-09-26 ES ES14777077T patent/ES2780873T3/es active Active
- 2014-09-26 CN CN201480082186.8A patent/CN107002680A/zh active Pending
- 2014-09-26 KR KR1020217025124A patent/KR20210102478A/ko not_active Application Discontinuation
- 2014-09-26 WO PCT/EP2014/070691 patent/WO2016045753A1/fr active Application Filing
- 2014-09-26 JP JP2017516050A patent/JP2017531125A/ja active Pending
- 2014-09-26 DK DK14777077.0T patent/DK3198148T3/da active
- 2014-09-26 US US15/512,883 patent/US20170298935A1/en not_active Abandoned
- 2014-09-26 PL PL14777077T patent/PL3198148T3/pl unknown
- 2014-09-26 KR KR1020177011372A patent/KR20170063839A/ko not_active IP Right Cessation
-
2015
- 2015-09-21 TW TW104131132A patent/TWI725943B/zh active
Also Published As
Publication number | Publication date |
---|---|
EP3198148B1 (fr) | 2020-02-26 |
ES2780873T3 (es) | 2020-08-27 |
AU2014406724A1 (en) | 2017-04-13 |
AU2014406724B2 (en) | 2019-09-19 |
RU2670640C1 (ru) | 2018-10-24 |
PL3198148T3 (pl) | 2020-08-10 |
PT3198148T (pt) | 2020-04-02 |
BR112017005927A2 (pt) | 2017-12-19 |
EP3198148A1 (fr) | 2017-08-02 |
JP2017531125A (ja) | 2017-10-19 |
KR20170063839A (ko) | 2017-06-08 |
DK3198148T3 (da) | 2020-04-06 |
BR112017005927B1 (pt) | 2022-07-12 |
RU2670640C9 (ru) | 2018-12-04 |
TWI725943B (zh) | 2021-05-01 |
WO2016045753A1 (fr) | 2016-03-31 |
CN107002680A (zh) | 2017-08-01 |
KR20210102478A (ko) | 2021-08-19 |
TW201623801A (zh) | 2016-07-01 |
US20170298935A1 (en) | 2017-10-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request |
Effective date: 20190704 |
|
EEER | Examination request |
Effective date: 20190704 |
|
EEER | Examination request |
Effective date: 20190704 |
|
EEER | Examination request |
Effective date: 20190704 |
|
EEER | Examination request |
Effective date: 20190704 |
|
EEER | Examination request |
Effective date: 20190704 |
|
EEER | Examination request |
Effective date: 20190704 |
|
EEER | Examination request |
Effective date: 20190704 |