CA1024268A - Electron microscope beam tube - Google Patents
Electron microscope beam tubeInfo
- Publication number
- CA1024268A CA1024268A CA222,351A CA222351A CA1024268A CA 1024268 A CA1024268 A CA 1024268A CA 222351 A CA222351 A CA 222351A CA 1024268 A CA1024268 A CA 1024268A
- Authority
- CA
- Canada
- Prior art keywords
- electron microscope
- beam tube
- microscope beam
- tube
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/12—Silica-free oxide glass compositions
- C03C3/16—Silica-free oxide glass compositions containing phosphorus
- C03C3/21—Silica-free oxide glass compositions containing phosphorus containing titanium, zirconium, vanadium, tungsten or molybdenum
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/14—Compositions for glass with special properties for electro-conductive glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US463630A US3927321A (en) | 1974-04-24 | 1974-04-24 | Electron microscope beam tube |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1024268A true CA1024268A (en) | 1978-01-10 |
Family
ID=23840774
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA222,351A Expired CA1024268A (en) | 1974-04-24 | 1975-03-18 | Electron microscope beam tube |
Country Status (2)
Country | Link |
---|---|
US (1) | US3927321A (en) |
CA (1) | CA1024268A (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4041316A (en) * | 1974-09-20 | 1977-08-09 | Hitachi, Ltd. | Field emission electron gun with an evaporation source |
NL7416395A (en) * | 1974-12-17 | 1976-06-21 | Philips Nv | ELECTRONIC MICROSKOP. |
US4427886A (en) * | 1982-08-02 | 1984-01-24 | Wisconsin Alumni Research Foundation | Low voltage field emission electron gun |
JPH0640475B2 (en) * | 1988-01-25 | 1994-05-25 | 日本電子株式会社 | Field emission electron gun |
JPH0766766B2 (en) * | 1989-03-30 | 1995-07-19 | 株式会社日立製作所 | electronic microscope |
US5376792A (en) * | 1993-04-26 | 1994-12-27 | Rj Lee Group, Inc. | Scanning electron microscope |
JP3397567B2 (en) * | 1996-03-22 | 2003-04-14 | 日本電子株式会社 | Electron gun |
JP2004214110A (en) * | 2003-01-08 | 2004-07-29 | Hitachi High-Technologies Corp | Electron beam device and method for manufacturing sample chamber container of electron beam device |
US8399863B2 (en) * | 2008-08-08 | 2013-03-19 | Hitachi High-Technologies Corporation | Charged particle beam apparatus using an electrostatic lens gun |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2234281A (en) * | 1938-02-10 | 1941-03-11 | Fides Gmbh | Shielded electron microscope |
US3206635A (en) * | 1961-04-27 | 1965-09-14 | Gen Electric | Electron stream focusing |
NL271119A (en) * | 1961-07-10 | |||
US3760383A (en) * | 1971-07-01 | 1973-09-18 | Gen Electric | Erration storage system with collimated electron beam for minimal spherical ab |
-
1974
- 1974-04-24 US US463630A patent/US3927321A/en not_active Expired - Lifetime
-
1975
- 1975-03-18 CA CA222,351A patent/CA1024268A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
US3927321A (en) | 1975-12-16 |
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