CA1024268A - Electron microscope beam tube - Google Patents

Electron microscope beam tube

Info

Publication number
CA1024268A
CA1024268A CA222,351A CA222351A CA1024268A CA 1024268 A CA1024268 A CA 1024268A CA 222351 A CA222351 A CA 222351A CA 1024268 A CA1024268 A CA 1024268A
Authority
CA
Canada
Prior art keywords
electron microscope
beam tube
microscope beam
tube
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA222,351A
Other languages
French (fr)
Inventor
Leonard M. Welter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
American Optical Corp
Original Assignee
American Optical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Optical Corp filed Critical American Optical Corp
Application granted granted Critical
Publication of CA1024268A publication Critical patent/CA1024268A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/12—Silica-free oxide glass compositions
    • C03C3/16—Silica-free oxide glass compositions containing phosphorus
    • C03C3/21—Silica-free oxide glass compositions containing phosphorus containing titanium, zirconium, vanadium, tungsten or molybdenum
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C4/00—Compositions for glass with special properties
    • C03C4/14—Compositions for glass with special properties for electro-conductive glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
CA222,351A 1974-04-24 1975-03-18 Electron microscope beam tube Expired CA1024268A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US463630A US3927321A (en) 1974-04-24 1974-04-24 Electron microscope beam tube

Publications (1)

Publication Number Publication Date
CA1024268A true CA1024268A (en) 1978-01-10

Family

ID=23840774

Family Applications (1)

Application Number Title Priority Date Filing Date
CA222,351A Expired CA1024268A (en) 1974-04-24 1975-03-18 Electron microscope beam tube

Country Status (2)

Country Link
US (1) US3927321A (en)
CA (1) CA1024268A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4041316A (en) * 1974-09-20 1977-08-09 Hitachi, Ltd. Field emission electron gun with an evaporation source
NL7416395A (en) * 1974-12-17 1976-06-21 Philips Nv ELECTRONIC MICROSKOP.
US4427886A (en) * 1982-08-02 1984-01-24 Wisconsin Alumni Research Foundation Low voltage field emission electron gun
JPH0640475B2 (en) * 1988-01-25 1994-05-25 日本電子株式会社 Field emission electron gun
JPH0766766B2 (en) * 1989-03-30 1995-07-19 株式会社日立製作所 electronic microscope
US5376792A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Scanning electron microscope
JP3397567B2 (en) * 1996-03-22 2003-04-14 日本電子株式会社 Electron gun
JP2004214110A (en) * 2003-01-08 2004-07-29 Hitachi High-Technologies Corp Electron beam device and method for manufacturing sample chamber container of electron beam device
US8399863B2 (en) * 2008-08-08 2013-03-19 Hitachi High-Technologies Corporation Charged particle beam apparatus using an electrostatic lens gun

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2234281A (en) * 1938-02-10 1941-03-11 Fides Gmbh Shielded electron microscope
US3206635A (en) * 1961-04-27 1965-09-14 Gen Electric Electron stream focusing
NL271119A (en) * 1961-07-10
US3760383A (en) * 1971-07-01 1973-09-18 Gen Electric Erration storage system with collimated electron beam for minimal spherical ab

Also Published As

Publication number Publication date
US3927321A (en) 1975-12-16

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