ATE549795T1 - Oberflächenwellen-bauelement und verfahren zu seiner herstellung - Google Patents

Oberflächenwellen-bauelement und verfahren zu seiner herstellung

Info

Publication number
ATE549795T1
ATE549795T1 AT03291298T AT03291298T ATE549795T1 AT E549795 T1 ATE549795 T1 AT E549795T1 AT 03291298 T AT03291298 T AT 03291298T AT 03291298 T AT03291298 T AT 03291298T AT E549795 T1 ATE549795 T1 AT E549795T1
Authority
AT
Austria
Prior art keywords
producing
electrode
surface wave
wave component
insulating layer
Prior art date
Application number
AT03291298T
Other languages
English (en)
Inventor
Kenji Nishiyama
Takeshi Nakao
Michio Kadota
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Application granted granted Critical
Publication of ATE549795T1 publication Critical patent/ATE549795T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02929—Means for compensation or elimination of undesirable effects of ageing changes of characteristics, e.g. electro-acousto-migration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49016—Antenna or wave energy "plumbing" making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49133—Assembling to base an electrical component, e.g., capacitor, etc. with component orienting
    • Y10T29/49135—Assembling to base an electrical component, e.g., capacitor, etc. with component orienting and shaping, e.g., cutting or bending, etc.
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
AT03291298T 2002-07-24 2003-05-30 Oberflächenwellen-bauelement und verfahren zu seiner herstellung ATE549795T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002215614 2002-07-24
JP2003041480A JP3841053B2 (ja) 2002-07-24 2003-02-19 弾性表面波装置及びその製造方法

Publications (1)

Publication Number Publication Date
ATE549795T1 true ATE549795T1 (de) 2012-03-15

Family

ID=31190289

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03291298T ATE549795T1 (de) 2002-07-24 2003-05-30 Oberflächenwellen-bauelement und verfahren zu seiner herstellung

Country Status (5)

Country Link
US (3) US7230365B2 (de)
EP (4) EP2288025B1 (de)
JP (1) JP3841053B2 (de)
KR (1) KR100681692B1 (de)
AT (1) ATE549795T1 (de)

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JP3841053B2 (ja) * 2002-07-24 2006-11-01 株式会社村田製作所 弾性表面波装置及びその製造方法
US7642693B2 (en) * 2003-05-15 2010-01-05 National Institute Of Advanced Industrial Science And Technology Wurtzite thin film, laminate containing wurtzite crystalline layer and their manufacturing methods
JP2005117151A (ja) * 2003-10-03 2005-04-28 Murata Mfg Co Ltd 弾性表面波装置の製造方法及び弾性表面波装置
WO2005034347A1 (ja) * 2003-10-03 2005-04-14 Murata Manufacturing Co., Ltd. 弾性表面波装置
JP2005176152A (ja) * 2003-12-15 2005-06-30 Alps Electric Co Ltd 弾性表面波素子及びその製造方法
US7737603B2 (en) * 2003-12-16 2010-06-15 Murata Manufacturiing Co., Ltd. Boundary acoustic wave device
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WO2005088836A1 (ja) * 2004-03-12 2005-09-22 Murata Manufacturing Co., Ltd. 弾性表面波装置
JP4483865B2 (ja) 2004-07-26 2010-06-16 株式会社村田製作所 弾性表面波装置
JP4359551B2 (ja) * 2004-10-08 2009-11-04 アルプス電気株式会社 弾性表面波素子の製造方法
JP4657002B2 (ja) * 2005-05-12 2011-03-23 信越化学工業株式会社 複合圧電基板
EP1988630A4 (de) * 2006-02-20 2010-03-24 Murata Manufacturing Co Elastische oberflächenwellenvorrichtung
WO2007099742A1 (ja) * 2006-03-02 2007-09-07 Murata Manufacturing Co., Ltd. 弾性波装置及びその製造方法
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WO2007145056A1 (ja) * 2006-06-16 2007-12-21 Murata Manufacturing Co., Ltd. 弾性表面波装置
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EP2099129A4 (de) * 2006-12-27 2014-03-26 Murata Manufacturing Co Oberflächenwellenbauelement
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Also Published As

Publication number Publication date
EP1391988A3 (de) 2004-06-09
EP2288024B1 (de) 2012-07-04
EP1391988B1 (de) 2012-03-14
EP2288024A1 (de) 2011-02-23
US7230365B2 (en) 2007-06-12
US7411334B2 (en) 2008-08-12
EP2288025A1 (de) 2011-02-23
KR100681692B1 (ko) 2007-02-09
KR20040010108A (ko) 2004-01-31
US20040164644A1 (en) 2004-08-26
EP1391988A2 (de) 2004-02-25
US7418772B2 (en) 2008-09-02
US20070132339A1 (en) 2007-06-14
EP2288025B1 (de) 2016-01-06
EP2288026A1 (de) 2011-02-23
JP3841053B2 (ja) 2006-11-01
US20070214622A1 (en) 2007-09-20
JP2004112748A (ja) 2004-04-08

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