WO2023221366A1 - Water-cooled jacket device and single crystal furnace - Google Patents
Water-cooled jacket device and single crystal furnace Download PDFInfo
- Publication number
- WO2023221366A1 WO2023221366A1 PCT/CN2022/122978 CN2022122978W WO2023221366A1 WO 2023221366 A1 WO2023221366 A1 WO 2023221366A1 CN 2022122978 W CN2022122978 W CN 2022122978W WO 2023221366 A1 WO2023221366 A1 WO 2023221366A1
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- WIPO (PCT)
- Prior art keywords
- cooling jacket
- water
- lifting
- outer cylinder
- lifting rod
- Prior art date
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- 239000013078 crystal Substances 0.000 title claims description 63
- 230000005540 biological transmission Effects 0.000 claims abstract description 23
- 238000001816 cooling Methods 0.000 claims description 97
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 37
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- 238000010521 absorption reaction Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 3
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- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
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- 239000000919 ceramic Substances 0.000 description 2
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Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B27/00—Single-crystal growth under a protective fluid
- C30B27/02—Single-crystal growth under a protective fluid by pulling from a melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
Definitions
- the present application relates to the technical field of manufacturing single crystal silicon products, and in particular to a water cooling jacket device and a single crystal furnace.
- the crystal pulling process has a great impact on the core quality of the wafers, such as oxygen content, bulk defects (Bulk Micro Defects (BMD), stacking faults, crystal origin particles (COPs), flow pattern defects (FPD), laser scattering tomography defects (LSTDs) and other qualities are all related to The crystal pulling process is closely related.
- BMD Bulk Micro Defects
- COPs crystal origin particles
- FPD flow pattern defects
- LSTDs laser scattering tomography defects
- the thermal history experienced during the growth process of the crystal rod greatly affects the overall quality of the crystal rod, and the thermal history is mainly affected by the longitudinal and axial temperature gradient of the crystal rod.
- the structural components of the crystal pulling furnace have a great influence on the temperature gradient. Large, a very important component of this is the water-cooling jacket, which greatly changes the longitudinal and transverse temperature gradients of the crystal rod, increases the cooling rate of the crystal rod, and thereby affects the drawing rate of the crystal rod.
- the water-cooling jacket is cylindrical, which greatly limits its axial and longitudinal temperature adjustment of the crystal ingot.
- the crystal defects of the crystal ingot cannot be well controlled.
- the limited adjustment ability causes the heat in the center of the crystal ingot to not be very high. Not properly conducted, resulting in excessive accumulation of internal stress, which in turn leads to misalignment, which greatly affects the quality of the ingot.
- stacking faults will cause uneven deposition during the epitaxial deposition process, and even cause Causes deposition failure.
- this application provides a water-cooling jacket device and a single crystal furnace to solve the problem of limited temperature adjustment in the axial and longitudinal directions of the crystal ingot.
- a water-cooling jacket device including a water-cooling jacket body and a lifting structure for controlling the lifting and lowering of the water-cooling jacket body;
- the water cooling jacket body includes an inner cylinder and an outer cylinder located outside the inner cylinder;
- the lifting structure includes two lifting parts arranged oppositely on both sides of the water-cooling jacket body.
- Each lifting part includes a driving part and a transmission part.
- the transmission part is connected to the outer cylinder through a connecting structure, so that The two lifting parts can move asynchronously to drive the water cooling jacket body to tilt at a preset angle.
- the transmission component includes:
- a lifting rod extends along the axial direction of the outer cylinder, and a rack structure is provided on the outer surface of the lifting rod;
- a transmission gear which is drivingly connected to the lifting rod by meshing with the rack structure.
- the outer surface of one of the two lifting rods has a first area disposed away from the other lifting rod, and the first area is concave to form a connecting surface, and the The rack structure is provided on the connecting surface.
- the rack structure includes a plurality of parallel racks protruding from the connecting surface.
- the plurality of racks are arranged side by side along the axial direction of the outer cylinder, and two adjacent racks are arranged side by side.
- a tooth groove is formed between the racks.
- a limiting platform is provided at one end of the lifting rod away from the outer cylinder.
- the length of the first region is less than the length of the lifting rod, and the first region is located at an end of the lifting rod away from the outer cylinder.
- the length of the first region is greater than half the length of the lifting rod in the axial direction of the outer cylinder.
- connection structure includes a snap ring that is sleeved on the outside of the outer cylinder, and two protrusions are formed on opposite sides of the snap ring, and each protrusion is provided with a corresponding The connecting through hole for connecting the lifting rod.
- a first flange is provided on the top of the outer cylinder, and the snap ring is provided on a side of the first flange close to the bottom of the outer cylinder.
- An embodiment of the present application also provides a single crystal furnace, including the above-mentioned water cooling jacket device.
- the beneficial effects of this application are: through the arrangement of the lifting structure, the lifting of the water-cooling jacket body is controlled, and the two lifting parts are independently driven, so that the two lifting parts can move asynchronously, so that the water-cooling jacket
- the body can be tilted within a preset angle range to form an asymmetric water cooling effect, thereby achieving gradient temperature gradient changes in the radial and axial directions, greatly improving the axial and radial heat dissipation of the crystal ingot, reducing internal heat accumulation, and changing
- the thermal history of the crystal ingot reduces the occurrence of misalignment and other crystal defects and improves the quality of the crystal ingot.
- Figure 1 shows a schematic structural diagram of the water cooling jacket device in the embodiment of the present application
- Figure 2 shows a schematic structural diagram of the lifting rod in the embodiment of the present application
- Figure 3 shows the second structural schematic diagram of the lifting rod in the embodiment of the present application
- Figure 4 shows a schematic structural diagram of the connection part in the embodiment of the present application.
- Figure 5 shows a schematic structural diagram of the inner cylinder in the embodiment of the present application.
- Figure 6 shows a schematic structural diagram of the outer cylinder in the embodiment of the present application.
- Figure 7 shows a schematic structural diagram of the adjusting sleeve in the embodiment of the present application.
- this embodiment provides a water-cooling jacket device, including a water-cooling jacket body and a lifting structure for controlling the lifting and lowering of the water-cooling jacket body;
- the water-cooling jacket body includes an inner cylinder 2 and an outer cylinder 1 located outside the inner cylinder 2;
- the lifting structure includes two lifting parts 4 arranged oppositely on both sides of the water-cooling jacket body.
- Each lifting part 4 includes a driving part and a transmission part.
- the transmission part is connected to the outer cylinder through a connecting structure 5. 1 connection, so that the two lifting parts 4 can move asynchronously to drive the water cooling jacket body to tilt at a preset angle.
- the lifting of the water-cooling jacket body is controlled, and the two lifting parts 4 are driven independently, so that the two lifting parts 4 can move asynchronously, so that the water-cooling jacket body can move in the preset position. Inclination within the angle range creates an asymmetric water cooling effect. Large gradient changes can accelerate the transfer of heat from the crystal ingot to the water cooling jacket, improve heat transfer efficiency, and accelerate axial and radial heat dissipation of the crystal ingot. And according to the needs of the drawing process, the longitudinal and radial temperature gradients of the crystal rod can be adjusted to a large extent, the reaction rate of defects in the crystal rod can be controlled, and the defect distribution can be adjusted. It has a good cooling rate and can draw different defect types. Crystal rods (such as stacking fault-free crystal rods, BMD crystal rods).
- Crystal ingots with different process parameter requirements need to be matched with different water cooling effects.
- the asynchronously moving water cooling jacket device can be adjusted accordingly to obtain appropriate cooling effects according to needs.
- the purpose of the asynchronous movement is to create a radial asymmetry effect and improve the water cooling effect.
- the role of the lifting mechanism when drawing the epitaxial crystal rod, a large drawing speed is required, and the water cooling jacket moves toward the liquid surface to increase the cooling effect. This will increase the drawing speed; when drawing defect-free polished crystal ingots, the water-cooling jacket can be moved upward to inhibit the formation of COP; when drawing BMD crystal ingots, it will promote the nucleation and growth of BMD, and the water-cooling jacket can Through movement adjustment, BMD nucleates at a low temperature of 650°C-700°C. At the same time, for high temperature areas, through asynchronous movement adjustment, the ingot range is expanded within the temperature range of 750°C-1100°C. This is used to promote the high-temperature nucleation of BMD.
- the cooperation of the two opposite lifting parts 4 can make the water cooling jacket body tilt and rise, that is, the two lifting parts 4 move asynchronously to tilt preset After adjusting the angle, the two lifting parts 4 are controlled to move synchronously to control the water-cooling jacket body to perform lifting movement in an inclined state.
- the number of the lifting parts 4 included in the lifting structure is not limited. Two lifting parts 4 are provided on opposite sides of the water-cooling jacket body. The two opposite lifting parts 4 are One group, the lifting structure may include multiple groups of the lifting parts 4, each group of the lifting parts 4 can realize the inclination of the water cooling jacket body in one direction, so that multiple groups of the lifting parts 4 can be provided according to actual needs.
- the lifting part 4 can flexibly control the tilt direction of the water cooling jacket body, so that the water cooling effect can be better controlled.
- the tilt angle can be set according to actual needs, for example, it can be 0 degrees to 17 degrees, but it does not range from 0 to 17 degrees. This is the limit.
- the transmission parts include:
- the lifting rod 41 extends along the axial direction of the outer cylinder 1, and a rack 411 structure is provided on the outer surface of the lifting rod 41;
- the transmission gear 42 is transmission connected to the lifting rod 41 by meshing with the rack 411 structure.
- the transmission gear 42 and the lifting rod 41 are matched.
- the transmission gear 42 rotates, and under the driving action of the lifting rod 41, the water cooling jacket body is raised and lowered.
- each lifting part 4 may be a driving motor.
- the outer surface of one of the lifting rods 41 has a first area located away from the other lifting rod 41.
- the first area is concave to form a connecting surface, and the connecting surface is provided with the Rack 411 structure.
- the connecting surface is a plane parallel to the axial direction of the outer cylinder 1 , and the rack 411 structure is provided on the connecting surface, which facilitates the cooperation between the rack 411 structure and the transmission gear 42 .
- the rack 411 structure includes a plurality of parallel racks 411 protruding from the connection surface, and the plurality of racks 411 are arranged side by side along the axial direction of the outer cylinder 1.
- a tooth gap is formed between two adjacent racks 411 .
- the extension direction of the rack 411 is perpendicular to the axial direction of the outer cylinder 1 , the axial direction of the transmission gear 42 is parallel to the extension direction of the rack 411 , and the teeth of the transmission gear 42 correspond to in the tooth slot, so that the transmission gear 42 rotates, driving the lifting rod 41 to perform lifting movement, thereby driving the water cooling jacket body to perform lifting movement.
- the rack 411 is a threaded rack, and the threaded rack has the characteristics of high precision and large load.
- a limiting platform 43 is provided at one end of the lifting rod 41 away from the outer cylinder 1 .
- the setting of the limiting platform 43 prevents the transmission gear 42 from being separated from the lifting rod 41.
- the limiting platform 43 can be a circular structure, and the limiting platform 43 is located on the diameter of the lifting rod 41. The area in the direction is larger than the cross-sectional area of the end surface of the lifting rod 41 .
- the limiting platform 43 may be an integral structure with the lifting rod 41, may be connected through welding or other processes, or may be formed simultaneously when the connection surface is formed, and the first area may be located on the In the middle of the lifting rod 41, a groove is formed in the first area, and the bottom surface of the groove is the connecting surface, so that in the axial direction of the lifting rod 41, the groove is farther away from the
- the first side wall of one end of the outer cylinder 1 forms the limiting platform 43
- the second side wall of the groove opposite to the first side wall forms a limit for limiting the movement stroke of the transmission gear 42 . retaining wall.
- the length of the first region is less than the length of the lifting rod 41 , and the first region is located away from the lifting rod 41 and away from the outer cylinder 1 one end.
- the length of the first region is greater than half of the length of the lifting rod 41 .
- connection structure 5 includes a snap ring 51 that is sleeved on the outside of the outer cylinder 1 .
- Two protrusions 52 are formed on opposite sides of the snap ring 51 , and each of the protrusions 52 There is a connection through hole 521 for connecting with the corresponding lifting rod 41.
- a connecting ring 44 is provided at one end of the lifting rod 41 close to the outer tube 1.
- the connecting ring 44 is threadedly connected to the lifting rod 41.
- the lifting rod 41 and the protrusion 52 are connected by a thread.
- the gap is loosely matched, which facilitates the tilting of the water-cooling jacket when the two lifting rods 41 move asynchronously.
- a first flange 11 is provided on the top of the outer cylinder 1
- the snap ring 51 is provided on a side of the first flange 11 close to the bottom of the outer cylinder 1 .
- the snap ring 51 can be bonded to the first flange 11 through an adhesive layer to enhance the connection strength between the connection structure 5 and the outer cylinder 1 .
- the inner cylinder 2 has an inverted conical structure.
- this embodiment adopts a double-layer structure of an inner cylinder and an outer cylinder.
- the outer cylinder adopts a straight-cylinder structure.
- the outer cylinder plays a role in blocking heat.
- the inner cylinder The barrel adopts an inverted conical structure, which can form a longitudinal gradient water cooling effect, because the temperature in the longitudinal direction of the crystal rod (that is, the axial direction of the crystal rod) changes in a gradient (the lower end is hot and the upper end is cold, the end close to the silicon melt is the lower end, and the end far away from the silicon One end of the melt is the upper end).
- the heat of the crystal rod is mainly transmitted to the surrounding low-temperature objects by radiation.
- the intensity of radiation heat transfer is inversely proportional to the cube of the distance. That is, the closer the distance, the stronger the radiation heat transfer.
- the inner cylinder is inverted cone shape, along the longitudinal direction, the distance between the inner wall of the inner cylinder and the crystal rod in the radial direction of the crystal rod changes in a gradient, which can achieve the effect of gradient water cooling.
- the longitudinal asymmetric effect thereby achieving gradient temperature gradient changes in the radial and axial directions, greatly improving the axial and radial heat dissipation of the crystal rod, reducing internal heat accumulation, changing the thermal history of the crystal rod, reducing misalignment and other
- the generation of crystal defects improves the quality of crystal ingots.
- the inclination angle of the inner wall of the inner cylinder can be adjusted to greatly adjust the longitudinal (ie axial) and radial temperature gradient of the crystal rod, control the reaction rate of defects in the crystal rod, and adjust the defects distributed.
- the two lifting parts 4 are driven independently, so that the two lifting parts 4 can move asynchronously, so that the water cooling jacket body can tilt within a preset angle range to form asymmetry in the radial direction.
- the inner cylinder adopts the longitudinal (i.e. axial) asymmetry effect formed by the inverted cone structure, so that the two can cooperate to achieve double asymmetry in the radial and axial directions of the crystal rod, thereby improving the axial and axial asymmetry of the crystal rod. Radial heat dissipation efficiency.
- the inner diameter of the top of the inner cylinder is 450 mm, and the inner diameter of the bottom of the inner cylinder is 390 mm, but this is not a limitation.
- the top of the inner cylinder is provided with a second flange 22, the top of the outer cylinder is provided with a first flange 11, and the first flange 11 is provided with a stepped groove 13 on one side close to the inner cylinder. , the second flange 22 overlaps in the stepped groove 13 .
- the first surface of the second flange 22 away from the bottom of the inner cylinder and the second surface of the first flange 11 away from the bottom of the inner cylinder are located on the same plane.
- the bottom of the inner cylinder has a first through hole
- the bottom of the outer cylinder has a second through hole 12.
- the orthogonal projection of the center of the first through hole on the bottom of the outer cylinder 1 is the same as the second through hole.
- the center points of the through holes 12 coincide with each other.
- annular protrusion 14 protrudes from the edge of the second through hole 12 toward the top of the outer cylinder 1 .
- the annular protrusion 14 functions as a retaining wall for blocking the inner cylinder 2 . Limit the position.
- a toothed corrugated structure 21 is provided on the inner wall of the inner cylinder 2 .
- the arrangement of the toothed corrugated structure 21 can increase the surface area of the inner wall of the inner cylinder, that is, increase the heat absorption area of the water cooling jacket. Compared with a smooth surface, such a surface has a better heat absorption effect and has a good cooling effect of the crystal ingot. .
- the toothed corrugated structure 21 includes a plurality of annular teeth extending along the circumferential direction of the inner cylinder 2.
- the plurality of annular teeth are arranged along the axial direction of the inner cylinder 2.
- the cross-sectional shape of a single annular tooth can be Triangle, trapezoid, arc, etc.
- the thickness of the toothed corrugated structure 21 in the radial direction of the inner cylinder 2 gradually increases.
- the inner side wall of the inner cylinder 2 is provided with a heat-absorbing coating.
- the heat-absorbing coating is disposed on the side of the toothed corrugated structure 21 away from the outer cylinder 1 , and the shape of the heat-absorbing coating matches the shape of the toothed corrugated structure 21 , that is, the heat-absorbing coating
- the connection surface between the coating and the inner cylinder 2 and the inner surface opposite to the connection surface are both toothed corrugated structures 21 .
- the heat-absorbing coating has a heat-absorbing effect, and the bonding strength between the heat-absorbing coating and the inner cylinder 2 is high, which can effectively alleviate the interface between the heat-absorbing coating and the inner cylinder 2.
- the thermal stress of the connecting surface) and the thermodynamic properties are stable.
- the inner cylinder 2 can take away the heat transmitted by the crystal rod in real time, greatly improve the cooling rate of the crystal rod, increase the pulling speed, and increase the crystal pulling efficiency.
- the outer wall of the inner cylinder 2 is provided with a heat-insulating coating, and the heat-absorbing coating is formed on the inner cylinder in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 2
- the thickness in the radial direction gradually increases.
- the heat-absorbing coating is made of ceramic, but is not limited thereto.
- the thickness of the heat-absorbing coating is 200 ⁇ 50 microns.
- the outer side wall of the inner cylinder 2 and/or the inner side wall of the outer cylinder 1 is provided with a heat-insulating coating.
- the heat-insulating coating has the function of reflecting and shielding heat, preventing external heat from being transmitted from the outer cylinder 1 to the inside of the water-cooling jacket (ie, the inside of the inner cylinder 2), and maintaining a constant temperature inside the water-cooling jacket.
- the thickness of the heat-insulating coating in the radial direction of the inner cylinder 2 gradually increases from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 .
- the heat-insulating coating is made of high-temperature-resistant and heat-insulating zirconia ceramics.
- the thickness of the thermal insulation coating is 100 ⁇ 25 microns, but is not limited thereto.
- the water-cooling pipes 3 are spirally distributed around the outer wall of the inner cylinder 2 .
- the water-cooling pipe 3 can be provided on the outer side wall of the inner cylinder 2 or on the inner side wall of the outer cylinder 1 .
- the specific structural form of the water-cooling pipe 3 is not limited to this.
- the water-cooling pipe 3 can be in a serpentine shape and is distributed on the outer wall of the inner cylinder 2.
- the water-cooling pipe 3 can be in a serpentine shape, including along all directions.
- the inner cylinder 2 has a plurality of axially extending linear pipes and a bent pipe arranged between two adjacent linear pipes.
- the diameter of the water-cooling pipe 3 gradually increases in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 .
- the water cooling effect of the water cooling pipe 3 changes in a gradient along the axial direction of the inner cylinder 2, which is conducive to the adjustment of the radial and axial gradient temperatures.
- the diameter of the water-cooling pipe is 5mm-10mm, but it is not limited to this.
- the circumferential spacing of the water-cooling pipes in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 is 48 mm.
- the bottom of the water-cooling jacket body is provided with an adjustment sleeve 6 that communicates with the inside of the water-cooling jacket body.
- the adjustment sleeve 6 includes a first element connected to the water-cooling jacket body. end, and a second end opposite to the first end. From the first end to the second end, the cross-sectional area of the adjustment sleeve 6 in the radial direction of the water-cooling jacket body gradually decreases. Small.
- the heat underneath the water-cooling jacket body is blocked from being transmitted to the internal space of the water-cooling jacket, effectively blocking the bottom-up dissipation of heat.
- the cross-sectional area of the adjusting sleeve 6 gradually decreases in the radial direction of the water-cooling jacket body.
- the inner surface of the adjustment sleeve 6 is a curved surface.
- the shape of the cross section of the adjustment sleeve 6 in the axial direction of the water cooling jacket body is a parabolic shape.
- the adjustment sleeve 6 in the axial direction of the water-cooling jacket body, includes a first part close to the water-cooling jacket body and a second part adjacent to the first part, and the second part The outer surface is concave to form a recess 61.
- the water-cooling jacket is located above the crucible, and the concave portion 61 is provided to directionally reflect the heat below to the graphite component or silicon melt liquid surface below the water-cooling jacket, thereby maintaining the stability of the temperature field below.
- the inner surface of the adjustment sleeve 6 is provided with a heat absorption layer.
- the heat-absorbing layer has a heat-absorbing effect, and the bonding strength between the heat-absorbing layer and the adjusting sleeve 6 is high, which can effectively alleviate the heat-absorbing layer interface (the connection surface between the heat-absorbing layer and the adjusting sleeve 6 ) thermal stress and stable thermodynamic properties.
- the adjusting sleeve 6 can take away the heat transmitted by the crystal rod in real time, greatly improve the cooling rate of the crystal rod, increase the pulling speed, and increase the crystal pulling efficiency.
- the heat-absorbing layer includes a first layer close to the adjustment sleeve 6 and a second layer far away from the adjustment sleeve.
- the first layer is made of graphite and the inner wall of the adjustment sleeve 6 A transition layer formed by a chemical reaction.
- the adjusting sleeve is made of carbon fiber composite material, the first layer is a -C+SiC composite transition coating (thickness is 80 ⁇ 10 microns), and the second layer is a -SiC coating (the thickness is 50 ⁇ 10 microns) 5 microns).
- a coating structure (the combination of the above-mentioned heat absorption layer and the adjustment sleeve) has the characteristics of high bonding strength and high density. It can protect the substrate very well and extend its service life.
- the thickness of the heat absorption layer is 130 ⁇ 15 microns.
- the outer surface of the adjustment sleeve 6 is provided with a heat insulation layer.
- the heat insulation layer has the function of reflecting and shielding heat, preventing external heat from being transmitted from the adjusting sleeve 6 to the inside of the water-cooling jacket, and maintaining a constant temperature inside the water-cooling jacket.
- the heat insulation layer includes a third layer close to the adjustment sleeve 6 and a fourth layer far away from the adjustment sleeve.
- the third layer is made of graphite and is in contact with the outer wall of the adjustment sleeve.
- the adjusting sleeve is made of carbon fiber composite material, the third layer is a C+SiC composite transition coating (thickness is 80 ⁇ 10 microns), and the fourth layer is a SiC coating (the thickness is 50 ⁇ 10 microns). 5 microns).
- Such a coating structure (the combination of the above-mentioned heat insulation layer and the adjustment sleeve) has the characteristics of high bonding strength and high density. It can protect the substrate very well and extend its service life.
- the thickness of the thermal insulation layer is 160 ⁇ 15 microns.
- the water-cooling jacket body includes an inner cylinder 2 and an outer cylinder 1 located outside the inner cylinder 2.
- the bottom of the outer cylinder 1 includes a first area for carrying the inner cylinder and a first area connected to the inner cylinder.
- the first area is adjacent to the second area.
- the first area is located close to the side wall of the outer cylinder 1.
- a flange (third flange 62) is provided on the top of the adjustment sleeve 6. The flange Connected to the second zone.
- An embodiment of the present application also provides a single crystal furnace, including a furnace body, a crucible located in the furnace body, and the water-cooling jacket body is fixed above the crucible due to the lifting function of the lifting structure.
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- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
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- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
A water-cooled jacket device, comprising a water-cooled jacket body and a lifting/lowering structure used for controlling the water-cooled jacket body to lift and lower; the water-cooled jacket body comprises an inner cylinder and an outer cylinder located outside the inner cylinder; the lifting/lowering structure comprises two lifting/lowering parts oppositely arranged on two sides of the water-cooled jacket body; each lifting/lowering part comprises a driving part and a transmission part, and the transmission part is connected to the outer cylinder by means of a connecting structure, so that the two lifting/lowering parts can move asynchronously to drive the water-cooled jacket body to incline by a preset angle.
Description
相关申请的交叉引用Cross-references to related applications
本申请主张在2022年05月18日在中国提交的中国专利申请No.202210544309.1的优先权,其全部内容通过引用包含于此。This application claims priority to Chinese Patent Application No. 202210544309.1 filed in China on May 18, 2022, the entire content of which is incorporated herein by reference.
本申请涉及单晶硅产品制作技术领域,尤其涉及一种水冷套装置和单晶炉。The present application relates to the technical field of manufacturing single crystal silicon products, and in particular to a water cooling jacket device and a single crystal furnace.
随着半导体先进制程地不断提高,对半导体晶圆的品质要求越来越高,而对于晶圆的品质,拉晶工艺对晶圆核心品质的影响非常大,如氧含量、体微缺陷(Bulk Micro Defects,BMD)、层错、晶体起源粒子(crystal originated particles,COPs)、流型缺陷(flow pattern defects,FPD)、缺陷的激光散射层析图像(laser scattering tomography defects,LSTDs)等品质都与拉晶工艺有密切关系。With the continuous improvement of advanced semiconductor processes, the quality requirements for semiconductor wafers are getting higher and higher. As for the quality of the wafers, the crystal pulling process has a great impact on the core quality of the wafers, such as oxygen content, bulk defects (Bulk Micro Defects (BMD), stacking faults, crystal origin particles (COPs), flow pattern defects (FPD), laser scattering tomography defects (LSTDs) and other qualities are all related to The crystal pulling process is closely related.
晶棒生长过程中所经历的热历史很大程度上影响着晶棒的整体品质,而热历史主要受晶棒的纵向和轴向温度梯度影响,拉晶炉的结构部件对温梯的影响很大,这其中非常重要的一个部件就是水冷套,其很大程度上改变了晶棒的纵向和横向温度梯度,提高了晶棒的冷却速率,进而影响晶棒的拉制速率。The thermal history experienced during the growth process of the crystal rod greatly affects the overall quality of the crystal rod, and the thermal history is mainly affected by the longitudinal and axial temperature gradient of the crystal rod. The structural components of the crystal pulling furnace have a great influence on the temperature gradient. Large, a very important component of this is the water-cooling jacket, which greatly changes the longitudinal and transverse temperature gradients of the crystal rod, increases the cooling rate of the crystal rod, and thereby affects the drawing rate of the crystal rod.
相关技术中水冷套为圆筒状,这极大地限制了其对晶棒轴向和纵向的温度调节,晶棒的晶体缺陷不能很好地管控,如调节能力受限导致晶棒中心热量不能很好地传导出,造成过大的内应力累积,进而导致错排产生,这极大地影响了晶棒的品质,尤其对于外延产品在进行外延沉积工艺时层错会造成沉积的不均匀,甚至会造成沉积失效。In the related art, the water-cooling jacket is cylindrical, which greatly limits its axial and longitudinal temperature adjustment of the crystal ingot. The crystal defects of the crystal ingot cannot be well controlled. For example, the limited adjustment ability causes the heat in the center of the crystal ingot to not be very high. Not properly conducted, resulting in excessive accumulation of internal stress, which in turn leads to misalignment, which greatly affects the quality of the ingot. Especially for epitaxial products, stacking faults will cause uneven deposition during the epitaxial deposition process, and even cause Causes deposition failure.
发明内容Contents of the invention
为了解决上述技术问题,本申请提供一种水冷套装置和单晶炉,解决晶棒轴向和纵向的温度调节受限的问题。In order to solve the above technical problems, this application provides a water-cooling jacket device and a single crystal furnace to solve the problem of limited temperature adjustment in the axial and longitudinal directions of the crystal ingot.
为了达到上述目的,本申请实施例采用的技术方案是:一种水冷套装置,包括水冷套本体和用于控制所述水冷套本体升降的升降结构;In order to achieve the above object, the technical solution adopted in the embodiment of the present application is: a water-cooling jacket device, including a water-cooling jacket body and a lifting structure for controlling the lifting and lowering of the water-cooling jacket body;
所述水冷套本体包括内筒和位于所述内筒外部的外筒;The water cooling jacket body includes an inner cylinder and an outer cylinder located outside the inner cylinder;
所述升降结构包括相对设置于所述水冷套本体的两侧的两个升降部,每个所述升降部包括驱动件和传动件,所述传动件通过连接结构与所述外筒连接,使得两个所述升降部能够异步运动以带动所述水冷套本体倾斜预设角度。The lifting structure includes two lifting parts arranged oppositely on both sides of the water-cooling jacket body. Each lifting part includes a driving part and a transmission part. The transmission part is connected to the outer cylinder through a connecting structure, so that The two lifting parts can move asynchronously to drive the water cooling jacket body to tilt at a preset angle.
可选地,所述传动件包括:Optionally, the transmission component includes:
升降杆,沿所述外筒的轴向方向延伸,且所述升降杆外表面上设置有齿条结构;A lifting rod extends along the axial direction of the outer cylinder, and a rack structure is provided on the outer surface of the lifting rod;
传动齿轮,所述传动齿轮通过与所述齿条结构啮合以与所述升降杆传动连接。A transmission gear, which is drivingly connected to the lifting rod by meshing with the rack structure.
可选地,两个所述升降杆中的一个所述升降杆的外表面具有远离所述另一个所述升降杆设置的第一区域,所述第一区域内凹形成一连接面,所述连接面上设置所述齿条结构。Optionally, the outer surface of one of the two lifting rods has a first area disposed away from the other lifting rod, and the first area is concave to form a connecting surface, and the The rack structure is provided on the connecting surface.
可选地,所述齿条结构包括凸设于所述连接面上的多个相平行设置的齿条,多个所述齿条沿所述外筒的轴向方向并排设置,相邻两个所述齿条之间形成齿槽。Optionally, the rack structure includes a plurality of parallel racks protruding from the connecting surface. The plurality of racks are arranged side by side along the axial direction of the outer cylinder, and two adjacent racks are arranged side by side. A tooth groove is formed between the racks.
可选地,所述升降杆远离所述外筒的一端设置有限位台。Optionally, a limiting platform is provided at one end of the lifting rod away from the outer cylinder.
可选地,在所述外筒的轴向方向上,所述第一区域的长度小于所述升降杆的长度,且所述第一区域位于所述升降杆远离所述外筒的一端。Optionally, in the axial direction of the outer cylinder, the length of the first region is less than the length of the lifting rod, and the first region is located at an end of the lifting rod away from the outer cylinder.
可选地,在所述外筒的轴向方向上,所述第一区域的长度大于所述升降杆的长度的一半。Optionally, the length of the first region is greater than half the length of the lifting rod in the axial direction of the outer cylinder.
可选地,所述连接结构包括套设于所述外筒外部的卡环,所述卡环的相对的两侧凸设形成两个凸起,每个所述凸起上设置有用于与相应的所述升降 杆连接的连接通孔。Optionally, the connection structure includes a snap ring that is sleeved on the outside of the outer cylinder, and two protrusions are formed on opposite sides of the snap ring, and each protrusion is provided with a corresponding The connecting through hole for connecting the lifting rod.
可选地,所述外筒的顶部设置有第一凸缘,所述卡环设置于所述第一凸缘靠近所述外筒的底部的一侧。Optionally, a first flange is provided on the top of the outer cylinder, and the snap ring is provided on a side of the first flange close to the bottom of the outer cylinder.
本申请实施例还提供一种单晶炉,包括上述的水冷套装置。An embodiment of the present application also provides a single crystal furnace, including the above-mentioned water cooling jacket device.
本申请的有益效果是:通过所述升降结构的设置,控制所述水冷套本体的升降,且两个升降部采用独立驱动的方式,以使得两个所述升降部可异步运动,使得水冷套本体可在预设角度范围内倾斜,从而形成不对称的水冷效果,以此达到径向和轴向的梯度温梯变化,大大提高晶棒轴向和径向的散热,减少内部热量累积,改变晶棒的热历史,减少错排及其他晶体缺陷的产生,提高晶棒品质。The beneficial effects of this application are: through the arrangement of the lifting structure, the lifting of the water-cooling jacket body is controlled, and the two lifting parts are independently driven, so that the two lifting parts can move asynchronously, so that the water-cooling jacket The body can be tilted within a preset angle range to form an asymmetric water cooling effect, thereby achieving gradient temperature gradient changes in the radial and axial directions, greatly improving the axial and radial heat dissipation of the crystal ingot, reducing internal heat accumulation, and changing The thermal history of the crystal ingot reduces the occurrence of misalignment and other crystal defects and improves the quality of the crystal ingot.
图1表示本申请实施例中水冷套装置结构示意图;Figure 1 shows a schematic structural diagram of the water cooling jacket device in the embodiment of the present application;
图2表示本申请实施例中升降杆的结构示意图一;Figure 2 shows a schematic structural diagram of the lifting rod in the embodiment of the present application;
图3表示本申请实施例中升降杆的结构示意图二;Figure 3 shows the second structural schematic diagram of the lifting rod in the embodiment of the present application;
图4表示本申请实施例中的连接部的结构示意图;Figure 4 shows a schematic structural diagram of the connection part in the embodiment of the present application;
图5表示本申请实施例中的内筒的结构示意图;Figure 5 shows a schematic structural diagram of the inner cylinder in the embodiment of the present application;
图6表示本申请实施例中的外筒的结构示意图;Figure 6 shows a schematic structural diagram of the outer cylinder in the embodiment of the present application;
图7表示本申请实施例中的调节套筒的结构示意图。Figure 7 shows a schematic structural diagram of the adjusting sleeve in the embodiment of the present application.
为使本申请实施例的目的、技术方案和优点更加清楚,下面将结合本申请实施例的附图,对本申请实施例的技术方案进行清楚、完整地描述。显然,所描述的实施例是本申请的一部分实施例,而不是全部的实施例。基于所描述的本申请的实施例,本领域普通技术人员所获得的所有其他实施例,都属于本申请保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions of the embodiments of the present application will be clearly and completely described below in conjunction with the drawings of the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, but not all of the embodiments. Based on the described embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art fall within the scope of protection of the present application.
在本申请的描述中,需要说明的是,术语“中心”、“上”、“下”、“左”、 “右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本申请和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本申请的限制。此外,术语“第一”、“第二”、“第三”仅用于描述目的,而不能理解为指示或暗示相对重要性。In the description of this application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description. It does not indicate or imply that the device or element referred to must have a specific orientation or a specific orientation. construction and operation, and therefore should not be construed as limitations on this application. Furthermore, the terms “first”, “second” and “third” are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
参考图1-图4,本实施例中提供一种水冷套装置,包括水冷套本体和用于控制所述水冷套本体升降的升降结构;Referring to Figures 1-4, this embodiment provides a water-cooling jacket device, including a water-cooling jacket body and a lifting structure for controlling the lifting and lowering of the water-cooling jacket body;
所述水冷套本体包括内筒2和位于所述内筒2外部的外筒1;The water-cooling jacket body includes an inner cylinder 2 and an outer cylinder 1 located outside the inner cylinder 2;
所述升降结构包括相对设置于所述水冷套本体的两侧的两个升降部4,每个所述升降部4包括驱动件和传动件,所述传动件通过连接结构5与所述外筒1连接,使得两个所述升降部4能够异步运动以带动所述水冷套本体倾斜预设角度。The lifting structure includes two lifting parts 4 arranged oppositely on both sides of the water-cooling jacket body. Each lifting part 4 includes a driving part and a transmission part. The transmission part is connected to the outer cylinder through a connecting structure 5. 1 connection, so that the two lifting parts 4 can move asynchronously to drive the water cooling jacket body to tilt at a preset angle.
通过所述升降结构的设置,控制所述水冷套本体的升降,且两个升降部4采用独立驱动的方式,以使得两个所述升降部4可异步运动,使得水冷套本体可在预设角度范围内倾斜从而形成不对称的水冷效果,大的梯度变化可加快晶棒热量向水冷套进行传输,提高传热效率,加快晶棒轴向和径向的散热。且可根据拉工艺需要,很大限度地调节晶棒的纵向温度梯度和径向温度梯度,控制晶棒中缺陷的反应速率,调节缺陷分布,具有很好的冷却速率,可拉制不同缺陷类型的晶棒(如无层错晶棒,BMD晶棒)。Through the arrangement of the lifting structure, the lifting of the water-cooling jacket body is controlled, and the two lifting parts 4 are driven independently, so that the two lifting parts 4 can move asynchronously, so that the water-cooling jacket body can move in the preset position. Inclination within the angle range creates an asymmetric water cooling effect. Large gradient changes can accelerate the transfer of heat from the crystal ingot to the water cooling jacket, improve heat transfer efficiency, and accelerate axial and radial heat dissipation of the crystal ingot. And according to the needs of the drawing process, the longitudinal and radial temperature gradients of the crystal rod can be adjusted to a large extent, the reaction rate of defects in the crystal rod can be controlled, and the defect distribution can be adjusted. It has a good cooling rate and can draw different defect types. Crystal rods (such as stacking fault-free crystal rods, BMD crystal rods).
不同工艺参数要求的晶棒需要匹配不同的水冷效果,异步移动的水冷套装置可以根据需求进行相应调整得到合适的冷却效果。Crystal ingots with different process parameter requirements need to be matched with different water cooling effects. The asynchronously moving water cooling jacket device can be adjusted accordingly to obtain appropriate cooling effects according to needs.
异步移动的目的是造成径向不对称效果,提高水冷效果,升降机构的作用:当拉制外延晶棒时,需要大的拉速拉制,通过水冷套向液面移动,增加冷却效果,以此来提高拉速;当拉制无缺陷抛光晶棒时,可将水冷套向上移动,抑制COP的形成;当拉制BMD晶棒时,会促进BMD的形核及长大,可通过水冷套的移动调节,BMD在650℃-700℃的低温形核,同时对于高温区域,通过异步移动调节,扩大在750℃-1100℃温度范围内的晶棒区间。以 此来促进BMD的高温形核。The purpose of the asynchronous movement is to create a radial asymmetry effect and improve the water cooling effect. The role of the lifting mechanism: when drawing the epitaxial crystal rod, a large drawing speed is required, and the water cooling jacket moves toward the liquid surface to increase the cooling effect. This will increase the drawing speed; when drawing defect-free polished crystal ingots, the water-cooling jacket can be moved upward to inhibit the formation of COP; when drawing BMD crystal ingots, it will promote the nucleation and growth of BMD, and the water-cooling jacket can Through movement adjustment, BMD nucleates at a low temperature of 650℃-700℃. At the same time, for high temperature areas, through asynchronous movement adjustment, the ingot range is expanded within the temperature range of 750℃-1100℃. This is used to promote the high-temperature nucleation of BMD.
需要说明的是,在所述升降结构的作用下,两个相对设置的所述升降部4相配合可使得所述水冷套本体倾斜升降,即通过两个所述升降部4异步运动倾斜预设角度后,再控制两个所述升降部4同步运动以控制所述水冷套本体以倾斜的状态进行升降运动。It should be noted that under the action of the lifting structure, the cooperation of the two opposite lifting parts 4 can make the water cooling jacket body tilt and rise, that is, the two lifting parts 4 move asynchronously to tilt preset After adjusting the angle, the two lifting parts 4 are controlled to move synchronously to control the water-cooling jacket body to perform lifting movement in an inclined state.
需要说明的是,升降结构所包括的所述升降部4的数量并不做限定,所述水冷套本体的相对的两侧设置两个所述升降部4,两个相对设置的升降部4为一组,所述升降结构可以包括多组所述升降部4,每一组所述升降部4可以实现所述水冷套本体在一个方向上的倾斜,从而可以根据实际需要,设置多组所述升降部4,从而灵活控制所述水冷套本体的倾斜方向,从而可以更好的控制水冷效果。It should be noted that the number of the lifting parts 4 included in the lifting structure is not limited. Two lifting parts 4 are provided on opposite sides of the water-cooling jacket body. The two opposite lifting parts 4 are One group, the lifting structure may include multiple groups of the lifting parts 4, each group of the lifting parts 4 can realize the inclination of the water cooling jacket body in one direction, so that multiple groups of the lifting parts 4 can be provided according to actual needs. The lifting part 4 can flexibly control the tilt direction of the water cooling jacket body, so that the water cooling effect can be better controlled.
需要说明的是,两个相对设置的所述升降部4相配合可使得所述水冷套本体倾斜升降,倾斜的角度可以根据实际需要设定,例如可以为0度-17度,但并不以此为限。It should be noted that the cooperation of the two opposite lifting parts 4 can make the water-cooling jacket body tilt and rise. The tilt angle can be set according to actual needs, for example, it can be 0 degrees to 17 degrees, but it does not range from 0 to 17 degrees. This is the limit.
示例性地,所述传动件包括:By way of example, the transmission parts include:
升降杆41,沿所述外筒1的轴向方向延伸,且所述升降杆41外表面上设置有齿条411结构;The lifting rod 41 extends along the axial direction of the outer cylinder 1, and a rack 411 structure is provided on the outer surface of the lifting rod 41;
传动齿轮42,所述传动齿轮42通过与所述齿条411结构啮合以与所述升降杆41传动连接。The transmission gear 42 is transmission connected to the lifting rod 41 by meshing with the rack 411 structure.
本实施例中采用传动齿轮42和升降杆41相配合的方式,传动齿轮42旋转,在所述升降杆41的传动作用下,实现所述水冷套本体的升降。In this embodiment, the transmission gear 42 and the lifting rod 41 are matched. The transmission gear 42 rotates, and under the driving action of the lifting rod 41, the water cooling jacket body is raised and lowered.
示例性地,每个所述升降部4的所述驱动件可以为驱动电机。For example, the driving member of each lifting part 4 may be a driving motor.
示例性地,一个所述升降杆41的外表面具有远离所述另一个所述升降杆41设置的第一区域,所述第一区域内凹形成一连接面,所述连接面上设置所述齿条411结构。Illustratively, the outer surface of one of the lifting rods 41 has a first area located away from the other lifting rod 41. The first area is concave to form a connecting surface, and the connecting surface is provided with the Rack 411 structure.
所述连接面为与所述外筒1的轴向方向相平行的平面,在所述连接面上设置所述齿条411结构,利于所述齿条411结构与所述传动齿轮42的配合。The connecting surface is a plane parallel to the axial direction of the outer cylinder 1 , and the rack 411 structure is provided on the connecting surface, which facilitates the cooperation between the rack 411 structure and the transmission gear 42 .
示例性地,所述齿条411结构包括凸设于所述连接面上的多个相平行设置的齿条411,多个所述齿条411沿所述外筒1的轴向方向并排设置,相邻两个所述齿条411之间形成齿槽。Exemplarily, the rack 411 structure includes a plurality of parallel racks 411 protruding from the connection surface, and the plurality of racks 411 are arranged side by side along the axial direction of the outer cylinder 1. A tooth gap is formed between two adjacent racks 411 .
所述齿条411的延伸方向与所述外筒1的轴向方向相垂直,所述传动齿轮42的轴向方向与所述齿条411的延伸方向相平行,所述传动齿轮42的齿对应于所述齿槽,从而所述传动齿轮42旋转,带动所述升降杆41进行升降运动,从而带动所述水冷套本体进行升降运动。The extension direction of the rack 411 is perpendicular to the axial direction of the outer cylinder 1 , the axial direction of the transmission gear 42 is parallel to the extension direction of the rack 411 , and the teeth of the transmission gear 42 correspond to in the tooth slot, so that the transmission gear 42 rotates, driving the lifting rod 41 to perform lifting movement, thereby driving the water cooling jacket body to perform lifting movement.
示例性地,所述齿条411为螺纹齿条,螺纹齿条具有高精度和大负载的特点。For example, the rack 411 is a threaded rack, and the threaded rack has the characteristics of high precision and large load.
示例性地,所述升降杆41远离所述外筒1的一端设置有限位台43。For example, a limiting platform 43 is provided at one end of the lifting rod 41 away from the outer cylinder 1 .
所述限位台43的设置,防止所述传动齿轮42与所述升降杆41脱离,所述限位台43可以为圆形结构,且所述限位台43在所述升降杆41的径向方向上的面积大于所述升降杆41的端面的截面面积。The setting of the limiting platform 43 prevents the transmission gear 42 from being separated from the lifting rod 41. The limiting platform 43 can be a circular structure, and the limiting platform 43 is located on the diameter of the lifting rod 41. The area in the direction is larger than the cross-sectional area of the end surface of the lifting rod 41 .
所述限位台43可以是与所述升降杆41为一体结构,可以是经过焊接等工艺连接的,也可以是在所述连接面形成时同步形成的,所述第一区域可以位于所述升降杆41的中部,所述第一区域内凹形成凹槽,所述凹槽的底面为所述连接面,从而在所述升降杆41的轴向方向上,所述凹槽的远离所述外筒1的一端的第一侧壁形成所述限位台43,所述凹槽的与所述第一侧壁相对的第二侧壁形成用于限制所述传动齿轮42的运动行程的限位挡墙。The limiting platform 43 may be an integral structure with the lifting rod 41, may be connected through welding or other processes, or may be formed simultaneously when the connection surface is formed, and the first area may be located on the In the middle of the lifting rod 41, a groove is formed in the first area, and the bottom surface of the groove is the connecting surface, so that in the axial direction of the lifting rod 41, the groove is farther away from the The first side wall of one end of the outer cylinder 1 forms the limiting platform 43 , and the second side wall of the groove opposite to the first side wall forms a limit for limiting the movement stroke of the transmission gear 42 . retaining wall.
示例性地,在所述外筒1的轴向方向上,所述第一区域的长度小于所述升降杆41的长度,且所述第一区域位于所述升降杆41远离所述外筒1的一端。For example, in the axial direction of the outer cylinder 1 , the length of the first region is less than the length of the lifting rod 41 , and the first region is located away from the lifting rod 41 and away from the outer cylinder 1 one end.
示例性地,在所述外筒1的轴向方向上,所述第一区域的长度大于所述升降杆41的长度的一半。For example, in the axial direction of the outer cylinder 1 , the length of the first region is greater than half of the length of the lifting rod 41 .
示例性地,所述连接结构5包括套设于所述外筒1外部的卡环51,所述卡环51的相对的两侧凸设形成两个凸起52,每个所述凸起52上设置有用于与相应的所述升降杆41连接的连接通孔521。Exemplarily, the connection structure 5 includes a snap ring 51 that is sleeved on the outside of the outer cylinder 1 . Two protrusions 52 are formed on opposite sides of the snap ring 51 , and each of the protrusions 52 There is a connection through hole 521 for connecting with the corresponding lifting rod 41.
示例性地,所述升降杆41靠近所述外筒1的一端设置有连接环44,所述连接环44与所述升降杆41通过螺纹连接,所述升降杆41与所述凸起52以间隙宽松配合,这样便于在两个所述升降杆41异步运动的时候,实现水冷套的倾斜。Exemplarily, a connecting ring 44 is provided at one end of the lifting rod 41 close to the outer tube 1. The connecting ring 44 is threadedly connected to the lifting rod 41. The lifting rod 41 and the protrusion 52 are connected by a thread. The gap is loosely matched, which facilitates the tilting of the water-cooling jacket when the two lifting rods 41 move asynchronously.
示例性地,所述外筒1的顶部设置有第一凸缘11,所述卡环51设置于所述第一凸缘11靠近所述外筒1的底部的一侧。For example, a first flange 11 is provided on the top of the outer cylinder 1 , and the snap ring 51 is provided on a side of the first flange 11 close to the bottom of the outer cylinder 1 .
所述卡环51可通过粘结层与所述第一凸缘11粘接,以增强所述连接结构5与所述外筒1之间的连接强度。The snap ring 51 can be bonded to the first flange 11 through an adhesive layer to enhance the connection strength between the connection structure 5 and the outer cylinder 1 .
参考图1、图5和图6,示例性地,所述内筒2呈倒锥形结构。Referring to Figures 1, 5 and 6, exemplarily, the inner cylinder 2 has an inverted conical structure.
相比于单一的直筒式结构,本实施例中采用套设的内筒和外筒的双层结构,所述外筒采用直筒式结构,所述外筒起到阻隔热的作用,所述内筒采用倒锥形结构,可以形成纵向梯度水冷的效果,因晶棒纵向(即晶棒的轴向方向)的温度呈梯度变化(下端热上端冷,靠近硅熔液的一端为下端,远离硅熔液的一端为上端),晶棒的热量主要是以辐射的方式传输给周围温度低的物体,辐射传热的强度与距离的三次方呈反比,即距离越近辐射传热越强,相应的水冷效果越好,所述内筒呈倒锥形,沿纵向方向,所述内筒的内壁与晶棒在所述晶棒的径向方向上的距离呈梯度变化,可以实现梯度水冷地效果,即纵向不对称效果,以此达到径向和轴向的梯度温梯变化,大大提高晶棒轴向和径向的散热,减少内部热量累积,改变晶棒的热历史,减少错排及其他晶体缺陷的产生,提高晶棒品质。可根据拉工艺需要,调节所述内筒的内壁的倾斜角度,可以很大限度地调节晶棒的纵向(即为轴向)和径向温度梯度,控制晶棒中缺陷的反应速率,调节缺陷分布。Compared with a single straight-cylinder structure, this embodiment adopts a double-layer structure of an inner cylinder and an outer cylinder. The outer cylinder adopts a straight-cylinder structure. The outer cylinder plays a role in blocking heat. The inner cylinder The barrel adopts an inverted conical structure, which can form a longitudinal gradient water cooling effect, because the temperature in the longitudinal direction of the crystal rod (that is, the axial direction of the crystal rod) changes in a gradient (the lower end is hot and the upper end is cold, the end close to the silicon melt is the lower end, and the end far away from the silicon One end of the melt is the upper end). The heat of the crystal rod is mainly transmitted to the surrounding low-temperature objects by radiation. The intensity of radiation heat transfer is inversely proportional to the cube of the distance. That is, the closer the distance, the stronger the radiation heat transfer. Correspondingly The better the water cooling effect, the inner cylinder is inverted cone shape, along the longitudinal direction, the distance between the inner wall of the inner cylinder and the crystal rod in the radial direction of the crystal rod changes in a gradient, which can achieve the effect of gradient water cooling. , that is, the longitudinal asymmetric effect, thereby achieving gradient temperature gradient changes in the radial and axial directions, greatly improving the axial and radial heat dissipation of the crystal rod, reducing internal heat accumulation, changing the thermal history of the crystal rod, reducing misalignment and other The generation of crystal defects improves the quality of crystal ingots. According to the needs of the drawing process, the inclination angle of the inner wall of the inner cylinder can be adjusted to greatly adjust the longitudinal (ie axial) and radial temperature gradient of the crystal rod, control the reaction rate of defects in the crystal rod, and adjust the defects distributed.
本实施例中,两个升降部4采用独立驱动的方式,以使得两个所述升降部4可异步运动,使得水冷套本体可在预设角度范围内倾斜从而形成径向方向上的不对称的水冷效果,所述内筒采用倒锥形结构形成的纵向(即轴向)不对称效果,从而两者想配合达到晶棒径向和轴向的双不对称,进而提高晶棒轴向和径向的散热效率。In this embodiment, the two lifting parts 4 are driven independently, so that the two lifting parts 4 can move asynchronously, so that the water cooling jacket body can tilt within a preset angle range to form asymmetry in the radial direction. The inner cylinder adopts the longitudinal (i.e. axial) asymmetry effect formed by the inverted cone structure, so that the two can cooperate to achieve double asymmetry in the radial and axial directions of the crystal rod, thereby improving the axial and axial asymmetry of the crystal rod. Radial heat dissipation efficiency.
示例性地,所述内筒的顶部的内直径为450mm,所述内筒的底部的内直径为390mm,但并不以此为限。For example, the inner diameter of the top of the inner cylinder is 450 mm, and the inner diameter of the bottom of the inner cylinder is 390 mm, but this is not a limitation.
所述内筒的顶部设置有第二凸缘22,所述外筒的顶部设置有第一凸缘11,所述第一凸缘11靠近所述内筒的一侧设置有台阶形凹槽13,所述第二凸缘22搭接于所述台阶形凹槽13内。The top of the inner cylinder is provided with a second flange 22, the top of the outer cylinder is provided with a first flange 11, and the first flange 11 is provided with a stepped groove 13 on one side close to the inner cylinder. , the second flange 22 overlaps in the stepped groove 13 .
所述第二凸缘22远离所述内筒底部的第一面与所述第一凸缘11远离所述内筒底部的第二面位于同一平面。The first surface of the second flange 22 away from the bottom of the inner cylinder and the second surface of the first flange 11 away from the bottom of the inner cylinder are located on the same plane.
所述内筒的底部具有第一通孔,所述外筒的底部具有第二通孔12,所述第一通孔的圆心在所述外筒1的底部上的正投影与所述第二通孔12的圆心重合。The bottom of the inner cylinder has a first through hole, and the bottom of the outer cylinder has a second through hole 12. The orthogonal projection of the center of the first through hole on the bottom of the outer cylinder 1 is the same as the second through hole. The center points of the through holes 12 coincide with each other.
示例性地,所述第二通孔12的边缘朝向所述外筒1的顶部凸设有环形凸起14,所述环形凸起14起到挡墙的作用,用于对所述内筒2进行限位。Exemplarily, an annular protrusion 14 protrudes from the edge of the second through hole 12 toward the top of the outer cylinder 1 . The annular protrusion 14 functions as a retaining wall for blocking the inner cylinder 2 . Limit the position.
示例性地,沿所述内筒2的轴向方向,所述内筒2的内侧壁上设置有齿状波纹结构21。For example, along the axial direction of the inner cylinder 2 , a toothed corrugated structure 21 is provided on the inner wall of the inner cylinder 2 .
齿状波纹结构21的设置可以增加所述内筒的内壁的表面积,即增加水冷套的吸热面积,相较于平滑表面,这样的表面吸热效果更好,具有很好的冷却晶棒效果。The arrangement of the toothed corrugated structure 21 can increase the surface area of the inner wall of the inner cylinder, that is, increase the heat absorption area of the water cooling jacket. Compared with a smooth surface, such a surface has a better heat absorption effect and has a good cooling effect of the crystal ingot. .
所述齿状波纹结构21包括多个沿所述内筒2的周向延伸的环形齿,多个所述环形齿沿所述内筒2的轴向排列形成,单个环形齿的截面形状可以为三角形、梯形、弧形等。The toothed corrugated structure 21 includes a plurality of annular teeth extending along the circumferential direction of the inner cylinder 2. The plurality of annular teeth are arranged along the axial direction of the inner cylinder 2. The cross-sectional shape of a single annular tooth can be Triangle, trapezoid, arc, etc.
示例性地,从所述内筒2的顶端到所述内筒2的底部的方向上,所述齿状波纹结构21在所述内筒2的径向方向上的厚度逐渐增大。For example, in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 , the thickness of the toothed corrugated structure 21 in the radial direction of the inner cylinder 2 gradually increases.
示例性地,所述内筒2的内侧壁设置有吸热涂层。Exemplarily, the inner side wall of the inner cylinder 2 is provided with a heat-absorbing coating.
所述吸热涂层设置于所述齿状波纹结构21远离所述外筒1的一侧,所述吸热涂层的形状与所述齿状波纹结构21的形状相符,即所述吸热涂层与所述内筒2的连接面和与所述连接面相对设置的内表面均为齿状波纹结构21。The heat-absorbing coating is disposed on the side of the toothed corrugated structure 21 away from the outer cylinder 1 , and the shape of the heat-absorbing coating matches the shape of the toothed corrugated structure 21 , that is, the heat-absorbing coating The connection surface between the coating and the inner cylinder 2 and the inner surface opposite to the connection surface are both toothed corrugated structures 21 .
所述吸热涂层具有吸热作用,所述吸热涂层与所述内筒2的结合强度高, 可有效缓解吸热涂层界面(所述吸热涂层与所述内筒2的连接面)的热应力,热力学性能稳定,所述内筒2可以很好地实时带走晶棒传输的热量,大大提高晶棒的冷却速率,提高拉速,增加拉晶效率。The heat-absorbing coating has a heat-absorbing effect, and the bonding strength between the heat-absorbing coating and the inner cylinder 2 is high, which can effectively alleviate the interface between the heat-absorbing coating and the inner cylinder 2. The thermal stress of the connecting surface) and the thermodynamic properties are stable. The inner cylinder 2 can take away the heat transmitted by the crystal rod in real time, greatly improve the cooling rate of the crystal rod, increase the pulling speed, and increase the crystal pulling efficiency.
示例性地,所述内筒2的外侧壁设置有隔热涂层,从所述内筒2的顶端到所述内筒2的底部的方向上,所述吸热涂层在所述内筒2的径向方向上的厚度逐渐增大。Exemplarily, the outer wall of the inner cylinder 2 is provided with a heat-insulating coating, and the heat-absorbing coating is formed on the inner cylinder in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 2The thickness in the radial direction gradually increases.
示例性地,所述吸热涂层采用陶瓷制成,但并不以此为限。Illustratively, the heat-absorbing coating is made of ceramic, but is not limited thereto.
示例性地,所述吸热涂层的厚度为200±50微米。Exemplarily, the thickness of the heat-absorbing coating is 200±50 microns.
示例性地,所述内筒2的外侧壁和/或所述外筒1的内侧壁设置有隔热涂层。Exemplarily, the outer side wall of the inner cylinder 2 and/or the inner side wall of the outer cylinder 1 is provided with a heat-insulating coating.
所述隔热涂层具有反射及屏蔽热的作用,防止外面的热量从所述外筒1向水冷套(即所述内筒2的内部)内部传输,维持水冷套内部的温度恒定。The heat-insulating coating has the function of reflecting and shielding heat, preventing external heat from being transmitted from the outer cylinder 1 to the inside of the water-cooling jacket (ie, the inside of the inner cylinder 2), and maintaining a constant temperature inside the water-cooling jacket.
示例性地,从所述内筒2的顶端到所述内筒2的底部的方向上,所述隔热涂层在所述内筒2的径向方向上的厚度逐渐增大。For example, the thickness of the heat-insulating coating in the radial direction of the inner cylinder 2 gradually increases from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 .
示例性地,所述隔热涂层采用耐高温隔热氧化锆陶瓷制成。For example, the heat-insulating coating is made of high-temperature-resistant and heat-insulating zirconia ceramics.
示例性地,所述隔热涂层的厚度为100±25微米,但并不以此为限。For example, the thickness of the thermal insulation coating is 100±25 microns, but is not limited thereto.
示例性地,沿着所述内筒2的轴向方向,所述水冷管道3螺旋式环绕分布于所述内筒2的外侧壁上。For example, along the axial direction of the inner cylinder 2 , the water-cooling pipes 3 are spirally distributed around the outer wall of the inner cylinder 2 .
所述水冷管道3可以设置在所述内筒2的外侧壁上,也可以设置在所述外筒1的内侧壁上。The water-cooling pipe 3 can be provided on the outer side wall of the inner cylinder 2 or on the inner side wall of the outer cylinder 1 .
所述水冷管道3的具体结构形式并不以此为限,例如所述水冷管道3可呈蛇形,分布于所述内筒2的外侧壁,所述水冷管道3呈蛇形,包括沿所述内筒2的轴向延伸的多个直线形管道和设置于相邻两个直线形管道之间的弯折形管道。The specific structural form of the water-cooling pipe 3 is not limited to this. For example, the water-cooling pipe 3 can be in a serpentine shape and is distributed on the outer wall of the inner cylinder 2. The water-cooling pipe 3 can be in a serpentine shape, including along all directions. The inner cylinder 2 has a plurality of axially extending linear pipes and a bent pipe arranged between two adjacent linear pipes.
示例性地,从所述内筒2的顶端到所述内筒2的底部的方向上,所述水冷管道3的直径逐渐增大。For example, the diameter of the water-cooling pipe 3 gradually increases in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 .
采用上述方案,水冷管道3的水冷效果沿着所述内筒2的轴向方向呈梯 度变化,有利于径向向和轴向的梯度温度的调节。Using the above solution, the water cooling effect of the water cooling pipe 3 changes in a gradient along the axial direction of the inner cylinder 2, which is conducive to the adjustment of the radial and axial gradient temperatures.
示例性地,所述水冷管道的直径为5mm-10mm,但并不以此为限。For example, the diameter of the water-cooling pipe is 5mm-10mm, but it is not limited to this.
示例性地,从所述内筒2的顶端到所述内筒2的底部的方向上,水冷管道的环绕间距为48mm。For example, the circumferential spacing of the water-cooling pipes in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 is 48 mm.
参考图1和图7,示例性地,所述水冷套本体的底部设置与所述水冷套本体内部连通的调节套筒6,所述调节套筒6包括与所述水冷套本体连接的第一端,和与所述第一端相对的第二端,从所述第一端到所述第二端,所述调节套筒6在所述水冷套本体的径向方向上截面的面积逐渐减小。Referring to Figures 1 and 7, exemplarily, the bottom of the water-cooling jacket body is provided with an adjustment sleeve 6 that communicates with the inside of the water-cooling jacket body. The adjustment sleeve 6 includes a first element connected to the water-cooling jacket body. end, and a second end opposite to the first end. From the first end to the second end, the cross-sectional area of the adjustment sleeve 6 in the radial direction of the water-cooling jacket body gradually decreases. Small.
通过所述调节套筒6的设置,阻挡所述水冷套本体下方热量传输到水冷套内部空间,有效阻挡热量的自下而上的散失。且所述调节套筒6在所述水冷套本体的径向方向上截面的面积逐渐减小,当惰性气体流从拉晶炉上方吹撒流经所述调节套筒时,流速变大,保证了惰性气体流与晶棒的充分接触,提高了晶棒的冷却速率,很好地调节晶棒的纵向和径向温梯,控制晶棒中缺陷的反应速率,调节缺陷分布,拉制不同类型的晶棒。Through the arrangement of the adjusting sleeve 6, the heat underneath the water-cooling jacket body is blocked from being transmitted to the internal space of the water-cooling jacket, effectively blocking the bottom-up dissipation of heat. And the cross-sectional area of the adjusting sleeve 6 gradually decreases in the radial direction of the water-cooling jacket body. When the inert gas flow blows through the adjusting sleeve from above the crystal pulling furnace, the flow rate becomes larger, ensuring that It ensures full contact between the inert gas flow and the crystal rod, improves the cooling rate of the crystal rod, well adjusts the longitudinal and radial temperature gradient of the crystal rod, controls the reaction rate of defects in the crystal rod, adjusts the defect distribution, and draws different types of crystal rods. of crystal rod.
示例性地,所述调节套筒6的内表面为曲面。For example, the inner surface of the adjustment sleeve 6 is a curved surface.
示例性地,所述调节套筒6在所述水冷套本体的轴向方向上的截面的形状呈抛物线形状。For example, the shape of the cross section of the adjustment sleeve 6 in the axial direction of the water cooling jacket body is a parabolic shape.
示例性地,在所述水冷套本体的轴向方向上,所述调节套筒6包括靠近所述水冷套本体的第一部分和与所述第一部分相邻的第二部分,所述第二部分的外表面内凹形成凹部61。Illustratively, in the axial direction of the water-cooling jacket body, the adjustment sleeve 6 includes a first part close to the water-cooling jacket body and a second part adjacent to the first part, and the second part The outer surface is concave to form a recess 61.
水冷套位于坩埚的上方,所述凹部61的设置可将下方的热量定向反射至水冷套下方石墨部件或硅熔液液面,维持下方温度场的稳定。The water-cooling jacket is located above the crucible, and the concave portion 61 is provided to directionally reflect the heat below to the graphite component or silicon melt liquid surface below the water-cooling jacket, thereby maintaining the stability of the temperature field below.
示例性地,所述调节套筒6的内表面设置有吸热层。Exemplarily, the inner surface of the adjustment sleeve 6 is provided with a heat absorption layer.
所述吸热层具有吸热作用,所述吸热层与所述调节套筒6的结合强度高,可有效缓解吸热层界面(所述吸热层与所述调节套筒6的连接面)的热应力,热力学性能稳定,所述调节套筒6可以很好地实时带走晶棒传输的热量,大大提高晶棒的冷却速率,提高拉速,增加拉晶效率。The heat-absorbing layer has a heat-absorbing effect, and the bonding strength between the heat-absorbing layer and the adjusting sleeve 6 is high, which can effectively alleviate the heat-absorbing layer interface (the connection surface between the heat-absorbing layer and the adjusting sleeve 6 ) thermal stress and stable thermodynamic properties. The adjusting sleeve 6 can take away the heat transmitted by the crystal rod in real time, greatly improve the cooling rate of the crystal rod, increase the pulling speed, and increase the crystal pulling efficiency.
示例性地,所述吸热层包括靠近所述调节套筒6的第一层和远离所述调节套筒的第二层,所述第一层为石墨材质与所述调节套筒6的内壁发生化学反应形成的过渡层。Exemplarily, the heat-absorbing layer includes a first layer close to the adjustment sleeve 6 and a second layer far away from the adjustment sleeve. The first layer is made of graphite and the inner wall of the adjustment sleeve 6 A transition layer formed by a chemical reaction.
所述调节套筒的材质为碳纤维复合材料,所述第一层为_C+SiC复合过渡涂层(厚度为80±10微米),所述第二层为_SiC涂层(厚度为50±5微米)。这样的涂层结构(上述所述吸热层与所述调节套筒的结合方式)具有高结合强度、高致密度等特点。可以很好的保护基体,延长其使用寿命。The adjusting sleeve is made of carbon fiber composite material, the first layer is a -C+SiC composite transition coating (thickness is 80±10 microns), and the second layer is a -SiC coating (the thickness is 50±10 microns) 5 microns). Such a coating structure (the combination of the above-mentioned heat absorption layer and the adjustment sleeve) has the characteristics of high bonding strength and high density. It can protect the substrate very well and extend its service life.
示例性地,所述吸热层的厚度为130±15微米。For example, the thickness of the heat absorption layer is 130±15 microns.
示例性地,所述调节套筒6的外表面设置有隔热层。Exemplarily, the outer surface of the adjustment sleeve 6 is provided with a heat insulation layer.
所述隔热层具有反射及屏蔽热的作用,防止外面的热量从所述调节套筒6向水冷套内部传输,维持水冷套内部的温度恒定。The heat insulation layer has the function of reflecting and shielding heat, preventing external heat from being transmitted from the adjusting sleeve 6 to the inside of the water-cooling jacket, and maintaining a constant temperature inside the water-cooling jacket.
示例性地,所述隔热层包括靠近所述调节套筒6的第三层和远离所述调节套筒的第四层,所述第三层为石墨材质与所述调节套筒的外壁发生化学反应形成的过渡层。For example, the heat insulation layer includes a third layer close to the adjustment sleeve 6 and a fourth layer far away from the adjustment sleeve. The third layer is made of graphite and is in contact with the outer wall of the adjustment sleeve. A transition layer formed by a chemical reaction.
所述调节套筒的材质为碳纤维复合材料,所述第三层为_C+SiC复合过渡涂层(厚度为80±10微米),所述第四层为_SiC涂层(厚度为50±5微米)。这样的涂层结构(上述所述隔热层与所述调节套筒的结合方式)具有高结合强度、高致密度等特点。可以很好的保护基体,延长其使用寿命。The adjusting sleeve is made of carbon fiber composite material, the third layer is a C+SiC composite transition coating (thickness is 80±10 microns), and the fourth layer is a SiC coating (the thickness is 50±10 microns). 5 microns). Such a coating structure (the combination of the above-mentioned heat insulation layer and the adjustment sleeve) has the characteristics of high bonding strength and high density. It can protect the substrate very well and extend its service life.
示例性地,所述隔热层的厚度为160±15微米。For example, the thickness of the thermal insulation layer is 160±15 microns.
示例性地,所述水冷套本体包括内筒2和位于所述内筒2的外部的外筒1,所述外筒1的底部包括用于承载所述内筒的第一区和与所述第一区相邻的第二区,所述第一区靠近所述外筒1的侧壁设置,所述调节套筒6的顶部设置有凸缘(第三凸缘62),所述凸缘与所述第二区连接。Exemplarily, the water-cooling jacket body includes an inner cylinder 2 and an outer cylinder 1 located outside the inner cylinder 2. The bottom of the outer cylinder 1 includes a first area for carrying the inner cylinder and a first area connected to the inner cylinder. The first area is adjacent to the second area. The first area is located close to the side wall of the outer cylinder 1. A flange (third flange 62) is provided on the top of the adjustment sleeve 6. The flange Connected to the second zone.
本申请实施例还提供一种单晶炉,包括炉体,位于所述炉体内的坩埚,在所述升降结构的升降作用的,将所述水冷套本体固定于所述坩埚上方。An embodiment of the present application also provides a single crystal furnace, including a furnace body, a crucible located in the furnace body, and the water-cooling jacket body is fixed above the crucible due to the lifting function of the lifting structure.
可以理解的是,以上实施方式仅仅是为了说明本申请的原理而采用的示例性实施方式,然而本申请并不局限于此。对于本领域内的普通技术人员而 言,在不脱离本申请的精神和实质的情况下,可以做出各种变型和改进,这些变型和改进也视为本申请的保护范围。It can be understood that the above embodiments are only exemplary embodiments adopted to illustrate the principles of the present application, but the present application is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present application, and these modifications and improvements are also regarded as the protection scope of the present application.
Claims (10)
- 一种水冷套装置,包括水冷套本体和用于控制所述水冷套本体升降的升降结构;A water-cooling jacket device, including a water-cooling jacket body and a lifting structure for controlling the lifting and lowering of the water-cooling jacket body;所述水冷套本体包括内筒和位于所述内筒外部的外筒;The water cooling jacket body includes an inner cylinder and an outer cylinder located outside the inner cylinder;所述升降结构包括相对设置于所述水冷套本体的两侧的两个升降部,每个所述升降部包括驱动件和传动件,所述传动件通过连接结构与所述外筒连接,使得两个所述升降部能够异步运动以带动所述水冷套本体倾斜预设角度。The lifting structure includes two lifting parts arranged oppositely on both sides of the water-cooling jacket body. Each lifting part includes a driving part and a transmission part. The transmission part is connected to the outer cylinder through a connecting structure, so that The two lifting parts can move asynchronously to drive the water cooling jacket body to tilt at a preset angle.
- 根据权利要求1所述的水冷套装置,其中,所述传动件包括:The water cooling jacket device according to claim 1, wherein the transmission member includes:升降杆,沿所述外筒的轴向方向延伸,且所述升降杆外表面上设置有齿条结构;A lifting rod extends along the axial direction of the outer cylinder, and a rack structure is provided on the outer surface of the lifting rod;传动齿轮,所述传动齿轮通过与所述齿条结构啮合以与所述升降杆传动连接。A transmission gear, which is drivingly connected to the lifting rod by meshing with the rack structure.
- 根据权利要求2所述的水冷套装置,其中,两个所述升降杆中的一个升降杆的外表面具有远离另一个升降杆设置的第一区域,所述第一区域内凹形成一连接面,所述连接面上设置所述齿条结构。The water cooling jacket device according to claim 2, wherein the outer surface of one of the two lifting rods has a first area disposed away from the other lifting rod, and the first area is concave to form a connecting surface. , the rack structure is provided on the connecting surface.
- 根据权利要求3所述的水冷套装置,其中,所述齿条结构包括凸设于所述连接面上的多个相平行设置的齿条,多个所述齿条沿所述外筒的轴向方向并排设置,相邻两个所述齿条之间形成齿槽。The water cooling jacket device according to claim 3, wherein the rack structure includes a plurality of parallel racks protruding on the connecting surface, and the plurality of racks are arranged along the axis of the outer cylinder. They are arranged side by side in the direction, and a tooth gap is formed between two adjacent racks.
- 根据权利要求2所述的水冷套装置,其中,所述升降杆远离所述外筒的一端设置有限位台。The water cooling jacket device according to claim 2, wherein a limiting platform is provided at an end of the lifting rod away from the outer cylinder.
- 根据权利要求3所述的水冷套装置,其中,在所述外筒的轴向方向上,所述第一区域的长度小于所述升降杆的长度,且所述第一区域位于所述升降杆远离所述外筒的一端。The water cooling jacket device according to claim 3, wherein in the axial direction of the outer cylinder, the length of the first region is smaller than the length of the lifting rod, and the first region is located on the lifting rod. The end away from the outer barrel.
- 根据权利要求3所述的水冷套装置,其中,在所述外筒的轴向方向上,所述第一区域的长度大于所述升降杆的长度的一半。The water cooling jacket device according to claim 3, wherein the length of the first region is greater than half of the length of the lifting rod in the axial direction of the outer cylinder.
- 根据权利要求2所述的水冷套装置,其中,所述连接结构包括套设于 所述外筒外部的卡环,所述卡环的相对的两侧凸设形成两个凸起,每个所述凸起上设置有用于与相应的所述升降杆连接的连接通孔。The water cooling jacket device according to claim 2, wherein the connection structure includes a snap ring sleeved on the outside of the outer cylinder, and two protrusions are formed on opposite sides of the snap ring, each of which is The protrusion is provided with a connection through hole for connecting with the corresponding lifting rod.
- 根据权利要求8所述的水冷套装置,其中,所述外筒的顶部设置有第一凸缘,所述卡环设置于所述第一凸缘靠近所述外筒的底部的一侧。The water cooling jacket device according to claim 8, wherein a first flange is provided on the top of the outer cylinder, and the snap ring is provided on a side of the first flange close to the bottom of the outer cylinder.
- 一种单晶炉,包括权利要求1-9任一项所述的水冷套装置。A single crystal furnace including the water-cooling jacket device according to any one of claims 1-9.
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CN114790575A (en) * | 2022-05-18 | 2022-07-26 | 西安奕斯伟材料科技有限公司 | Water cooling jacket and single crystal furnace |
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CN117026364A (en) * | 2023-06-01 | 2023-11-10 | 清电光伏科技有限公司 | Crystal bar production method and device, auxiliary furnace chamber, electronic equipment and storage medium |
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