TWI846054B - Water cooling jacket and single crystal furnace - Google Patents
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Abstract
本發明屬於一種水冷套和單晶爐，該水冷套包括套設的內筒和外筒，以及位於該內筒和該外筒之間的水冷管道，該內筒呈倒錐形結構。內筒採用倒錐形結構，可形成縱向的不對稱水冷效果，以此達到縱向和軸向的梯度溫梯變化，大大提高晶棒軸向和徑向的散熱，減少內部熱量累積，改變晶棒的熱歷史，減少錯排及其他晶體缺陷的產生，提高晶棒品質。The present invention relates to a water cooling jacket and a single crystal furnace. The water cooling jacket comprises an inner cylinder and an outer cylinder, and a water cooling pipe located between the inner cylinder and the outer cylinder. The inner cylinder is in an inverted cone structure. The inner cylinder adopts an inverted cone structure, which can form a longitudinal asymmetric water cooling effect, thereby achieving longitudinal and axial gradient temperature changes, greatly improving the axial and radial heat dissipation of the crystal rod, reducing internal heat accumulation, changing the thermal history of the crystal rod, reducing the generation of misalignment and other crystal defects, and improving the quality of the crystal rod.
Description
本發明屬於單晶矽產品製作技術領域，尤其關於一種水冷套和單晶爐。The present invention belongs to the field of single crystal silicon product manufacturing technology, and in particular relates to a water cooling jacket and a single crystal furnace.
隨著半導體先進製程地不斷提高，對半導體晶圓的品質要求越來越高，而對於晶圓的品質，拉晶步驟對晶圓核心品質的影響非常大，如氧含量、體微缺陷(Bulk Micro Defects，BMD)、層錯、晶體起源粒子(crystal originated particles ，COPs)、流型缺陷(flow pattern defects，FPD)、缺陷的鐳射散射層析圖像(laser scattering tomography defects，LSTDs)等品質都與拉晶步驟有密切關係。With the continuous improvement of semiconductor advanced processes, the quality requirements for semiconductor wafers are getting higher and higher. As for the quality of wafers, the crystal pulling step has a great impact on the core quality of wafers. For example, the oxygen content, bulk micro defects (BMD), stacking faults, crystal originated particles (COPs), flow pattern defects (FPD), laser scattering tomography defects (LSTDs) and other qualities are closely related to the crystal pulling step.
晶棒生長過程中所經歷的熱歷史很大程度上影響著晶棒的整體品質，而熱歷史主要受晶棒的縱向和軸向溫度梯度影響，拉晶爐的結構部件對溫梯的影響很大，這其中非常重要的一個部件就是水冷套，其很大程度上改變了晶棒的縱向和橫向溫度梯度，提高了晶棒的冷卻速率，進而影響晶棒的拉制速率。The thermal history experienced by the crystal ingot during its growth process greatly affects the overall quality of the crystal ingot. The thermal history is mainly affected by the longitudinal and axial temperature gradients of the crystal ingot. The structural components of the crystal pulling furnace have a great influence on the temperature gradient. One of the most important components is the water cooling jacket, which greatly changes the longitudinal and lateral temperature gradients of the crystal ingot, increases the cooling rate of the crystal ingot, and thus affects the pulling rate of the crystal ingot.
相關技術中水冷套為圓筒狀，這極大地限制了其對晶棒軸向和縱向的溫度調節，晶棒的晶體缺陷不能很好地管控，如調節能力受限導致晶棒中心熱量不能很好地傳導出，造成過大的內應力累積，進而導致錯排產生，這極大地影響了晶棒的品質，尤其對於外延產品在進行外延沉積步驟時層錯會造成沉積的不均勻，甚至會造成沉積失效。In the related technology, the water cooling jacket is cylindrical, which greatly limits its axial and longitudinal temperature regulation of the crystal rod. The crystal defects of the crystal rod cannot be well controlled. For example, the limited regulation ability leads to the inability to conduct the heat in the center of the crystal rod well, resulting in excessive internal stress accumulation, which in turn leads to misalignment. This greatly affects the quality of the crystal rod, especially for epitaxial products. During the epitaxial deposition step, layer misalignment will cause uneven deposition and even deposition failure.
為了解決上述技術問題，本發明提供一種水冷套，解決晶棒軸向和縱向的溫度調節受限的問題。In order to solve the above technical problems, the present invention provides a water cooling jacket to solve the problem of limited temperature regulation of the crystal rod in the axial and longitudinal directions.
為了達到上述目的，本發明實施例採用的技術方案是：一種水冷套，包括套設的內筒和外筒，以及位於該內筒和該外筒之間的水冷管道，該內筒呈倒錐形結構。In order to achieve the above-mentioned purpose, the technical solution adopted by the embodiment of the present invention is: a water cooling jacket, including an inner tube and an outer tube, and a water cooling pipe located between the inner tube and the outer tube, and the inner tube is an inverted cone structure.
可選地，沿該內筒的軸向方向，該內筒的內側壁上設置有齒狀波紋結構。Optionally, a tooth-shaped corrugated structure is provided on the inner wall of the inner cylinder along the axial direction of the inner cylinder.
可選地，從該內筒的頂端到該內筒的底部的方向上，該齒狀波紋結構在該內筒的徑向方向上的厚度逐漸增大。Optionally, the thickness of the toothed corrugated structure in the radial direction of the inner cylinder gradually increases from the top of the inner cylinder to the bottom of the inner cylinder.
可選地，該內筒的內側壁設置有吸熱塗層。Optionally, the inner wall of the inner cylinder is provided with a heat absorbing coating.
可選地，從該內筒的頂端到該內筒的底部的方向上，該吸熱塗層在該內筒的徑向方向上的厚度逐漸增大。Optionally, the thickness of the heat-absorbing coating in the radial direction of the inner cylinder gradually increases from the top of the inner cylinder to the bottom of the inner cylinder.
可選地，該吸熱塗層採用陶瓷製成。Optionally, the heat absorbing coating is made of ceramic.
可選地，該吸熱塗層的厚度為200±50微米。Optionally, the thickness of the heat absorbing coating is 200±50 microns.
可選地，該內筒的外側壁和/或該外筒的內側壁設置有隔熱塗層。Optionally, the outer wall of the inner cylinder and/or the inner wall of the outer cylinder is provided with a heat insulating coating.
可選地，從該內筒的頂端到該內筒的底部的方向上，該隔熱塗層在該內筒的徑向方向上的厚度逐漸增大。Optionally, the thickness of the thermal insulation coating in the radial direction of the inner cylinder gradually increases from the top of the inner cylinder to the bottom of the inner cylinder.
可選地，該隔熱塗層採用氧化鋯陶瓷製成。Optionally, the thermal insulation coating is made of zirconia ceramic.
可選地，該隔熱塗層的厚度為100±25微米。Optionally, the thickness of the thermal insulation coating is 100±25 microns.
可選地，沿著該內筒的軸向方向，該水冷管道螺旋式環繞分佈於該內筒的外側壁上。Optionally, along the axial direction of the inner tube, the water cooling pipe is spirally distributed on the outer wall of the inner tube.
可選地，從該內筒的頂端到該內筒的底部的方向上，該水冷管道的直徑逐漸增大。Optionally, the diameter of the water-cooling pipe gradually increases from the top of the inner tube to the bottom of the inner tube.
本發明實施例還提供一種單晶爐，包括上述的水冷套。The embodiment of the present invention also provides a single crystal furnace, comprising the above-mentioned water cooling jacket.
本發明的有益效果是：內筒採用倒錐形結構，可形成縱向的不對稱水冷效果，以此達到縱向和軸向的梯度溫梯變化，大大提高晶棒軸向和徑向的散熱，減少內部熱量累積，改變晶棒的熱歷史，減少錯排及其他晶體缺陷的產生，提高晶棒品質。The beneficial effects of the present invention are as follows: the inner cylinder adopts an inverted cone structure, which can form a longitudinal asymmetric water cooling effect, thereby achieving longitudinal and axial gradient temperature changes, greatly improving the axial and radial heat dissipation of the crystal rod, reducing internal heat accumulation, changing the thermal history of the crystal rod, reducing the generation of misalignment and other crystal defects, and improving the quality of the crystal rod.
為利 貴審查委員了解本發明之技術特徵、內容與優點及其所能達到之功效，茲將本發明配合附圖及附件，並以實施例之表達形式詳細說明如下，而其中所使用之圖式，其主旨僅為示意及輔助說明書之用，未必為本發明實施後之真實比例與精準配置，故不應就所附之圖式的比例與配置關係解讀、侷限本發明於實際實施上的申請範圍，合先敘明。In order to help you understand the technical features, contents and advantages of the present invention and the effects it can achieve, the present invention is described in detail as follows with the accompanying drawings and appendices in the form of embodiments. The drawings used therein are only for illustration and auxiliary description, and may not be the true proportions and precise configurations after the implementation of the present invention. Therefore, the proportions and configurations of the attached drawings should not be interpreted to limit the scope of application of the present invention in actual implementation.
在本發明實施例的描述中，需要理解的是，術語“長度”、“寬度”、“上”、“下”、“前”、“後”、“左”、“右”、“垂直”、“水平”、“頂”、“底”“內”、“外”等指示的方位或位置關係為基於附圖所示的方位或位置關係，僅是為了便於描述本發明實施例和簡化描述，而不是指示或暗示所指的裝置或元件必須具有特定的方位、以特定的方位構造和操作，因此不能理解為對本發明的限制。In the description of the embodiments of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.
此外，術語“第一”、“第二”僅用於描述目的，而不能理解為指示或暗示相對重要性或者隱含指明所指示的技術特徵的數量。由此，限定有“第一”、“第二”的特徵可以明示或者隱含地包括一個或者更多個所述特徵。在本發明實施例的描述中，“多個”的含義是兩個或兩個以上，除非另有明確具體的限定。In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
在本發明實施例中，除非另有明確的規定和限定，術語“安裝”、“相連”、“連接”、“固定”等術語應做廣義理解，例如，可以是固定連接，也可以是可拆卸連接，或成一體；可以是機械連接，也可以是電連接；可以是直接相連，也可以通過中間媒介間接相連，可以是兩個元件內部的連通或兩個元件的相互作用關係。對於本領域的具通常知識者而言，可以根據具體情況理解上述術語在本發明實施例中的具體含義。In the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be a connection between two components or an interaction relationship between two components. For those with ordinary knowledge in the field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to the specific circumstances.
參考圖1-圖3，本實施例提供一種水冷套，包括套設的內筒2和外筒1，以及位於該內筒2和該外筒1之間的水冷管道3，該內筒2呈倒錐形結構。1 to 3 , the present embodiment provides a water cooling jacket, comprising an inner tube 2 and an outer tube 1, and a water cooling pipe 3 located between the inner tube 2 and the outer tube 1, wherein the inner tube 2 is an inverted cone-shaped structure.
相比於單一的直筒式結構，本實施例中採用套設的內筒和外筒的雙層結構，該外筒採用直筒式結構，該外筒起到阻隔熱的作用，該內筒採用倒錐形結構，可以形成縱向梯度水冷的效果，因晶棒縱向（即晶棒的軸向方向）的溫度呈梯度變化（下端熱上端冷，靠近矽熔液的一端為下端，遠離矽熔液的一端為上端），晶棒的熱量主要是以輻射的方式傳輸給周圍溫度低的物體，輻射傳熱的強度與距離的三次方呈反比，即距離越近輻射傳熱越強，相應的水冷效果越好，該內筒呈倒錐形，沿縱向方向，該內筒的內壁與晶棒在該晶棒的徑向方向上的距離呈梯度變化，可以實現梯度水冷地效果，即縱向不對稱效果，以此達到縱向和軸向的梯度溫梯變化，大大提高晶棒軸向和徑向的散熱，減少內部熱量累積，改變晶棒的熱歷史，減少錯排及其他晶體缺陷的產生，提高晶棒品質。可根據拉晶步驟需要，調節該內筒的內壁的傾斜角度，可以很大限度地調節晶棒的縱向和徑向溫度梯度，控制晶棒中缺陷的反應速率，調節缺陷分佈。Compared with a single straight tube structure, the double-layer structure of the inner tube and the outer tube is adopted in this embodiment. The outer tube adopts a straight tube structure, and the outer tube plays a role of heat insulation. The inner tube adopts an inverted cone structure, which can form a longitudinal gradient water cooling effect. Because the temperature of the crystal rod in the longitudinal direction (i.e., the axial direction of the crystal rod) changes in a gradient (the lower end is hot and the upper end is cold, the end close to the silicon melt is the lower end, and the end far from the silicon melt is the upper end), the heat of the crystal rod is mainly transferred to the surrounding low-temperature objects in the form of radiation. The strong radiation heat transfer The degree is inversely proportional to the cube of the distance, that is, the closer the distance, the stronger the radiation heat transfer, and the better the corresponding water cooling effect. The inner cylinder is in an inverted cone shape. Along the longitudinal direction, the distance between the inner wall of the inner cylinder and the crystal rod in the radial direction of the crystal rod changes gradiently, which can achieve a gradient water cooling effect, that is, a longitudinal asymmetric effect, so as to achieve longitudinal and axial gradient temperature changes, greatly improve the axial and radial heat dissipation of the crystal rod, reduce internal heat accumulation, change the thermal history of the crystal rod, reduce the generation of misalignment and other crystal defects, and improve the quality of the crystal rod. The tilt angle of the inner wall of the inner cylinder can be adjusted according to the requirements of the crystal pulling step, which can greatly adjust the longitudinal and radial temperature gradients of the crystal rod, control the reaction rate of defects in the crystal rod, and adjust the defect distribution.
示例性地，該內筒的頂部的內直徑為450mm，該內筒的底部的內直徑為390mm，但並不以此為限。Exemplarily, the inner diameter of the top of the inner cylinder is 450 mm, and the inner diameter of the bottom of the inner cylinder is 390 mm, but the present invention is not limited thereto.
該內筒的頂部設置有第二凸緣22，該外筒的頂部設置有第一凸緣11，該第一凸緣11靠近該內筒的一側設置有臺階形凹槽13，該第二凸緣22搭接於該臺階形凹槽13內。The top of the inner cylinder is provided with a second flange 22, the top of the outer cylinder is provided with a first flange 11, a side of the first flange 11 close to the inner cylinder is provided with a stepped groove 13, and the second flange 22 is overlapped in the stepped groove 13.
該第二凸緣22遠離該內筒底部的第一面與該第一凸緣11遠離該內筒底部的第二面位於同一平面。The first surface of the second flange 22 away from the bottom of the inner cylinder and the second surface of the first flange 11 away from the bottom of the inner cylinder are located in the same plane.
該內筒的底部具有第一通孔，該外筒的底部具有第二通孔12，該第一通孔的圓心在該外筒1的底部上的正投影與該第二通孔12的圓心重合。The bottom of the inner cylinder has a first through hole, the bottom of the outer cylinder has a second through hole 12 , and the orthographic projection of the center of the first through hole on the bottom of the outer cylinder 1 coincides with the center of the second through hole 12 .
示例性地，該第二通孔12的邊緣朝向該外筒1的頂部凸設有環形凸起14，該環形凸起14起到擋牆的作用，用於對該內筒2進行限位。Exemplarily, an annular protrusion 14 is provided on the edge of the second through hole 12 toward the top of the outer cylinder 1 , and the annular protrusion 14 acts as a barrier to limit the position of the inner cylinder 2 .
示例性地，沿該內筒2的軸向方向，該內筒2的內側壁上設置有齒狀波紋結構21。Exemplarily, along the axial direction of the inner tube 2, a tooth-shaped corrugated structure 21 is provided on the inner wall of the inner tube 2.
齒狀波紋結構21的設置可以增加該內筒的內壁的表面積，即增加水冷套的吸熱面積，相較於平滑表面，這樣的表面吸熱效果更好，具有很好的冷卻晶棒效果。The provision of the tooth-shaped corrugated structure 21 can increase the surface area of the inner wall of the inner cylinder, that is, increase the heat absorption area of the water cooling jacket. Compared with a smooth surface, such a surface has a better heat absorption effect and has a good effect of cooling the crystal rod.
該齒狀波紋結構21包括多個沿該內筒2的周向延伸的環形齒，多個該環形齒沿該內筒2的軸向排列形成，單個環形齒的截面形狀可以為三角形、梯形、弧形等。The tooth-shaped corrugated structure 21 includes a plurality of annular teeth extending along the circumference of the inner tube 2. The plurality of annular teeth are arranged along the axial direction of the inner tube 2. The cross-sectional shape of a single annular tooth can be a triangle, a trapezoid, an arc, etc.
示例性地，從該內筒2的頂端到該內筒2的底部的方向上，該齒狀波紋結構21在該內筒2的徑向方向上的厚度逐漸增大。Exemplarily, in the direction from the top of the inner tube 2 to the bottom of the inner tube 2, the thickness of the toothed corrugated structure 21 in the radial direction of the inner tube 2 gradually increases.
示例性地，該內筒2的內側壁設置有吸熱塗層。Exemplarily, the inner wall of the inner cylinder 2 is provided with a heat absorbing coating.
該吸熱塗層設置於該齒狀波紋結構21遠離該外筒1的一側，該吸熱塗層的形狀與該齒狀波紋結構21的形狀相符，即該吸熱塗層與該內筒2的連接面和與該連接面相對設置的內表面均為齒狀波紋結構21。The heat absorbing coating is arranged on a side of the toothed corrugated structure 21 away from the outer tube 1, and the shape of the heat absorbing coating is consistent with the shape of the toothed corrugated structure 21, that is, the connecting surface between the heat absorbing coating and the inner tube 2 and the inner surface opposite to the connecting surface are both toothed corrugated structures 21.
該吸熱塗層具有吸熱作用，該吸熱塗層與該內筒2的結合強度高，可有效緩解吸熱塗層介面（該吸熱塗層與該內筒2的連接面）的熱應力，熱力學性能穩定，該內筒2可以很好地即時帶走晶棒傳輸的熱量，大大提高晶棒的冷卻速率，提高拉速，增加拉晶效率。The heat-absorbing coating has a heat-absorbing effect, and the bonding strength between the heat-absorbing coating and the inner tube 2 is high, which can effectively relieve the thermal stress of the heat-absorbing coating interface (the connecting surface between the heat-absorbing coating and the inner tube 2), and the thermodynamic performance is stable. The inner tube 2 can well and instantly take away the heat transferred by the crystal rod, greatly improve the cooling rate of the crystal rod, increase the pulling speed, and increase the crystal pulling efficiency.
示例性地，從該內筒2的頂端到該內筒2的底部的方向上，該吸熱塗層在該內筒2的徑向方向上的厚度逐漸增大。Exemplarily, in the direction from the top of the inner tube 2 to the bottom of the inner tube 2, the thickness of the heat-absorbing coating in the radial direction of the inner tube 2 gradually increases.
示例性地，該吸熱塗層採用陶瓷製成，但並不以此為限。Exemplarily, the heat absorbing coating is made of ceramic, but is not limited thereto.
示例性地，該吸熱塗層的厚度為200±50微米。Exemplarily, the thickness of the heat absorbing coating is 200±50 microns.
示例性地，該內筒2的外側壁和/或該外筒1的內側壁設置有隔熱塗層。Exemplarily, the outer wall of the inner cylinder 2 and/or the inner wall of the outer cylinder 1 are provided with a heat insulating coating.
該隔熱塗層具有反射及遮罩熱的作用，防止外面的熱量從該外筒1向水冷套（即該內筒2的內部）內部傳輸，維持水冷套內部的溫度恆定。The heat-insulating coating has the function of reflecting and shielding heat, preventing the external heat from being transmitted from the outer tube 1 to the inside of the water-cooling jacket (i.e., the inside of the inner tube 2), thereby maintaining a constant temperature inside the water-cooling jacket.
示例性地，該內筒2的外側壁設置有隔熱塗層，從該內筒2的頂端到該內筒2的底部的方向上，該隔熱塗層在該內筒2的徑向方向上的厚度逐漸增大。Exemplarily, the outer wall of the inner tube 2 is provided with a heat insulating coating, and the thickness of the heat insulating coating in the radial direction of the inner tube 2 gradually increases from the top of the inner tube 2 to the bottom of the inner tube 2.
示例性地，該隔熱塗層採用耐高溫隔熱氧化鋯陶瓷製成。Exemplarily, the thermal insulation coating is made of high temperature resistant thermal insulation zirconia ceramics.
示例性地，該隔熱塗層的厚度為100±25微米，但並不以此為限。Exemplarily, the thickness of the thermal insulation coating is 100±25 microns, but is not limited thereto.
示例性地，沿著該內筒2的軸向方向，該水冷管道3螺旋式環繞分佈於該內筒2的外側壁上。Exemplarily, along the axial direction of the inner tube 2 , the water cooling pipe 3 is spirally distributed around the outer wall of the inner tube 2 .
該水冷管道3可以設置在該內筒2的外側壁上，也可以設置在該外筒1的內側壁上。The water cooling pipe 3 can be arranged on the outer wall of the inner tube 2 or on the inner wall of the outer tube 1 .
該水冷管道3的具體結構形式並不以此為限，例如該水冷管道3可呈蛇形，分佈於該內筒2的外側壁，該水冷管道3呈蛇形，包括沿該內筒2的軸向延伸的多個直線形管道和設置於相鄰兩個直線形管道之間的彎折形管道。The specific structural form of the water-cooling pipe 3 is not limited thereto. For example, the water-cooling pipe 3 may be serpentine and distributed on the outer wall of the inner tube 2. The water-cooling pipe 3 may be serpentine and include a plurality of straight pipes extending along the axial direction of the inner tube 2 and a curved pipe arranged between two adjacent straight pipes.
示例性地，從該內筒2的頂端到該內筒2的底部的方向上，該水冷管道3的直徑逐漸增大。Exemplarily, the diameter of the water-cooling pipe 3 gradually increases from the top of the inner tube 2 to the bottom of the inner tube 2.
採用上述方案，水冷管道3的水冷效果沿著該內筒2的軸向方向呈梯度變化，有利於徑向和軸向的梯度溫度的調節。By adopting the above solution, the water cooling effect of the water cooling pipe 3 changes gradually along the axial direction of the inner tube 2, which is beneficial to the regulation of the gradient temperature in the radial and axial directions.
示例性地，該水冷管道的直徑為5-10mm，但並不以此為限。Exemplarily, the diameter of the water cooling pipe is 5-10 mm, but is not limited thereto.
示例性地，從該內筒2的頂端到該內筒2的底部的方向上，水冷管道的環繞間距為48mm。Exemplarily, in the direction from the top of the inner tube 2 to the bottom of the inner tube 2, the winding spacing of the water cooling pipe is 48 mm.
參考圖1和圖4，示例性地，該水冷套本體的底部設置與該水冷套本體內部連通的調節套筒6，該調節套筒6包括與該水冷套本體連接的第一端，和與該第一端相對的第二端，從該第一端到該第二端，該調節套筒6在該水冷套本體的徑向方向上截面的面積逐漸減小。1 and 4 , exemplarily, an adjusting sleeve 6 connected to the interior of the water cooling jacket body is disposed at the bottom of the water cooling jacket body, and the adjusting sleeve 6 includes a first end connected to the water cooling jacket body, and a second end opposite to the first end, and from the first end to the second end, the cross-sectional area of the adjusting sleeve 6 in the radial direction of the water cooling jacket body gradually decreases.
通過該調節套筒6的設置，阻擋該水冷套本體下方熱量傳輸到水冷套內部空間，有效阻擋熱量的自下而上的散失。且該調節套筒6在該水冷套本體的徑向方向上截面的面積逐漸減小，當惰性氣體流從拉晶爐上方吹撒流經該調節套筒時，流速變大，保證了惰性氣體流與晶棒的充分接觸，提高了晶棒的冷卻速率，很好地調節晶棒的縱向和徑向溫梯，控制晶棒中缺陷的反應速率，調節缺陷分佈，拉制不同類型的晶棒。By setting the adjusting sleeve 6, the heat below the water-cooling jacket body is prevented from being transferred to the inner space of the water-cooling jacket, and the heat loss from bottom to top is effectively prevented. Moreover, the cross-sectional area of the adjusting sleeve 6 in the radial direction of the water-cooling jacket body gradually decreases. When the inert gas flow is blown from the top of the crystal pulling furnace and flows through the adjusting sleeve, the flow rate increases, ensuring the full contact between the inert gas flow and the crystal rod, improving the cooling rate of the crystal rod, and well adjusting the longitudinal and radial temperature gradients of the crystal rod, controlling the reaction rate of defects in the crystal rod, adjusting the defect distribution, and pulling different types of crystal rods.
示例性地，該調節套筒6的內表面為曲面。Exemplarily, the inner surface of the adjusting sleeve 6 is a curved surface.
示例性地，該調節套筒6在該水冷套本體的軸向方向上的截面的形狀呈抛物線形狀。Exemplarily, the cross-section of the adjusting sleeve 6 in the axial direction of the water-cooling jacket body is in a parabolic shape.
示例性地，在該水冷套本體的軸向方向上，該調節套筒6包括靠近該水冷套本體的第一部分和與該第一部分相鄰的第二部分，該第二部分的外表面內凹形成凹部61。Exemplarily, in the axial direction of the water cooling jacket body, the adjusting sleeve 6 includes a first portion close to the water cooling jacket body and a second portion adjacent to the first portion, and the outer surface of the second portion is concave to form a recess 61.
水冷套位於坩堝的上方，該凹部61的設置可將下方的熱量定向反射至水冷套下方石墨部件或矽熔液液面，維持下方溫度場的穩定。The water cooling jacket is located above the crucible. The recess 61 can reflect the heat from below to the graphite component or the silicon melt surface below the water cooling jacket, thereby maintaining the stability of the temperature field below.
示例性地，該調節套筒6的內表面設置有吸熱層。Exemplarily, the inner surface of the adjusting sleeve 6 is provided with a heat absorbing layer.
該吸熱層具有吸熱作用，該吸熱層與該調節套筒6的結合強度高，可有效緩解吸熱層介面（該吸熱層與該調節套筒6的連接面）的熱應力，熱力學性能穩定，該調節套筒6可以很好地即時帶走晶棒傳輸的熱量，大大提高晶棒的冷卻速率，提高拉速，增加拉晶效率。The heat absorption layer has a heat absorption effect. The bonding strength between the heat absorption layer and the adjusting sleeve 6 is high, which can effectively relieve the thermal stress of the heat absorption layer interface (the connecting surface between the heat absorption layer and the adjusting sleeve 6). The thermodynamic performance is stable. The adjusting sleeve 6 can effectively and instantly take away the heat transferred by the crystal rod, greatly improve the cooling rate of the crystal rod, increase the pulling speed, and increase the crystal pulling efficiency.
示例性地，該吸熱層包括靠近該調節套筒6的第一層和遠離該調節套筒的第二層，該第一層為石墨材質與該調節套筒6的內壁發生化學反應形成的過渡層。Exemplarily, the heat absorption layer includes a first layer close to the adjusting sleeve 6 and a second layer far from the adjusting sleeve, and the first layer is a transition layer formed by a chemical reaction between a graphite material and an inner wall of the adjusting sleeve 6.
該調節套筒的材質為碳纖維複合材料，該第一層為C+SiC複合過渡塗層(厚度為80±10微米)，該第二層為SiC塗層（厚度為50±5微米）。這樣的塗層結構（上述該吸熱層與該調節套筒的結合方式）具有高結合強度、高緻密度等特點。可以很好的保護基體，延長其使用壽命。The material of the adjusting sleeve is a carbon fiber composite material, the first layer is a C+SiC composite transition coating (thickness is 80±10 microns), and the second layer is a SiC coating (thickness is 50±5 microns). Such a coating structure (the combination of the heat absorbing layer and the adjusting sleeve) has the characteristics of high bonding strength and high density. It can well protect the substrate and extend its service life.
示例性地，該吸熱層的厚度為130±15微米。Exemplarily, the thickness of the heat absorption layer is 130±15 microns.
示例性地，該調節套筒6的外表面設置有隔熱層。Exemplarily, the outer surface of the adjusting sleeve 6 is provided with a heat insulation layer.
該隔熱層具有反射及遮罩熱的作用，防止外面的熱量從該調節套筒6向水冷套內部傳輸，維持水冷套內部的溫度恆定。The heat insulating layer has the function of reflecting and shielding heat, preventing the external heat from being transferred from the regulating sleeve 6 to the inside of the water cooling jacket, and maintaining the temperature inside the water cooling jacket constant.
示例性地，該隔熱層包括靠近該調節套筒6的第三層和遠離該調節套筒的第四層，該第三層為石墨材質與該調節套筒的外壁發生化學反應形成的過渡層。Exemplarily, the thermal insulation layer includes a third layer close to the adjusting sleeve 6 and a fourth layer far from the adjusting sleeve, and the third layer is a transition layer formed by a chemical reaction between the graphite material and the outer wall of the adjusting sleeve.
該調節套筒的材質為碳纖維複合材料，該第三層為C+SiC複合過渡塗層(厚度為80±10微米)，該第四層為SiC塗層（厚度為50±5微米）。這樣的塗層結構（上述該隔熱層與該調節套筒的結合方式）具有高結合強度、高緻密度等特點。可以很好的保護基體，延長其使用壽命。The material of the adjusting sleeve is a carbon fiber composite material, the third layer is a C+SiC composite transition coating (thickness is 80±10 microns), and the fourth layer is a SiC coating (thickness is 50±5 microns). Such a coating structure (the combination of the above-mentioned thermal insulation layer and the adjusting sleeve) has the characteristics of high bonding strength and high density. It can well protect the substrate and extend its service life.
示例性地，該隔熱層的厚度為160±15微米。Exemplarily, the thickness of the thermal insulation layer is 160±15 microns.
示例性地，該水冷套本體包括內筒2和位於該內筒2的外部的外筒1，該外筒1的底部包括用於承載該內筒的第一區和與該第一區相鄰的第二區，該第一區靠近該外筒1的側壁設置，該調節套筒6的頂部設置有凸緣（第三凸緣62），該凸緣與該第二區連接。Exemplarily, the water cooling jacket body includes an inner tube 2 and an outer tube 1 located outside the inner tube 2, the bottom of the outer tube 1 includes a first area for supporting the inner tube and a second area adjacent to the first area, the first area is arranged close to the side wall of the outer tube 1, and the top of the adjusting sleeve 6 is provided with a flange (third flange 62), which is connected to the second area.
參考圖1、圖5-圖7，示例性地，本實施例中該水冷套裝置還包括用於控制該水冷套本體升降的升降結構； 該水冷套本體包括內筒2和位於該內筒2外部的外筒1； 該升降結構包括相對設置於該水冷套本體的兩側的兩個升降部4，每個該升降部4包括驅動件和傳動件，該傳動件通過連接結構與該外筒1連接，使得兩個該升降部4能夠非同步運動以帶動該水冷套本體傾斜預設角度。 Referring to Figures 1, 5-7, illustratively, in this embodiment, the water cooling jacket device further includes a lifting structure for controlling the lifting of the water cooling jacket body; The water cooling jacket body includes an inner tube 2 and an outer tube 1 located outside the inner tube 2; The lifting structure includes two lifting parts 4 relatively arranged on both sides of the water cooling jacket body, each of the lifting parts 4 includes a driving member and a transmission member, and the transmission member is connected to the outer tube 1 through a connecting structure, so that the two lifting parts 4 can move asynchronously to drive the water cooling jacket body to tilt at a preset angle.
通過該升降結構的設置，控制該水冷套本體的升降，且兩個升降部4採用獨立驅動的方式，以使得兩個該升降部4可非同步運動，使得水冷套本體可在預設角度範圍內傾斜從而形成不對稱的水冷效果，大的梯度變化可加快晶棒熱量向水冷套進行傳輸，提高傳熱效率，加快晶棒軸向和徑向的散熱。且可根據拉晶步驟需要，很大限度地調節晶棒的縱向溫度梯度和徑向溫度梯度，控制晶棒中缺陷的反應速率，調節缺陷分佈，具有很好的冷卻速率，可拉制不同缺陷類型的晶棒（如無層錯晶棒，BMD晶棒）。By setting the lifting structure, the lifting of the water cooling jacket body is controlled, and the two lifting parts 4 are driven independently, so that the two lifting parts 4 can move asynchronously, so that the water cooling jacket body can be tilted within a preset angle range to form an asymmetric water cooling effect. The large gradient change can accelerate the transfer of heat from the crystal rod to the water cooling jacket, improve the heat transfer efficiency, and accelerate the axial and radial heat dissipation of the crystal rod. And according to the needs of the crystal pulling step, the longitudinal temperature gradient and radial temperature gradient of the crystal rod can be adjusted to a great extent, the reaction rate of defects in the crystal rod can be controlled, and the defect distribution can be adjusted. It has a good cooling rate and can pull crystal rods with different defect types (such as non-layered crystal rods, BMD crystal rods).
不同步驟參數要求的晶棒需要匹配不同的水冷效果，非同步移動的水冷套裝置可以根據需求進行相應調整得到合適的冷卻效果。Crystal rods with different synchronous parameter requirements need to match different water cooling effects. The asynchronously moving water cooling jacket device can be adjusted accordingly according to the needs to obtain the appropriate cooling effect.
非同步移動的目的是造成徑向不對稱效果，提高水冷效果，升降機構的作用：當拉制外延晶棒時，需要大的拉速拉制，通過水冷套向液面移動，增加冷卻效果，以此來提高拉速；當拉制無缺陷拋光晶棒時，可將水冷套向上移動，抑制COP的形成；當拉制BMD晶棒時，會促進BMD的形核及長大，可通過水冷套的移動調節，BMD在650℃-700℃的低溫形核，同時對於高溫區域，通過非同步移動調節，擴大在750℃-1100℃溫度範圍內的晶棒區間。以此來促進BMD的高溫形核。The purpose of asynchronous movement is to create radial asymmetry and improve the water cooling effect. The role of the lifting mechanism is: when pulling epitaxial crystal rods, a large pulling speed is required. The water cooling jacket moves toward the liquid surface to increase the cooling effect, thereby increasing the pulling speed; when pulling defect-free polished crystal rods, the water cooling jacket can be moved upward to inhibit the formation of COP; when pulling BMD crystal rods, the nucleation and growth of BMD will be promoted. The movement of the water cooling jacket can be adjusted. BMD nucleates at a low temperature of 650℃-700℃. At the same time, for the high temperature area, the asynchronous movement adjustment is used to expand the crystal rod range in the temperature range of 750℃-1100℃. In this way, the high temperature nucleation of BMD is promoted.
需要說明的是，在該升降結構的作用下，兩個相對設置的該升降部4相配合可使得該水冷套本體傾斜升降，即通過兩個該升降部4非同步運動傾斜預設角度後，再控制兩個該升降部4同步運動以控制該水冷套本體以傾斜的狀態進行升降運動。It should be noted that, under the action of the lifting structure, the two relatively arranged lifting parts 4 cooperate to make the water cooling jacket body tilt and lift, that is, after the two lifting parts 4 are tilted by a preset angle through asynchronous movement, the two lifting parts 4 are controlled to move synchronously to control the water cooling jacket body to perform lifting and lowering movement in a tilted state.
需要說明的是，升降結構所包括的該升降部4的數量並不做限定，該水冷套本體的相對的兩側設置兩個該升降部4，兩個相對設置的升降部4為一組，該升降結構可以包括多組該升降部4，每一組該升降部4可以實現該水冷套本體在一個方向上的傾斜，從而可以根據實際需要，設置多組該升降部4，從而靈活控制該水冷套本體的傾斜方向，從而可以更好的控制水冷效果。It should be noted that the number of the lifting parts 4 included in the lifting structure is not limited. Two lifting parts 4 are set on opposite sides of the water cooling jacket body, and the two lifting parts 4 set opposite to each other form a group. The lifting structure can include multiple groups of lifting parts 4, and each group of lifting parts 4 can realize the tilt of the water cooling jacket body in one direction. Therefore, according to actual needs, multiple groups of lifting parts 4 can be set, so as to flexibly control the tilt direction of the water cooling jacket body, so as to better control the water cooling effect.
需要說明的是，兩個相對設置的該升降部4相配合可使得該水冷套本體傾斜升降，傾斜的角度可以根據實際需要設定，例如可以為0-17度，但並不以此為限。It should be noted that the two lifting parts 4 arranged opposite to each other can cooperate to make the water cooling jacket body tilt and rise and fall, and the tilt angle can be set according to actual needs, for example, it can be 0-17 degrees, but it is not limited to this.
示例性地，該傳動件包括： 升降桿41，沿該外筒1的軸向方向延伸，且該升降桿41外表面上設置有齒條411結構； 傳動齒輪42，該傳動齒輪42通過與該齒條411結構嚙合以與該升降桿41傳動連接。 Exemplarily, the transmission member includes: A lifting rod 41 extending along the axial direction of the outer cylinder 1, and a gear 411 structure is provided on the outer surface of the lifting rod 41; A transmission gear 42, which is engaged with the gear 411 structure to be transmission-connected with the lifting rod 41.
本實施例中採用傳動齒輪42和升降桿41相配合的方式，傳動齒輪42旋轉，在該升降桿41的傳動作用下，實現該水冷套本體的升降。In this embodiment, a driving gear 42 and a lifting rod 41 are matched with each other. When the driving gear 42 rotates, the lifting rod 41 drives the water cooling jacket body to rise and fall.
示例性地，每個該升降部4的該驅動件可以為驅動電機。Exemplarily, the driving member of each lifting portion 4 can be a driving motor.
示例性地， 一個該升降桿41的外表面具有遠離該另一個該升降桿41設置的第一區域，該第一區域內凹形成一連接面，該連接面上設置該齒條411結構。Exemplarily, the outer surface of one of the lifting rods 41 has a first area disposed away from the other lifting rod 41, and the first area is concave to form a connecting surface, and the toothed bar 411 structure is disposed on the connecting surface.
該連接面為與該外筒1的軸向方向相平行的平面，在該連接面上設置該齒條411結構，利於該齒條411結構與該傳動齒輪42的配合。The connecting surface is a plane parallel to the axial direction of the outer cylinder 1 , and the gear 411 structure is arranged on the connecting surface, which is beneficial to the matching between the gear 411 structure and the driving gear 42 .
示例性地，該齒條411結構包括凸設於該連接面上的多個相平行設置的齒條411，多個該齒條411沿該外筒1的軸向方向並排設置，相鄰兩個該齒條411之間形成齒槽。Exemplarily, the gear 411 structure includes a plurality of parallel gears 411 protruding from the connection surface, the plurality of gears 411 are arranged side by side along the axial direction of the outer cylinder 1, and a tooth groove is formed between two adjacent gears 411.
該齒條411的延伸方向與該外筒1的軸向方向相垂直，該傳動齒輪42的軸向方向與該齒條411的延伸方向相平行，該傳動齒輪42的齒對應於該齒槽，從而該傳動齒輪42旋轉，帶動該升降桿41進行升降運動，從而帶動該水冷套本體進行升降運動。The extension direction of the gear 411 is perpendicular to the axial direction of the outer cylinder 1, and the axial direction of the driving gear 42 is parallel to the extension direction of the gear 411. The teeth of the driving gear 42 correspond to the tooth grooves, so that the driving gear 42 rotates, driving the lifting rod 41 to perform lifting movement, thereby driving the water cooling jacket body to perform lifting movement.
示例性地，該齒條411為螺紋齒條，螺紋齒條具有高精度和大負載的特點。Exemplarily, the gear 411 is a threaded gear, which has the characteristics of high precision and large load.
示例性地，該升降桿41遠離該外筒1的一端設置有限位台43。Exemplarily, a limiting platform 43 is provided at one end of the lifting rod 41 away from the outer cylinder 1 .
該限位台43的設置，防止該傳動齒輪42與該升降桿41脫離，該限位台43可以為圓形結構，且該限位台43在該升降桿41的徑向方向上的面積大於該升降桿41的端面的截面面積。The setting of the limit platform 43 prevents the transmission gear 42 from being separated from the lifting rod 41. The limit platform 43 can be a circular structure, and the area of the limit platform 43 in the radial direction of the lifting rod 41 is larger than the cross-sectional area of the end face of the lifting rod 41.
該限位台43可以是與該升降桿41為一體結構，可以是經過焊接等步驟連接的，也可以是在該連接面形成時同步形成的，該第一區域可以位於該升降桿41的中部，該第一區域內凹形成凹槽，該凹槽的底面為該連接面，從而在該升降桿41的軸向方向上，該凹槽的遠離該外筒1的一端的第一側壁形成該限位台43，該凹槽的與該第一側壁相對的第二側壁形成用於限制該傳動齒輪42的運動行程的限位擋牆。The limit platform 43 can be an integral structure with the lifting rod 41, and can be connected through steps such as welding, or can be formed simultaneously when the connecting surface is formed. The first area can be located in the middle of the lifting rod 41, and the first area is concave to form a groove, and the bottom surface of the groove is the connecting surface, so that in the axial direction of the lifting rod 41, the first side wall of the groove far from the end of the outer cylinder 1 forms the limit platform 43, and the second side wall of the groove opposite to the first side wall forms a limit stop wall for limiting the movement stroke of the driving gear 42.
示例性地，在該外筒1的軸向方向上，該第一區域的長度小於該升降桿41的長度，且該第一區域位於該升降桿41遠離該外筒1的一端。Exemplarily, in the axial direction of the outer cylinder 1 , the length of the first region is smaller than the length of the lifting rod 41 , and the first region is located at an end of the lifting rod 41 far from the outer cylinder 1 .
示例性地，在該外筒1的軸向方向上，該第一區域的長度大於該升降桿41的長度的一半。Exemplarily, in the axial direction of the outer cylinder 1 , the length of the first region is greater than half the length of the lifting rod 41 .
示例性地，該連接部5包括套設於該外筒1外部的卡環51，該卡環51的相對的兩側凸設形成兩個凸起52，每個該凸起52上設置有用於與相應的該升降桿41連接的連接通孔521。Exemplarily, the connecting portion 5 includes a snap ring 51 sleeved on the outside of the outer tube 1 , and two opposite sides of the snap ring 51 are convexly provided to form two protrusions 52 , and each of the protrusions 52 is provided with a connecting through hole 521 for connecting with the corresponding lifting rod 41 .
示例性地，該升降桿41靠近該外筒1的一端設置有連接環44，該連接環44與該升降桿41通過螺紋連接，該升降桿41與該凸起52以間隙寬鬆配合，這樣便於在兩個該升降桿41非同步運動的時候，實現水冷套的傾斜。Exemplarily, a connecting ring 44 is provided at one end of the lifting rod 41 close to the outer tube 1, and the connecting ring 44 is connected to the lifting rod 41 by a thread. The lifting rod 41 and the protrusion 52 are loosely matched with a gap, so that when the two lifting rods 41 move asynchronously, the water cooling jacket can be tilted.
示例性地，該外筒1的頂部設置有第一凸緣11，該卡環51設置於該第一凸緣11靠近該外筒1的底部的一側。Exemplarily, a first flange 11 is disposed on the top of the outer tube 1 , and the retaining ring 51 is disposed on a side of the first flange 11 close to the bottom of the outer tube 1 .
該卡環51可通過黏結層與該第一凸緣11黏接，以增強該連接部5與該外筒1之間的連接強度。The clamping ring 51 can be bonded to the first flange 11 via an adhesive layer to enhance the connection strength between the connecting portion 5 and the outer tube 1 .
本發明實施例還提供一種單晶爐，包括上述的水冷套。The embodiment of the present invention also provides a single crystal furnace, comprising the above-mentioned water cooling jacket.
需要說明的是：本發明實施例所記載的技術方案之間，在不衝突的情況下，可以任意組合。以上僅為本發明之較佳實施例，並非用來限定本發明之實施範圍，如果不脫離本發明之精神和範圍，對本發明進行修改或者等同替換，均應涵蓋在本發明申請專利範圍的保護範圍當中。It should be noted that the technical solutions described in the embodiments of the present invention can be combined arbitrarily without conflict. The above are only preferred embodiments of the present invention and are not intended to limit the scope of implementation of the present invention. If the present invention is modified or replaced by an equivalent method without departing from the spirit and scope of the present invention, it should be covered by the protection scope of the patent application of the present invention.
1:外筒 11:第一凸緣 12:第二通孔 13:臺階形凹槽 14:環形凸起 2:內筒 21:齒狀波紋結構 22:第二凸緣 3:水冷管道 4:升降部 41:升降杆 42:傳動齒輪 43:限位台 411:齒條 5:連接部 51:卡環 52:凸起 521:連接通孔 6:調節套筒 61:凹部 62:第三凸緣 1: Outer cylinder 11: First flange 12: Second through hole 13: Stepped groove 14: Annular protrusion 2: Inner cylinder 21: Toothed corrugated structure 22: Second flange 3: Water cooling pipe 4: Lifting part 41: Lifting rod 42: Transmission gear 43: Limiting platform 411: Tooth 5: Connecting part 51: Clamping ring 52: Protrusion 521: Connecting through hole 6: Adjusting sleeve 61: Recess 62: Third flange
圖1表示本發明實施例中的水冷套的結構示意圖； 圖2表示本發明實施例中的內筒的結構示意圖； 圖3表示本發明實施例中的外筒的結構示意圖； 圖4表示本發明實施例中的調節套筒的結構示意圖； 圖5表示本發明實施例中升降桿的結構示意圖一； 圖6表示本發明實施例中升降桿的結構示意圖二； 圖7表示本發明實施例中的連接部的結構示意圖。 Figure 1 is a schematic diagram of the structure of the water cooling jacket in the embodiment of the present invention; Figure 2 is a schematic diagram of the structure of the inner tube in the embodiment of the present invention; Figure 3 is a schematic diagram of the structure of the outer tube in the embodiment of the present invention; Figure 4 is a schematic diagram of the structure of the adjustment sleeve in the embodiment of the present invention; Figure 5 is a schematic diagram of the structure of the lifting rod in the embodiment of the present invention; Figure 6 is a schematic diagram of the structure of the lifting rod in the embodiment of the present invention; Figure 7 is a schematic diagram of the structure of the connecting part in the embodiment of the present invention.
1:外筒 1: Outer tube
2:內筒 2: Inner tube
3:水冷管道 3: Water cooling pipes
11:第一凸緣 11: First flange
22:第二凸緣 22: Second flange
Claims (12)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210544307.2A CN114790575A (en) | 2022-05-18 | 2022-05-18 | Water cooling jacket and single crystal furnace |
| CN202210544307.2 | 2022-05-18 |
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| Publication Number | Publication Date |
|---|---|
| TW202302940A TW202302940A (en) | 2023-01-16 |
| TWI846054B true TWI846054B (en) | 2024-06-21 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN216514247U (en) | 2021-04-19 | 2022-05-13 | 连城凯克斯科技有限公司 | Heat absorbing pipe heat shield |
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN216514247U (en) | 2021-04-19 | 2022-05-13 | 连城凯克斯科技有限公司 | Heat absorbing pipe heat shield |
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