CN114790575A

CN114790575A - Water cooling jacket and single crystal furnace

Info

Publication number: CN114790575A
Application number: CN202210544307.2A
Authority: CN
Inventors: ***
Original assignee: Xian Eswin Material Technology Co Ltd
Current assignee: Xian Eswin Material Technology Co Ltd
Priority date: 2022-05-18
Filing date: 2022-05-18
Publication date: 2022-07-26
Also published as: TW202302940A; WO2023221388A1

Abstract

The invention relates to a water cooling jacket and a single crystal furnace, wherein the water cooling jacket comprises an inner cylinder and an outer cylinder which are sleeved, and a water cooling pipeline positioned between the inner cylinder and the outer cylinder, and the inner cylinder is of an inverted cone structure. The inner cylinder adopts the back taper structure, can form vertical asymmetric water cooling effect to this reaches vertical and axial gradient temperature gradient change, improves crystal bar axial and radial heat dissipation greatly, reduces inside heat accumulation, changes the thermal history of crystal bar, reduces the production of dislocation and other crystal defects, improves the crystal bar quality.

Description

Water cooling jacket and single crystal furnace

Technical Field

The invention relates to the technical field of monocrystalline silicon product manufacturing, in particular to a water cooling jacket and a monocrystalline furnace.

Background

With the increasing advanced semiconductor manufacturing processes, the quality requirements for semiconductor wafers are higher and higher, and for the quality of the wafers, the crystal pulling process has a great influence on the core quality of the wafers, such as the oxygen content, bmd (bulk Micro defects), stacking faults, cops (crystal oriented defects), fpd (flat panel displays), lstds (laser ablation lithography defects), and the like, which are closely related to the crystal pulling process.

The overall quality of the crystal bar is greatly influenced by the thermal history experienced in the crystal bar growing process, the thermal history is mainly influenced by the longitudinal and axial temperature gradients of the crystal bar, and the temperature gradient is greatly influenced by structural components of a crystal pulling furnace, wherein one very important component is a water cooling sleeve, the longitudinal and transverse temperature gradients of the crystal bar are greatly changed, the cooling rate of the crystal bar is improved, and the drawing rate of the crystal bar is further influenced.

The water cooling sleeve in the related technology is cylindrical, so that the axial and longitudinal temperature adjustment of the crystal bar is greatly limited, the crystal defects of the crystal bar cannot be well controlled, if the adjustment capability is limited, the central heat of the crystal bar cannot be well conducted out, excessive internal stress accumulation is caused, and then dislocation is caused, the quality of the crystal bar is greatly influenced, particularly, the dislocation can cause the uneven deposition when the epitaxial deposition process is carried out on an epitaxial product, and the deposition failure can be caused.

Disclosure of Invention

In order to solve the technical problem, the invention provides a water cooling jacket which solves the problem that the temperature adjustment of the crystal bar in the axial direction and the longitudinal direction is limited.

In order to achieve the purpose, the embodiment of the invention adopts the technical scheme that: the water cooling jacket comprises an inner cylinder and an outer cylinder which are sleeved, and a water cooling pipeline which is arranged between the inner cylinder and the outer cylinder, wherein the inner cylinder is of an inverted cone structure.

Optionally, along the axial direction of the inner cylinder, a toothed corrugated structure is arranged on the inner side wall of the inner cylinder.

Optionally, the thickness of the toothed corrugated structure in the radial direction of the inner cylinder gradually increases in the direction from the top end of the inner cylinder to the bottom of the inner cylinder.

Optionally, the inner side wall of the inner cylinder is provided with a heat absorption coating.

Optionally, the thickness of the heat absorbing coating in the radial direction of the inner cylinder gradually increases from the top end of the inner cylinder to the bottom of the inner cylinder.

Optionally, the heat absorbing coating is made of ceramic.

Optionally, the thickness of the heat absorbing coating is 200 ± 50 microns.

Optionally, the outer side wall of the inner barrel and/or the inner side wall of the outer barrel are provided with a heat insulation coating.

Optionally, the thickness of the thermal barrier coating in the radial direction of the inner cylinder gradually increases from the top end of the inner cylinder to the bottom of the inner cylinder.

Optionally, the thermal barrier coating is made of zirconia ceramics.

Optionally, the thickness of the thermal barrier coating is 100 ± 25 microns.

Optionally, along the axial direction of inner tube, the water-cooling pipeline spirally encircles and distributes on the lateral wall of inner tube.

Optionally, in a direction from the top end of the inner cylinder to the bottom of the inner cylinder, the diameter of the water cooling pipeline is gradually increased.

The embodiment of the invention also provides a single crystal furnace, which comprises the water cooling jacket.

The invention has the beneficial effects that: the inner cylinder adopts the back taper structure, can form vertical asymmetric water cooling effect to this reaches vertical and axial gradient temperature gradient change, improves crystal bar axial and radial heat dissipation greatly, reduces inside heat accumulation, changes the thermal history of crystal bar, reduces the production of dislocation and other crystal defects, improves the crystal bar quality.

Drawings

FIG. 1 shows a schematic structural view of a water jacket in an embodiment of the present invention;

FIG. 2 shows a schematic structural view of an inner barrel in an embodiment of the invention;

FIG. 3 is a schematic structural view of the outer tub in the embodiment of the present invention;

FIG. 4 shows a schematic structural view of an adjustment sleeve in an embodiment of the invention;

FIG. 5 is a first schematic view of a lifter according to an embodiment of the present invention;

FIG. 6 is a second schematic structural view of a lifter according to an embodiment of the present invention;

fig. 7 is a schematic structural view of a connecting portion in the embodiment of the present invention.

1, an outer cylinder; 11 a first flange; 12 a second via hole; 13 a stepped recess; 14 an annular projection; 2, inner cylinder; 21, a toothed corrugated structure; 22 a second flange; 3, water cooling of the pipeline; 4 a lifting part; 41 lifting rods; 42 drive gears; 43 a limit table; 411 rack gear; 5 a connecting part; 51 a snap ring; 52, a bump; 521 connecting through holes; 6 adjusting the sleeve; 61 a recess; 62 third flange.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the description of the embodiments of the invention given above, are within the scope of protection of the invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Referring to fig. 1 to 3, the present embodiment provides a water cooling jacket, which includes an inner cylinder 2 and an outer cylinder 1, which are sleeved, and a water cooling pipeline 3 located between the inner cylinder 2 and the outer cylinder 1, wherein the inner cylinder 2 is in an inverted cone structure.

Compare in single straight tube structure, adopt the bilayer structure of the inner tube and the urceolus of cover setting in this embodiment, the urceolus adopts straight tube structure, the urceolus plays and hinders thermal-insulated effect, the inner tube adopts the back taper structure, can form the water-cooled effect of longitudinal gradient, because of the vertical (the axial direction of crystal bar promptly) temperature of crystal bar is gradient change (the cold end is gone up to the lower extreme heat, is close to the one end of silicon melt and is the lower extreme, and the one end of keeping away from silicon melt is the upper end), the heat of crystal bar mainly transmits the object that the ambient temperature is low with the mode of radiation, the intensity of radiation heat transfer is the inverse ratio with the cubic of distance, the more closely radiation heat transfer is stronger promptly, corresponding water-cooling effect is better, the inner tube is the back taper, along longitudinal direction, the inner wall of inner tube is in with the crystal bar the ascending distance of radial direction of crystal bar is gradient change, can realize gradient water-cooling ground effect, the crystal bar is longitudinally asymmetric, so that the gradient temperature gradient change in the longitudinal direction and the axial direction is achieved, the heat dissipation in the axial direction and the radial direction of the crystal bar is greatly improved, the internal heat accumulation is reduced, the heat history of the crystal bar is changed, the dislocation and other crystal defects are reduced, and the quality of the crystal bar is improved. The inclination angle of the inner wall of the inner cylinder can be adjusted according to the requirements of the pulling process, the longitudinal and radial temperature gradients of the crystal bar can be adjusted to a great extent, the reaction rate of defects in the crystal bar is controlled, and the defect distribution is adjusted.

Illustratively, the inner diameter of the top of the inner barrel is 450mm, and the inner diameter of the bottom of the inner barrel is 390mm, but not limited thereto.

The top of the inner cylinder is provided with a second flange 22, the top of the outer cylinder is provided with a first flange 11, one side of the first flange 11, which is close to the inner cylinder, is provided with a step-shaped groove 13, and the second flange 22 is lapped in the step-shaped groove 13.

The first face of the second flange 22 remote from the base of the inner barrel lies in the same plane as the second face of the first flange 11 remote from the base of the inner barrel.

The bottom of the inner barrel is provided with a first through hole, the bottom of the outer barrel is provided with a second through hole 12, and the orthographic projection of the circle center of the first through hole on the bottom of the outer barrel 1 is superposed with the circle center of the second through hole 12.

Illustratively, the edge of the second through hole 12 is convexly provided with an annular protrusion 14 towards the top of the outer cylinder 1, and the annular protrusion 14 plays a role of a retaining wall for limiting the inner cylinder 2.

Illustratively, in the axial direction of the inner cylinder 2, a tooth-shaped corrugated structure 21 is arranged on the inner side wall of the inner cylinder 2.

The toothed corrugated structure 21 can increase the surface area of the inner wall of the inner cylinder, namely the heat absorption area of the water cooling jacket, and compared with a smooth surface, the toothed corrugated structure has a better surface heat absorption effect and a good crystal bar cooling effect.

The toothed corrugated structure 21 includes a plurality of annular teeth extending along the circumferential direction of the inner cylinder 2, the plurality of annular teeth are formed by being arranged along the axial direction of the inner cylinder 2, and the cross-sectional shape of a single annular tooth can be a triangle, a trapezoid, an arc, or the like.

Illustratively, the thickness of the toothed corrugation 21 in the radial direction of the inner cylinder 2 gradually increases from the top end of the inner cylinder 2 to the bottom of the inner cylinder 2.

Illustratively, the inner side wall of the inner cylinder 2 is provided with a heat absorption coating.

The heat absorption coating is arranged on one side of the toothed corrugated structure 21 far away from the outer cylinder 1, and the shape of the heat absorption coating conforms to the shape of the toothed corrugated structure 21, that is, the connection surface of the heat absorption coating and the inner cylinder 2 and the inner surface opposite to the connection surface are both toothed corrugated structures 21.

The heat absorption coating has a heat absorption effect, the bonding strength of the heat absorption coating and the inner cylinder 2 is high, the thermal stress of a heat absorption coating interface (the heat absorption coating and the connecting surface of the inner cylinder 2) can be effectively relieved, the thermodynamic performance is stable, the heat transmitted by a crystal bar can be well taken away by the inner cylinder 2 in real time, the cooling rate of the crystal bar is greatly improved, the pulling speed is improved, and the crystal pulling efficiency is increased.

Illustratively, the thickness of the heat absorbing coating in the radial direction of the inner cylinder 2 gradually increases in the direction from the top end of the inner cylinder 2 to the bottom of the inner cylinder 2.

Illustratively, the heat absorbing coating is made of ceramic, but not limited thereto.

Illustratively, the heat-absorbing coating has a thickness of 200 ± 50 microns.

Illustratively, the outer sidewall of the inner drum 2 and/or the inner sidewall of the outer drum 1 are provided with a thermal barrier coating.

The heat insulation coating has the functions of reflecting and shielding heat, prevents external heat from being transmitted from the outer cylinder 1 to the interior of the water cooling jacket (namely the interior of the inner cylinder 2), and maintains the temperature in the water cooling jacket to be constant.

Illustratively, the outer sidewall of the inner tube 2 is provided with a thermal barrier coating, and the thickness of the thermal barrier coating in the radial direction of the inner tube 2 gradually increases from the top end of the inner tube 2 to the bottom of the inner tube 2.

Illustratively, the thermal barrier coating is made of high-temperature-resistant thermal-insulation zirconia ceramics.

Illustratively, the thickness of the thermal barrier coating is 100 ± 25 microns, but not limited thereto.

Illustratively, the water cooling pipes 3 are spirally distributed around the outer side wall of the inner barrel 2 along the axial direction of the inner barrel 2.

The water-cooling pipe 3 may be disposed on an outer sidewall of the inner cylinder 2, or may be disposed on an inner sidewall of the outer cylinder 1.

The specific structural form of the water-cooling pipeline 3 is not limited thereto, for example, the water-cooling pipeline 3 may be in a serpentine shape and distributed on the outer side wall of the inner cylinder 2, and the water-cooling pipeline 3 is in a serpentine shape and includes a plurality of linear pipelines 3 extending along the axial direction of the inner cylinder 2 and a bent pipeline 3 disposed between two adjacent linear pipelines 3.

Illustratively, the diameter of the water-cooling pipeline 3 gradually increases from the top end of the inner barrel 2 to the bottom of the inner barrel 2.

Adopt above-mentioned scheme, water cooling pipeline 3's water-cooling effect follows the axial direction of inner tube 2 is gradient change, is favorable to radial and axial gradient temperature's regulation.

Illustratively, the diameter of the water-cooling pipeline is 5-10mm, but not limited to this.

Illustratively, the surrounding distance of the water cooling pipelines is 48mm in the direction from the top end of the inner barrel 2 to the bottom of the inner barrel 2.

Referring to fig. 1 and 4, for example, an adjusting sleeve 6 communicated with the inside of the water jacket body is arranged at the bottom of the water jacket body, the adjusting sleeve 6 comprises a first end connected with the water jacket body and a second end opposite to the first end, and the area of the cross section of the adjusting sleeve 6 in the radial direction of the water jacket body is gradually reduced from the first end to the second end.

Through the setting of adjusting sleeve 6, block the heat transmission to water-cooling jacket inner space below the water-cooling jacket body, effectively block losing and losing from bottom to top of heat. And the area of the section of the adjusting sleeve 6 in the radial direction of the water-cooling jacket body is gradually reduced, when inert gas flow blows from the upper part of the crystal pulling furnace and flows through the adjusting sleeve, the flow rate is increased, the inert gas flow is ensured to be fully contacted with the crystal bar, the cooling rate of the crystal bar is improved, the longitudinal and radial temperature gradients of the crystal bar are well adjusted, the reaction rate of defects in the crystal bar is controlled, the defect distribution is adjusted, and different types of crystal bars are pulled.

Illustratively, the inner surface of the adjustment sleeve 6 is curved.

Illustratively, the shape of the cross section of the adjustment sleeve 6 in the axial direction of the water jacket body is a parabolic shape.

Illustratively, in the axial direction of the water jacket body, the adjustment sleeve 6 comprises a first section adjacent to the water jacket body and a second section adjacent to the first section, the outer surface of which is recessed to form a recess 61.

The water cooling jacket is positioned above the crucible, and the concave part 61 can directionally reflect the heat below to a graphite component or the liquid level of silicon melt below the water cooling jacket, so that the stability of a temperature field below the water cooling jacket is maintained.

Illustratively, the inner surface of the adjustment sleeve 6 is provided with a heat absorbing layer.

The heat absorbing layer has a heat absorbing effect, the bonding strength of the heat absorbing layer and the adjusting sleeve 6 is high, the thermal stress of a heat absorbing layer interface (the connecting surface of the heat absorbing layer and the adjusting sleeve 6) can be effectively relieved, the thermodynamic performance is stable, the adjusting sleeve 6 can well take away heat transmitted by a crystal bar in real time, the cooling rate of the crystal bar is greatly improved, the pulling speed is improved, and the crystal pulling efficiency is increased.

Illustratively, the heat absorbing layer includes a first layer close to the adjusting sleeve 6 and a second layer far from the adjusting sleeve, and the first layer is a transition layer formed by a graphite material and a chemical reaction with the inner wall of the adjusting sleeve 6.

The material of adjusting sleeve is carbon fiber composite, first layer is the compound transition coating of _ C + SiC (thickness is 80 +/-10 microns), the second layer is the coating of _ SiC (thickness is 50 +/-5 microns). The coating structure (the combination mode of the heat absorption layer and the adjusting sleeve) has the characteristics of high combination strength, high density and the like. The substrate can be well protected, and the service life of the substrate is prolonged. Illustratively, the heat sink layer has a thickness of 130 ± 15 microns.

Illustratively, the outer surface of the adjustment sleeve 6 is provided with a thermal insulation layer.

The heat insulation layer has the functions of reflecting and shielding heat, prevents external heat from being transmitted from the adjusting sleeve 6 to the inside of the water cooling jacket, and maintains the constant temperature inside the water cooling jacket.

Illustratively, the thermal insulation layer comprises a third layer close to the adjusting sleeve 6 and a fourth layer far away from the adjusting sleeve, and the third layer is a transition layer formed by chemical reaction between graphite and the outer wall of the adjusting sleeve.

The material of adjusting sleeve is carbon fiber composite, the third layer is the compound transition coating of _ C + SiC (thickness is 80 +/-10 microns), the fourth layer is the coating of _ SiC (thickness is 50 +/-5 microns). The coating structure (the combination mode of the heat insulation layer and the adjusting sleeve) has the characteristics of high combination strength, high density and the like. The substrate can be well protected, and the service life of the substrate is prolonged.

Illustratively, the thermal barrier layer has a thickness of 160 ± 15 microns.

Illustratively, the water cooling jacket body comprises an inner cylinder 2 and an outer cylinder 1 positioned outside the inner cylinder 2, the bottom of the outer cylinder 1 comprises a first area for bearing the inner cylinder and a second area adjacent to the first area, the first area is arranged close to the side wall of the outer cylinder 1, and the top of the adjusting sleeve 6 is provided with a flange (third flange 62) connected with the second area.

Referring to fig. 1, 5 to 7, for example, in this embodiment, the water cooling jacket apparatus further includes a lifting structure for controlling the lifting of the water cooling jacket body;

the water cooling jacket body comprises an inner cylinder 2 and an outer cylinder 1 positioned outside the inner cylinder 2;

the lifting structure comprises two lifting parts 4 which are arranged on two sides of the water cooling jacket body relatively, each lifting part 4 comprises a driving part and a transmission part, the transmission part is connected with the outer barrel 1 through a connecting structure, so that the two lifting parts 4 can move asynchronously to drive the water cooling jacket body to incline to preset an angle.

The lifting of the water cooling jacket body is controlled by the arrangement of the lifting structure, and the two lifting parts 4 adopt an independent driving mode, so that the two lifting parts 4 can move asynchronously, the water cooling jacket body can be inclined within a preset angle range, and an asymmetric water cooling effect is formed,

the large gradient change can accelerate the heat of the crystal bar to be transmitted to the water cooling sleeve, the heat transfer efficiency is improved, and the axial and radial heat dissipation of the crystal bar is accelerated. And the longitudinal temperature gradient and the radial temperature gradient of the crystal bar can be adjusted to a great extent according to the requirements of the pulling process, the reaction rate of defects in the crystal bar is controlled, the defect distribution is adjusted, the cooling rate is good, and the crystal bar with different defect types (such as a fault-free crystal bar and a BMD crystal bar) can be pulled.

The crystal bars with different technological parameter requirements need to be matched with different water cooling effects, and the water cooling sleeve device which moves asynchronously can be correspondingly adjusted according to requirements to obtain a proper cooling effect.

The purpose of asynchronous movement is to cause radial asymmetric effect, improve the water-cooling effect, elevating system's effect: when an epitaxial crystal bar is drawn, the epitaxial crystal bar needs to be drawn at a high drawing speed, and the water cooling jacket moves towards the liquid level to increase the cooling effect so as to improve the drawing speed; when a defect-free polished crystal bar is drawn, the water cooling jacket can be moved upwards to inhibit the formation of COP; when a BMD crystal bar is drawn, the nucleation and growth of the BMD can be promoted, the movement adjustment of a water cooling sleeve can be used, the BMD can be nucleated at the low temperature of 650-700 ℃, and meanwhile, the asynchronous movement adjustment is used for expanding the crystal bar interval in the temperature range of 750-1100 ℃ in a high-temperature area. Thereby promoting high temperature nucleation of BMD.

It should be noted that under the effect of the lifting structure, the two oppositely-arranged lifting portions 4 are matched to enable the water cooling jacket body to be lifted in an inclined manner, namely, after the two lifting portions 4 are inclined by a preset angle through asynchronous movement, the two lifting portions 4 are controlled to move synchronously to control the water cooling jacket body to be lifted in an inclined manner.

It should be noted that, the number of the lifting portions 4 included in the lifting structure is not limited, two lifting portions 4 are disposed on two opposite sides of the water-cooled jacket body, the two lifting portions 4 disposed oppositely form a group, the lifting structure may include a plurality of groups of the lifting portions 4, each group of the lifting portion 4 may realize the inclination of the water-cooled jacket body in one direction, so as to set a plurality of groups of the lifting portions 4 according to actual needs, thereby flexibly controlling the inclination direction of the water-cooled jacket body, and further controlling the water-cooled effect better.

The two lifting portions 4 arranged opposite to each other cooperate to lift and tilt the water jacket body, and the tilting angle may be set according to actual needs, for example, may be 0 to 17 degrees, but is not limited thereto.

Illustratively, the transmission comprises:

the lifting rod 41 extends along the axial direction of the outer cylinder 1, and a rack 411 structure is arranged on the outer surface of the lifting rod 41;

and the transmission gear 42 is in transmission connection with the lifting rod 41 by being structurally meshed with the rack 411.

In this embodiment, a transmission gear 42 is matched with the lifting rod 41, the transmission gear 42 rotates, and the lifting of the water cooling jacket body is realized under the transmission effect of the lifting rod 41.

For example, the driving member of each of the lifters 4 may be a driving motor.

Illustratively, the outer surface of one of the lifting rods 41 has a first region disposed away from the other lifting rod 41, the first region is recessed to form a connection surface, and the connection surface is disposed with the rack 411 structure.

The connecting surface is a plane parallel to the axial direction of the outer barrel 1, and the rack 411 structure is arranged on the connecting surface, so that the rack 411 structure is favorably matched with the transmission gear 42.

Illustratively, the rack 411 structure includes a plurality of racks 411 protruding from the connecting surface and arranged in parallel, the plurality of racks 411 are arranged side by side along the axial direction of the outer barrel 1, and a tooth slot is formed between two adjacent racks 411.

The extending direction of the rack 411 is perpendicular to the axial direction of the outer cylinder 1, the axial direction of the transmission gear 42 is parallel to the extending direction of the rack 411, and the teeth of the transmission gear 42 correspond to the tooth grooves, so that the transmission gear 42 rotates to drive the lifting rod 41 to perform lifting motion, and the water cooling jacket body is driven to perform lifting motion.

Illustratively, the rack 411 is a threaded rack, which has the characteristics of high precision and large load.

Illustratively, one end of the lifting rod 41, which is far away from the outer cylinder 1, is provided with a limit table 43.

The limiting table 43 is arranged to prevent the transmission gear 42 from being separated from the lifting rod 41, the limiting table 43 may be a circular structure, and the area of the limiting table 43 in the radial direction of the lifting rod 41 is larger than the cross-sectional area of the end surface of the lifting rod 41.

The limit stop 43 may be integrated with the lifting rod 41, may be connected through welding or other processes, or may be formed synchronously when the connection surface is formed, the first region may be located in the middle of the lifting rod 41, the first region is recessed to form a groove, the bottom surface of the groove is the connection surface, so that in the axial direction of the lifting rod 41, a first sidewall of the groove far away from one end of the outer cylinder 1 forms the limit stop 43, and a second sidewall of the groove opposite to the first sidewall forms a limit retaining wall for limiting the movement stroke of the transmission gear 42.

Illustratively, in the axial direction of the outer cylinder 1, the length of the first area is smaller than the length of the lifting rod 41, and the first area is located at one end of the lifting rod 41 far away from the outer cylinder 1.

Illustratively, the length of the first region is greater than half of the length of the lift lever 41 in the axial direction of the outer cylinder 1.

Illustratively, the connecting portion 5 includes a snap ring 51 sleeved outside the outer cylinder 1, two opposite sides of the snap ring 51 are convexly provided with two protrusions 52, and each protrusion 52 is provided with a connecting through hole 521 for connecting with the corresponding lifting rod 41.

Illustratively, one end of the lifting rod 41 close to the outer cylinder 1 is provided with a connecting ring 44, the connecting ring 44 is in threaded connection with the lifting rod 41, and the lifting rod 41 and the protrusion 52 are loosely fitted with a gap, so that the inclination of the water cooling jacket is realized when the two lifting rods 41 move asynchronously.

Illustratively, the top of the outer cylinder 1 is provided with a first flange 11, and the snap ring 51 is arranged on one side of the first flange 11 close to the bottom of the outer cylinder 1.

The snap ring 51 may be bonded to the first flange 11 by an adhesive layer to enhance the coupling strength between the coupling portion 5 and the outer tube 1.

It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.

Claims

1. The water cooling jacket is characterized by comprising an inner cylinder and an outer cylinder which are sleeved, and a water cooling pipeline which is arranged between the inner cylinder and the outer cylinder, wherein the inner cylinder is of an inverted cone structure.

2. The water jacket according to claim 1, wherein an inner side wall of the inner tube is provided with a tooth-shaped corrugated structure in an axial direction of the inner tube.

3. The water jacket according to claim 2, wherein the thickness of the toothed corrugations in a radial direction of the inner tube increases gradually from a top end of the inner tube to a bottom end of the inner tube.

4. The water jacket according to claim 1, wherein an inner sidewall of the inner tube is provided with a heat absorbing coating.

5. The water jacket according to claim 4, wherein a thickness of the heat absorption coating in a radial direction of the inner tube is gradually increased in a direction from a top end of the inner tube to a bottom end of the inner tube.

6. The water cooling jacket according to claim 5, wherein the heat absorbing coating is made of ceramic.

7. The water jacket according to claim 5, wherein the heat absorption coating has a thickness of 200 ± 50 microns.

8. The water jacket according to claim 1, wherein an outer sidewall of the inner drum and/or an inner sidewall of the outer drum is provided with a thermal barrier coating.

9. The water jacket according to claim 8, wherein the thermal barrier coating has a thickness of 100 ± 25 microns.

10. The water jacket according to claim 8, wherein a thickness of the thermal barrier coating in a radial direction of the inner tube gradually increases in a direction from a top end of the inner tube to a bottom end of the inner tube.

11. The water jacket according to claim 8, wherein the thermal barrier coating is made of zirconia ceramic.

12. The water jacket according to claim 1, wherein the water cooling pipes are spirally distributed around the outer side wall of the inner tube along the axial direction of the inner tube.

13. The water jacket according to claim 12, wherein the water cooling pipe is gradually increased in diameter in a direction from a top end of the inner tube to a bottom end of the inner tube.

14. A single crystal furnace comprising the water jacket of any one of claims 1 to 13.