CN216738629U - Water cooling screen for producing silicon single crystal rod - Google Patents
Water cooling screen for producing silicon single crystal rod Download PDFInfo
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- CN216738629U CN216738629U CN202123002481.4U CN202123002481U CN216738629U CN 216738629 U CN216738629 U CN 216738629U CN 202123002481 U CN202123002481 U CN 202123002481U CN 216738629 U CN216738629 U CN 216738629U
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Abstract
The utility model relates to the technical field of crystal bar production equipment, and provides a water cooling screen for producing a silicon single crystal rod, which comprises a cylindrical jacket, a water inlet pipe and a water outlet pipe, wherein the middle part of the cylindrical jacket axially penetrates through the cylindrical jacket; the water outlet of the water inlet pipe is positioned at the bottom in the cylindrical jacket, and the water inlet of the water outlet pipe is positioned at the top in the cylindrical jacket. The utility model discloses an increase the last edge that the thickness of straight section of thick bamboo formed annular band structure for inlet tube, outlet pipe can be directly be connected along being connected on the straight section of thick bamboo portion, have optimized the hookup location of water pipe, thereby guarantee that tube-shape clamp cover upper portion rivers are in very fast velocity of flow state, have strengthened the cooling effect of tube-shape clamp cover upper portion to the crystal bar, can reduce the crystal bar temperature fast, thereby promoted the growth rate of crystal bar.
Description
Technical Field
The utility model relates to a crystal bar production facility technical field, concretely relates to water-cooling screen is used in single crystal silicon rod production.
Background
As a semiconductor material, single crystal silicon is generally used for manufacturing integrated circuits and other electronic components, and the current growth techniques of single crystal silicon are the float zone method and the Czochralski method, which is a method generally used in the prior art. In the production of single crystal silicon by the czochralski method, polycrystalline silicon is placed in a quartz crucible, melted by high temperature, and then a seed crystal is lowered from the top into the melted polycrystalline silicon, and the melted seed crystal is recrystallized around by controlling the temperature of the liquid surface, thereby producing a well-aligned single crystal silicon rod.
When the silicon single crystal grows from the solution to be crystallized into the crystal bar and moves upwards, heat is released, and the heat can slow down the crystallization speed of the silicon single crystal and influence the production efficiency of the silicon single crystal, so that cooling is needed to enable the crystal bar to be fixedly formed. With the development of the solar photovoltaic industry, the efficient cooling mode can reduce the production cost and improve the productivity of the crystal bar in unit time, which has become the key research point of various manufacturers.
The existing cooling mode is that a cooling screen is fixedly arranged at a certain height position in a single crystal furnace, cooling liquid is introduced into the cooling screen, and heat generated by crystallization is taken away through a water-cooling screen when a crystal bar moves upwards and passes through the cooling screen. However, the upper edge of the existing cooling screen is very thin, and the water inlet pipe and the water outlet pipe of the existing cooling screen are connected to the inside of the cooling screen in an inclined notch mode, so that the water flow velocity at the upper part of the water-cooling cone body is slow, the cooling effect is poor, and the crystal bar growth speed is slow; in addition, the single crystal furnace is provided with the observation window and is internally provided with the CCD camera, so that the cooling screen cannot be too high to meet the requirements of personnel observation and CCD control, namely the height of the cooling screen is limited to a certain extent, the cooling coverage of the water-cooling cone body is smaller, and the reason why the growth speed of the crystal bar is not fast is also one of the reasons.
SUMMERY OF THE UTILITY MODEL
The utility model provides a not enough to prior art, the utility model provides a water-cooling screen is used in single crystal silicon rod production to solve the relatively poor slower problem that leads to the crystal bar growth rate of current cooling screen cooling effect.
In order to achieve the above purpose, the utility model provides a following technical scheme:
a water-cooling screen for producing a silicon single crystal rod comprises:
a cylindrical jacket with a middle part axially penetrating and provided with a straight cylinder part with an upper edge in an annular band-shaped structure;
the water inlet pipe is connected to one side of the upper edge of the straight cylinder part; and
the water outlet pipe is connected to the other side of the upper edge of the straight cylinder part and is arranged opposite to the water inlet pipe;
the water outlet of the water inlet pipe is positioned at the bottom in the cylindrical jacket, and the water inlet of the water outlet pipe is positioned at the top in the cylindrical jacket.
In one embodiment disclosed in the present application, the cylindrical jacket includes a straight cylinder portion and a cone portion disposed up and down;
the upper edge of the straight cylinder part is of an annular band-shaped structure by increasing the thickness;
the lower end of the frustum part is retracted inwards.
In one embodiment disclosed in the present application, the straight cylinder portion is provided with an arc-shaped observation gap;
the observation gap extends downwards from the upper edge of the straight cylinder part along the side wall of the straight cylinder part.
In one embodiment of the present disclosure, the arc included angle of the observation notch ranges from 120 ° to 150 °.
In one embodiment disclosed in the present application, the water inlet pipe is divided into three sections, including a first vertical pipe section, a first horizontal pipe section and a second vertical pipe section which are sequentially communicated;
the first vertical pipe section penetrates through the straight cylinder part and extends downwards to the conical table part along the back.
In one embodiment disclosed in the application, the water outlet pipe is divided into three sections, including a third vertical pipe section, a second horizontal pipe section and a fourth vertical pipe section which are sequentially communicated;
the third vertical pipe section is connected with the upper edge of the straight cylinder part and communicated with the inside of the straight cylinder part.
In one embodiment disclosed in the present application, a spiral spacer for guiding the flow of water is further disposed in the cylindrical jacket;
the spiral spacer extends upwards from the inner bottom of the cylindrical jacket to the inner top of the cylindrical jacket in a spiral mode to form a spiral water flow channel.
In one embodiment disclosed herein, the pitch of the helical septa adjacent above and below is gradually increased.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the upper edge of the annular band-shaped structure is formed by increasing the thickness of the straight cylinder part, so that the water inlet pipe and the water outlet pipe can be directly connected with the upper edge of the straight cylinder part, the connection position of the water pipe is optimized, the water flow on the upper part of the cylindrical jacket is ensured to be in a faster flow speed state, the cooling effect of the upper part of the cylindrical jacket on the crystal bar is enhanced, the temperature of the crystal bar can be quickly reduced, and the growth speed of the crystal bar is improved;
2. through the arc-shaped observation gap formed in the straight cylinder part, the visual field is not limited any more, the requirements of personnel for observing the state in the furnace and controlling the CCD can be met, the height limitation of the cylindrical jacket is removed, and the height of the straight cylinder part can be increased, so that the surface area of the cylindrical jacket is increased, the cooling coverage range is enlarged, the temperature of the crystal bar is favorably reduced, and the growth speed of the crystal bar is further improved;
3. when the cooling medium entering the cylindrical jacket passes through the spiral water flow channel with the gradually increased circulation area, the water flow at the bottom of the cylindrical jacket can flow out quickly, the cooling effect of the bottom of the cylindrical jacket on the crystal bar is enhanced, and therefore the growth speed of the crystal bar is increased again.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic perspective view of the present invention;
fig. 2 is a schematic view of the vertical cut three-dimensional structure of the present invention.
Detailed Description
In the following, only certain exemplary embodiments are briefly described. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and for simplification of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be considered as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The following disclosure provides many different embodiments or examples for implementing different features of the invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention.
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
Referring to fig. 1 and 2, the utility model provides a water-cooling screen for producing silicon single crystal rods, which comprises:
a cylindrical jacket 10 with a middle part passing through along the axial direction and provided with a straight cylinder part 11 with an upper edge in an annular band-shaped structure;
a water inlet pipe 20 connected to one side of the upper edge of the straight cylinder part 11; and
a water outlet pipe 30 connected to the other side of the upper edge of the straight cylinder part 11 and arranged opposite to the water inlet pipe 20;
wherein, the water outlet of the water inlet pipe 20 is positioned at the bottom in the cylindrical jacket 10, and the water inlet of the water outlet pipe 30 is positioned at the top in the cylindrical jacket 10.
Specifically, the cylindrical jacket 10 includes a straight cylinder portion 11 and a frustum portion 12 which are vertically arranged, an upper edge of the straight cylinder portion 11 is in an annular band-shaped structure by increasing the thickness, and a lower end of the frustum portion 12 is inwardly contracted. The thickness through increasing straight section of thick bamboo portion 11 forms the last edge of annular band structure promptly for inlet tube 20, outlet pipe 30 can be directly be connected with straight section of thick bamboo portion 11 is gone up along, have optimized the hookup location of water pipe, thereby guarantee that the partial rivers are in the fast velocity of flow state on the tube-shape jacket 10, have strengthened the cooling effect of tube-shape jacket 10 upper portion to the crystal bar, can reduce the crystal bar temperature fast, thereby promoted the growth rate of crystal bar.
The straight section of thick bamboo portion 11 sets up curved observation breach, observes the breach and extends downwards along the lateral wall of straight section of thick bamboo portion 11 from straight section of thick bamboo portion 11. Through setting up this observation breach, the field of vision is no longer restricted, can satisfy personnel and observe interior state of stove and CCD control demand, has removed the high restriction that the tube-shape pressed from both sides cover 10 simultaneously, can increase straight section of thick bamboo portion 11 height to increase the surface area that the tube-shape pressed from both sides cover 10, enlarge the cooling coverage, be favorable to reducing the crystal bar temperature, thereby further promoted the growth rate of crystal bar.
In this embodiment, the arc-shaped included angle (i.e. the corresponding central angle) of the observation notch ranges from 120 to 150 °.
The water inlet pipe 20 is divided into three sections, including a first vertical pipe section 21, a first horizontal pipe section 22 and a second vertical pipe section 23 which are sequentially communicated, and the first vertical pipe section 21 passes through the upper edge of the straight cylinder part 11 and then extends downwards into the frustum part 12 (i.e. the water outlet of the water inlet pipe 20 is in the frustum part 12).
The water outlet pipe 30 is divided into three sections, including a third vertical pipe section 31, a second horizontal pipe section 32 and a fourth vertical pipe section 33 which are sequentially communicated, the third vertical pipe section 31 is connected with the upper edge of the straight cylinder part 11 and is communicated with the interior of the straight cylinder part 11 (namely, the water inlet of the water outlet pipe 30 is in the straight cylinder part 11).
The cylindrical jacket 10 is also provided with a spiral spacer 13 for guiding water flow, and the spiral spacer 13 extends spirally upwards from the inner bottom of the cylindrical jacket 10 (the bottom end of the cone part 12) to the inner top of the cylindrical jacket 10 (the top end of the straight cylinder part 11) to form a spiral water flow channel.
The distance between the adjacent upper and lower spiral spacers 13 is gradually increased, that is, the flow area (that is, the water flow rate) of the spiral water flow passage is gradually increased from the inner bottom to the inner top of the cylindrical jacket 10. When the cooling device is used, a cooling medium with a certain temperature enters the cylindrical jacket 10 from the water inlet pipe 20 to reach the bottom end of the conical table part 12, then reaches an outlet position through a spiral water flow channel which is formed by the spiral spacer 13 and has gradually increased flow area, and flows out from the water outlet pipe 30, so that heat released by the growth of a crystal bar is taken away, the temperature of a single crystal is reduced, and the growth speed of the crystal bar is increased. That is, when the cooling medium entering the cylindrical jacket 10 passes through the spiral water flow channel with the gradually increased circulation area, the water flow at the bottom of the cylindrical jacket 10 can flow out quickly, so that the cooling effect of the bottom of the cylindrical jacket 10 on the crystal bar is enhanced, and the growth speed of the crystal bar is increased again.
The above-mentioned embodiment is only the preferred embodiment of the present invention, and is not to the limitation of the technical solution of the present invention, as long as the technical solution can be realized on the basis of the above-mentioned embodiment without creative work, all should be regarded as falling into the protection scope of the right of the present invention.
Claims (8)
1. A water-cooling screen for producing a silicon single crystal rod is characterized by comprising:
a cylindrical jacket with a middle part axially penetrating and provided with a straight cylinder part with an upper edge in an annular band-shaped structure;
the water inlet pipe is connected to one side of the upper edge of the straight cylinder part; and
the water outlet pipe is connected to the other side of the upper edge of the straight cylinder part and is arranged opposite to the water inlet pipe;
the water outlet of the water inlet pipe is positioned at the bottom in the cylindrical jacket, and the water inlet of the water outlet pipe is positioned at the top in the cylindrical jacket.
2. The water cooling screen for producing the silicon single crystal rod as set forth in claim 1, wherein:
the cylindrical jacket comprises a straight cylinder part and a cone part which are arranged up and down;
the upper edge of the straight cylinder part is of an annular band-shaped structure by increasing the thickness;
the lower end of the frustum part is retracted inwards.
3. The water-cooling screen for producing the single crystal silicon rod as set forth in claim 1 or 2, wherein:
the straight cylinder part is provided with an arc-shaped observation gap;
the observation gap extends downwards from the upper edge of the straight cylinder part along the side wall of the straight cylinder part.
4. The water cooling screen for producing the silicon single crystal rod as recited in claim 3, wherein the arc-shaped included angle of the observation notch ranges from 120 ° to 150 °.
5. The water-cooling screen for producing the silicon single crystal rod as set forth in claim 2, wherein:
the water inlet pipe is divided into three sections, and comprises a first vertical pipe section, a first horizontal pipe section and a second vertical pipe section which are sequentially communicated;
the first vertical pipe section penetrates through the straight cylinder part and extends downwards to the conical table part along the back.
6. The water-cooling screen for producing the silicon single crystal rod as claimed in any one of claims 1, 2 and 5, wherein:
the water outlet pipe is divided into three sections, and comprises a third vertical pipe section, a second horizontal pipe section and a fourth vertical pipe section which are sequentially communicated;
the third vertical pipe section is connected with the upper edge of the straight cylinder part and communicated with the inside of the straight cylinder part.
7. The water-cooling screen for producing the silicon single crystal rod as set forth in claim 1, wherein:
a spiral spacer for guiding water flow is further arranged in the cylindrical jacket;
the spiral spacer extends upwards from the inner bottom of the cylindrical jacket to the inner top of the cylindrical jacket in a spiral mode to form a spiral water flow channel.
8. The water-cooling screen for producing the silicon single crystal rod as recited in claim 7, wherein the pitch between the upper and lower adjacent spiral spacers gradually increases.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123002481.4U CN216738629U (en) | 2021-12-02 | 2021-12-02 | Water cooling screen for producing silicon single crystal rod |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123002481.4U CN216738629U (en) | 2021-12-02 | 2021-12-02 | Water cooling screen for producing silicon single crystal rod |
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| Publication Number | Publication Date |
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| CN216738629U true CN216738629U (en) | 2022-06-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202123002481.4U Active CN216738629U (en) | 2021-12-02 | 2021-12-02 | Water cooling screen for producing silicon single crystal rod |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023221366A1 (en) * | 2022-05-18 | 2023-11-23 | 西安奕斯伟材料科技有限公司 | Water-cooled jacket device and single crystal furnace |
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2021
- 2021-12-02 CN CN202123002481.4U patent/CN216738629U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023221366A1 (en) * | 2022-05-18 | 2023-11-23 | 西安奕斯伟材料科技有限公司 | Water-cooled jacket device and single crystal furnace |
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