WO2022190711A1 - 気化器および気化供給装置 - Google Patents
気化器および気化供給装置 Download PDFInfo
- Publication number
- WO2022190711A1 WO2022190711A1 PCT/JP2022/003750 JP2022003750W WO2022190711A1 WO 2022190711 A1 WO2022190711 A1 WO 2022190711A1 JP 2022003750 W JP2022003750 W JP 2022003750W WO 2022190711 A1 WO2022190711 A1 WO 2022190711A1
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- WIPO (PCT)
- Prior art keywords
- vaporization chamber
- vaporizer
- heater
- pressure
- ultrapure water
- Prior art date
Links
- 230000008016 vaporization Effects 0.000 title claims abstract description 87
- 238000009834 vaporization Methods 0.000 title claims abstract description 84
- 239000006200 vaporizer Substances 0.000 title claims abstract description 44
- 229910021642 ultra pure water Inorganic materials 0.000 claims abstract description 60
- 239000012498 ultrapure water Substances 0.000 claims abstract description 60
- 239000007788 liquid Substances 0.000 claims abstract description 27
- 238000004804 winding Methods 0.000 claims abstract description 11
- 238000011144 upstream manufacturing Methods 0.000 claims description 19
- 238000004380 ashing Methods 0.000 claims description 13
- 230000001737 promoting effect Effects 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims description 3
- 238000013019 agitation Methods 0.000 claims 1
- 230000000630 rising effect Effects 0.000 abstract 2
- 239000007789 gas Substances 0.000 description 46
- 238000010438 heat treatment Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 239000012530 fluid Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/02—Treatment of water, waste water, or sewage by heating
- C02F1/04—Treatment of water, waste water, or sewage by heating by distillation or evaporation
- C02F1/045—Treatment of water, waste water, or sewage by heating by distillation or evaporation for obtaining ultra-pure water
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B37/00—Component parts or details of steam boilers
- F22B37/02—Component parts or details of steam boilers applicable to more than one kind or type of steam boiler
- F22B37/42—Applications, arrangements, or dispositions of alarm or automatic safety devices
- F22B37/44—Applications, arrangements, or dispositions of alarm or automatic safety devices of safety valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22D—PREHEATING, OR ACCUMULATING PREHEATED, FEED-WATER FOR STEAM GENERATION; FEED-WATER SUPPLY FOR STEAM GENERATION; CONTROLLING WATER LEVEL FOR STEAM GENERATION; AUXILIARY DEVICES FOR PROMOTING WATER CIRCULATION WITHIN STEAM BOILERS
- F22D1/00—Feed-water heaters, i.e. economisers or like preheaters
- F22D1/003—Feed-water heater systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22D—PREHEATING, OR ACCUMULATING PREHEATED, FEED-WATER FOR STEAM GENERATION; FEED-WATER SUPPLY FOR STEAM GENERATION; CONTROLLING WATER LEVEL FOR STEAM GENERATION; AUXILIARY DEVICES FOR PROMOTING WATER CIRCULATION WITHIN STEAM BOILERS
- F22D1/00—Feed-water heaters, i.e. economisers or like preheaters
- F22D1/36—Water and air preheating systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22D—PREHEATING, OR ACCUMULATING PREHEATED, FEED-WATER FOR STEAM GENERATION; FEED-WATER SUPPLY FOR STEAM GENERATION; CONTROLLING WATER LEVEL FOR STEAM GENERATION; AUXILIARY DEVICES FOR PROMOTING WATER CIRCULATION WITHIN STEAM BOILERS
- F22D5/00—Controlling water feed or water level; Automatic water feeding or water-level regulators
- F22D5/26—Automatic feed-control systems
- F22D5/30—Automatic feed-control systems responsive to both water level and amount of steam withdrawn or steam pressure
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
- C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/03—Pressure
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/38—Gas flow rate
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/42—Liquid level
Definitions
- the present invention relates to a vaporizer and a vaporization supply apparatus, and more particularly to a vaporizer appropriately used for supplying vaporized ultrapure water to an ashing apparatus or the like provided in a semiconductor manufacturing apparatus, and a vaporization supply apparatus including the vaporizer.
- ashing devices or ashers are widely used to remove a photoresist film formed on a substrate after patterning.
- the development of an apparatus for performing ashing by generating plasma using ultrapure water as a raw material and reacting the plasma with a photoresist film has also progressed. By performing such dry process ashing with ultrapure water, it is possible to reduce adverse effects on the semiconductor devices to be manufactured, and to reduce the environmental load.
- Water vapor which is the raw material gas, can be generated, for example, by evaporating ultrapure water introduced into the processing chamber under reduced pressure.
- ultrapure water is vaporized in advance using a heater or a vaporizer, and is introduced into the processing chamber as a raw material gas to generate water vapor plasma (for example, , Patent Document 1).
- ultrapure water gas at a predetermined temperature can be introduced into the processing chamber at a controlled flow rate.
- the advantage is that the power can be reduced.
- ultrapure water gas controlled to an appropriate temperature can be used to remove organic substances such as photoresist by blowing it directly onto the substrate surface.
- the present invention has been made to solve the above-mentioned problems, and aims to provide a vaporizer suitably used for supplying vaporized ultrapure water to an ashing device or the like, and a vaporization supply apparatus including the vaporizer. Its main purpose.
- a vaporizer includes a vaporization chamber that stores a liquid, a winding portion that is provided in the vaporization chamber and that is in contact with the liquid stored in the vaporization chamber and acts as a heat source.
- a bottom heater including an upstanding portion having a heater terminal at its end; and a relief valve connected to the vaporization chamber.
- the vaporizer further comprises a side heater that heats the side surface of the vaporization chamber from the outside of the vaporization chamber.
- the vaporizer further comprises a pretank having a heater for preheating the liquid to be sent to the vaporization chamber.
- the vaporizer further comprises a float sensor for measuring the liquid level of the liquid, and the winding portion of the bottom heater is provided at a position lower than the liquid level lower limit position of the float sensor.
- the vaporizer further comprises a stirring device or a rocking device for promoting movement of the liquid stored in the vaporization chamber.
- the liquid is ultrapure water, and is used to supply vaporized ultrapure water to an ashing device.
- a vaporization supply device includes any one of the vaporizers described above, a pressure-type flow control device provided downstream of the vaporizer, a throttle section, and a throttle section provided upstream of the throttle section. and an upstream pressure sensor that measures the pressure between the throttle portion and the control valve, and the throttle is adjusted by adjusting the opening of the control valve based on the output of the upstream pressure sensor.
- a pressure flow controller configured to control the flow of gas flowing downstream of the section.
- the vaporizer and vaporization supply device By using the vaporizer and vaporization supply device according to the embodiment of the present invention, it is possible to vaporize ultrapure water and appropriately supply it as a gas at a larger flow rate.
- FIG. 1 is a schematic diagram showing an ultrapure water gas supply system including a vaporizer and a vaporization supply device according to an embodiment of the present invention
- FIG. FIG. 2 is a schematic diagram showing an exemplary configuration of a main tank included in the vaporizer shown in FIG. 1
- FIG. 4 is a perspective view showing a bottom heater provided in the main tank
- FIG. 4 is a perspective view showing a more specific design example of the main tank
- It is a perspective view which shows the structure of the vicinity of the flow control apparatus connected downstream.
- the applicant is developing a device that uses a vaporizer to convert ultrapure water into a gaseous state and then supplies it to an ashing device.
- the gas generated by the vaporizer is supplied to the ashing device after the flow rate is controlled by, for example, a pressure-type flow control device provided downstream.
- the pressure-type flow control device is provided with an orifice plate, a critical nozzle, or other restrictor, and by controlling the pressure on the upstream side of the restrictor (hereinafter sometimes referred to as upstream pressure P1), It is a device that controls the flow rate on the side (for example, Patent Document 3).
- upstream pressure P1 is measured using a pressure sensor, and is controlled by feedback-controlling the degree of opening of the control valve on the upstream side of the throttle section based on the output of the pressure sensor.
- Pressure-type flow control devices are widely used because they can control the mass flow rate of various fluids with high accuracy with a relatively simple mechanism that combines a control valve and a throttle.
- supply pressure P0 the pressure on the upstream side of the control valve
- the pressure-type flow rate control device hardly causes fluctuations in the flow rate as long as the upstream pressure P1 can be appropriately controlled. It has the advantage of excellent flow control stability.
- a pressure-type flow rate control device when supplying ultrapure water gas at a large flow rate (for example, 10 g/min or more or 8000 sccm or more), a relatively high pressure gas is sent from the vaporizer. Therefore, it is necessary to maintain the pressure in the vaporization chamber at, for example, 300 kPa or more. In order to vaporize the ultrapure water under high pressure, it is necessary to heat the ultrapure water to a temperature of 130° C. or higher, for example.
- ultrapure water is preheated in a pre-tank before being sent to the vaporization chamber provided in the main tank, and relatively high-temperature ultrapure water is heated in the vaporization chamber. It was vaporized by a heater.
- the present inventors have made intensive studies on a vaporizer and a vaporization supply device in which the heater heating is performed with higher efficiency in the vaporization chamber in the main tank and safety measures are taken, The present invention has been completed. As a result, it has become possible to stably perform vaporization and supply of ultrapure water at a rate of, for example, 10 g/min or more, particularly 20 g/min or more, from the start to the end.
- FIG. 1 shows an ultrapure water gas supply system provided with a vaporization supply device 100 according to an embodiment of the present invention.
- the upstream side of vaporization supply device 100 is connected to ultrapure water (H 2 O) source 2 , and the downstream side is connected to process chamber 6 via shutoff valve 4 .
- a vacuum pump 8 is connected to the process chamber 6, and the pressure inside the chamber and the gas flow path can be reduced.
- the vaporization supply device 100 of this embodiment is composed of a vaporizer 10 and a pressure type flow control device 20 connected downstream thereof.
- the vaporizer 10 receives the ultrapure water pumped from the ultrapure water source 2 in the state of liquid L, and heats and vaporizes it with a heater.
- the flow rate of the ultrapure water gas G generated in the vaporizer 10 is controlled by the pressure type flow controller 20, and supplied to the process chamber 6 at a desired flow rate.
- the pressure-type flow control device 20 includes a control valve 22, a throttle section 24, and an upstream pressure sensor 26 provided therebetween. Based on the output of the upstream pressure sensor 26, the control valve 22 is feedback controlled. By doing so, the upstream pressure P1 can be maintained at a pressure corresponding to the desired flow rate.
- the control valve 22 for example, a piezoelectric element driven valve is used, and as the restrictor 24, for example, an orifice plate with small holes is used.
- the pressure-type flow control device 20 allows the flow rate Q to be controlled by the upstream pressure regardless of the downstream pressure P2, which is the pressure on the downstream side of the restrictor 24.
- the flow rate is controlled using the principle that it is determined by P1.
- the pressure-type flow control device 20 may also include a downstream pressure sensor (not shown) that measures the downstream pressure P2.
- the flow rate can be calculated even if the critical expansion condition is not satisfied.
- Q K2 P2 m (P1-P2) n (where K2 is a constant that depends on the type of fluid and fluid temperature, and m and n are indices derived from the actual flow rate) can be calculated.
- the control valve 22 is feedback-controlled so that the flow rate of the gas passing through the portion 24 approaches the set flow rate (that is, the difference between the calculated flow rate and the set flow rate approaches 0). Thereby, the gas can be flowed downstream of the restrictor 24 at a desired set flow rate.
- the vaporizer 10 in this embodiment includes a pre-tank 10P and a main tank 10M on the downstream side thereof.
- Ultrapure water is supplied from the ultrapure water source 2 to the pretank 10P through the liquid supply valve 11, and is preheated to a predetermined temperature at which it does not vaporize using a heater and temperature sensor (not shown).
- a heater and temperature sensor not shown.
- the amount of ultrapure water supplied to the pre-tank 10P can be arbitrarily adjusted by controlling the opening/closing timing and opening time of the liquid supply valve 11. FIG.
- the main tank 10M includes a vaporization chamber 12 for storing and vaporizing preheated ultrapure water, a bottom heater 14B provided at the bottom of the vaporization chamber 12, and the vaporization chamber 12. and a side heater 14S provided on the side surface.
- the vaporization chamber 12 is formed by a stainless steel container with a relatively large capacity of, for example, 1500cc to 2000cc. In this embodiment, the capacity of the vaporization chamber 12 is set larger than the capacity of the pre-tank 10P (for example, 1000cc to 1500cc).
- a relief valve 16 is also connected to the vaporization chamber 12 .
- the relief valve 16 is a valve that automatically releases pressure when excessive pressure occurs, and is opened only when the pressure exceeds a set pressure. As a result, it is possible to prevent the interior of the vaporization chamber 12 from becoming excessively pressurized when the gas supply is stopped.
- the internal pressure of the vaporization chamber 12 may be measured by a supply pressure sensor 19 provided in the gas discharge path, but the supply pressure sensor 19 may not necessarily be provided.
- a level sensor 18 is provided inside the vaporization chamber 12, and the liquid level can be measured.
- a float sensor eg, 1-float 2-contact alarm type
- a liquid level lower limit position is set in the float sensor, and the float sensor can detect that the float has fallen to the lower limit position and output an alarm signal.
- the vaporizer 10 can open the liquid supply valve 11 and refill the vaporization chamber 12 with ultrapure water via the pre-tank 10P. As a result, a certain amount or more of ultrapure water can always be stored in the vaporization chamber 12 .
- Bottom heater 14B and side heater 14S are used to vaporize ultrapure water in vaporization chamber 12 .
- a space heater arranged to heat the side surface of the vaporization chamber 12 from the outside of the vaporization chamber 12 is used as the side heater 14S.
- a sheath heater provided inside the vaporization chamber 12 and arranged so as to be in contact with ultrapure water is used as the bottom heater 14B.
- the vaporizer itself having a heater inside the liquid storage tank is disclosed in Patent Document 4 or Patent Document 5.
- the space heater is a planar heater configured to heat a flat metal surface.
- the sheath heater has a nichrome wire extending inside a heater pipe (sheath) filled with an insulating powder such as MgO, and is configured to generate heat by passing electricity through a terminal. .
- FIG. 3 shows a sheath heater used as the bottom heater 14B of this embodiment.
- the bottom heater 14B has a single sheath pipe having heater terminals 143, 143 connected to an external power source (not shown) at both ends. , 142, and the central portion is bent to form a winding portion 141 (that is, a nichrome wire placement portion) that functions as a heat source.
- a winding portion 141 that is, a nichrome wire placement portion
- the wound portion 141 is wound two and a half times in the illustrated embodiment, it goes without saying that the wound portion 141 may be wound more times. Further, it may have a meandering shape to increase the in-plane contact area.
- the bottom heater 14B is arranged so that the heater terminals 143, 143 protrude outside from the top surface of the tank, and the winding part 141 is positioned near the bottom surface inside the tank.
- the heater terminals 143, 143 may have a shape in which they are integrated.
- the bottom heater 14B having such a configuration, ultrapure water can be directly and efficiently heated particularly in the lower portion of the vaporization chamber 12. Therefore, even when a large flow rate of ultrapure water gas is supplied, it is possible to prevent the temperature of the ultrapure water from dropping in the vaporization chamber. occurrence can be prevented.
- the drop in the temperature of the ultrapure water in the vaporization chamber is measured by a temperature sensor (not shown), and the temperature can be maintained by operating the bottom heater 14B and the side heater 14S using a temperature controller. can.
- the bottom heater 14B may have any configuration as long as its heat source (here, the wound portion 141 of the sheath heater) is arranged near the bottom of the vaporization chamber 12 .
- the vicinity of the bottom portion of the vaporization chamber 12 typically means a height position equal to or less than half the total height of the vaporization chamber 12 in the height direction of the vaporization chamber 12, more specifically, 1/2 of the total height. /3 or less.
- the length of the standing portion 142 of the sheath heater is typically designed to be half or more of the total height of the vaporization chamber 12. More specifically, The length is set to 2/3 or more of the total height.
- the heat source portion of the bottom heater 14B (here, the winding portion 141 of the sheath heater) is provided at a position lower than the liquid level lower limit position of the float sensor. For this reason, the heat source is always immersed in the liquid by replenishment of ultrapure water, and damage to the equipment due to dry heating is prevented.
- the space heater that constitutes the side heater 14S is provided outside the main tank 10M, it can be installed even after the tank is assembled. It is necessary to incorporate it internally.
- the bottom heater 14B can be fixed, for example, by welding its terminals to a lid member forming the upper surface of the vaporization chamber. By arranging only the bottom heater 14B in contact with the ultrapure water at all times inside the vaporization chamber 12 in this manner, it is possible to efficiently heat the ultrapure water while minimizing the complication of the configuration and assembly process. It is possible.
- the bottom heater 14B can perform heating with higher efficiency. Gas can continue to be supplied at the desired flow rate.
- the relief valve 16 is provided, it is possible to prevent the pressure inside the vaporization chamber from becoming excessive when the gas supply is stopped, etc., thereby preventing breakage of the float sensor and the valve inside, and taking safety measures. can be done.
- FIG. 4 shows a more specific configuration example of the main tank 10M
- FIG. 5 shows a configuration example in the vicinity of the pressure-type flow control device 20 connected downstream of the main tank 10M.
- the main tank 10M includes a vaporization chamber 12 having a substantially cubic appearance.
- a vaporization chamber 12 having a substantially cubic appearance.
- an ultrapure water inlet 12L connected to the pre-tank 10P and a pressure type
- An ultrapure water gas outlet 12G connected to the flow controller 20 is provided.
- the space heaters that constitute the side heaters 14S are provided on the four side surfaces so as to surround the vaporization chamber 12 .
- the terminal portion of the bottom heater 14B is fixed by welding to the lid member 12T arranged on the upper surface of the vaporization chamber 12, and the heat generating portion of the bottom heater 14B is arranged toward the bottom inside the vaporization chamber 12. .
- the lid member 12T to which the bottom heater 14B is fixed is fixed so as to close the upper opening of the vaporization chamber 12, thereby forming a sealed space while incorporating the bottom heater 14B.
- a vaporization chamber 12 is formed.
- the relief valve 16, the terminal portion of the level sensor 18, and the supply pressure sensor 19 are also fixed to the lid member 12T.
- an air-operated valve (AOV) 21 used as a downstream gas cutoff valve is also fixed, and a cartridge heater constituting the outlet heater 14E is fixed in the vicinity of the ultrapure water gas outlet 12G. It is This cartridge heater is embedded in a metal member with good thermal conductivity, and is used to heat the gas flow path leading to the ultrapure water gas outlet 12G to prevent re-liquefaction of the ultrapure water gas.
- the pressure type flow rate control device 20 on the downstream side may also be provided with a heat retaining heater 28 such as a jacket heater.
- the temperature of the pressure-type flow control device 20 is measured using a temperature sensor 27 (here, a thermocouple), and is set to a temperature (for example, about 150° C.) that can prevent re-liquefaction of the gas in the vicinity of the pressure-type flow control device 20. adjusted. As a result, the gas is supplied from the gas outlet 29 to the process chamber at a high temperature and whose flow rate is controlled.
- the piping connecting the main tank 10M and the pressure-type flow control device 20 and the piping on the downstream side of the pressure-type flow control device 20 are also preferably maintained at a temperature that prevents re-liquefaction using a heater or the like. be.
- a small capacity for example, 5 cc or less
- high-temperature, high-pressure ultrapure water gas is supplied to the process chamber. It can be supplied at a controlled high flow rate.
- the main tank 10M of the vaporizer 10 is provided with a stirring device or a swinging device for promoting the movement and flow of the ultrapure water stored in the vaporization chamber. Additional devices may be provided.
- the stirrer can be composed of, for example, a mechanical mechanism that vertically moves, laterally moves, or vibrates the bottom heater 14B. Of course, it is also possible to rotate a wing member that is submerged in water separately from the bottom heater 14B.
- the ultrapure water in the vaporization chamber 12 can also be moved by swinging the main tank 10M itself using a swinging device. By positively moving the ultrapure water in this manner, the heating efficiency and heating rate can be further improved, and the heating time to the desired temperature can be shortened.
- the vaporizer and the vaporization supply apparatus are suitably used for vaporizing and then supplying ultrapure water to an ashing apparatus of a semiconductor manufacturing facility.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Hydrology & Water Resources (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
Description
4 遮断弁
6 プロセスチャンバ
8 真空ポンプ
10 気化器
10M メインタンク
10P プレタンク
12 気化室
14B 底部ヒータ
14S 側面ヒータ
141 巻回部
142 立設部
143 ヒータ端子
16 リリーフ弁
18 レベルセンサ
19 供給圧力センサ
20 圧力式流量制御装置
22 コントロール弁
24 絞り部
26 上流圧力センサ
100 気化供給装置
Claims (7)
- 液体を貯留する気化室と、
前記気化室に設けられ、前記気化室に貯留された液体と接し、熱源として作用する巻回部及び巻回部から立設され端部にヒータ端子を備えた立設部を含む底部ヒータと、
前記気化室に接続されたリリーフ弁と
を備える、気化器。 - 前記気化室の側面を前記気化室の外側から加熱する側面ヒータをさらに備える、請求項1に記載の気化器。
- 前記気化室に送られる液体を予め加熱しておくためのヒータを有するプレタンクをさらに備える、請求項1または2に記載の気化器。
- 前記液体の液面レベルを測定するためのフロートセンサをさらに備え、前記底部ヒータの巻回部は前記フロートセンサの液面下限位置よりも低い位置に設けられている、請求項1から3のいずれかに記載の気化器。
- 前記気化室内に貯留された液体の動きを促進させるための攪拌装置または揺動装置をさらに備える、請求項1から4のいずれかに記載の気化器。
- 前記液体は超純水であり、気化させた超純水をアッシング装置に供給するために用いられる、請求項1から5のいずれかに記載の気化器。
- 請求項1から6のいずれかに記載の気化器と、
前記気化器の下流側に設けられた圧力式流量制御装置であって、絞り部と、前記絞り部の上流側に設けられたコントロール弁と、前記絞り部と前記コントロール弁との間の圧力を測定する上流圧力センサとを備え、前記上流圧力センサの出力に基づいて前記コントロール弁の開度を調整することによって前記絞り部の下流に流れるガスの流量を制御するように構成されている圧力式流量制御装置と
を備える、気化供給装置。
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KR1020237012789A KR20230069985A (ko) | 2021-03-11 | 2022-02-01 | 기화기 및 기화 공급 장치 |
US18/264,501 US20240101446A1 (en) | 2021-03-11 | 2022-02-01 | Vaporizer and vaporization supply device |
JP2023505206A JPWO2022190711A1 (ja) | 2021-03-11 | 2022-02-01 |
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US (1) | US20240101446A1 (ja) |
JP (1) | JPWO2022190711A1 (ja) |
KR (1) | KR20230069985A (ja) |
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Citations (6)
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JPS5312612U (ja) * | 1976-07-15 | 1978-02-02 | ||
JPH0242697U (ja) * | 1988-09-14 | 1990-03-23 | ||
JP2001308070A (ja) * | 2000-04-24 | 2001-11-02 | Matsushita Electric Ind Co Ltd | ドライエッチング装置およびそれを用いた半導体基板の処理方法 |
JP2002110611A (ja) * | 2000-10-04 | 2002-04-12 | Texas Instr Japan Ltd | 半導体ウェハの洗浄方法及び装置 |
JP2004063715A (ja) * | 2002-07-29 | 2004-02-26 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法および基板処理装置 |
WO2018070464A1 (ja) * | 2016-10-14 | 2018-04-19 | 株式会社フジキン | 流体制御装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3661757B2 (ja) | 1999-09-30 | 2005-06-22 | 横河電機株式会社 | 気化器 |
KR20050113549A (ko) * | 2002-05-29 | 2005-12-02 | 가부시키가이샤 와타나베 쇼코 | 기화기 및 이를 사용한 각종 장치 그리고 기화방법 |
JP4324619B2 (ja) * | 2007-03-29 | 2009-09-02 | 東京エレクトロン株式会社 | 気化装置、成膜装置及び気化方法 |
JP6372998B2 (ja) | 2013-12-05 | 2018-08-15 | 株式会社フジキン | 圧力式流量制御装置 |
JP6578125B2 (ja) * | 2015-04-30 | 2019-09-18 | 株式会社フジキン | 気化供給装置 |
-
2022
- 2022-02-01 KR KR1020237012789A patent/KR20230069985A/ko not_active Application Discontinuation
- 2022-02-01 JP JP2023505206A patent/JPWO2022190711A1/ja active Pending
- 2022-02-01 US US18/264,501 patent/US20240101446A1/en active Pending
- 2022-02-01 WO PCT/JP2022/003750 patent/WO2022190711A1/ja active Application Filing
- 2022-02-16 TW TW111105579A patent/TWI800264B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5312612U (ja) * | 1976-07-15 | 1978-02-02 | ||
JPH0242697U (ja) * | 1988-09-14 | 1990-03-23 | ||
JP2001308070A (ja) * | 2000-04-24 | 2001-11-02 | Matsushita Electric Ind Co Ltd | ドライエッチング装置およびそれを用いた半導体基板の処理方法 |
JP2002110611A (ja) * | 2000-10-04 | 2002-04-12 | Texas Instr Japan Ltd | 半導体ウェハの洗浄方法及び装置 |
JP2004063715A (ja) * | 2002-07-29 | 2004-02-26 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法および基板処理装置 |
WO2018070464A1 (ja) * | 2016-10-14 | 2018-04-19 | 株式会社フジキン | 流体制御装置 |
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TW202244307A (zh) | 2022-11-16 |
KR20230069985A (ko) | 2023-05-19 |
JPWO2022190711A1 (ja) | 2022-09-15 |
TWI800264B (zh) | 2023-04-21 |
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