WO2021161872A1 - Alignment device and actuator - Google Patents

Alignment device and actuator Download PDF

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Publication number
WO2021161872A1
WO2021161872A1 PCT/JP2021/003937 JP2021003937W WO2021161872A1 WO 2021161872 A1 WO2021161872 A1 WO 2021161872A1 JP 2021003937 W JP2021003937 W JP 2021003937W WO 2021161872 A1 WO2021161872 A1 WO 2021161872A1
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WO
WIPO (PCT)
Prior art keywords
side wall
wall portion
table member
linear motion
motion device
Prior art date
Application number
PCT/JP2021/003937
Other languages
French (fr)
Japanese (ja)
Inventor
廣田　淳
冬起 山本
Original Assignee
Thk株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thk株式会社 filed Critical Thk株式会社
Publication of WO2021161872A1 publication Critical patent/WO2021161872A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/04—Ball or roller bearings
    • F16C29/06—Ball or roller bearings in which the rolling bodies circulate partly without carrying load
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Definitions

  • the present invention relates to an alignment device and an actuator.
  • the present application claims priority based on Japanese Patent Application No. 2020-022663 filed in Japan on February 13, 2020, the contents of which are incorporated herein by reference.
  • a linear motion device for moving the table member in a plane (movement in the X direction and movement in the Y direction) is usually provided between the base member and the table member. Therefore, there is a problem that the height of the table member (dimension in the Z direction) is large and the table member cannot be used for a unit having a limited space (for example, a projection device such as a projector).
  • Patent Document 1 discloses a table device as one of the alignment devices, in which a linear motion device is provided outside the facing region where the base member and the table member face each other, and the table member is moved from the outside of the table member. (See FIGS. 5 and 6 of Patent Document 1). As a result, the table member can be guided by bringing the lower surface of the table member into contact with the upper surface of the base member.
  • the linear motion device of the table device is connected to the table member via a rod and a bearing (rotation guide).
  • the table device includes a plurality of actuators including a linear motion device, and the table member can be moved in the ⁇ Z direction (rotational direction) by changing the operating amount of the two actuators arranged side by side.
  • the rotation guide is provided, there is a problem that the number of parts increases and the weight of the entire device increases.
  • the present invention has been made in view of the above problems, and is suitable for an alignment device capable of moving a table member in the X, Y, and ⁇ Z directions with a small number of parts and reducing the height of the table member.
  • the purpose is to provide an actuator.
  • the alignment device has a base member, a side wall portion, and a table member facing the base member, and the base member and the table member facing each other. From the outside of the facing region, the side wall portion of the table member is supported, and at least the base member and the table member are arranged in a biaxial orthogonal direction orthogonal to the facing direction facing the table member.
  • a first linear motion device including a plurality of actuators, each of which is attached to the side wall portion and guides the table member in a direction along the side wall portion in the two-axis orthogonal directions.
  • It has a moving body and a driving body, supports the first linear motion device, guides the table member in the plane orthogonal direction orthogonal to the side wall portion in the two-axis orthogonal directions, and guides the table member in the facing direction. It is provided with a second linear motion device which allows the table member to rotate about an axis extending in a direction and has a gap formed between the moving body and the driving body.
  • the actuator according to one aspect of the present invention is attached to an object and has a first linear motion device that guides the object in the first stroke direction, a moving plate that supports the first linear motion device, and rotation. It has a driving body that moves the moving plate in the second stroke direction, and allows the object to rotate about an axis extending in a direction orthogonal to each of the first stroke direction and the second stroke direction. It also includes a second linear motion device having a gap formed between the moving plate and the driving body, and an urging member that urges the moving plate in the second stroke direction.
  • an alignment device capable of moving the table member in the X, Y, and ⁇ Z directions with a small number of parts and reducing the height of the table member, and an actuator suitable for the alignment device can be obtained.
  • FIG. 3 is a cross-sectional view taken along the line AA shown in FIG.
  • FIG. 1 is a perspective view of the alignment device 1 according to the embodiment of the present invention.
  • FIG. 2 is a plan view of the alignment device 1 according to the embodiment of the present invention.
  • the alignment device 1 includes a table member 10, a base member 20, and a plurality of actuators 30.
  • the table member 10 is arranged to face the base member 20 so as to overlap the base member 20.
  • the plurality of actuators 30 support the side wall portion 12 of the table member 10 from the outside of the facing region 40 in which the base member 20 and the table member 10 face each other. Further, the plurality of actuators 30 are arranged in a biaxial orthogonal direction at least orthogonal to the opposite direction in which the base member 20 and the table member 10 face each other.
  • the Z direction is a facing direction in which the table member 10 and the base member 20 face each other.
  • the X direction is the first direction of the two-axis orthogonal directions orthogonal to the opposite direction (Z direction).
  • the Y direction is the second direction of the two orthogonal directions.
  • the table member 10 includes a flat surface portion 11 facing the base member 20 in the Z direction, and a side wall portion 12 standing on the edge of the flat surface portion 11.
  • the flat surface portion 11 is formed in a rectangular shape in the plan view shown in FIG.
  • the flat surface portion 11 is not limited to the rectangle shown in FIG. 2 as long as it has a planar shape extending along the XY plane.
  • the side wall portion 12 includes a first side wall portion 12A and a second side wall portion 12B.
  • the first side wall portion 12A extends in the first direction (X direction) of the two-axis orthogonal directions described above.
  • the second side wall portion 12B extends in a second direction (Y direction) different from the first direction in the two-axis orthogonal directions.
  • the first side wall portion 12A is erected on the opposite side (+ Z side) of the base member 20 from the edge of one side extending in the X direction of the flat surface portion 11.
  • the second side wall portion 12B is erected on the opposite side (+ Z side) of the base member 20 from the edge of one side extending in the Y direction of the flat surface portion 11.
  • the plurality of actuators 30 include a pair of first actuators 30A1 and 30A2 and a second actuator 30B.
  • the pair of first actuators 30A1 and 30A2 are attached to the first side wall portion 12A with a gap in the first direction (X direction).
  • the second actuator 30B is attached to the second side wall portion 12B.
  • the first actuators 30A1 and 30A2 and the second actuator 30B have the same configuration except for the arrangement. Hereinafter, the configuration of the actuator 30 will be described.
  • FIG. 3 is a perspective view of the actuator 30 according to the embodiment of the present invention.
  • FIG. 4 is a cross-sectional view taken along the line AA shown in FIG.
  • FIG. 5 is a configuration diagram of a first linear motion device 60 included in the actuator 30 according to the embodiment of the present invention.
  • the actuator 30 includes a case 50, a first linear motion device 60, and a second linear motion device 80.
  • the case 50 is fixed to the base member 20 via a bolt 51.
  • the first linear motion device 60 is attached to the side wall portion 12 and guides the table member 10 in the direction along the side wall portion 12 in the two-axis orthogonal directions.
  • the first linear motion device 60 of the first actuator 30A1 it is attached to the first side wall portion 12A, and among the two axes orthogonal directions, the direction along the first side wall portion 12A (X direction, first stroke direction). Guide the table member 10.
  • the first actuator 30A2 the table member 10 is attached to the second side wall portion 12B and guides the table member 10 in the direction (Y direction, second stroke direction) along the second side wall portion 12B.
  • the first linear motion device 60 includes a track rail 61 provided with a rolling element rolling groove 63 along the longitudinal direction, a slider block 62, a plurality of balls 65 (rolling bodies), and the like. To be equipped with.
  • the slider block 62 is provided with a load rolling element rolling groove 64 facing the rolling element rolling groove 63.
  • the plurality of balls 65 (rolling bodies) are arranged between the rolling body rolling groove 63 and the load rolling body rolling groove 64.
  • the track rail 61 is a long member having a substantially rectangular cross section.
  • a rolling element rolling groove 63 is formed on the outer surface 61b in the width direction of the track rail 61 (left-right direction on the paper surface in FIG. 5) along the longitudinal direction of the track rail 61 (vertical direction on the paper surface in FIG. 5).
  • the rolling element rolling groove 63 is recessed in a substantially arc shape with respect to the outer surface 61b.
  • the rolling element rolling grooves 63 are formed in pairs on the left and right sides of the track rail 61.
  • the track rail 61 is formed with a fixing hole 66 (track body fixing hole) for being fixed to an object (moving plate 82 shown in FIG. 4 to be described later).
  • the fixing hole 66 is formed so as to penetrate the track rail 61 in the thickness direction (vertical direction on the paper surface in FIG. 5).
  • the fixing hole 66 is formed with a counterbore 66a for positioning a bolt (not shown) for fixing the track rail 61 at a position lower than the upper surface 61a of the track rail 61.
  • the slider block 62 includes a block main body 67 and a lid body 68 attached to the block main body 67.
  • the block body 67 has a rail accommodating groove 69 accommodating the track rail 61.
  • the rail accommodating groove 69 is open on the lower surface of the block body 67.
  • a fixing hole 70 (moving body fixing hole) for fixing an object (side wall portion 12 of the table member 10) is formed on the mounting surface 67a which is the upper surface of the block main body 67.
  • the fixing hole 70 is formed at a predetermined depth in the thickness direction of the block body 67.
  • the fixing hole 70 is a screw hole, and a bolt 72 (see FIG. 4) for fixing the object is screwed into the fixing hole 70.
  • the rail accommodating groove 69 is formed with a load rolling element rolling groove 64 facing the rolling element rolling groove 63 of the track rail 61.
  • the load rolling element rolling groove 64 is recessed in an arc shape with respect to the inner surface of the rail accommodating groove 69.
  • the load rolling element rolling groove 64 is formed in pairs on the left and right sides of the slider block 62 so as to sandwich the track rail 61.
  • the load rolling element rolling groove 64 faces the rolling element rolling groove 63 of the track rail 61, and forms a load rolling element rolling path C1 that rolls the ball 65 in a state where a load is applied.
  • a cage rolling body holding member
  • the ball 65 is rotated. It has a structure to hold it freely.
  • the same effect can be obtained only with the ball 65 in which the cage is not arranged.
  • the ball 65 is interposed between the track rail 61 and the slider block 62 to smoothly move the slider block 62 with respect to the track rail 61.
  • the first linear motion device 60 is not limited to the finite stroke type, but the infinite circulation type linear guide also smoothly moves the slider block 62 with respect to the track rail 61.
  • a no-load rolling element runway C2 is formed in the block body 67.
  • the no-load rolling element runway C2 is formed so as to penetrate the block body 67 in the longitudinal direction.
  • the inner diameter of the non-load rolling element runway C2 is larger than the ball diameter of the ball 65 so that the ball 65 is not loaded.
  • the non-load rolling element rolling path C2 is formed in pairs on the left and right sides of the slider block 62 corresponding to the load rolling element rolling groove 64 (load rolling element rolling path C1).
  • the lid body 68 is attached to both end faces in the longitudinal direction of the block body 67.
  • the lid body 68 has a rail accommodating groove 71 accommodating the track rail 61, similarly to the block body 67.
  • the lid body 68 is formed with a rolling element direction turning path C3 on facing surfaces facing both end surfaces of the block body 67.
  • the pair of rolling element direction change paths C3 connect both ends of the load rolling element turning path C1 and the unloaded rolling element turning path C2 to form an infinite circulation path C of the ball 65.
  • the infinite circulation path C connects a pair of linear portions (load rolling element rolling path C1 and unloaded rolling element rolling path C2) extending in the longitudinal direction of the track rail 61 and the ends of the pair of linear portions. It is composed of a pair of semi-circular curved portions (rolling element direction turning path C3). In the present embodiment, two infinite circulation paths C are formed so as to extend in parallel along the longitudinal direction of the track rail 61 at intervals in the width direction of the track rail 61.
  • the ball 65 of the present embodiment is arranged inside the infinite circulation path C with almost no gap, and circulates in the infinite circulation path C.
  • the first linear motion device 60 a device in which two infinite circulation paths C are formed on each side and two on each side may be used.
  • the second linear motion device 80 supports the first linear motion device 60, and in the two-axis orthogonal directions, the direction in which the side wall portion 12 is close to and separated from the side wall portion 12 (the plane perpendicular direction of the side wall portion 12).
  • the table member 10 is guided to (also referred to as).
  • the table member 10 is guided in the direction (Y direction) that is close to and separated from the first side wall portion 12A in the two-axis orthogonal directions.
  • the first actuator 30A2 In the second actuator 30B, the table member 10 is guided in the direction (X direction) that is close to and separated from the second side wall portion 12B in the two-axis orthogonal directions.
  • the second linear motion device 80 includes a screw shaft 81 (driving body) extending in a direction of approaching and separating from the side wall portion 12, and a moving plate that moves in a direction of approaching and separating from the side wall portion 12 by rotation of the screw shaft 81. It is equipped with 82 (moving body).
  • the moving plate 82 has a flat surface portion 82a, a relief portion 82b, and a support portion 82c.
  • the flat surface portion 82a is formed with a screw hole to be screwed into the screw shaft 81.
  • the flat surface portion 82a is arranged close to the side wall portion 12 and extends in the Z direction in parallel with the side wall portion 12.
  • the relief portion 82b is connected to the upper end portion of the flat surface portion 82a and extends in a direction away from the side wall portion 12.
  • the relief portion 82b escapes in a direction away from the side wall portion 12 by the size of the first linear motion device 60.
  • the support portion 82c is connected to the tip end portion of the relief portion 82b in the direction away from the side wall portion 12, and stands parallel to the side wall portion 12 in the Z direction.
  • the track rail 61 of the first linear motion device 60 described above is fixed to the support portion 82c via bolts 73 and nuts 74.
  • the screw shaft 81 is supported by the case 50 via a bearing 83.
  • the outer ring of the bearing 83 is fixed to the case 50 via the spring receiving member 84.
  • a worm wheel 85 is attached to the screw shaft 81.
  • the worm wheel 85 is fixed to the screw shaft 81 (co-tightened together with the bearing 83) together with the inner ring of the bearing 83 by a fixing nut 86 screwed to the screw shaft 81.
  • a hole 12a is formed at a position of the side wall portion 12 facing the screw shaft 81.
  • the worm wheel 85 meshes with the worm shaft 88 supported by the case 50.
  • the worm shaft 88 is connected to the motor 90 via a gearbox 89.
  • the motor 90 is preferably, for example, a stepping motor or the like.
  • the case 50 includes a motor bracket 52 that supports the gearbox 89 and the motor 90 above the worm shaft 88.
  • the motor bracket 52 is fixed to the case 50 via bolts 53.
  • Both ends of the worm shaft 88 are pivotally supported by bearings 55.
  • the bearing 55 that pivotally supports the lower end of the worm shaft 88 is fixed to the case 50.
  • the bearing 55 that pivotally supports the upper end of the worm shaft 88 is fixed to the bearing bracket 54 that is laid below the motor bracket 52.
  • the bearing bracket 54 is supported by the case 50 via bolts (not shown).
  • the actuator 30 having the above configuration, when the worm shaft 88 is rotated via the motor 90 and the gearbox 89, the worm wheel 85 that meshes with the worm shaft 88 rotates as shown in FIG.
  • the screw shaft 81 driving body
  • the moving plate 82 moving body screwed to the screw shaft 81 moves away from the side wall portion 12. It is screwed in the direction.
  • the table member 10 can be moved in a plane with respect to the base member 20 in the X direction and the Y direction.
  • the table member 10 is moved with respect to the base member 20 in the ⁇ Z direction (around an axis extending in a direction orthogonal to each of the first stroke direction and the second stroke direction).
  • a gap (clearance) for (rotating) is formed.
  • the table member 10 is moved (rotated) in the ⁇ Z direction by making the feed amount of the screw shaft 81 in the second linear motion device 80 of each of the two first actuators 30A1 and 30A2 different. ) Can be made. That is, the actuator 30 receives the drive of the actuator 30 in the other drive direction by the first linear motion device 60, and the rotation of the table member 10 is received by the clearance between the screw shaft 81 and the screw portion of the moving plate 82.
  • an urging member 87 that urges the moving plate 82 in the Y direction (second stroke direction) in which the screw shaft 81 extends is arranged between the moving plate 82 and the spring receiving member 84.
  • the urging member 87 of the present embodiment is a compression spring, and urges the table member 10 so as to press it against the base member 20. As a result, the urging member 87 suppresses rattling of the table member 10 due to the gap between the screw shaft 81 and the moving plate 82 described above.
  • the urging member 87 is arranged between the screw shaft 81 and the first linear motion device 60 in the Z direction.
  • a rotational moment is generated on the moving plate 82 with the screw shaft 81 as the fulcrum and the first linear motion device 60 as the point of action. Therefore, the moving plate 82 can be urged so that the flat surface portion 11 of the table member 10 is close to the base member 20.
  • the table member 10 can be guided by bringing the lower surface of the table member 10 into contact with the upper surface of the base member 20.
  • FIG. 6 and 7 are plan views of the alignment device 1 according to the embodiment of the present invention during rotational operation.
  • the first actuator 30A1 (specifically, the moving plate 82 of the second linear motion device 80, the same applies hereinafter) is moved in a direction close to the first side wall portion 12A. Only m1 is driven, and the first actuator 30A2 is driven by m2 in a direction away from the first side wall portion 12A.
  • the entire table member 10 moves (rotates) in the Z ⁇ direction, and its center P shifts in the direction of the symbol M. If the direction of M is the direction of the paper surface of 45 °, as shown in FIG. 7, when the second actuator 30B is driven in the direction close to the second side wall portion 12B by m3, the displaced center P in FIG. 6 becomes the original. After returning to the position, the entire table member 10 is rotated counterclockwise.
  • the clockwise rotation of the table member 10 is possible by reversing the directions of the arrows m1 to m3, with the same drive amount described above. Even if the direction of M is not the direction of the paper surface of 45 °, the center P of the table member 10 can be returned to the original position by combining the plane operations described below.
  • FIG. 8 to 11 are plan views of the alignment device 1 according to the embodiment of the present invention when operating in a plane (horizontal).
  • the first actuators 30A1 and 30A2 are driven by m1 and m2 in the direction close to the first side wall portion 12A
  • the second actuator 30B is driven only by m3 in the direction close to the second side wall portion 12B.
  • the table member 10 can be moved in the downward direction (M direction) of the paper surface.
  • the driving amounts of m1 to m3 are the same.
  • the first actuators 30A1 and 30A2 are driven by m1 and m2 in the direction away from the first side wall portion 12A, and the second actuator 30B is driven in the direction away from the second side wall portion 12B.
  • the table member 10 can be moved in the paper surface direction (M direction).
  • the first actuators 30A1 and 30A2 are driven by m1 and m2 in the direction close to the first side wall portion 12A, and the second actuator 30B is moved away from the second side wall portion 12B.
  • the table member 10 can be moved in the right direction (M direction) of the paper surface.
  • the first actuators 30A1 and 30A2 are driven by m1 and m2 in the direction away from the first side wall portion 12A, and the second actuator 30B is driven in the direction close to the second side wall portion 12B.
  • the table member 10 can be moved in the left direction (M direction) of the paper surface.
  • each actuator 30 is driven in the directions of m1 to m3, and the table is determined by the combination of driving of each actuator 30.
  • the member 10 can be moved in the X, Y, and ⁇ Z directions.
  • the actuator 30 receives the drive of the actuator 30 in the other drive direction by the first linear motion device 60, and the rotation of the table member 10 is received by the clearance between the screw shaft 81 and the screw portion of the moving plate 82. Therefore, the actuator 30 does not require rotation guidance.
  • each actuator 30 is arranged outside the facing region 40 between the base member 20 and the table member 10. Therefore, the space between the base member 20 and the table member 10 can be made very thin, and the alignment device 1 is not restricted by space.
  • It has one linear motion device 60, a moving body (moving plate 82), and a driving body (screw shaft 81), supports the first linear motion device 60, and is orthogonal to the side wall portion 12 in the two-axis orthogonal directions.
  • the table member 10 is guided in the direction perpendicular to the plane, and the rotation (movement in the ⁇ Z direction) of the table member 10 around the axis extending in the opposite direction is allowed, and the moving body (moving plate 82) and the driving body (screw shaft 81)
  • a second linear motion device 80 having a gap formed between the two, the table member 10 can be moved in the X, Y, and ⁇ Z directions with a small number of parts, and the height of the table member 10 can be increased.
  • An alignment device 1 that can be made smaller can be obtained.
  • the table member 10 serves as the side wall portion 12 with the first side wall portion 12A extending in the first direction (X direction) in the two-axis orthogonal directions and the first direction in the two-axis orthogonal directions.
  • a pair of first actuators 30A1 provided with a second side wall portion 12B extending in a second direction (Y direction) different from the above, and the plurality of actuators 30 are attached to the first side wall portion 12A with a gap in the first direction.
  • 30A2 and a second actuator 30B attached to the second side wall portion 12B. According to this configuration, the table member 10 can be moved in the X, Y, and ⁇ Z directions with the minimum number of actuators 30 installed.
  • the driving body of the second linear motion device 80 is a screw shaft 81
  • the moving body of the second linear motion device 80 is a moving plate 82 that moves by the rotation of the screw shaft 81.
  • the plate 82 supports the first linear motion device 60. According to this configuration, the table member 10 is moved (rotated) in the ⁇ Z direction by the clearance between the screw shaft 81 and the screw portion of the moving plate 82, so that rotation guidance is not required.
  • each of the plurality of actuators 30 includes an urging member 87 that presses the table member 10 against the base member 20. According to this configuration, it is possible to prevent the table member 10 from rattling due to the gap amount set between the screw shaft 81 and the moving plate 82.
  • the above-mentioned first actuator 30A1 may be replaced with another first actuator 30A3 shown in the figure.
  • the table member 10 shown in FIG. 12 includes a pair of first side wall portions 12A extending in the first direction (X direction) of the two axes orthogonal directions.
  • the first actuator 30A2 is attached to one of the first side wall portions 12A
  • the first actuator 30A3 is attached to the other first side wall portion 12A.
  • the mounting position of the first actuator 30A3 is located on the same straight line L1 as the mounting position of the first actuator 30A1, and the straight line L1 is parallel to the straight line L2 extending in the mounting direction of the first actuator 30A2.
  • the table member 10 can be moved in the X, Y, and ⁇ Z directions by combining the drive directions of the actuators 30 as in the above embodiment.
  • the actuators 30 can be moved in the X, Y, and ⁇ Z directions by combining the drive directions of the actuators 30 as in the above embodiment.
  • two first side wall portions 12A are required, the dimensions and weight are increased by that amount.
  • Alignment device 10 ... Table member, 12 ... Side wall, 12A ... First side wall, 12B ... Second side wall, 20 ... Base member, 30 ... Actuator, 30A1 ... First actuator, 30A2 ... First actuator, 30B ... 2nd actuator, 40 ... facing area, 60 ... 1st linear motion device, 80 ... 2nd linear motion device, 81 ... screw shaft, 82 ... moving plate, 87 ... urging member

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  • General Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • Bearings For Parts Moving Linearly (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

An alignment device (1) is provided with a plurality of actuators (30). The plurality of actuators (30) support side wall sections (12) of a table member (10) from outside of an opposition area (40) wherein a base member (20) and the table member (10) oppose each other, and are arranged in at least two axial directions (X and Y directions). Each of the plurality of actuators (30) is provided with a first linear motion device (60) and a second linear motion device (80). The first linear motion device (60) guides the table member (10) in a direction following the side wall sections (12). The second linear motion device (80) has a moving body and a driving body, supports the first linear motion device (60), and guides the table member (10) in a perpendicular direction which is orthogonal to the side wall sections (12) among the two axial directions. A gap that allows rotation (movement in θZ direction) of the table member (10) is formed between the moving body and the driving body.

Description

アライメント装置、アクチュエータAlignment device, actuator
　本発明は、アライメント装置、アクチュエータに関する。
　本願は、２０２０年２月１３日に、日本に出願された特願２０２０－０２２６６３号に基づき優先権を主張し、その内容をここに援用する。 The present invention relates to an alignment device and an actuator.
The present application claims priority based on Japanese Patent Application No. 2020-022663 filed in Japan on February 13, 2020, the contents of which are incorporated herein by reference.
　従来のアライメント装置は、ベース部材とテーブル部材との間に、テーブル部材を平面移動（Ｘ方向の移動及びＹ方向の移動）させる直動装置を設けるのが通常であった。そのため、テーブル部材の高さ（Ｚ方向の寸法）が大きく、スペースの制約のあるユニット（例えばプロジェクターなどの投影装置）には使用できないという課題があった。 In the conventional alignment device, a linear motion device for moving the table member in a plane (movement in the X direction and movement in the Y direction) is usually provided between the base member and the table member. Therefore, there is a problem that the height of the table member (dimension in the Z direction) is large and the table member cannot be used for a unit having a limited space (for example, a projection device such as a projector).
　下記特許文献１には、アライメント装置の一つとして、ベース部材とテーブル部材とが対向する対向領域の外側に直動装置を設け、テーブル部材の外側からテーブル部材を移動させるテーブル装置が開示されている（特許文献１の図５及び図６など参照）。これにより、テーブル部材の下面をベース部材の上面に接触させるようにして、テーブル部材をガイドすることができる。 Patent Document 1 below discloses a table device as one of the alignment devices, in which a linear motion device is provided outside the facing region where the base member and the table member face each other, and the table member is moved from the outside of the table member. (See FIGS. 5 and 6 of Patent Document 1). As a result, the table member can be guided by bringing the lower surface of the table member into contact with the upper surface of the base member.
日本国特開２０１６－１００５３１号公報Japanese Patent Application Laid-Open No. 2016-100531
　ところで、上記テーブル装置の直動装置は、ロッド及び軸受（回転案内）を介してテーブル部材に接続されている。テーブル装置は、直動装置を含む複数台のアクチュエータを備えており、その中の２台並んだアクチュエータの作動量を変えることで、θＺ方向（回転方向）にテーブル部材を移動させることができる。しかしながら、上記回転案内を設けると、部品点数が増加すると共に、装置全体の重量が増加するという課題があった。 By the way, the linear motion device of the table device is connected to the table member via a rod and a bearing (rotation guide). The table device includes a plurality of actuators including a linear motion device, and the table member can be moved in the θZ direction (rotational direction) by changing the operating amount of the two actuators arranged side by side. However, if the rotation guide is provided, there is a problem that the number of parts increases and the weight of the entire device increases.
　本発明は、上記課題に鑑みてなされたものであり、少ない部品点数でテーブル部材をＸ、Ｙ、θＺ方向に移動でき、且つ、テーブル部材の高さを小さくできるアライメント装置、及び、それに適したアクチュエータの提供を目的とする。 The present invention has been made in view of the above problems, and is suitable for an alignment device capable of moving a table member in the X, Y, and θZ directions with a small number of parts and reducing the height of the table member. The purpose is to provide an actuator.
　上記の課題を解決するために、本発明の一態様に係るアライメント装置は、ベース部材と、側壁部を有し、前記ベース部材と対向するテーブル部材と、前記ベース部材と前記テーブル部材とが対向する対向領域の外側から、前記テーブル部材の前記側壁部を支持すると共に、前記テーブル部材に対し、少なくとも前記ベース部材と前記テーブル部材とが対向する対向方向と直交する２軸直交方向に配置された複数のアクチュエータと、を備え、前記複数のアクチュエータのそれぞれは、前記側壁部に取り付けられ、前記２軸直交方向のうち、前記側壁部に沿う方向に前記テーブル部材を案内する第１直動装置と、移動体と駆動体とを有し、前記第１直動装置を支持し、前記２軸直交方向のうち、前記側壁部に直交する面直方向に前記テーブル部材を案内すると共に、前記対向方向に延びる軸回りの前記テーブル部材の回転を許容しかつ前記移動体と前記駆動体との間に形成された隙間を有する第２直動装置と、を備える。 In order to solve the above problems, the alignment device according to one aspect of the present invention has a base member, a side wall portion, and a table member facing the base member, and the base member and the table member facing each other. From the outside of the facing region, the side wall portion of the table member is supported, and at least the base member and the table member are arranged in a biaxial orthogonal direction orthogonal to the facing direction facing the table member. A first linear motion device including a plurality of actuators, each of which is attached to the side wall portion and guides the table member in a direction along the side wall portion in the two-axis orthogonal directions. It has a moving body and a driving body, supports the first linear motion device, guides the table member in the plane orthogonal direction orthogonal to the side wall portion in the two-axis orthogonal directions, and guides the table member in the facing direction. It is provided with a second linear motion device which allows the table member to rotate about an axis extending in a direction and has a gap formed between the moving body and the driving body.
　また、本発明の一態様に係るアクチュエータは、対象物に取り付けられ、第１ストローク方向に前記対象物を案内する第１直動装置と、前記第１直動装置を支持する移動プレートと、回転によって前記移動プレートを第２ストローク方向に移動させる駆動体と、を有し、前記第１ストローク方向及び前記第２ストローク方向のそれぞれと直交する方向に延びる軸回りの前記対象物の回転を許容しかつ前記移動プレートと前記駆動体との間に形成された隙間を有する第２直動装置と、前記移動プレートを前記第２ストローク方向に付勢する付勢部材と、を備える。 Further, the actuator according to one aspect of the present invention is attached to an object and has a first linear motion device that guides the object in the first stroke direction, a moving plate that supports the first linear motion device, and rotation. It has a driving body that moves the moving plate in the second stroke direction, and allows the object to rotate about an axis extending in a direction orthogonal to each of the first stroke direction and the second stroke direction. It also includes a second linear motion device having a gap formed between the moving plate and the driving body, and an urging member that urges the moving plate in the second stroke direction.
　本発明一態様によれば、少ない部品点数でテーブル部材をＸ、Ｙ、θＺ方向に移動でき、且つ、テーブル部材の高さを小さくできるアライメント装置、及び、それに適したアクチュエータが得られる。 According to one aspect of the present invention, an alignment device capable of moving the table member in the X, Y, and θZ directions with a small number of parts and reducing the height of the table member, and an actuator suitable for the alignment device can be obtained.
本発明の実施形態におけるアライメント装置の斜視図である。It is a perspective view of the alignment apparatus in embodiment of this invention. 本発明の実施形態におけるアライメント装置の平面図である。It is a top view of the alignment apparatus in embodiment of this invention. 本発明の実施形態におけるアクチュエータの斜視図である。It is a perspective view of the actuator in embodiment of this invention. 図３に示す矢視Ａ－Ａ断面図である。FIG. 3 is a cross-sectional view taken along the line AA shown in FIG. 本発明の実施形態におけるアクチュエータが備える第１直動装置の構成図である。It is a block diagram of the 1st linear motion apparatus included in the actuator in embodiment of this invention. 本発明の実施形態におけるアライメント装置の回転動作時の平面図である。It is a top view at the time of the rotational operation of the alignment apparatus in embodiment of this invention. 本発明の実施形態におけるアライメント装置の回転動作時の平面図である。It is a top view at the time of the rotational operation of the alignment apparatus in embodiment of this invention. 本発明の実施形態におけるアライメント装置の平面（水平）動作時の平面図である。It is a top view at the time of the plane (horizontal) operation of the alignment apparatus in embodiment of this invention. 本発明の実施形態におけるアライメント装置の平面（水平）動作時の平面図である。It is a top view at the time of the plane (horizontal) operation of the alignment apparatus in embodiment of this invention. 本発明の実施形態におけるアライメント装置の平面（水平）動作時の平面図である。It is a top view at the time of the plane (horizontal) operation of the alignment apparatus in embodiment of this invention. 本発明の実施形態におけるアライメント装置の平面（水平）動作時の平面図である。It is a top view at the time of the plane (horizontal) operation of the alignment apparatus in embodiment of this invention. 本発明の実施形態の一変形例におけるアライメント装置の平面図である。It is a top view of the alignment apparatus in one modification of the Embodiment of this invention.
　以下、本発明の実施形態について図面を参照して説明する。以下に示す実施形態は、発明の趣旨をより良く理解させるために、例を挙げて説明するものであり、特に指定のない限り、本発明を限定しない。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. The embodiments shown below are described by way of example in order to better understand the gist of the invention, and the present invention is not limited unless otherwise specified.
　図１は、本発明の実施形態におけるアライメント装置１の斜視図である。図２は、本発明の実施形態におけるアライメント装置１の平面図である。
　これらの図に示すように、アライメント装置１は、テーブル部材１０と、ベース部材２０と、複数のアクチュエータ３０と、を備えている。 FIG. 1 is a perspective view of the alignment device 1 according to the embodiment of the present invention. FIG. 2 is a plan view of the alignment device 1 according to the embodiment of the present invention.
As shown in these figures, the alignment device 1 includes a table member 10, a base member 20, and a plurality of actuators 30.
　テーブル部材１０は、ベース部材２０に重なるようにベース部材２０と対向して配置されている。複数のアクチュエータ３０は、ベース部材２０とテーブル部材１０とが対向する対向領域４０の外側から、テーブル部材１０の側壁部１２を支持する。また、複数のアクチュエータ３０は、少なくともベース部材２０とテーブル部材１０とが対向する対向方向と直交する２軸直交方向に配置されている。 The table member 10 is arranged to face the base member 20 so as to overlap the base member 20. The plurality of actuators 30 support the side wall portion 12 of the table member 10 from the outside of the facing region 40 in which the base member 20 and the table member 10 face each other. Further, the plurality of actuators 30 are arranged in a biaxial orthogonal direction at least orthogonal to the opposite direction in which the base member 20 and the table member 10 face each other.
　なお、以下の説明においては、ＸＹＺ直交座標系を設定し、このＸＹＺ直交座標系を参照しつつ各部材の位置関係について説明する。Ｚ方向は、テーブル部材１０とベース部材２０とが対向する対向方向である。Ｘ方向は、対向方向（Ｚ方向）と直交する２軸直交方向のうちの第１方向である。Ｙ方向は、当該２軸直交方向のうちの第２方向である。 In the following description, the XYZ Cartesian coordinate system will be set, and the positional relationship of each member will be described with reference to this XYZ Cartesian coordinate system. The Z direction is a facing direction in which the table member 10 and the base member 20 face each other. The X direction is the first direction of the two-axis orthogonal directions orthogonal to the opposite direction (Z direction). The Y direction is the second direction of the two orthogonal directions.
　テーブル部材１０は、ベース部材２０とＺ方向で対向する平面部１１と、平面部１１の端縁に立設する側壁部１２と、を備えている。平面部１１は、図２に示す平面視で矩形に形成されている。なお、平面部１１は、Ｘ－Ｙ平面に沿って延びる平面形状であれば、図２に示す矩形に限定されない。 The table member 10 includes a flat surface portion 11 facing the base member 20 in the Z direction, and a side wall portion 12 standing on the edge of the flat surface portion 11. The flat surface portion 11 is formed in a rectangular shape in the plan view shown in FIG. The flat surface portion 11 is not limited to the rectangle shown in FIG. 2 as long as it has a planar shape extending along the XY plane.
　側壁部１２は、図１に示すように、第１側壁部１２Ａと、第２側壁部１２Ｂと、を備えている。第１側壁部１２Ａは、上述した２軸直交方向のうちの第１方向（Ｘ方向）に延びる。第２側壁部１２Ｂは、２軸直交方向のうちの第１方向と異なる第２方向（Ｙ方向）に延びる。第１側壁部１２Ａは、平面部１１のＸ方向に延びる一辺の端縁から、ベース部材２０と反対側（＋Ｚ側）に立設している。第２側壁部１２Ｂは、平面部１１のＹ方向に延びる一辺の端縁から、ベース部材２０と反対側（＋Ｚ側）に立設している。 As shown in FIG. 1, the side wall portion 12 includes a first side wall portion 12A and a second side wall portion 12B. The first side wall portion 12A extends in the first direction (X direction) of the two-axis orthogonal directions described above. The second side wall portion 12B extends in a second direction (Y direction) different from the first direction in the two-axis orthogonal directions. The first side wall portion 12A is erected on the opposite side (+ Z side) of the base member 20 from the edge of one side extending in the X direction of the flat surface portion 11. The second side wall portion 12B is erected on the opposite side (+ Z side) of the base member 20 from the edge of one side extending in the Y direction of the flat surface portion 11.
　複数のアクチュエータ３０は、一対の第１アクチュエータ３０Ａ１，３０Ａ２と、第２アクチュエータ３０Ｂと、を含む。一対の第１アクチュエータ３０Ａ１、３０Ａ２は、第１側壁部１２Ａにおいて第１方向（Ｘ方向）に隙間をあけて取り付けられる。第２アクチュエータ３０Ｂは、第２側壁部１２Ｂに取り付けられる。第１アクチュエータ３０Ａ１，３０Ａ２及び第２アクチュエータ３０Ｂは、配置が異なるだけで、構成は同一である。
　以下、アクチュエータ３０の構成について説明する。 The plurality of actuators 30 include a pair of first actuators 30A1 and 30A2 and a second actuator 30B. The pair of first actuators 30A1 and 30A2 are attached to the first side wall portion 12A with a gap in the first direction (X direction). The second actuator 30B is attached to the second side wall portion 12B. The first actuators 30A1 and 30A2 and the second actuator 30B have the same configuration except for the arrangement.
Hereinafter, the configuration of the actuator 30 will be described.
　図３は、本発明の実施形態におけるアクチュエータ３０の斜視図である。図４は、図３に示す矢視Ａ－Ａ断面図である。図５は、本発明の実施形態におけるアクチュエータ３０が備える第１直動装置６０の構成図である。
　図３に示すように、アクチュエータ３０は、ケース５０と、第１直動装置６０と、第２直動装置８０と、を備えている。ケース５０は、ボルト５１を介してベース部材２０に固定されている。 FIG. 3 is a perspective view of the actuator 30 according to the embodiment of the present invention. FIG. 4 is a cross-sectional view taken along the line AA shown in FIG. FIG. 5 is a configuration diagram of a first linear motion device 60 included in the actuator 30 according to the embodiment of the present invention.
As shown in FIG. 3, the actuator 30 includes a case 50, a first linear motion device 60, and a second linear motion device 80. The case 50 is fixed to the base member 20 via a bolt 51.
　第１直動装置６０は、図１に示すように、側壁部１２に取り付けられ、２軸直交方向のうち、側壁部１２に沿う方向にテーブル部材１０を案内する。例えば、第１アクチュエータ３０Ａ１の第１直動装置６０であれば、第１側壁部１２Ａに取り付けられ、２軸直交方向のうち、第１側壁部１２Ａに沿う方向（Ｘ方向、第１ストローク方向）にテーブル部材１０を案内する。第１アクチュエータ３０Ａ２においても同様である。なお、第２アクチュエータ３０Ｂにおいては、第２側壁部１２Ｂに取り付けられ、第２側壁部１２Ｂに沿う方向（Ｙ方向、第２ストローク方向）にテーブル部材１０を案内する。 As shown in FIG. 1, the first linear motion device 60 is attached to the side wall portion 12 and guides the table member 10 in the direction along the side wall portion 12 in the two-axis orthogonal directions. For example, in the case of the first linear motion device 60 of the first actuator 30A1, it is attached to the first side wall portion 12A, and among the two axes orthogonal directions, the direction along the first side wall portion 12A (X direction, first stroke direction). Guide the table member 10. The same applies to the first actuator 30A2. In the second actuator 30B, the table member 10 is attached to the second side wall portion 12B and guides the table member 10 in the direction (Y direction, second stroke direction) along the second side wall portion 12B.
　図５に示すように、第１直動装置６０は、長手方向に沿って転動体転走溝６３が設けられた軌道レール６１と、スライダブロック６２と、複数のボール６５（転動体）と、を備える。スライダブロック６２には、転動体転走溝６３に対向する負荷転動体転走溝６４が設けられる。複数のボール６５（転動体）は、転動体転走溝６３と負荷転動体転走溝６４との間に配置される。 As shown in FIG. 5, the first linear motion device 60 includes a track rail 61 provided with a rolling element rolling groove 63 along the longitudinal direction, a slider block 62, a plurality of balls 65 (rolling bodies), and the like. To be equipped with. The slider block 62 is provided with a load rolling element rolling groove 64 facing the rolling element rolling groove 63. The plurality of balls 65 (rolling bodies) are arranged between the rolling body rolling groove 63 and the load rolling body rolling groove 64.
　軌道レール６１は、断面視略矩形状の長尺部材である。軌道レール６１の幅方向（図５において紙面左右方向）の外側面６１ｂには、軌道レール６１の長手方向（図５において紙面垂直方向）に沿って転動体転走溝６３が形成されている。転動体転走溝６３は、外側面６１ｂに対して略円弧状に窪んでいる。この転動体転走溝６３は、軌道レール６１の左右に一対で形成されている。 The track rail 61 is a long member having a substantially rectangular cross section. A rolling element rolling groove 63 is formed on the outer surface 61b in the width direction of the track rail 61 (left-right direction on the paper surface in FIG. 5) along the longitudinal direction of the track rail 61 (vertical direction on the paper surface in FIG. 5). The rolling element rolling groove 63 is recessed in a substantially arc shape with respect to the outer surface 61b. The rolling element rolling grooves 63 are formed in pairs on the left and right sides of the track rail 61.
　軌道レール６１には、対象物（後述する図４に示す移動プレート８２）に固定されるための固定孔６６（軌道体固定孔）が形成されている。固定孔６６は、軌道レール６１の厚み方向（図５において紙面上下方向）に貫通して形成されている。固定孔６６には、軌道レール６１を固定するボルト（不図示）を、軌道レール６１の上面６１ａよりも低い位置に位置させる座ぐり６６ａが形成されている。 The track rail 61 is formed with a fixing hole 66 (track body fixing hole) for being fixed to an object (moving plate 82 shown in FIG. 4 to be described later). The fixing hole 66 is formed so as to penetrate the track rail 61 in the thickness direction (vertical direction on the paper surface in FIG. 5). The fixing hole 66 is formed with a counterbore 66a for positioning a bolt (not shown) for fixing the track rail 61 at a position lower than the upper surface 61a of the track rail 61.
　スライダブロック６２は、ブロック本体６７と、ブロック本体６７に取り付けられた蓋体６８と、を備える。ブロック本体６７は、軌道レール６１を収容するレール収容溝６９を有する。レール収容溝６９は、ブロック本体６７の下面に開口している。ブロック本体６７の上面である取付面６７ａには、対象物（テーブル部材１０の側壁部１２）を固定するための固定孔７０（移動体固定孔）が形成されている。固定孔７０は、ブロック本体６７の厚み方向に所定の深さで形成されている。固定孔７０は、ネジ孔であり、上記対象物を固定するボルト７２（図４参照）が螺合する。 The slider block 62 includes a block main body 67 and a lid body 68 attached to the block main body 67. The block body 67 has a rail accommodating groove 69 accommodating the track rail 61. The rail accommodating groove 69 is open on the lower surface of the block body 67. A fixing hole 70 (moving body fixing hole) for fixing an object (side wall portion 12 of the table member 10) is formed on the mounting surface 67a which is the upper surface of the block main body 67. The fixing hole 70 is formed at a predetermined depth in the thickness direction of the block body 67. The fixing hole 70 is a screw hole, and a bolt 72 (see FIG. 4) for fixing the object is screwed into the fixing hole 70.
　レール収容溝６９には、軌道レール６１の転動体転走溝６３に対向する負荷転動体転走溝６４が形成されている。負荷転動体転走溝６４は、レール収容溝６９の内側面に対して円弧状に窪んでいる。この負荷転動体転走溝６４は、軌道レール６１を挟むように、スライダブロック６２の左右に一対で形成されている。負荷転動体転走溝６４は、軌道レール６１の転動体転走溝６３と対向し、負荷をかけた状態でボール６５を転動させる負荷転動体転走路Ｃ１を形成する。 The rail accommodating groove 69 is formed with a load rolling element rolling groove 64 facing the rolling element rolling groove 63 of the track rail 61. The load rolling element rolling groove 64 is recessed in an arc shape with respect to the inner surface of the rail accommodating groove 69. The load rolling element rolling groove 64 is formed in pairs on the left and right sides of the slider block 62 so as to sandwich the track rail 61. The load rolling element rolling groove 64 faces the rolling element rolling groove 63 of the track rail 61, and forms a load rolling element rolling path C1 that rolls the ball 65 in a state where a load is applied.
　第１直動装置６０の一例である有限ストローク型リニアガイドは、転動体転走溝６３と負荷転動体転走溝６４との間にケージ（転動体保持部材）が配置され、ボール６５を回転自在に保持する構成を有する。但し、ケージが配置されていないボール６５だけでも同様の効果が得られる。ボール６５は、軌道レール６１とスライダブロック６２との間に介在して、軌道レール６１に対してスライダブロック６２を円滑に移動させる。 In the finite stroke type linear guide which is an example of the first linear motion device 60, a cage (rolling body holding member) is arranged between the rolling element rolling groove 63 and the load rolling element rolling groove 64, and the ball 65 is rotated. It has a structure to hold it freely. However, the same effect can be obtained only with the ball 65 in which the cage is not arranged. The ball 65 is interposed between the track rail 61 and the slider block 62 to smoothly move the slider block 62 with respect to the track rail 61.
　なお、第１直動装置６０は有限ストローク型に限らず、無限循環型リニアガイドでも、軌道レール６１に対してスライダブロック６２を円滑に移動させる。ブロック本体６７には、無負荷転動体転走路Ｃ２が形成されている。無負荷転動体転走路Ｃ２は、ブロック本体６７を長手方向に貫通して形成されている。無負荷転動体転走路Ｃ２の内径は、ボール６５のボール径よりも大きく、ボール６５に負荷をかけないようになっている。この無負荷転動体転走路Ｃ２は、負荷転動体転走溝６４（負荷転動体転走路Ｃ１）に対応して、スライダブロック６２の左右に一対で形成されている。 The first linear motion device 60 is not limited to the finite stroke type, but the infinite circulation type linear guide also smoothly moves the slider block 62 with respect to the track rail 61. A no-load rolling element runway C2 is formed in the block body 67. The no-load rolling element runway C2 is formed so as to penetrate the block body 67 in the longitudinal direction. The inner diameter of the non-load rolling element runway C2 is larger than the ball diameter of the ball 65 so that the ball 65 is not loaded. The non-load rolling element rolling path C2 is formed in pairs on the left and right sides of the slider block 62 corresponding to the load rolling element rolling groove 64 (load rolling element rolling path C1).
　蓋体６８は、ブロック本体６７の長手方向の両端面に取り付けられている。蓋体６８は、ブロック本体６７と同様に、軌道レール６１を収容するレール収容溝７１を有する。蓋体６８には、ブロック本体６７の両端面と対向する対向面に、転動体方向転換路Ｃ３が形成されている。一対の転動体方向転換路Ｃ３は、負荷転動体転走路Ｃ１と無負荷転動体転走路Ｃ２の両端をそれぞれ連結し、ボール６５の無限循環路Ｃを形成する。 The lid body 68 is attached to both end faces in the longitudinal direction of the block body 67. The lid body 68 has a rail accommodating groove 71 accommodating the track rail 61, similarly to the block body 67. The lid body 68 is formed with a rolling element direction turning path C3 on facing surfaces facing both end surfaces of the block body 67. The pair of rolling element direction change paths C3 connect both ends of the load rolling element turning path C1 and the unloaded rolling element turning path C2 to form an infinite circulation path C of the ball 65.
　無限循環路Ｃは、軌道レール６１の長手方向に延びる一対の直線状部分（負荷転動体転走路Ｃ１及び無負荷転動体転走路Ｃ２）と、この一対の直線状部分の端部同士を連結する一対の半円弧曲線状部分（転動体方向転換路Ｃ３）とから構成される。本実施形態では、軌道レール６１の幅方向において間隔をあけ、軌道レール６１の長手方向に沿って平行に延在するように２条の無限循環路Ｃが形成される。 The infinite circulation path C connects a pair of linear portions (load rolling element rolling path C1 and unloaded rolling element rolling path C2) extending in the longitudinal direction of the track rail 61 and the ends of the pair of linear portions. It is composed of a pair of semi-circular curved portions (rolling element direction turning path C3). In the present embodiment, two infinite circulation paths C are formed so as to extend in parallel along the longitudinal direction of the track rail 61 at intervals in the width direction of the track rail 61.
　本実施形態のボール６５は、無限循環路Ｃの内部にほぼ隙間無く配設されて、無限循環路Ｃを循環する。なお、第１直動装置６０は、左右に２条ずつ、計４条の無限循環路Ｃが形成されるものを使用してもよい。 The ball 65 of the present embodiment is arranged inside the infinite circulation path C with almost no gap, and circulates in the infinite circulation path C. As the first linear motion device 60, a device in which two infinite circulation paths C are formed on each side and two on each side may be used.
　図４に示すように、第２直動装置８０は、第１直動装置６０を支持し、２軸直交方向のうち、側壁部１２に対して近接離反する方向（側壁部１２の面直方向とも言う）に、テーブル部材１０を案内する。例えば、第１アクチュエータ３０Ａ１の第２直動装置８０であれば、２軸直交方向のうち、第１側壁部１２Ａに対して近接離反する方向（Ｙ方向）に、テーブル部材１０を案内する。第１アクチュエータ３０Ａ２においても同様である。なお、第２アクチュエータ３０Ｂにおいては、２軸直交方向のうち、第２側壁部１２Ｂに対して近接離反する方向（Ｘ方向）にテーブル部材１０を案内する。 As shown in FIG. 4, the second linear motion device 80 supports the first linear motion device 60, and in the two-axis orthogonal directions, the direction in which the side wall portion 12 is close to and separated from the side wall portion 12 (the plane perpendicular direction of the side wall portion 12). The table member 10 is guided to (also referred to as). For example, in the case of the second linear motion device 80 of the first actuator 30A1, the table member 10 is guided in the direction (Y direction) that is close to and separated from the first side wall portion 12A in the two-axis orthogonal directions. The same applies to the first actuator 30A2. In the second actuator 30B, the table member 10 is guided in the direction (X direction) that is close to and separated from the second side wall portion 12B in the two-axis orthogonal directions.
　第２直動装置８０は、側壁部１２に対して近接離反する方向に延びるねじ軸８１（駆動体）と、ねじ軸８１の回転により側壁部１２に対して近接離反する方向に移動する移動プレート８２（移動体）と、を備えている。移動プレート８２は、平面部８２ａと、逃げ部８２ｂと、支持部８２ｃと、を有する。平面部８２ａは、ねじ軸８１に螺合するねじ孔が形成されている。平面部８２ａは、側壁部１２に近接して配置され、側壁部１２と平行にＺ方向に延びている。 The second linear motion device 80 includes a screw shaft 81 (driving body) extending in a direction of approaching and separating from the side wall portion 12, and a moving plate that moves in a direction of approaching and separating from the side wall portion 12 by rotation of the screw shaft 81. It is equipped with 82 (moving body). The moving plate 82 has a flat surface portion 82a, a relief portion 82b, and a support portion 82c. The flat surface portion 82a is formed with a screw hole to be screwed into the screw shaft 81. The flat surface portion 82a is arranged close to the side wall portion 12 and extends in the Z direction in parallel with the side wall portion 12.
　逃げ部８２ｂは、平面部８２ａの上端部に連接され、側壁部１２から離間する方向に延びている。逃げ部８２ｂは、第１直動装置６０の寸法分、側壁部１２から離間する方向に逃げている。支持部８２ｃは、逃げ部８２ｂの側壁部１２から離間する方向の先端部に連接され、側壁部１２と平行にＺ方向に立設している。支持部８２ｃには、上述した第１直動装置６０の軌道レール６１が、ボルト７３及びナット７４を介して固定されている。 The relief portion 82b is connected to the upper end portion of the flat surface portion 82a and extends in a direction away from the side wall portion 12. The relief portion 82b escapes in a direction away from the side wall portion 12 by the size of the first linear motion device 60. The support portion 82c is connected to the tip end portion of the relief portion 82b in the direction away from the side wall portion 12, and stands parallel to the side wall portion 12 in the Z direction. The track rail 61 of the first linear motion device 60 described above is fixed to the support portion 82c via bolts 73 and nuts 74.
　ねじ軸８１は、図４に示すように、軸受８３を介してケース５０に支持されている。軸受８３の外輪は、バネ受け部材８４を介してケース５０に固定されている。ねじ軸８１には、ウォームホイール８５が取り付けられている。ウォームホイール８５は、ねじ軸８１に螺合する固定ナット８６によって、軸受８３の内輪と共に、ねじ軸８１に固定（軸受８３と共締め）されている。また、側壁部１２のねじ軸８１と対向する位置には孔１２ａが形成されている。これにより、ねじ軸８１と側壁部１２とが直接干渉することが回避される。 As shown in FIG. 4, the screw shaft 81 is supported by the case 50 via a bearing 83. The outer ring of the bearing 83 is fixed to the case 50 via the spring receiving member 84. A worm wheel 85 is attached to the screw shaft 81. The worm wheel 85 is fixed to the screw shaft 81 (co-tightened together with the bearing 83) together with the inner ring of the bearing 83 by a fixing nut 86 screwed to the screw shaft 81. Further, a hole 12a is formed at a position of the side wall portion 12 facing the screw shaft 81. As a result, the screw shaft 81 and the side wall portion 12 are prevented from directly interfering with each other.
　ウォームホイール８５は、図３に示すように、ケース５０に支持されたウォームシャフト８８と噛み合っている。ウォームシャフト８８は、ギアボックス８９を介してモータ９０と接続されている。モータ９０は、例えば、ステッピングモータなどが好ましい。ケース５０は、ウォームシャフト８８の上方に、ギアボックス８９及びモータ９０を支持するモータブラケット５２を備えている。モータブラケット５２は、ボルト５３を介してケース５０に固定されている。 As shown in FIG. 3, the worm wheel 85 meshes with the worm shaft 88 supported by the case 50. The worm shaft 88 is connected to the motor 90 via a gearbox 89. The motor 90 is preferably, for example, a stepping motor or the like. The case 50 includes a motor bracket 52 that supports the gearbox 89 and the motor 90 above the worm shaft 88. The motor bracket 52 is fixed to the case 50 via bolts 53.
　ウォームシャフト８８の両端部は、軸受５５によって軸支される。ウォームシャフト８８の下端を軸支する軸受５５は、ケース５０に固定されている。ウォームシャフト８８の上端を軸支する軸受５５は、モータブラケット５２の下方に横架された軸受ブラケット５４に固定されている。軸受ブラケット５４は、図示しないボルトを介してケース５０に支持されている。 Both ends of the worm shaft 88 are pivotally supported by bearings 55. The bearing 55 that pivotally supports the lower end of the worm shaft 88 is fixed to the case 50. The bearing 55 that pivotally supports the upper end of the worm shaft 88 is fixed to the bearing bracket 54 that is laid below the motor bracket 52. The bearing bracket 54 is supported by the case 50 via bolts (not shown).
　上記構成のアクチュエータ３０によれば、モータ９０及びギアボックス８９を介してウォームシャフト８８を回転させると、図４に示すように、ウォームシャフト８８に噛み合うウォームホイール８５が回転する。ウォームホイール８５が回転すると、ウォームホイール８５と共にねじ軸８１（駆動体）が軸回りに回転し、ねじ軸８１に螺合する移動プレート８２（移動体）が、側壁部１２に対して近接離反する方向にねじ送りされる。これにより、ベース部材２０に対してテーブル部材１０をＸ方向やＹ方向に平面移動させることができる。 According to the actuator 30 having the above configuration, when the worm shaft 88 is rotated via the motor 90 and the gearbox 89, the worm wheel 85 that meshes with the worm shaft 88 rotates as shown in FIG. When the worm wheel 85 rotates, the screw shaft 81 (driving body) rotates about the axis together with the worm wheel 85, and the moving plate 82 (moving body) screwed to the screw shaft 81 moves away from the side wall portion 12. It is screwed in the direction. As a result, the table member 10 can be moved in a plane with respect to the base member 20 in the X direction and the Y direction.
　ところで、ねじ軸８１と移動プレート８２との間には、ベース部材２０に対してテーブル部材１０をθＺ方向（第１ストローク方向及び第２ストローク方向のそれぞれと直交する方向に延びる軸回り）に移動（回転）させるための隙間（クリアランス）が形成されている。後述する図６に示すように、２台の第１アクチュエータ３０Ａ１，３０Ａ２のそれぞれの第２直動装置８０におけるねじ軸８１の送り量を異ならせることで、テーブル部材１０をθＺ方向に移動（回転）させることができる。つまり、アクチュエータ３０は、他の駆動方向のアクチュエータ３０の駆動は第１直動装置６０で受け、テーブル部材１０の回転はねじ軸８１と移動プレート８２のねじ部のクリアランスで受ける。 By the way, between the screw shaft 81 and the moving plate 82, the table member 10 is moved with respect to the base member 20 in the θZ direction (around an axis extending in a direction orthogonal to each of the first stroke direction and the second stroke direction). A gap (clearance) for (rotating) is formed. As shown in FIG. 6 to be described later, the table member 10 is moved (rotated) in the θZ direction by making the feed amount of the screw shaft 81 in the second linear motion device 80 of each of the two first actuators 30A1 and 30A2 different. ) Can be made. That is, the actuator 30 receives the drive of the actuator 30 in the other drive direction by the first linear motion device 60, and the rotation of the table member 10 is received by the clearance between the screw shaft 81 and the screw portion of the moving plate 82.
　図４に示すように、移動プレート８２とバネ受け部材８４との間には、移動プレート８２をねじ軸８１が延びるＹ方向（第２ストローク方向）に付勢する付勢部材８７が配置されている。本実施形態の付勢部材８７は、圧縮ばねであり、ベース部材２０に押し付けるようにテーブル部材１０を付勢する。これにより、付勢部材８７は、上述したねじ軸８１と移動プレート８２との隙間によるテーブル部材１０のガタツキを抑制する。 As shown in FIG. 4, an urging member 87 that urges the moving plate 82 in the Y direction (second stroke direction) in which the screw shaft 81 extends is arranged between the moving plate 82 and the spring receiving member 84. There is. The urging member 87 of the present embodiment is a compression spring, and urges the table member 10 so as to press it against the base member 20. As a result, the urging member 87 suppresses rattling of the table member 10 due to the gap between the screw shaft 81 and the moving plate 82 described above.
　詳しくは、付勢部材８７は、Ｚ方向において、ねじ軸８１と第１直動装置６０との間に配置されている。これにより、移動プレート８２に、ねじ軸８１を支点とし、第１直動装置６０を作用点とする回転モーメントが発生する。このため、ベース部材２０にテーブル部材１０の平面部１１が近接するように移動プレート８２を付勢することができる。これによって、テーブル部材１０の下面をベース部材２０の上面に接触させるようにして、テーブル部材１０をガイドすることができる。 Specifically, the urging member 87 is arranged between the screw shaft 81 and the first linear motion device 60 in the Z direction. As a result, a rotational moment is generated on the moving plate 82 with the screw shaft 81 as the fulcrum and the first linear motion device 60 as the point of action. Therefore, the moving plate 82 can be urged so that the flat surface portion 11 of the table member 10 is close to the base member 20. As a result, the table member 10 can be guided by bringing the lower surface of the table member 10 into contact with the upper surface of the base member 20.
　図６及び図７は、本発明の実施形態におけるアライメント装置１の回転動作時の平面図である。
　例えば、テーブル部材１０を左回転させる場合、図６に示すように、第１アクチュエータ３０Ａ１（詳しくは第２直動装置８０の移動プレート８２、以下同じ）を第１側壁部１２Ａに近接する方向にｍ１だけ駆動させ、第１アクチュエータ３０Ａ２を第１側壁部１２Ａに離反する方向にｍ２だけ駆動させる。 6 and 7 are plan views of the alignment device 1 according to the embodiment of the present invention during rotational operation.
For example, when the table member 10 is rotated counterclockwise, as shown in FIG. 6, the first actuator 30A1 (specifically, the moving plate 82 of the second linear motion device 80, the same applies hereinafter) is moved in a direction close to the first side wall portion 12A. Only m1 is driven, and the first actuator 30A2 is driven by m2 in a direction away from the first side wall portion 12A.
　そうすると、テーブル部材１０は、全体がＺθ方向に移動（回転）すると共に、その中心Ｐが符号Ｍの方向にずれた状態となる。仮にＭの方向が紙面４５°方向の場合、図７に示すように、第２アクチュエータ３０Ｂを第２側壁部１２Ｂに近接する方向にｍ３だけ駆動させると、図６においてずれた中心Ｐが元の位置にもどり、テーブル部材１０の全体が左回転した状態となる。 Then, the entire table member 10 moves (rotates) in the Zθ direction, and its center P shifts in the direction of the symbol M. If the direction of M is the direction of the paper surface of 45 °, as shown in FIG. 7, when the second actuator 30B is driven in the direction close to the second side wall portion 12B by m3, the displaced center P in FIG. 6 becomes the original. After returning to the position, the entire table member 10 is rotated counterclockwise.
　テーブル部材１０の右回転は、上述した駆動量は同じで、ｍ１～ｍ３の矢印の向きを逆にすることで可能となる。なお、Ｍの方向が紙面４５°方向の場合でなくとも、以下に説明する平面動作を組み合わせることで、テーブル部材１０の中心Ｐを元の位置に戻すことができる。 The clockwise rotation of the table member 10 is possible by reversing the directions of the arrows m1 to m3, with the same drive amount described above. Even if the direction of M is not the direction of the paper surface of 45 °, the center P of the table member 10 can be returned to the original position by combining the plane operations described below.
　図８～図１１は、本発明の実施形態におけるアライメント装置１の平面（水平）動作時の平面図である。
　例えば、図８に示すように、第１アクチュエータ３０Ａ１，３０Ａ２を第１側壁部１２Ａに近接する方向にｍ１，ｍ２だけ駆動させ、第２アクチュエータ３０Ｂを第２側壁部１２Ｂに近接する方向にｍ３だけ駆動させると、テーブル部材１０を紙面下方向（Ｍの方向）に移動させることができる。なお、ｍ１～ｍ３の駆動量は同一である。 8 to 11 are plan views of the alignment device 1 according to the embodiment of the present invention when operating in a plane (horizontal).
For example, as shown in FIG. 8, the first actuators 30A1 and 30A2 are driven by m1 and m2 in the direction close to the first side wall portion 12A, and the second actuator 30B is driven only by m3 in the direction close to the second side wall portion 12B. When driven, the table member 10 can be moved in the downward direction (M direction) of the paper surface. The driving amounts of m1 to m3 are the same.
　また、例えば、図９に示すように、第１アクチュエータ３０Ａ１，３０Ａ２を第１側壁部１２Ａに離反する方向にｍ１，ｍ２だけ駆動させ、第２アクチュエータ３０Ｂを第２側壁部１２Ｂに離反する方向にｍ３だけ駆動させると、テーブル部材１０を紙面上方向（Ｍの方向）に移動させることができる。 Further, for example, as shown in FIG. 9, the first actuators 30A1 and 30A2 are driven by m1 and m2 in the direction away from the first side wall portion 12A, and the second actuator 30B is driven in the direction away from the second side wall portion 12B. By driving only m3, the table member 10 can be moved in the paper surface direction (M direction).
　また、例えば、図１０に示すように、第１アクチュエータ３０Ａ１，３０Ａ２を第１側壁部１２Ａに近接する方向にｍ１，ｍ２だけ駆動させ、第２アクチュエータ３０Ｂを第２側壁部１２Ｂに離反する方向にｍ３だけ駆動させると、テーブル部材１０を紙面右方向（Ｍの方向）に移動させることができる。 Further, for example, as shown in FIG. 10, the first actuators 30A1 and 30A2 are driven by m1 and m2 in the direction close to the first side wall portion 12A, and the second actuator 30B is moved away from the second side wall portion 12B. By driving only m3, the table member 10 can be moved in the right direction (M direction) of the paper surface.
　また、例えば、図１１に示すように、第１アクチュエータ３０Ａ１，３０Ａ２を第１側壁部１２Ａに離反する方向にｍ１，ｍ２だけ駆動させ、第２アクチュエータ３０Ｂを第２側壁部１２Ｂに近接する方向にｍ３だけ駆動させると、テーブル部材１０を紙面左方向（Ｍの方向）に移動させることができる。 Further, for example, as shown in FIG. 11, the first actuators 30A1 and 30A2 are driven by m1 and m2 in the direction away from the first side wall portion 12A, and the second actuator 30B is driven in the direction close to the second side wall portion 12B. By driving only m3, the table member 10 can be moved in the left direction (M direction) of the paper surface.
　このように、本実施形態のアライメント装置１によれば、上述した図６～図１１に示すように、各アクチュエータ３０をｍ１～ｍ３の方向に駆動させ、各アクチュエータ３０の駆動の組み合わせによって、テーブル部材１０をＸ、Ｙ、θＺ方向に移動できる。また、アクチュエータ３０は、他の駆動方向のアクチュエータ３０の駆動は第１直動装置６０で受け、テーブル部材１０の回転は、ねじ軸８１と移動プレート８２のねじ部のクリアランスで受ける。そのため、アクチュエータ３０は回転案内を必要としない。さらに、各アクチュエータ３０は、ベース部材２０とテーブル部材１０との対向領域４０の外側に配置されている。そのため、ベース部材２０とテーブル部材１０との間を非常に薄くでき、アライメント装置１はスペースに制約されない。 As described above, according to the alignment device 1 of the present embodiment, as shown in FIGS. 6 to 11 described above, each actuator 30 is driven in the directions of m1 to m3, and the table is determined by the combination of driving of each actuator 30. The member 10 can be moved in the X, Y, and θZ directions. Further, the actuator 30 receives the drive of the actuator 30 in the other drive direction by the first linear motion device 60, and the rotation of the table member 10 is received by the clearance between the screw shaft 81 and the screw portion of the moving plate 82. Therefore, the actuator 30 does not require rotation guidance. Further, each actuator 30 is arranged outside the facing region 40 between the base member 20 and the table member 10. Therefore, the space between the base member 20 and the table member 10 can be made very thin, and the alignment device 1 is not restricted by space.
　したがって、上述した本実施形態によれば、ベース部材２０と、側壁部１２を有し、ベース部材２０と対向するテーブル部材１０と、ベース部材２０とテーブル部材１０とが対向する対向領域４０の外側から、テーブル部材１０の側壁部１２を支持すると共に、テーブル部材１０に対し、少なくともベース部材２０とテーブル部材１０とが対向する対向方向（Ｚ方向）と直交する２軸直交方向（Ｘ，Ｙ方向）に配置された複数のアクチュエータ３０と、を備え、複数のアクチュエータ３０のそれぞれは、側壁部１２に取り付けられ、２軸直交方向のうち、側壁部１２に沿う方向にテーブル部材１０を案内する第１直動装置６０と、移動体（移動プレート８２）と駆動体（ねじ軸８１）とを有し、第１直動装置６０を支持し、２軸直交方向のうち、側壁部１２に直交する面直方向にテーブル部材１０を案内すると共に、対向方向に延びる軸回りのテーブル部材１０の回転（θＺ方向の移動）を許容しかつ移動体（移動プレート８２）と駆動体（ねじ軸８１）との間に形成された隙間を有する第２直動装置８０と、を備える、ことによって、少ない部品点数でテーブル部材１０をＸ、Ｙ、θＺ方向に移動でき、且つ、テーブル部材１０の高さを小さくできるアライメント装置１が得られる。 Therefore, according to the above-described embodiment, the base member 20, the table member 10 having the side wall portion 12 and facing the base member 20, and the outside of the facing region 40 in which the base member 20 and the table member 10 face each other. Therefore, the side wall portion 12 of the table member 10 is supported, and at least in the biaxial orthogonal directions (X, Y directions) orthogonal to the facing direction (Z direction) in which the base member 20 and the table member 10 face each other with respect to the table member 10. ), Each of the plurality of actuators 30 is attached to the side wall portion 12, and guides the table member 10 in the direction along the side wall portion 12 in the two-axis orthogonal directions. It has one linear motion device 60, a moving body (moving plate 82), and a driving body (screw shaft 81), supports the first linear motion device 60, and is orthogonal to the side wall portion 12 in the two-axis orthogonal directions. The table member 10 is guided in the direction perpendicular to the plane, and the rotation (movement in the θZ direction) of the table member 10 around the axis extending in the opposite direction is allowed, and the moving body (moving plate 82) and the driving body (screw shaft 81) By providing a second linear motion device 80 having a gap formed between the two, the table member 10 can be moved in the X, Y, and θZ directions with a small number of parts, and the height of the table member 10 can be increased. An alignment device 1 that can be made smaller can be obtained.
　また、本実施形態では、テーブル部材１０は、側壁部１２として、２軸直交方向のうちの第１方向（Ｘ方向）に延びる第１側壁部１２Ａと、２軸直交方向のうちの第１方向と異なる第２方向（Ｙ方向）に延びる第２側壁部１２Ｂと、を備え、複数のアクチュエータ３０は、第１側壁部１２Ａにおいて第１方向に隙間をあけて取り付けられた一対の第１アクチュエータ３０Ａ１，３０Ａ２と、第２側壁部１２Ｂに取り付けられた第２アクチュエータ３０Ｂと、を含む。この構成によれば、必要最小限のアクチュエータ３０の設置数で、テーブル部材１０をＸ、Ｙ、θＺ方向に移動できる。 Further, in the present embodiment, the table member 10 serves as the side wall portion 12 with the first side wall portion 12A extending in the first direction (X direction) in the two-axis orthogonal directions and the first direction in the two-axis orthogonal directions. A pair of first actuators 30A1 provided with a second side wall portion 12B extending in a second direction (Y direction) different from the above, and the plurality of actuators 30 are attached to the first side wall portion 12A with a gap in the first direction. , 30A2 and a second actuator 30B attached to the second side wall portion 12B. According to this configuration, the table member 10 can be moved in the X, Y, and θZ directions with the minimum number of actuators 30 installed.
　また、本実施形態では、第２直動装置８０の駆動体は、ねじ軸８１であり、第２直動装置８０の移動体は、ねじ軸８１の回転により移動する移動プレート８２であり、移動プレート８２が、第１直動装置６０を支持している。この構成によれば、テーブル部材１０のθＺ方向の移動（回転）をねじ軸８１と移動プレート８２のねじ部のクリアランスで受けるため、回転案内を必要としない。 Further, in the present embodiment, the driving body of the second linear motion device 80 is a screw shaft 81, and the moving body of the second linear motion device 80 is a moving plate 82 that moves by the rotation of the screw shaft 81. The plate 82 supports the first linear motion device 60. According to this configuration, the table member 10 is moved (rotated) in the θZ direction by the clearance between the screw shaft 81 and the screw portion of the moving plate 82, so that rotation guidance is not required.
　また、本実施形態では、複数のアクチュエータ３０のそれぞれは、テーブル部材１０をベース部材２０に押し付ける付勢部材８７を備える。この構成によれば、ねじ軸８１と移動プレート８２との間に設定した隙間量による、テーブル部材１０のガタツキを防止することができる。 Further, in the present embodiment, each of the plurality of actuators 30 includes an urging member 87 that presses the table member 10 against the base member 20. According to this configuration, it is possible to prevent the table member 10 from rattling due to the gap amount set between the screw shaft 81 and the moving plate 82.
　以上、図面を参照しながら本発明の好適な実施形態について説明したが、本発明は上記実施形態に限定されるものではない。上述した実施形態において示した各構成部材の諸形状や組み合わせ等は一例であって、本発明の主旨から逸脱しない範囲において設計要求等に基づき種々変更可能である。 Although the preferred embodiment of the present invention has been described above with reference to the drawings, the present invention is not limited to the above embodiment. The various shapes and combinations of the constituent members shown in the above-described embodiment are examples, and can be variously changed based on design requirements and the like within a range that does not deviate from the gist of the present invention.
　例えば、図１２に示す一変形例のように、上述した第１アクチュエータ３０Ａ１を、同図に示す他の第１アクチュエータ３０Ａ３と置き換えても構わない。図１２に示すテーブル部材１０は、２軸直交方向のうちの第１方向（Ｘ方向）に延びる一対の第１側壁部１２Ａを備えている。一対の第１側壁部１２Ａのうち、一方の第１側壁部１２Ａには、第１アクチュエータ３０Ａ２が取り付けられ、他方の第１側壁部１２Ａには、第１アクチュエータ３０Ａ３が取り付けられている。第１アクチュエータ３０Ａ３の取付位置は、第１アクチュエータ３０Ａ１の取付位置と同一直線Ｌ１上に位置し、直線Ｌ１は第１アクチュエータ３０Ａ２の取付方向に延びる直線Ｌ２と平行である。上記構成であっても、上記実施形態と同様に、各アクチュエータ３０の駆動方向の組み合わせで、テーブル部材１０をＸ、Ｙ、θＺ方向に移動できる。但し、第１側壁部１２Ａが２つ必要となるので、その分の寸法及び重量は増加する。 For example, as in the modified example shown in FIG. 12, the above-mentioned first actuator 30A1 may be replaced with another first actuator 30A3 shown in the figure. The table member 10 shown in FIG. 12 includes a pair of first side wall portions 12A extending in the first direction (X direction) of the two axes orthogonal directions. Of the pair of first side wall portions 12A, the first actuator 30A2 is attached to one of the first side wall portions 12A, and the first actuator 30A3 is attached to the other first side wall portion 12A. The mounting position of the first actuator 30A3 is located on the same straight line L1 as the mounting position of the first actuator 30A1, and the straight line L1 is parallel to the straight line L2 extending in the mounting direction of the first actuator 30A2. Even with the above configuration, the table member 10 can be moved in the X, Y, and θZ directions by combining the drive directions of the actuators 30 as in the above embodiment. However, since two first side wall portions 12A are required, the dimensions and weight are increased by that amount.
　１…アライメント装置、１０…テーブル部材、１２…側壁部、１２Ａ…第１側壁部、１２Ｂ…第２側壁部、２０…ベース部材、３０…アクチュエータ、３０Ａ１…第１アクチュエータ、３０Ａ２…第１アクチュエータ、３０Ｂ…第２アクチュエータ、４０…対向領域、６０…第１直動装置、８０…第２直動装置、８１…ねじ軸、８２…移動プレート、８７…付勢部材 1 ... Alignment device, 10 ... Table member, 12 ... Side wall, 12A ... First side wall, 12B ... Second side wall, 20 ... Base member, 30 ... Actuator, 30A1 ... First actuator, 30A2 ... First actuator, 30B ... 2nd actuator, 40 ... facing area, 60 ... 1st linear motion device, 80 ... 2nd linear motion device, 81 ... screw shaft, 82 ... moving plate, 87 ... urging member

Claims (6)

  1. 　ベース部材と、
    　側壁部を有し、前記ベース部材と対向するテーブル部材と、
    　前記ベース部材と前記テーブル部材とが対向する対向領域の外側から、前記テーブル部材の前記側壁部を支持すると共に、前記テーブル部材に対し、少なくとも前記ベース部材と前記テーブル部材とが対向する対向方向と直交する２軸直交方向に配置された複数のアクチュエータと、を備え、
    　前記複数のアクチュエータのそれぞれは、
    　前記側壁部に取り付けられ、前記２軸直交方向のうち、前記側壁部に沿う方向に前記テーブル部材を案内する第１直動装置と、
    　移動体と駆動体を有し、前記第１直動装置を支持し、前記２軸直交方向のうち、前記側壁部に直交する面直方向に前記テーブル部材を案内すると共に、前記対向方向に延びる軸回りの前記テーブル部材の回転を許容しかつ前記移動体と前記駆動体の間に形成された隙間を有する第２直動装置と、を備える、アライメント装置。     With the base member
    A table member having a side wall and facing the base member,
    From the outside of the facing region where the base member and the table member face each other, the side wall portion of the table member is supported, and at least in the direction in which the base member and the table member face each other with respect to the table member. It is provided with a plurality of actuators arranged in orthogonal directions on two axes orthogonal to each other.
    Each of the plurality of actuators
    A first linear motion device attached to the side wall portion and guiding the table member in a direction along the side wall portion in the two-axis orthogonal directions.
    It has a moving body and a driving body, supports the first linear motion device, guides the table member in the plane orthogonal direction orthogonal to the side wall portion in the two-axis orthogonal directions, and extends in the opposite direction. An alignment device comprising a second linear motion device that allows rotation of the table member around an axis and has a gap formed between the moving body and the driving body.
  2. 　前記テーブル部材は、前記側壁部として、前記２軸直交方向のうちの第１方向に延びる第１側壁部と、前記２軸直交方向のうちの前記第１方向と異なる第２方向に延びる第２側壁部と、を備え、
    　前記複数のアクチュエータは、前記第１側壁部において前記第１方向に隙間をあけて取り付けられた一対の第１アクチュエータと、前記第２側壁部に取り付けられた第２アクチュエータと、を含む、請求項１に記載のアライメント装置。     As the side wall portion, the table member has a first side wall portion extending in the first direction in the two-axis orthogonal directions and a second side wall portion extending in a second direction different from the first direction in the two-axis orthogonal directions. With side walls,
    The plurality of actuators include a pair of first actuators attached to the first side wall portion with a gap in the first direction, and a second actuator attached to the second side wall portion. The alignment device according to 1.
  3. 　前記第２直動装置の駆動体は、ねじ軸であり、
    　前記第２直動装置の移動体は、前記ねじ軸の回転により移動する移動プレートであり、
    　前記移動プレートが、前記第１直動装置を支持している、請求項１または２に記載のアライメント装置。     The driving body of the second linear motion device is a screw shaft.
    The moving body of the second linear motion device is a moving plate that moves by rotation of the screw shaft.
    The alignment device according to claim 1 or 2, wherein the moving plate supports the first linear motion device.
  4. 　前記複数のアクチュエータのそれぞれは、
    　前記テーブル部材を前記ベース部材に押し付ける付勢部材を備える、請求項１～３のいずれか一項に記載のアライメント装置。     Each of the plurality of actuators
    The alignment device according to any one of claims 1 to 3, further comprising an urging member that presses the table member against the base member.
  5. 　対象物に取り付けられ、第１ストローク方向に前記対象物を案内する第１直動装置と、
    　前記第１直動装置を支持する移動プレートと、回転によって前記移動プレートを第２ストローク方向に移動させる駆動体と、を有し、前記第１ストローク方向及び前記第２ストローク方向のそれぞれと直交する方向に延びる軸回りの前記対象物の回転を許容しかつ前記移動プレートと前記駆動体との間に形成された隙間を有する第２直動装置と、
    　前記移動プレートを前記第２ストローク方向に付勢する付勢部材と、を備える、アクチュエータ。     A first linear motion device attached to an object and guiding the object in the first stroke direction,
    It has a moving plate that supports the first linear motion device and a driving body that moves the moving plate in the second stroke direction by rotation, and is orthogonal to each of the first stroke direction and the second stroke direction. A second linear motion device that allows rotation of the object around an axis extending in a direction and has a gap formed between the moving plate and the driving body.
    An actuator comprising an urging member that urges the moving plate in the second stroke direction.
  6. 　前記第１ストローク方向と前記第２ストローク方向は、互いに異なる方向である、請求項５に記載のアクチュエータ。 The actuator according to claim 5, wherein the first stroke direction and the second stroke direction are different directions from each other.
PCT/JP2021/003937 2020-02-13 2021-02-03 Alignment device and actuator WO2021161872A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61230836A (en) * 1985-03-29 1986-10-15 エヌ・ベー・フイリツプス・フルーイランペンフアブリケン Positioning device
JPH03117537U (en) * 1990-03-13 1991-12-04
JPH0825163A (en) * 1994-07-21 1996-01-30 Ushio Inc Stage device
WO2017017988A1 (en) * 2015-07-30 2017-02-02 日本精工株式会社 Table device, positioning device, flat-panel display manufacturing device, and precision machine

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61230836A (en) * 1985-03-29 1986-10-15 エヌ・ベー・フイリツプス・フルーイランペンフアブリケン Positioning device
JPH03117537U (en) * 1990-03-13 1991-12-04
JPH0825163A (en) * 1994-07-21 1996-01-30 Ushio Inc Stage device
WO2017017988A1 (en) * 2015-07-30 2017-02-02 日本精工株式会社 Table device, positioning device, flat-panel display manufacturing device, and precision machine

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