WO2018198960A1 - フルオレン化合物を用いたレジスト下層膜形成組成物 - Google Patents
フルオレン化合物を用いたレジスト下層膜形成組成物 Download PDFInfo
- Publication number
- WO2018198960A1 WO2018198960A1 PCT/JP2018/016274 JP2018016274W WO2018198960A1 WO 2018198960 A1 WO2018198960 A1 WO 2018198960A1 JP 2018016274 W JP2018016274 W JP 2018016274W WO 2018198960 A1 WO2018198960 A1 WO 2018198960A1
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- WO
- WIPO (PCT)
- Prior art keywords
- group
- underlayer film
- resist underlayer
- hydroxy
- resist
- Prior art date
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- 239000000203 mixture Substances 0.000 title claims abstract description 106
- -1 fluorene compound Chemical class 0.000 title claims description 129
- 230000015572 biosynthetic process Effects 0.000 title abstract description 27
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N o-biphenylenemethane Natural products C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 title 1
- 150000001875 compounds Chemical class 0.000 claims abstract description 73
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 61
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 43
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims abstract description 41
- 125000006165 cyclic alkyl group Chemical group 0.000 claims abstract description 39
- 239000004065 semiconductor Substances 0.000 claims abstract description 32
- 238000000034 method Methods 0.000 claims abstract description 30
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims abstract description 28
- 238000005530 etching Methods 0.000 claims abstract description 24
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- 238000012545 processing Methods 0.000 claims abstract description 7
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- 239000011347 resin Substances 0.000 claims description 49
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- 125000003277 amino group Chemical group 0.000 claims description 35
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 33
- 125000004093 cyano group Chemical group *C#N 0.000 claims description 33
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- 125000004191 (C1-C6) alkoxy group Chemical group 0.000 claims description 27
- 125000004454 (C1-C6) alkoxycarbonyl group Chemical group 0.000 claims description 27
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- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 claims description 27
- 229910052717 sulfur Inorganic materials 0.000 claims description 27
- 238000006243 chemical reaction Methods 0.000 claims description 22
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- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 20
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- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 9
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- 125000006850 spacer group Chemical group 0.000 description 7
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- 230000008859 change Effects 0.000 description 6
- RWRIWBAIICGTTQ-UHFFFAOYSA-N difluoromethane Chemical compound FCF RWRIWBAIICGTTQ-UHFFFAOYSA-N 0.000 description 6
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 6
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 6
- 125000002816 methylsulfanyl group Chemical group [H]C([H])([H])S[*] 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
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- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 5
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- YIWGJFPJRAEKMK-UHFFFAOYSA-N 1-(2H-benzotriazol-5-yl)-3-methyl-8-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carbonyl]-1,3,8-triazaspiro[4.5]decane-2,4-dione Chemical compound CN1C(=O)N(c2ccc3n[nH]nc3c2)C2(CCN(CC2)C(=O)c2cnc(NCc3cccc(OC(F)(F)F)c3)nc2)C1=O YIWGJFPJRAEKMK-UHFFFAOYSA-N 0.000 description 3
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- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- 239000005051 trimethylchlorosilane Substances 0.000 description 1
- 125000003960 triphenylenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3C3=CC=CC=C3C12)* 0.000 description 1
- 229920000785 ultra high molecular weight polyethylene Polymers 0.000 description 1
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- HGBOYTHUEUWSSQ-UHFFFAOYSA-N valeric aldehyde Natural products CCCCC=O HGBOYTHUEUWSSQ-UHFFFAOYSA-N 0.000 description 1
- 125000003774 valeryl group Chemical group O=C([*])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
- 125000001834 xanthenyl group Chemical group C1=CC=CC=2OC3=CC=CC=C3C(C12)* 0.000 description 1
Classifications
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/094—Multilayer resist systems, e.g. planarising layers
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- C08G61/12—Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D165/00—Coating compositions based on macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain; Coating compositions based on derivatives of such polymers
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- G—PHYSICS
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31144—Etching the insulating layers by chemical or physical means using masks
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- C08G2261/3162—Arylamines
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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Definitions
- the present invention is a resist underlayer film forming composition having both high etching resistance, high heat resistance and good coatability, a resist underlayer film using the resist underlayer film forming composition, a method for producing the resist underlayer film, a method for forming a resist pattern, And a method of manufacturing a semiconductor device.
- Resist underlayer film materials for multilayer lithography processes Patent Document 1
- arylene groups, or heterocyclic groups, including phenyl naphthylamine novolak resins Patent Document 2
- An underlayer film produced from a resist underlayer film forming composition for lithography containing a polymer containing a unit structure containing sulfite Patent Document 2
- a lithography process is known in which at least two resist underlayer films are formed and the resist underlayer films are used as a mask material in order to reduce the thickness of the resist layer required in accordance with the miniaturization of resist patterns.
- This is because at least one organic film (lower organic film) and at least one inorganic lower film are provided on a semiconductor substrate, and the inorganic lower layer film is patterned using the resist pattern formed on the upper resist film as a mask.
- an organic resin for example, acrylic resin, novolak resin
- an inorganic material silicon resin (for example, organopolysiloxane), inorganic silicon compound (for example, SiON, SiO2), etc.) Combinations are listed. Further, in recent years, a double patterning technique in which lithography is performed twice and etching is performed twice in order to obtain one pattern has been widely applied, and the above-described multilayer process is used in each process.
- the resist underlayer film forming composition is preferably applied and formed on a semiconductor substrate using a spin coater from the viewpoint of productivity and economy.
- a coating type resist underlayer film forming composition needs to have good coating properties.
- the present invention has been made on the basis of solving such problems, and an object thereof is to provide a resist underlayer film forming composition having both high etching resistance, high heat resistance and good coating properties. Another object of the present invention is to provide a resist underlayer film using the resist underlayer film forming composition, a method for manufacturing the resist underlayer film, a method for forming a resist pattern, and a method for manufacturing a semiconductor device.
- the present invention provides a resist underlayer film composition containing a novel compound that provides functions such as high etching resistance and high heat resistance, and produces a resist underlayer film using the same, thereby achieving the above characteristics. It is.
- a resist underlayer film forming composition comprising a compound represented by the following formula (1): [In Formula (1), Represents a single bond or a double bond, X 1 represents —N (R 1 ) — or —CH (R 1 ) —, X 2 represents —N (R 2 ) — or —CH (R 2 ) —, X 3 represents —N ⁇ , —CH ⁇ , —N (R 3 ) — or —CH (R 3 ) —, X 4 represents —N ⁇ , —CH ⁇ , —N (R 4 ) — or —CH (R 4 ) —, R 1 , R 2 , R 3 and R 4 are the same or different and are each a hydrogen atom, a C1-20 linear, branched or cyclic alkyl group, a C6-20 aryl group, a C2-10 alkenyl group, C2-10 represents an alkynyl group, carboxyl group
- the alkenyl group and alkynyl group may have one or more groups selected from the group consisting of amino group, nitro group, cyano group, hydroxy group, glycidyl group and carboxyl group, R 7 and R 8 are the same or different and each represents a benzene ring or a naphthalene ring, n and o are 0 or 1.
- R 1 , R 2 , R 3 or R 4 in the formula (1) may be substituted with a hydroxy group or a hydroxy group, and may be interrupted with an oxygen atom or a sulfur atom.
- a resist comprising a compound containing one or more repeating units a, b, c, d, e, f, g, h, i represented by the following formula (2). Underlayer film forming composition.
- the alkenyl group and alkynyl group may have one or more groups selected from the group consisting of amino group, nitro group, cyano group, hydroxy group, glycidyl group and carboxyl group, R 7 and R 8 are the same or different and each represents a benzene ring or a naphthalene ring, n and o are 0 or 1, B 1 and B 2 are the same or different and are each a C1-20 linear, branched or cyclic alkyl group which may be interrupted by a hydrogen atom, an oxygen atom or a sulfur atom, or a C6-40 aryl group and a C6 Represents a group derived from an aromatic compound selected from the group consisting of ⁇ 40 heterocyclic groups, and B 1 and B 2 together with the carbon atom to which they are bonded may form a ring,
- the hydrogen atom of the group derived from the compound is substituted with a C1-20 alkyl group, phenyl group, conden
- a resist underlayer film forming composition A resist underlayer film forming composition.
- Formula (3) Represents a single bond or a double bond, X 1 represents -N ⁇ or -CH ⁇ X 2 represents -N ⁇ or -CH ⁇ , X 3 represents —N ⁇ , —CH ⁇ , —N (R 3 ) — or —CH (R 3 ) —, X 4 represents —N ⁇ , —CH ⁇ , —N (R 4 ) — or —CH (R 4 ) —, R 3 and R 4 are the same or different and are each a hydrogen atom, a C1-20 linear, branched or cyclic alkyl group, a C6-20 aryl group, a C2-10 alkenyl group, a C2-10 alkynyl group.
- the alkenyl group and alkynyl group may have one or more groups selected from the group consisting of amino group, nitro group, cyano group, hydroxy group, glycidyl group and carboxyl group, R 7 and R 8 are the same or different and each represents a benzene ring or a naphthalene ring, n and o are 0 or 1, p and q are integers from 0 to 20,
- the p methylene groups and the q methylene groups may be interrupted by an oxygen atom or a sulfur atom when there are two or more, B 3 is a direct bond or substituted with a C1-20 alkyl group, phenyl group, condensed ring group, heterocyclic group, hydroxy group, amino group, ether group, alkoxy group, cyano group, nitro group or carboxyl group.
- X 1 represents —N (R 1 ) — or —CH (R 1 ) —
- X 2 represents —N (R 2 ) — or —CH (R 2 ) —
- X 3 represents —N ⁇ , —CH ⁇ , —N (R 3 ) — or —CH (R 3 ) —
- X 4 represents —N ⁇ , —CH ⁇ , —N (R 4 ) — or —CH (R 4 ) —
- R 1 , R 2 , R 3 and R 4 are the same or different and are each a hydrogen atom, a C1-20 linear, branched or cyclic alkyl group, a C6-20 aryl group, a C2-10 alkenyl group, C2-10 represents an alkynyl group, carboxyl group or cyano group, and the alkyl group and aryl group are a C1-6 acyl group, a C1-6 acyl group, a C1-6 acyl
- the alkenyl group and alkynyl group may have one or more groups selected from the group consisting of amino group, nitro group, cyano group, hydroxy group, glycidyl group and carboxyl group, R 7 and R 8 are the same or different and each represents a benzene ring or a naphthalene ring, n and o are 0 or 1.
- R 1 , R 2 , R 3 or R 4 in the formula (1) may be substituted with a hydroxy group or a hydroxy group, and may be interrupted with an oxygen atom or a sulfur atom.
- a method for producing a resist underlayer film comprising a step of applying and baking the resist underlayer film forming composition according to any one of [1] to [8] on a semiconductor substrate.
- a step of forming a resist underlayer film with a resist underlayer film forming composition according to any one of [1] to [8] on a semiconductor substrate, a step of forming a resist film thereon, light or electrons A method for manufacturing a semiconductor device, comprising: a step of forming a resist pattern by irradiating and developing a line; a step of etching the lower layer film with a resist pattern; and a step of processing a semiconductor substrate with a patterned lower layer film.
- a step of forming a resist underlayer film on the semiconductor substrate with the resist underlayer film forming composition according to any one of [1] to [8], a step of forming a hard mask thereon, and further thereon A step of forming a resist film, a step of forming a resist pattern by light and electron beam irradiation and development, a step of etching a hard mask with a resist pattern, a step of etching the lower layer film with a patterned hard mask, and a pattern
- a method for manufacturing a semiconductor device comprising a step of processing a semiconductor substrate with a patterned resist underlayer film.
- a step of reacting a compound of the following formula (1) with one or more aldehyde compounds a step of reacting a compound of the following formula (1) with one or more aromatic compounds, or the following formula (1)
- a method for producing a resin for a resist underlayer film-forming composition comprising a step of reacting the above compound, one or more aromatic compounds and one or more aldehyde compounds.
- X 1 represents —N (R 1 ) — or —CH (R 1 ) —
- X 2 represents —N (R 2 ) — or —CH (R 2 ) —
- X 3 represents —N ⁇ , —CH ⁇ , —N (R 3 ) — or —CH (R 3 ) —
- X 4 represents —N ⁇ , —CH ⁇ , —N (R 4 ) — or —CH (R 4 ) —
- R 1 , R 2 , R 3 and R 4 are the same or different and are each a hydrogen atom, a C1-20 linear, branched or cyclic alkyl group, a C6-20 aryl group, a C2-10 alkenyl group, C2-10 represents an alkynyl group, carboxyl group or cyano group, and the alkyl group and aryl group are a C1-6 acyl group, a C1-6 acyl group, a C1-6 acyl
- the alkenyl group and alkynyl group may have one or more groups selected from the group consisting of amino group, nitro group, cyano group, hydroxy group, glycidyl group and carboxyl group, R 7 and R 8 are the same or different and each represents a benzene ring or a naphthalene ring, n and o are 0 or 1. ]
- the resist underlayer film material of the present invention not only has high etching resistance and high heat resistance, but also has high solubility, so that it has excellent spin coatability and achieves finer substrate processing.
- the resist underlayer film forming composition of the present invention is effective for a lithography process in which at least two resist underlayer films for the purpose of reducing the resist film thickness are formed and the resist underlayer film is used as an etching mask. is there.
- the resist underlayer film forming composition according to the present invention is a polymer derived from a compound represented by the formula (1) and / or a compound represented by the formula (1), preferably a crosslinking agent, It contains an acid and / or an acid generator, a solvent and other components. This will be described in order below.
- the resist underlayer film forming composition according to the present invention may contain a compound represented by the following formula (1).
- X 1 represents —N (R 1 ) — or —CH (R 1 ) —
- X 2 represents —N (R 2 ) — or —CH (R 2 ) —
- X 3 represents —N ⁇ , —CH ⁇ , —N (R 3 ) — or —CH (R 3 ) —
- X 4 represents —N ⁇ , —CH ⁇ , —N (R 4 ) — or —CH (R 4 ) —
- the alkenyl group and alkynyl group may have one or more groups selected from the group consisting of amino group, nitro group, cyano group, hydroxy group, glycidyl group and carboxyl group, R 7 and R 8 are the same or different and each represents a benzene ring or a naphthalene ring, n and o are 0 or 1. ]
- Is preferably a double bond.
- At least one of X 1 , X 2 , X 3 and X 4 contains a nitrogen atom.
- X 1 preferably represents —N (R 1 ) —.
- X 2 preferably represents —N (R 2 ) —.
- X 3 preferably represents —CH ⁇ .
- X 4 preferably represents —CH ⁇ .
- Examples of the acyl group of C1-6 in R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 9 and R 10 include formyl group, acetyl group, propionyl group, butyryl group, isobutyryl group, valeryl group And isovaleryl group.
- C1-6 alkoxy groups include methoxy group, ethoxy group, n-propoxy group, isopropoxy group, n-butoxy group, isobutoxy group, tert-butoxy group, sec-butoxy group, n-pentoxy group, neopentoxy group, An n-hexyloxy group, an isohexyloxy group, a 3-methylpentoxy group and the like can be mentioned, and a methoxy group or an ethoxy group is preferable.
- C1-6 alkoxycarbonyl groups include methoxycarbonyl group, ethoxycarbonyl group, n-propoxycarbonyl group, i-propoxycarbonyl group, n-butoxycarbonyl group, i-butoxycarbonyl group, sec-butoxycarbonyl group, tert- A butoxycarbonyl group, an n-pentyloxycarbonyl group, an n-hexyloxycarbonyl group and the like can be mentioned, and a methoxycarbonyl group or an ethoxycarbonyl group is preferable.
- C1-C20 linear, branched or cyclic alkyl group which may be substituted with an amino group, a glycidyl group or a hydroxy group and may be interrupted with an oxygen atom or a sulfur atom
- C1 Examples of the alkyl group in “ ⁇ 10 linear, branched or cyclic alkyl group” include methyl group, ethyl group, n-propyl group, n-butyl group, n-pentyl group, n-hexyl group and n-heptyl group.
- linear alkyl group such as n-octyl group, n-nonyl group, n-decyl group, isopropyl group, sec-butyl group, tert-butyl group, isopentyl group, neopentyl group, 1-methylpentyl group, isohexyl group
- Branched chain alkyl groups such as 1-propylbutyl group, 2-ethylhexyl group and isononyl group, cyclopropyl group, cyclobutyl group, cyclope
- examples thereof include cyclic alkyl groups such as til group, cyclohexyl group, p-tert-butylcyclohexyl group and adamantyl group, but include methyl group, ethyl group, n-propyl group, n-butyl group, isopropyl group, sec- A butyl group and a tert-butyl
- alkyl group is interrupted by oxygen or sulfur atoms C1 ⁇ 20, for example, structural units -CH 2 -O -, - include those containing CH 2 -S-.
- —O— and —S— may be one unit or two or more units in the alkyl group.
- Specific examples of the C1-20 alkyl group interrupted by —O— and —S— units are a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a methylthio group, an ethylthio group, a propylthio group, a butylthio group, and the like.
- a methoxy group, an ethoxy group, a methylthio group, and an ethylthio group are preferable, and a methoxy group and an ethoxy group are more preferable.
- Examples of the C6-20 aryl group include a phenyl group, a naphthyl group, a biphenyl group, an anthracyl group, a phenanthsyl group, and a pyrenyl group, and a phenyl group, a naphthyl group, and a biphenyl group are preferable.
- Examples of the C2-10 or C2-20 alkenyl group include a vinyl group, a propenyl group, and a butenyl group, and a vinyl group is preferred.
- Examples of the C2-10 alkynyl group include ethynyl, propynyl, butynyl, pentynyl, hexynyl, heptynyl, octynyl, nonynyl, decynyl, butadiynyl, pentadiynyl, hexadiynyl, heptadiynyl, octadiynyl, nonadiynyl, decadiynyl group and the like.
- Propynyl and butynyl are preferred.
- R 1 , R 2 , R 3 and R 4 are preferably a C1-20 straight chain optionally substituted with a hydroxy group or a hydroxy group and optionally interrupted with an oxygen atom or a sulfur atom, A branched or cyclic alkyl group.
- Preferred is a hydroxy group or a C1-20 linear, branched or cyclic alkyl group which may be substituted with a hydroxy group.
- the resist underlayer film forming composition according to the present invention contains a polymer derived from the compound represented by the formula (1) in addition to or instead of the compound represented by the formula (1). Can do.
- Examples of the polymer derived from the compound represented by the formula (1) include 1 or more of repeating units a, b, c, d, e, f, g, h, i represented by the following formula (2).
- the compound which contains a unit or more can be mentioned.
- R 1 , R 2 , R 3 and R 4 are hydrogen atoms
- N is secondary nitrogen
- C is secondary carbon
- R 1 , R 2 , R 3 and R 4 are When it is not a hydrogen atom
- the above N is any tertiary nitrogen
- C is any tertiary carbon
- R 1 , R 2 , R 3 and R 4 are the same or different and are each a hydrogen atom, a C1-20 linear, branched or cyclic alkyl group, a C6-20 aryl group, a C2-10 alkenyl group
- C2-10 represents an alkynyl group, carboxyl group or cyano group
- the alkyl group and aryl group are a C1-6 acyl group, a C1-6 alkoxy group, a C1-6 alkoxycarbonyl group, an amino group, a glycidyl group
- the alkenyl group and alkynyl group may have one or more groups selected from the group consisting of amino group, nitro group, cyano group, hydroxy group, glycidyl group and carboxyl group, R 7 and R 8 are the same or different and each represents a benzene ring or a naphthalene ring, n and o are 0 or 1, B 1 and B 2 are the same or different and are each a C1-20 linear, branched or cyclic alkyl group which may be interrupted by a hydrogen atom, an oxygen atom or a sulfur atom, or a C6-40 aryl group and a C6 Represents a group derived from an aromatic compound selected from the group consisting of ⁇ 40 heterocyclic groups, and B 1 and B 2 together with the carbon atom to which they are bonded may form a ring,
- the hydrogen atom of the group derived from the compound is substituted with a C1-20 alkyl group, phenyl group, conden
- the C6-40 aryl group and C6-40 heterocyclic group in the definitions of B 1 and B 2 may be (a) a group derived from a single ring such as benzene, or (b) It may be a group derived from a condensed ring, or (c) a group derived from a heterocyclic ring such as furan, thiophene or pyridine, and (d) an aromatic group of (a) to (c) such as biphenyl.
- Preferred aromatic rings are benzene ring, thiophene ring, furan ring, pyridine ring, pyrimidine ring, pyrazine ring, pyrrole ring, oxazole ring, thiazole ring, imidazole ring, naphthalene ring, anthracene ring, quinoline ring, carbazole ring, quinazoline ring , Purine ring, indolizine ring, benzothiophene ring, benzofuran ring, indole ring, and acridine ring.
- More preferred aromatic rings are benzene ring, thiophene ring, furan ring, pyridine ring, pyrimidine ring, pyrrole ring, oxazole ring, thiazole ring, imidazole ring, and carbazole ring.
- the above aromatic rings may be connected by a single bond or a spacer.
- the condensed ring group is a substituent derived from a condensed ring compound, and specific examples include phenyl group, naphthyl group, anthracenyl group, phenanthrenyl group, naphthacenyl group, triphenylenyl group, pyrenyl group and chrysenyl group. Among these, a phenyl group, a naphthyl group, an anthracenyl group and a pyrenyl group are preferable.
- a heterocyclic group is a substituent derived from a heterocyclic compound, and specifically includes a thiophene group, a furan group, a pyridine group, a pyrimidine group, a pyrazine group, a pyrrole group, an oxazole group, a thiazole group, an imidazole group, and a quinoline.
- polymer derived from the compound represented by the formula (1) one of repeating units j, k, l, m, r, s, t, u, v, w represented by the following formula (3) Examples include compounds containing one or more units.
- Formula (3) Represents a single bond or a double bond, X 1 represents -N ⁇ or -CH ⁇ X 2 represents -N ⁇ or -CH ⁇ , X 3 represents —N ⁇ , —CH ⁇ , —N (R 3 ) — or —CH (R 3 ) —, X 4 represents —N ⁇ , —CH ⁇ , —N (R 4 ) — or —CH (R 4 ) —, R 3 and R 4 are the same or different and are each a hydrogen atom, a C1-20 linear, branched or cyclic alkyl group, a C6-20 aryl group, a C2-10 alkenyl group, a C2-10 alkynyl group.
- the alkenyl group and alkynyl group may have one or more groups selected from the group consisting of amino group, nitro group, cyano group, hydroxy group, glycidyl group and carboxyl group, R 7 and R 8 are the same or different and each represents a benzene ring or a naphthalene ring, n and o are 0 or 1, p and q are integers from 0 to 20,
- the p methylene groups and the q methylene groups may be interrupted by an oxygen atom or a sulfur atom when there are two or more, B 3 is a direct bond or substituted with a C1-20 alkyl group, phenyl group, condensed ring group, heterocyclic group, hydroxy group, amino group, ether group, alkoxy group, cyano group, nitro group or carboxyl group. Or a group derived from a C6-40 aromatic compound. ]
- a resin for a resist underlayer film forming composition according to the present invention comprises a step of reacting a compound of formula (1) with one or more aldehyde compounds, a compound of formula (1) and one or more types of compounds. It can be produced by a method comprising a step of reacting an aromatic compound or a step of reacting a compound of the above formula (1) with one or more aromatic compounds and one or more aldehyde compounds.
- aldehyde compounds include formaldehyde, paraformaldehyde, acetaldehyde, trioxane, propionaldehyde, butyraldehyde, trimethylacetaldehyde, acrolein, crotonaldehyde, cyclohexanealdehyde, furfural, furylacrolein, benzaldehyde, terephthalaldehyde, phenylacetaldehyde, ⁇ -phenylpropylaldehyde, ⁇ -phenylpropylaldehyde, o-hydroxybenzaldehyde, m-hydroxybenzaldehyde, p-hydroxybenzaldehyde, o-methylbenzaldehyde, m-methylbenzaldehyde, p-methylbenzaldehyde, o-chlorobenzaldehyde, m-chlorobenzaldehyde, p-chlorobenzal
- the aromatic compound is preferably a C6-40 aromatic compound that derives the divalent group —C (B 1 ) (B 2 ) — or —B 3 —, and the polymer of the above formula (2) or (3) It is one component for constituting.
- the aromatic compound may be (a) a monocyclic compound such as benzene, (b) a condensed ring compound such as naphthalene, or (c) a complex such as furan, thiophene, or pyridine.
- Aromatic compounds include benzene, thiophene, furan, pyridine, pyrimidine, pyrazine, pyrrole, oxazole, thiazole, imidazole, naphthalene, anthracene, quinoline, carbazole, quinazoline, purine, indolizine, benzothiophene, benzofuran, indole, acridine, etc. Is mentioned.
- aromatic amine or a phenolic hydroxy group-containing compound is preferable.
- aromatic amines include phenylindole and phenylnaphthylamine.
- phenolic hydroxy group-containing compounds include phenol, dihydroxybenzene, trihydroxybenzene, hydroxynaphthalene, dihydroxynaphthalene, trihydroxynaphthalene, tris (4-hydroxyphenyl) methane, tris (4-hydroxyphenyl) ethane, 1,1, Examples include 2,2-tetrakis (4-hydroxyphenyl) ethane.
- the hydrogen atom of the C6-40 aromatic compound is a C1-20 alkyl group, phenyl group, condensed ring group, heterocyclic group, hydroxy group, amino group, ether group, alkoxy group, cyano group, nitro group or carboxyl group. It may be substituted with a group.
- the divalent group is a divalent group derived from a C6-40 arylamine compound.
- the above aromatic compound may be connected with a single bond or a spacer.
- the divalent group may be a divalent group derived from an aromatic compound containing an amino group, a hydroxyl group, or both.
- the said bivalent group can be made into the bivalent group induced
- polynuclear phenol examples include dihydroxybenzene, trihydroxybenzene, hydroxynaphthalene, dihydroxynaphthalene, trihydroxynaphthalene, tris (4-hydroxyphenyl) methane, tris (4-hydroxyphenyl) ethane, 2,2′-biphenol, or 1 1,2,2,2-tetrakis (4-hydroxyphenyl) ethane and the like.
- aromatic compounds can be used alone or in combination of two or more, but are preferably used in a combination of 3 or less, more preferably 2 or less.
- B 1 , B 2 , and B 3 can be arbitrarily selected within the above range, but the obtained polymer is sufficiently dissolved in the solvent used in the present invention described above and has a diameter of 0.1 ⁇ m. It is desirable to select the resist underlayer film forming composition that passes through the microfilter.
- Examples of the acid catalyst used in the reaction include mineral acids such as sulfuric acid, phosphoric acid, perchloric acid, organic sulfonic acids such as p-toluenesulfonic acid, p-toluenesulfonic acid monohydrate, methanesulfonic acid, formic acid, Carboxylic acids such as oxalic acid are used.
- the amount of the acid catalyst used is variously selected depending on the type of acids used. Usually, it is 0.001 to 10000 parts by mass, preferably 0.01 to 1000 parts by mass, and more preferably 0.1 to 100 parts by mass with respect to 100 parts by mass of the aromatic compound.
- the above condensation reaction and addition reaction are carried out without solvent, but are usually carried out using a solvent. Any solvent that does not inhibit the reaction can be used.
- ethers such as 1,2-dimethoxyethane, diethylene glycol dimethyl ether, propylene glycol monomethyl ether, tetrahydrofuran, dioxane and the like can be mentioned.
- the reaction temperature is usually 40 ° C to 200 ° C.
- the reaction time is variously selected depending on the reaction temperature, but is usually about 30 minutes to 50 hours.
- the weight average molecular weight Mw of the polymer obtained as described above is usually 500 to 2,000,000, or 600 to 100,000, or 700 to 10,000, or 800 to 8,000, or 900 to 6, 000.
- the resist underlayer film forming composition of this invention can contain a crosslinking agent component.
- the crosslinking agent component is preferably used.
- the cross-linking agent include melamine type, substituted urea type, or polymer type thereof.
- a cross-linking agent having at least two cross-linking substituents, methoxymethylated glycoluril, butoxymethylated glycoluril, methoxymethylated melamine, butoxymethylated melamine, methoxymethylated benzogwanamine, butoxymethylated benzogwanamine, Compounds such as methoxymethylated urea, butoxymethylated urea, or methoxymethylated thiourea. Moreover, the condensate of these compounds can also be used.
- crosslinking agent a crosslinking agent having high heat resistance
- a compound containing a crosslinking-forming substituent having an aromatic ring (for example, a benzene ring or a naphthalene ring) in the molecule can be preferably used.
- Examples of this compound include a compound having a partial structure of the following formula (4) and a polymer or oligomer having a repeating unit of the following formula (5).
- R 11 , R 12 , R 13 , and R 14 are a hydrogen atom or an alkyl group having 1 to 10 carbon atoms, and the above examples can be used for these alkyl groups.
- n1 and n2 each represent an integer of 0 to 6, and n3 and n4 each represent an integer of 0 to 4.
- the above compounds can be obtained as products of Asahi Organic Materials Co., Ltd. and Honshu Chemical Industry Co., Ltd.
- the compound of formula (4-23) is trade name TMOM-BP (manufactured by Honshu Chemical Industry Co., Ltd.)
- the compound of formula (4-24) is trade name TM-BIP-A (Asahi) It can be obtained as Organic Materials Industry Co., Ltd.
- the amount of the crosslinking agent to be added varies depending on the coating solvent used, the base substrate used, the required solution viscosity, the required film shape, etc., but is 0.001 to 80% by mass with respect to the total solid content, preferably The amount is 0.01 to 50% by mass, more preferably 0.05 to 40% by mass.
- cross-linking agents may cause a cross-linking reaction by self-condensation, but when a cross-linkable substituent is present in the above-mentioned polymer of the present invention, it can cause a cross-linking reaction with those cross-linkable substituents.
- an acid and / or an acid generator can be added as a catalyst for promoting the crosslinking reaction.
- an acid and / or an acid generator can be added as a catalyst for promoting the crosslinking reaction.
- the resist underlayer film forming composition of the present invention may contain an acid generator.
- the acid generator include a thermal acid generator and a photoacid generator.
- the photoacid generator generates an acid upon exposure of the resist. Therefore, the acidity of the lower layer film can be adjusted. This is a method for matching the acidity of the lower layer film with the acidity of the upper layer resist. Further, the pattern shape of the resist formed in the upper layer can be adjusted by adjusting the acidity of the lower layer film.
- Examples of the photoacid generator contained in the resist underlayer film forming composition of the present invention include onium salt compounds, sulfonimide compounds, and disulfonyldiazomethane compounds.
- onium salt compounds include diphenyliodonium hexafluorophosphate, diphenyliodonium trifluoromethanesulfonate, diphenyliodonium nonafluoronormalbutanesulfonate, diphenyliodonium perfluoronormaloctanesulfonate, diphenyliodonium camphorsulfonate, bis (4-tert-butylphenyl) iodonium camphor.
- Iodonium salt compounds such as sulfonate and bis (4-tert-butylphenyl) iodonium trifluoromethanesulfonate, and triphenylsulfonium hexafluoroantimonate, triphenylsulfonium nonafluoronormal butanesulfonate, triphenylsulfonium camphorsulfonate, and triphenyls Sulfonium salt compounds such as phosphonium trifluoromethanesulfonate, and the like.
- sulfonimide compound examples include N- (trifluoromethanesulfonyloxy) succinimide, N- (nonafluoronormalbutanesulfonyloxy) succinimide, N- (camphorsulfonyloxy) succinimide, N- (trifluoromethanesulfonyloxy) naphthalimide, and the like. Can be mentioned.
- disulfonyldiazomethane compound examples include bis (trifluoromethylsulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, bis (phenylsulfonyl) diazomethane, bis (p-toluenesulfonyl) diazomethane, and bis (2,4-dimethylbenzenesulfonyl). And diazomethane, and methylsulfonyl-p-toluenesulfonyldiazomethane.
- a photo-acid generator can use only 1 type, or can be used in combination of 2 or more type.
- the ratio is 0.01 to 5 parts by mass, 0.1 to 3 parts by mass, or 0 with respect to 100 parts by mass of the solid content of the resist underlayer film forming composition. .5 to 1 part by mass.
- the resist underlayer film forming composition according to the present invention is prepared by dissolving various polymers described below in a specific solvent, and is used in a uniform solution state.
- any solvent can be used as long as it can dissolve the polymer.
- the resist underlayer film forming composition according to the present invention since the resist underlayer film forming composition according to the present invention is used in a uniform solution state, it is recommended to use a solvent generally used in the lithography process in consideration of its coating performance. .
- solvents examples include methyl cellosolve acetate, ethyl cellosolve acetate, propylene glycol, propylene glycol monomethyl ether, propylene glycol monoethyl ether, methyl isobutyl carbinol, propylene glycol monobutyl ether, propylene glycol monomethyl ether acetate, propylene glycol mono Ether ether acetate, propylene glycol monopropyl ether acetate, propylene glycol monobutyl ether acetate, toluene, xylene, methyl ethyl ketone, cyclopentanone, cyclohexanone, ethyl 2-hydroxypropionate, ethyl 2-hydroxy-2-methylpropionate, ethyl ethoxyacetate , Ethyl hydroxyacetate, 2- Methyl droxy-3-methylbutanoate, methyl 3-methoxypropionate, ethyl
- propylene glycol monomethyl ether propylene glycol monomethyl ether acetate, ethyl lactate, butyl lactate, and cyclohexanone are preferable.
- propylene glycol monomethyl ether and propylene glycol monomethyl ether acetate are preferable.
- the resist underlayer film forming composition according to the present invention contains a compound represented by the formula (6) as a solvent.
- R 1 , R 2 and R 3 each represent a hydrogen atom, an oxygen atom, a sulfur atom or an alkyl group having 1 to 20 carbon atoms which may be interrupted by an amide bond, Or they may be different from each other and may be bonded to each other to form a ring structure.
- the compound represented by Formula (6) can be used in combination with the above-described solvent as long as it is compatible with the compound and can dissolve the polymer.
- alkyl group having 1 to 20 carbon atoms examples include linear or branched alkyl groups that may or may not have a substituent, such as a methyl group, an ethyl group, and an n-propyl group.
- a substituent such as a methyl group, an ethyl group, and an n-propyl group.
- Oxygen atom the alkyl group of a sulfur atom or an amide interrupted by coupling a 1 to 20 carbon atoms, for example, structural units -CH 2 -O -, - CH 2 -S -, - CH 2 -NHCO- or - Those containing CH 2 —CONH— may be mentioned.
- —O—, —S—, —NHCO— or —CONH— may be present in one or more units in the alkyl group.
- alkyl group having 1 to 20 carbon atoms interrupted by —O—, —S—, —NHCO— or —CONH— units include methoxy group, ethoxy group, propoxy group, butoxy group, methylthio group, ethylthio group, Group, propylthio group, butylthio group, methylcarbonylamino group, ethylcarbonylamino group, propylcarbonylamino group, butylcarbonylamino group, methylaminocarbonyl group, ethylaminocarbonyl group, propylaminocarbonyl group, butylaminocarbonyl group, etc.
- a methoxy group, an ethoxy group, a methylthio group, and an ethylthio group are preferable, and a methoxy group and an ethoxy group are more preferable.
- a compound represented by the formula (6) is preferred, and 3-methoxy-N, N-dimethylpropionamide and N, N-dimethylisobutyramide are particularly preferred as the compound represented by the formula (6).
- the blending amount thereof is not particularly limited.
- the compound represented by the formula (6) is contained in an amount of 5% by weight or more based on the total weight of the resist underlayer film forming composition according to the present invention.
- the compound represented by formula (6) is contained in an amount of 30% by weight or less based on the total weight of the resist underlayer film forming composition according to the present invention.
- surfactant In the resist underlayer film material according to the present invention, there is no occurrence of pinholes or setups, and a surfactant can be blended in order to further improve the applicability to surface unevenness.
- the surfactant include polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene cetyl ether, polyoxyethylene alkyl ethers such as polyoxyethylene oleyl ether, polyoxyethylene octylphenol ether, polyoxyethylene nonylphenol ether.
- Polyoxyethylene alkyl allyl ethers Polyoxyethylene alkyl allyl ethers, polyoxyethylene / polyoxypropylene block copolymers, sorbitan monolaurate, sorbitan monopalmitate, sorbitan monostearate, sorbitan monooleate, sorbitan trioleate, sorbitan tristearate, etc.
- Sorbitan fatty acid esters polyoxyethylene sorbitan monolaurate, polyoxyethylene sol
- Nonionic surfactants such as polyoxyethylene sorbitan fatty acid esters such as tan monopalmitate, polyoxyethylene sorbitan monostearate, polyoxyethylene sorbitan trioleate, polyoxyethylene sorbitan tristearate, F-top EF301, EF303, EF352 (trade name, manufactured by Tochem Products Co., Ltd.), MegaFac F171, F173, R-40, R-40N, R-40LM (product name, manufactured by DIC Corporation), Florard FC430, FC431 (Sumitomo 3M ( Co., Ltd., trade name), Asahi Guard AG710, Surflon S-382, SC101, SC102, SC103, SC104, SC105, SC106 (Asahi Glass Co., Ltd.
- fluorosurfactants organosiloxane polymers
- KP341 manufactured by Shin-Etsu Chemical Co., Ltd.
- the compounding amount of these surfactants is usually 2.0% by mass or less, preferably 1.0% by mass or less, based on the total solid content of the resist underlayer film material.
- These surfactants may be used alone or in combination of two or more.
- the ratio is 0.0001 to 5 parts by mass, or 0.001 to 1 part by mass, or 0.01 with respect to 100 parts by mass of the solid content of the resist underlayer film forming composition. Thru
- a light absorber, a rheology adjusting agent, an adhesion aid, and the like can be added to the resist underlayer film material for lithography of the present invention.
- the rheology modifier is effective for improving the fluidity of the underlayer film forming composition.
- the adhesion aid is effective for improving the adhesion between the semiconductor substrate or resist and the lower layer film.
- the light absorber for example, commercially available light absorbers described in “Technical dye technology and market” (published by CMC) and “Dye Handbook” (edited by the Society of Synthetic Organic Chemistry), for example, C.I. I. Disperse Yellow 1,3,4,5,7,8,13,23,31,49,50,51,54,60,64,66,68,79,82,88,90,93,102,114 and 124; C.I. I. D isperse Orange 1, 5, 13, 25, 29, 30, 31, 44, 57, 72 and 73; I. Disperse Red 1, 5, 7, 13, 17, 19, 43, 50, 54, 58, 65, 72, 73, 88, 117, 137, 143, 199 and 210; I.
- Disperse Violet 43; C.I. I. Disperse Blue 96; C.I. I. FluorescentesBrightening Agent 112, 135 and 163; I. Solvent Orange 2 and 45; I. Solvent Red 1, 3, 8, 23, 24, 25, 27 and 49; I. Pigment Green 10; C.I. I. Pigment Brown 2 or the like can be preferably used.
- the above light-absorbing agent is usually blended in a proportion of 10% by mass or less, preferably 5% by mass or less, based on the total solid content of the resist underlayer film material for lithography.
- the rheology modifier mainly improves the fluidity of the resist underlayer film forming composition, and improves the film thickness uniformity of the resist underlayer film and the fillability of the resist underlayer film forming composition inside the hole, particularly in the baking process. It is added for the purpose of enhancing.
- phthalic acid derivatives such as dimethyl phthalate, diethyl phthalate, diisobutyl phthalate, dihexyl phthalate, and butyl isodecyl phthalate; Mention may be made of maleic acid derivatives such as normal butyl maleate, diethyl maleate and dinonyl maleate, oleic acid derivatives such as methyl oleate, butyl oleate and tetrahydrofurfuryl oleate, or stearic acid derivatives such as normal butyl stearate and glyceryl stearate. it can.
- These rheology modifiers are usually blended at a ratio of less than 30% by mass with respect to the total solid content of the resist underlayer film material for lithography.
- the adhesion aid is added mainly for the purpose of improving the adhesion between the substrate or the resist and the resist underlayer film forming composition, and preventing the resist from peeling particularly during development.
- Specific examples include chlorosilanes such as trimethylchlorosilane, dimethylmethylolchlorosilane, methyldiphenylchlorosilane, chloromethyldimethylchlorosilane, trimethylmethoxysilane, dimethyldiethoxysilane, methyldimethoxysilane, dimethylolethoxysilane, diphenyldimethoxysilane, Alkoxysilanes such as enyltriethoxysilane, hexamethyldisilazane, N, N′-bis (trimethylsilyl) urea, silazanes such as dimethyltrimethylsilylamine, trimethylsilylimidazole, methyloltrichlorosilane, ⁇ -chloropropyltrime
- the solid content of the resist underlayer film forming composition according to the present invention is usually 0.1 to 70% by mass, preferably 0.1 to 60% by mass.
- the solid content is the content ratio of all components excluding the solvent from the resist underlayer film forming composition.
- the ratio of the polymer in the solid content is preferably 1 to 100% by mass, 1 to 99.9% by mass, 50 to 99.9% by mass, 50 to 95% by mass, and 50 to 90% by mass in this order.
- One of the measures for evaluating whether the resist underlayer film forming composition is in a uniform solution state is to observe the passability of a specific microfilter, but the resist underlayer film forming composition according to the present invention is Then, it passes through a microfilter having a diameter of 0.1 ⁇ m and exhibits a uniform solution state.
- microfilter material examples include fluorine resins such as PTFE (polytetrafluoroethylene) and PFA (tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer), PE (polyethylene), UPE (ultra high molecular weight polyethylene), PP ( Polypropylene), PSF (polysulfone), PES (polyethersulfone), and nylon may be mentioned, but those made of PTFE (polytetrafluoroethylene) are preferred.
- fluorine resins such as PTFE (polytetrafluoroethylene) and PFA (tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer)
- PE polyethylene
- UPE ultra high molecular weight polyethylene
- PP Polypropylene
- PSF polysulfone
- PES polyethersulfone
- the resist underlayer film according to the present invention can be produced by applying the above resist underlayer film forming composition onto a semiconductor substrate and baking it.
- Substrates eg, silicon wafer substrates, silicon / silicon dioxide coated substrates, silicon nitride substrates, glass substrates, ITO substrates, polyimide substrates, and low dielectric material (low-k material) coated substrates used in the manufacture of semiconductor devices Etc.
- the resist underlayer film forming composition of the present invention is applied by an appropriate application method such as a spinner or a coater, and then baked to form a resist underlayer film.
- the conditions for firing are appropriately selected from firing temperatures of 80 ° C. to 250 ° C. and firing times of 0.3 to 60 minutes.
- the firing temperature is 150 ° C.
- the thickness of the lower layer film to be formed is, for example, 10 to 1000 nm, 20 to 500 nm, 30 to 300 nm, 50 to 300 nm, or 50 to 200 nm.
- an inorganic resist underlayer film (hard mask) can be formed on the organic resist underlayer film according to the present invention.
- a Si-based inorganic material film can be formed by a CVD method or the like.
- the resist underlayer film forming composition according to the present invention is applied to a semiconductor substrate (so-called stepped substrate) having a stepped portion and a portion having no stepped portion, and baked to thereby form the stepped portion. It is possible to form a resist underlayer film having a level difference of 3 to 50 nm with respect to a portion having no level difference.
- a photoresist layer is formed on the resist underlayer film. Formation of the photoresist layer can be performed by a well-known method, that is, by applying a photoresist composition solution onto the lower layer film and baking.
- the film thickness of the photoresist is, for example, 50 to 10,000 nm, 100 to 2000 nm, or 200 to 1000 nm.
- the photoresist formed on the resist underlayer film is not particularly limited as long as it is sensitive to light used for exposure. Either a negative photoresist or a positive photoresist can be used.
- a positive photoresist comprising a novolac resin and 1,2-naphthoquinonediazide sulfonic acid ester, a chemically amplified photoresist comprising a binder having a group that decomposes with an acid to increase the alkali dissolution rate and a photoacid generator, an acid
- a chemically amplified photoresist comprising a low-molecular compound that decomposes to increase the alkali dissolution rate of the photoresist, an alkali-soluble binder, and a photoacid generator, and a binder having a group that decomposes with an acid to increase the alkali dissolution rate
- a chemically amplified photoresist composed of a low molecular weight compound that decomposes
- Examples include trade name APEX-E manufactured by Shipley, trade name PAR710 manufactured by Sumitomo Chemical Co., Ltd., and trade name SEPR430 manufactured by Shin-Etsu Chemical Co., Ltd. Also, for example, Proc. SPIE, Vol. 3999, 330-334 (2000), Proc. SPIE, Vol. 3999, 357-364 (2000), Proc. SPIE, Vol. 3999, 365-374 (2000), and fluorine-containing polymer-based photoresists.
- exposure is performed through a predetermined mask.
- near ultraviolet rays, far ultraviolet rays, extreme ultraviolet rays for example, EUV (wavelength: 13.5 nm)
- EUV extreme ultraviolet rays
- a KrF excimer laser wavelength 248 nm
- an ArF excimer laser wavelength 193 nm
- an F 2 excimer laser wavelength 157 nm
- post-exposure bake can be performed as necessary.
- the post-exposure heating is performed under conditions appropriately selected from a heating temperature of 70 to 150 ° C. and a heating time of 0.3 to 10 minutes.
- a resist for electron beam lithography can be used in place of the photoresist as the resist.
- the electron beam resist either a negative type or a positive type can be used.
- Chemically amplified resist comprising a binder having a group that decomposes with an acid generator and an acid to change the alkali dissolution rate, a low molecular weight compound that decomposes with an alkali-soluble binder, an acid generator and an acid to change the alkali dissolution rate of the resist
- a chemically amplified resist comprising: a binder having a group that decomposes with an acid generator and an acid to change the alkali dissolution rate; and a chemically amplified resist comprising a low-molecular compound that decomposes with an acid to change the alkali dissolution rate of the resist,
- non-chemically amplified resists composed of a binder having a group that changes the alkali dissolution rate by being decomposed by an electron beam, and non-
- Developers include aqueous solutions of alkali metal hydroxides such as potassium hydroxide and sodium hydroxide, aqueous solutions of quaternary ammonium hydroxides such as tetramethylammonium hydroxide, tetraethylammonium hydroxide and choline, ethanolamine, propylamine, An alkaline aqueous solution such as an aqueous amine solution such as ethylenediamine can be mentioned as an example. Further, a surfactant or the like can be added to these developers.
- the development conditions are appropriately selected from a temperature of 5 to 50 ° C. and a time of 10 to 600 seconds.
- the inorganic lower layer film (intermediate layer) is removed using the photoresist (upper layer) pattern thus formed as a protective film, and then the patterned photoresist and the inorganic lower layer film (intermediate layer) are formed.
- the organic lower layer film (lower layer) is removed using the film as a protective film.
- the semiconductor substrate is processed using the patterned inorganic lower layer film (intermediate layer) and organic lower layer film (lower layer) as a protective film.
- the portion of the inorganic lower layer film (intermediate layer) where the photoresist has been removed is removed by dry etching to expose the semiconductor substrate.
- dry etching of the inorganic underlayer film tetrafluoromethane (CF 4 ), perfluorocyclobutane (C 4 F 8 ), perfluoropropane (C 3 F 8 ), trifluoromethane, carbon monoxide, argon, oxygen, nitrogen, six Gases such as sulfur fluoride, difluoromethane, nitrogen trifluoride and chlorine trifluoride, chlorine, trichloroborane and dichloroborane can be used.
- a halogen-based gas is preferably used for dry etching of the inorganic underlayer film, and a fluorine-based gas is more preferable.
- the fluorine-based gas include tetrafluoromethane (CF 4 ), perfluorocyclobutane (C 4 F 8 ), perfluoropropane (C 3 F 8 ), trifluoromethane, and difluoromethane (CH 2 F 2 ). Can be mentioned.
- the organic underlayer film is removed using the patterned photoresist and the inorganic underlayer film as a protective film.
- the organic underlayer film (underlayer) is preferably formed by dry etching with an oxygen-based gas. This is because the inorganic underlayer film containing a large amount of silicon atoms is difficult to remove by dry etching using an oxygen-based gas.
- the processing of the semiconductor substrate is preferably performed by dry etching with a fluorine-based gas.
- fluorine-based gas examples include tetrafluoromethane (CF 4 ), perfluorocyclobutane (C 4 F 8 ), perfluoropropane (C 3 F 8 ), trifluoromethane, and difluoromethane (CH 2 F 2 ). Can be mentioned.
- an organic antireflection film can be formed on the upper layer of the resist underlayer film before the formation of the photoresist.
- the antireflective coating composition used there is not particularly limited, and can be arbitrarily selected from those conventionally used in the lithography process, and can be used by a conventional method such as a spinner.
- the antireflection film can be formed by coating and baking with a coater.
- an inorganic underlayer film can be formed thereon, and a photoresist can be further coated thereon.
- the pattern width of the photoresist becomes narrow, and even when the photoresist is thinly coated to prevent pattern collapse, the substrate can be processed by selecting an appropriate etching gas.
- an appropriate etching gas For example, it is possible to process a resist underlayer film using a fluorine-based gas that provides a sufficiently high etching rate for photoresist as an etching gas, and etch a fluorine-based gas that provides a sufficiently high etching rate for inorganic underlayer films.
- the substrate can be processed as a gas, and the substrate can be processed using an oxygen-based gas that provides a sufficiently high etching rate for the organic underlayer film as an etching gas.
- the resist underlayer film formed from the resist underlayer film forming composition may also absorb light depending on the wavelength of light used in the lithography process. In such a case, it can function as an antireflection film having an effect of preventing reflected light from the substrate. Furthermore, the underlayer film formed from the resist underlayer film forming composition of the present invention can also function as a hard mask.
- the underlayer film of the present invention has a layer for preventing the interaction between the substrate and the photoresist, and a function for preventing an adverse effect on the substrate of a material used for the photoresist or a substance generated upon exposure to the photoresist.
- It can also be used as a barrier layer for reducing the poisoning effect of a photoresist layer by a semiconductor substrate dielectric layer, a layer having a function of preventing diffusion of a substance generated from a substrate upon heating and baking into an upper layer photoresist Is possible.
- the underlayer film formed from the resist underlayer film forming composition is applied to a substrate on which via holes used in the dual damascene process are formed, and can be used as a filling material that can fill the holes without gaps. Moreover, it can also be used as a planarizing material for planarizing the surface of an uneven semiconductor substrate.
- DM-BINFL (Asahi Organic Materials Co., Ltd.) 3.56g, Carbazole (Tokyo Chemical Industry Co., Ltd.) 1.50g, N-methyl-2-pyrrolidinone (Kanto Chemical Co., Ltd.) 4.18g
- 4.18 g of propylene glycol monomethyl ether acetate and 0.51 g of methanesulfonic acid (manufactured by Tokyo Chemical Industry Co., Ltd.) were added.
- the mixture was then heated to 150 ° C. and stirred at reflux for about 15 hours.
- the reaction mixture was diluted with 11.32 g of cyclohexanone. This diluted solution was dropped into a methanol solution and reprecipitated.
- the obtained precipitate was suction filtered, and the filtrate was dried under reduced pressure at 60 ° C. overnight. And 2.36g of powdery resin was obtained.
- the obtained polymer corresponded to the formula (3-1).
- the weight average molecular weight Mw measured in terms of polystyrene by GPC was 1,840.
- DM-BINFL (Asahi Organic Materials Co., Ltd.) 5.18 g, 1,1,1-tris (4-hydroxyphenyl) ethane (Tokyo Chemical Industry Co., Ltd.) 4.00 g, N-methyl- 7.53 g of 2-pyrrolidinone (manufactured by Kanto Chemical Co., Inc.), 7.53 g of propylene glycol monomethyl ether acetate, and 0.87 g of methanesulfonic acid (manufactured by Tokyo Chemical Industry Co., Ltd.) were added. Thereafter, the mixture was heated to 150 ° C. and stirred at reflux for about 19 hours. After completion of the reaction, it was diluted with 5.47 g of cyclohexanone.
- Example 1 The resin obtained in Synthesis Example 1 was dissolved in cyclohexanone and then subjected to ion exchange to obtain a resin solution (solid content 18.45% by mass). To 5.50 g of this resin solution was added 0.20 g of propylene glycol monomethyl ether acetate containing 1% surfactant (manufactured by DIC Corporation, Megafac R-40), 0.714 g of propylene glycol monomethyl ether acetate, and 3.75 g of cyclohexanone. Then, the solution was filtered through a polytetrafluoroethylene microfilter having a diameter of 0.1 ⁇ m to prepare a resist underlayer film forming composition solution.
- Example 2 The resin obtained in Synthesis Example 2 was dissolved in cyclohexanone, and then subjected to ion exchange to obtain a resin solution (solid content: 18.85% by mass). Add 0.19 g of propylene glycol monomethyl ether acetate, 0.895 g of propylene glycol monomethyl ether acetate and 5.66 g of cyclohexanone to 5.00 g of this resin solution. Then, the solution was filtered through a polytetrafluoroethylene microfilter having a diameter of 0.1 ⁇ m to prepare a resist underlayer film forming composition solution.
- Example 3 The resin obtained in Synthesis Example 3 was dissolved in propylene glycol monomethyl ether acetate and then subjected to ion exchange to obtain a resin solution (solid content: 16.50% by mass). To 1.50 g of this resin solution, 0.11 g of propylene glycol monomethyl ether acetate containing 1% surfactant (manufactured by DIC Corporation, Megafac R-40), 1.23 g of propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, 2. 90 g was added and filtered through a polytetrafluoroethylene microfilter having a diameter of 0.1 ⁇ m to prepare a resist underlayer film forming composition solution.
- surfactant manufactured by DIC Corporation, Megafac R-40
- Example 4 The resin obtained in Synthesis Example 4 was dissolved in cyclohexanone and then subjected to ion exchange to obtain a resin solution (solid content: 16.45% by mass). To 6.00 g of this resin solution, 0.20 g of propylene glycol monomethyl ether acetate containing 1% surfactant (manufactured by DIC Corporation, Megafac R-40), 0.695 g of propylene glycol monomethyl ether acetate, and 3.00 g of cyclohexanone were added. Then, the solution was filtered through a polytetrafluoroethylene microfilter having a diameter of 0.1 ⁇ m to prepare a resist underlayer film forming composition solution.
- a resin solution solid content: 16.45% by mass.
- surfactant manufactured by DIC Corporation, Megafac R-40
- Example 5 The resin obtained in Synthesis Example 5 was dissolved in cyclohexanone, and ion exchange was performed to obtain a resin solution (solid content: 19.70% by mass). Add 0.19 g of propylene glycol monomethyl ether acetate, 0.901 g of propylene glycol monomethyl ether acetate, and 5.90 g of cyclohexanone to 4.80 g of this resin solution, containing 1% surfactant (manufactured by DIC Corporation, Megafac R-40). Then, the solution was filtered through a polytetrafluoroethylene microfilter having a diameter of 0.1 ⁇ m to prepare a resist underlayer film forming composition solution.
- Example 6 The resin obtained in Synthesis Example 6 was dissolved in propylene glycol monomethyl ether and then subjected to ion exchange to obtain a resin solution (solid content: 17.40% by mass). To 5.00 g of this resin solution, 0.09 g of propylene glycol monomethyl ether acetate, 2.91 g of propylene glycol monomethyl ether acetate, 2.91 g of propylene glycol monomethyl ether acetate, and 2.91 g of propylene glycol monomethyl ether. 88 g was added and filtered through a polytetrafluoroethylene microfilter having a diameter of 0.1 ⁇ m to prepare a resist underlayer film forming composition solution.
- Example 7 BINFL (Asahi Organic Materials Co., Ltd.) was dissolved in cyclohexanone to obtain a BINFL-containing cyclohexanone solution (solid content: 21.74% by mass).
- a BINFL-containing cyclohexanone solution solid content: 21.74% by mass.
- TMOM-BP manufactured by Honshu Chemical Industry Co., Ltd.
- 2 After adding 0.47 g of propylene glycol monomethyl ether, 0.089 g of cyclohexanone and 0.03 g of propylene glycol monomethyl ether containing% K-PURE TAG 2689 (a trifluoromethanesulfonic acid compound produced by King Industries), the diameter is 0.1 ⁇ m.
- the solution of the resist underlayer film forming composition was prepared by filtering with a polytetrafluoroethylene microfilter.
- Example 8 DM-BINFL (manufactured by Asahi Organic Materials Co., Ltd.) was dissolved in cyclohexanone to obtain a DM-BINFL-containing cyclohexanone solution (solid content: 18.63% by mass).
- Example 9 The resin obtained in Synthesis Example 1 was dissolved in cyclohexanone and then subjected to ion exchange to obtain a resin solution (solid content 18.45% by mass). To 3.00 g of this resin solution, 0.07 g of propylene glycol monomethyl ether containing 1% surfactant (manufactured by DIC Corporation, Megafac R-40), 0.21 g of TMOM-BP (manufactured by Honshu Chemical Industry Co., Ltd.), After adding 1.06 g of propylene glycol monomethyl ether containing 2% K-PURE TAG2689 (trifluoromethanesulfonic acid compound manufactured by King Industries), 6.91 g of cyclohexanone, and 0.51 g of propylene glycol monomethyl ether, the mixture was stirred at 0. The solution was filtered through a 1 ⁇ m polytetrafluoroethylene microfilter to prepare a resist underlayer film forming composition solution.
- surfactant manufactured by DIC Corporation, Megafac R
- Comparative Example 1 The resin obtained in Comparative Synthesis Example 1 was dissolved in cyclohexanone and then subjected to ion exchange to obtain a resin solution (solid content 22.65% by mass). To 5.50 g of this resin solution, 0.11 g of propylene glycol monomethyl ether acetate, 1.19 g of propylene glycol monomethyl ether acetate and 7.87 g of cyclohexanone were added, containing 1% surfactant (manufactured by DIC Corporation, Megafac R-40). Then, the solution was filtered through a polytetrafluoroethylene microfilter having a diameter of 0.1 ⁇ m to prepare a resist underlayer film forming composition solution.
- Comparative Example 2 The resin obtained in Comparative Synthesis Example 2 was dissolved in propylene glycol monomethyl ether acetate and then subjected to ion exchange to obtain a resin solution (solid content: 21.95% by mass). To 6.50 g of this resin solution, 0.14 g of propylene glycol monomethyl ether acetate containing 1. 1% surfactant (manufactured by DIC Corporation, Megafac R-40), 3.78 g of propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether 3. 86 g was added and filtered through a polytetrafluoroethylene microfilter having a diameter of 0.1 ⁇ m to prepare a resist underlayer film forming composition solution.
- surfactant manufactured by DIC Corporation, Megafac R-40
- Comparative Example 3 The resin obtained in Comparative Synthesis Example 3 was dissolved in propylene glycol monomethyl ether acetate and then subjected to ion exchange to obtain a resin solution (solid content 20.67% by mass). To 7.00 g of this resin solution, 0.14 g of propylene glycol monomethyl ether acetate containing 1% surfactant (manufactured by DIC Corporation, Megafac R-40), 3.43 g of propylene glycol monomethyl ether acetate, 3. 91 g was added and filtered through a polytetrafluoroethylene microfilter having a diameter of 0.1 ⁇ m to prepare a resist underlayer film forming composition solution.
- surfactant manufactured by DIC Corporation, Megafac R-40
- resist underlayer films were immersed in ethyl lactate, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, and cyclohexanone, which are solvents used for the resist. These resist underlayer films were insoluble in these solvents.
- the resist underlayer film forming composition solutions prepared in Comparative Example 1-3 and Example 1-9 were each applied onto a silicon wafer using a spin coater. Baking was carried out on a hot plate at 400 ° C. for 90 seconds to form a resist underlayer film (film thickness 0.05 ⁇ m).
- the resist underlayer film since it was difficult to maintain the film thickness from the viewpoint of heat resistance, the resist underlayer film (film thickness 0.20 ⁇ m) was formed by baking at 350 ° C. for 90 seconds. A resist underlayer film (film thickness 0.20 ⁇ m) was formed by baking for 90 seconds.
- the dry etching rate was measured using CF 4 gas as an etching gas, and the comparative examples 1-3 and 1-9 were compared with the dry etching rate of the resist underlayer film. The results are shown in Table 3.
- the dry etching rate ratio is a dry etching rate ratio of (resist underlayer film) / (KrF photoresist).
- a resist underlayer film forming composition that provides a resist underlayer film that has good coating properties and is excellent in high etching resistance, high heat resistance, and the like.
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Abstract
Description
[1] 下記式(1)で示される化合物を含むことを特徴とするレジスト下層膜形成組成物。
[式(1)中、
は単結合又は二重結合を表し、
X1は、-N(R1)-又は-CH(R1)-を表し、
X2は、-N(R2)-又は-CH(R2)-を表し、
X3は、-N=、-CH=、-N(R3)-又は-CH(R3)-を表し、
X4は、-N=、-CH=、-N(R4)-又は-CH(R4)-を表し、
R1、R2、R3及びR4は同一又は異なり、それぞれ水素原子、C1~20の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~10のアルケニル基、C2~10のアルキニル基、カルボキシル基又はシアノ基を表し、上記アルキル基及びアリール基はC1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、アミノ基、グリシジル基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子又は硫黄原子で中断されていてもよく、
R5、R6、R9及びR10は同一又は異なり、それぞれ水素原子、ヒドロキシ基、C1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、C1~10の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~20のアルケニル基又はC2~10のアルキニル基を表し、上記アシル基、アルコキシ基、アルコキシカルボニル基、アルキル基、アリール基、アルケニル基及びアルキニル基は、アミノ基、ニトロ基、シアノ基、ヒドロキシ基、グリシジル基及びカルボキシル基からなる群より選択される基を1つ又は複数有していても良く、
R7及びR8は同一又は異なり、それぞれベンゼン環又はナフタレン環を表し、
n及びoは0又は1である。]
[2] 式(1)のR1、R2、R3又はR4が、ヒドロキシ基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子もしくは硫黄原子で中断されていてもよいC1~20の直鎖状、分岐状もしくは環状のアルキル基である、[1]に記載のレジスト下層膜形成組成物。
[3] 下記式(2)で示される繰り返し単位a、b、c、d、e、f、g、h、iの1つ又は複数を1単位以上含有する化合物を含むことを特徴とするレジスト下層膜形成組成物。
式(2)
[式(2)中、
は単結合又は二重結合を表し、
X1は、-N(R1)-、-CH(R1)-、-N<又は-CH<を表し、
X2は、-N(R2)-、-CH(R2)-、-N<又は-CH<を表し、
X3は、-N=、-CH=、-N(R3)-、-CH(R3)-、-N<又は-CH<を表し、
X4は、-N=、-CH=、-N(R4)-、-CH(R4)-、-N<又は-CH<を表し、
R1、R2、R3及びR4は同一又は異なり、それぞれ水素原子、C1~20の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~10のアルケニル基、C2~10のアルキニル基、カルボキシル基又はシアノ基を表し、上記アルキル基及びアリール基はC1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、アミノ基、グリシジル基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子又は硫黄原子で中断されていてもよく、
R5、R6、R9及びR10は同一又は異なり、それぞれ水素原子、ヒドロキシ基、C1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、C1~10の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~20のアルケニル基又はC2~10のアルキニル基を表し、上記アシル基、アルコキシ基、アルコキシカルボニル基、アルキル基、アリール基、アルケニル基及びアルキニル基は、アミノ基、ニトロ基、シアノ基、ヒドロキシ基、グリシジル基及びカルボキシル基からなる群より選択される基を1つ又は複数有していても良く、
R7及びR8は同一又は異なり、それぞれベンゼン環又はナフタレン環を表し、
n及びoは0又は1であり、
B1とB2は同一又は異なり、それぞれ水素原子、酸素原子もしくは硫黄原子で中断されていてもよいC1~20の直鎖状、分岐状もしくは環状のアルキル基又はC6~40のアリール基及びC6~40の複素環基からなる群より選択される芳香族化合物由来の基を表し、B1とB2はこれらが結合する炭素原子と一緒になって環を形成してもよく、前記芳香族化合物由来の基の水素原子は、C1~20のアルキル基、フェニル基、縮合環基、複素環基、ヒドロキシ基、アミノ基、エーテル基、アルコキシ基、シアノ基、ニトロ基又はカルボキシル基で置換されていてもよい。]
[4] 下記式(3)で示される繰り返し単位j、k、l、m、r、s、t、u、v、wの1つ又は複数を1単位以上含有する化合物を含むことを特徴とするレジスト下層膜形成組成物。
式(3)
[式(3)中、
は単結合又は二重結合を表し、
X1は、-N<又は-CH<を表し、
X2は、-N<又は-CH<を表し、
X3は、-N=、-CH=、-N(R3)-又は-CH(R3)-を表し、
X4は、-N=、-CH=、-N(R4)-又は-CH(R4)-を表し、
R3及びR4は同一又は異なり、それぞれ水素原子、C1~20の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~10のアルケニル基、C2~10のアルキニル基、カルボキシル基又はシアノ基を表し、上記アルキル基及びアリール基はC1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、アミノ基、グリシジル基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子又は硫黄原子で中断されていてもよく、
R5、R6、R9及びR10は同一又は異なり、それぞれ水素原子、ヒドロキシ基、C1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、C1~10の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~20のアルケニル基又はC2~10のアルキニル基を表し、上記アシル基、アルコキシ基、アルコキシカルボニル基、アルキル基、アリール基、アルケニル基及びアルキニル基は、アミノ基、ニトロ基、シアノ基、ヒドロキシ基、グリシジル基及びカルボキシル基からなる群より選択される基を1つ又は複数有していても良く、
R7及びR8は同一又は異なり、それぞれベンゼン環又はナフタレン環を表し、
n及びoは0又は1であり、
p及びqは0~20の整数であり、
p個のメチレン基及びq個のメチレン基は2個以上の場合には酸素原子又は硫黄原子で中断されていてもよく、
B3は直接結合、又はC1~20のアルキル基、フェニル基、縮合環基、複素環基、ヒドロキシ基、アミノ基、エーテル基、アルコキシ基、シアノ基、ニトロ基もしくはカルボキシル基で置換されていてもよいC6~40の芳香族化合物由来の基を表す。]
[5] 下記式(1)の化合物と1種類以上のアルデヒド化合物との反応、下記式(1)の化合物と1種類以上の芳香族化合物との反応、又は下記式(1)の化合物と1種類以上の芳香族化合物と1種類以上のアルデヒド化合物との反応によって得られる樹脂を含むレジスト下層膜形成組成物。
[式(1)中、
は単結合又は二重結合を表し、
X1は、-N(R1)-又は-CH(R1)-を表し、
X2は、-N(R2)-又は-CH(R2)-を表し、
X3は、-N=、-CH=、-N(R3)-又は-CH(R3)-を表し、
X4は、-N=、-CH=、-N(R4)-又は-CH(R4)-を表し、
R1、R2、R3及びR4は同一又は異なり、それぞれ水素原子、C1~20の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~10のアルケニル基、C2~10のアルキニル基、カルボキシル基又はシアノ基を表し、上記アルキル基及びアリール基はC1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、アミノ基、グリシジル基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子又は硫黄原子で中断されていてもよく、
R5、R6、R9及びR10は同一又は異なり、それぞれ水素原子、ヒドロキシ基、C1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、C1~10の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~20のアルケニル基又はC2~10のアルキニル基を表し、上記アシル基、アルコキシ基、アルコキシカルボニル基、アルキル基、アリール基、アルケニル基及びアルキニル基は、アミノ基、ニトロ基、シアノ基、ヒドロキシ基、グリシジル基及びカルボキシル基からなる群より選択される基を1つ又は複数有していても良く、
R7及びR8は同一又は異なり、それぞれベンゼン環又はナフタレン環を表し、
n及びoは0又は1である。]
[6] 式(1)のR1、R2、R3又はR4が、ヒドロキシ基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子もしくは硫黄原子で中断されていてもよいC1~20の直鎖状、分岐状もしくは環状のアルキル基である、[5]に記載のレジスト下層膜形成組成物。
[7] 架橋剤を更に含む[1]乃至[6]のいずれか1項に記載のレジスト下層膜形成組成物。
[8] 酸及び/又は酸発生剤を更に含む[1]乃至[7]のいずれか1項に記載のレジスト下層膜形成組成物。
[9] [1]乃至[8]のいずれか1項に記載のレジスト下層膜形成組成物を半導体基板上に塗布し焼成する工程を含むレジスト下層膜の製造方法。
[10] 半導体基板上に[1]乃至[8]のいずれか1項に記載のレジスト下層膜形成組成物によりレジスト下層膜を形成する工程、その上にレジスト膜を形成する工程、光又は電子線の照射と現像によりレジストパターンを形成する工程、レジストパターンにより該下層膜をエッチングする工程、及びパターン化された下層膜により半導体基板を加工する工程を含む半導体装置の製造方法。
[11] 半導体基板に[1]乃至[8]のいずれか1項に記載のレジスト下層膜形成組成物によりレジスト下層膜を形成する工程、その上にハードマスクを形成する工程、更にその上にレジスト膜を形成する工程、光又は電子線の照射と現像によりレジストパターンを形成する工程、レジストパターンによりハードマスクをエッチングする工程、パターン化されたハードマスクにより該下層膜をエッチングする工程、及びパターン化されたレジスト下層膜により半導体基板を加工する工程を含む半導体装置の製造方法。
[12] 下記式(1)の化合物と1種類以上のアルデヒド化合物とを反応させる工程、下記式(1)の化合物と1種類以上の芳香族化合物とを反応させる工程、又は下記式(1)の化合物と1種類以上の芳香族化合物と1種類以上のアルデヒド化合物とを反応させる工程を含む、レジスト下層膜形成組成物用樹脂の製造方法。
[式(1)中、
は単結合又は二重結合を表し、
X1は、-N(R1)-又は-CH(R1)-を表し、
X2は、-N(R2)-又は-CH(R2)-を表し、
X3は、-N=、-CH=、-N(R3)-又は-CH(R3)-を表し、
X4は、-N=、-CH=、-N(R4)-又は-CH(R4)-を表し、
R1、R2、R3及びR4は同一又は異なり、それぞれ水素原子、C1~20の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~10のアルケニル基、C2~10のアルキニル基、カルボキシル基又はシアノ基を表し、上記アルキル基及びアリール基はC1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、アミノ基、グリシジル基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子又は硫黄原子で中断されていてもよく、
R5、R6、R9及びR10は同一又は異なり、それぞれ水素原子、ヒドロキシ基、C1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、C1~10の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~20のアルケニル基又はC2~10のアルキニル基を表し、上記アシル基、アルコキシ基、アルコキシカルボニル基、アルキル基、アリール基、アルケニル基及びアルキニル基は、アミノ基、ニトロ基、シアノ基、ヒドロキシ基、グリシジル基及びカルボキシル基からなる群より選択される基を1つ又は複数有していても良く、
R7及びR8は同一又は異なり、それぞれベンゼン環又はナフタレン環を表し、
n及びoは0又は1である。]
特に、本発明のレジスト下層膜形成組成物は、レジスト膜厚の薄膜化を目的としたレジスト下層膜を少なくとも2層形成し、該レジスト下層膜をエッチングマスクとして使用するリソグラフィープロセスに対して有効である。
本発明に係るレジスト下層膜形成組成物は、式(1)で示される化合物及び/又は式(1)で示される化合物から誘導されるポリマー、好ましくは、さらに架橋剤、酸及び/又は酸発生剤、溶媒及びその他の成分を含むものである。以下に順に説明する。
本発明に係るレジスト下層膜形成組成物は、下記式(1)で示される化合物を含むことができる。
[式(1)中、
は単結合又は二重結合を表し、
X1は、-N(R1)-又は-CH(R1)-を表し、
X2は、-N(R2)-又は-CH(R2)-を表し、
X3は、-N=、-CH=、-N(R3)-又は-CH(R3)-を表し、
X4は、-N=、-CH=、-N(R4)-又は-CH(R4)-を表し、
- は、隣接する1つの元素との結合手(単結合)を表し、= は、隣接する1つの元素との結合手(二重結合)を表し、
R1、R2、R3及びR4が水素原子の場合は、上記のNは何れも二級窒素、Cは何れも二級炭素であり、R1、R2、R3及びR4が水素原子でない場合、-N=又は-CH=の場合は、上記のNは何れも三級窒素、Cは何れも三級炭素であり、
R1、R2、R3及びR4は同一又は異なり、それぞれ水素原子、C1~20の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~10のアルケニル基、C2~10のアルキニル基、カルボキシル基又はシアノ基を表し、上記アルキル基及びアリール基はC1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、アミノ基、グリシジル基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子又は硫黄原子で中断されていてもよく、
R5、R6、R9及びR10は同一又は異なり、それぞれ水素原子、ヒドロキシ基、C1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、C1~10の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~20のアルケニル基又はC2~10のアルキニル基を表し、上記アシル基、アルコキシ基、アルコキシカルボニル基、アルキル基、アリール基、アルケニル基及びアルキニル基は、アミノ基、ニトロ基、シアノ基、ヒドロキシ基、グリシジル基及びカルボキシル基からなる群より選択される基を1つ又は複数有していても良く、
R7及びR8は同一又は異なり、それぞれベンゼン環又はナフタレン環を表し、
n及びoは0又は1である。]
C1~6のアルコキシ基としては、メトキシ基、エトキシ基、n-プロポキシ基、イソプロポキシ基、n-ブトキシ基、イソブトキシ基、tert-ブトキシ基、sec-ブトキシ基、n-ペントキシ基、ネオペントキシ基、n-ヘキシルオキシ基、イソヘキシルオキシ基、3-メチルペントキシ基等を挙げることができるが、メトキシ基又はエトキシ基が好ましい。
C1~6のアルコキシカルボニル基としては、メトキシカルボニル基、エトキシカルボニル基、n-プロポキシカルボニル基、i-プロポキシカルボニル基、n-ブトキシカルボニル基、i-ブトキシカルボニル基、sec-ブトキシカルボニル基、tert-ブトキシカルボニル基、n-ペンチロキシカルボニル基、n-ヘキシロキシカルボニル基等を挙げることができるが、メトキシカルボニル基又はエトキシカルボニル基が好ましい。
C2~10又はC2~20のアルケニル基としては、ビニル基、プロペニル基、ブテニル基等を挙げることができるが、ビニル基が好ましい。
C2~10のアルキニル基としては、エチニル、プロピニル、ブチニル、ペンチニル、ヘキシニル、ヘプチニル、オクチニル、ノニニル、デシニル、ブタジイニル、ペンタジイニル、ヘキサジイニル、ヘプタジイニル、オクタジイニル、ノナジイニル、デカジイニル基等を挙げることができるが、エチニル、プロピニル、ブチニルが好ましい。
本発明に係るレジスト下層膜形成組成物は、式(1)で示される化合物に加えて、又はこれに代えて式(1)で示される化合物から誘導されるポリマーを含むことができる。
式(2)
[式(2)中、
は単結合又は二重結合を表し、
X1は、-N(R1)-、-CH(R1)-、-N<又は-CH<を表し、
X2は、-N(R2)-、-CH(R2)-、-N<又は-CH<を表し、
X3は、-N=、-CH=、-N(R3)-、-CH(R3)-、-N<又は-CH<を表し、
X4は、-N=、-CH=、-N(R4)-、-CH(R4)-、-N<又は-CH<を表し、
- は、隣接する1つの元素との結合手(単結合)を表し、= は、隣接する1つの元素との結合手(二重結合)を表し、< は、隣接する2つの元素と各々結合する2本の結合手(2本の単結合)を表し、
R1、R2、R3及びR4が水素原子の場合は、上記のNは何れも二級窒素、Cは何れも二級炭素であり、R1、R2、R3及びR4が水素原子でない場合、-N=、-CH=、-N<又は-CH<の場合は、上記のNは何れも三級窒素、Cは何れも三級炭素であり、
R1、R2、R3及びR4は同一又は異なり、それぞれ水素原子、C1~20の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~10のアルケニル基、C2~10のアルキニル基、カルボキシル基又はシアノ基を表し、上記アルキル基及びアリール基はC1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、アミノ基、グリシジル基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子又は硫黄原子で中断されていてもよく、
R5、R6、R9及びR10は同一又は異なり、それぞれ水素原子、ヒドロキシ基、C1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、C1~10の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~20のアルケニル基又はC2~10のアルキニル基を表し、上記アシル基、アルコキシ基、アルコキシカルボニル基、アルキル基、アリール基、アルケニル基及びアルキニル基は、アミノ基、ニトロ基、シアノ基、ヒドロキシ基、グリシジル基及びカルボキシル基からなる群より選択される基を1つ又は複数有していても良く、
R7及びR8は同一又は異なり、それぞれベンゼン環又はナフタレン環を表し、
n及びoは0又は1であり、
B1とB2は同一又は異なり、それぞれ水素原子、酸素原子もしくは硫黄原子で中断されていてもよいC1~20の直鎖状、分岐状もしくは環状のアルキル基又はC6~40のアリール基及びC6~40の複素環基からなる群より選択される芳香族化合物由来の基を表し、B1とB2はこれらが結合する炭素原子と一緒になって環を形成してもよく、前記芳香族化合物由来の基の水素原子は、C1~20のアルキル基、フェニル基、縮合環基、複素環基、ヒドロキシ基、アミノ基、エーテル基、アルコキシ基、シアノ基、ニトロ基又はカルボキシル基で置換されていてもよい。]
スペーサーの例としては-CH-、-(CH2)n-(n=1~20)、-CH=CH-、-CH≡CH-、-N=N-、-NH-、-NHR-、-NHCO-、-NRCO-、-S-、-COO-、-O-、-CO-及び-CH=N-一種又は二種以上の組合せが挙げられる。これらのスペーサーは2つ以上連結していてもよい。
式(3)
[式(3)中、
は単結合又は二重結合を表し、
X1は、-N<又は-CH<を表し、
X2は、-N<又は-CH<を表し、
X3は、-N=、-CH=、-N(R3)-又は-CH(R3)-を表し、
X4は、-N=、-CH=、-N(R4)-又は-CH(R4)-を表し、
R3及びR4は同一又は異なり、それぞれ水素原子、C1~20の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~10のアルケニル基、C2~10のアルキニル基、カルボキシル基又はシアノ基を表し、上記アルキル基及びアリール基はC1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、アミノ基、グリシジル基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子又は硫黄原子で中断されていてもよく、
R5、R6、R9及びR10は同一又は異なり、それぞれ水素原子、ヒドロキシ基、C1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、C1~10の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~20のアルケニル基又はC2~10のアルキニル基を表し、上記アシル基、アルコキシ基、アルコキシカルボニル基、アルキル基、アリール基、アルケニル基及びアルキニル基は、アミノ基、ニトロ基、シアノ基、ヒドロキシ基、グリシジル基及びカルボキシル基からなる群より選択される基を1つ又は複数有していても良く、
R7及びR8は同一又は異なり、それぞれベンゼン環又はナフタレン環を表し、
n及びoは0又は1であり、
p及びqは0~20の整数であり、
p個のメチレン基及びq個のメチレン基は2個以上の場合には酸素原子又は硫黄原子で中断されていてもよく、
B3は直接結合、又はC1~20のアルキル基、フェニル基、縮合環基、複素環基、ヒドロキシ基、アミノ基、エーテル基、アルコキシ基、シアノ基、ニトロ基もしくはカルボキシル基で置換されていてもよいC6~40の芳香族化合物由来の基を表す。]
本発明に係るレジスト下層膜形成組成物用樹脂は、上記式(1)の化合物と1種類以上のアルデヒド化合物とを反応させる工程、上記式(1)の化合物と1種類以上の芳香族化合物とを反応させる工程、又は上記式(1)の化合物と1種類以上の芳香族化合物と1種類以上のアルデヒド化合物とを反応させる工程を含む方法によって製造することができる。
芳香族アミンとしては、フェニルインドール、フェニルナフチルアミン等が挙げられる。
フェノール性ヒドロキシ基含有化合物としては、フェノール、ジヒドロキシベンゼン、トリヒドロキシベンゼン、ヒドロキシナフタレン、ジヒドロキシナフタレン、トリヒドロキシナフタレン、トリス(4-ヒドロキシフェニル)メタン、トリス(4-ヒドロキシフェニル)エタン、1,1,2,2-テトラキス(4-ヒドロキシフェニル)エタン等が挙げられる。
好ましくは、上記二価基は、C6~40のアリールアミン化合物から誘導される二価基である。
スペーサーの例としては-CH-、-(CH2)n-(n=1~20)、-CH=CH-、-CH≡CH-、-N=N-、-NH-、-NHR-、-NHCO-、-NRCO-、-S-、-COO-、-O-、-CO-及び-CH=N-の一種又は二種以上の組合せが挙げられる。これらのスペーサーは2つ以上連結していてもよい。
反応温度は通常40℃乃至200℃である。反応時間は反応温度によって種々選択されるが、通常30分乃至50時間程度である。
以上のようにして得られるポリマーの重量平均分子量Mwは、通常500乃至2,000,000、又は600乃至100,000、又は700乃至10,000、又は800乃至8,000、又は900乃至6,000である。
重合反応の結果、上記式(2)や上記式(3)で表される繰り返し単位を含有するポリマーが得られるほか、式(1)の化合物、芳香族化合物、アルデヒド化合物が複雑に結合したポリマー混合物も得られるので、その構造により直接特定することは必ずしも実際的でない。
本発明のレジスト下層膜形成組成物は架橋剤成分を含むことができる。特に、上記式(1)の化合物がモノマーである場合、当該架橋剤成分は好ましく用いられる。その架橋剤としては、メラミン系、置換尿素系、またはそれらのポリマー系等が挙げられる。好ましくは、少なくとも2個の架橋形成置換基を有する架橋剤であり、メトキシメチル化グリコールウリル、ブトキシメチル化グリコールウリル、メトキシメチル化メラミン、ブトキシメチル化メラミン、メトキシメチル化ベンゾグワナミン、ブトキシメチル化ベンゾグワナミン、メトキシメチル化尿素、ブトキシメチル化尿素、またはメトキシメチル化チオ尿素等の化合物である。また、これらの化合物の縮合体も使用することができる。
上記R11、R12、R13、及びR14は水素原子又は炭素数1乃至10のアルキル基であり、これらのアルキル基は上述の例示を用いることができる。
n1及びn2は各々0~6の整数、n3及びn4は各々0~4の整数を表す。
架橋剤の添加量は、使用する塗布溶剤、使用する下地基板、要求される溶液粘度、要求される膜形状などにより変動するが、全固形分に対して0.001乃至80質量%、好ましくは 0.01乃至50質量%、さらに好ましくは0.05乃至40質量%である。これら架橋剤は自己縮合による架橋反応を起こすこともあるが、本発明の上記のポリマー中に架橋性置換基が存在する場合は、それらの架橋性置換基と架橋反応を起こすことができる。
本発明では上記架橋反応を促進するための触媒として酸及び/又は酸発生剤を添加することができる。例えば、p-トルエンスルホン酸、トリフルオロメタンスルホン酸、ピリジニウムp-トルエンスルホン酸、サリチル酸、5-スルホサリチル酸、4-フェノールスルホン酸、カンファースルホン酸、4-クロロベンゼンスルホン酸、ベンゼンジスルホン酸、1-ナフタレンスルホン酸、クエン酸、安息香酸、ヒドロキシ安息香酸、ナフタレンカルボン酸等の酸性化合物、及び/又は2,4,4,6-テトラブロモシクロヘキサジエノン、ベンゾイントシレート、2-ニトロベンジルトシレート、ピリジニウムp-ヒドロキシベンゼンスルホナート、ピリジニウムp-トルエンスルホナート、ピリジニウムトリフルオロメタンスルホナート等のピリジニウム塩系化合物、その他有機スルホン酸アルキルエステル等の熱酸発生剤を配合する事が出来る。配合量は全固形分に対して、0.0001乃至20質量%、好ましくは0.0005乃至10質量%、さらに好ましくは0.01乃至3質量%である。
酸発生剤としては、熱酸発生剤や光酸発生剤が挙げられる。
光酸発生剤は、レジストの露光時に酸を生ずる。そのため、下層膜の酸性度の調整ができる。これは、下層膜の酸性度を上層のレジストとの酸性度に合わせるための一方法である。また、下層膜の酸性度の調整によって、上層に形成されるレジストのパターン形状の調整ができる。
本発明のレジスト下層膜形成組成物に含まれる光酸発生剤としては、オニウム塩化合物、スルホンイミド化合物、及びジスルホニルジアゾメタン化合物等が挙げられる。
光酸発生剤が使用される場合、その割合としては、レジスト下層膜形成組成物の固形分100質量部に対して、0.01乃至5質量部、または0.1乃至3質量部、または0.5乃至1質量部である。
本発明に係るレジスト下層膜形成組成物は、後記する各種ポリマーを特定の溶媒に溶解させることによって調製され、均一な溶液状態で用いられる。
(式(6)中のR1、R2及びR3は各々水素原子、酸素原子、硫黄原子又はアミド結合で中断されていてもよい炭素原子数1~20のアルキル基を表し、互いに同一であっても異なっても良く、互いに結合して環構造を形成しても良い。)
式(6)で表される化合物は、これと相溶性で、上記ポリマーを溶解できる溶媒であれば、上記した溶媒と併用することができる。
下記式:
で表される化合物が好ましく、式(6)で表される化合物として特に好ましいのは、3-メトキシ-N,N-ジメチルプロピオンアミド、及びN,N-ジメチルイソブチルアミドである。
本発明に係るレジスト下層膜材料には、ピンホールやストレーション等の発生がなく、表面むらに対する塗布性をさらに向上させるために、界面活性剤を配合することができる。界面活性剤としては、例えばポリオキシエチレンラウリルエーテル、ポリオキシエチレンステアリルエーテル、ポリオキシエチレンセチルエーテル、ポリオキシエチレンオレイルエーテル等のポリオキシエチレンアルキルエーテル類、ポリオキシエチレンオクチルフェノールエーテル、ポリオキシエチレンノニルフェノールエーテル等のポリオキシエチレンアルキルアリルエーテル類、ポリオキシエチレン・ポリオキシプロピレンブロックコポリマー類、ソルビタンモノラウレート、ソルビタンモノパルミテート、ソルビタンモノステアレート、ソルビタンモノオレエート、ソルビタントリオレエート、ソルビタントリステアレート等のソルビタン脂肪酸エステル類、ポリオキシエチレンソルビタンモノラウレート、ポリオキシエチレンソルビタンモノパルミテート、ポリオキシエチレンソルビタンモノステアレート、ポリオキシエチレンソルビタントリオレエート、ポリオキシエチレンソルビタントリステアレート等のポリオキシエチレンソルビタン脂肪酸エステル類等のノニオン系界面活性剤、エフトップEF301、EF303、EF352((株)トーケムプロダクツ製、商品名)、メガファックF171、F173、R-40、R-40N、R-40LM(DIC(株)製、商品名)、フロラードFC430、FC431(住友スリーエム(株)製、商品名)、アサヒガードAG710、サーフロンS-382、SC101、SC102、SC103、SC104、SC105、SC106(旭硝子(株)製、商品名)等のフッ素系界面活性剤、オルガノシロキサンポリマーKP341(信越化学工業(株)製)等を挙げることができる。これらの界面活性剤の配合量は、レジスト下層膜材料の全固形分に対して通常2.0質量%以下、好ましくは1.0質量%以下である。これらの界面活性剤は単独で使用してもよいし、また二種以上の組み合わせで使用することもできる。界面活性剤が使用される場合、その割合としては、レジスト下層膜形成組成物の固形分100質量部に対して0.0001乃至5質量部、または0.001乃至1質量部、または0.01乃至0.5質量部である。
本発明のリソグラフィー用レジスト下層膜材料には、吸光剤、レオロジー調整剤、接着補助剤などを添加することができる。レオロジー調整剤は、下層膜形成組成物の流動性を向上させるのに有効である。接着補助剤は、半導体基板またはレジストと下層膜の密着性を向上させるのに有効である。
本発明に係るレジスト下層膜形成組成物の固形分は通常0.1乃至70質量%、好ましくは0.1乃至60質量%とする。固形分はレジスト下層膜形成組成物から溶媒を除いた全成分の含有割合である。固形分中におけるポリマーの割合は、1乃至100質量%、1乃至99.9質量%、50乃至99.9質量%、50乃至95質量%、50乃至90質量%の順で好ましい。
以下、本発明に係るレジスト下層膜形成組成物を用いたレジスト下層膜及び半導体装置の製造方法について説明する。
半導体装置の製造に使用される基板(例えば、シリコンウエハー基板、シリコン/二酸化シリコン被覆基板、シリコンナイトライド基板、ガラス基板、ITO基板、ポリイミド基板、及び低誘電率材料(low-k材料)被覆基板等)の上に、スピナー、コーター等の適当な塗布方法により本発明のレジスト下層膜形成組成物が塗布され、その後、焼成することによりレジスト下層膜が形成される。焼成する条件としては、焼成温度80℃乃至250℃、焼成時間0.3乃至60分間の中から適宜、選択される。好ましくは、焼成温度150℃乃至250℃、焼成時間0.5乃至2分間である。ここで、形成される下層膜の膜厚としては、例えば、10乃至1000nmであり、又は20乃至500nmであり、又は30乃至300nmであり、又は50乃至300nmであり、又は50乃至200nmである。
現像液としては、水酸化カリウム、水酸化ナトリウムなどのアルカリ金属水酸化物の水溶液、水酸化テトラメチルアンモニウム、水酸化テトラエチルアンモニウム、コリンなどの水酸化四級アンモニウムの水溶液、エタノールアミン、プロピルアミン、エチレンジアミンなどのアミン水溶液等のアルカリ性水溶液を例として挙げることができる。さらに、これらの現像液に界面活性剤などを加えることもできる。現像の条件としては、温度5乃至50℃、時間10乃至600秒から適宜選択される。
フッ素系ガスとしては、例えば、テトラフルオロメタン(CF4)、パーフルオロシクロブタン(C4F8)、パーフルオロプロパン(C3F8)、トリフルオロメタン、及びジフルオロメタン(CH2F2)等が挙げられる。
100mL二口フラスコに9,9-ビス(4-ヒドロキシ)フルオレン(東京化成工業株式会社製)8.00g、1-ピレンカルボキシアルデヒド(アルドリッチ製)5.30g、プロピレングリコールモノメチルエーテルアセテート20.77g、メタンスルホン酸(東京化成工業株式会社製)0.55gを入れた。その後150℃まで加熱し、約16.5時間還流撹拌した。反応終了後、シクロヘキサノン34.62gで希釈した。この希釈溶液をメタノール溶液中に滴下し、再沈殿させた。得られた沈殿物を吸引ろ過し、ろ物を60℃で一晩減圧乾燥した。そして、粉末の樹脂を7.05g得た。得られたポリマーは式(1-1)に相当した。GPCによりポリスチレン換算で測定される重量平均分子量Mwは2,260であった。
合成例1で得た樹脂をシクロヘキサノンに溶解後、イオン交換を経て樹脂溶液(固形分は18.45質量%)を得た。この樹脂溶液5.50gに1%界面活性剤(DIC(株)製、メガファックR-40)含有プロピレングリコールモノメチルエーテルアセテート0.20g、プロピレングリコールモノメチルエーテルアセテート0.714g、シクロヘキサノン3.75gを加え、口径0.1μmのポリテトラフルオロエチレン製マイクロフィルターにて濾過して、レジスト下層膜形成組成物の溶液を調製した。
合成例2で得た樹脂をシクロヘキサノンに溶解後、イオン交換を経て樹脂溶液(固形分は18.85質量%)を得た。この樹脂溶液5.00gに1%界面活性剤(DIC(株)製、メガファックR-40)含有プロピレングリコールモノメチルエーテルアセテート0.19g、プロピレングリコールモノメチルエーテルアセテート0.895g、シクロヘキサノン5.66gを加え、口径0.1μmのポリテトラフルオロエチレン製マイクロフィルターにて濾過して、レジスト下層膜形成組成物の溶液を調製した。
合成例3で得た樹脂をプロピレングリコールモノメチルエーテルアセテートに溶解後、イオン交換を経て樹脂溶液(固形分は16.50質量%)を得た。この樹脂溶液6.50gに1%界面活性剤(DIC(株)製、メガファックR-40)含有プロピレングリコールモノメチルエーテルアセテート0.11g、プロピレングリコールモノメチルエーテルアセテート1.23g、プロピレングリコールモノメチルエーテル2.90gを加え、口径0.1μmのポリテトラフルオロエチレン製マイクロフィルターにて濾過して、レジスト下層膜形成組成物の溶液を調製した。
合成例4で得た樹脂をシクロヘキサノンに溶解後、イオン交換を経て樹脂溶液(固形分は16.45質量%)を得た。この樹脂溶液6.00gに1%界面活性剤(DIC(株)製、メガファックR-40)含有プロピレングリコールモノメチルエーテルアセテート0.20g、プロピレングリコールモノメチルエーテルアセテート0.695g、シクロヘキサノン3.00gを加え、口径0.1μmのポリテトラフルオロエチレン製マイクロフィルターにて濾過して、レジスト下層膜形成組成物の溶液を調製した。
合成例5で得た樹脂をシクロヘキサノンに溶解後、イオン交換を経て樹脂溶液(固形分は19.70質量%)を得た。この樹脂溶液4.80gに1%界面活性剤(DIC(株)製、メガファックR-40)含有プロピレングリコールモノメチルエーテルアセテート0.19g、プロピレングリコールモノメチルエーテルアセテート0.901g、シクロヘキサノン5.90gを加え、口径0.1μmのポリテトラフルオロエチレン製マイクロフィルターにて濾過して、レジスト下層膜形成組成物の溶液を調製した。
合成例6で得た樹脂をプロピレングリコールモノメチルエーテルに溶解後、イオン交換を経て樹脂溶液(固形分は17.40質量%)を得た。この樹脂溶液5.00gに1%界面活性剤(DIC(株)製、メガファックR-40)含有プロピレングリコールモノメチルエーテルアセテート0.09g、プロピレングリコールモノメチルエーテルアセテート2.91g、プロピレングリコールモノメチルエーテル2.88gを加え、口径0.1μmのポリテトラフルオロエチレン製マイクロフィルターにて濾過して、レジスト下層膜形成組成物の溶液を調製した。
BINFL(旭有機材株式会社製)をシクロヘキサノンに溶解させ、BINFL含有シクロヘキサノン溶液(固形分は21.74質量%)を得た。この溶液1.45gに1%界面活性剤(DIC(株)製、メガファックR-40)含有プロピレングリコールモノメチルエーテル0.06g、TMOM-BP(本州化学工業(株)製)0.09g、2%K-PURE TAG2689(キングインダストリーズ社製トリフルオロメタンスルホン酸系化合物)含有プロピレングリコールモノメチルエーテル0.47g、シクロヘキサノン3.89g、プロピレングリコールモノメチルエーテル0.03gを加え、よく撹拌した後、口径0.1μmのポリテトラフルオロエチレン製マイクロフィルターにて濾過して、レジスト下層膜形成組成物の溶液を調製した。
DM-BINFL(旭有機材株式会社製)をシクロヘキサノンに溶解させ、DM-BINFL含有シクロヘキサノン溶液(固形分は18.63質量%)を得た。この溶液1.69gに1%界面活性剤(DIC(株)製、メガファックR-40)含有プロピレングリコールモノメチルエーテル0.06g、TMOM-BP(本州化学工業(株)製) 0.09g、2%K-PURE TAG2689(キングインダストリーズ社製トリフルオロメタンスルホン酸系化合物)含有プロピレングリコールモノメチルエーテル0.47g、シクロヘキサノン3.64g、プロピレングリコールモノメチルエーテル0.03gを加えてよく撹拌した後、口径0.1μmのポリテトラフルオロエチレン製マイクロフィルターにて濾過して、レジスト下層膜形成組成物の溶液を調製した。
合成例1で得た樹脂をシクロヘキサノンに溶解後、イオン交換を経て樹脂溶液(固形分は18.45質量%)を得た。この樹脂溶液3.00gに1%界面活性剤(DIC(株)製、メガファックR-40)含有プロピレングリコールモノメチルエーテル0.07g、TMOM-BP(本州化学工業(株)製) 0.21g、2%K-PURE TAG2689(キングインダストリーズ社製トリフルオロメタンスルホン酸系化合物)含有プロピレングリコールモノメチルエーテル1.06g、シクロヘキサノン6.91g、プロピレングリコールモノメチルエーテル0.51gを加えてよく撹拌した後、口径0.1μmのポリテトラフルオロエチレン製マイクロフィルターにて濾過して、レジスト下層膜形成組成物の溶液を調製した。
比較合成例1で得た樹脂をシクロヘキサノンに溶解後、イオン交換を経て樹脂溶液(固形分は22.65質量%)を得た。この樹脂溶液5.50gに1%界面活性剤(DIC(株)製、メガファックR-40)含有プロピレングリコールモノメチルエーテルアセテート0.11g、プロピレングリコールモノメチルエーテルアセテート1.19g、シクロヘキサノン7.87gを加え、口径0.1μmのポリテトラフルオロエチレン製マイクロフィルターにて濾過して、レジスト下層膜形成組成物の溶液を調製した。
比較合成例2で得た樹脂をプロピレングリコールモノメチルエーテルアセテートに溶解後、イオン交換を経て樹脂溶液(固形分は21.95質量%)を得た。この樹脂溶液6.50gに1%界面活性剤(DIC(株)製、メガファックR-40)含有プロピレングリコールモノメチルエーテルアセテート0.14g、プロピレングリコールモノメチルエーテルアセテート3.78g、プロピレングリコールモノメチルエーテル3.86gを加え、口径0.1μmのポリテトラフルオロエチレン製マイクロフィルターにて濾過して、レジスト下層膜形成組成物の溶液を調製した。
比較合成例3で得た樹脂をプロピレングリコールモノメチルエーテルアセテートに溶解後、イオン交換を経て樹脂溶液(固形分は20.67質量%)を得た。この樹脂溶液7.00gに1%界面活性剤(DIC(株)製、メガファックR-40)含有プロピレングリコールモノメチルエーテルアセテート0.14g、プロピレングリコールモノメチルエーテルアセテート3.43g、プロピレングリコールモノメチルエーテル3.91gを加え、口径0.1μmのポリテトラフルオロエチレン製マイクロフィルターにて濾過して、レジスト下層膜形成組成物の溶液を調製した。
比較例1-3及び実施例1-9で調製したレジスト下層膜形成組成物の溶液を、それぞれスピンコーターを用いてシリコンウェハー上に塗布し、ホットプレート上で400℃90秒間焼成し、レジスト下層膜(膜厚0.20μm)を形成した。なお、比較例3は耐熱性の観点から膜厚の維持が困難であったため、350℃90秒間焼成してレジスト下層膜(膜厚0.20μm)を形成し、実施例7-9は240℃90秒間焼成してレジスト下層膜(膜厚0.20μm)を形成した。これらレジスト下層膜をレジストに使用する溶剤である、乳酸エチル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノメチルエーテルアセテート、及びシクロヘキサノンに浸漬した。これらレジスト下層膜はこれら溶剤に不溶であった。
比較例1-3及び実施例1-9で調製したレジスト下層膜形成組成物の溶液を、それぞれスピンコーターを用いてシリコンウェハー上に塗布した。ホットプレート上で400℃90秒間焼成し、レジスト下層膜(膜厚0.05μm)を形成した。なお、比較例3は耐熱性の観点から膜厚の維持が困難であったため、350℃90秒間焼成してレジスト下層膜(膜厚0.20μm)を形成し、実施例7-9は240℃90秒間焼成してレジスト下層膜(膜厚0.20μm)を形成した。これらのレジスト下層膜を、分光エリプソメーターを用いて波長193nm、248nmでの屈折率(n値)及び光学吸光係数(k値、減衰係数とも呼ぶ)を測定した。結果を表1に示した。
ドライエッチング速度の測定に用いたエッチャー及びエッチングガスは以下のものを用
いた。
RIE-10NR(サムコ製):CF4
比較例1-3及び実施例1-9で調製したレジスト下層膜形成組成物の溶液を、それぞれスピンコーターを用いてシリコンウェハー上に塗布した。ホットプレート上で400℃90秒間焼成してレジスト下層膜(膜厚0.20μm)を形成した。なお、比較例3は耐熱性の観点から膜厚の維持が困難であったため、350℃90秒間焼成してレジスト下層膜(膜厚0.20μm)を形成し、実施例7-9は240℃90秒間焼成してレジスト下層膜(膜厚0.20μm)を形成した。エッチングガスとしてCF4ガスを使用してドライエッチング速度を測定し、比較例1-3及び実施例1-9とレジスト下層膜のドライエッチング速度との比較を行った。結果を表3に示した。ドライエッチング速度比は(レジスト下層膜)/(KrFフォトレジスト)のドライエッチング速度比である。
比較例1-3及び実施例1-6で調製したレジスト下層膜形成組成物の溶液を、それぞれスピンコーターを用いてシリコンウェハー上に塗布し、ホットプレート上で400℃1分間30秒間または350℃1分間30秒間焼成して、レジスト下層膜(膜厚0.20μm)を形成した。得られた膜を室温(約20℃)から一分間に10℃ずつの割合で昇温加熱して大気中で熱重量分析を行い、重量減少の経時変化を追跡した。結果を表3に示す。
Claims (12)
- 下記式(1)で示される化合物を含む、レジスト下層膜形成組成物。
[式(1)中、
は単結合又は二重結合を表し、
X1は、-N(R1)-又は-CH(R1)-を表し、
X2は、-N(R2)-又は-CH(R2)-を表し、
X3は、-N=、-CH=、-N(R3)-又は-CH(R3)-を表し、
X4は、-N=、-CH=、-N(R4)-又は-CH(R4)-を表し、
R1、R2、R3及びR4は同一又は異なり、それぞれ水素原子、C1~20の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~10のアルケニル基、C2~10のアルキニル基、カルボキシル基又はシアノ基を表し、上記アルキル基及びアリール基はC1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、アミノ基、グリシジル基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子又は硫黄原子で中断されていてもよく、
R5、R6、R9及びR10は同一又は異なり、それぞれ水素原子、ヒドロキシ基、C1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、C1~10の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~20のアルケニル基又はC2~10のアルキニル基を表し、上記アシル基、アルコキシ基、アルコキシカルボニル基、アルキル基、アリール基、アルケニル基及びアルキニル基は、アミノ基、ニトロ基、シアノ基、ヒドロキシ基、グリシジル基及びカルボキシル基からなる群より選択される基を1つ又は複数有していても良く、
R7及びR8は同一又は異なり、それぞれベンゼン環又はナフタレン環を表し、
n及びoは0又は1である。] - 式(1)のR1、R2、R3又はR4が、ヒドロキシ基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子もしくは硫黄原子で中断されていてもよいC1~20の直鎖状、分岐状もしくは環状のアルキル基である、請求項1に記載のレジスト下層膜形成組成物。
- 下記式(2)で示される繰り返し単位a、b、c、d、e、f、g、h、iの1つ又は複数を1単位以上含有する化合物を含む、レジスト下層膜形成組成物。
式(2)
[式(2)中、
は単結合又は二重結合を表し、
X1は、-N(R1)-、-CH(R1)-、-N<又は-CH<を表し、
X2は、-N(R2)-、-CH(R2)-、-N<又は-CH<を表し、
X3は、-N=、-CH=、-N(R3)-、-CH(R3)-、-N<又は-CH<を表し、
X4は、-N=、-CH=、-N(R4)-、-CH(R4)-、-N<又は-CH<を表し、
R1、R2、R3及びR4は同一又は異なり、それぞれ水素原子、C1~20の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~10のアルケニル基、C2~10のアルキニル基、カルボキシル基又はシアノ基を表し、上記アルキル基及びアリール基はC1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、アミノ基、グリシジル基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子又は硫黄原子で中断されていてもよく、
R5、R6、R9及びR10は同一又は異なり、それぞれ水素原子、ヒドロキシ基、C1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、C1~10の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~20のアルケニル基又はC2~10のアルキニル基を表し、上記アシル基、アルコキシ基、アルコキシカルボニル基、アルキル基、アリール基、アルケニル基及びアルキニル基は、アミノ基、ニトロ基、シアノ基、ヒドロキシ基、グリシジル基及びカルボキシル基からなる群より選択される基を1つ又は複数有していても良く、
R7及びR8は同一又は異なり、それぞれベンゼン環又はナフタレン環を表し、
n及びoは0又は1であり、
B1とB2は同一又は異なり、それぞれ水素原子、酸素原子もしくは硫黄原子で中断されていてもよいC1~20の直鎖状、分岐状もしくは環状のアルキル基又はC6~40のアリール基及びC6~40の複素環基からなる群より選択される芳香族化合物由来の基を表し、B1とB2はこれらが結合する炭素原子と一緒になって環を形成してもよく、前記芳香族化合物由来の基の水素原子は、C1~20のアルキル基、フェニル基、縮合環基、複素環基、ヒドロキシ基、アミノ基、エーテル基、アルコキシ基、シアノ基、ニトロ基又はカルボキシル基で置換されていてもよい。] - 下記式(3)で示される繰り返し単位j、k、l、m、r、s、t、u、v、wの1つ又は複数を1単位以上含有する化合物を含む、レジスト下層膜形成組成物。
式(3)
[式(3)中、
は単結合又は二重結合を表し、
X1は、-N<又は-CH<を表し、
X2は、-N<又は-CH<を表し、
X3は、-N=、-CH=、-N(R3)-又は-CH(R3)-を表し、
X4は、-N=、-CH=、-N(R4)-又は-CH(R4)-を表し、
R3及びR4は同一又は異なり、それぞれ水素原子、C1~20の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~10のアルケニル基、C2~10のアルキニル基、カルボキシル基又はシアノ基を表し、上記アルキル基及びアリール基はC1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、アミノ基、グリシジル基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子又は硫黄原子で中断されていてもよく、
R5、R6、R9及びR10は同一又は異なり、それぞれ水素原子、ヒドロキシ基、C1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、C1~10の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~20のアルケニル基又はC2~10のアルキニル基を表し、上記アシル基、アルコキシ基、アルコキシカルボニル基、アルキル基、アリール基、アルケニル基及びアルキニル基は、アミノ基、ニトロ基、シアノ基、ヒドロキシ基、グリシジル基及びカルボキシル基からなる群より選択される基を1つ又は複数有していても良く、
R7及びR8は同一又は異なり、それぞれベンゼン環又はナフタレン環を表し、
n及びoは0又は1であり、
p及びqは0~20の整数であり、
p個のメチレン基及びq個のメチレン基は2個以上の場合には酸素原子又は硫黄原子で中断されていてもよく、
B3は直接結合、又はC1~20のアルキル基、フェニル基、縮合環基、複素環基、ヒドロキシ基、アミノ基、エーテル基、アルコキシ基、シアノ基、ニトロ基もしくはカルボキシル基で置換されていてもよいC6~40の芳香族化合物由来の基を表す。] - 下記式(1)の化合物と1種類以上のアルデヒド化合物との反応、下記式(1)の化合物と1種類以上の芳香族化合物との反応、又は下記式(1)の化合物と1種類以上の芳香族化合物と1種類以上のアルデヒド化合物との反応によって得られる樹脂を含む、レジスト下層膜形成組成物。
[式(1)中、
は単結合又は二重結合を表し、
X1は、-N(R1)-又は-CH(R1)-を表し、
X2は、-N(R2)-又は-CH(R2)-を表し、
X3は、-N=、-CH=、-N(R3)-又は-CH(R3)-を表し、
X4は、-N=、-CH=、-N(R4)-又は-CH(R4)-を表し、
R1、R2、R3及びR4は同一又は異なり、それぞれ水素原子、C1~20の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~10のアルケニル基、C2~10のアルキニル基、カルボキシル基又はシアノ基を表し、上記アルキル基及びアリール基はC1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、アミノ基、グリシジル基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子又は硫黄原子で中断されていてもよく、
R5、R6、R9及びR10は同一又は異なり、それぞれ水素原子、ヒドロキシ基、C1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、C1~10の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~20のアルケニル基又はC2~10のアルキニル基を表し、上記アシル基、アルコキシ基、アルコキシカルボニル基、アルキル基、アリール基、アルケニル基及びアルキニル基は、アミノ基、ニトロ基、シアノ基、ヒドロキシ基、グリシジル基及びカルボキシル基からなる群より選択される基を1つ又は複数有していても良く、
R7及びR8は同一又は異なり、それぞれベンゼン環又はナフタレン環を表し、
n及びoは0又は1である。] - 式(1)のR1、R2、R3又はR4が、ヒドロキシ基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子もしくは硫黄原子で中断されていてもよいC1~20の直鎖状、分岐状もしくは環状のアルキル基である、請求項5に記載のレジスト下層膜形成組成物。
- 架橋剤を更に含む請求項1乃至請求項6のいずれか1項に記載のレジスト下層膜形成組成物。
- 酸及び/又は酸発生剤を更に含む請求項1乃至請求項7のいずれか1項に記載のレジスト下層膜形成組成物。
- 請求項1乃至請求項8のいずれか1項に記載のレジスト下層膜形成組成物を半導体基板上に塗布し焼成する工程を含むレジスト下層膜の製造方法。
- 半導体基板上に請求項1乃至請求項8のいずれか1項に記載のレジスト下層膜形成組成物によりレジスト下層膜を形成する工程、その上にレジスト膜を形成する工程、光又は電子線の照射と現像によりレジストパターンを形成する工程、レジストパターンにより該下層膜をエッチングする工程、及びパターン化された下層膜により半導体基板を加工する工程を含む半導体装置の製造方法。
- 半導体基板に請求項1乃至請求項8のいずれか1項に記載のレジスト下層膜形成組成物によりレジスト下層膜を形成する工程、その上にハードマスクを形成する工程、更にその上にレジスト膜を形成する工程、光又は電子線の照射と現像によりレジストパターンを形成する工程、レジストパターンによりハードマスクをエッチングする工程、パターン化されたハードマスクにより該下層膜をエッチングする工程、及びパターン化されたレジスト下層膜により半導体基板を加工する工程を含む半導体装置の製造方法。
- 下記式(1)の化合物と1種類以上のアルデヒド化合物とを反応させる工程、下記式(1)の化合物と1種類以上の芳香族化合物とを反応させる工程、又は下記式(1)の化合物と1種類以上の芳香族化合物と1種類以上のアルデヒド化合物とを反応させる工程を含む、レジスト下層膜形成組成物用樹脂の製造方法。
[式(1)中、
は単結合又は二重結合を表し、
X1は、-N(R1)-又は-CH(R1)-を表し、
X2は、-N(R2)-又は-CH(R2)-を表し、
X3は、-N=、-CH=、-N(R3)-又は-CH(R3)-を表し、
X4は、-N=、-CH=、-N(R4)-又は-CH(R4)-を表し、
R1、R2、R3及びR4は同一又は異なり、それぞれ水素原子、C1~20の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~10のアルケニル基、C2~10のアルキニル基、カルボキシル基又はシアノ基を表し、上記アルキル基及びアリール基はC1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、アミノ基、グリシジル基又はヒドロキシ基で置換されていてもよく、且つ、酸素原子又は硫黄原子で中断されていてもよく、
R5、R6、R9及びR10は同一又は異なり、それぞれ水素原子、ヒドロキシ基、C1~6のアシル基、C1~6のアルコキシ基、C1~6のアルコキシカルボニル基、C1~10の直鎖状、分岐状もしくは環状のアルキル基、C6~20のアリール基、C2~20のアルケニル基又はC2~10のアルキニル基を表し、上記アシル基、アルコキシ基、アルコキシカルボニル基、アルキル基、アリール基、アルケニル基及びアルキニル基は、アミノ基、ニトロ基、シアノ基、ヒドロキシ基、グリシジル基及びカルボキシル基からなる群より選択される基を1つ又は複数有していても良く、
R7及びR8は同一又は異なり、それぞれベンゼン環又はナフタレン環を表し、
n及びoは0又は1である。]
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3748432A1 (en) * | 2019-06-04 | 2020-12-09 | Shin-Etsu Chemical Co., Ltd. | Composition for forming organic film, patterning process, and polymer |
WO2023243426A1 (ja) * | 2022-06-17 | 2023-12-21 | 日産化学株式会社 | レジスト下層膜形成組成物 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010041626A1 (ja) * | 2008-10-10 | 2010-04-15 | 日産化学工業株式会社 | フルオレンを含有する樹脂を含むリソグラフィー用レジスト下層膜形成組成物 |
JP2013137334A (ja) * | 2010-04-21 | 2013-07-11 | Nissan Chem Ind Ltd | ポリイミド構造を含有する樹脂を含むリソグラフィー用レジスト下層膜形成組成物 |
WO2014171326A1 (ja) * | 2013-04-17 | 2014-10-23 | 日産化学工業株式会社 | レジスト下層膜形成組成物 |
JP2015189694A (ja) * | 2014-03-27 | 2015-11-02 | 旭有機材工業株式会社 | フルオレン誘導体及びその製造方法、化合物、組成物並びに硬化物 |
US20160363864A1 (en) * | 2015-06-10 | 2016-12-15 | Samsung Sdi Co., Ltd. | Polymer, organic layer composition, organic layer, and method of forming patterns |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4261948B2 (ja) | 2003-03-18 | 2009-05-13 | 三井化学株式会社 | フルオレン化合物、および該フルオレン化合物を含有する有機電界発光素子 |
JP5068828B2 (ja) * | 2010-01-19 | 2012-11-07 | 信越化学工業株式会社 | レジスト下層膜形成用組成物、レジスト下層膜形成方法、及びパターン形成方法 |
KR101866828B1 (ko) | 2010-10-14 | 2018-06-14 | 닛산 가가쿠 고교 가부시키 가이샤 | 폴리에테르 구조를 함유하는 수지를 포함하는 리소그래피용 레지스트 하층막 형성 조성물 |
CN103827159B (zh) | 2011-09-29 | 2016-07-06 | 日产化学工业株式会社 | 二芳基胺酚醛清漆树脂 |
JP6094947B2 (ja) * | 2011-09-30 | 2017-03-15 | 三菱瓦斯化学株式会社 | フルオレン構造を有する樹脂及びリソグラフィー用下層膜形成材料 |
JP6137486B2 (ja) * | 2012-02-01 | 2017-05-31 | 日産化学工業株式会社 | 複素環を含む共重合樹脂を含むレジスト下層膜形成組成物 |
US9494862B2 (en) * | 2012-06-20 | 2016-11-15 | Nissan Chemical Industries, Ltd. | Resist underlayer film forming composition containing silicon having sulfone structure and amine structure |
KR102417838B1 (ko) * | 2014-08-08 | 2022-07-06 | 닛산 가가쿠 가부시키가이샤 | 방향족 메틸올 화합물이 반응된 노볼락 수지를 포함하는 레지스트 하층막 형성 조성물 |
KR101895908B1 (ko) * | 2015-06-10 | 2018-10-24 | 삼성에스디아이 주식회사 | 중합체, 유기막 조성물, 및 패턴형성방법 |
JP6712188B2 (ja) * | 2015-07-13 | 2020-06-17 | 信越化学工業株式会社 | レジスト下層膜形成用組成物及びこれを用いたパターン形成方法 |
JP6625934B2 (ja) * | 2015-07-14 | 2019-12-25 | 信越化学工業株式会社 | レジスト下層膜材料、パターン形成方法、及び化合物 |
JP2019169641A (ja) * | 2018-03-23 | 2019-10-03 | Tdk株式会社 | 有機電界発光素子用化合物およびこれを用いた有機電界発光素子 |
-
2018
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010041626A1 (ja) * | 2008-10-10 | 2010-04-15 | 日産化学工業株式会社 | フルオレンを含有する樹脂を含むリソグラフィー用レジスト下層膜形成組成物 |
JP2013137334A (ja) * | 2010-04-21 | 2013-07-11 | Nissan Chem Ind Ltd | ポリイミド構造を含有する樹脂を含むリソグラフィー用レジスト下層膜形成組成物 |
WO2014171326A1 (ja) * | 2013-04-17 | 2014-10-23 | 日産化学工業株式会社 | レジスト下層膜形成組成物 |
JP2015189694A (ja) * | 2014-03-27 | 2015-11-02 | 旭有機材工業株式会社 | フルオレン誘導体及びその製造方法、化合物、組成物並びに硬化物 |
US20160363864A1 (en) * | 2015-06-10 | 2016-12-15 | Samsung Sdi Co., Ltd. | Polymer, organic layer composition, organic layer, and method of forming patterns |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3748432A1 (en) * | 2019-06-04 | 2020-12-09 | Shin-Etsu Chemical Co., Ltd. | Composition for forming organic film, patterning process, and polymer |
US11709429B2 (en) | 2019-06-04 | 2023-07-25 | Shin-Etsu Chemical Co., Ltd. | Composition for forming organic film, patterning process, and polymer |
WO2023243426A1 (ja) * | 2022-06-17 | 2023-12-21 | 日産化学株式会社 | レジスト下層膜形成組成物 |
WO2024096069A1 (ja) * | 2022-11-02 | 2024-05-10 | 日産化学株式会社 | レジスト下層膜形成組成物 |
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