WO2018000949A1 - 掩膜板及其制造方法 - Google Patents

掩膜板及其制造方法 Download PDF

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Publication number
WO2018000949A1
WO2018000949A1 PCT/CN2017/083739 CN2017083739W WO2018000949A1 WO 2018000949 A1 WO2018000949 A1 WO 2018000949A1 CN 2017083739 W CN2017083739 W CN 2017083739W WO 2018000949 A1 WO2018000949 A1 WO 2018000949A1
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WIPO (PCT)
Prior art keywords
mask
opening
display panel
shape
openings
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PCT/CN2017/083739
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English (en)
French (fr)
Inventor
白珊珊
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京东方科技集团股份有限公司
鄂尔多斯市源盛光电有限责任公司
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Application filed by 京东方科技集团股份有限公司, 鄂尔多斯市源盛光电有限责任公司 filed Critical 京东方科技集团股份有限公司
Priority to US15/576,524 priority Critical patent/US10787729B2/en
Publication of WO2018000949A1 publication Critical patent/WO2018000949A1/zh
Priority to US17/004,382 priority patent/US11396693B2/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
    • B05C21/005—Masking devices
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

Definitions

  • the present application relates to the field of OLED vacuum evaporation technology, and in particular to a mask and a method of manufacturing the same.
  • the vacuum evaporation process is the main process of the organic light-emitting diode process
  • the mask is a key component of the vacuum evaporation process.
  • a plurality of openings are provided in an array in the mask for forming a pixel pattern on the display panel on the back glass.
  • the plurality of openings form a plurality of open areas, each open area having the same shape and size as the display panel on the back panel glass, and the distribution of the open areas is the same as the display panel on the back glass.
  • the existing mask is a layer structure, and the opening area on the mask corresponds to the shape and size of the target display panel. Therefore, if different display panels of different shapes and sizes are to be prepared, different masks are required.
  • the board correspondingly, needs to manufacture masks of different shapes and sizes, and the process for manufacturing the openings for forming the pixel patterns in the mask is complicated, and the manufacturing precision is high, resulting in high manufacturing cost of the mask.
  • the present application is directed to the above-mentioned deficiencies in the prior art, and provides a mask for at least partially solving the problem of high manufacturing cost of the mask.
  • One aspect of the present application provides a mask comprising a first mask plate and a second mask plate disposed in a stack;
  • the first mask plate is provided with a first opening, and the first opening corresponds to a size and a shape of the target display panel;
  • the second mask plate is provided with a second opening region, the second opening region covers at least one of the first openings, and the second opening region includes a plurality of second openings.
  • the first opening has the same shape as the target display panel, and an area of the first opening is larger than an area of the target display panel.
  • a distance between a projected edge of the first opening on the backplane glass and an edge of the target display panel corresponding to the back panel glass is 75-150 um.
  • the shape of the second opening area is a rectangle.
  • the second opening area is multiple, and each of the second opening areas has the same shape.
  • each of the second opening areas has the same size.
  • the second mask covers the first mask.
  • the first mask and the second mask have the same outer dimensions and shapes.
  • the second mask is composed of a plurality of parts that are spliced together in the same shape and size.
  • the mask further includes a mask frame, and the first mask and the mask frame are welded by the first solder joint to form portions of the second mask and the first mask.
  • the second solder joint is soldered.
  • the spacing between the adjacent first solder joints and the second solder joints is greater than 2 mm.
  • the first solder joint is located at a peripheral position around the first mask panel, and the second solder joint is located at a first side and a second side of each portion of the second mask panel.
  • the first side and the second side are respectively sides of the second mask that are not used for splicing.
  • the first mask and the second mask are made of a metal invar material.
  • the first mask has a thickness of 100-150 um
  • the second mask has a thickness of 20-40 um.
  • Another aspect of the present application provides a method of manufacturing a mask comprising the steps of:
  • first mask Forming a first mask, wherein the first mask is provided with a first opening, the first opening corresponding to a size and shape of the target display panel;
  • Forming a second mask wherein the second mask is provided with a second opening region, the second opening region covers at least one of the first openings, and the second opening region includes a plurality of second openings ;
  • a second mask is attached to the first mask.
  • the step of connecting the first mask to the mask frame comprises: soldering the first mask to the mask frame, and connecting the second mask to the first mask
  • the step of the board includes: aligning the second mask sheet with the first mask sheet; and soldering the second mask sheet to the first mask sheet.
  • the step of aligning the second mask with the first mask further comprises: first aligning a first alignment hole at a corner position of each first opening on the first mask The second alignment holes in each of the second opening regions on the second mask are aligned and mated.
  • the step of forming the second mask further comprises: splicing a plurality of portions having the same shape and size to form the second mask.
  • FIG. 1a is a schematic structural view of a back sheet glass according to an embodiment of the present invention.
  • FIG. 1b is a schematic structural diagram of a mask provided by an embodiment of the present invention.
  • FIG. 2 is a schematic view showing the projection of the first opening and the display panel according to an embodiment of the present invention
  • FIG. 3 is a second schematic structural diagram of a mask according to an embodiment of the present invention.
  • FIG. 4 is a third structural schematic view of a mask provided by an embodiment of the present invention.
  • FIG. 5 is a flowchart of a method for manufacturing a mask according to another embodiment of the present invention.
  • the back panel glass 3 includes a plurality of target display panels 31.
  • the shape of the display panel 31 is circular as an example. It should be noted that the back sheet glass 3 may also include only one target display panel 31.
  • an embodiment of the present invention provides a mask comprising: a first mask 1 and a second mask 2, wherein the first mask 1 and the second mask 2 are stacked
  • the first mask 1 is provided with a plurality of first openings 11
  • the area of the first mask 1 that is not the first opening 11 is the blocking area 12 .
  • the shape and size of the first opening 11 are the same as those of the display panel 31 on the back panel glass 3, that is, the first opening 11 corresponds to the target display panel 31.
  • the second mask panel 2 is provided with a plurality of second opening regions 21, and the second opening region 21 covers at least one first opening 11.
  • the second opening region 21 includes a plurality of second openings 211, each of which is arranged in an array and corresponds to each pixel for forming a pixel pattern.
  • the mask provided in this embodiment has a two-layer structure, and includes a first mask 1 and a second mask 2 which are disposed in a stack.
  • the first mask 1 is provided with the same shape and size as the target display panel 31.
  • the first opening 11 is.
  • the second mask region 2 is provided with a second opening region 21, and a plurality of second openings 211 for forming a pixel pattern are disposed in an array in the second opening region 21, and the second opening region 21 covers the first opening 11.
  • An opening 11 is disposed in the same size and shape as the target display panel 31, and cooperates with the original second mask 2 to form a new mask.
  • the first mask 11 Since the first mask 11 is manufactured only needs to ensure that the shape and size of the first opening 11 are the same as the size and shape of the target display panel 31, there is no need to further manufacture an opening for forming a pixel pattern, and therefore, compared with the existing one. In the case of a mask, the manufacturing process is simple and the manufacturing cost is low.
  • the area of the first opening 11 may be slightly larger than the area of the display panel 31.
  • the problem that the vapor deposition material cannot be vapor-deposited onto the display panel 31 does not occur.
  • the distance between the projected edge of the first opening 11 on the back panel glass 3 and the edge of the corresponding display panel 31 on the back panel glass 3 is 75-150 um.
  • the shape of the display panel 31 and the first opening 11 is circular as an example.
  • the distance h1 between the projected edge of the first opening 11 on the back sheet glass 3 and the edge of the corresponding display panel 31 on the back sheet glass 3 is 75-150 um, that is, the diameter of the first opening 11.
  • D2 is 150-300 um larger than the diameter D1 of the display panel 31.
  • the shape of the second opening area 21 may be a circle, a rectangle, a polygon, or the like. Alternatively, the shape of the second opening area 21 is a rectangle.
  • the second open area 21 of the rectangular shape should be uniformly changed compared with the second open area 21 of the non-rectangular shape, so that the second mask 2 can be prevented from being generated. Wrinkles prevent the problem of poor color mixing on the display panel after the evaporation process.
  • each of the second masks 2 may not be limited by the shape, arrangement, distribution, and frame circuit of the display panel 31. As long as the shape of each of the second opening regions 21 is the same, during the stretching process of the mask web, the stress of each of the second opening regions 21 will be uniform, and the second mask 2 will not wrinkle, correspondingly
  • the deformations of the second openings 211 in the second opening regions 21 are all the same, and the size and shape of the pixel patterns formed by the second openings 211 are the same, so that the display after the evaporation process can be solved. There is a problem with poor color mixing on the panel.
  • the size of each of the second opening regions 21 is also the same, so that the force strain of each of the second opening regions 21 having the same shape and size is more uniform during the stretching process of the mask sheet.
  • the second mask 2 covers the first mask 1 and the evaporation direction is evaporated from the second mask 2 to the first mask 1.
  • the vapor deposition material first passes through the second opening 211 in the second opening region 21 of the second mask 2, diffuses and then passes through the first opening 11 on the first mask 1 to be evaporated onto the display panel 31. Since the first mask 1 is below the second mask 2, the shielding region 12 on the first mask 1 blocks the evaporation material, and therefore, the evaporation material is not evaporated to the display panel 31. Outside the area.
  • the first mask 1 and the second mask 2 have the same outer dimensions and shapes.
  • the second opening area 21 may cover one or more first openings 11, for example, may cover the two first openings 11, or may cover the four first openings 11. In the present embodiment, as shown in FIG. 1b, the second opening region 21 covers the four first openings 11.
  • the first mask 1 is one, that is, an integral structure, and the second mask 2 can be formed by splicing a plurality of portions having the same shape and size.
  • the portions of the second mask 2 are strip-shaped, and the second mask 2 formed by splicing the strip portions 22 can be the same size and shape as the glass back panel.
  • the second mask plate 2 is composed of four strip portions 22 as an example for description. During the stretching process of the mask web, each strip portion 22 can evenly share the tensile force of the second mask 2 during the web forming process, so that the force strain between the strip portions 22 is more uniform. Further ensuring that the display panel does not exhibit poor color mixing after the evaporation process.
  • a first alignment hole (not shown) is disposed at a corner position of each of the first openings 11 on the first mask 1
  • a second opening region is disposed on the second mask 2 .
  • a second alignment hole (not shown) is disposed at a position corresponding to a corner position of each of the first openings 21, and the first alignment hole and the second alignment hole are By cooperating with the alignment, the first mask 1 and the second mask 2 can be correctly aligned.
  • the mask provided by the present invention further includes a mask frame 4, and the first mask 1 and the mask frame 4 are welded by the first solder joints 13, and the strips of the second mask 2 are The shaped portion 22 is welded to the first mask 1 by a second solder joint 23.
  • the first mask 1 and the mask frame 4 are welded incorrectly, it is not necessary to repair the welding positions of the strip structures 22 when repairing and re-welding, thereby greatly improving the repair efficiency.
  • the distance h2 between the position of the first solder joint 13 and the position of the second solder joint 23 is greater than 2 mm to facilitate soldering and avoid welding position errors.
  • the first solder joint 13 is located at a peripheral position around the first mask 1 and the second solder joint 23 is located at the first side 231 and the second side 232 of each strip portion 22 of the second mask 2.
  • the first side 231 and the second side 232 refer to non-adjacent sides of the strip portions 22 of the second mask 2.
  • the first mask 1 and the second mask 2 may be made of a metal invar material.
  • the first mask 1 may have a thickness of 100-150 um
  • the second mask 2 may have a thickness of 20-40 um.
  • FIG. 5 is a flowchart of a method for manufacturing the above mask according to another embodiment of the present invention. As shown in FIG. 5, the method for manufacturing the mask in the foregoing embodiment provided by the embodiment includes the following steps:
  • step S503 comprises: soldering the first mask to the mask frame.
  • step S504 includes: aligning the second mask with the first mask; and soldering the second mask to the first mask.
  • the step S504 includes: aligning the first alignment holes at the corner positions of the first openings on the first mask with the second alignment holes in the second opening regions on the second mask and Match the alignment.
  • step S502 further comprises: splicing a plurality of portions having the same shape and size to form the second mask.
  • the first mask 1 is stretched by a netting machine (not shown), and after determining the position of the first mask 1 through the first alignment hole, the first mask 1 is The mask frame 4 is welded by the first solder joint 13, wherein the first mask has a sag amount of less than 150 um. Then, the strip portions 22 of the second mask 2 are stretched by the web, and after the positions of the strips 22 are determined by the second alignment holes, the strip portions 22 of the second mask 2 are The first mask 1 is welded by the second pad 23 to complete the assembly of the entire mask.
  • the production of the circular-shaped display panel has high requirements for the mask.
  • the mask provided in this embodiment completely corresponds to the back panel glass, and the first mask panel and the second mask panel are used in combination to reduce the display.
  • the perimeter circuit of the panel and the evaporation process limit the design of the mask, so that the mask is fabricated according to the optimal design.
  • the mask plate of the embodiment can not only produce other non-conventional rectangular shape display panels such as a circle, but also reduce defects caused by the mask plate to improve product yield.
  • the mask provided in the above embodiments is a two-layer structure, including a first mask plate and a second mask plate which are arranged in a stack, and the first mask plate is provided with the first shape and the same size as the target display panel. Opening.
  • the second mask region is provided with a second opening region, and the second opening region is provided with a plurality of second openings for forming a pixel pattern, and the second opening region covers the first opening.
  • the first mask Since the first mask is manufactured, it is only necessary to ensure that the shape and size of the first opening are the same as the size and shape of the target display panel, and no further fabrication is required for forming the pixel.
  • the opening of the pattern is therefore simple in manufacturing process and low in manufacturing cost relative to the existing mask.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

一种掩膜板及一种制造掩膜板的方法。掩膜板包括层叠设置的第一掩膜板（1）和第二掩膜板（2），第一掩膜板（1）设置有第一开口（11），第一开口（11）与目标显示面板（31）的大小和形状相对应，第二掩膜板（2）设置有第二开口区域（21），第二开口区域（21）覆盖至少一个第一开口（11），且第二开口区域（21）包括多个第二开口（211）。

Description

掩膜板及其制造方法
相关申请的交叉引用
本申请要求于2016年6月29日提交的申请号为201620661367.2、发明名称为“一种掩膜板”的申请的优先权，其全部内容通过引用并入本文。
技术领域
本申请涉及OLED真空蒸镀技术领域，具体涉及掩膜板及其制造方法。
背景技术
在OLED(Organic Light-Emitting Diode，有机发光二极管)技术中，真空蒸镀工艺是有机发光二极管制程的主要工艺，掩膜板是真空蒸镀工艺的关键组件。掩膜板内以阵列方式设置有多个开口，用于使蒸镀材料在位于背板玻璃上的显示面板上形成像素图形。多个开口形成多个开口区域，各开口区域的形状和大小与背板玻璃上显示面板的形状和大小相同，开口区域的分布与背板玻璃上的显示面板的分布相同。随着显示行业的快速发展和人们需求的多样化，可穿戴设备领域等需求的显示面板的形状已不限于传统的矩形，而可以是更具有设计感的圆形或非规则形状。
现有的掩膜板存在以下缺陷：
现有的掩膜板为一层的结构，掩膜板上的开口区域与目标显示面板的形状和大小相对应，因此，若要制备不同形状与大小的显示面板，就需要采用不同的掩膜板，相应的，需要制造不同形状和大小的掩膜板，而制造掩膜板内用于形成像素图形的开口的工艺较为复杂，制造精度要求较高，导致掩膜板制造成本较高。
因此，亟需一种掩膜板以解决上述技术问题。
发明内容
本申请针对现有技术中存在的上述不足，提供一种掩膜板，用以至少部分解决掩膜板制造成本高的问题。
本申请的一个方面提供一种掩膜板，包括层叠设置的第一掩膜板和第二掩膜板；
所述第一掩膜板设置有第一开口，所述第一开口与目标显示面板的大小和形状相对应；
所述第二掩膜板设置有第二开口区域，第二开口区域覆盖至少一个所述第一开口，且所述第二开口区域包括多个第二开口。
可选的，所述第一开口与所述目标显示面板的形状相同，且所述第一开口的面积大于所述目标显示面板的面积。
可选的，所述第一开口在背板玻璃上的投影的边缘与背板玻璃上与其对应的目标显示面板的边缘之间的间距为75-150um。
可选的，所述第二开口区域的形状为矩形。
可选的，所述第二开口区域为多个，各第二开口区域的形状相同。
可选的，各所述第二开口区域的大小相同。
可选的，所述第二掩膜板覆盖于第一掩膜板上。
可选的，所述第一掩膜板与第二掩膜板的外形尺寸和形状相同。
可选的，所述第二掩膜板由拼接在一起的形状和大小相同的多个部分构成。
进一步的，所述掩膜板还包括掩膜板边框，所述第一掩膜板与掩膜板边框通过第一焊点焊接，构成第二掩膜板的各部分与第一掩膜板通过第二焊点焊接。
可选的，相邻的所述第一焊点与第二焊点之间的间距大于2mm。
可选的，所述第一焊点位于所述第一掩膜板四周的周边位置，所述第二焊点位于所述第二掩膜板的各部分的第一侧和第二侧，所述第一侧和第二侧分别为第二掩膜板的各部分的非用于拼接的一侧。
可选的，所述第一掩膜板与第二掩膜板采用金属因瓦合金材料制成。
可选的，所述第一掩膜板的厚度为100-150um，所述第二掩膜板的厚度为20-40um。
本申请的另一个方面提供一种制造掩膜板的方法，包括以下步骤：
形成第一掩膜板，其中所述第一掩膜板设置有第一开口，所述第一开口与目标显示面板的大小和形状相对应；
形成第二掩膜板，其中所述第二掩膜板设置有第二开口区域，所述第二开口区域覆盖至少一个所述第一开口，且所述第二开口区域包括多个第二开口；
将第一掩膜板连接至掩膜板边框；以及
将第二掩膜板连接至所述第一掩膜板。
可选的，将第一掩膜板连接至掩膜板边框的步骤包括：将所述第一掩膜板焊接至掩膜板边框，以及将第二掩膜板连接至所述第一掩膜板的步骤包括：将所述第二掩膜板与所述第一掩膜板对准；以及将所述第二掩膜板焊接至所述第一掩膜板。
可选的，将所述第二掩膜板与所述第一掩膜板对准的步骤还包括：将第一掩膜板上各第一开口的边角位置处的第一对位孔与第二掩膜板上各第二开口区域内的第二对位孔对准并配合对位。
可选的，形成所述第二掩膜板的步骤还包括：将形状和大小相同的多个部分进行拼接以形成所述第二掩膜板。
附图说明
图1a为本发明一个实施例提供的背板玻璃的结构示意图；
图1b为本发明一个实施例提供的掩膜板的结构示意图之一；
图2为本发明一个实施例提供的第一开口与显示面板的投影示意图；
图3为本发明一个实施例提供的掩膜板的结构示意图之二；
图4为本发明一个实施例提供的掩膜板的结构示意图之三；
以及
图5为本发明另一实施例提供的制造掩膜板的方法的流程图。
附图标记：1、第一掩膜板  2、第二掩膜板  3、背板玻璃  4、掩膜板边框  11、第一开口  12、遮挡区域  13、第一焊点  21、第二开口区域  22、条状结构  23、第二焊点  31、显示面板  211、第二开口  231、第一侧  232、第二侧
具体实施方式
为使本领域的技术人员更好地理解本发明的技术方案，下面结合附图和具体实施方式对本发明作进一步详细描述。
如图1a所示,背板玻璃3包括多个目标显示面板31，在本发明实施例中，以显示面板31的形状是圆形为例进行说明。需要说明的是，背板玻璃3也可以仅包括一个目标显示面板31。
如图1b所示，本发明实施例提供了一种掩膜板，其包括：第一掩膜板1和第二掩膜板2，第一掩膜板1与第二掩膜板2层叠设置，第一掩膜板1上设置有多个第一开口11，第一掩膜板1上非第一开口11的区域为遮挡区域12。第一开口11的形状和大小与背板玻璃3上显示面板31的形状和大小相同，即第一开口11与目标显示面板31相对应。第二掩膜板2上设置有多个第二开口区域21，且第二开口区域21覆盖至少一个第一开口11。第二开口区域21包括多个第二开口211，各第二开口211以阵列方式设置并与各像素相对应，用于形成像素图形。
本实施例提供的掩膜板为两层结构，包括层叠设置的第一掩膜板1和第二掩膜板2，第一掩膜板1上设置有与目标显示面板31的形状和大小相同的第一开口11。第二掩膜板2上设置有第二开口区域21，第二开口区域21内以阵列方式设置有多个用于形成像素图形的第二开口211，第二开口区域21覆盖第一开口11。若要制备不同形状与大小的显示面板31，只需将第一掩膜板1的第 一开口11设置为与目标显示面板31的大小和形状相同，并与原有的第二掩膜板2相配合，即可形成新的掩膜板。由于制造第一掩膜板1只需保证第一开口11的形状和大小与目标显示面板31的大小和形状相同即可，无需进一步制造用于形成像素图形的开口，因此，相对于现有的掩膜板来说，制造工艺简单且制造成本低。
实际应用中，如图1b所示，第一开口11的面积可以略大于显示面板31的面积。这样在掩膜板张网拉伸过程中，即使第一开口11的形状和大小发生变化，也不会出现蒸镀材料无法蒸镀到显示面板31上的问题。
可选的，第一开口11在背板玻璃3上的投影的边缘与背板玻璃3上相应的显示面板31的边缘之间的间距为75-150um。在本实施例中，以显示面板31与第一开口11的形状为圆形为例进行说明。如图2所示，第一开口11在背板玻璃3上的投影的边缘与背板玻璃3上相应的显示面板31的边缘之间的间距h1为75-150um，即第一开口11的直径D2比显示面板31的直径D1大150-300um。
第二开口区域21的形状可以为圆形、矩形、多边形等，可选的，第二开口区域21的形状为矩形。在掩膜板张网拉伸过程中，矩形形状的第二开口区域21相比于非矩形形状的第二开口区域21受力应变更均匀，因此，可以保证第二掩膜板2不会产生褶皱，避免蒸镀工艺后显示面板出现混色不良的问题。
如图1b所示，当第一掩膜板1设置有多个第一开口11，且第二掩膜板2设置有多个第二开口区域21时，第二掩膜板2上的各第二开口区域21的形状可以不受显示面板31的形状、排列、分布以及边框电路的限制。只要保证各第二开口区域21的形状相同，在掩膜板张网拉伸过程中，各第二开口区域21的受力应变就会均匀，第二掩膜板2就不会产生褶皱，相应的，各第二开口区域21内的各第二开口211产生的形变均相同，通过第二开口211形成的像素图形大小和形状一致，从而可以解决蒸镀工艺后显示 面板出现混色不良的问题。
可选的，各第二开口区域21的大小也相同，这样在掩膜板张网拉伸过程中，形状与大小均相同的各第二开口区域21的受力应变更为均匀。
如图1b所示，第二掩膜板2覆盖于第一掩膜板1上,蒸镀方向是从第二掩膜板2向第一掩膜板1蒸镀。第一掩膜板1与第二掩膜板2之间存在间距，蒸镀材料会在第一掩膜板1与第二掩膜板2之间扩散。蒸镀材料先经过第二掩膜板2上的第二开口区域21内的第二开口211，扩散后经过第一掩膜板1上的第一开口11而蒸镀到显示面板31上。由于第一掩膜板1在第二掩膜板2的下方，第一掩膜板1上的遮挡区域12对蒸镀材料起到遮挡作用，因此，蒸镀材料不会蒸镀到显示面板31以外的区域。
可选的，第一掩膜板1与第二掩膜板2的外形尺寸和形状相同。
第二开口区域21可以覆盖一个或多个第一开口11，例如，可以覆盖两个第一开口11，也可以覆盖四个第一开口11。在本实施例中，如图1b所示，第二开口区域21覆盖四个第一开口11。
如图3所示，第一掩膜板1为一个，即，一体结构，第二掩膜板2可以由形状和大小相同的多个部分拼接形成。在本发明的实施例中，第二掩膜板2的各部分呈条状，各条状部分22拼接形成的第二掩膜板2的大小和形状可以与玻璃背板的外形尺寸和形状相同，本发明实施例以第二掩膜板2由四个条状部分22构成为例进行说明。在掩膜板张网拉伸过程中，各条状部分22可以平均分担第二掩膜板2在张网过程所受的拉力，使各条状部分22之间的受力应变更为均匀，进一步保证了蒸镀工艺后显示面板不会出现混色不良。
需要说明的是，第一掩膜板1上各第一开口11的边角位置处设置有第一对位孔(图中未绘示)，在第二掩膜板2上各第二开口区域21内，与各第一开口21的边角位置相对应的位置处设置有第二对位孔(图中未绘示)，通过第一对位孔与第二对位孔相 互配合对位，能够将第一掩膜板1和第二掩膜板2正确对位。
如图4所示，本发明提供的掩膜板还包括掩膜板边框4，第一掩膜板1与掩膜板边框4通过第一焊点13焊接，第二掩膜板2的各条形部分22与第一掩膜板1通过第二焊点23焊接。这样，即使第一掩膜板1与掩膜板边框4焊接错误，在进行修复重新焊接时，可以不用修复各条状结构22的焊接位置，从而大幅提高修复效率。
可选的，如图4所示，第一焊点13的位置与第二焊点23的位置之间的间距h2大于2mm，以方便焊接，避免焊接位置错误。
第一焊点13位于第一掩膜板1四周的周边位置，第二焊点23位于第二掩膜板2的各条状部分22的第一侧231与第二侧232。所述第一侧231与第二侧232是指第二掩膜板2的各条状部分22的非相邻侧。
可选的，第一掩膜板1与第二掩膜板2可以采用金属因瓦合金材料制成。
可选的，第一掩膜板1的厚度可以为100-150um，第二掩膜板2的厚度可以为20-40um。
图5为本发明另一实施例提供的制造上述掩膜板的方法的流程图。如图5所示，本实施例提供的制造前述实施例中的掩膜板的方法包括以下步骤：
S501，形成第一掩膜板，其中所述第一掩膜板设置有第一开口，所述第一开口与目标显示面板的大小和形状相对应；
S502，形成第二掩膜板，其中所述第二掩膜板设置有第二开口区域，所述第二开口区域覆盖至少一个所述第一开口，且所述第二开口区域包括多个第二开口；
S503，将第一掩膜板连接至掩膜板边框；以及
S504，将第二掩膜板连接至所述第一掩膜板。
其中，步骤S503包括：将所述第一掩膜板焊接至掩膜板边框。
其中，步骤S504包括：将所述第二掩膜板与所述第一掩膜板对准；以及将所述第二掩膜板焊接至所述第一掩膜板。
其中，步骤S504包括：将第一掩膜板上各第一开口的边角位置处的第一对位孔与第二掩膜板上各第二开口区域内的第二对位孔对准并配合对位。
其中，步骤S502还包括：将形状和大小相同的多个部分进行拼接以形成所述第二掩膜板。
下面还可以结合图4对上述实施例提供掩膜板的制造方法中组装第一掩膜板和第二掩膜板的方法进行说明。
首先利用张网机(图中未绘示)对第一掩膜板1进行张网拉伸，通过第一对位孔确定第一掩膜板1的位置后，将第一掩膜板1与掩膜板边框4通过第一焊点13焊接，其中，第一掩膜板的下垂量小于150um。然后对第二掩膜板2的各条状部分22进行张网拉伸，通过第二对位孔确定各条状结构22的位置后，将第二掩膜板2的各条状部分22与第一掩膜板1通过第二焊点23焊接，从而完成整个掩膜板的组装。
圆形形状的显示面板的生产制作对于掩膜板的要求较高，本实施例提供的掩膜板与背板玻璃完全对应，第一掩膜板与第二掩膜板组合使用，能够减少显示面板的周边电路和蒸镀工艺对掩膜板在设计上的限制，从而使掩膜板按照最优设计进行制作。利用本实施例的掩膜板不但可以生产圆形等其它非传统矩形形状的显示面板，还可以减少掩膜板引起的不良从而提高产品良率。
上述各实施例具有以下有益效果：
上述各实施例提供的掩膜板为两层结构，包括层叠设置的第一掩膜板和第二掩膜板，第一掩膜板上设置有与目标显示面板的形状和大小相同的第一开口。第二掩膜板上设置有第二开口区域，第二开口区域内阵列设置有多个用于形成像素图形的第二开口，第二开口区域覆盖第一开口。若要制备不同形状与大小的显示面板，只需将第一掩膜板的第一开口设置为与目标显示面板的大小和形状相同，并与原有的第二掩膜板相配合，即可形成新的掩膜板。由于制造第一掩膜板只需保证第一开口的形状和大小与目标显示面板的大小和形状相同即可，无需进一步制造用于形成像素 图形的开口，因此，相对于现有的掩膜板来说，制造工艺简单且制造成本低。
可以理解的是，以上实施方式仅仅是为了说明本发明的原理而采用的示例性实施方式，然而本发明并不局限于此。对于本领域内的普通技术人员而言，在不脱离本发明的精神和实质的情况下，可以做出各种变型和改进，这些变型和改进也视为本发明的保护范围。

Claims (18)

  1. 一种掩膜板，其特征在于，包括层叠设置的第一掩膜板和第二掩膜板；
    所述第一掩膜板设置有第一开口，所述第一开口与目标显示面板的大小和形状相对应；
    所述第二掩膜板设置有第二开口区域，所述第二开口区域覆盖至少一个所述第一开口，且所述第二开口区域包括多个第二开口。
  2. 根据权利要求1所述的掩膜板，其特征在于,所述第一开口与所述目标显示面板的形状相同，且所述第一开口的面积大于所述目标显示面板的面积。
  3. 根据权利要求2所述的掩膜板，其特征在于，所述第一开口在背板玻璃上的投影的边缘与背板玻璃上与其对应的目标显示面板的边缘之间的间距为75-150um。
  4. 根据权利要求1所述的掩膜板，其特征在于，所述第二开口区域的形状为矩形。
  5. 根据权利要求1所述的掩膜板，其特征在于，所述第二开口区域为多个，各第二开口区域的形状相同。
  6. 根据权利要求5所述的掩膜板，其特征在于，各所述第二开口区域的大小相同。
  7. 根据权利要求1所述的掩膜板，其特征在于，所述第二掩膜板覆盖于第一掩膜板上。
  8. 根据权利要求1所述的掩膜板，其特征在于，所述第一掩膜板与第二掩膜板的外形尺寸和形状相同。
  9. 根据权利要求8所述的掩膜板，其特征在于，所述第二掩膜板由拼接在一起的形状和大小相同的多个部分构成。
  10. 根据权利要求9所述的掩膜板，其特征在于，还包括掩膜板边框，所述第一掩膜板与掩膜板边框通过第一焊点焊接，构成第二掩膜板的各部分与第一掩膜板通过第二焊点焊接。
  11. 根据权利要求10所述的掩膜板，其特征在于，所述第一焊点位于所述第一掩膜板四周的周边位置，所述第二焊点位于所述第二掩膜板的各部分的第一侧和第二侧，所述第一侧和第二侧分别为第二掩膜板的各部分的非用于拼接的一侧。
  12. 根据权利要求11所述的掩膜板，其特征在于，相邻的所述第一焊点与第二焊点之间的间距大于2mm。
  13. 根据权利要求1-12任一项所述的掩膜板，其特征在于，所述第一掩膜板与第二掩膜板采用金属因瓦合金材料制成。
  14. 根据权利要求1-12任一项所述的掩膜板，其特征在于，所述第一掩膜板的厚度为100-150um，所述第二掩膜板的厚度为20-40um。
  15. 一种制造掩膜板的方法，其特征在于，包括以下步骤：
    形成第一掩膜板，其中所述第一掩膜板设置有第一开口，所述第一开口与目标显示面板的大小和形状相对应；
    形成第二掩膜板，其中所述第二掩膜板设置有第二开口区域，所述第二开口区域覆盖至少一个所述第一开口，且所述第二开口 区域包括多个第二开口；
    将第一掩膜板连接至掩膜板边框；以及
    将第二掩膜板连接至所述第一掩膜板。
  16. 根据权利要求15所述的方法，其特征在于，
    将第一掩膜板连接至掩膜板边框的步骤包括：
    将所述第一掩膜板焊接至掩膜板边框，以及
    将第二掩膜板连接至所述第一掩膜板的步骤包括：
    将所述第二掩膜板与所述第一掩膜板对准；以及
    将所述第二掩膜板焊接至所述第一掩膜板。
  17. 根据权利要求16所述的方法，其特征在于，将所述第二掩膜板与所述第一掩膜板对准的步骤还包括：
    将第一掩膜板上各第一开口的边角位置处的第一对位孔与第二掩膜板上各第二开口区域内的第二对位孔对准并配合对位。
  18. 根据权利要求15所述的方法，其特征在于，形成所述第二掩膜板的步骤还包括：
    将形状和大小相同的多个部分进行拼接以形成所述第二掩膜板。
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