WO2017094777A1 - 光学装置及び光学装置の製造方法 - Google Patents
光学装置及び光学装置の製造方法 Download PDFInfo
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- WO2017094777A1 WO2017094777A1 PCT/JP2016/085558 JP2016085558W WO2017094777A1 WO 2017094777 A1 WO2017094777 A1 WO 2017094777A1 JP 2016085558 W JP2016085558 W JP 2016085558W WO 2017094777 A1 WO2017094777 A1 WO 2017094777A1
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- dimensional substrate
- translucent member
- recess
- solid
- state imaging
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Definitions
- the present invention relates to an optical device and a method for manufacturing the optical device.
- Patent Document 1 discloses a solid including a substrate, a solid-state imaging device mounted on the substrate, and a translucent member disposed on the substrate with an optical space with respect to an imaging region of the solid-state imaging device.
- An imaging device is disclosed.
- an adhesive is applied to a stepped portion formed at the periphery of the through opening, an optical filter is placed, the solid-state imaging device is mounted on the substrate, the substrate and the solid-state imaging device It is manufactured by filling a photocurable sealing resin while irradiating light.
- the present invention has been made in view of such circumstances, and an object of the present invention is to provide a small optical device with a low possibility of malfunction due to dust. Moreover, it aims at providing the manufacturing method of the optical apparatus which can seal an element and a translucent member reliably in one process.
- an optical device includes, for example, a three-dimensional substrate having a three-dimensional shape, and an element provided on the three-dimensional substrate, and a light receiving element that receives light or a light receiving element that emits light. And a translucent member provided on the three-dimensional substrate, wherein the three-dimensional substrate is a recess formed on the back surface and a through-hole penetrating in the plate thickness direction, one end of the recess There are four through holes formed on the bottom surface and four columnar convex portions formed on the bottom surface of the recess so as not to contact the side surface of the recess and cover the four corners of the through hole, respectively.
- the light-transmitting member is provided inside the recess so as to cover the through hole, and the element covers the three-dimensional substrate so as to cover the recess.
- the first surface of the translucent member is The element and the translucent member are in contact with a part, between the three-dimensional substrate and the element, between the second surface facing the first surface of the translucent member and the element, Filling between the three-dimensional substrate and the side surface adjacent to the first surface and the second surface of the translucent member, and between the first surface and the three-dimensional substrate of the translucent member It is characterized by being integrated with the three-dimensional substrate by a sealing resin.
- the element and the translucent member are disposed between the three-dimensional substrate and the element, between the second surface facing the first surface of the translucent member and the element, and between the element and the translucent member.
- the bottom surface of the recess has four columnar protrusions formed so as not to contact the side surface of the recess and to cover the four corners of the through hole, sealing resin is formed at the four corners. Is prevented from filling, so that the optical device can be miniaturized.
- the sealing resin may include a particulate filler, and the convex portion may be formed with a height that is twice or more the maximum particle size of the filler.
- an adhesive for temporarily fixing the translucent member may be applied to the bottom surface of the concave portion on the outside of the convex portion.
- the sealing resin is a resin having a light shielding property, and the sealing resin may cover the entire back surface of the element. Accordingly, the element and the translucent member can be integrated with the three-dimensional substrate in one step, and light can be prevented from entering the element from the back surface of the element.
- a substantially plate-like electrode provided on a surface of the element that does not face the three-dimensional substrate is provided, and the sealing resin integrates the electrode and the element, and the electrode and the three-dimensional substrate. May be used. Thereby, the temperature rise of an element can be suppressed. Further, light can be prevented from entering the element from the back surface of the element.
- a flexible substrate having a circuit pattern formed of a metal foil formed on a substantially rectangular film-shaped substrate formed of an insulating material is provided, and the previous element is formed of a conductive material.
- the flexible substrate has an end portion provided on a back surface of the three-dimensional substrate, and the element has a back surface of the three-dimensional substrate so that the flexible substrate is sandwiched between the back surface of the three-dimensional substrate.
- the convex portion and the circuit pattern may come into contact with each other.
- an optical device includes, for example, a three-dimensional substrate having a three-dimensional shape, and a first element and a second element that are two elements provided on the three-dimensional substrate, and transmits light.
- the first recess and the second recess formed on the back surface and a through hole penetrating in the plate thickness direction, one end penetrating in the plate thickness direction and the first through hole formed in the bottom surface of the first recess A first through-hole having one end formed on the bottom surface of the second recess, and four columnar first protrusions formed on the bottom surface of the first recess. Shaped so as not to contact the side surface of the recess and to cover each of the four corners of the through hole.
- the four first convex portions and four columnar second convex portions formed on the bottom surface of the second concave portion so as not to contact the side surface of the second concave portion, and the through hole Four second protrusions formed to cover each of the four corners of the first light transmitting member, and the first light transmissive member is disposed inside the first recess so as to cover the first through hole.
- the second translucent member is provided in the second recess so as to cover the second through hole, and the first element is provided on the back surface of the three-dimensional substrate so as to cover the first recess.
- the second element is provided on the back surface of the three-dimensional substrate so as to cover the second concave portion, and the first surface of the first light-transmissive member is in contact with the first convex portion,
- the third surface of the second light transmissive member is in contact with the second convex portion, and the first element and the first light transmissive member are formed between the three-dimensional substrate and the first light transmitting member.
- the second element and the second translucent member are integrated with the three-dimensional board by a sealing resin filled between the three-dimensional board and between the first surface and the three-dimensional board.
- the third surface and the fourth element Between the three-dimensional substrate and the second element, between the first surface and the fourth surface facing the third surface of the second light transmissive member, the third surface and the fourth element. It is characterized by being integrated with the three-dimensional substrate by a sealing resin filled between a side surface adjacent to the surface and the three-dimensional substrate and between the third surface and the three-dimensional substrate.
- the bottom surface of the recess has four columnar protrusions formed so as not to contact the side surface of the recess and to cover the four corners of the through hole, sealing resin is formed at the four corners. Is prevented from filling, so that the optical device can be miniaturized.
- the three-dimensional substrate is a plate-shaped member having a substantially rectangular widest surface, and the first concave portion and the second concave portion may be formed near both ends in the longitudinal direction of the three-dimensional substrate, respectively. Good. Thereby, in a small optical device, the base line length of the compound eye camera can be made as long as possible.
- a rib is formed in a region between the first recess and the second recess, and a plurality of strip-like wirings are formed outside the region where the rib is formed. Good. Thereby, the curvature of a three-dimensional board
- an imaging method of an optical device is, for example, a three-dimensional substrate having a three-dimensional shape, including a recess formed on the back surface and a through-hole penetrating in the plate thickness direction.
- One end is a through-hole formed in the bottom surface of the concave portion and four columnar convex portions formed on the bottom surface of the concave portion so as not to contact the side surface of the concave portion, and A step of placing a three-dimensional substrate having four convex portions formed so as to cover four corners with the back surface facing upward, and the first surface of the translucent member
- a step of placing the translucent member inside the concave portion so as to cover the through hole in contact with the convex portion, and a light receiving element for receiving light or emitting light so as to cover the concave portion A step of placing an element which is a light receiving element on the back surface of the three-dimensional substrate; and the three-dimensional substrate Between the element, between the element and the second surface facing the first surface of the translucent member, and adjacent to the first surface and the second surface of the translucent member A sealing resin is filled between the side surface and the three-dimensional substrate, and between the first surface of the translucent member and the three-dimensional substrate, and the element and the translucent member are placed in the three-
- the step of placing the three-dimensional substrate with the back surface facing upward, and the first surface of the translucent member abutting on the convex portion to cover the through hole Between the step of placing the translucent member inside the concave portion, an adhesive that temporarily fixes the translucent member is applied to a position outside the convex portion on the bottom surface of the concave portion.
- a process may be included. Thereby, when filling with sealing resin, it can fix temporarily so that a translucent member may not move, and can position a translucent member in a height direction.
- the present invention it is possible to provide a small optical device with a low possibility of malfunction due to dust. Further, the element and the translucent member can be reliably sealed in a single process.
- FIG. 1 is a plan view showing an outline of a solid-state imaging device 1 according to a first embodiment of the present invention.
- FIG. 2 is a cross-sectional view illustrating an outline of the solid-state imaging device 1, and is a cross-sectional view taken along the line AA in FIG. 2 is a cross-sectional view schematically showing the solid-state imaging device 1, and is a cross-sectional view taken along the line BB of FIG. 3 is a diagram illustrating an assembly process of the solid-state imaging device 1.
- FIG. 3 is a diagram illustrating an assembly process of the solid-state imaging device 1.
- FIG. 3 is a diagram illustrating an assembly process of the solid-state imaging device 1.
- FIG. 3 is a diagram illustrating an assembly process of the solid-state imaging device 1.
- FIG. 8 is a cross-sectional view showing an outline of the solid-state imaging device 2, and is a CC cross-sectional view of FIG. It is sectional drawing which shows the outline of the solid-state imaging device 3 which concerns on the 3rd Embodiment of this invention. It is sectional drawing which shows the outline of the light-emitting device 4 which concerns on the 4th Embodiment of this invention. It is sectional drawing which shows the outline of the solid-state imaging device 5 which concerns on the 5th Embodiment of this invention.
- FIG. 3 is a diagram showing a state (use state) where the solid-state imaging device 6 is placed on a substrate 100.
- 2 is a plan view illustrating an outline of a solid-state imaging device 7.
- FIG. 7 is sectional drawing which shows the outline of the solid-state imaging device 7, and is DD sectional drawing of FIG. 2 is a plan view showing an outline of a solid-state imaging device 8.
- FIG. 17 is a cross-sectional view illustrating an outline of the solid-state imaging device 8, and is a cross-sectional view taken along line EE of FIG.
- the optical device in the present invention is a general term including a light receiving device and a light emitting device.
- the optical device includes a light receiving device having a light receiving element that receives light such as a solid-state imaging device and a photodiode, and a light emitting element that emits light such as a laser diode (LD), a surface light emitting diode (VCSEL), and an LED.
- LD laser diode
- VCSEL surface light emitting diode
- LED light emitting device.
- FIG. 1 is a plan view showing an outline of a solid-state imaging device 1 which is an example of the present invention.
- FIG. 2 is a cross-sectional view schematically showing the solid-state imaging device 1, and is a cross-sectional view taken along the line AA in FIG. 3 is a cross-sectional view schematically showing the solid-state imaging device 1, and is a cross-sectional view taken along the line BB of FIG.
- the solid-state imaging device 1 is a light-receiving device having a solid-state imaging element that is a light-receiving element.
- the solid-state imaging device 1 mainly includes a three-dimensional substrate 10, a solid-state imaging element 20, and a translucent member 30.
- the solid-state image sensor 20 and the translucent member 30 are provided on the three-dimensional substrate 10.
- the imaging region 22 (described in detail later) of the solid-state imaging device 20 and the translucent member 30 are disposed with a space (for example, 20 ⁇ m to 40 ⁇ m) therebetween.
- the illustrated shapes and sizes of the three-dimensional substrate 10, the solid-state imaging device 20, the translucent member 30, and the like are examples, and are not limited thereto.
- the solid-state imaging device 20 and the translucent member 30 are provided on the back side ( ⁇ z side) of the three-dimensional substrate 10.
- the three-dimensional substrate 10, the solid-state imaging device 20, and the translucent member 30 are integrated by a sealing resin 40 (not shown in FIG. 1).
- a lens (not shown), a holder (not shown) that acts as a diaphragm member that adjusts the amount of light entering the lens, and the like are provided on the front side (+ z side) of the three-dimensional substrate 10.
- the lens (not shown), the translucent member 30, and the solid-state imaging element 20 are arranged in this order from the subject side along the optical axis X.
- the three-dimensional board 10 is a wiring board having a three-dimensional shape (three-dimensional shape).
- MID Molded Interconnect Device
- a circuit is formed with a metal film on the surface of a resin molded product is used as the three-dimensional substrate 10.
- PPA polyphthalamide resin
- epoxy resin epoxy resin
- ceramic ceramic
- the three-dimensional substrate 10 is formed in black to prevent the transmission of light from the outside. Since the three-dimensional substrate 10 (MID) is already known, detailed description is omitted. However, the three-dimensional substrate 10 is not limited to the MID as long as it has a three-dimensional shape.
- the three-dimensional substrate 10 mainly has a terminal portion 11, a through hole 12, a concave portion 13, a convex portion 14, and a convex portion 15.
- the terminal portion 11 is provided on the back surface 10a (not shown in FIG. 1) of the three-dimensional substrate 10 for connection with the outside.
- the terminal portion 11 is electrically connected to a connection land (not shown) formed on a flexible wiring board (not shown) or the like. Further, the terminal portion 11 is electrically connected to a terminal portion (not shown) formed on the solid-state image sensor 20.
- the terminal unit 11 is electrically connected to a main board (not shown) of various devices such as a mobile phone and a personal computer using solder paste or the like. Although not shown, for example, solder can be used as an electrical connection method.
- an opening is formed in a region where the imaging region 22 of the solid-state imaging device 20 is disposed.
- the through hole 12 serving as the opening penetrates the three-dimensional substrate 10 in the plate thickness direction, that is, along the optical axis X (along the z direction).
- the through hole 12 is formed in a rectangular shape in plan view corresponding to the imaging area of the solid-state imaging device 20.
- the solid-state imaging device 20 is provided on the back surface 10a of the three-dimensional substrate 10. Moreover, as shown in FIGS. 2 and 3, the back surface 10 a is formed with a concave portion 13 on which the translucent member 30 is provided. One end of the through hole 12 is formed on the bottom surface 13 a of the recess 13.
- a convex portion 14 with which the surface 30 a of the translucent member 30 abuts is formed on the bottom surface 13 a of the concave portion 13.
- substrate 10 and the translucent member 30 are arrange
- the convex portion 14 is a columnar member, and is formed at four locations so as not to contact the side surface 13b of the concave portion 13 and to cover the four corners of the through hole 12 (see FIG. 1).
- the shape of the convex portion 14 is a substantially rectangular shape in which a portion overlapping the through hole 12 is cut out in plan view. In this way, by forming the convex portions 14 in the vicinity of the four corners, as shown in FIG. 3, as shown in FIG. 3, a sealing resin is formed on the front side (+ z side) of the translucent member 30 for the portion where the convex portions 14 are not formed. 40 is filled.
- the shape of the convex part 14 will not be restricted to the illustrated form, if it is columnar.
- the convex portion 14 may have a substantially circular shape in which a portion overlapping the through hole 12 is cut out in plan view. The height of the convex portion 14 will be described in detail later.
- convex portions 15 are formed on the side surfaces 13 b of the concave portions 13 at opposing positions.
- the convex portion 15 contacts the side surface 30 b of the translucent member 30.
- the convex part 15 is formed in the center part of each side surface, the position of the convex part 15 is not restricted to this.
- the shape of the convex part 15 is not limited to this.
- a step 16 serving as an adhesive reservoir may be formed at the periphery of the through hole 12 of the three-dimensional substrate 10.
- the solid-state imaging device 20 has an imaging region 22 having a substantially rectangular shape on a front side (+ z side) surface (hereinafter referred to as a surface 20a).
- the imaging region 22 forms a Bayer array with square pixels having a pixel size of 2.25 ⁇ m.
- peripheral circuits including an OB (Optical Black) block, an analog-digital conversion circuit, a TG (Timing generator), and the like are provided.
- the solid-state imaging device 20 is, for example, a solid-state imaging device (CMOS sensor) using a CMOS (complementary metal oxide semiconductor) called a 1/4 inch UXGA type having about 2 million pixels, and a bare chip is an SBB (Stud Bump). Bond), ultrasonic bonding, solder bump bonding, or the like is used for flip chip mounting.
- CMOS sensor solid-state imaging device
- CMOS complementary metal oxide semiconductor
- the solid-state imaging device 20 is not limited to a CMOS sensor, and may be a CCD sensor or the like. That is, the solid-state imaging device 20 may be any device that photoelectrically converts light and darkness of received light into an amount of electric charge, and sequentially reads out and converts it into an electric signal.
- the solid-state imaging device 20 is connected to the back surface 10a (or the terminal portion 11) of the three-dimensional substrate 10 via the bumps 21 formed on the front surface 20a. Transmission of a video signal obtained by the solid-state imaging device 20 and control signals and power supply from the outside are performed via the terminal unit 11.
- the translucent member 30 is an optical filter here, and is formed, for example, by applying an IR (InfraRed) cut coat to a glass substrate having a thickness of 0.3 mm.
- the IR cut coat is formed, for example, by depositing a transparent dielectric film such as silicon dioxide (SiO 2), titanium oxide (TiO 2), magnesium fluoride (MgF 2), zirconium oxide (ZrO 2) by vapor deposition.
- the translucent member 30 is a plate-like member, and has a front surface 30a, a back surface 30c facing the front surface 30a, and four side surfaces 30b adjacent to the front surface 30a and the back surface 30c.
- the IR cut coat is applied to the surface 30a.
- the translucent member 30 is provided inside the recess 13.
- the sealing resin 40 is a photo-curing resin such as an epoxy resin, an acrylic resin, a silicone resin, or a polyether amide resin. Furthermore, the sealing resin 40 also has thermosetting properties.
- the sealing resin 40 includes a filler in a photocurable resin that is a matrix (base material) resin.
- a filler for example, an inorganic filler such as silica (SiO 2 ) can be used, but an extender is preferably used.
- the filler is particulate and has a diameter of several hundred nm to several tens of ⁇ m.
- FIG. 4 to 6 are diagrams for explaining an assembly process of the solid-state imaging device 1.
- FIG. 4 to 6 are diagrams for explaining an assembly process of the solid-state imaging device 1.
- the three-dimensional substrate 10 is placed with the back surface 10a facing upward.
- the translucent member 30 is placed inside the recess 13. In this step, the translucent member 30 is placed so as to cover the through hole 12.
- the translucent member 30 is positioned in the z direction with the surface 30a in contact with the convex portion 14. Further, the translucent member 30 is positioned in the x direction and the y direction with the side surface 30b abutting against the convex portion 15 (not shown in FIG. 4, see FIGS. 1 and 2).
- the solid-state imaging device 20 is placed on the back surface 10a (here, the terminal portion 11 provided on the back surface 10a). In this step, the solid-state image sensor 20 is placed so as to cover the recess 13.
- a sealing resin 40 is injected between the three-dimensional substrate 10 and the solid-state imaging device 20.
- the sealing resin 40 injected between the three-dimensional substrate 10 and the solid-state imaging element 20 also flows between the three-dimensional substrate 10 and the translucent member 30.
- the sealing resin 40 is also filled between the surface 30 a and the three-dimensional substrate 10.
- the sealing resin 40 is filled between the solid-state imaging device 20 and the back surface 30 c of the translucent member 30.
- the convex portion 14 is formed with a height that is twice or more the maximum particle size of the filler contained in the sealing resin 40.
- the sealing resin 40 is separated from the three-dimensional substrate 10. The speed of penetration between the translucent member 30 is increased. Thereby, productivity can be improved.
- the sealing resin 40 is cured around the through hole 12. Thereafter, the remaining portion of the sealing resin 40 is thermoset. As a result, the solid-state imaging device 20 and the translucent member 30 are mounted on the three-dimensional substrate 10.
- the solid-state imaging device 20 and the translucent member 30 are mounted from the same direction ( ⁇ z direction), the solid-state imaging device 20 and the translucent member 30 are attached to the three-dimensional substrate 10. Therefore, the three-dimensional substrate 10 is not turned over. Moreover, since the solid-state imaging device 20 and the translucent member 30 are integrated with the three-dimensional substrate 10 in one step, the number of steps can be reduced. Furthermore, it is not necessary to strictly manage the amount of the sealing resin 40, and process management becomes easy.
- the adhesive 13 is applied to the recess 13 to adhere the translucent member 30 and is then filled with the photocurable sealing resin as in the conventional case
- the photocurable sealing resin is filled It is necessary to form an air hole for allowing air to escape between the translucent member 30 and the three-dimensional substrate 10.
- the solid-state imaging device 20 and the solid-state imaging device 20 are released while letting air escape between the surface 30a of the translucent member 30 and the three-dimensional substrate 10.
- the sealing resin 40 is injected between the three-dimensional substrate 10, it is not necessary to form an air hole between the surface 30 a of the translucent member 30 and the three-dimensional substrate 10. Therefore, the manufacturing process can be easily managed.
- the sealing resin 40 is injected while irradiating the light L from below ( ⁇ z direction), so that the sealing resin 40 does not protrude into the through hole 12.
- the three-dimensional substrate 10 is turned over to perform the process of mounting the lens. Then, these are fitted into the three-dimensional substrate 10 in the order of a lens (not shown) and a lens holder (not shown). Finally, the assembly process of the solid-state imaging device 1 is completed by applying and curing an adhesive near the boundary between the lens holder (not shown) and the three-dimensional substrate 10.
- the light transmitted through the translucent member 30 is incident on the solid-state imaging device 20 and passes through a lens (not shown) called a known microlens or on-chip lens, and a dye-based color filter (see FIG. It passes through (not shown) and is converted into a required electrical signal by a photodiode (not shown).
- the electrical signal is output, for example, as an image signal having a screen aspect ratio of 4: 3 and a frame rate of 15 frames per second, and is output from the terminal unit 11 to an external monitor or the like.
- the solid-state imaging device 20 and the translucent member 30 can be reliably sealed in a single process.
- the solid-state imaging device 20 and the translucent member 30 are integrated with the three-dimensional substrate 10 in a single process, the number of processes can be reduced, productivity can be improved, and process management can be facilitated. Thereby, cost reduction is also possible.
- the convex portions 14 are formed at four locations so as to cover the four corners of the through hole 12, the sealing resin 40 does not flow into the four corners of the through hole 12. Therefore, the size of the through hole 12 can be reduced, and thereby the solid-state imaging device 1 can be reduced in size.
- curved surfaces R are formed at the four corners as indicated by a two-dot chain line in FIG. 1 due to the surface tension of the sealing resin 40. Since light does not enter the curved surface portion R, the size of the through hole 12 must be increased accordingly. On the other hand, since the convex portion 14 covers the four corners, the sealing resin 40 is not filled in the corners, and as a result, the size of the through hole 12 can be reduced.
- the size of the through hole 12, that is, the surface area is reduced, the existence probability of dust (particles) between the solid-state imaging device 20 and the translucent member 30 is reduced. Therefore, the possibility of the malfunction of the solid-state imaging device 1 due to dust can be reduced.
- the sealing resin 40 is injected after the translucent member 30 and the solid-state imaging element 20 are placed on the three-dimensional substrate 10, but the sealing resin 40 is injected.
- the translucent member 30 may be temporarily fixed with an adhesive or the like before being performed.
- FIG. 7 is a plan view showing an outline of the solid-state imaging device 2 according to the second embodiment.
- FIG. 8 is a cross-sectional view schematically showing the solid-state imaging device 2, and is a cross-sectional view taken along the line CC of FIG.
- the difference between the solid-state imaging device 1 and the solid-state imaging device 2 is only the shape of the convex portion 14A and the presence or absence of the adhesive 42.
- the differences between the solid-state imaging device 1 and the solid-state imaging device 1 will be described.
- a convex portion 14 ⁇ / b> A is formed on the bottom surface 13 a of the concave portion 13.
- 14 A of convex parts are columnar members, and are formed in four places so that it may not contact
- the convex portion 14 ⁇ / b> A has a portion that overlaps the through-hole 12 in plan view, and a region that includes a position farthest from the center of the solid-state imaging device 2 is cut out in an arc shape. This arc-shaped cutout 14 a protrudes toward the center of the solid-state imaging device 2.
- an adhesive 42 for temporarily fixing the translucent member 30 is applied to the outside of the notch 14a (the side away from the center of the solid-state imaging device 2) in a dot shape.
- the adhesive 42 is applied to a position where it does not come into contact with the convex portion 14A and the concave portion 13.
- the shape of the convex portion 14A is not limited to this, and the notch 14a is not essential.
- the notch 14a is not necessary.
- the three-dimensional substrate 10 is placed with the back surface 10a facing upward.
- the adhesive 42 is applied in a dot shape at a position outside the notch 14a on the bottom surface 13a, and then the translucent member 30 is placed.
- the translucent member 30 is placed so as to come into contact with the convex portion 14A, the adhesive 42 adheres to the translucent member 30, and the translucent member 30 is temporarily fixed.
- the solid-state imaging device 20 is placed on the back surface 10a, and then the sealing resin 40 is injected between the three-dimensional substrate 10 and the solid-state imaging device 20.
- the sealing resin 40 is sealed after the adhesive 42 is hardened.
- the notch 14a is formed in the convex portion 14A. Therefore, when the adhesive 42 is applied in a dotted manner to the position outside the notch 14a, the adhesive 42 becomes the convex portion 14A and the concave portion 13. Do not contact with. Therefore, there is no problem in filling the sealing resin 40.
- the translucent member 30 Since the translucent member 30 is temporarily fixed by the adhesive 42 when the sealing resin 40 is sealed, the position of the translucent member 30 in the z direction does not change even when the sealing resin 40 is injected. Therefore, the translucent member 30 is accurately positioned in the height direction.
- the adhesive 42 is applied to the outside of the convex portion 14A, even if the amount of the adhesive 42 applied is too large, the adhesive 42 does not protrude into the through hole 12. Further, since the adhesive 42 does not come into contact with the convex portions 14 ⁇ / b> A and the concave portions 13, the sealing resin 40 is filled on the front side (+ z side) of the translucent member 30 as in the solid-state imaging device 1. Since the subsequent assembly process of the solid-state imaging device 2 is the same as that of the solid-state imaging device 1, the description thereof is omitted.
- the adhesive 42 is applied to four locations.
- the adhesive 42 may be applied to at least three locations.
- the application position of the adhesive 42 is not limited to the illustrated position. However, it is desirable to apply the adhesive 42 to the outside of the convex portion 14A.
- the plate-like light transmissive member 30 is provided on the back surface side of the three-dimensional substrate 10, but a plurality of light transmissive members may be provided on the back surface side of the three-dimensional substrate. Good.
- FIG. 9 is a cross-sectional view illustrating an outline of the solid-state imaging device 3 according to the third embodiment. Differences between the solid-state imaging device 1 and the solid-state imaging device 3 are the presence or absence of the lens 31 and the shape of the three-dimensional substrate. Hereinafter, only the difference between the solid-state imaging device 3 and the solid-state imaging device 1 will be described.
- the three-dimensional substrate 10A mainly includes a terminal portion 11, a through hole 12A, a concave portion 13, a convex portion 14, a convex portion 15 (not shown in FIG. 9), a concave portion 17, and a convex portion 18. .
- the recess 17 is formed on the bottom surface of the recess 13.
- One end of the through hole 12 ⁇ / b> A is formed on the bottom surface 17 a of the recess 17.
- a convex portion 18 with which the surface of the lens 31 abuts is formed on the bottom surface 17 a of the concave portion 17.
- the lens 31 is a light-transmitting member similar to the light-transmitting member, and is disposed at the periphery of the lens portion 31a (for example, a fixed focus type lens) 31a formed at the center of the plate-like member.
- the + z side of the bottom surface 17a of the through hole 12A has a substantially truncated pyramid shape with a wide tip, but the shape of the through hole 12A is not limited to this. However, in order to collect more light to the lens 31, it is desirable that the through hole 12A has a substantially truncated pyramid shape with a wide tip.
- the three-dimensional substrate 10A is placed with the back surface 10a facing upward, and the lens 31, the translucent member 30, and the solid-state imaging device 20 are placed thereon in order.
- the sealing resin 40 is injected between the three-dimensional substrate 10A and the solid-state imaging device 20 while irradiating light from the + z direction.
- the sealing resin 40 flows between the three-dimensional substrate 10 ⁇ / b> A and the translucent member 30 and between the three-dimensional substrate 10 ⁇ / b> A and the lens 31.
- the sealing resin 40 is provided between the three-dimensional substrate 10A and the solid-state imaging device 20, between the back surface 30c of the translucent member 30 and the solid-state imaging device 20, and the side surface of the translucent member 30.
- the sealing resin 40 is cured around the through hole 12A. Since the through-hole 12A has a substantially truncated pyramid shape, the sealing resin 40 is cured in a state of expanding in the ⁇ z direction (approximately a truncated pyramid shape).
- the sealing resin 40 is thermally cured. Thereby, the solid-state imaging device 20, the translucent member 30, and the lens 31 are mounted on the three-dimensional board 10A.
- a plurality of translucent members here, translucent member 30 and lens 31
- the solid-state imaging device 20 can be attached to the three-dimensional substrate 10A at the same time.
- the solid-state imaging element 20 that is a light receiving element is used, but a light-emitting element may be used instead of the solid-state imaging element 20.
- FIG. 10 is a cross-sectional view schematically showing the light emitting device 4 according to the fourth embodiment.
- the differences between the solid-state imaging device 1 and the light-emitting device 4 are the difference in elements, the shape of the three-dimensional substrate, and the shape of the translucent member.
- the light emitting device 4 that is different from the solid-state imaging device 1 will be described.
- the three-dimensional board 10B mainly has a terminal portion 11, a through hole 12B, a concave portion 13, a convex portion 14, and a convex portion 15 (not shown in FIG. 10).
- One end of the through hole 12B is formed on the bottom surface 13a of the recess 13.
- the light emitting element 25 is provided on the back surface 10a of the three-dimensional substrate 10B.
- the light emitting element 25 has a light emitting region 27 having a substantially rectangular shape on a front side (+ z side) surface (hereinafter, referred to as a surface 25a).
- a surface 25a In the light emitting region 27, an electronic element that emits light, such as a laser diode (LD), a surface light emitting diode (VCSEL), or an LED, is formed.
- the light emitting element 25 is connected to the back surface 10a (or the terminal portion 11) of the three-dimensional substrate 10B via the bumps 26 formed on the front surface 25a.
- the translucent member 32 is a plate-like member formed of, for example, a glass base material, and includes a plate-like portion 32a, a cylindrical portion 32b, and a lens portion 32c.
- the IR cut coat is applied to the surface of the lens portion 32c.
- the plate-like portion 32a is provided inside the recess 13 so as to cover the through hole 12B.
- the plate-like portion 32 a comes into contact with the convex portion 14. Further, the side surface of the cylindrical portion 32b comes into contact with the through hole 12B.
- the three-dimensional substrate 10B is placed with the back surface 10a facing upward, and the translucent member 32 and the light emitting element 25 are placed thereon in order.
- the sealing resin 40 is injected between the three-dimensional substrate 10B and the light emitting element 25 while irradiating light from the + z direction.
- the sealing resin 40 flows between the three-dimensional substrate 10 ⁇ / b> B and the translucent member 30 and between the three-dimensional substrate 10 ⁇ / b> B and the translucent member 32. Since the light is irradiated, the sealing resin 40 is cured at the position of the outer peripheral surface of the cylindrical portion 32b.
- the present invention can be applied not only to a light receiving device having a light receiving element but also to a light emitting element having a light emitting element.
- the back surface of the solid-state imaging device 20 is shielded from light using a sealing resin.
- the solid-state imaging device 5 according to the fifth embodiment will be described below.
- symbol is attached
- FIG. 11 is a cross-sectional view showing an outline of the solid-state imaging device 5.
- the light emitting device 4 mainly includes a three-dimensional substrate 10, a solid-state imaging element 20, and a translucent member 30.
- the three-dimensional substrate 10, the solid-state imaging device 20, and the translucent member 30 are integrated by a light shielding resin 41.
- the light-shielding resin 41 is obtained by coloring the sealing resin 40, which is a photocurable and thermosetting resin, in a dark color such as black, black-gray, brown, or black-brown. In this embodiment, by adding carbon powder to the sealing resin 40, the sealing resin 40 is colored black and used as the light shielding resin 41. Thereby, the light shielding resin 41 can be provided with a light shielding property.
- the content of the carbon powder with respect to the total solid component of the light shielding resin 41 is 1% or less (preferably 0.5% or less). It is desirable. In this case, in order to obtain the light shielding effect, it is desirable that the thickness of the light shielding resin 41 in the portion covering the solid-state imaging device 20 is approximately 100 ⁇ m.
- the step of injecting the light shielding resin 41 between the three-dimensional substrate 10 and the solid-state imaging device 20 between the three-dimensional substrate 10 and the solid-state imaging device 20 and between the three-dimensional substrate 10 and the translucent member 30.
- the light shielding resin 41 is injected between the solid-state imaging device 20 and the translucent member 30, and the light-shielding resin 41 is applied so as to cover the solid-state imaging device 20.
- the entire back surface 20 b of the solid-state imaging device 20 is covered with the light shielding resin 41.
- the solid-state imaging device 20 and the translucent member 30 are integrated with the three-dimensional substrate 10 in one step, and light is prevented from entering the solid-state imaging device 20 from the back surface 20b of the solid-state imaging device 20. it can.
- a ground electrode is provided on the back surface 20b of the solid-state imaging device 20.
- the solid-state imaging device 6 according to the sixth embodiment will be described below.
- symbol is attached
- FIG. 12 is a cross-sectional view showing an outline of the solid-state imaging device 6.
- the solid-state imaging device 6 mainly includes a three-dimensional substrate 10, a solid-state imaging device 20, a translucent member 30, and a ground electrode 50.
- the three-dimensional substrate 10, the solid-state imaging device 20, the translucent member 30, and the ground electrode 50 are integrated by a sealing resin 40.
- the ground electrode 50 is formed of a material having high thermal conductivity, for example, metal.
- the ground electrode 50 is a plate-like member, and is provided so as to contact the back surface 20 b of the solid-state imaging device 20.
- the ground electrode 50 covers the entire back surface 20b, but the size of the ground electrode 50 is not limited to this. For example, it may be formed in a size that covers only a part of the back surface 20 b of the solid-state imaging device 20. However, in order to increase the effect of heat removal (detailed later), it is desirable that the ground electrode 50 covers the entire back surface 20b.
- a plurality of convex portions 51 are formed on the ground electrode 50.
- the convex portion 51 is formed such that the height of the tip (position in the z direction) is substantially the same as the height of the terminal portion 11 provided on the convex portion formed on the periphery of the back surface 10 a of the three-dimensional substrate 10. (See dotted line in FIG. 12).
- the convex portion 51 has a substantially rectangular cross section, but the shape of the convex portion 51 is not limited to this.
- the convex portion 51 may have a substantially hemispherical cross section.
- the convex portion 51 may be columnar or rib-shaped.
- a method for assembling the solid-state imaging device 6 will be described. First, a step of placing the three-dimensional substrate 10, a step of placing the translucent member 30 in the recess 13 (see FIG. 4), and a step of placing the solid-state imaging device 20 on the back surface 10a (see FIG. 5) are performed.
- a step of placing the surface of the ground electrode 50 on which the convex portion 51 is not formed on the back surface 20b of the solid-state imaging device 20 is performed.
- a step of injecting the sealing resin 40 between the three-dimensional substrate 10 and the solid-state imaging device 20 while irradiating light L from below is performed.
- the sealing resin 40 is injected so as to cover the side surface 50 a of the ground electrode 50.
- the sealing resin 40 integrates the ground electrode 50 and the solid-state imaging device 20, and the ground electrode 50 and the three-dimensional substrate 10. Accordingly, the solid-state imaging device 20 and the translucent member 30 can be provided on the three-dimensional substrate 10 and the ground electrode 50 can be provided on the solid-state imaging device 20 in one step.
- FIG. 13 is a diagram illustrating a state (usage state) in which the solid-state imaging device 6 is placed on the substrate 100.
- a portion provided on a convex portion near the periphery of the back surface 10 a comes into contact with the substrate 100. Further, the tip of the convex portion 51 also abuts on the substrate 100.
- the solid-state imaging device 20 and the ground pattern can be electrically connected without forming a separate wiring. Further, since the heat of the solid-state imaging device 20 is transmitted to the substrate 100 through the ground electrode 50 and the ground pattern on the substrate 100 (see the two-dot chain line arrow in FIG. 13), the temperature rise of the solid-state imaging device 20 can be suppressed. .
- ground electrode 50 on the back surface 20 b of the solid-state image sensor 20, it is possible to prevent light from entering the solid-state image sensor 20 from the back surface of the solid-state image sensor 20.
- a flexible substrate is integrated with a solid-state imaging device.
- the solid-state imaging device 7 according to the seventh embodiment will be described.
- symbol is attached
- FIG. 14 is a plan view showing an outline of the solid-state imaging device 7.
- FIG. 15 is a sectional view schematically showing the solid-state imaging device 7, and is a DD sectional view of FIG. In addition, in FIG. 14, the principal part is seen through.
- the solid-state imaging device 7 mainly includes a three-dimensional substrate 10A, a solid-state imaging element 20A, a translucent member 30, and a flexible substrate 60. Since the difference between the three-dimensional substrate 10A and the three-dimensional substrate 10 is only the shape, a detailed description of the three-dimensional substrate 10A is omitted. Further, since the difference between the solid-state imaging device 20 and the solid-state imaging device 20A is only the material of the bump (detailed later), detailed description of the solid-state imaging device 20A is omitted.
- the flexible substrate 60 is a flexible printed wiring board, and is formed on a substantially rectangular film-like substrate (thin film of about 12 ⁇ m to 50 ⁇ m) made of an insulating material (for example, plastic) on a copper substrate 61.
- a circuit pattern is formed of a metal foil 62 formed of a conductive material such as.
- an insulator 63 is covered on the metal foil 62 except for the terminal portion and the soldering portion.
- a plate material 64 is provided for reinforcement at a portion adjacent to the three-dimensional substrate 10A.
- the flexible substrate 60 is integrated with the three-dimensional substrate 10A in advance.
- the flexible substrate 60 is disposed on the back surface 10a of the three-dimensional substrate 10A.
- the solid-state imaging device 20A is provided on the three-dimensional substrate 10A, the flexible substrate 60 is sandwiched between the solid-state imaging device 20A and the three-dimensional substrate 10A.
- the bumps 28 (see FIG. 15) abut against the metal foil 62, and the bumps 28 (that is, the solid-state imaging device 20) and the metal foil 62 (that is, the flexible substrate 60). Are electrically connected to each other.
- the bumps 28 are convex portions formed on the surface 20a, and are formed of a conductive material. Transmission of a video signal obtained by the solid-state imaging device 20 and control signals and power supply from the outside are performed via the flexible substrate 60.
- the three-dimensional substrate 10A in which the flexible substrate 60 is integrated in advance is placed with the back surface 10a facing upward.
- the translucent member 30 is placed inside the recess 13.
- the solid-state imaging device 20A is placed on the flexible substrate 60 provided on the back surface 10a.
- the solid-state imaging element 20A is placed so as to cover the recess 13. Further, the bumps 28 are placed on the metal foil 62.
- the sealing resin 40 is injected between the three-dimensional substrate 10A and the solid-state imaging device 20A.
- the sealing resin 40 is filled between 20A.
- the solid-state imaging device 20A and the translucent member 30 are mounted on the three-dimensional substrate 10A on which the flexible substrate 60 is provided.
- the solid-state imaging device 7 in which the flexible substrate 60 is integrated can be manufactured with a small number of processes.
- the solid-state imaging device 7 is particularly effective when applied to an apparatus such as an endoscope that requires downsizing.
- the eighth embodiment of the present invention is a mode in which two solid-state imaging devices 20 and two translucent members 30 are provided.
- the solid-state imaging device 8 according to the eighth embodiment will be described below.
- symbol is attached
- FIG. 16 is a plan view showing an outline of the solid-state imaging device 8.
- FIG. 17 is a cross-sectional view schematically showing the solid-state imaging device 8, and is a cross-sectional view taken along line EE in FIG. In addition, in FIG. 16, the principal part is seen through.
- the solid-state imaging device 8 mainly includes a three-dimensional substrate 10B, two solid-state imaging elements 20 (corresponding to the first element and the second element of the present invention), and two translucent members 30 (first of the present invention). A translucent member and a second translucent member).
- the three-dimensional substrate 10B is a plate-shaped member having the widest surface (front surface 10b, back surface 10c) having a substantially rectangular shape.
- the central portion is thinner than the other portions, but the shape of the three-dimensional substrate 10B is not limited to this.
- the through-holes 12 a and 12 b are formed in the region where the imaging region 22 of the solid-state imaging device 20 is arranged, like the through-hole 12.
- the through holes 12a and 12b are formed near both ends in the longitudinal direction (x direction) of the three-dimensional board 10B.
- the shape of the through holes 12a and 12b is the same as that of the through hole 12.
- concave portions 13c and 13d (corresponding to the first concave portion and the second concave portion of the present invention) on which the translucent member 30 is provided are formed.
- One end of the through hole 12a is formed on the bottom surface of the recess 13c, and one end of the through hole 12b is formed on the bottom surface of the recess 13d. Accordingly, the recesses 13c and 13d are formed in the vicinity of both ends of the three-dimensional substrate 10B, like the through holes 12a and 12b.
- the shape of the recesses 13 c and 13 d is the same as that of the recess 13.
- four protrusions 14 are formed so as to cover the four corners, respectively (FIG. 16). reference).
- the two translucent members 30 are provided inside the recesses 13c and 13d, respectively. Further, the two solid-state imaging devices 20 are placed on the back surface 10c so as to cover the recesses 13c and 13d, respectively.
- Ribs 10d are formed on the entire back surface 10c.
- a rib 10e is formed in a region between the recess 13c and the recess 13d on the back surface 10c. Thereby, the curvature of a three-dimensional board
- a plurality of strip-like wirings are formed outside the region of the back surface 10c where the ribs 10e are formed.
- a through hole 10f is formed in the three-dimensional substrate 10B.
- the through hole 10f has an inner peripheral surface and its vicinity covered with a conductive member (for example, a trunk), and connects a wiring formed on the back surface 10c and a wiring (not shown) formed on the front surface 10b. To do.
- a terminal portion 11 (not shown in FIGS. 16 and 17) is provided on the rib 10d.
- the terminal part 11 is electrically connected to the wiring formed on the back surface 10c.
- the three-dimensional substrate 10B is placed with the back surface 10c facing upward.
- the translucent member 30 is placed on the convex portion 14 in each of the concave portions 13c and 13d.
- the two solid-state imaging devices 20 are placed on the back surface 10c so as to cover the recesses 13c and 13d, respectively.
- the sealing resin 40 is injected between the three-dimensional substrate 10 ⁇ / b> B and the solid-state imaging device 20. Thereby, the two solid-state image sensors 20 and the translucent member 30 are attached to the three-dimensional board 10B.
- a solid-state imaging device for a compound eye camera can be assembled with a small number of steps. Further, by forming the through holes 12a and 12b and the recesses 13c and 13d in the vicinity of both ends of the three-dimensional substrate 10B, the base line length of the compound eye camera can be made as long as possible.
- the optical axes of the two imaging units are parallel, but can be changed by changing the shape of the three-dimensional substrate 10B. It is also possible to have a convergence angle of.
- substantially is a concept that includes not only a case where they are exactly the same but also errors and deformations that do not lose the identity.
- the “substantially rectangular shape” is not limited to a strictly rectangular shape, and is a concept that includes some error (for example, a curve is partially included). Further, for example, in the case of simply expressing a rectangular shape or the like, not only a strictly rectangular shape but also a substantially rectangular shape or the like is included.
- neighboring means including an area in a certain range (which can be arbitrarily determined) near the reference position.
- the vicinity of the periphery is a concept indicating that the region is in a certain range near the periphery and may or may not include the periphery.
- Solid-state imaging device 4 Light emitting device 10, 10A, 10B: Three-dimensional substrate 10a, 10c: Back surface 10b: Front surface 10d, 10e: Rib 10f: Through hole 11: Terminal portion 12, 12a, 12b: Through holes 13, 13c, 13d: Concave portion 13a: Bottom surface 13b: Side surface 14, 14A: Convex portion 15: Convex portion 16: Step 17: Concave portion 17a: Bottom surface 18: Convex portions 20, 20A: Solid imaging Element 20a: Front surface 20b: Back surface 21, 26, 28: Bump 22: Imaging region 25: Light emitting element 27: Light emitting region 30: Translucent member 30a: Front surface 30b: Side surface 30c: Back surface 31: Ren 32: Translucent member 40: Sealing resin 41: Light shielding resin 42: Adhesive 50: Ground electrode 50a: Side surface 51: Convex portion 60: Flexible substrate 61: Base material 62: Metal foil 63: Insulator 64: Plate material 100: substrate
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Abstract
Description
図1は、本発明の一例である固体撮像装置1の概略を示す平面図である。図2は、固体撮像装置1の概略を示す断面図であり、図1のA-A断面図である。図3は、固体撮像装置1の概略を示す断面図であり、図1のB-B断面図である。なお、図1では、要部を透視している。固体撮像装置1は、受光素子である固体撮像素子を有する受光装置である。
第1の実施の形態にかかる固体撮像装置1では、立体基板10に透光性部材30及び固体撮像素子20を載置してから、封止樹脂40を注入したが、封止樹脂40を注入する前に透光性部材30を接着剤等で仮止めしてもよい。
第1の実施の形態にかかる固体撮像装置3では、立体基板10の裏面側に板状の透光性部材30を設けたが、立体基板の裏面側に複数の透光性部材を設けてもよい。
第1の実施の形態にかかる発光装置4では、受光素子である固体撮像素子20を用いたが、固体撮像素子20の代わりに発光素子を用いてもよい。
本発明の第5の実施の形態は、封止樹脂を用いて固体撮像素子20の裏面を遮光する形態である。以下、第5の実施の形態にかかる固体撮像装置5について説明する。なお、第1の実施の形態と同一の部分については、同一の符号を付し、説明を省略する。
本発明の第6の実施の形態は、固体撮像素子20の裏面20bに接地電極を設ける形態である。以下、第6の実施の形態にかかる固体撮像装置6について説明する。なお、第1の実施の形態と同一の部分については、同一の符号を付し、説明を省略する。
本発明の第7の実施の形態は、固体撮像装置にフレキシブル基板が一体化された形態である。以下、第7の実施の形態にかかる固体撮像装置7について説明する。なお、第1の実施の形態と同一の部分については、同一の符号を付し、説明を省略する。
本発明の第8の実施の形態は、固体撮像素子20及び透光性部材30を2つ備える形態である。以下、第8の実施の形態にかかる固体撮像装置8について説明する。なお、第1の実施の形態と同一の部分については、同一の符号を付し、説明を省略する。
4 :発光装置
10、10A、10B :立体基板
10a、10c :裏面
10b :表面
10d、10e :リブ
10f :スルーホール
11 :端子部
12、12a、12b :貫通孔
13、13c、13d :凹部
13a :底面
13b :側面
14、14A :凸部
15 :凸部
16 :段差
17 :凹部
17a :底面
18 :凸部
20、20A :固体撮像素子
20a :表面
20b :裏面
21、26、28 :バンプ
22 :撮像領域
25 :発光素子
27 :発光領域
30 :透光性部材
30a :表面
30b :側面
30c :裏面
31 :レンズ
32 :透光性部材
40 :封止樹脂
41 :遮光樹脂
42 :接着剤
50 :接地電極
50a :側面
51 :凸部
60 :フレキシブル基板
61 :基材
62 :金属箔
63 :絶縁体
64 :板材
100 :基板
Claims (11)
- 立体形状を有する立体基板と、
前記立体基板に設けられる素子であって、光を受光する受光素子又は光を発光する受光素子である素子と、
前記立体基板に設けられる透光性部材と、
を備え、
前記立体基板は、裏面に形成された凹部と、板厚方向に貫通する貫通孔であって、一端が前記凹部の底面に形成された貫通孔と、前記凹部の底面に4個形成された柱状の凸部であって、前記凹部の側面と当接しないように、かつ前記貫通孔の4つの角をそれぞれ覆うように形成された4個の凸部と、を有し、
前記透光性部材は、前記貫通孔を覆うように前記凹部の内部に設けられ、
前記素子は、前記凹部を覆うように前記立体基板の裏面に設けられ、
前記透光性部材の第1の面は、前記凸部と当接し、
前記素子及び前記透光性部材は、前記立体基板と前記素子との間、前記透光性部材の前記第1の面と対向する第2の面と前記素子との間、前記透光性部材の前記第1の面及び第2の面とに隣接する側面と前記立体基板との間、及び前記透光性部材の前記第1の面と前記立体基板との間に充填される封止樹脂により前記立体基板に一体化されることを特徴とする光学装置。 - 請求項1に記載の光学装置であって、
前記封止樹脂は、粒子状の充填材を含み、
前記凸部は、前記充填材の最大粒径の2倍以上の高さで形成されることを特徴とする光学装置。 - 請求項1に記載の光学装置であって、
前記凹部の底面には、前記透光性部材を仮止めする接着剤が前記凸部の外側に塗布されることを特徴とする光学装置。 - 請求項1から3のいずれか一項に記載の光学装置であって、
前記封止樹脂は、遮光性を有する樹脂であり、
前記封止樹脂が、前記素子の裏面全体を覆うことを特徴とする光学装置。 - 請求項1から3のいずれか一項に記載の光学装置であって、
前記素子の前記立体基板と対向していない面に設けられた略板状の電極を備え、
前記封止樹脂は、前記電極と前記素子と、及び前記電極と前記立体基板とを一体化することを特徴とする光学装置。 - 請求項1に記載の光学装置であって、
絶縁材で形成された略矩形形状のフィルム状の基材の上に、金属箔で形成された回路パターンが形成されたフレキシブル基板を備え、
前期素子は、導電性を有する材料で形成されたバンプを有し、
前記フレキシブル基板は、端部が前記立体基板の裏面上に設けられ、
前記素子は、前記立体基板の裏面との間に前記フレキシブル基板を挟むように前記立体基板の裏面に設けられ、
前記素子が前記立体基板の裏面に設けられると、前記凸部と前記回路パターンとが当接することを特徴とする光学装置。 - 立体形状を有する立体基板と、
前記立体基板に設けられる2つの素子である第1素子及び第2素子であって、光を受光する受光素子又は光を発光する受光素子である第1素子及び第2素子と、
前記立体基板に設けられる第1透光性部材及び第2透光性部材と、
を備え、
前記立体基板は、裏面に形成された第1凹部及び第2凹部と、板厚方向に貫通する貫通孔であって、一端が前記第1凹部の底面に形成された第1貫通孔と、板厚方向に貫通する貫通孔であって、一端が前記第2凹部の底面に形成された第2貫通孔と、前記第1凹部の底面に4個形成された柱状の第1凸部であって、前記第1凹部の側面と当接しないように、かつ前記貫通孔の4つの角をそれぞれ覆うように形成された4個の第1凸部と、前記第2凹部の底面に4個形成された柱状の第2凸部であって、前記第2凹部の側面と当接しないように、かつ前記貫通孔の4つの角をそれぞれ覆うように形成された4個の第2凸部と、を有し、
前記第1透光性部材は、前記第1貫通孔を覆うように前記第1凹部の内部に設けられ、
前記第2透光性部材は、前記第2貫通孔を覆うように前記第2凹部の内部に設けられ、
前記第1素子は、前記第1凹部を覆うように前記立体基板の裏面に設けられ、
前記第2素子は、前記第2凹部を覆うように前記立体基板の裏面に設けられ、
前記第1透光性部材の第1の面は、前記第1凸部と当接し、前記第2透光性部材の第3の面は、前記第2凸部と当接し、
前記第1素子及び前記第1透光性部材は、前記立体基板と前記第1素子との間、前記第1透光性部材の前記第1の面と対向する第2の面と前記第1素子との間、前記第1の面及び第2の面とに隣接する側面と前記立体基板との間、及び前記第1の面と前記立体基板との間に充填される封止樹脂により前記立体基板に一体化され、
前記第2素子及び前記第2透光性部材は、前記立体基板と前記第2素子との間、前記第2透光性部材の前記第3の面と対向する第4の面と前記第1素子との間、前記第3の面及び第4の面とに隣接する側面と前記立体基板との間、及び前記第3の面と前記立体基板との間に充填される封止樹脂により前記立体基板に一体化されることを特徴とする光学装置。 - 請求項7に記載の光学装置であって、
前記立体基板は、最も広い面が略長方形の板状の部材であり、
前記第1凹部と前記第2凹部とは、それぞれ、前記立体基板の長手方向における両端近傍に形成されることを特徴とする光学装置。 - 請求項7又は8に記載の光学装置であって、
前記立体基板の裏面には、前記第1凹部と前記第2凹部との間の領域にリブが形成され、前記リブが形成された領域の外側に帯状の配線が複数形成される
することを特徴とする光学装置。 - 立体形状を有する立体基板であって、裏面に形成された凹部と、板厚方向に貫通する貫通孔であって、一端が前記凹部の底面に形成された貫通孔と、前記凹部の前記底面に4個形成された柱状の凸部であって、前記凹部の側面と当接しないように、かつ前記貫通孔の4つの角をそれぞれ覆うように形成された4個の凸部と、を有する立体基板を、前記裏面を上に向けた状態で載置する工程と、
透光性部材の第1の面を前記凸部に当接させて、前記貫通孔を覆うように前記凹部の内部に前記透光性部材を載置する工程と、
前記凹部を覆うように、光を受光する受光素子又は光を発光する受光素子である素子を前記立体基板の前記裏面に載置する工程と、
前記立体基板と前記素子との間、前記透光性部材の前記第1の面と対向する第2の面と前記素子との間、前記透光性部材の前記第1の面及び第2の面とに隣接する側面と前記立体基板との間、及び前記透光性部材の前記第1の面と前記立体基板との間に封止樹脂を充填して、前記素子及び前記透光性部材を前記立体基板に一体化する工程と、
を含むことを特徴とする光学装置の製造方法。 - 請求項10に記載の光学装置の製造方法であって、
前記立体基板を、前記裏面を上に向けた状態で載置する工程と、前記透光性部材の第1の面を前記凸部に当接させて、前記貫通孔を覆うように前記凹部の内部に前記透光性部材を載置する工程と、の間に、前記凹部の前記底面における前記凸部の外側の位置に、前記透光性部材を仮止めする接着剤を塗布する工程を含むことを特徴とする光学装置の製造方法。
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JP7191373B2 (ja) | 2018-11-16 | 2022-12-19 | マイクロモジュールテクノロジー株式会社 | 光学装置、分光センサモジュール、撮像モジュール、及び光学装置の製造方法 |
JP2020144351A (ja) * | 2019-03-05 | 2020-09-10 | コンクラフト ホールディング コーポレーション エルティーデーConcraft Holding Co., Ltd. | レンズモジュール内に用いるフィルターアセンブリ |
WO2021111715A1 (ja) * | 2019-12-04 | 2021-06-10 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置および撮像装置の製造方法 |
WO2022254659A1 (ja) * | 2021-06-03 | 2022-12-08 | オリンパスメディカルシステムズ株式会社 | 撮像ユニット、および、内視鏡 |
WO2023248875A1 (ja) * | 2022-06-20 | 2023-12-28 | ニデックインスツルメンツ株式会社 | レンズユニット |
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US10319766B2 (en) | 2019-06-11 |
CN108293088B (zh) | 2021-04-13 |
JP6745815B2 (ja) | 2020-08-26 |
KR20180090262A (ko) | 2018-08-10 |
JPWO2017094777A1 (ja) | 2018-09-20 |
KR102563860B1 (ko) | 2023-08-03 |
US20180277583A1 (en) | 2018-09-27 |
CN108293088A (zh) | 2018-07-17 |
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