WO2017037797A1 - 表面被覆切削工具 - Google Patents
表面被覆切削工具 Download PDFInfo
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- WO2017037797A1 WO2017037797A1 PCT/JP2015/074506 JP2015074506W WO2017037797A1 WO 2017037797 A1 WO2017037797 A1 WO 2017037797A1 JP 2015074506 W JP2015074506 W JP 2015074506W WO 2017037797 A1 WO2017037797 A1 WO 2017037797A1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/148—Composition of the cutting inserts
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/308—Oxynitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/10—Coatings
- B23B2228/105—Coatings with specified thickness
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23C2228/10—Coating
Definitions
- the present invention relates to a surface-coated cutting tool.
- Patent Document 1 discloses an ⁇ whose total area of crystal grains indicating the crystal orientation of the (0001) plane is 70% or more when viewed in plan from the normal direction of the surface of the layer.
- Patent Document 2 discloses an Al 2 O 3 layer.
- Patent Document 2 discloses an ⁇ - crystal in which crystal grains observed on the surface of the layer have a specific size category when viewed in plan from the normal direction of the surface of the layer.
- a surface-coated cutting tool having a coating comprising an Al 2 O 3 layer is disclosed.
- Patent Document 1 and Patent Document 2 by having a coating film including the ⁇ -Al 2 O 3 layer configured as described above, mechanical properties such as wear resistance and fracture resistance of the surface-coated cutting tool are improved. Therefore, it is expected that the life of the cutting tool will be extended.
- the present disclosure has been made in view of such circumstances, and an object of the present disclosure is to provide a surface-coated cutting tool that improves the mechanical properties of the coating and further extends the life of the cutting tool. It is in.
- a surface-coated cutting tool is a surface-coated cutting tool including a base material and a coating film formed on the base material, the coating film including a plurality of ⁇ -Al 2 O 3 crystal grains.
- An ⁇ -Al 2 O 3 layer containing Among ⁇ -Al 2 O 3 layer, a plane parallel to the surface, removing the ⁇ -Al 2 O 3 layer located 0.5 ⁇ m following areas than 0.1 ⁇ m in the depth direction from the surface Then, the crystal orientation of each crystal grain is specified by electron backscatter diffraction image (EBSD) analysis using a field emission scanning microscope (FE-SEM), and a 15 ⁇ m square based on this is determined.
- EBSD electron backscatter diffraction image
- FE-SEM field emission scanning microscope
- the area A 1 occupied by the crystal grains A of ⁇ -Al 2 O 3 having a grain size of 1 ⁇ m to 3 ⁇ m is 50% or less in the color map, and the area A 1
- the area A 2 occupied by crystal grains whose normal direction of (001) plane is within ⁇ 10 ° with respect to the normal direction of the processed surface is 90% or more, and the grain size is 0.5 ⁇ m or more and less than 1 ⁇ m.
- the area C 1 occupied by the crystal grains C of ⁇ -Al 2 O 3 having a grain size of 0.05 ⁇ m or more and less than 0.5 ⁇ m is 10% or more and 50% or less, and among the areas C 1 , (001 )
- the area C 2 occupied by the crystal grains whose normal direction of the surface is within ⁇ 10 ° with respect to the normal direction of the processed surface is 50% or more, and the area A 1 and the area B 1 with respect to the area of the entire color map And the ratio of the total area of the area C 1 is 95% or more.
- the mechanical properties of the coating are improved, and the life of the cutting tool can be further extended.
- FIG. 2 is a cross-sectional view taken along line II-II in FIG.
- FIG. 3 is a partially enlarged view of FIG. 2.
- FIG. 5 is a color map showing only coarse grains among the crystal grains shown in the color map of FIG. 4.
- FIG. 5 is a color map showing only medium grains among the crystal grains shown in the color map of FIG. 4.
- FIG. 5 is a color map showing only fine grains among the crystal grains shown in the color map of FIG. 4.
- a surface-coated cutting tool is a surface-coated cutting tool including a base material and a coating film formed on the base material, and the coating film includes a plurality of ⁇ -Al 2 O 3
- the crystal orientation of each crystal grain is specified by electron backscatter diffraction image (EBSD) analysis using a field emission scanning microscope (FE-SEM), and a 15 ⁇ m square based on this is determined.
- EBSD electron backscatter diffraction image
- FE-SEM field emission scanning microscope
- the area A 1 occupied by the crystal grains A of ⁇ -Al 2 O 3 having a grain size of 1 ⁇ m to 3 ⁇ m is 50% or less in the color map, and the area A 1
- the area A 2 occupied by crystal grains whose normal direction of (001) plane is within ⁇ 10 ° with respect to the normal direction of the processed surface is 90% or more, and the grain size is 0.5 ⁇ m or more and less than 1 ⁇ m.
- the area C 1 occupied by the crystal grains C of ⁇ -Al 2 O 3 having a grain size of 0.05 ⁇ m or more and less than 0.5 ⁇ m is 10% or more and 50% or less, and among the areas C 1 , (001 )
- the area C 2 occupied by the crystal grains whose normal direction of the surface is within ⁇ 10 ° with respect to the normal direction of the processed surface is 50% or more, and the area A 1 and the area B 1 with respect to the area of the entire color map And the ratio of the total area of the area C 1 is 95% or more.
- Such an ⁇ -Al 2 O 3 layer can have a high hardness. Therefore, the surface-coated cutting tool [1] is excellent in mechanical properties and thus
- the ⁇ -Al 2 O 3 layer preferably has a thickness of 1 ⁇ m to 25 ⁇ m. Thereby, said characteristic is exhibited more effectively.
- the ⁇ -Al 2 O 3 layer preferably has a thickness of 4 ⁇ m to 15 ⁇ m. Thereby, said characteristic is exhibited more effectively.
- the coating includes a first intermediate layer between the base material and the Al 2 O 3 layer, and the first intermediate layer is a TiCN layer. Since the TiCN layer has high hardness, the surface-coated cutting tool including the coating having the first intermediate layer is excellent in wear resistance.
- the coating includes a second intermediate layer between the base material and the ⁇ -Al 2 O 3 layer, and the second intermediate layer is a TiCNO layer or a TiBN layer, The difference between the maximum thickness and the minimum thickness of the second intermediate layer is 0.3 ⁇ m or more.
- the second intermediate layer it is possible to exhibit the effect as an anchor for adhering the alpha-Al 2 O 3 layer and the first intermediate layer, it is possible to enhance the peeling resistance of the coating. Therefore, the surface-coated cutting tool including the coating having the second intermediate layer is further excellent in fracture resistance.
- the coating includes a surface layer located on the outermost surface, and the surface layer is a TiC layer, a TiN layer, or a TiB 2 layer. Thereby, the toughness of the coating is improved.
- crystal grains whose normal direction of (001) plane is within ⁇ 10 ° with respect to the normal direction of the surface of the ⁇ -Al 2 O 3 layer will be referred to as “(001) plane-oriented crystal grains”.
- a surface-coated cutting tool 10 (hereinafter simply referred to as “tool 10”) of the present embodiment has a cutting edge at which rake face 1, flank face 2, rake face 1 and flank face 2 intersect. And a ridge line portion 3. That is, the rake face 1 and the flank face 2 are faces that are connected with the blade edge line portion 3 interposed therebetween.
- the cutting edge ridge line portion 3 constitutes a cutting edge tip portion of the tool 10.
- the shape of such a tool 10 depends on the shape of the base material described later.
- FIG. 1 shows a tool 10 as a cutting edge exchangeable cutting tip for turning, but the tool 10 is not limited to this, and a drill, an end mill, a cutting edge exchangeable cutting tip for a drill, a cutting edge exchangeable cutting tip for an end mill, a milling cutter. It can be suitably used as a cutting tool such as a cutting edge exchangeable cutting tip for processing, a metal saw, a gear cutting tool, a reamer, and a tap.
- the tool 10 when the tool 10 is a cutting edge exchange type cutting tip or the like, the tool 10 includes those having a chip breaker and those having no chip breaker, and the cutting edge ridge line portion 3 has a sharp edge (rake face). And the ridge where the flank intersects), honing (having a sharp edge), negative land (having a chamfer), and a combination of honing and negative land.
- the tool 10 includes a base material 11 and a coating 12 formed on the base material 11.
- the coating 12 preferably covers the entire surface of the substrate 11, but a part of the substrate 11 is not covered with the coating 12 or the configuration of the coating 12 is partially different. Even so, it does not depart from the scope of the present embodiment.
- the base material 11 of this embodiment has a rake face 11a, a flank face 11b, and a cutting edge ridge line portion 11c where the rake face 11a and the flank face 11b intersect.
- the rake face 11 a, the flank face 11 b, and the cutting edge ridge line part 11 c constitute a rake face 1, a flank face 2, and a cutting edge ridge line part 3 of the tool 10.
- any conventionally known substrate can be used as this type of substrate.
- cemented carbide for example, WC-based cemented carbide, including WC, including Co, or including carbonitrides such as Ti, Ta, Nb), cermet (TiC, TiN, TiCN, etc.) Component
- high-speed steel ceramics (titanium carbide, silicon carbide, silicon nitride, aluminum nitride, aluminum oxide, etc.), cubic boron nitride sintered body, or diamond sintered body preferable.
- the film 12 of this embodiment includes at least one ⁇ -Al 2 O 3 layer described in detail below. As long as the coating 12 includes this ⁇ -Al 2 O 3 layer, it can include other layers.
- the composition of the other layers is not particularly limited, and examples thereof include TiC, TiN, TiB, TiBN, TiAlN, TiSiN, AlCrN, TiAlSiN, TiAlNO, AlCrSiCN, TiCN, TiCNO, TiSiC, CrSiN, AlTiSiCO, and TiSiCN.
- the order of the lamination is not particularly limited.
- Such a coating 12 of this embodiment has an effect of improving various properties such as wear resistance and fracture resistance by covering the base material 11.
- the coating 12 preferably has a thickness of 3 to 35 ⁇ m.
- the thickness of the coating 12 is 3 ⁇ m or more, it is possible to suppress a reduction in tool life due to the thin thickness of the coating 12.
- the thickness of the coating 12 is 35 ⁇ m or less, the chipping resistance in the initial stage of cutting can be improved.
- the base layer 13 and the first intermediate layer are sequentially arranged from the substrate side to the surface side of the coating film 12 (from the lower side to the upper side in the figure).
- layer 14, second intermediate layer 15, and alpha-Al 2 O 3 layer 16 will be described film 12 laminated.
- the ⁇ -Al 2 O 3 layer 16 of the present embodiment is a layer including crystal grains of a plurality of ⁇ -Al 2 O 3 (aluminum oxide having a crystal structure of ⁇ type). That is, this layer is composed of polycrystalline ⁇ -Al 2 O 3 . Usually, this crystal grain has a grain size of about 0.01 to 3.5 ⁇ m.
- the ⁇ -Al 2 O 3 layer 16 in the present embodiment among the ⁇ -Al 2 O 3 layer 16, a plane parallel to its surface, 0.1 [mu] m or more with respect to the depth direction from the surface 0.
- the crystal orientation of each crystal grain made of ⁇ -Al 2 O 3 is determined by EBSD analysis using FE-SEM.
- the area A 1 occupied by the crystal grains A of ⁇ -Al 2 O 3 having a grain size of 1 ⁇ m or more and 3 ⁇ m or less is 50% or less.
- the area B 1 occupied by the crystal grains B of ⁇ -Al 2 O 3 having a grain size of 0.5 ⁇ m or more and less than 1 ⁇ m is 20% or more and 50% or less.
- the area C 1 occupied by the crystal grains C of ⁇ -Al 2 O 3 having a grain size of 0.05 ⁇ m or more and less than 0.5 ⁇ m is 10% or more and 50% or less.
- the area A 2 occupied by the (001) plane-oriented crystal grains is 90% or more.
- the area B 1 occupied by the (001) plane-oriented crystal grains is 90% or more.
- an area C 2 occupied among the (001) plane orientation crystal grains of the area C 1 is 50% or more.
- the ratio of the total area of the area A 1 , the area B 1 , and the area C 1 to the area of the entire color map is 95% or more.
- ⁇ -Al 2 O 3 layer 16 is formed on the basis of the manufacturing method described later.
- the surface is parallel to the surface of the formed ⁇ -Al 2 O 3 layer 16 (the surface opposite to the surface located on the base material side, which constitutes the surface of the coating 12 in this embodiment).
- a processed surface which is a new surface obtained by removing the ⁇ -Al 2 O 3 layer 16 located in the region of 0.1 to 0.5 ⁇ m in the depth direction from the surface is prepared.
- the processing position can be any position of the ⁇ -Al 2 O 3 layer 16, but is preferably in the vicinity of the edge of the blade edge as described later.
- FIB processing using FIB can be mentioned.
- the conditions for the FIB processing are as follows.
- the manufacturing method of the processed surface is not limited to FIB processing, but it is preferable that at least a measurement surface according to the processed surface manufactured by FIB processing can be manufactured.
- another layer such as a surface layer is formed on the ⁇ -Al 2 O 3 layer 16
- the other layer is removed by polishing using, for example, a No. 3000 grindstone, and the ⁇ -Al 2
- the FIB processing is preferably performed after the O 3 layer 16 is exposed.
- the processed surface is observed using an FE-SEM (product name: “SU6600”, manufactured by Hitachi High-Technologies Corporation) equipped with EBSD, and EBSD analysis is performed on the obtained observation image.
- the observation location is not particularly limited, but it is preferable to observe the vicinity of the edge portion of the blade edge in consideration of the relationship with the cutting characteristics.
- EBSD analysis data is collected sequentially by placing a focused electron beam onto each pixel individually.
- the normal of the sample surface (the processed surface of the FIB processed ⁇ -Al 2 O 3 layer) is inclined by 70 ° with respect to the incident beam, and the analysis is performed at 15 kV. In order to avoid the charging effect, a pressure of 10 Pa is applied.
- the high current mode is used in combination with the opening diameter of 60 ⁇ m or 120 ⁇ m.
- Data collection is performed at a step of 0.1 ⁇ m / step for 500 ⁇ 300 points corresponding to a surface area of 50 ⁇ 30 ⁇ m on the cross section.
- the EBSD analysis result is analyzed using commercially available software (trade name: “orientation Imaging microscopy Ver 6.2”, manufactured by EDAX), and the color map is created. Specifically, using software, the normal direction of the (001) plane of each measurement pixel and the normal direction of the surface of the ⁇ -Al 2 O 3 layer 16 (the surface located on the coating surface side) (that is, the surface) An angle formed with the normal direction of the processed surface of the ⁇ -Al 2 O 3 layer manufactured by FIB processing is calculated, and a color map is generated by changing the color for each angle. To create the color map, the “Cristal Direction MAP” method included in the software can be used.
- the crystal grains A, the crystal grains B, and the crystal grains C can be distinguished by dividing each crystal grain by grain size using the color map. Specifically, first, in the color map, an area in which the colors match (that is, the plane orientations match) and the periphery is surrounded by other colors (that is, other plane orientations) Consider it as a separate area. Next, an imaginary diagonal line that can be drawn longest is drawn for each crystal grain, and this is used as the grain size of each crystal grain.
- a grain having a grain size of 1 ⁇ m or more and 3 ⁇ m or less is a coarse crystal grain A
- a grain having a grain size of 0.5 ⁇ m or more and less than 1 ⁇ m is a medium grain B
- a grain size is 0.05 ⁇ m or more.
- Those less than 0.5 ⁇ m are distinguished as crystal grains C which are fine grains.
- the area occupied by each crystal grain in the color map, and the area occupied by (001) plane-oriented crystal grains among the area occupied by each crystal grain Can be requested.
- the color map is created for a 15 ⁇ m square (15 ⁇ m ⁇ 15 ⁇ m) processed surface.
- FIG. 4 is an example of a color map relating to the above-described processed surface of the ⁇ -Al 2 O 3 layer 16.
- a region surrounded by a solid line and indicated by hatching with hatching is a (001) plane-oriented crystal grain
- each region surrounded by a solid line and indicated by white is a (001) plane-oriented crystal grain.
- Other than the crystal grains that is, in the color map illustrated in FIG. 4, the crystal grains whose angle in the normal direction of the (001) plane with respect to the normal direction of the surface of the ⁇ -Al 2 O 3 layer 16 is 10 ° or less are indicated by hatching.
- crystal grains in which the angle of the normal direction of the (001) plane with respect to the normal direction of the surface of the ⁇ -Al 2 O 3 layer 16 exceeds 10 ° are shown in white.
- the region where the crystal orientation was not specified was displayed in black.
- FIGS. 5 to 7 illustrate color maps in which the crystal grains A (coarse grains), the crystal grains B (medium grains), and the crystal grains C (fine grains) are distinguished from each other in the color map of FIG. That is, of the crystal grains shown in the color map of FIG. 4, only the crystal grains A are shown in the color map of FIG. Of the crystal grains shown in the color map of FIG. 4, only the crystal grains B are shown in the color map of FIG. Of the crystal grains shown in the color map of FIG. 4, only the crystal grains C are shown in the color map of FIG. In particular, in FIG.
- a region surrounded by a solid line and hatched is a (001) -oriented crystal grain in the crystal grain C, and a region surrounded by a solid line and not hatched is a crystal
- the tool 10 including the ⁇ -Al 2 O 3 layer 16 satisfying the above (1) to (7) is superior in mechanical characteristics as compared with the conventional tool, and has a longer life.
- the proportion of coarse particles is kept lower than that of the conventional one. Coarse grains tend to fall off from the ⁇ -Al 2 O 3 layer as compared with fine grains and medium grains.
- the ⁇ -Al 2 O 3 layer 16 of the present embodiment is more likely to fall off than in the past. Therefore, the chipping resistance is excellent.
- the ⁇ -Al 2 O 3 layer 16 of this embodiment is excellent in both wear resistance and fracture resistance characteristics, the tool 10 including the coating 12 having the ⁇ -Al 2 O 3 layer 16 has its machine. The characteristics are improved as compared with the conventional one and the life is extended.
- the ratio of the area A 1 is greater than 50%, the wear resistance of the ⁇ -Al 2 O 3 layer 16 is significantly reduced.
- the ratio of the area A 1 is preferably 49% or less.
- the lower limit value of the ratio of the area A 1 is not particularly limited, but is preferably 10% or more, more preferably 25% or more from the viewpoint of fracture resistance.
- the ratio of the area B 1 exceeds 50%, there is a concern about a decrease in wear resistance. On the other hand, if the ratio of the area B 1 is less than 20%, there is a concern that the chipping resistance is lowered.
- the ratio of the area B 1 is preferably 25 to 48%.
- the ratio of the area C 1 exceeds 50%, there is a concern that the fracture resistance may be lowered due to an excessive increase in the proportion of fine particles. Further, if the ratio of the area C 1 is less than 10%, decrease in wear resistance is concerned.
- the ratio of the area C 1 is preferably 15 to 40%, more preferably 15 to 37%.
- the ratio of the area A 2 is preferably 92% or more.
- the upper limit of the ratio of the area A 2 is not particularly limited, and may be 100%.
- the ratio of the area B 2 is preferably 92% or more.
- the upper limit of the ratio of the area B 2 is not particularly limited, and may be 100%.
- Ratio of the area C 2 is preferably 52% or more.
- the upper limit of the ratio of the area C 2 is not particularly limited, and may be 100%. Conventionally, it has been particularly difficult to increase the ratio of the area C 2 , but it should be noted that this has become possible by the manufacturing method described later.
- the grain size on the processed surface is particularly coarser than 3 ⁇ m. This means that there are fine crystal grains, particularly fine crystal grains having a grain size of less than 0.05 ⁇ m, and missing portions of crystal grains.
- Such an ⁇ -Al 2 O 3 layer 16 has a marked decrease in both wear resistance and fracture resistance.
- the ⁇ -Al 2 O 3 layer 16 preferably has a thickness of 3 to 25 ⁇ m. Thereby, the above excellent effects can be exhibited.
- the thickness is more preferably 4 to 15 ⁇ m, still more preferably 5 to 15 ⁇ m.
- the thickness of the ⁇ -Al 2 O 3 layer 16 is less than 3 ⁇ m, the degree of improvement in wear resistance due to the presence of the ⁇ -Al 2 O 3 layer 16 tends to be low. If it exceeds 25 ⁇ m, the interfacial stress due to the difference in coefficient of linear expansion between the ⁇ -Al 2 O 3 layer 16 and the other layers may increase, and the ⁇ -Al 2 O 3 crystal grains may fall off. Such a thickness can be confirmed by observation of a vertical cross section of the substrate 11 and the coating 12 using a scanning electron microscope (SEM) or the like.
- SEM scanning electron microscope
- the coating film 12 has a TiCN layer as the first intermediate layer 14 between the base material 11 and the ⁇ -Al 2 O 3 layer 16. Since the TiCN layer is excellent in wear resistance, the wear resistance of the coating 12 can be further improved.
- the coating film 12 includes a second intermediate layer 15 between the first intermediate layer 14 and the ⁇ -Al 2 O 3 layer 16. As shown in FIG. 8, the second intermediate layer 15 is preferably composed of needle-like crystals.
- the acicular crystal is a crystal having an elongated shape like a needle because the crystal growth direction is one direction.
- the layer made of acicular crystals has the characteristics that the thickness greatly varies and the surface shape becomes complicated. Therefore, the effect as an anchor can be exerted on the contacting layer. Therefore, by having such a second intermediate layer 15 between the base material 11 and the ⁇ -Al 2 O 3 layer 16, the ⁇ -Al 2 O 3 layer 16 can be made difficult to peel from the base material 11. Therefore, the fracture resistance of the tool 10 including the coating 12 is further improved.
- the second intermediate layer 15 is preferably a TiCNO layer or a TiBN layer. This is because TiCNO and TiBN can easily form needle crystals.
- the difference between the maximum thickness d 1 and the minimum thickness d 2 of the second intermediate layer 15 is preferably 0.3 ⁇ m or more. In this case, the above characteristics are effectively exhibited.
- the difference is preferably 1.0 ⁇ m or less. This is because if the difference exceeds 1.0 ⁇ m, the shape of the second intermediate layer 15 may adversely affect the shape of the coating 12. The difference can be confirmed using an FE-SEM equipped with the EBSD.
- the film 12 according to the present embodiment includes a base layer 13 that is in contact with the substrate 11.
- a TiN layer as the underlayer 13
- the adhesion between the substrate 11 and the coating 12 can be further enhanced.
- the coating 12 according to the present embodiment may have a surface layer on the ⁇ -Al 2 O 3 layer 16.
- the surface layer is preferably a TiC layer, a TiN layer, or a TiB 2 layer.
- the ⁇ -Al 2 O 3 layer 16 has a high (001) orientation, but the TiC layer, TiN layer, and TiB 2 layer formed on the ⁇ -Al 2 O 3 layer 16 are This is particularly effective for suppressing crack propagation during intermittent cutting. Therefore, the coating film 12 having a surface layer having such a composition is advantageous in terms of improving toughness.
- the TiN layer exhibits a clear gold color, it is easy to identify the cutting edge after cutting use, which is advantageous from the viewpoint of economy.
- the tool 10 according to the above-described embodiment can be manufactured by forming the coating 12 on the surface of the substrate 11.
- the coating 12 can be formed by a CVD method using a chemical vapor deposition (CVD) apparatus illustrated in FIG.
- the CVD apparatus 30 includes a plurality of base material setting jigs 31 for holding the base material 11 and a reaction vessel 32 made of heat resistant alloy steel that covers the base material setting jig 31. .
- a temperature control device 33 for controlling the temperature in the reaction vessel 32 is provided around the reaction vessel 32.
- the reaction vessel 32 is provided with a gas introduction pipe 35 having a gas introduction port 34.
- the gas introduction pipe 35 is arranged so as to extend in the vertical direction in the internal space of the reaction container 32 in which the base material setting jig 31 is arranged, and a plurality of gas introduction pipes 35 for ejecting gas into the reaction container 32.
- each layer can be formed as follows.
- the base material 11 is placed on the base material setting jig 31, and the source gas for the underlayer 13 is supplied from the gas introduction pipe 35 into the reaction container 32 while controlling the temperature and pressure in the reaction container 32 within a predetermined range. To introduce. Thereby, the base layer 13 is produced on the surface of the base material 11. Similarly, by introducing the raw material gas for the first intermediate layer 14 and the raw material gas for the second intermediate layer 15 into the reaction vessel 32 in this order, the first intermediate layer 14 and the second intermediate layer are formed on the underlayer 13. 15 are formed in order.
- TiCl 4 and N 2 can be used as source gases.
- TiCl 4 , N 2 and CH 3 CN can be used.
- TiCNO layer TiCl 4 , N 2 , CO and CH 4 can be used.
- the temperature in the reaction vessel 32 when forming each layer is preferably controlled to 1000 to 1100 ° C., and the pressure in the reaction vessel 32 is preferably controlled to 0.1 to 1013 hPa.
- HCl may be introduced together with the above source gas. By introducing HCl, the uniformity of the thickness of each layer can be improved.
- H 2 is preferably used as the carrier gas.
- At least one of the above layers may be formed by an MT (Medium Temperature) -CVD method.
- MT-CVD method Unlike the CVD method (hereinafter also referred to as “HT-CVD method”) performed at a temperature of 1000 ° C. to 1100 ° C., the MT-CVD method has a relatively mild temperature of 850 to 950 ° C. This is a method of forming a layer while maintaining a proper temperature. Since the MT-CVD method is performed at a relatively low temperature compared to the HT-CVD method, damage to the base material 11 due to heating can be reduced.
- the TiCN layer is preferably formed by the MT-CVD method.
- the ⁇ -Al 2 O 3 layer 16 is formed on the second intermediate layer 15.
- the ⁇ -Al 2 O 3 layer 16 according to this embodiment can be formed by performing a CVD method including the following first step and second step. Hereinafter, each process is demonstrated in order.
- a first ⁇ -Al 2 O 3 layer is formed on the second intermediate layer 15 (first step).
- the raw material gas AlCl 3, N 2, CO 2, and using H 2 S.
- the flow rate ratio is set so as to satisfy CO 2 / H 2 S ⁇ 2.
- the upper limit of CO 2 / H 2 S is not particularly limited, but is preferably 5 or less from the viewpoint of the uniformity of the layer thickness.
- the inventors have preferred flow rates of CO 2 and H 2 S in the first step of 0.4 to 2.0 l / min and 0.1 to 0.8 l / min, most preferably 1 l. / Min and 0.5 l / min.
- the source gas AlCl 3 , N 2 , CO 2 , and H 2 S are used.
- the flow rate (l / min) between the CO 2 gas and the H 2 S gas the flow rate ratio is set so as to satisfy 0.5 ⁇ CO 2 / H 2 S ⁇ 1.
- the temperature in the reaction vessel 32 is preferably controlled to 1000 to 1100 ° C., and the pressure in the reaction vessel 32 is preferably controlled to 0.1 to 100 hPa.
- HCl may be introduced together with the above listed source gases, and H 2 can be used as the carrier gas.
- H 2 can be used as the carrier gas.
- the ⁇ -Al 2 O 3 layer 16 formed of the first ⁇ -Al 2 O 3 layer and the second ⁇ -Al 2 O 3 layer formed through the first step and the second step from the surface side. Blasting may be performed.
- the layer formed by the CVD method tends to have a tensile residual stress as a whole, this step can apply a compressive residual stress to the surface side of the ⁇ -Al 2 O 3 layer 16. -The hardness of the Al 2 O 3 layer 16 can be increased.
- the film 12 is, if it has a surface layer formed on the ⁇ -Al 2 O 3 layer 16, after the surface layer has been formed, it is preferable to carry out the blasting treatment.
- the CVD apparatus 30 In order to form the surface layer after performing the blasting process, it is necessary to stop the CVD apparatus 30, take out the base material 11 from the reaction vessel 32, etc., and the manufacturing process becomes complicated. Since this surface layer only needs to remain on a part of the surface of the tool 10, the surface layer may be partially removed by the blast treatment.
- the coating 12 can be manufactured by the manufacturing method described above, and thus the tool 10 including the coating 12 can be manufactured.
- the reason why the ⁇ -Al 2 O 3 layer 16 satisfying the above (1) to (7) is formed by such a manufacturing method is not clear, but the present inventors speculate as follows.
- alpha-Al in the present embodiment the second intermediate layer 15 2 O 3 layer with layers of different composition in forming the alpha-Al 2 O 3 layer on the crystal grain orientation of the alpha-Al 2 O 3 and It tends to be difficult to align. This is because the compatibility between ⁇ -Al 2 O 3 and layers having different compositions affects the orientation of ⁇ -Al 2 O 3 crystal grains. Therefore, if the ⁇ -Al 2 O 3 layer is formed on the second intermediate layer 15 while the (001) plane-oriented crystal grains are small, the number of (001) plane-oriented crystal grains is small. An ⁇ -Al 2 O 3 layer is formed.
- the (001) plane-oriented crystal grains are temporarily formed in the first ⁇ -Al 2 O 3 layer formed by the first step. Even if the amount is small, since the film formation of the ⁇ -Al 2 O 3 layer does not proceed as it is (ie, because it is switched to the second step), the (001) plane-oriented crystal grains as described above are used. Therefore, it is possible to prevent the formation of an ⁇ -Al 2 O 3 layer with a low content.
- the first alpha-Al 2 O 3 layer is formed by a first step on the other layer
- the second alpha-Al 2 O 3 layer formed by the subsequent second step is formed on the first ⁇ -Al 2 O 3 layer having high compatibility (good compatibility), and consequently (001) plane orientation is excellent. It will be.
- the aspect of each layer changes by controlling each condition of the CVD method.
- the composition of each layer is determined by the composition of the source gas introduced into the reaction vessel 32, and the thickness of each layer is controlled by the implementation time (film formation time).
- the second intermediate layer 15 is preferably a needle crystal, but this can change the crystal shape into a needle crystal by controlling the flow rate of the source gas and the film formation temperature.
- the length of each needle-like crystal can be made non-uniform by controlling the pressure during film formation, thereby causing the difference between the maximum thickness d 1 and the minimum thickness d 2 as described above. it can.
- the flow rate ratio of CO 2 gas to H 2 S gas in the source gas Control of (CO 2 / H 2 S) is important.
- Sample No. 1 to 12 correspond to the examples, and sample Nos.
- Reference numerals 13 to 17 are comparative examples.
- sample no. 1 Made of cemented carbide with a composition (including inevitable impurities) consisting of TaC (2.0 mass%), NbC (1.0 mass%), Co (10.0 mass%) and WC (balance) as the base material
- a cutting tip (shape: CNMG120408N-UX, manufactured by Sumitomo Electric Hardmetal Co., Ltd., JIS B4120 (2013)) was prepared.
- a base layer, a first intermediate layer, a second intermediate layer, an ⁇ -Al 2 O 3 layer and a surface layer are formed in this order on the prepared base material, and a coating is formed on the surface of the base material.
- the conditions for forming each layer are shown below.
- the parentheses following each gas composition indicate the flow rate (l / min) of each gas.
- the following blasting treatment was performed on the cutting edge exchangeable cutting tip for turning which is a base material on which a film was formed. That is, while rotating the tip at 100 rpm, an aluminum oxide ball having an average particle diameter of 50 ⁇ m was allowed to collide with compressed air of 0.1 MPa for 5 seconds from the 45 ° direction of the edge of the blade edge to the rake face and flank face. It was.
- sample No. 1 tool was produced.
- Sample No. Regarding 2 to 17 each tool was produced by forming a film comprising a base layer, a first intermediate layer, a second intermediate layer, an ⁇ -Al 2 O 3 layer and a surface layer on the same base material. .
- the composition of the second intermediate layer and the surface layer was appropriately changed by changing the source gas used for forming the second intermediate layer and the surface layer.
- Table 1 shows the composition and thickness of each layer constituting the coating in each sample. The thickness of each layer was adjusted by appropriately adjusting the film formation time.
- the conditions other than the source gas and the film formation time were appropriately changed.
- the pressure during film formation was changed as shown in Table 2.
- the difference between the maximum thickness and the minimum thickness of the second intermediate layer made of acicular crystals was different as shown in Table 2.
- the flow rate ratio (CO 2 / H 2 S) between CO 2 and H 2 S in the introduced gas was changed as shown in Table 3.
- Sample No. In 1 to 12 the gas for the first step was introduced for 30 minutes, and then the gas for the second step was introduced.
- the above-described FIB processing is performed on the rake face side of the tool having a coating provided on the surface of the base material and in the vicinity of the edge of the edge of the cutting edge, so that the depth from the surface of the ⁇ -Al 2 O 3 layer is zero.
- the ⁇ -Al 2 O 3 layer located in the 2 ⁇ m region was removed. Thereby, the processed surface was produced.
- the prepared processed surface was observed using an FE-SEM equipped with EBSD, whereby the above-described color map was prepared for a processed surface of 15 ⁇ m ⁇ 15 ⁇ m.
- the cutting conditions are as follows. 20 chips were used for each sample, turning was performed for 20 seconds, and the ratio (number) of broken chips among all 20 chips was calculated as the breakage rate (%). The results are shown in Table 4. In Table 4, it shows that it is excellent in fracture resistance, so that a failure rate (%) is low.
- the conditions for turning are as follows. Using 20 tips for each sample, turning was performed for 15 minutes, the wear amount Vb (mm) on the flank side of all 20 tips was measured, and the average value of each sample was calculated. The results are shown in Table 4. It shows that it is excellent in abrasion resistance, so that the value of Vbmm) in Table 4 is small.
- sample No. 1 to 12 sample no. Compared with 13 to 17, high fracture resistance and high wear resistance were confirmed.
- Sample No. 1 to 12 satisfy the above (1) to (7). 13-17 did not satisfy this. From these results, sample No. 1 as an example of the present embodiment is obtained. It was confirmed that the chips 1 to 12 had high fracture resistance and high wear resistance, and therefore excellent mechanical properties, and thus had a stable long life.
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Abstract
Description
最初に本発明の実施態様を列記して説明する。なお、本明細書の結晶学的記載においては、個別面を()で示す。また、本明細書において「X~Y」という形式の表記は、範囲の上限下限(すなわちX以上Y以下)を意味しており、Xにおいて単位の記載がなく、Yにおいてのみ単位が記載されている場合、Xの単位とYの単位とは同じである。また本明細書において、「TiN」、「TiCN」等の化学式において特に原子比を特定していないものは、各元素の原子比が「1」のみであることを示すものではなく、従来公知の原子比が全て含まれるものとする。
以下、本発明の一実施形態(以下「本実施形態」と記す)について説明するが、本実施形態はこれらに限定されるものではない。また、以下において「(001)面の法線方向がα-Al2O3層の表面の法線方向に対して±10°以内となる結晶粒」を、「(001)面配向性結晶粒」ともいう。
図1を参照し、本実施形態の表面被覆切削工具10(以下、単に「工具10」と記す)は、すくい面1と、逃げ面2と、すくい面1と逃げ面2とが交差する刃先稜線部3とを有する。すなわち、すくい面1と逃げ面2とは、刃先稜線部3を挟んで繋がる面である。刃先稜線部3は、工具10の切刃先端部を構成する。このような工具10の形状は、後述する基材の形状に依拠する。
図2を参照し、本実施形態の基材11は、すくい面11aと、逃げ面11bと、すくい面11aと逃げ面11bとが交差する刃先稜線部11cとを有する。すくい面11a、逃げ面11b、および刃先稜線部11cは、工具10のすくい面1、逃げ面2、および刃先稜線部3を構成する。
本実施形態の被膜12は、以下に詳述するα-Al2O3層を少なくとも1層含む。被膜12は、このα-Al2O3層を含む限り、他の層を含むことができる。他の層の組成は特に限定されず、TiC、TiN、TiB、TiBN、TiAlN、TiSiN、AlCrN、TiAlSiN、TiAlNO、AlCrSiCN、TiCN、TiCNO、TiSiC、CrSiN、AlTiSiCOまたはTiSiCN等を挙げることができる。その積層の順も特に限定されない。
本実施形態のα-Al2O3層16は、複数のα-Al2O3(結晶構造がα型である酸化アルミニウム)の結晶粒を含んだ層である。すなわち、この層は、多結晶のα-Al2O3により構成される。通常この結晶粒は、約0.01~3.5μm程度の大きさの粒径を有する。
(1)粒径が1μm以上3μm以下であるα-Al2O3の結晶粒Aの占める面積A1が50%以下である。
(2)粒径が0.5μm以上1μm未満であるα-Al2O3の結晶粒Bの占める面積B1が20%以上50%以下である。
(3)粒径が0.05μm以上0.5μm未満であるα-Al2O3の結晶粒Cの占める面積C1が10%以上50%以下である。
(4)面積A1のうち(001)面配向性結晶粒の占める面積A2が90%以上である。
(5)面積B1のうち(001)面配向性結晶粒の占める面積B2が90%以上である。
(6)面積C1のうち(001)面配向性結晶粒の占める面積C2が50%以上である。
(7)カラーマップ全体の面積に対する、面積A1、面積B1、および面積C1の合計面積の割合が、95%以上である。
加速電圧:30kV
イオン :ガリウム(Ga)イオン
加工範囲:20μm×20μm
加工深さ:0.1~0.5μm(除去されるα-Al2O3層16の厚さ)
照射角度:5°
照射時間:1時間。
本実施形態において、α-Al2O3層16は、好ましくは3~25μmの厚みを有する。これにより、上記のような優れた効果を発揮することができる。その厚みは、より好ましくは4~15μmであり、さらに好ましくは5~15μmである。
図3に戻り、本実施形態に係る被膜12は、基材11とα-Al2O3層16との間に第1中間層14としてのTiCN層を有する。TiCN層は耐摩耗性に優れているため、これにより被膜12の耐摩耗性をさらに向上させることができる。
図3を参照し、本実施形態に係る被膜12は、第1中間層14とα-Al2O3層16との間に第2中間層15を有する。図8に示されるように、第2中間層15は針状結晶から構成されることが好ましい。
図3を参照し、本実施形態に係る被膜12は、基材11と接する下地層13を有する。下地層13として、たとえばTiN層を用いることにより、基材11と被膜12との密着性をさらに高めることができる。
本実施形態に係る被膜12は、α-Al2O3層16上に、表面層を有していてもよい。表面層は、TiC層、TiN層、またはTiB2層であることが好ましい。α-Al2O3層16は、(001)面の高い配向性を有するが、このようなα-Al2O3層16上に形成されたTiC層、TiN層、およびTiB2層は、断続切削時時の亀裂伝搬抑制に特に効果がある。したがって、このような組成の表面層を有する被膜12は、靭性向上の点で有利である。なかでも、TiN層は色彩が明瞭な金色を呈するため、切削使用後の刃先の識別が容易であり、経済性の観点で有利である。
上述の本実施形態に係る工具10は、基材11の表面に被膜12を作製することにより製造することができる。被膜12は、図9に例示する化学気相蒸着(CVD)装置を用いたCVD法により形成することができる。
まず、試料No.1の作製について説明する。基材として、TaC(2.0質量%)、NbC(1.0質量%)、Co(10.0質量%)およびWC(残部)からなる組成(ただし不可避不純物を含む)の超硬合金製切削チップ(形状:CNMG120408N-UX、住友電工ハードメタル株式会社製、JIS B4120(2013))を準備した。準備した基材に対し、CVD装置を用いて、下地層、第1中間層、第2中間層、α-Al2O3層および表面層をこの順に形成させて、基材の表面に被膜を作製した。各層の形成条件を以下に示す。なお、各ガス組成に続く括弧内は、各ガスの流量(l/min)を示す。
ガス:TiCl4(5)、N2(15)、H2(45)
圧力および温度:130hPaおよび900℃。
ガス:TiCl4(10)、N2(15)、CH3CN(1.0)、H2(80)
圧力および温度:90hPaおよび860℃(MT-CVD法)。
ガス:TiCl4(0.002)、CH4(2.5)、N2(6.0)、CO(0.5)、HCl(1.2)、H2(40)
圧力および温度:180hPaおよび1010℃。
(1)第1工程におけるCVD条件
ガス:AlCl3(2.5)、CO2(1.3)、H2S(0.4)、H2(40)
圧力および温度:80hPaおよび1000℃
(2)第2工程CVD条件
ガス:AlCl3(3.0)、CO2(1.2)、H2S(1.4)、H2(32)
圧力および温度:80hPaおよび1000℃。
ガス:TiCl4(5)、N2(15)、H2(45)
圧力および温度:130hPaおよび900℃。
各試料のチップを、型番PCLNR2525-43(住友電気工業株式会社製)のバイトにセットし、これを用いて合金鋼の繰り返し旋削加工による耐欠損性の評価を行った。
切削速度:120m/min
切り込み量:2.0mm
切削油:なし。
各試料のチップを、型番PCLNR2525-43(住友電気工業株式会社製)のバイトにセットし、これを用いて合金鋼の繰り返し旋削加工による耐摩耗性の評価を行った。
切削速度:280m/min
切り込み量:2.0mm
送り量:0.2mm/rev
切削油:水溶性油。
Claims (6)
- 基材と、該基材上に形成された被膜とを備える表面被覆切削工具であって、
前記被膜は、複数のα-Al2O3の結晶粒を含むα-Al2O3層を有し、
前記α-Al2O3層のうち、その表面に平行な面であって、前記表面から深さ方向に対して0.1μm以上0.5μm以下の領域に位置する前記α-Al2O3層を除去して得られる加工面に対し、電界放射型走査顕微鏡を用いた電子後方散乱回折像解析によって前記結晶粒のそれぞれの結晶方位を特定し、これに基づいた15μm四方のカラーマップを作成した場合に、
前記カラーマップにおいて、
粒径が1μm以上3μm以下であるα-Al2O3の結晶粒Aの占める面積A1が50%以下であり、かつ、前記面積A1のうち、(001)面の法線方向が前記加工面の法線方向に対して±10°以内となる結晶粒の占める面積A2が90%以上であり、
粒径が0.5μm以上1μm未満であるα-Al2O3の結晶粒Bの占める面積B1が20%以上50%以下であり、かつ、前記面積B1のうち、(001)面の法線方向が前記加工面の法線方向に対して±10°以内となる結晶粒の占める面積B2が90%以上であり、
粒径が0.05μm以上0.5μm未満であるα-Al2O3の結晶粒Cの占める面積C1が10%以上50%以下であり、かつ、前記面積C1のうち、(001)面の法線方向が前記加工面の法線方向に対して±10°以内となる結晶粒の占める面積C2が50%以上であり、
前記カラーマップ全体の面積に対する、前記面積A1、前記面積B1、および前記面積C1の合計面積の割合が、95%以上である、表面被覆切削工具。 - 前記α-Al2O3層は、1μm以上25μm以下の厚みを有する、請求項1に記載の表面被覆切削工具。
- 前記α-Al2O3層は、4μm以上15μm以下の厚みを有する、請求項2に記載の表面被覆切削工具。
- 前記被膜は、前記基材と前記α-Al2O3層との間に第1中間層を含み、
前記第1中間層は、TiCN層である、請求項1から請求項3のいずれか1項に記載の表面被覆切削工具。 - 前記被膜は、前記基材と前記α-Al2O3層との間に第2中間層を含み、
前記第2中間層は、TiCNO層またはTiBN層であり、
前記第2中間層の最大厚みと最小厚みとの差は、0.3μm以上である、請求項1から請求項4のいずれか1項に記載の表面被覆切削工具。 - 前記被膜は、最表面に位置する表面層を含み、
前記表面層は、TiC層、TiN層またはTiB2層である、請求項1から請求項5のいずれか1項に記載の表面被覆切削工具。
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