WO2016031482A1 - リードフレーム及びその製造方法 - Google Patents
リードフレーム及びその製造方法 Download PDFInfo
- Publication number
- WO2016031482A1 WO2016031482A1 PCT/JP2015/071644 JP2015071644W WO2016031482A1 WO 2016031482 A1 WO2016031482 A1 WO 2016031482A1 JP 2015071644 W JP2015071644 W JP 2015071644W WO 2016031482 A1 WO2016031482 A1 WO 2016031482A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- plating
- alloy
- lead frame
- resin
- metal plate
- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 238000007747 plating Methods 0.000 claims abstract description 116
- 229910052751 metal Inorganic materials 0.000 claims abstract description 69
- 239000002184 metal Substances 0.000 claims abstract description 69
- 229910052718 tin Inorganic materials 0.000 claims abstract description 48
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 48
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 42
- 239000000956 alloy Substances 0.000 claims abstract description 42
- 150000002739 metals Chemical class 0.000 claims abstract description 33
- 239000004065 semiconductor Substances 0.000 claims abstract description 11
- 229910000510 noble metal Inorganic materials 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 31
- 238000005530 etching Methods 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 23
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 10
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 10
- 229910001252 Pd alloy Inorganic materials 0.000 claims description 8
- 229910001316 Ag alloy Inorganic materials 0.000 claims description 6
- 229910001020 Au alloy Inorganic materials 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 229910008433 SnCU Inorganic materials 0.000 claims description 2
- 239000011701 zinc Substances 0.000 description 60
- 229920005989 resin Polymers 0.000 description 44
- 239000011347 resin Substances 0.000 description 44
- 239000010949 copper Substances 0.000 description 21
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 20
- 229910052802 copper Inorganic materials 0.000 description 20
- 238000011282 treatment Methods 0.000 description 20
- 239000010410 layer Substances 0.000 description 19
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 11
- 238000007788 roughening Methods 0.000 description 11
- 239000000243 solution Substances 0.000 description 9
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 238000009713 electroplating Methods 0.000 description 7
- -1 aminosilane compound Chemical class 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 238000004090 dissolution Methods 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 230000018109 developmental process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- QELJHCBNGDEXLD-UHFFFAOYSA-N nickel zinc Chemical compound [Ni].[Zn] QELJHCBNGDEXLD-UHFFFAOYSA-N 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 2
- BZOVBIIWPDQIHF-UHFFFAOYSA-N 3-hydroxy-2-methylbenzenesulfonic acid Chemical compound CC1=C(O)C=CC=C1S(O)(=O)=O BZOVBIIWPDQIHF-UHFFFAOYSA-N 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000004840 adhesive resin Substances 0.000 description 1
- 229920006223 adhesive resin Polymers 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910002064 alloy oxide Inorganic materials 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 239000003637 basic solution Substances 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- LAIZPRYFQUWUBN-UHFFFAOYSA-L nickel chloride hexahydrate Chemical compound O.O.O.O.O.O.[Cl-].[Cl-].[Ni+2] LAIZPRYFQUWUBN-UHFFFAOYSA-L 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 1
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 1
- 230000002572 peristaltic effect Effects 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- LFAGQMCIGQNPJG-UHFFFAOYSA-N silver cyanide Chemical compound [Ag+].N#[C-] LFAGQMCIGQNPJG-UHFFFAOYSA-N 0.000 description 1
- MNWBNISUBARLIT-UHFFFAOYSA-N sodium cyanide Chemical compound [Na+].N#[C-] MNWBNISUBARLIT-UHFFFAOYSA-N 0.000 description 1
- RCIVOBGSMSSVTR-UHFFFAOYSA-L stannous sulfate Chemical compound [SnH2+2].[O-]S([O-])(=O)=O RCIVOBGSMSSVTR-UHFFFAOYSA-L 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229910000375 tin(II) sulfate Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49579—Lead-frames or other flat leads characterised by the materials of the lead frames or layers thereon
- H01L23/49582—Metallic layers on lead frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4821—Flat leads, e.g. lead frames with or without insulating supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4821—Flat leads, e.g. lead frames with or without insulating supports
- H01L21/4828—Etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49503—Lead-frames or other flat leads characterised by the die pad
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49541—Geometry of the lead-frame
- H01L23/49548—Cross section geometry
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/50—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor for integrated circuit devices, e.g. power bus, number of leads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
Definitions
- the present invention relates to a lead frame and a method for manufacturing the same, and particularly to a lead frame having excellent adhesion to a resin.
- the semiconductor package mainly uses a metal lead frame and a sealing resin.
- the lead frame is often made of a copper alloy, and the sealing resin is mainly an epoxy resin.
- a copper plate or a copper alloy plate may be used as a component material called a heat spreader for heat dissipation of the semiconductor package, and the lead frame and the heat spreader are fixed with a sealing resin.
- connection terminal is exposed on the lower surface of the sealing resin, and the resin material is roughened when the lower surface of the metal material is roughened. Leakage may be induced, and the leaked resin has the dilemma that it becomes difficult to peel off due to roughening. For this reason, methods of partially roughening have been proposed in the past, but these methods have the problem of increasing costs.
- the copper material is roughened by heating the copper material at a high temperature, so that the copper oxidation of the roughened surface proceeds and the oxide film is easily peeled off, and the resin adhesion is lower than before the heating.
- sufficient reliability as a semiconductor package has not been obtained.
- Patent Document 1 Patent Document 1
- Patent Document 2 Patent Document 2
- Patent Document 3 Conventionally, the techniques shown in Patent Document 1, Patent Document 2, and Patent Document 3 have been disclosed as alternatives to these roughening treatments.
- Patent Document 1 as a method for improving the adhesion between a heat dissipation plate and a resin adhesive in a heat dissipation plate of an electronic component such as a semiconductor device, Ni or Ni in a solution containing 0.001% or more of an aminosilane compound is disclosed. It has been disclosed that an aminosilane compound film is formed on the outermost surface of a portion where a metal plate or strip with alloy plating is immersed and bonded to a resin with an adhesive.
- Patent Document 2 a nickel plating layer is formed using a copper plate as a substrate, and a silane coupling agent coating layer or a polyacrylic acid film is formed thereon to form a semiconductor heat dissipation plate. It is disclosed that a semiconductor element is sealed with a transfer mold resin to obtain a semiconductor heat sink having excellent adhesion to the adhesive resin.
- Patent Document 3 discloses a copper or copper alloy plate in which a silane compound film having a Si equivalent deposition amount of 0.5 mg / m 2 or more is formed on the outermost surface, and an oxide film having a thickness of 1000 to 2000 mm is formed on the lower layer.
- a strip material, an aqueous solution of a silane coupling agent at 40 ° C. to 60 ° C. is applied to the surface of a copper or copper alloy plate or strip to form a silane compound film on the surface, which is then heat-treated, It is disclosed that the copper or copper alloy plate or strip-shaped oxide film is formed with a thickness of 1000 to 2000 mm below the silane compound film to obtain a copper alloy plate or strip having excellent adhesion to the resin. Has been.
- Japanese Unexamined Patent Publication No. 2001-342580 Japanese Unexamined Patent Publication No. 2002-270740 Japanese Unexamined Patent Publication No. 2005-226096
- the surface of the copper material as the material with Sn or its alloy plating, or Zn or its alloy plating.
- the entire surface of the material is subjected to various alloy plating treatments including Sn, Zn, or a metal thereof, and then a desired lead frame is manufactured by performing etching after masking the plated surface with DFR.
- a desired lead frame is manufactured by performing etching after masking the plated surface with DFR.
- the material surface that is not melted by etching is plated with various alloys containing Sn, Zn or their metals, and the etched molten surface is made of various alloys containing Sn, Zn or their metals.
- An unplated lead frame is formed.
- the lead frame formed by etching or pressing is subjected to various alloy plating treatments including Sn, Zn or their metals, and the entire frame is subjected to various alloy plating treatments including Sn, Zn or their metals.
- the etching dissolution surface and the cut surface of the press are all subjected to various alloy plating treatments including Sn, Zn or their metals.
- the original material surface is plated with Sn, Zn, or various alloys containing these metals, so that the material surface needs to be glossy, such as LEDs for lighting applications.
- light diffusion occurs on the material surface by plating the surface of the material with various kinds of alloys including Sn, Zn, or a metal thereof, so that the required glossiness cannot be ensured.
- the resin adhesion of the lead frame is improved by various alloy plating treatments including Sn, Zn or their metals, but compared with the material surface of the lead frame which is not subjected to various alloy plating treatments including Sn, Zn or their metals.
- the wire bonding property is significantly reduced.
- the present invention for example, in the case of a lead frame for an LED application that requires gloss on the surface of the material, does not impair the surface gloss even if various alloy plating processes including Sn, Zn or their metals are performed. And it aims at providing the lead frame which can improve adhesiveness with resin, and its manufacturing method, without reducing wire bonding property.
- various alloy plating layers such as ZnNi, SnBi, SnCu or SnB containing Sn, Zn or their metals are formed only on the side surface and half-etched surface of the lead frame. It is characterized by.
- the thickness of the various alloy plating layers containing Sn, Zn or their metals is 0.02 to 2.0 ⁇ m.
- the noble metal plating layer is formed on the surface of the lead frame on which the semiconductor element or the LED element is mounted, and the metal plate is exposed on the other surface. To do.
- the noble metal plating layer is Ni (or Ni alloy) / Pd (or Pd alloy), Ni (or Ni alloy) / Pd (or Pd alloy) / Au (or Au alloy), Ni (or Ni alloy) / Pd (or Pd alloy) / Au (or Au alloy) / Ag (or Ag alloy), Ni (or Ni alloy) / Pd (or Pd alloy) / Ag (or Ag alloy) / Au (or Au alloy), Cu (Or Cu alloy) / Ag (or Ag alloy).
- the lead frame manufacturing method includes a step of forming a plating mask with a resist on a metal plate as a lead frame material, and a step of forming plating on a metal plate portion exposed from the plating mask. , A step of forming a mask for etching to cover the formed plated portion with a resist and obtaining a required lead frame shape, a step of performing a penetrating process and a half-etching process on a metal plate by an etching process, and an etching process And a step of applying various alloy platings containing Sn, Zn, or a metal thereof to the penetrating surface and the half-etched surface.
- Sn, Zn plating or various alloy plating containing Sn, Zn is preferably electroplating, but any other plating that can form a film such as chemical plating or vacuum deposition may be used.
- the plating thickness is suitably about 0.02 to 2.0 ⁇ m. This is because the effect is insufficient when the plating thickness is 0.02 ⁇ m or less, and conversely, when the thickness is 2.0 ⁇ m or more, the plating effect does not increase.
- the lead frame is formed by performing various plating treatments with Sn, Zn, or various alloys containing these metals, limited to only the etching dissolution surface (product side surface and half-etched portion).
- the adhesion between the resin and the resin can be further improved.
- a mask for various alloy platings containing Sn, Zn or their metals is required. Since the mask is used as it is as a mask for plating various alloys containing Sn, Zn or their metals, it is possible to continuously perform various alloy plating treatments containing Sn, Zn or their metals from the etching process using the same apparatus. Therefore, even in the case of a lead frame that is subjected to various alloy plating processes including Sn, Zn, or these metals partially, it can be produced at low cost.
- FIG. 1 is a diagram showing the steps of Example 1 of the lead frame manufacturing method according to the present invention, (1) is a diagram in which a resist layer is formed on a metal plate, (2) is a diagram in which a plating mask is formed, 3) is a diagram showing a plated layer, (4) is a diagram showing a plating mask removed, (5) is a diagram showing a resist layer formed on both sides of a metal plate on which plating is formed, and (6) is an etching mask. (7) is a diagram after etching, (8) is a diagram in which various etching processes using Sn, Zn or their metal are partially performed using an etching mask, and (9) is an etching mask. It is the figure which peeled.
- FIG. 2 is a table showing the evaluation results of the resin adhesion strength of the test pieces prepared in Examples and Comparative Examples.
- a photoresist is laminated on the front and back surfaces of the metal plate 1 to be a lead frame material, a photoresist layer 2 is provided, and a plating mask 3 on which a plating pattern is formed is placed thereon, and a photolithography step ( It is a process of drawing a plating pattern by transferring to a resist by exposure and development.
- a photoresist for example, a dry film resist
- a glass mask on which a plating pattern is formed is transferred to the resist in a photolithography process (exposure and development), and a plating pattern is obtained.
- the plating mask 3 formed on both surfaces of the metal plate 1 is peeled off with an aqueous sodium hydroxide solution (4), and then a photoresist is laminated on the metal plate 1 again (5) to form a lead frame pattern.
- the resulting glass mask is transferred to a resist by a photolithography process (6), and an excess metal portion is removed by etching using a ferric chloride solution to form a lead frame shape (7).
- Sn or Zn plating is performed by electrolytic plating (8). Thereby, Sn or Zn plating is performed with a thickness of 0.02 to 2.0 ⁇ m only on the etching melted surface (side surface of metal plate 1 and half-etched portion).
- the etching mask formed on both surfaces of the metal plate 1 is peeled off with a sodium hydroxide aqueous solution, whereby the lead frame (9) according to the present invention is formed.
- the material of the metal plate 1 is preferably a copper-based material, but is not limited thereto.
- a dry film resist (Asahi Kasei E-Materials Co., Ltd .: AQ-2058) was pasted on both sides to form a resist layer.
- a dry film resist (Asahi Kasei E-Materials Co., Ltd .: AQ-2058) was pasted on both sides to form a resist layer.
- exposure and development are performed to remove the resist in the portion where the plating is to be formed.
- a plating mask with the metal plate surface exposed was formed.
- plating was performed to form a plating on the exposed portion of the metal plate surface.
- three layers of plating were formed by performing Ni plating with a set value of 1.0 ⁇ m, Pd plating with a set value of 0.02 ⁇ m, and Au plating with a set value of 0.007 ⁇ m in order from the metal plate side.
- the plating mask formed on both surfaces of the metal plate was peeled off with a 3% aqueous sodium hydroxide solution, and further washed with 3% sulfuric acid.
- a dry film resist (Asahi Kasei E-Materials Co., Ltd .: AQ-44096) is pasted on both surfaces of the metal plate on which the plating is formed to form a resist layer, and a glass mask in which the shape of the lead frame is formed is used. Both surfaces were exposed and developed to form an etching mask.
- Zn plating treatment was performed by an electrolytic plating method.
- This electric Zn plating bath is composed of NaOH 5 g / l, NaCN 35 g / l, and Zn (CN) 230 g / l, and is electroplated with a current density of 3 A / dm 2 to form a Zn plating with a film thickness of 1 ⁇ m. A layer was obtained.
- the residue of the Zn plating solution adhering to the Zn plating surface was removed by washing with hydrochloric acid by spraying, and then the etching mask was peeled off using an aqueous sodium hydroxide solution. Thereafter, acid treatment with sulfuric acid was performed to dry the surface, and the lead frame of Example 1 in which the product side surface and the etching-dissolved surface were partially plated with Zn was obtained.
- a lead frame of Example 2 was obtained in the same manner as in Example 1 except that the thickness of the electro-Zn plating was changed to 0.2 ⁇ m.
- Example 3 A lead frame of Example 3 was obtained in the same manner as in Example 1 except that Sn plating was applied instead of Zn.
- This electric Sn plating bath is composed of stannous sulfate 55 g / l, sulfuric acid 100 g / l, cresol sulfonic acid 60 g / l, gelatin 2 g / l, and ⁇ -naphthol 1 g / l, and the current density is 2 A / dm 2.
- the Sn plating layer having a film thickness of 1 ⁇ m was obtained by electroplating with the electrode.
- Example 4 The lead frame of Example 4 was formed in the same manner as in Example 1 except that Zn plating was applied to Jinny ST AF210 zinc-nickel alloy (Ni eutectoid rate of 12-15 wt%) manufactured by Atotech. Obtained.
- This ginny ST AF210 zinc-nickel alloy plating was carried out in a basic solution of 213 g / l potassium chloride, 42 g / l zinc chloride and 121 g / l nickel chloride hexahydrate, 10 ml / l ginny ACAF211 as an additive, and ginny ACAF212.
- Example 5 A lead frame of Example 5 was obtained in the same manner as in Example 1 except that NiP plating was applied instead of Ni.
- This electric NiP plating bath is composed of nickel sulfate 250 g / l, nickel chloride 50 g / l, boric acid 50 g / l, and Novoplate HS (Atotech Japan K.K.) 30 ml / l, with a current density of 2 A / dm. Then , electroplating with Sn was performed to obtain a 1 ⁇ m thick NiP plating layer.
- a lead frame of Comparative Example 1 was obtained in the same manner as in Example 1 except that Zn plating was not applied after etching.
- a lead frame of Comparative Example 2 was obtained in the same manner as in Example 1 except that copper roughening treatment was performed instead of Zn plating after etching.
- the copper roughening treatment was performed by spraying a roughening treatment liquid (MEC Co., Ltd .: CZ8100).
- This roughening treatment liquid was prepared at a liquid temperature of 35 ° C., a specific gravity of 1.145, and a copper concentration of 35 g / L, and the roughening treatment was performed by spraying.
- the surface roughness of the roughened surface was SRa 0.2 to 0.4.
- a lead frame of Comparative Example 3 was obtained in the same manner as in Example 1 except that Ag plating was applied instead of Zn plating.
- the Ag plating bath is composed of KCN 40 g / l, AgCN 35 g / l, K 2 CO 3 22 g / l, and electroplated with a current density of 3 A / dm 2 to obtain an Ag plating layer having a thickness of 0.2 ⁇ m. .
- the resin adhesion strength was evaluated by the following method. That is, four resins each having a diameter of 2 mm were formed on a metal base material under the conditions of a mold injection pressure of 100 kg / cm 2 and a mold temperature of 175 ° C. ⁇ 90 seconds, and were placed in an oven at 175 ° C. for 8 Curing treatment was performed over time to form four evaluation resin samples. Each of these evaluation resin samples was pushed from the side to measure the load when the resin was peeled off, and this value was divided by the adhesion area of the resin and converted into a load per unit area. The average of the four loads thus obtained was taken as the resin adhesion strength.
- the resin adhesion strength is 23 MPa in the lead frame of Example 1.
- the lead frame of Example 2 is 23 MPa
- the lead frame of Example 3 is 19 MPa
- the lead frame of Example 4 is 19 MPa
- the lead frame of Example 5 is 19 MPa
- Comparative Example 1 The lead frame was 10 MPa
- the lead frame of Comparative Example 2 was 13 MPa
- the lead frame of Comparative Example 3 was 12 MPa.
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Abstract
Description
その場合、まず材料表面全体を、Sn,Zn又はそれら金属を含む各種の合金めっき処理をし、その後、めっき面をDFRによってマスキングした後に、エッチングを行うことにより所望のリードフレームを製造する。そして、結果的に、エッチング溶解されない材料面は、Sn,Zn又はそれらの金属を含む各種合金のめっき処理がなされ、エッチングされた溶解面については、Sn,Zn又はそれらの金属を含む各種合金のめっき処理されていないリードフレームが成形される。
最初の工程は、リードフレーム素材となるべき金属板1の表裏面にフォトレジストをラミネートしてフォトレジスト層2を設け、その上にめっきパターンの形成されためっきマスク3を被せ、フォトリソグラフィ工程(露光及び現像)でレジストに転写し、めっきパターンを描画する工程である。
その工程は、金属板1上にフォトレジスト(例えば、ドライフィルムレジスト)をラミネートし(1)、めっきパターンの形成されたガラスマスクをフォトリソグラフィ工程(露光及び現像)でレジストに転写し、めっきパターンを金属板1上に描画し(2)、次に、電解めっき法によってNi/Pd/AuあるいはAgめっき4を施し、Ni/Pd/AuあるいはAg被膜を形成する(3)。
これら試験片の樹脂密着性を判断するために、下記の方法により樹脂密着強度を評価した。即ち、金属製基材の上に、金型注入圧力100kg/cm2、金型温度175℃×90秒の条件で直径2mmの大きさの樹脂を4つ形成し、175℃のオーブン中で8時間に亘って硬化処理して、4点の評価用樹脂見本を形成した。これら評価用樹脂見本をそれぞれ真横から押して樹脂が剥離したときの荷重を測定し、この値を樹脂の接着面積で割って単位面積あたりの荷重に換算した。このようにして得られた4点の荷重の平均をとって樹脂密着強度とした。
一方、ZnNiめっきやNiPめっきを行った場合にも、SnまたはZnめっきと同等レベルの高い密着強度が得られることがわかった。
符号の説明
2・・・レジスト層
3・・・めっきマスク
4・・・めっき
5・・・エッチングマスク
6・・・SnまたはZnめっき処理面
Claims (6)
- 金属板より形成されていて、側面及びハーフエッチング面にのみ、Sn,Zn又はそれらの金属を含むZnNi,SnBi,SnCu又はSnBの如き各種合金めっきが形成されていることを特徴とするリードフレーム。
- 前記各種合金めっきの厚さが、0.02~2.0μmであることを特徴とする請求項1に記載のリードフレーム。
- 半導体素子又はLED素子が搭載される面となるリードフレームの表面には、貴金属めっき層が形成されていることを特徴とする請求項1に記載のリードフレーム。
- 前記貴金属めっき層は、Ni(又はNi合金)/Pd(又はPd合金)、Ni(又はNi合金)/Pd(又はPd合金)/Au(又はAu合金)、Ni(又はNi合金)/Pd(又はPd合金)/Au(又はAu合金)/Ag(又はAg合金)、Ni(又はNi合金)/Pd(又はPd合金)/Ag(又はAg合金)/Au(又はAu合金)、Cu(又はCu合金)/Ag(又はAg合金)の順に積層されていることを特徴とする請求項3に記載のリードフレーム。
- 前記貴金属めっき層を形成したリードフレームの表面以外の表面には、金属板が露出していることを特徴とする請求項3に記載のリードフレーム。
- リードフレーム材料の金属板にレジストによるめっき用マスクを形成する工程と、
前記めっき用マスクから露出している前記金属板にめっきを形成する工程と、
レジストにより、形成された前記めっき部分を覆い、要求されるリードフレーム形状を得るためのエッチング用マスクを形成する工程と、
エッチングにより金属板に貫通加工およびハーフエッチング加工を施す工程と、
エッチング加工をした貫通面およびハーフエッチング面にSn,Znめっき又はそれら金属を含む各種合金めっきを施す工程と、
を有することを特徴とするリードフレームの製造方法。
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JP2017168689A (ja) * | 2016-03-16 | 2017-09-21 | Shマテリアル株式会社 | Ledパッケージ並びに多列型led用リードフレーム及びその製造方法 |
JP2017168691A (ja) * | 2016-03-16 | 2017-09-21 | Shマテリアル株式会社 | Ledパッケージ並びに多列型led用リードフレーム及びその製造方法 |
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