WO2014186924A1

WO2014186924A1 - Box heater suitable for roll-to-roll continuous strip preparation process

Info

Publication number: WO2014186924A1
Application number: PCT/CN2013/001058
Authority: WO
Inventors: 李贻杰
Original assignee: 上海超导科技股份有限公司
Priority date: 2013-05-20
Filing date: 2013-09-12
Publication date: 2014-11-27
Also published as: CN103276366A; CN103276366B

Abstract

A box heater suitable for roll-to-roll continuous strip preparation process, comprising: a multi-channel roll shaft, an inner heating mantle arranged inside the multi-channel roll shaft and an outer heating mantle arranged outside the multi-channel roll shaft. Thermocouple groups are arranged on the inner and outer heating mantle respectively, an internal heating infrared quartz tube is arranged on the inner heating mantle, and an external heating infrared quartz tube is arranged on the outer heating mantle.

Description

适合于卷对卷连续化带材制备工艺的箱式加热器技术领域 Box heater suitable for roll-to-roll continuous strip preparation process

本发明涉及一种箱式加热器，特别是涉及一种适合工业化生产镀膜用的箱式加热器，可广泛应用于高温超导带材、半导体薄膜、光电涂层材料以及其它功能薄膜涂层材料和器件技术领域。属于薄膜涂层材料制备技术中的加热设备，尤其涉及一种第二代高温超导带材制备中的箱式加热器。背景技术 The invention relates to a box heater, in particular to a box heater suitable for industrial production coating, which can be widely applied to high temperature superconducting tape, semiconductor film, photoelectric coating material and other functional film coating materials. And device technology areas. The invention relates to a heating device in the preparation technology of a thin film coating material, in particular to a box heater in the preparation of a second generation high temperature superconducting tape. Background technique

真空薄膜制备技术是当今世界上最重要的技术之一，是指在真空环境中利用物理或化学的方法在工件表面沉积一层具有特殊用途膜层的表面处理方法。它被广泛应用于工业，军工医药，航天，科研等各个领域。到目前为止人们已经发展了几十种薄膜制备技术，例如直流磁控溅射法、脉冲激光法、共蒸发法等等。诸多的制膜方法都需要合适的加热器，为保证工件表面的膜层性能，真空镀膜过程中一般需将工件加热到一定温度，并且温度偏差范围具有严格的要求，因此加热器是制备薄膜涂层材料设备中的关键部分。它关系到薄膜涂层材料的微观结构，进而决定了涂层材料的性能指标。 Vacuum film preparation technology is one of the most important technologies in the world today. It refers to the surface treatment method of depositing a special-purpose film on the surface of a workpiece by physical or chemical methods in a vacuum environment. It is widely used in various fields such as industry, military medicine, aerospace, and scientific research. So far, dozens of thin film preparation techniques have been developed, such as DC magnetron sputtering, pulsed laser, co-evaporation, and the like. Many film forming methods require a suitable heater. In order to ensure the film performance on the surface of the workpiece, the vacuum coating process generally needs to heat the workpiece to a certain temperature, and the temperature deviation range has strict requirements, so the heater is prepared by film coating. A key part of the layer material equipment. It relates to the microstructure of the film coating material, which in turn determines the performance of the coating material.

目前，静态真空镀膜工艺中常用的工件加热方法是辐射加热和感应加热。红外辐射加热是通过对电阻比较高的金属发热体，通以大电流，使发热体产生较大的热量，其温度达到 1500~2000°C，高温的发热体主要以红外波段热辐射的方式向石墨基座或加热器耐高温基板传递热量。采用电阻加热主要的优点包括结构简单、发热原理简单、温度控制方便等，而且作为传统的加热方式，其技术是十分成熟的。缺点主要有成本高，维护相对困难，且升降温速度相对较慢。真空镀膜过程中一般需旋转工件来提高镀膜的均勾性，而使用该方法加热工件时，工件与热敏电阻固定而无法移动，因而镀膜均匀性不佳。 At present, the heating methods of workpieces commonly used in static vacuum coating processes are radiant heating and induction heating. The infrared radiation heating is through a metal heating element with relatively high resistance, and a large current is applied to generate a large amount of heat in the heating element. The temperature of the heating element reaches 1500~2000 °C, and the high temperature heating element mainly radiates in the infrared band. The graphite base or heater heat-resistant substrate transfers heat. The main advantages of using resistance heating include simple structure, simple heating principle, convenient temperature control, etc., and as a traditional heating method, the technology is very mature. The shortcomings are mainly high in cost, relatively difficult to maintain, and relatively slow in temperature rise and fall. In the vacuum coating process, the workpiece is generally rotated to improve the uniformity of the coating. When the workpiece is heated by the method, the workpiece and the thermistor are fixed and cannot move, so the uniformity of the coating is not good.

感应加热已经在工业界使用接近 80年，高频感应加热器是利用电磁感应原理把电能转化为热能的设备。高频感应加热通过对线圈通以高频变化的电确认本流，线圈内产生极性瞬间变化的强磁束，将金属等被加热物质放置在线圈内，磁束就会贯通整个被加热物质，在被加热物质内部与加热电流相反的方向产生很大的涡电流，由于被加热物质内的电阻产生焦耳热，使物质自身的温度迅速上升。它与传统的加热设备相比具有诸多优点：加热温度高，而且是非接触式加热，这对结构复杂的腔体而言是十分优越的；加热效率高，节能；加热速度快，被加热物的表面氧化少；容易实现自动控制；作业环境好；干净无污染。缺点是有趋肤效应，而且高频磁场会对周围的设备产生影响。 Induction heating has been used in industry for nearly 80 years. High-frequency induction heaters are devices that use the principle of electromagnetic induction to convert electrical energy into heat. High-frequency induction heating is confirmed by a high-frequency change of the coil. In the flow, a strong magnetic flux whose polarity changes instantaneously is generated in the coil, and a heated substance such as a metal is placed in the coil, and the magnetic flux penetrates the entire heated substance, and a large eddy current is generated in a direction opposite to the heating current inside the heated substance. The Joule heat is generated by the electric resistance in the material to be heated, so that the temperature of the substance itself rises rapidly. Compared with traditional heating equipment, it has many advantages: high heating temperature and non-contact heating, which is superior to complex structures; high heating efficiency, energy saving; fast heating, heated object Less surface oxidation; easy to achieve automatic control; good working environment; clean and pollution-free. The disadvantage is that there is a skin effect, and the high frequency magnetic field will affect the surrounding equipment.

连续化动态镀膜工艺中对加热器具有更高的要求。如图 1所示，现有的连续化镀膜设备中采用接触型平板式加热器，镀膜工艺中往往需要在一定的氧气氛中进行，所以加热电阻丝由于氧化问题，使用寿命较短。目前。普遍使用密闭的红外石英加热灯管 3作为加热源。红外石英加热灯管 3位于加热板 1背面，以热辐射的方式将加热板 1加热到一定温度。金属基带 2以多信道的方式紧密接触加热板 1下表面。当金属基带 2通过加热板 1时，加热板 1以接触型热传导和热辐射两种方式将热量传递为金属基带 2，并使金属基带 2达到镀膜所需的基底温度。使用该类敞开式平板加热装置加热样品时，因加热装置中红外石英加热灯管辐射的红外线只有一部分传递给加热板，其他另一部分红外线被浪费，所以红外石英加热灯管本身的加热效率不高。就加热效率而言，由于加热板采用敞开式设计，所以加热板本身的热辐射又会损失大部分热量。最终通过加热板传递给金属基带的热量只占加热器总消耗功率的一小部分。此外，由于金属基带背面与正面所处的温度差别很大，也会造成金属基带内部沿厚度方向具有较大的温度梯度，较难控制温度均匀性。发明的公开 The continuous dynamic coating process has higher requirements for the heater. As shown in Fig. 1, the contact type flat-plate heater is used in the conventional continuous coating equipment, and the coating process is often carried out in a certain oxygen atmosphere, so that the heating resistance wire has a short service life due to oxidation problems. Currently. A closed infrared quartz heating lamp 3 is generally used as a heating source. The infrared quartz heating lamp 3 is located on the back of the heating plate 1 to heat the heating plate 1 to a certain temperature by means of heat radiation. The metal base tape 2 is in close contact with the lower surface of the heating plate 1 in a multi-channel manner. When the metal base tape 2 passes through the heating plate 1, the heating plate 1 transfers heat into the metal base tape 2 in both contact type heat conduction and heat radiation, and causes the metal base tape 2 to reach the substrate temperature required for coating. When the sample is heated by using such an open type flat heating device, only a part of the infrared rays radiated by the infrared quartz heating lamp in the heating device is transmitted to the heating plate, and the other part of the infrared rays is wasted, so the heating efficiency of the infrared quartz heating lamp itself is not high. . In terms of heating efficiency, since the heating plate has an open design, the heat radiation of the heating plate itself loses most of the heat. The heat that is ultimately transferred to the metal baseband through the heater plate is only a fraction of the total power consumed by the heater. In addition, since the temperature difference between the back side and the front side of the metal base tape is large, the inside of the metal base tape has a large temperature gradient in the thickness direction, and it is difficult to control the temperature uniformity. Disclosure of invention

本发明提供的一种适合于卷对卷连续化带材制备工艺的箱式加热器，可为快速制备性能优良均勾性好的薄膜涂层材料提供保证，特别是高质量的第二代高温超导带材，同时在真空、氧气氛下、高温中，加热器自身材料的性能稳定，没有挥发物污染真空室，提高了加热效率和可靠性。 The invention provides a box heater suitable for the roll-to-roll continuous strip preparation process, which can ensure the rapid preparation of the film coating material with good performance and good hookability, especially the high quality second generation high temperature. Superconducting tape, at the same time in vacuum, oxygen atmosphere, high temperature, the performance of the material of the heater itself is stable, no volatiles pollute the vacuum chamber, improving heating efficiency and reliability.

为了达到上述目的，本发明提供一种适合于卷对卷连续化带材制备工艺的箱式加热器，该箱式加热器包含多通道辊轴，设置在多通道辊轴内侧的内加热罩，设置在多通道辊轴外侧的外加热罩。所述的箱式加热器还包含若干热电偶组，该热电偶组分别设置在内加热罩和外加热罩上。 In order to achieve the above object, the present invention provides a box heater suitable for a roll-to-roll continuous strip preparation process, the box heater comprising a multi-channel roller shaft, an inner heating cover disposed inside the multi-channel roller shaft, An outer heating cover that is placed outside the multi-channel roller shaft. The box heater further includes a plurality of thermocouple sets, the thermocouple sets being respectively disposed on the inner heating cover and the outer heating cover.

所述的箱式加热器还包含若干内加热红外线石英灯管和外加热红外线石英灯管，该内加热红外线石英灯管设置在内加热罩上，该外加热红外线石英灯管设置在外加热罩上。 The box heater further comprises a plurality of inner heating infrared quartz lamp tubes and an outer heating infrared quartz lamp tube, wherein the inner heating infrared quartz lamp tube is disposed on the inner heating cover, and the outer heating infrared quartz lamp tube is disposed on the outer heating cover .

所述的多通道辊轴为圆筒状，该多通道辊轴上多次卷绕样品。 The multi-channel roller shaft is cylindrical, and the sample is wound on the multi-channel roller shaft a plurality of times.

所述的内加热罩为圆筒状。 The inner heating cover is cylindrical.

所述的外加热罩为圆筒状，该外加热罩的下部具有开口。 The outer heating cover has a cylindrical shape, and the lower portion of the outer heating cover has an opening.

所述的多通道辊轴、内加热罩和外加热罩的材料是耐高温合金。 The material of the multi-channel roller shaft, the inner heating cover and the outer heating cover is a high temperature resistant alloy.

所述的外加热罩的外侧采用绝热材料包裹。 The outer side of the outer heating cover is wrapped with a heat insulating material.

所述内加热罩、外加热罩和多通道辊轴的直径以及外加热罩下部开口的尺寸与镀膜区的大小相适配。 The diameters of the inner heating shroud, the outer heating shroud and the multi-channel roller shaft and the lower opening of the outer heating shroud are adapted to the size of the coating zone.

本发明与现有技术相比，具有以下优点和技术效果： Compared with the prior art, the invention has the following advantages and technical effects:

1、由于采用了半封闭式加热方式，大大提高了加热效率。 1. Due to the semi-closed heating method, the heating efficiency is greatly improved.

2、与敞开式平板加热器相比，箱式加热器内部具有更好的温度均匀性。 2. The interior of the box heater has better temperature uniformity than the open type flat heater.

3、与敞开式平板加热器相比，由于不存在边界效应，所以恒温区面积大，加上多通道工艺，大大提高了有效镀膜区面积，从而提高了镀膜速率，适合于工业化镀膜要求； 3. Compared with the open flat panel heater, since there is no boundary effect, the large temperature area is large, and the multi-channel process greatly increases the effective coating area, thereby increasing the coating rate and is suitable for industrial coating requirements;

4、由于内、外加热罩可以同时加热金属基带样品的正、反面，所以大大降低了红外线加热石英灯管载荷，增加了红外线加热石英灯管的使用寿命。 4. Since the inner and outer heating covers can simultaneously heat the front and back sides of the metal base tape sample, the infrared heating quartz lamp tube load is greatly reduced, and the service life of the infrared heating quartz lamp tube is increased.

5、温度可调并且选择范围宽，将敞开式平板加热器的金属带材最大加热温度由 750-800°C提高到了 900°C。控温精度由 10°C提高到了 5° ( 。 5. The temperature is adjustable and the selection range is wide. The maximum heating temperature of the metal strip of the open flat heater is increased from 750-800 °C to 900 °C. The temperature control accuracy has been increased from 10 ° C to 5 ° ( .

6、使用该加热器，方便确定薄膜工艺参数，并且具备更好的可重复性，使用寿命长。 6. The heater is used to determine the process parameters of the film, and has better repeatability and long service life.

7、设计更为紧凑，体积小，在同等产能的条件下，可相应减小镀膜真空设备腔体的体积，从而节省了镀膜设备的总体造价，使产品更具成本优势。附图的简要说明 7. The design is more compact and small in size. Under the same production capacity, the volume of the vacuum chamber of the coating can be reduced accordingly, thereby saving the overall cost of the coating equipment and making the product more cost-effective. BRIEF DESCRIPTION OF THE DRAWINGS

图 1是背景技术中的加热装置的示意图; Figure 1 is a schematic view of a heating device in the background art;

图 2是本发明的立体图；图 3是本发明的主视图； Figure 2 is a perspective view of the present invention; Figure 3 is a front elevational view of the present invention;

图 4是本发明中多通道辊轴的立体图。实现本发明的最佳方式 Figure 4 is a perspective view of a multi-channel roller shaft in the present invention. The best way to implement the invention

以下根据图 2〜图 4，具体说明本发明的较佳实施例。 DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be specifically described with reference to Figs. 2 to 4 .

如图 2所示，本发明提供一种适合于卷对卷连续化带材制备工艺的箱式加热器，该箱式加热器包含多通道辊轴 1，设置在多通道辊轴 1内侧的内加热罩 2，设置在多通道辊轴 1外侧的外加热罩 3。 As shown in FIG. 2, the present invention provides a box heater suitable for a roll-to-roll continuous strip preparation process, the box heater comprising a multi-channel roller shaft 1 disposed inside the multi-channel roller shaft 1 The heating cover 2 is provided with an outer heating cover 3 outside the multi-channel roller shaft 1.

如图 4所示，所述的多通道辊轴 1为圆筒状，该多通道辊轴 1上多次卷绕样品。 As shown in Fig. 4, the multi-channel roller shaft 1 is cylindrical, and the multi-channel roller shaft 1 is wound around the sample a plurality of times.

如图 2和图 3所示，所述的内加热罩 2为圆筒状。 As shown in Figs. 2 and 3, the inner heating cover 2 has a cylindrical shape.

如图 2和图 3所示，所述的外加热罩 3为圆筒状，该外加热罩 3的下部具有开口 31。 As shown in Figs. 2 and 3, the outer heating cover 3 has a cylindrical shape, and the lower portion of the outer heating cover 3 has an opening 31.

如图 2和图 3所示，所述的箱式加热器还包含若干热电偶组 4，该热电偶组 4分别设置在内加热罩 2和外加热罩 3上，该热电偶组 4控制内加热罩 2和外加热罩 3的温度。 As shown in FIG. 2 and FIG. 3, the box heater further includes a plurality of thermocouple groups 4, which are respectively disposed on the inner heating cover 2 and the outer heating cover 3, and the thermocouple group 4 is controlled inside. The temperature of the heating cover 2 and the outer heating cover 3 are heated.

如图 2和图 3所示，所述的箱式加热器还包含若干内加热红外线石英灯管 5和外加热红外线石英灯管 6，该内加热红外线石英灯管 5设置在内加热罩 2上，该外加热红外线石英灯管 6设置在外加热罩 3上。 As shown in FIG. 2 and FIG. 3, the box heater further comprises a plurality of internally heated infrared quartz lamps 5 and an externally heated infrared quartz tube 6, and the inner heating infrared quartz tubes 5 are disposed on the inner heating cover 2. The externally heated infrared quartz lamp tube 6 is disposed on the outer heating cover 3.

所述的多通道辊轴 1的材料是 I N C 0 N E L等耐高温合金。 The material of the multi-channel roller shaft 1 is a high temperature resistant alloy such as I N C 0 N E L .

所述的内加热罩 2和外加热罩 3采用耐高温合金材料制作，例如，哈氏合金（Hastelloy) 、铬镍铁合金（Inconel) 等。 The inner heating cover 2 and the outer heating cover 3 are made of a high temperature resistant alloy material, for example, Hastelloy, Inconel, and the like.

所述的外加热罩 3的外侧采用绝热材料包裹，例如，氧化铝陶瓷等耐高温绝热材料，以减少热损耗。 The outer side of the outer heating cover 3 is wrapped with a heat insulating material, for example, a high temperature insulating material such as alumina ceramic to reduce heat loss.

所述内加热罩 2、外加热罩 3和多通道辊轴 1的直径以及外加热罩 3下部开口 31的尺寸与镀膜区的大小相适配。加热器尺寸与镀膜设备真空腔体大小相关。一般情况下，若多通道辊轴 1的长度为 1米，直径为 20厘米，镀膜恒温区长度，即外加热罩下部开口 31尺寸为： 50厘米长， 10厘米宽。 The inner heating cover 2, the outer heating cover 3 and the diameter of the multi-channel roller shaft 1 and the size of the lower opening 31 of the outer heating cover 3 are adapted to the size of the coating zone. The size of the heater is related to the size of the vacuum chamber of the coating equipment. In general, if the multi-channel roller shaft 1 has a length of 1 m and a diameter of 20 cm, the length of the coating constant temperature zone, that is, the lower opening 31 of the outer heating cover, is 50 cm long and 10 cm wide.

所述多通道辊轴 1上多次卷绕样品，转动样品，使样品以设定的速度行走，经过外加热罩下部开口暴露出的镀膜区，这样不但可以增加镀膜速率，而且可以保证薄膜的均匀性，内加热红外线石英灯管 5将电能转化为热能，一部分热能直接传给多通道辊轴 1上的样品背面，一部分热能经过内加热罩 2的反射再传给多通道辊轴 1上的样品的背面，外加热红外线石英灯管 6同样将电能转化成热能，一部分热能直接传给多通道辊轴 1上的样品的正面，一部分热能经过外加热罩 3的反射再传给样品的正面。多通道辊轴两端固定在耐高温轴承支架上。实施例一 The multi-channel roller shaft 1 winds the sample a plurality of times, rotates the sample, and causes the sample to travel at a set speed, and passes through the exposed coating area of the lower opening of the outer heating cover, so that not only the coating rate can be increased, but also The uniformity of the film can be ensured, and the infrared quartz lamp tube 5 is internally heated to convert the electric energy into heat energy, and a part of the heat energy is directly transmitted to the back surface of the sample on the multi-channel roller shaft 1, and a part of the heat energy is transmitted to the multi-channel roller through the reflection of the inner heating cover 2 On the back side of the sample on the shaft 1, the externally heated infrared quartz tube 6 also converts electrical energy into heat energy, and a part of the heat energy is directly transmitted to the front surface of the sample on the multi-channel roller shaft 1, and a part of the heat energy is transmitted to the outer heating cover 3 for reflection. The front side of the sample. The multi-channel roller shaft is fixed at both ends to the high temperature bearing bracket. Embodiment 1

一种适合于卷对卷连续化带材制备工艺的箱式加热器，该箱式加热器包含多通道辊轴 1，设置在多通道辊轴 1内侧的内加热罩 2，设置在多通道辊轴 1 外侧的外加热罩 3。分别在内加热罩 2和外加热罩 3上设置热电偶组 4。在内加热罩 2上设置内加热红外线石英灯管 5，在外加热罩 3上设置外加热红外线石英灯管 6。 A box heater suitable for a roll-to-roll continuous strip preparation process, the box heater comprising a multi-channel roller shaft 1, an inner heating cover 2 disposed inside the multi-channel roller shaft 1, and disposed on the multi-channel roller The outer heating cover 3 on the outside of the shaft 1. A thermocouple group 4 is provided on the inner heating cover 2 and the outer heating cover 3, respectively. An inner heating infrared quartz lamp 5 is disposed on the inner heating cover 2, and an outer heating infrared quartz lamp 6 is disposed on the outer heating cover 3.

将该箱式加热器放置在连续脉冲激光沉积设备中，多道缠绕好样品，设定样品的温度为 800°C，开启加热装置和激光器，并与背景技术中的加热装置进行了对比，等温度到达设定值后，开始镀同样厚度的高温超导薄膜。 The box heater was placed in a continuous pulse laser deposition apparatus, the sample was wound in multiple passes, the temperature of the sample was set to 800 ° C, the heating device and the laser were turned on, and compared with the heating device in the background art, etc. After the temperature reaches the set value, the high-temperature superconducting film of the same thickness is started to be plated.

实验表明：传统的加热装置中红外线石英加热灯管需要 90%以上的加热负荷功率才能达到设定温度，而本发明的加热装置只需要 40-50%的加热功率即可达到设定温度，并且恒温区加大，镀膜速度提高 3倍。实施例二 Experiments show that: In the traditional heating device, the infrared quartz heating lamp requires more than 90% of the heating load power to reach the set temperature, and the heating device of the present invention only needs 40-50% of the heating power to reach the set temperature, and The constant temperature zone is increased and the coating speed is increased by 3 times. Embodiment 2

将该箱式加热器放置在连续磁控溅射设备中，多道缠绕好样品，设定样品的温度为 750°C，开启加热装置和溅射电源，并与背景技术中的加热装置进行了对比，等温度到达设定值后，开始镀同样厚度的氧化铝薄膜。 The box heater was placed in a continuous magnetron sputtering apparatus, the sample was wound in multiple passes, the temperature of the sample was set to 750 ° C, the heating device and the sputtering power source were turned on, and the heating device in the background art was carried out. In contrast, after the temperature reaches the set value, the aluminum oxide film of the same thickness is started to be plated.

实验表明：传统的加热装置中红外线石英加热灯管需要 70%以上的加热功率才能达到设定温度，而本发明的加热装置只需要 30%的加热功率即可达到设定温度，因而大大提高了热能的利用率，并且增加了石英灯管的使用寿 Experiments show that: Infrared quartz heating lamps in traditional heating devices require more than 70% heating. The power can reach the set temperature, and the heating device of the invention only needs 30% of the heating power to reach the set temperature, thereby greatly improving the utilization of thermal energy and increasing the service life of the quartz lamp.

尽管本发明的内容已经通过上述优选实施例作了详细介绍，但应当认识到上述的描述不应被认为是对本发明的限制。在本领域技术人员阅读了上述内容后，对于本发明的多种修改和替代都将是显而易见的。因此，本发明的保护范围应由所附的权利要求来限定。 Although the present invention has been described in detail by the preferred embodiments thereof, it should be understood that the foregoing description should not be construed as limiting. Various modifications and alterations of the present invention will be apparent to those skilled in the art. Therefore, the scope of the invention should be limited by the appended claims.

Claims

权利要求 Rights request

1. 一种适合于卷对卷连续化带材制备工艺的箱式加热器，其特征在于，该箱式加热器包含多通道辊轴（1)，设置在多通道辊轴（1) 内侧的内加热罩A box heater suitable for a roll-to-roll continuous strip preparation process, characterized in that the box heater comprises a multi-channel roller shaft (1) disposed inside the multi-channel roller shaft (1) Inner heating cover

(2) ，设置在多通道辊轴（1) 外侧的外加热罩（3) 。 (2) Set the outer heating cover (3) on the outside of the multi-channel roller shaft (1).

2. 如权利要求 1所述的适合于卷对卷连续化带材制备工艺的箱式加热器，其特征在于，所述的箱式加热器还包含若干热电偶组（4)，该热电偶组（4) 分别设置在内加热罩（2) 和外加热罩（3) 上。 2. The box heater suitable for a roll-to-roll continuous strip preparation process according to claim 1, wherein the box heater further comprises a plurality of thermocouple sets (4), the thermocouple Group (4) is placed on the inner heating hood (2) and the outer heating hood (3).

3. 如权利要求 2所述的适合于卷对卷连续化带材制备工艺的箱式加热器，其特征在于，所述的箱式加热器还包含若干内加热红外线石英灯管（5) 和外加热红外线石英灯管（6)，该内加热红外线石英灯管（5)设置在内加热罩（2) 上，该外加热红外线石英灯管（6) 设置在外加热罩（3) 上。 3. The box heater suitable for a roll-to-roll continuous strip preparation process according to claim 2, wherein said box heater further comprises a plurality of internally heated infrared quartz lamps (5) and The infrared quartz lamp tube (6) is externally heated, and the inner heating infrared quartz lamp tube (5) is disposed on the inner heating cover (2), and the outer heating infrared quartz lamp tube (6) is disposed on the outer heating cover (3).

4. 如权利要求 1所述的适合于卷对卷连续化带材制备工艺的箱式加热器，其特征在于，所述的多通道辊轴（1)为圆筒状，该多通道辊轴（1)上多次卷绕样品。 4. The box heater suitable for a roll-to-roll continuous strip preparation process according to claim 1, wherein said multi-channel roller shaft (1) is cylindrical, and said multi-channel roller shaft (1) The sample is wound up many times.

5. 如权利要求 1所述的适合于卷对卷连续化带材制备工艺的箱式加热器，其特征在于，所述的内加热罩（2) 为圆筒状。 A box heater suitable for a roll-to-roll continuous tape preparation process according to claim 1, wherein said inner heating cover (2) has a cylindrical shape.

6. 如权利要求 1所述的适合于卷对卷连续化带材制备工艺的箱式加热器，其特征在于，所述的外加热罩（3)为圆筒状，该外加热罩（3)的下部具有开口（31) 。 6. The box heater suitable for the roll-to-roll continuous strip preparation process according to claim 1, wherein the outer heating cover (3) is cylindrical, and the outer heating cover (3) The lower part has an opening (31).

7. 如权利要求 1所述的适合于卷对卷连续化带材制备工艺的箱式加热器，其特征在于，所述的多通道辊轴（1) 、内加热罩（2) 和外加热罩（3) 的材料是耐高温合金。 7. The box heater suitable for a roll-to-roll continuous strip preparation process according to claim 1, wherein said multi-channel roll (1), inner heating cover (2) and external heating The material of the cover (3) is a high temperature resistant alloy.

8. 如权利要求 1所述的适合于卷对卷连续化带材制备工艺的箱式加热器，其特征在于，所述的外加热罩（3) 的外侧采用绝热材料包裹。 8. The box heater suitable for the roll-to-roll continuous strip preparation process according to claim 1, wherein the outer side of the outer heating cover (3) is wrapped with a heat insulating material.

9. 如权利要求 1-8 中任意一个所述的适合于卷对卷连续化带材制备工艺的箱式加热器，其特征在于，所述内加热罩（2) 、外加热罩（3)和多通道辊轴（1)的直径以及外加热罩（3)下部开口（31)的尺寸与镀膜区的大小相适配。 9. The box heater suitable for the roll-to-roll continuous strip preparation process according to any one of claims 1-8, wherein the inner heating cover (2) and the outer heating cover (3) The diameter of the multi-channel roller shaft (1) and the size of the lower opening (31) of the outer heating cover (3) are adapted to the size of the coating zone.