WO2014069042A1 - 研磨パッド及びその製造方法 - Google Patents
研磨パッド及びその製造方法 Download PDFInfo
- Publication number
- WO2014069042A1 WO2014069042A1 PCT/JP2013/067325 JP2013067325W WO2014069042A1 WO 2014069042 A1 WO2014069042 A1 WO 2014069042A1 JP 2013067325 W JP2013067325 W JP 2013067325W WO 2014069042 A1 WO2014069042 A1 WO 2014069042A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- isocyanate
- polishing pad
- molecular weight
- polishing
- polyurethane foam
- Prior art date
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- 229920002223 polystyrene Polymers 0.000 description 1
- 238000011417 postcuring Methods 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 125000000467 secondary amino group Chemical group [H]N([*:1])[*:2] 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000005720 sucrose Substances 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- RUELTTOHQODFPA-UHFFFAOYSA-N toluene 2,6-diisocyanate Chemical compound CC1=C(N=C=O)C=CC=C1N=C=O RUELTTOHQODFPA-UHFFFAOYSA-N 0.000 description 1
- VOZKAJLKRJDJLL-UHFFFAOYSA-N tolylenediamine group Chemical group CC1=C(C=C(C=C1)N)N VOZKAJLKRJDJLL-UHFFFAOYSA-N 0.000 description 1
- 238000005809 transesterification reaction Methods 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- 125000003258 trimethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- AVWRKZWQTYIKIY-UHFFFAOYSA-N urea-1-carboxylic acid Chemical compound NC(=O)NC(O)=O AVWRKZWQTYIKIY-UHFFFAOYSA-N 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/08—Processes
- C08G18/10—Prepolymer processes involving reaction of isocyanates or isothiocyanates with compounds having active hydrogen in a first reaction step
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/30—Low-molecular-weight compounds
- C08G18/32—Polyhydroxy compounds; Polyamines; Hydroxyamines
- C08G18/3203—Polyhydroxy compounds
- C08G18/3206—Polyhydroxy compounds aliphatic
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/40—High-molecular-weight compounds
- C08G18/48—Polyethers
- C08G18/4854—Polyethers containing oxyalkylene groups having four carbon atoms in the alkylene group
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/65—Low-molecular-weight compounds having active hydrogen with high-molecular-weight compounds having active hydrogen
- C08G18/66—Compounds of groups C08G18/42, C08G18/48, or C08G18/52
- C08G18/6666—Compounds of group C08G18/48 or C08G18/52
- C08G18/667—Compounds of group C08G18/48 or C08G18/52 with compounds of group C08G18/32 or polyamines of C08G18/38
- C08G18/6674—Compounds of group C08G18/48 or C08G18/52 with compounds of group C08G18/32 or polyamines of C08G18/38 with compounds of group C08G18/3203
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
- C08G18/72—Polyisocyanates or polyisothiocyanates
- C08G18/721—Two or more polyisocyanates not provided for in one single group C08G18/73 - C08G18/80
- C08G18/724—Combination of aromatic polyisocyanates with (cyclo)aliphatic polyisocyanates
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
- C08G18/72—Polyisocyanates or polyisothiocyanates
- C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
- C08G18/75—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic
- C08G18/758—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic containing two or more cycloaliphatic rings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
- C08G18/72—Polyisocyanates or polyisothiocyanates
- C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
- C08G18/76—Polyisocyanates or polyisothiocyanates cyclic aromatic
- C08G18/7614—Polyisocyanates or polyisothiocyanates cyclic aromatic containing only one aromatic ring
- C08G18/7621—Polyisocyanates or polyisothiocyanates cyclic aromatic containing only one aromatic ring being toluene diisocyanate including isomer mixtures
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
- C08G18/72—Polyisocyanates or polyisothiocyanates
- C08G18/77—Polyisocyanates or polyisothiocyanates having heteroatoms in addition to the isocyanate or isothiocyanate nitrogen and oxygen or sulfur
- C08G18/78—Nitrogen
- C08G18/79—Nitrogen characterised by the polyisocyanates used, these having groups formed by oligomerisation of isocyanates or isothiocyanates
- C08G18/791—Nitrogen characterised by the polyisocyanates used, these having groups formed by oligomerisation of isocyanates or isothiocyanates containing isocyanurate groups
- C08G18/792—Nitrogen characterised by the polyisocyanates used, these having groups formed by oligomerisation of isocyanates or isothiocyanates containing isocyanurate groups formed by oligomerisation of aliphatic and/or cycloaliphatic isocyanates or isothiocyanates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
Definitions
- the present invention stabilizes flattening processing of optical materials such as lenses and reflecting mirrors, silicon wafers, glass substrates for hard disks, aluminum substrates, and materials that require high surface flatness such as general metal polishing processing,
- the present invention relates to a polishing pad that can be performed with high polishing efficiency.
- the polishing pad of the present invention is particularly suitable for a step of planarizing a silicon wafer and a device having an oxide layer, a metal layer, etc. formed thereon, before further laminating and forming these oxide layers and metal layers. Used for.
- a typical material that requires a high degree of surface flatness is a single crystal silicon disk called a silicon wafer for manufacturing a semiconductor integrated circuit (IC, LSI).
- Silicon wafers have a highly accurate surface in each process of stacking and forming oxide layers and metal layers in order to form reliable semiconductor junctions of various thin films used for circuit formation in IC, LSI, and other manufacturing processes. It is required to finish flat.
- a polishing pad is generally fixed to a rotatable support disk called a platen, and a workpiece such as a semiconductor wafer is fixed to a polishing head.
- a polishing operation is performed by generating a relative speed between the platen and the polishing head by both movements, and continuously supplying a polishing slurry containing abrasive grains onto the polishing pad.
- the polishing characteristics of the polishing pad are required to be excellent in flatness (planarity) and in-plane uniformity of the object to be polished, and to have a high polishing rate.
- the flatness and in-plane uniformity of the object to be polished can be improved to some extent by increasing the elastic modulus of the polishing layer.
- the polishing rate can be improved by using a foam containing bubbles and increasing the amount of slurry retained.
- polishing pads made of polyurethane foam have been proposed (Patent Documents 1 and 2).
- the polyurethane foam is produced by reacting an isocyanate-terminated prepolymer with a chain extender (curing agent).
- a chain extender curing agent
- As the polymer polyol component of the isocyanate prepolymer hydrolysis resistance, elastic properties, abrasion resistance
- polyether polytetramethylene glycol having a number average molecular weight of 500 to 1600
- polycarbonate are used as suitable materials.
- the cohesive force of the hard segment was reduced during moisture absorption or water absorption, and the dimensional stability of the polishing layer was likely to be reduced.
- Patent Document 3 discloses a polishing pad polymer composition having a volume swelling rate of 20% or less when immersed in water at a temperature of 23 ° C. for 72 hours for the purpose of improving the retention of the slurry. Yes.
- the polishing pad polymer composition uses a thermoplastic polymer as the polishing pad polymer, and it is difficult to maintain high dimensional stability of the polishing pad during moisture absorption or water absorption.
- Patent Document 4 a polishing pad that can maintain high dimensional stability at the time of moisture absorption or water absorption while having high water absorption, and a method for producing the same.
- a polyurethane foam having fine bubbles having an average cell diameter of 100 ⁇ m or less can be produced, but an air void having a diameter of 500 ⁇ m or more may be generated in the polyurethane foam. is there.
- JP 2000-17252 A Japanese Patent No. 3359629 JP 2001-47355 A JP 2008-80478 A
- the present invention provides a polishing pad that can maintain high dimensional stability at the time of moisture absorption or water absorption while having high water absorption, and that hardly causes scratches on the surface to be polished of an object to be polished, and a method for manufacturing the same. Objective.
- the present inventor has found that the above object can be achieved by the polishing pad and the manufacturing method thereof shown below, and has completed the present invention.
- the present invention provides a polishing pad having a polishing layer comprising a polyurethane foam having fine bubbles, wherein the polyurethane foam is (1) Isocyanate-terminated prepolymer A obtained by reacting a prepolymer raw material composition A ′ containing an isocyanate monomer, a high molecular weight polyol a, and a low molecular weight polyol, (2) Reaction of an isocyanate-terminated prepolymer B obtained by reacting a prepolymer raw material composition B ′ containing a multimeric diisocyanate and a high molecular weight polyol b, and (3) a polyurethane raw material composition containing a chain extender Including cured bodies,
- the multimerized diisocyanate relates to a polishing pad comprising a pentamer or more component in a proportion of 40% by weight or less.
- the conventional polishing layer is a polyurethane foam having a hard segment formed only by physical crosslinking, it is considered that the cohesive force of the hard segment easily decreases during moisture absorption or water absorption. Therefore, it is considered that the dimensional change increases due to elongation, warpage, etc., as the polishing layer absorbs moisture or absorbs water.
- an isocyanate-terminated prepolymer A obtained by reacting a prepolymer raw material composition A ′ containing an isocyanate monomer, a high molecular weight polyol a, and a low molecular weight polyol; and (2) In combination with an isocyanate-terminated prepolymer B obtained by reacting a prepolymer raw material composition B ′ containing a polymerized diisocyanate and a high molecular weight polyol b, and (3) reaction with a chain extender in the polymer
- chemical crosslinks a three-dimensional crosslink structure is regularly formed
- the chemical cross-linking network can be expanded, and a highly water-absorbing polyurethane foam can be obtained.
- the retention of the slurry can be improved and the polishing rate can be increased.
- the reaction between the isocyanate-terminated prepolymer B and the chain extender can be achieved by using a dimerized diisocyanate, which is a raw material for the isocyanate-terminated prepolymer B, containing a pentamer or higher component in a proportion of 40% by weight or less. It is possible to improve the property and suppress the generation of air voids in the polyurethane foam.
- the isocyanate-terminated prepolymer B preferably has a viscosity at 50 ° C. of 8000 mPa ⁇ s or less.
- the high molecular weight polyol a is a polyether polyol having a number average molecular weight of 500 to 5000, and the isocyanate monomer preferably contains toluene diisocyanate and dicyclohexylmethane diisocyanate and / or isophorone diisocyanate.
- the high molecular weight polyol b is a polyether polyol having a number average molecular weight of 250 to 1000, the multimerized diisocyanate is an isocyanurate type and / or burette type multimerized hexamethylene diisocyanate, and the prepolymer raw material composition B ′
- the NCO Index is preferably 3.5 to 6.0.
- the content of the isocyanate-terminated prepolymer B is preferably 5 to 30 parts by weight with respect to 100 parts by weight of the isocyanate-terminated prepolymer A.
- the addition amount of the isocyanate-terminated prepolymer B is less than 5 parts by weight, the ratio of chemical crosslinking in the polymer becomes insufficient, so that the cohesive force of the hard segment at the time of moisture absorption or water absorption is insufficient, and the size of the polishing layer It tends to be difficult to maintain high stability. Moreover, it tends to be difficult to obtain a highly water-absorbing polyurethane foam.
- the amount exceeds 30 parts by weight the ratio of chemical cross-linking in the polymer becomes excessive, and the polishing layer becomes too hard and brittle. Tends to increase and the pad life tends to be shortened.
- the number of air voids having a diameter of 500 ⁇ m or more in the polyurethane foam is preferably 5 / ⁇ 775 mm or less. Note that ⁇ 775 mm means a circular region having a diameter of 775 mm.
- the polyurethane foam has an average cell diameter of 20 to 70 ⁇ m, a dress rate of 1.0 ⁇ m / min or less, a dimensional change rate during water absorption of 0.6% or less, and a flexural modulus before and after water absorption.
- the rate of change of is preferably 45% or less.
- the average bubble diameter deviates from the above range, the polishing rate tends to decrease or the planarity (flatness) of the polished object after polishing tends to decrease.
- the dress rate exceeds 1.0 ⁇ m / min because the pad life is shortened.
- the dimensional change rate during water absorption exceeds 0.6%, the dimensional change tends to increase when the polishing layer absorbs moisture or absorbs water.
- the rate of change in the flexural modulus before and after water absorption exceeds 45%, the polishing characteristics such as the edge profile tend to deteriorate.
- the polyurethane foam preferably has an Asker D hardness of 45 to 65 degrees.
- Asker D hardness is less than 45 degrees, the flatness of the object to be polished tends to decrease.
- it is larger than 65 degrees the flatness is good, but the in-plane uniformity of the object to be polished tends to decrease. In addition, scratches are likely to occur on the surface of the object to be polished.
- the present invention also relates to a method for producing a polishing pad comprising a step of mixing a first component containing an isocyanate-terminated prepolymer and a second component containing a chain extender and curing to produce a polyurethane foam.
- a silicone-based surfactant is added to the first component containing an isocyanate-terminated prepolymer so as to be 0.05 to 10% by weight in the polyurethane foam, and the first component is added to a non-reactive gas.
- the isocyanate-terminated prepolymer is (1) Isocyanate-terminated prepolymer A obtained by reacting an isocyanate monomer, a high molecular weight polyol a, and a prepolymer raw material composition A ′ containing a low molecular weight polyol, and (2) a multimerized diisocyanate, and a high molecular weight Is an isocyanate-terminated prepolymer B obtained by reacting a prepolymer raw material composition B ′ containing polyol b,
- the multimerized diisocyanate relates to a method for producing a polishing pad comprising a pentamer or more component in a proportion of 40% by weight or less.
- the isocyanate-terminated prepolymer B preferably has a viscosity at 50 ° C. of 8000 mPa ⁇ s or less.
- a viscosity at 50 ° C. exceeds 8000 mPa ⁇ s, the reactivity between the isocyanate-terminated prepolymer B and the chain extender decreases.
- the time until the reaction solution cures becomes longer, and during this time, fine bubbles made of non-reactive gas in the reaction solution are combined and integrated to easily generate coarse air voids.
- the amount of the silicone-based surfactant is less than 0.05% by weight, there is a tendency that a foam having fine bubbles cannot be obtained. On the other hand, when it exceeds 10% by weight, there is a tendency that a polyurethane foam with high hardness cannot be obtained due to the plasticizing effect of the surfactant.
- the present invention relates to a semiconductor device manufacturing method including a step of polishing a surface of a semiconductor wafer using the polishing pad.
- the polishing pad of the present invention can maintain high dimensional stability at the time of moisture absorption or water absorption while being highly water-absorbing, and hardly contains coarse air voids, and therefore hardly causes scratches on the surface to be polished of the object to be polished. .
- the polishing pad of the present invention has a polishing layer made of a polyurethane foam having fine bubbles.
- the polishing pad of the present invention may be only the polishing layer or a laminate of the polishing layer and another layer (for example, a cushion layer).
- Polyurethane resin is a particularly preferable material as a material for forming the polishing layer because it has excellent wear resistance and a polymer having desired physical properties can be easily obtained by variously changing the raw material composition.
- the polyurethane resin includes (1) an isocyanate-terminated prepolymer A obtained by reacting a prepolymer raw material composition A ′ containing an isocyanate monomer, a high molecular weight polyol a, and a low molecular weight polyol, and (2) a multimerized diisocyanate. And an isocyanate-terminated prepolymer B obtained by reacting a prepolymer raw material composition B ′ containing a high molecular weight polyol b, and (3) a reaction cured product of a polyurethane raw material composition containing a chain extender.
- isocyanate monomer a known compound in the field of polyurethane can be used without particular limitation.
- toluene diisocyanate in combination with dicyclohexylmethane diisocyanate and / or isophorone diisocyanate.
- the multimerized diisocyanate in the present invention is an isocyanate-modified product (for example, a dimer, a trimer, a pentamer, an octamer, or a 12mer, which has been multimerized by adding two or more diisocyanates. Etc.).
- the isocyanate-modified product include 1) trimethylolpropane adduct type, 2) burette type, and 3) isocyanurate type, and the isocyanurate type and / or burette type are particularly preferable.
- the diisocyanate forming the multimerized diisocyanate it is preferable to use an aliphatic diisocyanate, and it is particularly preferable to use 1,6-hexamethylene diisocyanate.
- the multimerized diisocyanate may be modified by urethane modification, allophanate modification, burette modification or the like.
- the multimerized diisocyanate one containing a pentamer or more component in a proportion of 40% by weight or less is used.
- it is a component containing a pentamer or more in a proportion of 35% by weight or less, more preferably 30% by weight or less, and particularly preferably 25% by weight or less. Is.
- High molecular weight polyols a and b include polyether polyols typified by polytetramethylene ether glycol, polyester polyols typified by polybutylene adipate, reaction products of polyester glycols such as polycaprolactone polyols and polycaprolactones and alkylene carbonates.
- the number average molecular weight of the high molecular weight polyol a is not particularly limited, but is preferably 500 to 5000, more preferably 1000 to 2000, from the viewpoint of the viscoelastic properties of the obtained polyurethane resin.
- the number average molecular weight is less than 500, a polyurethane resin using the number average molecular weight does not have sufficient elastic properties and becomes a brittle polymer. Therefore, the polishing pad manufactured from this polyurethane resin becomes too hard and causes scratches on the wafer surface. Moreover, since it becomes easy to wear, it is not preferable from the viewpoint of the pad life.
- the number average molecular weight exceeds 5,000 the polyurethane resin using the number average molecular weight becomes too soft, so that the polishing pad produced from this polyurethane resin tends to have poor planarization characteristics.
- the number average molecular weight of the high molecular weight polyol b is not particularly limited, but is preferably 250 to 1,000, more preferably 250 to 650, from the viewpoint of dimensional change and water absorption rate of the resulting polyurethane resin upon water absorption. is there. If the number average molecular weight is less than 250, the distance between crosslinks is shortened and the wear resistance of the polyurethane resin is lowered, so that the pad life tends to be shortened. On the other hand, when the number average molecular weight exceeds 1000, the distance between crosslinks becomes long, so that the water absorption becomes high and the dimensional change at the time of water absorption tends to increase.
- Low molecular weight polyol is an essential raw material for isocyanate-terminated prepolymer A.
- the low molecular weight polyol include ethylene glycol, 1,2-propylene glycol, 1,3-propylene glycol, 1,2-butanediol, 1,3-butanediol, 1,4-butanediol, 2,3- Butanediol, 1,6-hexanediol, neopentyl glycol, 1,4-cyclohexanedimethanol, 3-methyl-1,5-pentanediol, diethylene glycol, triethylene glycol, 1,4-bis (2-hydroxyethoxy) Benzene, trimethylolpropane, glycerin, 1,2,6-hexanetriol, pentaerythritol, tetramethylolcyclohexane, methylglucoside, sorbitol, mannitol, dulcitol, sucrose,
- low molecular weight polyamines such as ethylenediamine, tolylenediamine, diphenylmethanediamine, and diethylenetriamine may be used as raw materials for the isocyanate-terminated prepolymers A and B.
- Alcohol amines such as monoethanolamine, 2- (2-aminoethylamino) ethanol, and monopropanolamine may also be used. These may be used alone or in combination of two or more.
- the blending amount of the low molecular weight polyol or the low molecular weight polyamine is not particularly limited and is appropriately determined depending on the characteristics required for the polishing pad (polishing layer) to be produced, but all active hydrogen which is a raw material of the isocyanate-terminated prepolymer A It is preferably 10 to 25 mol% of the group-containing compound.
- the isocyanate-terminated prepolymer B preferably has a viscosity at 50 ° C. of 8000 mPa ⁇ s or less, more preferably 7000 mPa ⁇ s or less, and particularly preferably 5000 mPa ⁇ s or less.
- the viscosity of the isocyanate-terminated prepolymer B can be adjusted mainly by the mixing ratio of the isocyanate-modified product in the multimeric diisocyanate that is a raw material.
- the isocyanate-terminated prepolymer B it is preferable to blend a dimerized diisocyanate and a high molecular weight polyol b so that the NCO index is 3.5 to 6.0, more preferably 3.5. ⁇ 4.5.
- a chain extender is used for curing the prepolymer.
- the chain extender is an organic compound having at least two active hydrogen groups, and examples of the active hydrogen group include a hydroxyl group, a primary or secondary amino group, and a thiol group (SH).
- the ratio of the isocyanate-terminated prepolymer A, the isocyanate-terminated prepolymer B, and the chain extender can be variously changed depending on the molecular weight of each, the desired physical properties of the polishing pad, and the like.
- the addition amount of the isocyanate-terminated prepolymer B is preferably 5 to 30 parts by weight, more preferably 5 to 20 parts by weight with respect to 100 parts by weight of the isocyanate-terminated prepolymer A.
- the number of isocyanate groups of the prepolymer relative to the number of active hydrogen groups (hydroxyl groups, amino groups) of the chain extender is 0.8 to 1.2. It is preferably 0.99 to 1.15. When the number of isocyanate groups is outside the above range, curing failure occurs and the required specific gravity and hardness cannot be obtained, and the polishing characteristics tend to be deteriorated.
- Polyurethane foams can be produced by applying known urethanization techniques such as a melting method and a solution method, but are preferably produced by a melting method in consideration of cost, work environment, and the like.
- the production of the polyurethane foam of the present invention is performed by a prepolymer method.
- the polyurethane resin obtained by the prepolymer method is suitable because of its excellent physical properties.
- isocyanate-terminated prepolymers A and B having a molecular weight of about 800 to 5000 are preferable because of excellent processability and physical characteristics.
- a first component containing isocyanate-terminated prepolymers A and B and a second component containing a chain extender are mixed and cured to produce a polyurethane foam.
- Examples of the polyurethane foam production method include a method of adding hollow beads, a mechanical foaming method (including a mechanical floss method), and a chemical foaming method.
- the mechanical foaming method using the silicone type surfactant which is a copolymer of polyalkylsiloxane and polyether is especially preferable.
- suitable silicone surfactants include SH-192 and L-5340 (manufactured by Toray Dow Corning Silicone), B8443, B8465 (manufactured by Goldschmidt), and the like.
- the silicone surfactant is preferably added to the polyurethane raw material composition in an amount of 0.05 to 10% by weight, more preferably 0.1 to 5% by weight.
- stabilizers such as antioxidants, lubricants, pigments, fillers, antistatic agents, and other additives may be added.
- the manufacturing method of this polyurethane foam has the following processes. 1) Foaming step for producing a cell dispersion A silicone-based surfactant is added to the first component containing the isocyanate-terminated prepolymers A and B so as to be 0.05 to 10% by weight in the polyurethane foam, and is not reacted. Stirring is carried out in the presence of a reactive gas to disperse the non-reactive gas as fine bubbles to obtain a bubble dispersion. When the prepolymer is solid at normal temperature, it is preheated to an appropriate temperature and melted before use.
- Curing agent (chain extender) mixing step A second component containing a chain extender is added to the cell dispersion and mixed to obtain a foaming reaction solution.
- Casting step The foaming reaction solution is poured into a mold.
- Curing step The foaming reaction solution poured into the mold is heated to cause reaction curing.
- non-reactive gas used to form the fine bubbles non-flammable gases are preferable, and specific examples include nitrogen, oxygen, carbon dioxide, rare gases such as helium and argon, and mixed gases thereof. In view of cost, it is most preferable to use air that has been dried to remove moisture.
- a known stirring device can be used without particular limitation as a stirring device for dispersing non-reactive gas in the form of fine bubbles and dispersed in the first component containing the silicone-based surfactant.
- a shaft planetary mixer (planetary mixer) is exemplified.
- the shape of the stirring blade of the stirring device is not particularly limited, but it is preferable to use a whipper type stirring blade because fine bubbles can be obtained.
- the stirring in the mixing step may not be stirring that forms bubbles, and it is preferable to use a stirring device that does not involve large bubbles.
- a planetary mixer is suitable. There is no problem even if the same stirring device is used as the stirring device for the foaming step and the mixing step, and it is also preferable to adjust the stirring conditions such as adjusting the rotation speed of the stirring blade as necessary. .
- the foam reaction solution may be poured into the mold and immediately put into a heating oven for post cure, and heat is not immediately transferred to the reaction components under such conditions, so the bubble size does not increase.
- the curing reaction is preferably performed at normal pressure because the bubble shape is stable.
- a known catalyst that promotes polyurethane reaction such as tertiary amine may be used.
- the type and addition amount of the catalyst are selected in consideration of the flow time for pouring into a mold having a predetermined shape after the mixing step.
- the polyurethane foam may be produced by a batch method in which each component is weighed and put into a container and stirred. In addition, each component and a non-reactive gas are continuously supplied to a stirrer and stirred.
- a continuous production method may be used in which a molded product is manufactured by sending out the foaming reaction solution.
- a thin sheet may be formed.
- a raw material resin may be dissolved and extruded from a T-die to directly obtain a sheet-like polyurethane foam.
- the number of air voids having a diameter of 500 ⁇ m or more in the polyurethane foam is preferably 5 / ⁇ 775 mm or less, more preferably 3 / ⁇ 775 mm or less.
- the average cell diameter of the polyurethane foam is preferably 20 to 70 ⁇ m, more preferably 30 to 60 ⁇ m.
- the polyurethane foam preferably has a dress rate of 1.0 ⁇ m / min or less, more preferably 0.8 ⁇ m / min or less.
- the polyurethane foam preferably has a dimensional change rate at the time of water absorption of 0.6% or less, more preferably 0.4% or less.
- the polyurethane foam preferably has a bending elastic modulus change rate of 45% or less before and after water absorption, more preferably 40% or less.
- the polyurethane foam preferably has an Asker D hardness of 45 to 65 degrees, more preferably 50 to 60 degrees.
- the polishing surface of the polishing pad (polishing layer) of the present invention that comes into contact with the object to be polished preferably has a concavo-convex structure for holding and updating the slurry.
- the polishing layer made of foam has many openings on the polishing surface and has the function of holding and updating the slurry.
- the slurry can be held and updated more efficiently. It can be performed well, and destruction of the polishing object due to adsorption with the polishing object can be prevented.
- the concavo-convex structure is not particularly limited as long as it is a shape that holds and renews the slurry.
- an XY lattice groove for example, an XY lattice groove, a concentric circular groove, a through hole, a non-penetrating hole, a polygonal column, a cylinder, a spiral groove, Examples include eccentric circular grooves, radial grooves, and combinations of these grooves.
- these uneven structures are generally regular, but in order to make the slurry retention and renewability desirable, the groove pitch, groove width, groove depth, etc. should be changed for each range. Is also possible.
- the method for producing the concavo-convex structure is not particularly limited.
- a method of machine cutting using a jig such as a tool of a predetermined size, pouring a resin into a mold having a predetermined surface shape, and curing.
- a method of producing a resin by pressing a method of producing using photolithography, a method of producing using a printing technique, a carbon dioxide laser, etc.
- Examples include a manufacturing method using laser light.
- the thickness of the polishing layer is not particularly limited, but is usually about 0.8 to 4 mm, preferably 1.5 to 2.5 mm.
- the polishing pad of the present invention may be a laminate of the polishing layer and a cushion sheet.
- the cushion sheet (cushion layer) supplements the characteristics of the polishing layer.
- the cushion sheet is necessary for achieving both planarity and uniformity in a trade-off relationship in CMP.
- Planarity refers to the flatness of a pattern portion when a polishing object having minute irregularities generated during pattern formation is polished, and uniformity refers to the uniformity of the entire polishing object.
- the planarity is improved by the characteristics of the polishing layer, and the uniformity is improved by the characteristics of the cushion sheet.
- the cushion sheet examples include a fiber nonwoven fabric such as a polyester nonwoven fabric, a nylon nonwoven fabric, and an acrylic nonwoven fabric, a resin-impregnated nonwoven fabric such as a polyester nonwoven fabric impregnated with polyurethane, a polymer resin foam such as polyurethane foam and polyethylene foam, a butadiene rubber, Examples thereof include rubber resins such as isoprene rubber and photosensitive resins.
- a fiber nonwoven fabric such as a polyester nonwoven fabric, a nylon nonwoven fabric, and an acrylic nonwoven fabric
- a resin-impregnated nonwoven fabric such as a polyester nonwoven fabric impregnated with polyurethane
- a polymer resin foam such as polyurethane foam and polyethylene foam
- butadiene rubber examples thereof include rubber resins such as isoprene rubber and photosensitive resins.
- Examples of means for attaching the polishing layer and the cushion sheet include a method of sandwiching and pressing the polishing layer and the cushion sheet with a double-sided tape.
- the double-sided tape has a general structure in which adhesive layers are provided on both sides of a base material such as a nonwoven fabric or a film. In consideration of preventing the penetration of the slurry into the cushion sheet, it is preferable to use a film for the substrate.
- the composition of the adhesive layer include rubber adhesives and acrylic adhesives. Considering the content of metal ions, an acrylic adhesive is preferable because the metal ion content is low.
- the composition of each adhesive layer of the double-sided tape can be made different so that the adhesive force of each layer can be optimized.
- the polishing pad of the present invention may be provided with a double-sided tape on the surface to be bonded to the platen.
- a double-sided tape a tape having a general configuration in which an adhesive layer is provided on both surfaces of a base material can be used as described above.
- a base material a nonwoven fabric, a film, etc. are mentioned, for example.
- a film for the substrate it is preferable to use a film for the substrate.
- the composition of the adhesive layer include rubber adhesives and acrylic adhesives. Considering the content of metal ions, an acrylic adhesive is preferable because the metal ion content is low.
- the semiconductor device is manufactured through a process of polishing the surface of the semiconductor wafer using the polishing pad.
- a semiconductor wafer is generally a laminate of a wiring metal and an oxide film on a silicon wafer.
- the method and apparatus for polishing the semiconductor wafer are not particularly limited.
- a polishing surface plate 2 that supports a polishing pad (polishing layer) 1 and a support table (polishing head) that supports the semiconductor wafer 4. 5 and a polishing apparatus equipped with a backing material for uniformly pressing the wafer and a supply mechanism of the abrasive 3.
- the polishing pad 1 is attached to the polishing surface plate 2 by attaching it with a double-sided tape, for example.
- the polishing surface plate 2 and the support base 5 are disposed so that the polishing pad 1 and the semiconductor wafer 4 supported on each of the polishing surface plate 2 and the support table 5 face each other, and are provided with rotating shafts 6 and 7 respectively. Further, a pressurizing mechanism for pressing the semiconductor wafer 4 against the polishing pad 1 is provided on the support base 5 side. In polishing, the semiconductor wafer 4 is pressed against the polishing pad 1 while rotating the polishing surface plate 2 and the support base 5, and polishing is performed while supplying slurry.
- the flow rate of the slurry, the polishing load, the polishing platen rotation speed, and the wafer rotation speed are not particularly limited and are appropriately adjusted.
- the protruding portion of the surface of the semiconductor wafer 4 is removed and polished flat. Thereafter, a semiconductor device is manufactured by dicing, bonding, packaging, or the like. The semiconductor device is used for an arithmetic processing device, a memory, and the like.
- the prepolymer B was prepared under the condition of a rotor H4 ⁇ 20 rpm using an H-type viscometer (manufactured by Toki Sangyo Co., Ltd., TV-10). The viscosity was measured.
- the produced polyurethane foam was cut as thin as possible to a thickness of 1 mm or less in parallel with a microtome cutter, and used as a sample for measuring the average cell diameter.
- the sample was fixed on a glass slide and observed at 100 times using SEM (S-3500N, Hitachi Science Systems, Ltd.).
- SEM S-3500N, Hitachi Science Systems, Ltd.
- the image analysis software WinRoof, Mitani Shoji Co., Ltd.
- the produced polyurethane foam block (900 ⁇ 1000 ⁇ 40 mm) was sliced and the surface was buffed to obtain a polyurethane foam sheet having a thickness of 2 mm.
- a polyurethane foam sheet is placed on a projection table with a circle of ⁇ 30.5 inch ( ⁇ 775 mm), and how many air voids with a diameter of 500 ⁇ m or more are in the ⁇ 30.5 inch area using a magnifying glass with a 7-fold scale. I counted.
- the produced polyurethane foam sheet ( ⁇ 380 mm, thickness 1.25 mm) was attached to the platen with a double-sided tape and dressed under the following conditions.
- Dressing device MAT-BC15 manufactured by MAT Dresser: SAESOL C7 Forced drive speed: 115 rpm Platen rotation speed: 70rpm
- Dress load 9.7 pounds Water absorption: 200 ml / min
- Dressing time 1 hour
- the polyurethane foam sheet was cut into strips having a width of 10 mm and a length of 380 mm, and the double-sided tape on the back surface was peeled to obtain a sample.
- the thickness of the sample was measured at 20 mm intervals in the left-right direction from the center point of the sample (18 points in total), and the wear amount difference ( ⁇ m) between the undressed center point and each point was determined.
- the container was made into a multimerized 1,6-hexamethylene diisocyanate (manufactured by Asahi Kasei Chemicals Corporation, Duranate TLA-100, isocyanurate type, dimer: 15% by weight, trimer: 62% by weight, pentamer: (4 wt%, octamer: 19 wt%) 100 parts by weight and 17.3 parts by weight of polytetramethylene ether glycol having a number average molecular weight of 250 (NCO Index: 4) were reacted at 100 ° C. for 3 hours to give isocyanate.
- NCO Index: 4 polytetramethylene ether glycol having a number average molecular weight of 250
- Terminal prepolymer B1 (viscosity at 50 ° C .: 2500 mPa ⁇ s, NCO wt%: 15.0 wt%) was obtained. 100 parts by weight of the prepolymer A, the prepolymer B1 (16 parts by weight), and 3 parts by weight of a silicone surfactant (manufactured by Goldschmidt, B8465) are added to the polymerization vessel, mixed, and adjusted to 70 ° C. Degassed under reduced pressure. Then, it stirred vigorously for about 4 minutes so that a bubble might be taken in in a reaction system with the rotation speed of 900 rpm using the stirring blade.
- a silicone surfactant manufactured by Goldschmidt, B8465
- MOCA 4,4′-methylenebis (o-chloroaniline)
- the surface of the sheet was buffed to a thickness of 1.27 mm to obtain a sheet with an adjusted thickness accuracy.
- the buffed sheet is punched out with a diameter of 61 cm, and a concentric circle having a groove width of 0.25 mm, a groove pitch of 1.50 mm, and a groove depth of 0.40 mm on the surface using a groove processing machine (manufactured by Techno). Groove processing was performed to obtain a polishing layer.
- a double-sided tape manufactured by Sekisui Chemical Co., Ltd., double tack tape
- the surface of the corona-treated cushion sheet (manufactured by Toray Industries, Inc., polyethylene foam, Torepef, thickness 0.8 mm) was buffed and bonded to the double-sided tape using a laminator. Further, a double-sided tape was attached to the other surface of the cushion sheet using a laminator to prepare a polishing pad.
- Example 2 Multimerized 1,6-hexamethylene diisocyanate (manufactured by Asahi Kasei Chemicals Corporation, Duranate TPA-100, isocyanurate type, dimer: 2 wt%, trimer: 66 wt%, pentamer: 19 wt. %, Octamer: 18% by weight) and 100 parts by weight and 17.2 parts by weight of polytetramethylene ether glycol having a number average molecular weight of 250 (NCO Index: 4), and reacted at 100 ° C. for 3 hours to give an isocyanate-terminated prepolymer.
- NCO Index number average molecular weight
- Polymer B2 (viscosity at 50 ° C .: 7000 mPa ⁇ s, NCO wt%: 14.8 wt%) was obtained.
- Prepolymer B2 (16 parts by weight) was used instead of Prepolymer B1 (16 parts by weight), and the addition amount of MOCA was changed from 33.5 parts by weight to 33.4 parts by weight.
- a polishing pad was prepared in the same manner as in 1.
- Example 3 In Example 1, the addition amount of prepolymer B1 was changed from 16 parts by weight to 8 parts by weight, and the addition amount of MOCA was changed from 33.5 parts by weight to 30.0 parts by weight. A polishing pad was prepared by this method.
- Comparative Example 1 Multimerized 1,6-hexamethylene diisocyanate in a container (manufactured by Sumika Bayer Urethane Co., Ltd., Sumidur N3300, isocyanurate type, trimer: 55% by weight, pentamer: 22% by weight, octamer: 11% by weight) , 12-mer: 12 wt%) 100 parts by weight and 16.3 parts by weight of polytetramethylene ether glycol having a number average molecular weight of 250 (NCO Index: 4) were reacted at 100 ° C. for 3 hours to be an isocyanate-terminated prepolymer.
- NCO Index: 4 polytetramethylene ether glycol having a number average molecular weight of 250
- Example 2 (viscosity at 50 ° C .: 11500 mPa ⁇ s, NCO wt%: 14.2 wt%) was obtained.
- Prepolymer B3 (16 parts by weight) was used instead of Prepolymer B1 (16 parts by weight), and the addition amount of MOCA was changed from 33.5 parts by weight to 33.1 parts by weight.
- a polishing pad was prepared in the same manner as in 1.
- the polishing pad of the present invention provides stable and high leveling of flattening of optical materials such as lenses and reflecting mirrors, silicon wafers, aluminum substrates, and materials requiring high surface flatness such as general metal polishing. Can be done with efficiency.
- the polishing pad of the present invention is particularly suitable for a step of planarizing a silicon wafer and a device having an oxide layer, a metal layer, etc. formed thereon, before further laminating and forming these oxide layers and metal layers. Can be used for
- polishing pad polishing layer
- polishing surface plate Abrasive (slurry)
- polishing object polishing object (semiconductor wafer)
- Support base polishing head 6
- Rotating shaft Rotating shaft
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Abstract
Description
(1)イソシアネート単量体、高分子量ポリオールa、及び低分子量ポリオールを含有するプレポリマー原料組成物A’を反応させて得られるイソシアネート末端プレポリマーA、
(2)多量化ジイソシアネート、及び高分子量ポリオールbを含有するプレポリマー原料組成物B’を反応させて得られるイソシアネート末端プレポリマーB、及び
(3)鎖延長剤
を含有するポリウレタン原料組成物の反応硬化体を含み、
前記多量化ジイソシアネートは、5量体以上の成分を40重量%以下の割合で含有することを特徴とする研磨パッド、に関する。
前記工程は、イソシアネート末端プレポリマーを含む第1成分にシリコーン系界面活性剤をポリウレタン発泡体中に0.05~10重量%になるように添加し、さらに前記第1成分を非反応性気体と撹拌して前記非反応性気体を微細気泡として分散させた気泡分散液を調製した後、前記気泡分散液に鎖延長剤を含む第2成分を混合し、硬化してポリウレタン発泡体を作製する工程であり、
前記イソシアネート末端プレポリマーは、
(1)イソシアネート単量体、高分子量ポリオールa、及び低分子量ポリオールを含有するプレポリマー原料組成物A’を反応させて得られるイソシアネート末端プレポリマーA、及び
(2)多量化ジイソシアネート、及び高分子量ポリオールbを含有するプレポリマー原料組成物B’を反応させて得られるイソシアネート末端プレポリマーBであり、
前記多量化ジイソシアネートは、5量体以上の成分を40重量%以下の割合で含有することを特徴とする研磨パッドの製造方法、に関する。
1)気泡分散液を作製する発泡工程
イソシアネート末端プレポリマーA及びBを含む第1成分にシリコーン系界面活性剤をポリウレタン発泡体中に0.05~10重量%になるように添加し、非反応性気体の存在下で撹拌し、非反応性気体を微細気泡として分散させて気泡分散液を得る。前記プレポリマーが常温で固体の場合には適宜の温度に予熱し、溶融して使用する。
2)硬化剤(鎖延長剤)混合工程
前記気泡分散液に鎖延長剤を含む第2成分を添加し、混合して発泡反応液を得る。
3)注型工程
前記発泡反応液を金型に流し込む。
4)硬化工程
金型に流し込まれた発泡反応液を加熱し、反応硬化させる。
(数平均分子量の測定)
数平均分子量は、GPC(ゲル・パーミエーション・クロマトグラフィ)にて測定し、標準ポリスチレンにより換算した。
GPC装置:島津製作所製、LC-10A
カラム:Polymer Laboratories社製、(PLgel、5μm、500Å)、(PLgel、5μm、100Å)、及び(PLgel、5μm、50Å)の3つのカラムを連結して使用
流量:1.0ml/min
濃度:1.0g/l
注入量:40μl
カラム温度:40℃
溶離液:テトラヒドロフラン
合成したイソシアネート末端プレポリマーBをオーブン内で50℃に調整した後、H型粘度計(東機産業(株)製、TV-10)を用いてローターH4×20rpmの条件で前記プレポリマーBの粘度を測定した。
作製したポリウレタン発泡体を厚み1mm以下になるべく薄くミクロトームカッターで平行に切り出したものを平均気泡径測定用試料とした。試料をスライドガラス上に固定し、SEM(S-3500N、日立サイエンスシステムズ(株))を用いて100倍で観察した。得られた画像を画像解析ソフト(WinRoof、三谷商事(株))を用いて、任意範囲の全気泡径を測定し、平均気泡径を算出した。
作製したポリウレタン発泡体ブロック(900×1000×40mm)をスライスし、表面をバフ処理して厚さ2mmのポリウレタン発泡体シートを得た。φ30.5インチ(φ775mm)の円を罫書いた投光台上にポリウレタン発泡体シートを載せ、φ30.5インチの領域内に直径500μm以上のエアボイドがいくつあるか7倍目盛付きルーペを用いて数えた。
JIS Z8807-1976に準拠して行った。作製したポリウレタン発泡体を4cm×8.5cmの短冊状(厚み:任意)に切り出したものを比重測定用試料とし、温度23℃±2℃、湿度50%±5%の環境で16時間静置した。測定には比重計(ザルトリウス社製)を用い、比重を測定した。
JIS K6253-1997に準拠して行った。作製したポリウレタン発泡体を2cm×2cm(厚み:任意)の大きさに切り出したものを硬度測定用試料とし、温度23℃±2℃、湿度50%±5%の環境で16時間静置した。測定時には、試料を重ね合わせ、厚み6mm以上とした。硬度計(高分子計器社製、アスカーD型硬度計)を用い、硬度を測定した。
JIS K7312に準拠して行った。作製したポリウレタン発泡体を幅20mm×長さ50mm×厚み1.27mmの大きさに切り出したものをサンプルとした。該サンプルを25℃の蒸留水中に48時間浸漬し、浸漬前後の長さを下記式に代入して寸法変化率を算出した。
寸法変化率(%)=〔(浸漬後の長さ-浸漬前の長さ)/浸漬前の長さ〕×100
作製したポリウレタン発泡体からサンプル(幅1.0mm、長さ3.0mm、厚み2.0mm)を切り出した。測定装置(インストロン社製、5864卓上型試験機システム)を用い、曲げ強度測定用治具の支点間距離22mm、クロスヘッド速度0.6mm/min、移動変位量6.0mmの条件でサンプルの吸水前の曲げ弾性率を測定した。曲げ弾性率は下記式にて算出した。
曲げ弾性率=直線部分の2点間の応力差/同じ直線部分の2点間のひずみ差
また、サンプルを25℃の蒸留水に48時間浸漬して吸水させ、その後、上記と同様の方法で吸水後の曲げ弾性率を測定した。
曲げ弾性率の変化率は、下記式にて算出した。
曲げ弾性率の変化率=〔(吸水前の曲げ弾性率-吸水後の曲げ弾性率)/吸水前の曲げ弾性率〕×100
作製したポリウレタン発泡体シート(φ380mm、厚み1.25mm)を両面テープでプラテンに貼り付け、下記条件でドレスした。
ドレス装置:MAT社製、MAT-BC15
ドレッサー:SAESOL C7
強制ドライブ回転数:115rpm
プラテン回転数:70rpm
ドレス荷重:9.7ポンド
吸水量:200ml/min
ドレス時間:1時間
ドレス終了後、ポリウレタン発泡体シートを幅10mm、長さ380mmの短冊状に切り、裏面の両面テープを剥離してサンプルを得た。マイクロメータを用いて、サンプルの中心点から左右方向に20mm間隔でサンプルの厚みを測定し(合計18点)、ドレスされていない中心点と各点とにおける磨耗量差(μm)を求めた。ドレスレートは下記式により算出した。
ドレスレート(μm/min)=磨耗量差の18点の平均値/60
容器にトルエンジイソシアネート(2,4-体/2,6-体=80/20の混合物)1229重量部、4,4’-ジシクロヘキシルメタンジイソシアネート272重量部、数平均分子量1018のポリテトラメチレンエーテルグリコール1901重量部、ジエチレングリコール198重量部を入れ、70℃で4時間反応させてイソシアネート末端プレポリマーAを得た。
また、容器に多量化1,6-ヘキサメチレンジイソシアネート(旭化成ケミカルズ(株)製、デュラネートTLA-100、イソシアヌレートタイプ、2量体:15重量%、3量体:62重量%、5量体:4重量%、8量体:19重量%)100重量部、及び数平均分子量250のポリテトラメチレンエーテルグリコール17.3重量部を入れ(NCO Index:4)、100℃で3時間反応させてイソシアネート末端プレポリマーB1(50℃における粘度:2500mPa・s、NCO重量%:15.0重量%)を得た。
前記プレポリマーA100重量部、前記プレポリマーB1(16重量部)、及びシリコーン系界面活性剤(ゴールドシュミット社製、B8465)3重量部を重合容器内に加えて混合し、70℃に調整して減圧脱泡した。その後、撹拌翼を用いて、回転数900rpmで反応系内に気泡を取り込むように激しく約4分間撹拌を行った。そこへ予め120℃に溶融した4,4’-メチレンビス(o-クロロアニリン)(以下、MOCAという)33.5重量部(NCO Index:1.1)を添加した。該混合液を約70秒間撹拌した後、パン型のオープンモールド(注型容器)へ流し込んだ。この混合液の流動性がなくなった時点でオーブン内に入れ、100℃で16時間ポストキュアを行い、ポリウレタン発泡体ブロックを得た。
約80℃に加熱した前記ポリウレタン発泡体ブロックをスライサー(アミテック社製、VGW-125)を使用してスライスし、ポリウレタン発泡体シートを得た。次に、バフ機(アミテック社製)を使用して、厚さ1.27mmになるまで該シートの表面バフ処理をし、厚み精度を整えたシートとした。このバフ処理をしたシートを直径61cmの大きさで打ち抜き、溝加工機(テクノ社製)を用いて表面に溝幅0.25mm、溝ピッチ1.50mm、溝深さ0.40mmの同心円状の溝加工を行って研磨層を得た。この研磨層の溝加工面と反対側の面にラミ機を使用して、両面テープ(積水化学工業社製、ダブルタックテープ)を貼りつけた。更に、コロナ処理をしたクッションシート(東レ社製、ポリエチレンフォーム、トーレペフ、厚み0.8mm)の表面をバフ処理し、それを前記両面テープにラミ機を使用して貼り合わせた。さらに、クッションシートの他面にラミ機を使用して両面テープを貼り合わせて研磨パッドを作製した。
容器に多量化1,6-ヘキサメチレンジイソシアネート(旭化成ケミカルズ(株)製、デュラネートTPA-100、イソシアヌレートタイプ、2量体:2重量%、3量体:66重量%、5量体:19重量%、8量体:18重量%)100重量部、及び数平均分子量250のポリテトラメチレンエーテルグリコール17.2重量部を入れ(NCO Index:4)、100℃で3時間反応させてイソシアネート末端プレポリマーB2(50℃における粘度:7000mPa・s、NCO重量%:14.8重量%)を得た。
実施例1において、プレポリマーB1(16重量部)の代わりにプレポリマーB2(16重量部)を用い、MOCAの添加量を33.5重量部から33.4重量部に変更した以外は実施例1と同様の方法で研磨パッドを作製した。
実施例1において、プレポリマーB1の添加量を16重量部から8重量部に変更し、MOCAの添加量を33.5重量部から30.0重量部に変更した以外は実施例1と同様の方法で研磨パッドを作製した。
容器に多量化1,6-ヘキサメチレンジイソシアネート(住化バイエルウレタン社製、スミジュールN3300、イソシアヌレートタイプ、3量体:55重量%、5量体:22重量%、8量体:11重量%、12量体:12重量%)100重量部、及び数平均分子量250のポリテトラメチレンエーテルグリコール16.3重量部を入れ(NCO Index:4)、100℃で3時間反応させてイソシアネート末端プレポリマーB3(50℃における粘度:11500mPa・s、NCO重量%:14.2重量%)を得た。
実施例1において、プレポリマーB1(16重量部)の代わりにプレポリマーB3(16重量部)を用い、MOCAの添加量を33.5重量部から33.1重量部に変更した以外は実施例1と同様の方法で研磨パッドを作製した。
2:研磨定盤
3:研磨剤(スラリー)
4:研磨対象物(半導体ウエハ)
5:支持台(ポリシングヘッド)
6、7:回転軸
Claims (11)
- 微細気泡を有するポリウレタン発泡体からなる研磨層を有する研磨パッドにおいて、前記ポリウレタン発泡体は、
(1)イソシアネート単量体、高分子量ポリオールa、及び低分子量ポリオールを含有するプレポリマー原料組成物A’を反応させて得られるイソシアネート末端プレポリマーA、
(2)多量化ジイソシアネート、及び高分子量ポリオールbを含有するプレポリマー原料組成物B’を反応させて得られるイソシアネート末端プレポリマーB、及び
(3)鎖延長剤
を含有するポリウレタン原料組成物の反応硬化体を含み、
前記多量化ジイソシアネートは、5量体以上の成分を40重量%以下の割合で含有することを特徴とする研磨パッド。 - 前記イソシアネート末端プレポリマーBは、50℃における粘度が8000mPa・s以下である請求項1記載の研磨パッド。
- 高分子量ポリオールaは、数平均分子量500~5000のポリエーテルポリオールであり、イソシアネート単量体は、トルエンジイソシアネートと、ジシクロへキシルメタンジイソシアネート及び/又はイソホロンジイソシアネートとを含む請求項1又は2記載の研磨パッド。
- 高分子量ポリオールbは、数平均分子量250~1000のポリエーテルポリオールであり、多量化ジイソシアネートは、イソシアヌレートタイプ及び/又はビュレットタイプの多量化ヘキサメチレンジイソシアネートであり、プレポリマー原料組成物B’のNCO Indexが3.5~6.0である請求項1~3のいずれかに記載の研磨パッド。
- イソシアネート末端プレポリマーBの含有量は、イソシアネート末端プレポリマーA100重量部に対して5~30重量部である請求項1~4のいずれかに記載の研磨パッド。
- ポリウレタン発泡体中の直径500μm以上のエアボイドの数が5個/φ775mm以下である請求項1~5のいずれかに記載の研磨パッド。
- ポリウレタン発泡体は、平均気泡径が20~70μm、ドレスレートが1.0μm/min以下、吸水時の寸法変化率が0.6%以下、かつ吸水前後の曲げ弾性率の変化率が45%以下である請求項1~6のいずれかに記載の研磨パッド。
- ポリウレタン発泡体は、アスカーD硬度が45~65度である請求項1~7のいずれかに記載の研磨パッド。
- イソシアネート末端プレポリマーを含む第1成分と鎖延長剤を含む第2成分とを混合し、硬化してポリウレタン発泡体を作製する工程を含む研磨パッドの製造方法において、
前記工程は、イソシアネート末端プレポリマーを含む第1成分にシリコーン系界面活性剤をポリウレタン発泡体中に0.05~10重量%になるように添加し、さらに前記第1成分を非反応性気体と撹拌して前記非反応性気体を微細気泡として分散させた気泡分散液を調製した後、前記気泡分散液に鎖延長剤を含む第2成分を混合し、硬化してポリウレタン発泡体を作製する工程であり、
前記イソシアネート末端プレポリマーは、
(1)イソシアネート単量体、高分子量ポリオールa、及び低分子量ポリオールを含有するプレポリマー原料組成物A’を反応させて得られるイソシアネート末端プレポリマーA、及び
(2)多量化ジイソシアネート、及び高分子量ポリオールbを含有するプレポリマー原料組成物B’を反応させて得られるイソシアネート末端プレポリマーBであり、
前記多量化ジイソシアネートは、5量体以上の成分を40重量%以下の割合で含有することを特徴とする研磨パッドの製造方法。 - 前記イソシアネート末端プレポリマーBは、50℃における粘度が8000mPa・s以下である請求項9記載の研磨パッドの製造方法。
- 請求項1~8のいずれかに記載の研磨パッドを用いて半導体ウエハの表面を研磨する工程を含む半導体デバイスの製造方法。
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US14/439,195 US20150273653A1 (en) | 2012-10-31 | 2013-06-25 | Polishing pad and method for producing same |
CN201380049442.9A CN104703756A (zh) | 2012-10-31 | 2013-06-25 | 抛光垫及其制造方法 |
KR1020157009102A KR20150053803A (ko) | 2012-10-31 | 2013-06-25 | 연마 패드 및 그 제조 방법 |
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US3753933A (en) * | 1972-04-24 | 1973-08-21 | Dow Chemical Co | Polyurethane foams from solid foaming agents |
US4569861A (en) * | 1984-06-18 | 1986-02-11 | Creative Products Resource Associates, Ltd. | Composite foam-textile cleaning pad |
JP4968884B2 (ja) * | 2006-04-19 | 2012-07-04 | 東洋ゴム工業株式会社 | 研磨パッドの製造方法 |
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