WO2014067097A1 - 一种远红外激光加工用Fθ镜头及激光加工设备 - Google Patents
一种远红外激光加工用Fθ镜头及激光加工设备 Download PDFInfo
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- WO2014067097A1 WO2014067097A1 PCT/CN2012/083845 CN2012083845W WO2014067097A1 WO 2014067097 A1 WO2014067097 A1 WO 2014067097A1 CN 2012083845 W CN2012083845 W CN 2012083845W WO 2014067097 A1 WO2014067097 A1 WO 2014067097A1
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- Prior art keywords
- lens
- laser processing
- infrared laser
- curved surface
- far
- Prior art date
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- 238000012545 processing Methods 0.000 title claims abstract description 49
- 230000005540 biological transmission Effects 0.000 claims abstract description 10
- 230000005499 meniscus Effects 0.000 claims abstract description 8
- 230000003287 optical effect Effects 0.000 claims description 21
- 239000011295 pitch Substances 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 abstract description 7
- 201000009310 astigmatism Diseases 0.000 abstract description 5
- 238000003384 imaging method Methods 0.000 abstract description 4
- 230000004075 alteration Effects 0.000 abstract description 3
- 238000005553 drilling Methods 0.000 abstract 1
- 238000013461 design Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000004080 punching Methods 0.000 description 4
- 210000001747 pupil Anatomy 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/14—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/0005—Optical objectives specially designed for the purposes specified below having F-Theta characteristic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
Definitions
- the invention belongs to the field of optical technology, and in particular relates to an F ⁇ lens and a laser processing device for far infrared laser processing.
- d is the minimum resolution of two points
- ⁇ is the wavelength of the processing beam
- ⁇ is the focal length of the optical lens
- D is the diameter of the entrance pupil of the optical lens.
- This wavelength is 10 times the usual wavelength of 1064nm, and its resolution is exactly 1064nm.
- One tenth of this will reduce the cutting accuracy.
- to increase the resolution only reduce the focal length ⁇ or increase the diameter of the entrance pupil D Increasing the diameter of the entrance pupil will increase the lens volume rapidly, but the effect of improving the resolution is not obvious. Therefore, the requirement to meet the high resolution under the premise of controlling the volume is still F ⁇ for far infrared laser cutting.
- the design puzzle of the lens is
- the present invention is achieved in this way, a FIR for far infrared laser processing a lens comprising a first lens, a second lens and a third lens arranged coaxially in the direction of transmission of the incident beam;
- the first lens is a meniscus negative lens, and the second lens and the third lens are meniscus positive lenses;
- the intermediate portions of the first, second, and third lenses are all convex toward the transmission direction of the incident light beam.
- Another object of the present invention is to provide A laser processing apparatus comprising a far infrared laser and an optical lens for focusing a far infrared laser for laser processing, wherein the optical lens employs the F ⁇ lens for far infrared laser processing.
- the invention can achieve the ideal image quality and resolution distance, effectively correct the astigmatism and distortion of the lens, reduce the influence of high-order aberrations, and the energy concentration of the laser focus point.
- Higher, high processing precision can meet the requirements of cutting or punching, etc.; on the other hand, it can effectively control the lens volume, which is a miniaturized far infrared
- the F ⁇ lens is important for cost control.
- FIG. 1 is a schematic structural view of an F ⁇ lens for far infrared laser processing according to an embodiment of the present invention
- FIG. 2 is a schematic diagram of astigmatism of an F ⁇ lens for far infrared laser processing according to an embodiment of the present invention
- FIG. 3 is a schematic diagram showing distortion of an F ⁇ lens for far infrared laser processing according to an embodiment of the present invention
- FIG. 4 is a graph showing an optical transfer function M.T.F of an F ⁇ lens for far infrared laser processing according to an embodiment of the present invention
- FIG. 5 is a schematic view showing a dispersion pattern of an F ⁇ lens for far infrared laser processing according to an embodiment of the present invention
- Fig. 6 is a view showing the energy concentration of an F ⁇ lens for far infrared laser processing according to an embodiment of the present invention.
- FIG. 1 shows an F ⁇ for far infrared laser processing according to an embodiment of the present invention.
- a schematic structural view of the lens for convenience of explanation, only the parts related to the present embodiment are shown.
- the F ⁇ lens for far-infrared laser processing mainly includes a first lens L1, a second lens L2, and a third lens L3.
- the three lenses are sequentially arranged coaxially along the transmission direction of the incident laser light, wherein the first lens L1 is a meniscus negative lens, and the second lens L2 and the third lens L3 are both meniscus positive lenses.
- the first lens L1 The radius of curvature of the incident surface is smaller than the radius of curvature of the exit surface.
- the curvature radius of the incident surface of the second and third lenses is larger than the radius of curvature of the exit surface, and the intermediate portions of the first, second, and third lenses are all convex toward the transmission direction of the incident light beam, that is, protrude toward the image side.
- the material of the first lens L1, the second lens L2, and the third lens L3 may select a ratio of the refractive index to the Abbe number Nd/Vd For 1.74/0.026 glass, Nd/Vd has a tolerance of 5%.
- parameters such as surface curvature and lens thickness of each lens are optimally designed.
- the first lens L1 The first curved surface S1 and the second curved surface S2 have a radius of curvature of -50 mm and -60 mm, respectively;
- the second lens L2 includes a third curved surface S3 and a fourth curved surface S4, and the radius of curvature is respectively -68mm, -50mm;
- the third lens L3 includes a fifth curved surface S5 and a sixth curved surface S6, and the radius of curvature is -500mm, -180mm .
- the negative sign in the above parameters means that the spherical center of the surface is in the object space, and the positive and negative signs are not considered as positive numbers, and the center of the spherical surface is located in the image space.
- the first to sixth curved surfaces are sequentially arranged along the laser transmission direction, and the radius of curvature of each of the curved surfaces is not the only option, and both exist. 5% tolerance range.
- the center thickness D and the surface pitch d of the first to third lenses are further Special designs have been made.
- the center thicknesses D1, D2, and D3 of the first to third lenses are 5 mm, 8 mm, and 8 mm, respectively, and there is also a tolerance range of 5%.
- the first lens The second curved surface S2 of L1 and the third curved surface S3 of the second lens L2 have a distance d1 of 5 mm on the optical axis; the fourth curved surface S4 of the second lens L2 and the fifth curved surface of the third lens L3
- the spacing d2 of S5 on the optical axis is 0.5mm.
- the tolerance of each of the above surface pitches is 5%.
- a fourth lens L4 which is further added to the light emitting side of the third lens L3, may be further added.
- it is a planar lens comprising a seventh curved surface S7 and an eighth curved surface S8, and of course, the seventh curved surface S7 and the eighth curved surface S8 have a radius of curvature of ⁇ .
- the fourth lens L4 It is mainly used to protect other imaging lenses in the lens to prevent other lenses from being affected by dust, moisture, high temperature or low temperature.
- the fourth lens L4 can be selected from the same material as the other lenses, and the center thickness D4 can be 3 mm with a tolerance of 5%.
- the seventh curved surface S7 of the fourth lens L4 and the sixth curved surface S6 of the third lens L3 may have a pitch d3 of 4 mm on the optical axis, and the tolerance is still 5%.
- the F ⁇ lens for far-infrared laser processing with a specific structure is provided below, and the specific reference is shown in Table 1.
- the F ⁇ lens for far-infrared laser processing has the following optical characteristics:
- Processing range A 100 * 100mm 2 ;
- the maximum outer diameter of the optical material D max 100mm
- the lens can achieve the ideal image quality and resolution distance, effectively correct the astigmatism and distortion of the lens, reduce the influence of high-order aberrations, and the laser focusing point has higher energy concentration and high processing precision, which is very good.
- it can effectively control the lens volume, the optical total length of the lens can be reduced to 100mm, the maximum outer diameter is only 100mm, it is a miniaturized far-infrared F ⁇ lens, which is of great significance for the fabrication of far-infrared lenses, because it can transmit ultra-long wavelengths (such as 10640nm).
- ultra-long wavelengths such as 10640nm
- the imaging quality of the F ⁇ lens for far-infrared laser processing is analyzed from different angles in conjunction with Figures 2-6.
- Figure 2 and Figure 3 show the astigmatism and distortion of the F ⁇ lens for far-infrared laser processing, respectively.
- the horizontal axis is ⁇ m.
- the vertical axis represents the distance from the center to the edge of the lens in the meridional direction. They are all at or below the theoretical value, and the theoretical value is 13.5 ⁇ m.
- Figure 4 shows the optical transfer function M.T.F of the lens.
- the vertical axis represents the percentage and the horizontal axis represents the field of view when the resolution reaches 10 lp/mm. (10 pairs), M.T.F has 30%. There is no significant difference between the on-axis point and the off-axis point of the lens, and the imaging effect is stable, achieving the goal of a flat image field.
- Figures 5 and 6 show the diffuse and energy concentration of the lens, respectively.
- the horizontal axis in Figure 6 is ⁇ m.
- the vertical axis is a percentage.
- the energy concentration map also shows a theoretical value of 13.5 ⁇ m, which proves that F
- the ⁇ lens achieves an ideal image quality and high energy concentration, enabling high-precision machining.
- the lens effectively controls the volume of the lens while ensuring better image quality and processing accuracy, ensuring the miniaturization of the lens, solving the problem that the conventional far-infrared lens is difficult to achieve high resolution and small volume, and effectively controlling the cost. It is suitable for wide use in various laser processing cutting, punching and other equipment.
- the present invention still further provides a laser processing apparatus comprising a far infrared laser and an optical lens for focusing a far infrared laser for laser processing, wherein the optical lens can adopt the F ⁇ for far infrared laser processing provided by the present invention.
- Lens This lens is particularly suitable for lasers with a wavelength of 10640 nm, so the far-infrared laser preferably has an emission wavelength of 10640 nm.
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Lenses (AREA)
- Laser Beam Processing (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
Description
Claims (10)
- 一种远红外激光加工用 Fθ 镜头,其特征在于,包括沿入射光束的传输方向依次共轴设置的第一透镜、第二透镜及第三透镜;所述第一透镜为弯月形负透镜,所述第二透镜和第三透镜为弯月形正透镜;所述第一、第二、第三透镜的中间部分均向所述入射光束的传输方向凸出。
- 如权利要求 1 所述的远红外激光加工用 Fθ 镜头,其特征在于,所述第一透镜包括第一曲面和第二曲面,所述第二透镜包括第三曲面和第四曲面,所述第三透镜包括第五曲面和第六曲面,所述第一至第六曲面沿所述入射光束的传输方向依次排布;所述第一至第六曲面的曲率半径依次为: -50mm , -60mm , -68mm , -50mm , -500mm , -180mm ,公差均为 5% 。
- 如权利要求 2 所述的远红外激光加工用 Fθ 镜头,其特征在于,所述第一至第三透镜的中心厚度依次为: 5mm , 8mm , 8mm ,公差均为 5% 。
- 如权利要求 3 所述的远红外激光加工用 Fθ 镜头,其特征在于,所述第二曲面与第三曲面在光轴上的间距为 5mm ;所述第四曲面与第五曲面在光轴上的间距为 0.5mm ;各所述间距的公差均为 5% 。
- 如权利要求 1 所述的远红外激光加工用 Fθ 镜头,其特征在于,所述第一、第二、第三透镜的折射率与阿贝数之比为 1.74/0.026 ,公差为 5% 。
- 如权利要求 2 至 5 任一项所述的远红外激光加工用 Fθ 镜头,其特征在于,还包括第四透镜,位于所述第三透镜的出光侧,所述第四透镜包括第七曲面和第八曲面,所述第七曲面和第八曲面的曲率半径均为∞。
- 如权利要求 6 所述的远红外激光加工用 Fθ 镜头,其特征在于,所述第四透镜的折射率与阿贝数之比为 1.74/0.026 ,公差为 5% 。
- 如权利要求 6 所述的远红外激光加工用 Fθ 镜头,其特征在于,所述第四透镜的中心厚度为 3mm ,公差为 5% ;所述第六曲面与所述第七曲面在光轴上的间距为 4mm ,公差为 5% 。
- 一种激光加工设备,包括远红外激光器及用于聚焦远红外激光以进行激光加工的光学镜头,其特征在于,所述光学镜头采用权利要求 1~8 任一项所述的远红外激光加工用 Fθ 镜头。
- 如权利要求 9 所述的激光加工设备,其特征在于,所述远红外激光器的发光波长为 10640nm 。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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PCT/CN2012/083845 WO2014067097A1 (zh) | 2012-10-31 | 2012-10-31 | 一种远红外激光加工用Fθ镜头及激光加工设备 |
CN201280076828.4A CN104769474B (zh) | 2012-10-31 | 2012-10-31 | 一种远红外激光加工用Fθ镜头及激光加工设备 |
JP2015540009A JP6019244B2 (ja) | 2012-10-31 | 2012-10-31 | 遠赤外線レーザ加工のためのFθレンズ及びレーザ加工デバイス |
EP12887391.6A EP2908163B1 (en) | 2012-10-31 | 2012-10-31 | F-theta lens and laser processing device for far-infrared laser processing |
US14/439,410 US9739984B2 (en) | 2012-10-31 | 2012-10-31 | F-theta lens and laser processing device for far-infrared laser processing |
Applications Claiming Priority (1)
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PCT/CN2012/083845 WO2014067097A1 (zh) | 2012-10-31 | 2012-10-31 | 一种远红外激光加工用Fθ镜头及激光加工设备 |
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WO2014067097A1 true WO2014067097A1 (zh) | 2014-05-08 |
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US (1) | US9739984B2 (zh) |
EP (1) | EP2908163B1 (zh) |
JP (1) | JP6019244B2 (zh) |
CN (1) | CN104769474B (zh) |
WO (1) | WO2014067097A1 (zh) |
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CN106662729B (zh) * | 2014-08-07 | 2019-09-17 | 大族激光科技产业集团股份有限公司 | 远红外成像透镜组、物镜及火灾火源探测仪 |
CN106471413B (zh) * | 2014-11-28 | 2019-07-05 | 大族激光科技产业集团股份有限公司 | F-θ型光刻镜头 |
CN109425962A (zh) * | 2017-08-30 | 2019-03-05 | 上海微电子装备(集团)股份有限公司 | 一种用于激光加工的F-theta镜头 |
CN108169883B (zh) * | 2017-12-27 | 2021-02-23 | 大族激光科技产业集团股份有限公司 | 一种用于大范围清洗的激光镜头及激光*** |
CN108873257B (zh) * | 2018-07-11 | 2021-02-26 | 大族激光科技产业集团股份有限公司 | 透镜组及激光加工设备 |
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2012
- 2012-10-31 US US14/439,410 patent/US9739984B2/en active Active
- 2012-10-31 WO PCT/CN2012/083845 patent/WO2014067097A1/zh active Application Filing
- 2012-10-31 CN CN201280076828.4A patent/CN104769474B/zh active Active
- 2012-10-31 JP JP2015540009A patent/JP6019244B2/ja active Active
- 2012-10-31 EP EP12887391.6A patent/EP2908163B1/en active Active
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CN101369047A (zh) * | 2008-04-28 | 2009-02-18 | 深圳市大族激光科技股份有限公司 | 光学镜头 |
CN101639565A (zh) * | 2009-04-29 | 2010-02-03 | 深圳市大族激光科技股份有限公司 | 激光应用大孔径的光学镜头 |
CN102313968A (zh) * | 2010-06-29 | 2012-01-11 | 深圳市大族激光科技股份有限公司 | 一种紫外激光fθ镜头、激光打标机及激光刻划机 |
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CN104769474A8 (zh) | 2017-02-08 |
US9739984B2 (en) | 2017-08-22 |
US20150293333A1 (en) | 2015-10-15 |
CN104769474B (zh) | 2017-03-29 |
JP6019244B2 (ja) | 2016-11-02 |
CN104769474A (zh) | 2015-07-08 |
EP2908163A1 (en) | 2015-08-19 |
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