CN104769474A - 一种远红外激光加工用Fθ镜头及激光加工设备 - Google Patents
一种远红外激光加工用Fθ镜头及激光加工设备 Download PDFInfo
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- CN104769474A CN104769474A CN201280076828.4A CN201280076828A CN104769474A CN 104769474 A CN104769474 A CN 104769474A CN 201280076828 A CN201280076828 A CN 201280076828A CN 104769474 A CN104769474 A CN 104769474A
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- 238000012545 processing Methods 0.000 title claims abstract description 51
- 230000005540 biological transmission Effects 0.000 claims abstract description 10
- 230000005499 meniscus Effects 0.000 claims abstract description 8
- 230000003287 optical effect Effects 0.000 claims description 20
- 238000003384 imaging method Methods 0.000 abstract description 9
- 238000005520 cutting process Methods 0.000 abstract description 7
- 201000009310 astigmatism Diseases 0.000 abstract description 4
- 230000004075 alteration Effects 0.000 abstract description 3
- 238000005553 drilling Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000004080 punching Methods 0.000 description 4
- 210000001747 pupil Anatomy 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
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- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/14—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/0005—Optical objectives specially designed for the purposes specified below having F-Theta characteristic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Lenses (AREA)
- Laser Beam Processing (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
Description
Claims (10)
- 一种远红外激光加工用 Fθ 镜头,其特征在于,包括沿入射光束的传输方向依次共轴设置的第一透镜、第二透镜及第三透镜;所述第一透镜为弯月形负透镜,所述第二透镜和第三透镜为弯月形正透镜;所述第一、第二、第三透镜的中间部分均向所述入射光束的传输方向凸出。
- 如权利要求 1 所述的远红外激光加工用 Fθ 镜头,其特征在于,所述第一透镜包括第一曲面和第二曲面,所述第二透镜包括第三曲面和第四曲面,所述第三透镜包括第五曲面和第六曲面,所述第一至第六曲面沿所述入射光束的传输方向依次排布;所述第一至第六曲面的曲率半径依次为: -50mm , -60mm , -68mm , -50mm , -500mm , -180mm ,公差均为 5% 。
- 如权利要求 2 所述的远红外激光加工用 Fθ 镜头,其特征在于,所述第一至第三透镜的中心厚度依次为: 5mm , 8mm , 8mm ,公差均为 5% 。
- 如权利要求 3 所述的远红外激光加工用 Fθ 镜头,其特征在于,所述第二曲面与第三曲面在光轴上的间距为 5mm ;所述第四曲面与第五曲面在光轴上的间距为 0.5mm ;各所述间距的公差均为 5% 。
- 如权利要求 1 所述的远红外激光加工用 Fθ 镜头,其特征在于,所述第一、第二、第三透镜的折射率与阿贝数之比为 1.74/0.026 ,公差为 5% 。
- 如权利要求 2 至 5 任一项所述的远红外激光加工用 Fθ 镜头,其特征在于,还包括第四透镜,位于所述第三透镜的出光侧,所述第四透镜包括第七曲面和第八曲面,所述第七曲面和第八曲面的曲率半径均为∞。
- 如权利要求 6 所述的远红外激光加工用 Fθ 镜头,其特征在于,所述第四透镜的折射率与阿贝数之比为 1.74/0.026 ,公差为 5% 。
- 如权利要求 6 所述的远红外激光加工用 Fθ 镜头,其特征在于,所述第四透镜的中心厚度为 3mm ,公差为 5% ;所述第六曲面与所述第七曲面在光轴上的间距为 4mm ,公差为 5% 。
- 一种激光加工设备,包括远红外激光器及用于聚焦远红外激光以进行激光加工的光学镜头,其特征在于,所述光学镜头采用权利要求 1~8 任一项所述的远红外激光加工用 Fθ 镜头。
- 如权利要求 9 所述的激光加工设备,其特征在于,所述远红外激光器的发光波长为 10640nm 。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2012/083845 WO2014067097A1 (zh) | 2012-10-31 | 2012-10-31 | 一种远红外激光加工用Fθ镜头及激光加工设备 |
Publications (3)
Publication Number | Publication Date |
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CN104769474A true CN104769474A (zh) | 2015-07-08 |
CN104769474A8 CN104769474A8 (zh) | 2017-02-08 |
CN104769474B CN104769474B (zh) | 2017-03-29 |
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CN201280076828.4A Active CN104769474B (zh) | 2012-10-31 | 2012-10-31 | 一种远红外激光加工用Fθ镜头及激光加工设备 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9739984B2 (zh) |
EP (1) | EP2908163B1 (zh) |
JP (1) | JP6019244B2 (zh) |
CN (1) | CN104769474B (zh) |
WO (1) | WO2014067097A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108169883A (zh) * | 2017-12-27 | 2018-06-15 | 大族激光科技产业集团股份有限公司 | 一种用于大范围清洗的激光镜头及激光*** |
CN108873257A (zh) * | 2018-07-11 | 2018-11-23 | 大族激光科技产业集团股份有限公司 | 透镜组及激光加工设备 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106662729B (zh) * | 2014-08-07 | 2019-09-17 | 大族激光科技产业集团股份有限公司 | 远红外成像透镜组、物镜及火灾火源探测仪 |
CN106471413B (zh) * | 2014-11-28 | 2019-07-05 | 大族激光科技产业集团股份有限公司 | F-θ型光刻镜头 |
CN109425962A (zh) * | 2017-08-30 | 2019-03-05 | 上海微电子装备(集团)股份有限公司 | 一种用于激光加工的F-theta镜头 |
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US5136412A (en) * | 1989-12-20 | 1992-08-04 | Canon Kabushiki Kaisha | Fθ lens and scanning optical system using the same |
CN101369047A (zh) * | 2008-04-28 | 2009-02-18 | 深圳市大族激光科技股份有限公司 | 光学镜头 |
CN101639565A (zh) * | 2009-04-29 | 2010-02-03 | 深圳市大族激光科技股份有限公司 | 激光应用大孔径的光学镜头 |
CN102313968A (zh) * | 2010-06-29 | 2012-01-11 | 深圳市大族激光科技股份有限公司 | 一种紫外激光fθ镜头、激光打标机及激光刻划机 |
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JPS56135815A (en) * | 1980-03-26 | 1981-10-23 | Minolta Camera Co Ltd | Lens for optical scanning |
JPH01130115A (ja) * | 1987-11-17 | 1989-05-23 | Konica Corp | レーザービーム用レンズ系 |
JP2840358B2 (ja) * | 1990-02-07 | 1998-12-24 | リコー光学株式会社 | 光走査装置のfθレンズ |
JP3121452B2 (ja) * | 1992-09-28 | 2000-12-25 | セイコーエプソン株式会社 | 光走査装置 |
JP3266350B2 (ja) * | 1993-01-18 | 2002-03-18 | リコー光学株式会社 | fθレンズおよび光走査装置 |
JPH0990216A (ja) * | 1995-09-22 | 1997-04-04 | Matsushita Electric Ind Co Ltd | テレセントリックfθレンズ |
JP3201394B2 (ja) * | 1999-08-10 | 2001-08-20 | 住友電気工業株式会社 | fθレンズ |
JP2004126194A (ja) * | 2002-10-02 | 2004-04-22 | Y E Data Inc | fθレンズ |
CN101093275A (zh) * | 2007-07-13 | 2007-12-26 | 中国科学院上海光学精密机械研究所 | 大口径激光成像镜头 |
CN101414047B (zh) * | 2008-04-28 | 2010-06-09 | 深圳市大族激光科技股份有限公司 | 光学镜头 |
CN101639564B (zh) * | 2009-04-29 | 2010-10-06 | 深圳市大族激光科技股份有限公司 | 激光应用大孔径的光学镜头 |
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2012
- 2012-10-31 US US14/439,410 patent/US9739984B2/en active Active
- 2012-10-31 WO PCT/CN2012/083845 patent/WO2014067097A1/zh active Application Filing
- 2012-10-31 CN CN201280076828.4A patent/CN104769474B/zh active Active
- 2012-10-31 JP JP2015540009A patent/JP6019244B2/ja active Active
- 2012-10-31 EP EP12887391.6A patent/EP2908163B1/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US5136412A (en) * | 1989-12-20 | 1992-08-04 | Canon Kabushiki Kaisha | Fθ lens and scanning optical system using the same |
CN101369047A (zh) * | 2008-04-28 | 2009-02-18 | 深圳市大族激光科技股份有限公司 | 光学镜头 |
CN101639565A (zh) * | 2009-04-29 | 2010-02-03 | 深圳市大族激光科技股份有限公司 | 激光应用大孔径的光学镜头 |
CN102313968A (zh) * | 2010-06-29 | 2012-01-11 | 深圳市大族激光科技股份有限公司 | 一种紫外激光fθ镜头、激光打标机及激光刻划机 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108169883A (zh) * | 2017-12-27 | 2018-06-15 | 大族激光科技产业集团股份有限公司 | 一种用于大范围清洗的激光镜头及激光*** |
CN108873257A (zh) * | 2018-07-11 | 2018-11-23 | 大族激光科技产业集团股份有限公司 | 透镜组及激光加工设备 |
Also Published As
Publication number | Publication date |
---|---|
CN104769474A8 (zh) | 2017-02-08 |
WO2014067097A1 (zh) | 2014-05-08 |
US9739984B2 (en) | 2017-08-22 |
US20150293333A1 (en) | 2015-10-15 |
CN104769474B (zh) | 2017-03-29 |
JP6019244B2 (ja) | 2016-11-02 |
EP2908163A1 (en) | 2015-08-19 |
EP2908163B1 (en) | 2017-10-04 |
JP2016504610A (ja) | 2016-02-12 |
EP2908163A4 (en) | 2016-08-03 |
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Correction item: Applicant Correct: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD.|Shenzhen Han's CNC Science and Technology Co., Ltd. False: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD.|Big nation of Shenzhen numerical control science and technology has company Number: 27 Volume: 31 |
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Correction item: Applicant Correct: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD.|Shenzhen Han's CNC Science and Technology Co., Ltd. False: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD.|Big nation of Shenzhen numerical control science and technology has company Number: 27 Page: The title page Volume: 31 |
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Effective date of registration: 20200612 Address after: 518101 workshop 5 / F, 1 / 2 / F, 14 / F, 17 / F, antuoshan hi tech Industrial Park, Xinsha Road, Shajing street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: SHENZHEN HAN'S CNC SCIENCE AND TECHNOLOGY Co.,Ltd. Address before: 518000 Shenzhen, Guangdong 518000 Co-patentee before: SHENZHEN HAN'S CNC SCIENCE AND TECHNOLOGY Co.,Ltd. Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. |
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Effective date of registration: 20200629 Address after: No. 9988 Nanshan District Shennan Road Shenzhen city Guangdong province 518057 Patentee after: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. Address before: 518101 workshop 5 / F, 1 / 2 / F, 14 / F, 17 / F, antuoshan hi tech Industrial Park, Xinsha Road, Shajing street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN HAN'S CNC SCIENCE AND TECHNOLOGY Co.,Ltd. |