WO2016082172A1 - 激光刻线用光学镜头 - Google Patents

激光刻线用光学镜头 Download PDF

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Publication number
WO2016082172A1
WO2016082172A1 PCT/CN2014/092429 CN2014092429W WO2016082172A1 WO 2016082172 A1 WO2016082172 A1 WO 2016082172A1 CN 2014092429 W CN2014092429 W CN 2014092429W WO 2016082172 A1 WO2016082172 A1 WO 2016082172A1
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WIPO (PCT)
Prior art keywords
lens
curved surface
laser engraving
optical
protective
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PCT/CN2014/092429
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English (en)
French (fr)
Inventor
孙博
李家英
周朝明
陈玉庆
高云峰
Original Assignee
大族激光科技产业集团股份有限公司
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Application filed by 大族激光科技产业集团股份有限公司 filed Critical 大族激光科技产业集团股份有限公司
Priority to CN201480080729.2A priority Critical patent/CN106537216B/zh
Priority to JP2017518212A priority patent/JP6404465B2/ja
Priority to US15/518,048 priority patent/US10213870B2/en
Priority to DE112014007214.1T priority patent/DE112014007214B4/de
Priority to PCT/CN2014/092429 priority patent/WO2016082172A1/zh
Publication of WO2016082172A1 publication Critical patent/WO2016082172A1/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
    • G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
    • G02B13/002—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having at least one aspherical surface
    • G02B13/0035—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having at least one aspherical surface having three lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/18—Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes

Definitions

  • the present invention relates to the field of optical lenses, and more particularly to an optical lens used as a reticle in a laser processing apparatus.
  • An optical lens for laser engraving comprising a first lens, a second lens, and a third lens arranged in a coaxial manner along a transmission direction of the incident light, wherein the first lens and the second lens are meniscus lenses,
  • the third lens is a lenticular lens
  • the first lens includes a first curved surface and a second curved surface
  • the second lens includes a third curved surface and a fourth curved surface
  • the third lens includes a fifth curved surface and a sixth curved surface; the first curved surface to the sixth curved surface
  • the curved surfaces are arranged in sequence along the transmission direction of the incident light
  • the curvature radii of the first to sixth curved surfaces are: -47 ⁇ 5% mm, ⁇ , -218 ⁇ 5% mm, -81 ⁇ 5% mm, 778 ⁇ 5% mm, -142 ⁇ 5% mm;
  • the center thicknesses of the first lens, the second lens, and the third lens are: 4 ⁇ 5% mm, 15 ⁇ 5% mm, and 18 ⁇ 5% mm.
  • the ratio of the refractive index to the Abbe number of the first lens, the second lens, and the third lens are: (1.50/62) ⁇ 5%, (1.80/25) ⁇ 5%, (1.80/25) ⁇ 5%.
  • the pitch of the first lens to the second lens is 12 ⁇ 5% mm; the pitch of the second lens to the third lens is 0.3 ⁇ 5% mm.
  • the optical lens for laser engraving further includes a protection lens disposed on a side of the third lens adjacent to the image side.
  • the protective lens is a flat glass
  • the protective lens has a thickness of 2 ⁇ 5% mm
  • the distance between the protective lens and the third lens is 2 ⁇ 5% mm.
  • the parameters of the optical lens for laser engraving are as follows:
  • the above-mentioned optical lens for laser engraving adopts a lens of F- ⁇ structure, which not only has high quality of the engraving line, but also ensures that the engraved line is “thin and thin” and “deep”, and the engraving speed is fast, and the efficiency is higher than that of the conventional lithography lens.
  • FIG. 1 is a schematic structural view of an optical lens for laser engraving according to an embodiment
  • FIG. 2 is a beamlet aberration diagram of an optical lens for laser engraving according to an embodiment
  • FIG. 3 is a geometrical aberration diagram of an optical lens for laser engraving according to an embodiment
  • Fig. 4 is a graph showing a modulation transfer function of an optical lens for laser engraving according to an embodiment.
  • Fig. 1 is a schematic view showing the structure of an optical lens for laser engraving according to an embodiment, and for convenience of explanation, only parts related to the present embodiment are shown.
  • the negative sign indicates that the light propagates from left to right, and the intersection of the spherical surface and the main optical axis is taken as the standard, and the spherical center of the sphere is left at the point, and the radius of curvature is negative, otherwise, the center of the sphere At the right point at this point, the radius of curvature is positive, the same applies hereinafter.
  • an optical lens for laser engraving is a telecentric reticle F ⁇ lens including a first lens L1, a second lens L2, and a third coaxially disposed along a transmission direction of incident light.
  • the first lens L1 is a meniscus lens including a first surface S1 and a second surface S2 which are disposed opposite each other.
  • the first surface S1 is convex toward the image side, and has a radius of curvature of -47 mm; the second surface S2 is a plane, and the radius of curvature is ⁇ , that is, infinity.
  • the center thickness d1 of the first lens L1 i.e., the thickness of the first lens L1 on the optical axis
  • the ratio of the refractive index of the first lens L1 to the Abbe number is 1.50/62.
  • the second lens L2 is a meniscus lens including a third surface S3 and a fourth surface S4 which are disposed opposite each other.
  • the third surface S3 is convex toward the image side, and has a radius of curvature of -218 mm
  • the fourth surface S4 is also convex toward the image side, and has a radius of curvature of -81 mm.
  • the center thickness d3 of the second lens L2 is 15 mm.
  • the ratio of the refractive index of the second lens L2 to the Abbe number is 1.80/25.
  • the third lens L3 is a lenticular lens including a fifth surface S5 and a sixth surface S6 which are disposed opposite each other.
  • the fifth surface S5 is convex toward the object side and has a radius of curvature of 778 mm.
  • the sixth curved surface S6 is convex toward the image side and has a radius of curvature of -142 mm.
  • the center thickness d5 of the third lens L3 is 18 mm.
  • the ratio of the refractive index of the third lens L3 to the Abbe number is 1.80/25.
  • the first curved surface S1 to the sixth curved surface S6 are sequentially arranged in the transport direction of the incident light.
  • the protective lens L4 is provided on the side of the third lens L3 close to the image side.
  • the protective lens L4 is a flat glass, that is, both surfaces thereof are planes having a radius of curvature of ⁇ .
  • the center thickness d7 of the protective lens L4 is 2 mm.
  • the ratio of the refractive index of the protective lens L4 to the Abbe number is 1.50/62.
  • Each of the above parameters is not the only option, and there is a tolerance range of 5%, which allows each parameter to vary within ⁇ 5%. It can be understood that the protective lens L4 can also be omitted.
  • the present invention also defines the distance between the first lens L1 and the second lens L2, the distance between the second lens L2 and the third lens L3, and the distance between the third lens L3 and the protective lens L4.
  • the distance d2 between the exit surface (the second surface S2) of the first lens L1 and the incident surface (the third surface S3) of the second lens L2 on the optical axis is 12 mm, and the tolerance of the pitch d2 is 5 %.
  • the distance d4 between the exit surface (fourth surface S4) of the second lens L2 and the incident surface (fifth surface S5) of the third lens L3 on the optical axis is 0.3 mm, and the tolerance of the pitch d4 is 5%.
  • the distance d6 between the exit surface of the third lens L3 (the sixth surface S6) and the incident surface of the protective lens L4 on the optical axis is 2 mm, and the tolerance of the pitch d6 is 5%.
  • the above-mentioned optical lens for laser engraving has a focal length f of 160 mm, an outer diameter ⁇ of 7 mm, a marking range A of 100*100 mm, and an operating wavelength ⁇ of 1064 nm.
  • the field curvature and distortion of the optical lens for laser engraving reach a theoretical level.
  • the size of the circle of the entire image plane is within 6 ⁇ m, which has reached the desired value.
  • the MTF of the laser lens optical lens is still greater than 0.3, which has achieved the desired effect.
  • the optical lens for laser engraving of the present invention adopts an F- ⁇ structure lens, which not only has high quality of the engraving line, but also ensures that the engraved line is “thin and thin” and “deep”, and can realize the depth of line and the line width.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Lenses (AREA)

Abstract

一种激光刻线用光学镜头，包括沿入射光线的传输方向依次共轴设置的第一透镜（L1）、第二透镜（L2）、第三透镜（L3），其中第一透镜（L1）和第二透镜（L2）为弯月透镜，第三透镜（L3）为双凸透镜；第一透镜（L1）包括第一曲面（S1）和第二曲面（S2），第二透镜（L2）包括第三曲面（S3）和第四曲面（S4），第三透镜（L3）包括第五曲面（S5）和第六曲面（S6）；第一曲面（S1）至第六曲面（S6）沿入射光线的传输方向依次排布；第一至第六曲面的曲率半径依次为：-47±5％mm，∞，-218±5％mm，-81±5％mm，778±5％mm，-142±5％mm；第一透镜、第二透镜及第三透镜的中心厚度依次为：4±5％mm，15±5％mm，18±5％mm。该激光刻线用光学镜头不仅刻线质量高，且刻线速度快，效率高于传统的光刻镜头。

Description

激光刻线用光学镜头
【技术领域】
本发明涉及光学镜头领域，特别是涉及一种激光加工设备中用作刻线的光学镜头。
【背景技术】
随着手机、个人电脑和平板电视等电子产品的发展，应用于这些产品上的面板的生产需求也逐渐增大。在面板的生产过程中，需要用激光刻划面板，对面板进行划线并切割，而且为了保证面板符合产品的技术要求，在激光刻划面板时，要保证刻线“又细”，“又深”，因此，对用于激光标刻机的光刻镜头的要求越来越高。
传统的激光标刻机采用单个光刻镜头或者多个（一般最多为三个）光刻镜头。使用单个光刻镜头虽然能提高刻线质量，但需要工作台配合来回划线或切割，刻线速度非常慢。至于使用多个刻线镜头，虽然能提高刻线速度，但是无法保证一样的刻线深度和线宽大小。
【发明内容】
基于此，有必要提供一种刻线质量高且刻线速度快的激光刻线用光学镜头。
一种激光刻线用光学镜头，包括沿入射光线的传输方向依次共轴设置的第一透镜、第二透镜、第三透镜，其中所述第一透镜和所述第二透镜为弯月透镜，所述第三透镜为双凸透镜；
所述第一透镜包括第一曲面和第二曲面，所述第二透镜包括第三曲面和第四曲面，所述第三透镜包括第五曲面和第六曲面；所述第一曲面至第六曲面沿入射光线的传输方向依次排布；
所述第一至第六曲面的曲率半径依次为：-47±5%mm，∞，-218±5%mm，-81±5%mm，778±5%mm，-142±5%mm；
所述第一透镜、第二透镜及第三透镜的中心厚度依次为：4±5%mm，15±5%mm，18±5%mm。
在其中一个实施例中，所述第一透镜、第二透镜及第三透镜的折射率与阿贝数的比例依次为：(1.50/62)±5%、(1.80/25) ±5%、(1.80/25) ±5%。
在其中一个实施例中，所述第一透镜至所述第二透镜的间距为12±5%mm；所述第二透镜至所述第三透镜的间距为0.3±5%mm。
在其中一个实施例中，所述激光刻线用光学镜头还包括一保护透镜，所述保护透镜设于所述第三透镜靠近像方的一侧。
在其中一个实施例中，所述保护透镜为平板玻璃，所述保护透镜的厚度为2±5%mm；所述保护透镜与所述第三透镜的间距为2±5%mm。
在其中一个实施例中，所述激光刻线用光学镜头的参数如下：
ƒ=160mm；Φ=7mm；
打标范围：A=100*100mm²；
工作波长λ=1064nm。
上述激光刻线用光学镜头采用F-θ结构的镜头，不仅刻线质量高，保证刻线“又细”，“又深”，且刻线速度快，效率高于传统的光刻镜头。
【附图说明】
通过附图中所示的本发明的优选实施例的更具体说明，本发明的上述及其它目的、特征和优势将会变得更加清晰。在全部附图中相同的附图标记指示相同的部分，且并未刻意按实际尺寸等比例缩放绘制附图，重点在于示出本发明的主旨。
图1为一实施例的激光刻线用光学镜头的结构示意图；
图2为一实施例的激光刻线用光学镜头的细光束象差图；
图3为一实施例的激光刻线用光学镜头的几何像差图；
图4为一实施例的激光刻线用光学镜头的调制传递函数曲线图。
【具体实施方式】
为使本发明的上述目的、特征和优点能够更加明显易懂，下面结合附图对本发明的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本发明。但是本发明能够以很多不同于在此描述的其它方式来实施，本领域技术人员可以在不违背本发明内涵的情况下做类似改进，因此本发明不受下面公开的具体实施的限制。
图1为一实施例的激光刻线用光学镜头的结构示意图，为了便于说明，仅示出了与本实施例相关的部分。
在本实施例的光学***中，负号表示光从左向右传播，以球面和主光轴的交点为准，球面的球心在该点以左，则曲率半径为负，反之，球心在在该点以右，则曲率半径为正，以下同理。
如图1所示，一实施例的激光刻线用光学镜头是一种远心刻线Fθ镜头，其包括沿入射光线的传输方向共轴设置的第一透镜L1、第二透镜L2、第三透镜L3和保护透镜L4。
第一透镜L1为弯月透镜，其包括相对设置的第一面S1和第二面S2。第一面S1向像方凸出，其曲率半径为-47mm；第二面S2为平面，曲率半径为∞，即无穷大。第一透镜L1的中心厚度d1（即第一透镜L1在光轴上的厚度）为4mm。第一透镜L1的折射率与阿贝数的比例为1.50/62。上述各参数并非唯一选择，均存在5%的公差范围，即允许各参数在±5%范围内变化。
第二透镜L2为弯月透镜，其包括相对设置的第三面S3和第四面S4。第三面S3向像方凸出，其曲率半径为-218mm，第四面S4也向像方凸出，其曲率半径为-81mm。第二透镜L2的中心厚度d3为15mm。第二透镜L2的折射率与阿贝数的比例为1.80/25。上述各参数并非唯一选择，均存在5%的公差范围，即允许各参数在±5%范围内变化。
第三透镜L3为双凸透镜，其包括相对设置的第五面S5和第六面S6。第五面S5向物方凸出，其曲率半径为778mm。第六曲面S6向象方凸出，其曲率半径为-142mm。第三透镜L3的中心厚度d5为18mm。第三透镜L3的折射率与阿贝数的比例为1.80/25。上述各参数并非唯一选择，均存在5%的公差范围，即允许各参数在±5%范围内变化。
第一曲面S1至第六曲面S6沿入射光线的传输方向依次排布。
保护透镜L4设于第三透镜L3靠近像方的一侧。本实施例中，保护透镜L4为平板玻璃，即其两个面均为曲率半径为∞的平面。保护透镜L4的中心厚度d7为2mm。保护透镜L4的折射率与阿贝数的比例为1.50/62。上述各参数并非唯一选择，均存在5%的公差范围，即允许各参数在±5%范围内变化。可以理解，保护透镜L4也可省略。
另外，本发明还对第一透镜L1和第二透镜L2之间的距离，第二透镜L2与第三透镜L3之间的距离，及第三透镜L3和保护透镜L4之间的距离进行了限定，本实施例中，第一透镜L1的出射面（第二面S2）与第二透镜L2的入射面（第三面S3）在光轴上的间距d2为12mm，间距d2的公差范围为5%。第二透镜L2的出射面（第四面S4）与第三透镜L3的入射面（第五面S5）在光轴上的间距d4为0.3mm，间距d4的公差范围为5%。第三透镜L3的出射面（第六面S6）与保护透镜L4的入射面在光轴上的间距d6为2mm，间距d6的公差范围为5%。
上述激光刻线用光学镜头的焦距f为160mm，外圆直径Φ为7mm，标刻范围A为100*100mm，工作波长λ为1064nm。该激光刻线用光学镜头在刻线时，线条的深度可达到0.5mm；若数值孔径角sinα=0.02，则线条的宽度可达到0.03mm。
图2-4分别示出了上述激光刻线用光学镜头的细光束象差图、几何象差图及调制传递函数曲线图（传递函数MTF图）。
如图2所示，该激光刻线用光学镜头的场曲和畸变均达到了理论值的水平。
如图3所示，整个像面的弥散圆的大小都在6μm以内，已达到理想的值。
如图4所示，当分辨率达到20line/mm时，该激光刻线用光学镜头的MTF仍大于0.3，已达到了理想效果。
由以上数据可知，本发明的激光刻线用光学镜头采用F-θ结构的镜头，不仅刻线质量高，保证刻线“又细”，“又深”，且能够实现刻线深度和线宽的一致性，刻线速度快，效率高于传统的光刻镜头。
以上所述实施例仅表达了本发明的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对本发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和改进，这些都属于本发明的保护范围。因此，本发明专利的保护范围应以所附权利要求为准。

Claims (6)

  1. 一种激光刻线用光学镜头，其特征在于，包括沿入射光线的传输方向依次共轴设置的第一透镜、第二透镜、第三透镜，其中所述第一透镜和所述第二透镜为弯月透镜，所述第三透镜为双凸透镜；
    所述第一透镜包括第一曲面和第二曲面，所述第二透镜包括第三曲面和第四曲面，所述第三透镜包括第五曲面和第六曲面；所述第一曲面至第六曲面沿入射光线的传输方向依次排布；
    所述第一至第六曲面的曲率半径依次为：-47±5%mm，∞，-218±5%mm，-81±5%mm，778±5%mm，-142±5%mm；
    所述第一透镜、第二透镜及第三透镜的中心厚度依次为：4±5%mm，15±5%mm，18±5%mm。
  2. 根据权利要求1所述的激光刻线用光学镜头，其特征在于，所述第一透镜、第二透镜及第三透镜的折射率与阿贝数的比例依次为：(1.50/62)±5%、(1.80/25) ±5%、(1.80/25) ±5%。
  3. 根据权利要求1所述的激光刻线用光学镜头，其特征在于，所述第一透镜至所述第二透镜的间距为12±5%mm；所述第二透镜至所述第三透镜的间距为0.3±5%mm。
  4. 根据权利要求1所述的激光刻线用光学镜头，其特征在于，还包括一保护透镜，所述保护透镜设于所述第三透镜靠近像方的一侧。
  5. 根据权利要求4所述的激光刻线用光学镜头，其特征在于，所述保护透镜为平板玻璃，所述保护透镜的厚度为2±5%mm；所述保护透镜与所述第三透镜的间距为2±5%mm。
  6. 根据权利要求1所述的激光刻线用光学镜头，其特征在于，所述激光刻线用光学镜头的参数如下：
    ƒ=160mm；Φ=7mm；
    打标范围：A=100*100mm²；
    工作波长λ=1064nm。
PCT/CN2014/092429 2014-11-28 2014-11-28 激光刻线用光学镜头 WO2016082172A1 (zh)

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US15/518,048 US10213870B2 (en) 2014-11-28 2014-11-28 Optical lenses for laser marking
DE112014007214.1T DE112014007214B4 (de) 2014-11-28 2014-11-28 Optische linsen zur laserbeschriftung
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CN106471413B (zh) * 2014-11-28 2019-07-05 大族激光科技产业集团股份有限公司 F-θ型光刻镜头
FR3091612B1 (fr) * 2019-01-07 2021-01-29 Konatic procédé d’association d’un marquage à un objet

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