WO2013064728A2 - Dispositif et procédé de traitement de surface - Google Patents

Dispositif et procédé de traitement de surface Download PDF

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Publication number
WO2013064728A2
WO2013064728A2 PCT/FI2012/051037 FI2012051037W WO2013064728A2 WO 2013064728 A2 WO2013064728 A2 WO 2013064728A2 FI 2012051037 W FI2012051037 W FI 2012051037W WO 2013064728 A2 WO2013064728 A2 WO 2013064728A2
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WO
WIPO (PCT)
Prior art keywords
mixing space
casing
surface treatment
treatment device
droplets
Prior art date
Application number
PCT/FI2012/051037
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English (en)
Other versions
WO2013064728A3 (fr
Inventor
Simo Tammela
Tuomo MÄÄTTÄ
Original Assignee
Beneq Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beneq Oy filed Critical Beneq Oy
Publication of WO2013064728A2 publication Critical patent/WO2013064728A2/fr
Publication of WO2013064728A3 publication Critical patent/WO2013064728A3/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/14—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying for coating elongate material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/129—Flame spraying

Definitions

  • the present invention relates to a surface treatment device and method according to preambles of the independent claims.
  • Surface treatment refers here to a layering process where a surface layer of a substrate is modified by allowing particles to diffuse in a surface layer of the substrate matrix, or by depositing particles on the substrate surface such that a layer is produced on the substrate.
  • Particles used for such surface treatments are typically very small, the mean particle diameter ranging from 10 to 100 nm. Particles of this size are typically generated in a particle synthesis process where precursor chemicals are exposed to intensive heat of a thermal reactor. In the heat the precursor chemicals undergo specific thermochemical and -physical reactions that lead to development of desired particles.
  • the particle synthesis process typically incorporates a point source that ejects a combination of precursor substances for surface treatment particles, and a thermal reactor that transforms the combination of precursor substances to a progressing particle flow.
  • the thermal reactor is a flame into which the nozzle outlet channels from one or more nozzles feed materials, either mixed together or through separate outlets.
  • An object of the present invention is thus to provide a surface treatment device and a surface treatment method that provide improved uniformity in the resulting treated surface.
  • the object of the invention is achieved by a surface treatment device and surface treatment method, which are characterized by what is stated in the independent claims.
  • the preferred embodiments of the invention are disclosed in the dependent claims.
  • the invention is based on introducing to the surface treatment device a first mixing space into which atomised droplets that carry precursors of the desired surface treatment processes are input.
  • liquid substances carrying the precursors are evaporated, and the resulting substances mix into a uniform composition aerosol in which particles flow from the first mixing space.
  • the resulting aerosol flow may then be exposed to the extreme temperatures applied in flame-based surface treatment processes for particle generation. Due to the improved spatial uniformity of the particles flowing into the flame, the spatial uniformity of the resulting surface treatment is significantly improved.
  • Figure 1 an embodiment of a surface treatment device
  • Figure 2A illustrates a side view of another embodiment of the surface treatment device
  • Figure 2B illustrates a front view of the other embodiment of the surface treatment device
  • Figure 2B illustrates a bottom view of the other embodiment of the surface treatment device
  • Figure 3 illustrates front and side views of a configuration in an em- bodiment of the invention
  • Figure 4 illustrates a side view of an embodiment of a surface treatment device
  • Figure 5 illustrates a side view of another embodiment of a surface treatment device
  • Figure 6 illustrates stages of an embodiment of a surface treatment method.
  • a surface treatment device refers here to an apparatus that generates particles applicable for a particular type of surface treatment and directs them towards a surface to be treated.
  • the surface treatment is configured to perform a particle synthe- sis process that takes place in a defined temperature range.
  • temperatures for particle generation are achieved in flame-based thermal reactors where particle generation mainly occurs in temperatures above 1700 degrees Celsius.
  • the flame which may be a hydrogen-oxygen flame, is fed with precursor chemicals, and in the intense heat of the flame, the precursor chemicals undergo thermochemical and -physical reactions, ultimately leading to the synthesis of particulate matter on or in the surface to be treated.
  • the particles produced for the surface treatment principally exhibit a size distribution ranging from 10 to 10000 nm, depending on the precursor composition and process parameters.
  • Figure 1 shows an embodiment of a surface treatment device according the invention.
  • the surface treatment device is suitable for depositing defined particles on a substrate and comprises a source unit 100, a first mixing space 150, and means 170 for providing a thermal reactor.
  • the source unit 100 is configured to input into the first mixing space 150 atomised droplets of a liquid substance carrying one or more precursors of the defined particles to be used in deposition.
  • the source unit 100 comprises reservoirs 102, 104, 106 of various substances necessary for the generation of the particles.
  • the reservoirs 102, 104, 106 have been illustrated as storage containers, but for a person skilled in the art it is clear that a reservoir may be implemented also in other ways, for example, as a feed connection from a remote material supply system.
  • the reservoirs comprise at least a precursor source 102 that provides one or more precursors of the defined particles in a solution that is in liquid form.
  • the liquid mix- ture from the precursor source is atomized into droplets.
  • a droplet refers here to a very small sized drop, the diameter of a droplet typically being from 100 urn down to sub micron.
  • the source unit comprises also an atomizer 108 that may be implemented, for example, as a two-fluid atomizer where gas is used to break up the liquid feed into droplets.
  • the liquid droplets and the atomizing gas form an aerosol that sprays out of the nozzle 108 and into the first mixing space 150.
  • Other methods of atomization like a vibrating ultrasound plate, may naturally be applied without deviating from the scope of protection.
  • the first mixing space 150 is formed by a casing 152 that encloses an impermeable volume in which input substances are confined to mix together.
  • the substances move in the first mixing space along the form of the casing and according to dynamics of flows that stream in and out of the casing.
  • Impermeable in this context means that the first mixing space 150 confined by the casing 152 is detached from ambient environment around the casing 152 such that fluids (gas and/or liquids) do not substantially enter or exit the first mixing space 150 through the casing 152. Heat or electromagnetic radiation may, however, be transferred through the casing 152.
  • Substances exit the impermeable first mixing space through an outlet 154 that outputs an aerosol flow 166 from the first mixing space.
  • the outlet 154 is advantageously opposite to the feeds of reservoirs 102, 104, 106 and may be implemented, for example, as a second nozzle that constricts the cross-sectional area of the first mixing space in the direction of the flow 166.
  • a thermal reactor 170 represents here means for providing a local distribution of heat such that objects traversing locations of that distribution are exposed to the heat accordingly.
  • the thermal reactor 170 is arranged in proximity to the outlet 154 of the casing 152 and positioned such that the aerosol flow 166 conning out of the first mixing space is exposed to the intensive heat of the thermal reactor 170.
  • the heat of the thermal reactor 170 is generated by burning combustible substances and comprises two burners 172, 174 installed in the immediate vicinity of the outlet 154 in the casing 152.
  • the surface treatment device of the embodiment comprises an evaporation mechanism for evaporating liquid substances of the droplets in the first mixing space.
  • One or more liquid substances in the solution coming from the precursor source 102 carry one or more precursors of particles used in deposition.
  • the aerosol flow 166 coming out of the outlet is mainly formed of an aerosol of gases and precursors of the defined particles in solid form.
  • the precursors coming out of the first mixing space may then go through the conventional reaction, condensation, nucleation and coagulation processes for synthesis of particles of flame-based deposition.
  • evaporation in the first mixing space is implemented by controlled preburning where temperature within the preburn- ing space is limited to a range above the evaporation temperature of one, more or advantageously all liquid substances in the mix that is input from the precursor source 102.
  • the reservoirs may comprise also a source 104 for burning substances.
  • Burning substances refer here to a mixture of one or more combustible fluids that may be ignited to burn in an exothermic process in the first mixing space 150.
  • Combustible fluids typically comprise combustible gases, like hydrogen, methane, propane or butane.
  • the reservoirs may comprise further a source 106 for burn control substances.
  • Burn control substances refer here to fluids that effect on a burning process, typically in relation to their relative proportion in the space where burning takes place.
  • Burn control substances often comprise an oxygen carrying gas, for example air, oxygen, or ozone.
  • Burn control substances may also comprise one or more inert gases, like nitrogen or carbon dioxide.
  • the liquid droplets, burning substances and burn control substances from their respective reservoirs 102, 104, 106 are input via their respective feeds into the first mixing space 150 where they are efficiently mixed, evaporated and form a homogeneous combustible aerosol.
  • Figure 1 only illustrates functional elements necessary for de- scribing the present embodiment.
  • the functional elements may be implement- ed in various ways.
  • a combustible gas or a burn control gas may be partially fed in as an atomizing gas of the two-fluid atomizer.
  • the first mixing space 150 comprises a control mechanism 156 for adjusting burning temperature in the first mixing space to the predefined tem- perature range.
  • the control mechanism is illustrated by means of a controller 156, which is an operational unit that interconnects sensors 158, flow control elements 160, 162, 164 and control logic 168. In the controller these elements are functionally connected such that the one or more sensors 158 monitor burning conditions within the process space 150, the one or more flow control elements 160, 162, 164 control input flows from individual feeds, and the control logic 157 adjusts the input flows in response to input from the sensor signals.
  • Flow control elements 160, 162, 164 may be implemented as control valves or in various other ways, well known to a person skilled in the art.
  • the sensors 158 advantageously comprise a thermosen- sor by means of which the controller 156 may, during operation, monitor the prevailing temperature within the first mixing space 150.
  • Local temperatures within the first mixing space vary, depending on the flow conditions in the applied configuration.
  • the temperature measured in outer or inner surface of the casing 152 is considered to represent the tem- perature in the first mixing space 150.
  • the controller 156 checks the temperature within the first mixing space 150, and if it detects that the temperature rises above or below predefined control temperature thresholds, it triggers feed of heat to the first mixing space, in the present embodiment this is done by implementing a control oper- ation in any of the feeds of sources 102, 104, 106. It is noted that the configuration shown in Figure 1 is exemplary, the controller 156 may implemented in various other ways, well known to a person skilled in the art. For example, control operations and logic of the controller may be implemented manually by the operator of the surface treatment device.
  • a lower threshold for the temperature range applied in the first mixing space is, according to the invention, defined to be higher than evaporation temperature of at least one liquid substance that carries at least one precursor of the applied surface treatment particles in the droplets within the first mixing space.
  • the lower threshold is adjusted to ensure that substantially all liquid elements in the first mixing space evaporate and a dry aerosol flow 166 is achieved.
  • temperatures on the outer surface of the casing are 50-100 degrees Celsius above the evaporation point of a substance that provides at least half of the volume of the liquid mix. In such conditions, the liquid sub- stances in the droplets evaporate and condensation of liquids on inner surfaces of the first mixing space is avoided.
  • the higher threshold is defined according to a number of requirements. It is understood that when temperature is raised, at some point the pressure of steam from the evaporating droplets begins to prevent penetration of heat to the droplets. Optimally heating of the first mixing space should be adjusted to avoid such evaporation conditions. In addition, when the casing 152 is continuously exposed to burning temperatures, it easily begins to deteriorate. In order to achieve uniform particle flow from the first mixing space, the structure in the outlet of the casing, must be robust and maintain its dimen- sions well also in continued use. The applied configuration should also allow preparation of the casing from economically viable refractory materials, like iron, steel and aluminium.
  • the higher threshold of the temperature range preferably does not exceed the rated operating temperature of the casing material, and is typically in the order of 10-500 degrees Celsius above the lower threshold.
  • An example of applicable casing materials is heat resisting steel 353MA, the rated operating temperature of which is about 1000 degrees Celsius in air. In a temperature range well below 1000 degrees Celsius, advantageously below 800 degrees Celsius, the rated operating temperature of a heat resisting metal casing is not exceeded, the shape of the casing remains constant during use, and correspondingly the effect of the shape of the casing to the flow remains predictable even in industrial use. At the same time, optimal evaporation conditions are achieved and the main part of particle synthesis processes take place outside the first mixing space.
  • liquid mixtures are solvents that evaporate in relatively low temperatures, and the temperature measured on the outer surface varies between 300-800 degrees Celsius. Within this temperature range typical liquid substances evaporate effectively, most of the particle generation processes do not yet take place and the casing providing the first mixing space can be produced from conventional inexpensive materials.
  • the burning temperatures of normal particle generating flames are typically well above the temperature range applied in the first mixing space.
  • the controller 156 may, for example, decrease flow from feed for the source 104 of the burning substances, and/or change the composition of burn control substances. Reduction in the amount of available oxygen within the confined first mixing space 150 effectively slows the burning process, and thereby decreases the temperature within the first mixing space.
  • burn control substances from feed 105 may be used to control the flame and cool the first mixing space to a desired temperature range.
  • the device may comprise a further cooling element (not shown) connected to the body of the casing 152 to deliver heat by conduction or convection away from the first mixing space.
  • the controller 156 may comprise, or be connected to a conductive element that directs heat to the wall of the casing and thereby causes conduction of heat through the body of the casing 152 into the first mixing space.
  • An additional flow of cooling gas may also be conducted into the first mixing space for the purpose.
  • Electromagnetic radiation of various wavelengths for example in form of microwaves or infrared light (gas laser) may be guided into the first mixing space to act on the droplets.
  • the source unit 100 does not need to provide combustible substances and/or burn control substances into the first mixing space 150.
  • Mixing of the inlet substances within the first mixing space 150 may be enhanced by form and design of the casing.
  • separate flow con- trol elements may be arranged into the first mixing space 150.
  • the thermal reactor comprises a flame 176 to which substances flowing out of the first mixing space are exposed.
  • the speed of particles within the flame 176 increases and deposition of the particles on or in the treated surface of the substrate 178 intensifies.
  • the high temperature gas / aerosol flow may heat the treated surface of an opposing substrate 178 such that particles within the flow can diffuse into the substrate 178.
  • the particle flow may reach temperatures where also thermophoresis assists deposition of the particles on the treated surface.
  • the means for providing the thermal reactor comprises burners 172, 174 that subject the flow of particles 166 to a uniform oxygen (O 2 ) flow, which boosts the burning. Due to this, the temperature of the flame 176 raises to the higher levels applied in flame-based deposition processes.
  • O 2 uniform oxygen
  • the confined evaporation facilitates extraction of precursor particles from point sources and mixing them into a spatially uniform flow that extends throughout a larger scale outlet.
  • the improved uniformity of the flow shows as improved uniformity of the resulting deposition.
  • the configuration thus improves surface treatment results achievable with a point source.
  • a number of point sources may be combined into one source configuration that feeds an extended process space where precursors of the point sources efficiently mix. This generates a uniform flow that may be output through a correspondingly extended outlet to deposit larger areas at one time.
  • Block charts of Figures 2A to 2C illustrate a configuration applicable for precursor flow generation in an embodiment of a surface treatment device where an extended uniform flow is used for surface treatment of larger-scale planar objects.
  • Figure 2A shows a side view
  • Figure 2B a top view
  • Figure 2C a bottom view of the surface treatment device of the embodiment.
  • a plurality of point sources 20, 21 , 22, 23, 24 are arranged into a row.
  • a casing 26 encloses a first mixing space 25 that extends into the direc- tion of the row and the row of point sources 20, 21 , 22, 23, 24 are connected to one side of the casing 26.
  • In the opposite side of the casing there is an elongated, typically linear outlet 27.
  • each of the point sources feeds into the first mixing space 25 within the casing 26 a spray of atomised droplets.
  • the droplets carry one or more precursors of particles used for deposition in the surface treatment device.
  • liquid substances of the droplets are evaporated within the first mixing space 25 and efficiently mix into a flow that streams out of the linear outlet 27.
  • Figure 3 illustrates front and side views of a configuration in another embodiment of a surface treatment device according to the invention.
  • the con- figuration is mainly the same as in Figure 1 , so basic information on elements may be referred from description of Figure 1 .
  • the size of the first mixing space advantageously matches with the size of the nozzle. For safety reasons one typically tries to minimise extensive volumes that comprise combustible substances.
  • precursor substances are atomized into separate first mixing spaces, flow adjustment chambers 30, 31 , 32, 33 and droplets are heated therein such that evaporation occurs and precursors carried by the droplets efficiently mix into a flow of gas and particles.
  • the outlets of separate flow adjustment chambers 30, 31 , 32, 33 are conveyed into a shared deposition element 34.
  • the deposition element is a chamber-like hollow casing that provides a second mixing space for flows from two or more first mixing spaces.
  • the deposition element has an inlet side that incorporates the outlets of two or more first mixing spaces, and an outlet side that incorporates one or more openings from which substances in the deposition element may flow out.
  • the outlet side is typically opposite to the inlet side, but the flows mix efficiently in the deposition element so other inlet-outlet side configurations may be applied, as well.
  • the inlet side of the deposition element is rectangular and provides a connection for the four flow adjustment chambers of four nozzles.
  • each of the flow adjustment chambers feeds in a flow of gas and particles through a circular opening.
  • the distance between such circular openings is of the order of centimetres.
  • the outlet side of the deposition element comprises an elongated opening, the area of which is considerably smaller than the area of the rectangular inlet side.
  • the outlet side may be tapered such that the cross-section of the outgoing flow reduces on its way towards the opening.
  • the tapering promotes creation of a uniform flow and at the same time may increase the velocity of the particles before they exit from the deposition element.
  • the deposition element comprises a number of accelerating substance inlets 35 that are connected to a reservoir of one or more accelerating substances (not shown).
  • the type of accelerating substance depends on the selected method previously used for the controlled heating in the flow adjustment chamber. For example, if heating has been provided by burning, and burning in the flow adjustment chambers has been controlled by restricting availability of oxygen for the burning process, accelerating substance may comprise oxygen. If burning in the flow adjustment chambers has been restricted by availability of combustible substances in the flow, or if heating has been provided by some other way than burning, acceler- ating substance may comprise one or more combustible substances.
  • the accelerating substances are typically in gaseous form so inlet openings may typically be positioned with of the order of millimetre distances. As a comparison, distances between atomizing nozzles typically need to be in the order of centimetres. Due to the two-phased chamber struc- ture of the present embodiment, the combustible substances may be efficiently mixed with the aerosol that carries the precursors, and the advantage of improved flow composition is achieved. However, the volume where highly combustible gases are confined during mixing is much smaller than in the embodiment of Figure 1 . After exit from the deposition element, the mix of substances of the original flows from the flow adjustment chambers and the accelerating substances are ignited to form a flame that provides the thermal reactor where particles are generated. These particles are directed on a treated surface.
  • FIGS. 1 to 3 show a configuration where the liquid substances are evaporated from the droplets by means of controlled burning in the first mixing space.
  • burning is, however, not mandatory for temperature control within the first mixing space.
  • the casing may be equipped with heating means that conduct heat to the first mixing space and increase the tempera- ture within the first mixing space to such a level that the liquid substances within the droplets begin to evaporate.
  • heated gas may be input to the first mixing space to increase the temperature of the combined mix of substances within the first mixing space reaches the desired temperature range.
  • Heated gas may input as an atomizing gas used in the nozzle 108, or blown separately to the first mixing space via a specific feed of the nozzle 108.
  • Electromagnetic radiation of various wavelengths, for example in form of microwaves or infrared light (gas laser) may be guided into the first mixing space to act on the substances and thereby increase temperature within the first mixing space.
  • Evaporation in the surface treatment device may be implemented by means of one or more of such evaporation mechanisms.
  • the block chart of figure 4 illustrates a side view of a surface treatment device applying configurations disclosed above.
  • the surface treatment device comprises conveying means 40 adapted to linearly transfer planar objects, like glass sheets, in a defined direction 41 .
  • the conveying means are shown as a roller conveyor with a plurality of successive rollers rotating in one direction. During operation, a planar object 42 positioned on the rotating rollers thus moves in the defined direction.
  • type of conveyor is not, as such, relevant for the invention.
  • the roller conveyor is used here as an example of a variety of possible means that allow linear transfer of planar objects in a defined direction. Other corresponding conveying means may be applied without deviating from the scope of protection.
  • the surface treatment device of Figure 4 comprises also a particle generation unit 43 that applies the configuration shown in Figures 2A to 2C.
  • the particle generation unit 43 comprises a source unit 44, a casing 45 and a burner unit 46.
  • the source unit 44 is connected to the side of the casing that faces off from the planar object.
  • the source unit 44 incorporates a row of point sources that spray droplets carrying precursor substances into the space confined within the casing 45.
  • the precursor substances flow out of an elongated outlet 47 that is in the opposite side the casing and extends substantially to the width of passing planar objects.
  • the particle generation unit comprises or is connected to evaporation means 47 that subject the droplets in the casing to heat.
  • the burner unit 46 comprises one or more burners that generate a flame 48 that increases the temperature in flow of particle precursors for completion of the particle generation process.
  • the conveying means 40 and the particle generation unit 43 are mutually positioned so that during use the flame extends towards planar ob- jects travelling on the conveying means such that substances and particles coming out of the flame are impacted on a surface of a passing planar object.
  • Preferable deposition and collection zones may be easily adjusted according to the deposited particles, depositing processes and/or treated surface materials.
  • the configuration of the embodiment allows quick and effective coating for planar objects.
  • the resulting coating is much more uniform than coatings achieved with any of the prior art configurations.
  • Figure 5 illustrates a side view of another embodiment of a surface treatment device. Similar to Figure 4, the surface treatment device of Figure 5 comprises conveying means 50 that during operation moves planar objects 52 in a defined direction 51 .
  • the surface treatment device comprises also a particle generation unit 53 that applies the configuration shown in Figure 3.
  • the particle generation unit 53 comprises a source unit 54 and a casing 55.
  • the source unit 54 incorporates a nozzle through which atomized droplets carrying precursor substances are sprayed into a first mixing space in the casing 55.
  • the particle generation unit comprises, or is connected to evaporation means 57 that subject the droplets that are in the casing to heat.
  • one source unit 54 feeds one separate casing 55 and separate casings are arranged into a line such that openings of the casings in the line form an elon- gated row of separate outlets.
  • the particle generation unit comprises also a deposition element, a deposition chamber 56 into which the row of openings of the casings in the line feed a mix of gas and precursor substances.
  • the deposition chamber 56 is connected to a reservoir 59 that feeds accelerating substance into the deposi- tion chamber.
  • the accelerating substances mix with the mix of gas and precursor substances and flow out as a highly combustible mix of substances. Outside the deposition chamber 56 the flow is ignited into an elongated flame 58 that provides the thermal reactor where particle generation occurs.
  • the elongated flame extends towards planar objects travelling on the con- veying means such that substances and particles coming out of the flame are deposited on a surface of a passing planar object.
  • Preferable deposition and collection zones may be easily adjusted according to the deposited particles, depositing processes and/or treated surface materials.
  • Figures 4 and 5 illustrate generation of particles by flames 48, 58 and deposition of generated particles on substrates 42, 52 in view of the embodiments of the present invention.
  • the deposited particles may create a layer of material on the substance, or they may adhere or attach to the treated surface in many ways and even diffuse into a layer of the substrate matrix.
  • the surface treatment device may comprise further processing elements to complement and/or enhance the results created by the processes described above.
  • the particles generated in the first flame 48, 58 may be deposited on the surface and subsequently exposed to a second heat treatment that sinters the generated particles into a layer to the surface of the treated substrate.
  • a surface treatment device may thus comprise first means for providing a primary flame for generating and depositing a layer of particles on a substrate, and second means for providing a heat treatment that sinters the layer of particles on the substrate.
  • Figure 6 illustrates stages of an embodiment of a corresponding surface treatment method. Additional generic information on the stages may be referred from Figures 1 to 5.
  • Figure 6 shows stages of the method for one set of process materials, but it is clear that in industrial processes the stages are continuously performed for continuously running feeds of materials.
  • the procedure of Figure 6 begins in the state where the surface treatment is in operative condition and encloses an impermeable first mixing space FMS.
  • Atomised droplets of a liquid substance carrying one or more precursors of the defined particles are input (stage 60) into a casing that encloses an impermeable first mixing space FMS.
  • the droplets within FMS are exposed some form of heat transfer (preburning, heating, radiation) that evaporates (stage 61 ) the liquid substance of the droplets within FMS.
  • the precursors move within FMS, efficiently mix and form a uniform aerosol flow.
  • a resulting aerosol flow that carries the precursors of the defined particles is output (stage 62) from FMS.

Abstract

L'invention porte sur un dispositif de traitement de surface pour déposer des particules définies sur un substrat. Le dispositif comprend un premier espace de mélange, et une unité de source pour faire entrer dans le premier espace de mélange des gouttelettes pulvérisées d'une substance liquide portant un ou plusieurs précurseurs des particules définies. La substance liquide des gouttelettes est évaporée à l'intérieur du premier espace de mélange pour délivrer en sortie un écoulement d'aérosol portant des précurseurs des particules définies à partir du premier espace de mélange. Une uniformité spatiale du traitement de surface résultant est significativement améliorée.
PCT/FI2012/051037 2011-11-01 2012-10-29 Dispositif et procédé de traitement de surface WO2013064728A2 (fr)

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CN115353292A (zh) * 2022-09-14 2022-11-18 晶研一材料科技(宜兴)有限公司 一种高精度的微晶玻璃加工用镀膜装置及其镀膜方法

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FI20050595A (fi) * 2005-06-06 2006-12-07 Beneq Oy Menetelmä ja laite nanohiukkasten tuottamiseksi
WO2008049954A1 (fr) * 2006-10-24 2008-05-02 Beneq Oy Dispositif de production de nanoparticules

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Publication number Priority date Publication date Assignee Title
JP2004267964A (ja) * 2003-03-11 2004-09-30 Canon Inc 成膜方法
US20060087062A1 (en) * 2004-02-27 2006-04-27 Laine Richard M Liquid feed flame spray modification of nanoparticles
FI20050595A (fi) * 2005-06-06 2006-12-07 Beneq Oy Menetelmä ja laite nanohiukkasten tuottamiseksi
WO2008049954A1 (fr) * 2006-10-24 2008-05-02 Beneq Oy Dispositif de production de nanoparticules

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CN115353292A (zh) * 2022-09-14 2022-11-18 晶研一材料科技(宜兴)有限公司 一种高精度的微晶玻璃加工用镀膜装置及其镀膜方法
CN115353292B (zh) * 2022-09-14 2023-12-05 虎石新材料(宜兴)有限公司 一种高精度的微晶玻璃加工用镀膜装置及其镀膜方法

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