WO2013031040A1 - Dispositif de gestion, procédé de gestion, programme et support d'enregistrement - Google Patents

Dispositif de gestion, procédé de gestion, programme et support d'enregistrement Download PDF

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Publication number
WO2013031040A1
WO2013031040A1 PCT/JP2011/080411 JP2011080411W WO2013031040A1 WO 2013031040 A1 WO2013031040 A1 WO 2013031040A1 JP 2011080411 W JP2011080411 W JP 2011080411W WO 2013031040 A1 WO2013031040 A1 WO 2013031040A1
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Prior art keywords
standard deviation
measuring instruments
characteristic
characteristic value
characteristic values
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PCT/JP2011/080411
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English (en)
Japanese (ja)
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史郎 杉原
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オムロン株式会社
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Priority to JP2013531000A priority Critical patent/JP5751333B2/ja
Priority to CN201180072866.8A priority patent/CN103733041B/zh
Publication of WO2013031040A1 publication Critical patent/WO2013031040A1/fr

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Definitions

  • the present invention relates to a management device that manages measurement errors between measuring instruments used in a production line.
  • a product production line has an inspection process for inspecting various characteristics of a workpiece which is a final product or an intermediate product.
  • a measuring instrument for measuring characteristics is used. Then, it is determined as a non-defective product when the measurement value obtained by the measuring instrument is within a predetermined range, and is determined as a defective product in other cases.
  • Measured by a measuring instrument is generally long in processing time for one workpiece. Therefore, parallel processing by a plurality of measuring instruments is performed. Thus, when performing parallel processing by a plurality of measuring instruments, a measurement error between measuring instruments becomes a problem. For example, when ten same samples are measured by three measuring instruments, the measured values by the measuring instruments may be different. Such a measurement error between measuring instruments has a great influence on variation in product characteristics. In addition, since the measurement error increases due to a slight change in the environment inside or outside the measuring instrument, it tends to increase with time. For this reason, it is desirable to monitor measurement errors between measuring instruments and to quickly perform processing such as calibration on the measuring instruments.
  • FIG. 13A As a method for monitoring measurement errors between measuring instruments, there is a method of visually confirming a histogram of measured values for each measuring instrument. For example, as shown in FIG. 13A, when a histogram for a certain measuring instrument is greatly deviated from other measuring instruments, it is estimated that some abnormality has occurred in this measuring instrument.
  • the actual production line is not limited to the case where only one histogram protrudes and is different as shown in FIG. 13A, and the histogram of each measuring instrument is slightly different as shown in FIG. 13B. There may be. In such a case, it is difficult to determine whether or not there is a measurement error between the measuring instruments only by looking at the histogram of FIG.
  • the average value of the measured values by the measuring instrument CH6 is all It will be shifted by a from the average value of the measured values by the measuring instrument. Therefore, it is estimated that some abnormality has occurred in this measuring instrument.
  • the actual production line is not limited to the case where only one histogram protrudes and is different as shown in FIG. 14A, and the histogram of each measuring instrument is slightly different as shown in FIG. 14B. There is. In such a case, it is difficult to determine whether or not there is a measurement error between the measuring instruments only by the difference between the average value of the measuring values of each measuring instrument and the average value of the measuring values of all the measuring instruments.
  • MSA measurement system analysis
  • GRR gauge R & R
  • TV 2 is a variance indicating the variation of the entire measurement data
  • PV 2 is a variance indicating a variation of a plurality of products (work) when measured under the same conditions
  • EV 2 is a variance indicating a repeated variation (the same product is the same)
  • AV 2 is a variance (variation of average values obtained by measuring the same product a plurality of times for each measuring instrument), indicating the variation between the measuring instruments.
  • GRR is managed according to the following criteria. GRR: 10% or less ⁇ ⁇ ⁇ Passed GRR: 10 to 30% ⁇ ⁇ ⁇ Conditional pass GRR: More than 30% ⁇ ⁇ ⁇ Fail.
  • Patent Document 1 describes that in measurement of substrate dimensions, an uncertainty (composite uncertainty) of all measurements of the measurement system is obtained and the measurement system is evaluated.
  • the measurement system is more accurately evaluated by performing linear regression between the measurement result of the measurement system and the measurement result of the reference measurement system, and removing the uncertainty of the reference measurement system from the residual. .
  • the present invention has been made to solve the above-described problem, and a management device and a management that can easily grasp a difference in measurement error between measuring instruments without stopping normal production on a production line It is an object to provide a method, a program, and a recording medium.
  • the management device of the present invention is a management device that manages a plurality of measuring instruments that measure the characteristics of a workpiece in a production line, and each of the plurality of measuring instruments is turned on.
  • the characteristic value acquisition unit that measures the characteristics of the workpiece and acquires a plurality of characteristic values obtained by measuring the characteristics of the workpiece in which the plurality of measuring devices are input, and the characteristic value acquisition unit acquires And an arithmetic unit that calculates a parameter indicating a measurement error between the plurality of measuring devices based on the plurality of characteristic values.
  • the management method of the present invention is a management method for managing a plurality of measuring instruments that measure the characteristics of a workpiece in a production line, wherein each of the plurality of measuring instruments measures the characteristics of the input workpiece. And a characteristic value acquisition step for acquiring a plurality of characteristic values obtained by measuring the characteristics of the workpiece into which the plurality of measuring instruments are input, and a plurality of characteristic values acquired in the characteristic value acquisition step. And a calculation step for calculating a parameter indicating a measurement error between the plurality of measuring instruments.
  • the management apparatus of the present invention is a management apparatus that manages a plurality of measuring instruments that measure workpiece characteristics in a production line, and acquires a plurality of characteristic values obtained by the plurality of measuring instruments. And a calculation unit that calculates a parameter indicating a measurement error between the plurality of measuring devices based on the plurality of characteristic values acquired by the characteristic value acquisition unit.
  • a plurality of characteristic values acquired by the characteristic value acquisition unit a first standard deviation which is a standard deviation when a measurement error between the plurality of measuring instruments is 0, and a plurality of characteristic values acquired by the characteristic value acquisition unit.
  • a first value indicating a correlation with a second standard deviation that is a standard deviation is calculated.
  • the management method of the present invention is a management method for managing a plurality of measuring instruments that measure workpiece characteristics in a production line, and acquires a plurality of characteristic values obtained by the plurality of measuring instruments. And a calculation step for calculating a parameter indicating a measurement error between the plurality of measuring devices based on the plurality of characteristic values acquired in the characteristic value acquisition step.
  • the first standard deviation which is the standard deviation when the measurement error between the plurality of measuring instruments is 0 in the plurality of characteristic values acquired in the characteristic value acquisition step, and the plurality of characteristics acquired by the characteristic value acquisition unit
  • a first value indicating a correlation with a second standard deviation that is a standard deviation of the characteristic value is calculated.
  • the management device of the present invention it is possible to easily grasp a difference in measurement error between measuring instruments without stopping normal production on a production line.
  • FIG. 1 is a schematic diagram showing a schematic configuration of a measuring instrument difference management system according to an embodiment of the present invention.
  • the measuring instrument difference management system 1 includes a production line 10, a measurement data collection device 20, a database 30, a management device 40, and a work recording device 50.
  • the production line 10 includes first to third production steps for producing a product, and an inspection step for inspecting various characteristics of a workpiece that is an intermediate product or a final product.
  • FIG. 2 is a diagram illustrating the number of facilities included in each process.
  • each of the first to third production processes has 8, 3 and 1 production facilities so that the processing speed in each process is substantially constant, and the inspection process has three measuring instruments 11. It shall have.
  • a plurality of facilities or measuring instruments perform parallel processing. That is, the plurality of workpieces conveyed from the second production process are distributed and input to three measuring instruments 11, and each measuring instrument 11 measures the characteristics of the input workpieces.
  • the number of measuring instruments 11 included in the inspection process is not limited to this, and may be plural.
  • the measurement data collection device 20 collects measurement data obtained by each of the plurality of measuring instruments 11 provided in the inspection process, and accumulates it in the database 30.
  • FIG. 3 is a diagram illustrating an example of data stored in the database 30.
  • the measurement data collection device 20 has, for each workpiece, a workpiece ID that identifies the workpiece, measuring instrument identification information that identifies the measuring instrument 11 that inspected the workpiece, A database 30 in which measurement data in which a model number of a final product, a lot number to which the workpiece belongs, a characteristic value that is a measurement result of n types of characteristics T1 to Tn, and a measurement date / time are associated is arranged in the order of measurement date / time. To store.
  • the measurement data collection device 20 accumulates the model number and lot number in the database 30 according to information input to an input unit (not shown). That is, the worker inputs the model number and the lot number using the input unit when changing the lot. Then, when the model number and lot number are input, the measurement data collection device 20 assigns a unique work ID to each of the measurement data collected thereafter and associates it with the input model number and lot number. The measured data is generated and stored in the database 30.
  • the work recording device 50 is a device that stores work information in which work content information indicating the content of work performed by an operator and work timing information indicating the date and time (timing) of the work are associated with each other.
  • the work recording device 50 stores work information according to, for example, an operator input.
  • FIG. 4 is a diagram illustrating an example of work information stored in the work recording apparatus 50.
  • the management device 40 is a device that manages measurement errors between a plurality of measuring instruments 11 provided in the inspection process. As shown in FIG. 1, the management device 40 includes an input unit 41, a display unit 42, an acquisition setting unit 43, a measurement data acquisition unit (characteristic value acquisition unit) 44, a standard value storage unit 45, and an arithmetic operation. A unit 46, a data storage unit 47, a storage unit 48, and a graph display processing unit 49.
  • the input unit 41 receives various inputs from production line workers, and includes input buttons, a keyboard, a pointing device such as a mouse, and other input devices.
  • the display unit 42 is a display unit such as an LCD (liquid crystal display), a PDP (plasma display), or an organic EL (electroluminescence) display, and displays various information such as characters and images based on received display data. It is.
  • the acquisition setting unit 43 sets conditions for the measurement data acquisition unit 44 to acquire a measurement data group.
  • the acquisition setting unit 43 sets the aggregation time and the aggregation time interval according to the information input to the input unit 41.
  • the acquisition setting unit 43 sets a time after the total time interval from the total time as a new total time.
  • the measurement data acquisition unit 44 acquires a measurement data group from the database 30. Specific processing by the measurement data acquisition unit 44 will be described with reference to FIG. FIG. 5 is a flowchart showing a process flow of the measurement data acquisition unit 44.
  • the measurement data acquisition unit 44 determines whether or not the current time has reached the total time set by the acquisition setting unit 43 (S1).
  • the measurement data acquisition unit 44 specifies from the database 30 measurement data corresponding to the measurement date and time included in a period that is backed by the total time interval from the total time. Then, the measurement data acquisition unit 44 determines whether or not there is measurement data having a lot number different from that of the next measurement data when the specified measurement data is arranged in order of measurement date and time. Measurement data having a lot number different from the next measurement data when arranged in order of measurement date and time corresponds to the final work of the lot.
  • the measurement data acquisition unit 44 determines whether or not there is a lot completed in a period that is backed by the total time interval from the total time by determining whether there is measurement data having a different lot number from the next measurement data. Can be judged. And the measurement data acquisition part 44 specifies the lot number of N measurement data from which a lot number differs with the following measurement data (S2).
  • N 2 lots
  • the numbers “M2” and “M3” are specified.
  • the measurement data acquisition unit 44 reads, from the database, the measurement data group that is all of the measurement data having the lot number for each of the N number of the lot numbers specified in S2, and reads the read measurement data group Is output to the calculation unit 46 (S3 to S6).
  • the measurement data acquisition unit 44 When the measurement data group is output to the calculation unit 46 for all lot numbers specified in S2 (No in S4), the measurement data acquisition unit 44 outputs an update instruction to the acquisition setting unit 43. As a result, the time after the total time interval has elapsed from the total time is set as a new total time (S7).
  • the measurement data acquisition unit 44 outputs a measurement data group to the calculation unit 46 for each lot completed in a period that is traced back by the total time interval from the total time.
  • the standard value storage unit 45 stores standard values for distinguishing whether each of the various characteristics measured by the measuring instrument 11 is a good product or a defective product.
  • the standard value storage unit 45 stores at least one of an upper limit value and a lower limit value as a standard value.
  • the standard value storage unit 45 stores standard values set for each characteristic.
  • FIG. 7 is a diagram illustrating an example of information stored in the standard value storage unit 45.
  • the standard value storage unit stores the standard value according to the information input to the input unit. Thus, the operator can set standard values for various characteristics by inputting standard values to the input unit 41.
  • the calculation unit 46 uses the measurement data group for each lot obtained from the measurement data acquisition unit 44 to calculate a parameter that makes it easy to grasp the measurement error between the measuring instruments 11 for each of various characteristics. That is, when the standard deviation of the measured value when the same product is repeatedly measured is EV, and the standard deviation of the measured values of a plurality of products when measured under the same conditions (that is, the standard deviation indicating the product variation) is PV.
  • the calculation unit 46 calculates PV ′ satisfying the following expression from the measurement data group, and calculates a parameter indicating variation between measuring instruments using the calculated PV ′.
  • PV ′ 2 PV 2 + EV 2
  • FIG. 8 is a flowchart showing a processing flow of the calculation unit 46.
  • the calculation unit 46 calculates a statistic for each characteristic from the measurement data group (S11). Specifically, the calculation unit 46 calculates the average value and standard deviation of the characteristic values measured by all the measuring instruments 11 for each characteristic.
  • the characteristic value of the workpiece measured j-th by the i-th measuring instrument is assumed to be xij. Further, the number of measuring instruments 11 included in the inspection process is a, and the number of workpieces measured by the i-th measuring instrument 11 is ni.
  • the average value ave (x) and the standard deviation TV of the characteristic values measured by all the measuring instruments 11 are expressed by the following equations.
  • the calculation unit 46 calculates the average value ave (xi) and standard deviation ⁇ (xi) of the characteristic values according to the following formulas for various characteristics measured by the i-th measuring instrument 11 (S12).
  • the calculation unit 46 calculates a variation increasing rate.
  • TV 2 PV 2 + EV 2 + AV 2 Holds.
  • PV ′ 2 PV 2 + EV 2
  • TV 2 PV ′ 2 + AV 2 It becomes.
  • the calculation unit 46 calculates PV ′ and AV by the following equations.
  • PV ′ may be calculated by (TV 2 ⁇ AV 2 ) 1/2 .
  • AV, PV ′, and TV may be calculated using other calculation methods such as an average / range method and analysis of variance.
  • the calculation unit 46 reads the standard value of each characteristic stored in the standard value storage unit 45 (S14). And the calculating part 46 calculates an improvement defect rate based on the read standard value (S15).
  • the improved defect rate is a value indicating a difference between the current defect rate and an ideal defect rate in which the measurement error between measuring instruments is zero.
  • the current defect rate can be calculated from the distribution of standard deviation TV.
  • AV 0, so that it can be calculated from the distribution of the standard deviation PV '.
  • FIG. 9 is a diagram showing a distribution of standard deviation TV and a distribution of standard deviation PV ′ with no measurement error between measuring instruments. As shown in FIG.
  • the calculation unit 46 calculates the improvement defect rate using the NORMDIST function of Microsoft (registered trademark) Excel.
  • a function indicated by NORMDIST (x, ⁇ , ⁇ , true) is a function for calculating a probability that a random variable is less than or equal to x in a normal distribution with an average value ⁇ and a standard deviation ⁇ .
  • the upper limit standard value is d1
  • the lower limit standard value is d2
  • the average value of the characteristic values measured by all the measuring instruments 11 is ave (x), the current defect rate f (d1, d2, ave (x), TV ) Can be calculated from the following equation.
  • f (d1, d2, ave (x), PV ′) NORMDIST (d2, ave (x), PV ′, true) + (1 ⁇ NORMDIST (d1, ave (x), PV ′, true))
  • the calculation unit 46 may calculate the improvement defect rate based on a cumulative distribution function based on the distribution.
  • the calculation unit 46 varies, for each characteristic, the average value and standard deviation of the characteristic values measured by all the measuring instruments 11, the average value and standard deviation of the characteristic values for each measuring instrument 11, and the variation. An increase rate and an improvement defect rate are calculated.
  • the data storage unit 47 calculates the average value and standard deviation of the characteristic values measured by all the measuring instruments 11 and the average value and standard value of the characteristic values for each measuring instrument 11 calculated by the calculation unit 46 for each of various characteristics. The deviation, the variation increase rate, and the improvement failure rate are stored in the storage unit. At this time, the data storage unit 47 associates these calculated values with the data group ID for identifying the measurement data group to be calculated, the model number of the measurement data group, the lot number, and the measurement date and time in the storage unit 48. Store. The data storage unit 47 may set the measurement date and time of any measurement data in the measurement data group as the measurement date and time of the measurement data group.
  • the data storage unit may measure the measurement date and time of the measurement data measured first (first), the measurement date and time of the measurement data measured last (nth), and n / 2nd (when n is an odd number). Is one of the measurement dates / times of (n + 1) / 2) measured data, and is set as the measurement date / time of the measurement data group.
  • FIG. 10 is a diagram illustrating an example of information stored in the storage unit 48.
  • the average value and standard deviation of characteristic values measured by all measuring instruments 11 (denoted as “(all)” in the figure), and the characteristic values for each measuring instrument 11
  • the average value and standard deviation, the variation increasing rate, the improvement failure rate, and the measurement date and time are associated with each other.
  • “Ave” represents an average value
  • “Sd” represents a standard deviation.
  • the graph display processing unit 49 performs processing for displaying on the display unit 42 a graph showing a time change of various parameters.
  • the graph display processing unit 49 reads the variation increase rate, the improvement failure rate, and the measurement date and time for each of various characteristics from the information stored in the storage unit 48.
  • a graph showing the time variation of the variation increasing rate and the improvement defect rate is created. Specifically, a graph having the measurement date and time as the horizontal axis and the variation increasing rate as the vertical axis and a graph having the measurement date and time as the horizontal axis and the improvement failure rate as the vertical axis are created and displayed on the display unit 42.
  • the graph display processing unit 49 calculates the average value and the standard deviation of the characteristic values measured by all the measuring instruments 11 for each of the various characteristics from the information stored in the storage unit 48, and the measuring instrument 11.
  • the average value and standard deviation of the characteristic values and the measurement date and time may be read out, a graph showing the time change of each value may be created and displayed on the display unit 42.
  • FIG. 11 is a diagram illustrating an example of a display example by the graph display processing unit 49.
  • (a) shows the time change of the variation increasing rate for each characteristic
  • (b) shows the time change of the improvement defect rate for each characteristic.
  • (c) and (f) show the change over time of the average value and standard deviation for each measuring instrument of the characteristic T1
  • (d) and (g) are the average value and standard deviation for each measuring instrument of the characteristic T2.
  • E) and (h) show the change over time of the average value and standard deviation of the characteristic T3 for each measuring instrument.
  • the graph display processing unit 49 reads work information from the work recording device 50. And the graph display process part 49 may display the work content information corresponding to the said work timing information in the location of the date shown by work timing information on each graph shown in FIG.
  • FIG. 12 is a diagram illustrating an example of a graph on which work content information is presented. As shown in FIG. 12, since the work content information is displayed along the time axis, by confirming the work content information displayed in the place where the variation increasing rate and the improvement failure rate are greatly changed, It is possible to easily grasp the cause of variation in the variation increase rate and improvement defect rate.
  • the management device 40 of the present embodiment manages the plurality of measuring instruments 11 that measure the characteristics of the workpiece in the production line.
  • a plurality of workpieces are distributed and input to a plurality of measuring instruments 11, and each of the plurality of measuring instruments 11 measures the characteristics of the input workpieces.
  • the measurement data acquisition unit 44 of the management device 40 acquires a measurement data group including a plurality of characteristic values obtained by measuring the characteristics of the workpiece into which the plurality of measuring instruments 11 are input.
  • the calculating part 46 calculates the parameter which shows the measurement error between the some measuring instruments 11 based on the acquired measurement data group.
  • the calculation unit 46 is configured so that, during the operation of the production line, based on the plurality of characteristic values obtained by measuring the characteristics of the workpiece into which the plurality of measuring instruments are input, the plurality of measuring instruments 11 are connected. A parameter indicating a measurement error is calculated. As a result, the measurement error between the measuring instruments 11 can be easily grasped without stopping normal production on the production line.
  • the calculating part 46 is using the 1st standard deviation (PV ') which is a standard deviation when the measurement error between the some measuring instruments 11 in the measurement data group is set to 0 as said parameter, and the standard deviation of a measurement data group.
  • PV ' 1st standard deviation
  • TV second standard deviation
  • process management is performed at a manufacturing site using a standard deviation ⁇ .
  • the standard deviation is a familiar parameter for the operator. The worker is highly aware of the degree of decrease in the standard deviation.
  • the GRR shown in [Equation 1] indicates the ratio of the standard deviation indicating the variation regarding AV and EV to the standard deviation indicating the entire variation, it is a measuring instrument for an operator familiar with the standard deviation. It is difficult to sensuously grasp the measurement error.
  • GRR is a parameter that makes it difficult to grasp the relationship between the current standard deviation and the presence or absence of measurement errors between measuring instruments. In other words, there is a problem that the operator cannot easily grasp how much the standard deviation can be reduced when the GRR is increased.
  • the operator can obtain the first standard deviation (PV ′) that is a standard deviation when the measurement error between the plurality of measuring instruments 11 in the measurement data group is 0, and the measurement data group.
  • the first value indicating the correlation with the second standard deviation (TV) that is the standard deviation can be grasped.
  • the second standard deviation (TV) is a standard deviation of characteristic values obtained from the plurality of measuring instruments 11 and is a standard deviation in a state including a measurement error between the measuring instruments 11. Therefore, by checking the first value, it can be easily confirmed how much the standard deviation has changed from the state where the measurement error between the plurality of measuring instruments is zero.
  • the calculating part 46 calculates the variation increase rate which is TV / PV 'as a parameter.
  • this variation increasing rate indicates how many times the standard deviation has increased from an ideal state where there is no measurement error between measuring instruments due to the existence of a measurement error between measuring instruments. Therefore, the operator can easily grasp how much the standard deviation has increased due to the presence of the measurement error between the measuring instruments by looking at the variation increasing rate.
  • the calculation unit 46 calculates the variation increase rate TV / PV ′.
  • the calculation unit 46 calculates PV ′ / TV that is the reciprocal thereof.
  • PV '/ TV indicates how many times the standard deviation has increased from the state in which there is a measurement error between the current measuring instruments by making an ideal state in which there is no measurement error between the measuring instruments. In this case, the operator can easily grasp how much the standard deviation can be reduced by setting the measurement error between the measuring instruments to zero by checking PV ′ / TV.
  • calculation unit 46 is based on the standard range of the characteristic value for determining the quality of the workpiece, and the measurement rate between the plurality of measuring instruments 11 in the measurement data group is zero and the measurement data group A second value indicating the correlation with the defect rate is calculated as a parameter.
  • the calculation unit 46 calculates the probability that the standard deviation is out of the standard range in the normal distribution of TV as the defect rate when the standard deviation is TV, and out of the standard range in the normal distribution with the standard deviation PV ′. Is calculated as a defect rate when the standard deviation is PV ′. Then, an improved failure rate, which is a difference between the failure rate when the standard deviation is TV and the failure rate when the standard deviation is PV ′, is calculated as a second value. That is, the improvement defect rate indicates a difference between the current defect rate and an ideal defect rate in which the measurement error between the measuring instruments is zero.
  • the operator can easily grasp how much the defect rate can be reduced by checking the second value (improvement defect rate) to reduce the measurement error between the measuring instruments to zero. .
  • the calculation unit 46 calculates the average value and standard deviation of the characteristic values measured by all the measuring instruments, and the average value and standard deviation of the characteristic values for each measuring instrument.
  • the graph display process part 49 is displaying the graph which shows the time change of each value (refer FIG. 11).
  • the improvement defect rate of the characteristic T3 is only in a specific period (2011/3/28 to 2011/3/29, 2011/4/4 to 2011/4/10). You can see that it is getting higher. Then, by checking the graph of (e) showing the transition of the average value for each measuring instrument of the characteristic T3, the difference in measurement error between the three measuring instruments is large, and the average value becomes low in this specific period. You can see that From this, the distribution of the characteristic T3 is close to the lower limit value, and the defect rate is high due to the characteristic T3 measured by the measuring instrument b having a particularly low average value, and the measuring instrument b needs to be calibrated. Can be grasped.
  • the graph display processing unit 49 identifies work timing information indicating the period included in the graph from the work recording device, and is indicated by the identified work timing information in the graph.
  • the work content information corresponding to the work timing information is displayed at the timing.
  • the measurement data acquisition unit 44 outputs a measurement data group to the calculation unit 46 for each lot completed in a period that is traced back by the total time interval from the total time.
  • the measurement data group acquisition method of the measurement data acquisition unit 44 is not limited to this.
  • the measurement data acquisition unit 44 groups the measurement data measured in the period that is backed by the total time interval from the total time, and outputs the measurement data group belonging to the group to the calculation unit 46 for each group. May be.
  • the measurement data acquisition unit 44 may output all measurement data measured in a period that is backed by the total time interval from the total time to the calculation unit 46 as one measurement data group.
  • each unit of the management apparatus 40 includes a program stored in a storage unit such as a ROM (Read Only Memory) or a RAM (Random Access Memory) by a calculation unit such as a CPU (Central Processing Unit).
  • a storage unit such as a ROM (Read Only Memory) or a RAM (Random Access Memory) by a calculation unit such as a CPU (Central Processing Unit).
  • This can be realized by controlling input means such as a keyboard, output means such as a display, or communication means such as an interface circuit. Therefore, various functions and various processes of the production line management apparatus according to the present embodiment can be realized simply by a computer having these means reading the recording medium storing the program and executing the program.
  • the various functions and various processes described above can be realized on an arbitrary computer.
  • a program medium such as a memory (not shown) such as a ROM may be used for processing by the microcomputer, and a program reading device is provided as an external storage device (not shown). It may be a program medium that can be read by inserting a recording medium there.
  • the stored program is preferably configured to be accessed and executed by a microprocessor. Furthermore, it is preferable that the program is read out, and the read program is downloaded to a program storage area of the microcomputer and the program is executed. It is assumed that this download program is stored in advance in the main unit.
  • the program medium is a recording medium configured to be separable from the main body, such as a tape system such as a magnetic tape or a cassette tape, a magnetic disk such as a flexible disk or a hard disk, or a disk such as a CD / MO / MD / DVD.
  • Fixed disk system card system such as IC card (including memory card), or semiconductor memory such as mask ROM, EPROM (Erasable Programmable Read Only Memory), EEPROM (Electrically Erasable Programmable Read Only Memory), flash ROM, etc.
  • the recording medium is preferably a recording medium that fluidly carries the program so as to download the program from the communication network.
  • the download program is stored in the main device in advance or installed from another recording medium.
  • the management apparatus of the present invention is a management apparatus that manages a plurality of measuring instruments that measure the characteristics of a workpiece in a production line, and each of the plurality of measuring instruments has a characteristic of an input workpiece.
  • a characteristic value acquisition unit that acquires a plurality of characteristic values obtained by measuring the characteristics of the workpiece in which the plurality of measuring instruments are input, and a plurality of characteristics acquired by the characteristic value acquisition unit
  • an arithmetic unit that calculates a parameter indicating a measurement error between the plurality of measuring instruments based on the value.
  • the arithmetic unit is a standard deviation when the measurement error between the plurality of measuring instruments is set to zero in the plurality of characteristic values acquired by the characteristic value acquiring unit as the parameter.
  • a first value indicating a correlation between the first standard deviation and a second standard deviation that is a standard deviation of the plurality of characteristic values acquired by the characteristic value acquisition unit may be calculated.
  • the management apparatus of the present invention is a management apparatus that manages a plurality of measuring instruments that measure workpiece characteristics in a production line, and acquires a plurality of characteristic values obtained by the plurality of measuring instruments. And a calculation unit that calculates a parameter indicating a measurement error between the plurality of measuring devices based on the plurality of characteristic values acquired by the characteristic value acquisition unit.
  • a plurality of characteristic values acquired by the characteristic value acquisition unit a first standard deviation which is a standard deviation when a measurement error between the plurality of measuring instruments is 0, and a plurality of characteristic values acquired by the characteristic value acquisition unit.
  • a first value indicating a correlation with a second standard deviation that is a standard deviation is calculated.
  • process control is performed using a standard deviation ⁇ at a manufacturing site, and the standard deviation is a familiar parameter for workers. The worker is highly aware of the degree of decrease in the standard deviation.
  • GRR indicates the ratio of the standard deviation indicating the variation regarding AV and EV to the standard deviation indicating the entire variation
  • the measurement error between the measuring instruments is not suitable for an operator familiar with the standard deviation. It is difficult to grasp sensuously. That is, for the worker, GRR is a parameter that makes it difficult to grasp the relationship between the current standard deviation and the presence or absence of a measurement error between measuring instruments. I cannot easily figure out if I can do it.
  • the operator can calculate the first standard deviation, which is the standard deviation when the measurement error between the plurality of measuring instruments is 0, and the plurality of characteristic values acquired by the characteristic value acquiring unit.
  • the first value indicating the correlation with the second standard deviation which is the standard deviation can be grasped.
  • the second standard deviation is a standard deviation of characteristic values obtained from a plurality of measuring instruments, and is a standard deviation in a state including a measurement error between measuring instruments. Therefore, by checking the first value, it can be easily confirmed how much the standard deviation has changed from the state where the measurement error between the plurality of measuring instruments is zero.
  • the arithmetic unit is Based on the standard range, in the plurality of characteristic values acquired by the characteristic value acquisition unit, when the measurement error between the plurality of measuring instruments is 0, the defect rate and the plurality of characteristic values acquired by the characteristic value acquisition unit A second value indicating the correlation between the defect rate and the defect rate may be calculated as the parameter.
  • the operator can easily grasp how much the defect rate can be reduced by checking the second value and setting the measurement error between the measuring instruments to zero.
  • the said calculating part makes the characteristic value of the workpiece
  • PV ′ and TV may be calculated according to the following equations.
  • the calculation unit sets the characteristic value of the workpiece measured j-th by the i-th measuring device among the plurality of characteristic values acquired by the characteristic value acquisition unit as xij, and calculates the number of the plurality of measuring devices.
  • PV ′ and TV may be calculated according to the following equations.
  • the parameter is calculated using PV ′ that satisfies the condition. That is, it is not necessary to calculate the standard deviation EV itself obtained by repeatedly measuring the same sample with the measuring instrument. Therefore, it is possible to display a parameter indicating variation among a plurality of measuring instruments using the characteristic value obtained during the operation of the production line.
  • GRR is a parameter that makes it difficult to grasp the relationship between the current standard deviation and the presence or absence of measurement errors between measuring instruments. It is not easy to know how much the deviation can be reduced.
  • TV / PV ′ or PV ′ / TV is calculated as the parameter.
  • TV / PV ' indicates how many times the standard deviation is increased from an ideal state where there is no measurement error between measuring instruments due to the existence of a measuring error between the existing measuring instruments.
  • PV '/ TV shows how many times the standard deviation has increased from the state in which there is a measurement error between the current measuring instruments by making an ideal state in which there is no measurement error between the measuring instruments. Yes.
  • the operator views TV / PV ′ or PV ′ / TV to determine how much the standard deviation has increased due to the presence of measurement errors between measuring instruments, or sets the measuring error between measuring instruments to zero.
  • it can be easily grasped how much the standard deviation can be reduced.
  • the arithmetic unit (1) EV is a standard deviation of characteristic values when the same workpiece is repeatedly measured, and standard deviations of characteristic values of a plurality of workpieces measured under the same conditions.
  • PV ′ satisfying the above is calculated, and the standard deviation TV of the plurality of characteristic values acquired by the characteristic value acquisition unit is calculated.
  • the defect rate and standard when the standard deviation is TV It is preferable to calculate the improved defect rate, which is the difference from the defect rate when the deviation is PV ′, as the second value.
  • the calculation unit calculates the probability that the standard deviation is out of the standard range in the normal distribution of TV as a defect rate when the standard deviation is TV, and calculates the probability that the standard deviation is out of the standard range in the normal distribution of PV ′. You may calculate as a defect rate when a standard deviation is PV '.
  • the operator can easily grasp how much the defect rate can be lowered by checking the improvement defect rate and setting the measurement error between the measuring instruments to zero.
  • the calculation unit calculates an average value and a standard deviation of a plurality of characteristic values acquired by the characteristic value acquisition unit, and calculates a plurality of characteristic values acquired by the characteristic value acquisition unit.
  • the characteristic value measured by each measuring instrument may be divided and the average value and standard deviation of the characteristic value measured by each measuring instrument may be calculated. Thereby, various analyzes can be performed by checking these average values and standard deviations.
  • the characteristic value acquisition unit may acquire a characteristic value every predetermined period, and the calculation unit may calculate the parameter every predetermined period. Thereby, the time change of a parameter can be checked easily.
  • the management device may be realized by a computer.
  • a program that causes the computer to function as each unit of the control device, and a computer-readable recording medium that records the program are also included in the present invention. Enter the category.
  • the present invention can be used for a management device that manages measurement errors between a plurality of measuring instruments installed in a production line.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Factory Administration (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)

Abstract

Selon l'invention, un dispositif de gestion (40) acquiert un groupe de données de mesure comprenant une pluralité de valeurs de propriété obtenues par une pluralité d'instruments de mesure (11) qui mesurent les propriétés d'une pièce à usiner introduite, et calcule des paramètres pour indiquer une erreur de mesure entre les instruments de mesure sur la base du groupe de données de mesure.
PCT/JP2011/080411 2011-08-30 2011-12-28 Dispositif de gestion, procédé de gestion, programme et support d'enregistrement WO2013031040A1 (fr)

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JP2013531000A JP5751333B2 (ja) 2011-08-30 2011-12-28 管理装置、管理方法、プログラムおよび記録媒体
CN201180072866.8A CN103733041B (zh) 2011-08-30 2011-12-28 管理装置及管理方法

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024090417A1 (fr) * 2022-10-25 2024-05-02 京セラ株式会社 Dispositif de gestion, procédé de commande de dispositif de gestion, programme de commande et support d'enregistrement
WO2024116943A1 (fr) * 2022-11-29 2024-06-06 パナソニックエナジー株式会社 Système de mesure et procédé de mesure

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6206692B2 (ja) * 2014-06-20 2017-10-04 株式会社村田製作所 抜取データ処理装置、抜取データ処理方法及びコンピュータプログラム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07104827A (ja) * 1993-10-07 1995-04-21 Nikon Corp 図面情報に基づいた工程管理システム
JP2000074707A (ja) * 1998-06-17 2000-03-14 Omron Corp センサ装置及びセンサシステム並びにコンフィグレ―ション方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6823276B2 (en) * 2003-04-04 2004-11-23 Agilent Technologies, Inc. System and method for determining measurement errors of a testing device
FI119261B (fi) * 2005-12-01 2008-09-15 Valtion Teknillinen Mittareiden kalibrointimenetelmä ja järjestelmä
JP2008074707A (ja) * 2006-09-19 2008-04-03 Shiseido Co Ltd 固形化粧料
CN101995268B (zh) * 2009-08-21 2014-02-19 鸿富锦精密工业（深圳）有限公司 量测仪器示值误差计算***及方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07104827A (ja) * 1993-10-07 1995-04-21 Nikon Corp 図面情報に基づいた工程管理システム
JP2000074707A (ja) * 1998-06-17 2000-03-14 Omron Corp センサ装置及びセンサシステム並びにコンフィグレ―ション方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024090417A1 (fr) * 2022-10-25 2024-05-02 京セラ株式会社 Dispositif de gestion, procédé de commande de dispositif de gestion, programme de commande et support d'enregistrement
WO2024116943A1 (fr) * 2022-11-29 2024-06-06 パナソニックエナジー株式会社 Système de mesure et procédé de mesure

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JP5751333B2 (ja) 2015-07-22
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CN103733041B (zh) 2016-09-21
JPWO2013031040A1 (ja) 2015-03-23

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