WO2012073677A1 - レーザ加工機の光路構造 - Google Patents
レーザ加工機の光路構造 Download PDFInfo
- Publication number
- WO2012073677A1 WO2012073677A1 PCT/JP2011/076093 JP2011076093W WO2012073677A1 WO 2012073677 A1 WO2012073677 A1 WO 2012073677A1 JP 2011076093 W JP2011076093 W JP 2011076093W WO 2012073677 A1 WO2012073677 A1 WO 2012073677A1
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- WIPO (PCT)
- Prior art keywords
- optical path
- moving member
- laser beam
- path structure
- opening
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/10—Devices involving relative movement between laser beam and workpiece using a fixed support, i.e. involving moving the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
Definitions
- the present invention relates to a laser beam machine, and more particularly, to an optical path structure of an optical scanning laser beam machine of a type in which an optical path moves.
- a transmission member such as an optical fiber
- a carbon dioxide gas laser processing machine in particular, in an optical scanning laser processing machine that processes by moving an optical element (bend mirror, processing lens, etc.), the optical path moves.
- a bellows (bellows), a telescopic (telescopic mechanism), etc. are provided in the moving part for the purpose of protecting the optical path of the moving part (for example, Patent Documents). See 1-3.)
- the inside of the optical path is purged with clean dry air or nitrogen, and the inside of the optical path is pressurized at about 0.5 kPa (about 50 mmAq) higher than the outside air (atmosphere).
- 0.5 kPa about 50 mmAq
- the outside air atmosphere
- the laser beam inside the optical path diffuses or deviates, or the secondary reflected light from a highly reflective workpiece such as aluminum placed near the laser processing point irradiates the inside and outside of the beam, resulting in burning. Is not required.
- Patent Document 4 discloses an apparatus that is configured by an endless belt that operates integrally with a moving base by closing an opening of a duct. Yes.
- Patent Document 5 discloses a configuration in which a seal is provided between a moving endless belt and a dustproof cover.
- Patent Documents 6 and 7 disclose a configuration in which both ends of the belt in the longitudinal direction are fixed along the opening, and the moving unit partially cancels the belt closing of the opening as it moves.
- Bellows and telescopic optical path structures are generally used for bellows, and in the case of carbon dioxide lasers, telescopic lasers have been put to practical use in low-power medical devices (such as laser scalpels) used in clean environments. It is a degree.
- bellows are manufactured from synthetic fibers or plastics, but the resin itself has dust generation properties and has a low sealing degree.
- Several improvements have been made, such as joining and bonding several layers to increase the degree of sealing, and using highly airtight fibers. In such a case, problems such as sucking or damaging external dust occur, so it is necessary to provide a counter bellows or a buffer tank to suppress the influence of volume fluctuation.
- Patent Document 4 does not disclose anything about the seal structure. Therefore, the invention disclosed in Patent Document 4 cannot be said to be a practical device that can maintain the airtightness inside the optical path.
- Patent Document 5 seals the outer edge of the belt, but dust tends to adhere to the outside of the belt. Since dust adhered to the outside of the belt wears and deteriorates the seal, the invention disclosed in Patent Document 5 has a problem from the viewpoint of hermeticity, airtightness, and life. Further, it is difficult to provide a dustproof cover on the outer side, and the structure in which the belt is driven by a roller that supports and guides the belt does not have a structure that enables high-speed repeated operation.
- the present invention has been made in view of the above, and the optical path can be repeatedly moved at a high speed, has almost no expansion and contraction, has high airtightness, does not breathe, and enters the optical path of external dust.
- An object of the present invention is to obtain an optical path structure of a laser processing machine that prevents the occurrence of intrusion and burnout.
- the present invention is an optical path structure of a laser processing machine that performs laser processing by irradiating a workpiece with a laser beam from a processing head, and has an elongated box shape.
- a housing that has an opening on one of its longitudinal surfaces and a bend mirror that deflects the laser beam that travels in the longitudinal direction of the housing toward the opening, and is installed in the housing so that it can move in the longitudinal direction of the housing
- a light path tube that projects from the bend block toward the opening side and covers the optical path of the laser beam deflected to the opening side by the bend mirror, and guides the laser beam that has passed through the light path tube to the machining head
- the movable member is movable in the longitudinal direction with the opening closed, and has a moving member fixed to the light guide unit, and driving means for moving the movable member and the light guide unit integrally in the longitudinal direction of the movable member.
- the movement of the optical path can be repeatedly performed at high speed, there is no expansion and contraction, high airtightness, breathing is not performed, and the entry of external dust into the optical path and the occurrence of burning can be prevented. There is an effect.
- FIG. 1 is a diagram showing a configuration of a first embodiment of an optical path structure of a laser beam machine according to the present invention.
- FIG. 2 is a plan view of the optical path structure of the laser processing machine.
- FIG. 3 is a cross-sectional view of the edge of the opening in the longitudinal direction.
- FIG. 4 is a diagram illustrating a contact state between the guide roller and the moving member.
- FIG. 5 is a diagram showing the configuration of the optical path structure of the laser beam machine according to the second embodiment of the present invention.
- FIG. 6 is a diagram showing a configuration of a third embodiment of the optical path structure of the laser beam machine according to the present invention.
- FIG. 7 is a diagram showing a contact state between the scraper and the moving member of the roller.
- FIG. 8 is a sectional view of the edge in the longitudinal direction of the opening in the optical path structure of the laser beam machine according to Embodiment 4 of the present invention.
- FIG. 1 is a diagram showing a configuration of a first embodiment of an optical path structure of a laser beam machine according to the present invention.
- FIG. 2 is a plan view of the optical path structure of the laser processing machine, and the arrow II in FIG.
- the housing 1 is made of a metal plate or the like so as to cover the entire optical path and is sealed.
- the opening 2 is provided on the bottom surface of the housing 1 along the moving part of the optical path.
- the seal member 3 is formed of an elastic rubber material or the like, and is provided at the peripheral inner edge of the opening 2.
- the moving member 4 is formed in a band shape with a metal material or the like, and abuts on the seal member 3 so as to close the opening 2 and slides and moves.
- the bend block 5 a includes a bend mirror that deflects the laser beam L and is provided inside the housing 1.
- the optical path tube 6a is attached to the bend block 5a, covers the optical path of the laser beam L deflected to the opening side by the bend mirror, passes through the moving member 4, and protrudes out of the housing 1.
- the moving member 4 is fixedly coupled to the optical path tube 6a.
- the bend block 5 a and the optical path tube 6 a form a light guide unit 30 that guides the laser beam L to the processing head 12.
- the bend block 5b is a fixed bend block installed inside the housing 1, and is connected to the optical path tube 6b.
- the Z-axis unit 22 includes the machining head 12 and is connected to the optical path tube 6a.
- the Z-axis unit 22 has a function of operating the machining head 12 in the Z-axis direction shown in the figure in order to focus on the workpiece 13 that is a workpiece.
- the Z-axis unit 22 is configured to move by being driven in the X-axis direction shown in the figure by the driving means 7 together with the bend block 5a, the optical path tube 6a, and the machining head 12.
- the driving unit 7 is configured as a belt fixed to the Z-axis unit 22, but the Z-axis unit 22, the optical path tube 6a, the machining head 12, and the bend block 5a can be integrally translated.
- the Z-axis unit 22 may be provided with a pinion and a motor for driving the pinion unit 22 and moved along the rack. It is also possible to adopt a configuration in which a linear motor is provided in the Z-axis unit 22 and moved.
- the casing 1 is provided with a purge gas inlet 14, a purge gas outlet 15 and a check valve 16.
- a laser beam L emitted from a laser oscillator (not shown) is introduced into the housing 1 through the optical path tube 6b, deflected in the X-axis direction by the bend block 5b, and guided to the bend block 5a.
- the laser beam L is deflected in the Z-axis direction, transmitted to the processing head 12 via the optical path tube 6a and the Z-axis unit 22, and is converted into a focused laser beam by a processing lens provided in the processing head 12. Then, the work 13 is irradiated.
- the moving member 4 fixedly coupled to the optical path tube 6a is also the same. Move in the X-axis direction. At this time, since the moving member 4 slides while being in contact with the seal member 3, the airtightness in the housing 1 that protects the optical path of the laser beam L is maintained even during laser processing while moving the processing head 12.
- Clean dry air, nitrogen, or the like is introduced into the housing 1 as the purge gas P from the purge gas inlet 14.
- the purge gas P introduced into the housing 1 is circulated through the housing 1 and then released from the purge gas outlet 15 to the atmosphere via the check valve 16.
- the contact sliding portion between the moving member 4 and the seal member 3 causes a slight leakage of the purge gas P during stoppage or operation (that is, always), so that the pressure inside the housing 1 is slightly higher than the atmospheric pressure (0.
- the flow rate and pressure of the purge gas P are adjusted so that the pressure can be kept high.
- the pressure inside the casing 1 is kept slightly higher than the atmospheric pressure by setting the inlet pressure of the purge gas P to 0.1 to 0.3 MPa and the flow rate to about 50 to 100 NL / min. it can.
- dustproof covers may be provided at both ends of the housing 1.
- FIG. 3 is a cross-sectional view of the edge of the opening 2 in the longitudinal direction, showing a III-III cross section in FIG.
- the rails 17 a and 17 b are provided so as to sandwich the moving member 4 near the edge of the opening 2 of the housing 1.
- rails 17 a and 17 b and a guide roller 18 are provided on the opposite side of the moving member 4 in the short direction, and these constitute the guiding means 8 of the moving member 4.
- FIG. 4 is a diagram illustrating a contact state between the guide roller 18 and the moving member 4. As shown in FIG. 4, the guide roller 18 is provided in contact with the end face in the short direction of the moving member 4.
- the screw 19 shown in FIG. 3 fixes the seal member 3 on which the moving member 4 contacts and slides to the edge of the opening 2 of the housing 1.
- a portion of the rails 17a and 17b that guides the moving member 4 is affixed with a tape made of a self-lubricating material such as urethane, polytetrafluoroethylene (fluororubber) tape, or ultrahigh molecular weight polyethylene.
- a self-lubricating material such as urethane, polytetrafluoroethylene (fluororubber) tape, or ultrahigh molecular weight polyethylene.
- the guide means 8 is the direction of movement of the moving member 4.
- the Y axis direction (width direction) orthogonal to the X axis is regulated by rails 17 a and 17 b, and the Z axis direction (thickness direction) is regulated by a guide roller 18. ⁇ Guided.
- the guide means 8 makes the sliding movement of the moving member 4 to the seal member 3 more reliable.
- the portion that can be burned by the laser beam L is very limited, so that no burnout occurs.
- the metal beam shielding plate 21 is placed along the seal member 3. By providing, it is possible to prevent the occurrence of burning more reliably.
- the seal member 3 has a lip shape at the tip (the portion that contacts the moving member 4). By making the tip of the seal member 3 into a lip shape, it is possible to increase the elasticity of the seal member 3 and reduce the sliding resistance. Moreover, airtight maintenance property can be improved by making the front-end
- various rubbers such as natural rubber, chloroprene rubber, fluororubber, and urethane rubber can be applied. Urethane rubber is suitable as a material for the seal member 3 because it is inexpensive and easily available, has excellent wear resistance, has excellent mechanical properties such as low sliding resistance, and can be molded to a desired hardness. is there.
- the moving member 4 is formed of a stainless steel strip having a thickness of 0.05 to 0.35 mm. In order to improve airtightness, it is preferable that the moving member 4 also has a spring property. If the moving member 4 is too thin, it tends to be damaged, and if it is too thick, the flexibility becomes poor and the airtightness becomes low or it becomes difficult to accommodate the moving member 4 in a compact manner. Preferably. The inventors have conducted various tests by changing the thickness of the stainless steel strip used as the moving member 4, and as a result, the stainless steel strip having a spring property of thickness 0.1mm, 0.2mm, 0.3mm.
- the moving member 4 formed of a thin material having a thickness of about 0.05 mm is suitable for an optical path structure having a small laser output, a small size and a small stroke, and is formed of a thick material up to a thickness of 0.35 mm.
- No. 4 is suitable for a large optical path structure with a large stroke.
- rust prevention and bending resistance can be improved.
- the moving member 4 having a smooth surface can be realized.
- unwinding and winding devices 9a and 9b are provided at both ends of the moving member 4 of the housing 1 in the moving direction.
- the unwinding / winding device 9a performs an operation of winding the moving member 4
- the unwinding / winding device 9b operates to unwind the moving member 4. I do.
- the moving member 4 moves leftward in FIGS. 1 and 2
- the unwinding / winding device 9 a performs an operation of unwinding the moving member 4
- the unwinding / winding device 9 b performs an operation of winding the moving member 4. I do.
- the unwinding / winding devices 9a and 9b can be configured by using a mainspring spring or the like, but the tension at the time of unwinding / winding can be controlled using a servo motor, or the moving member 4 can be driven. You may enable it to synchronize operation in conjunction with the drive means 7 which is an apparatus.
- the laser beam machine having the optical path structure according to the present embodiment since a member that expands and contracts, such as bellows, is not used, there is no need to expand or contract. Therefore, the laser beam machine having the optical path structure according to the present embodiment has a short optical path and enables stable laser processing.
- the apparatus can be designed compactly. Furthermore, high airtightness can be maintained in a state where no breathing phenomenon occurs in the optical path due to the operation of the optical path. Furthermore, since dust does not enter the inside of the housing from the outside, the inside of the housing can always be kept clean. Furthermore, since the portion that touches the laser beam L is made of a metal material, the occurrence of burning can be prevented. That is, a high-performance and safe optical path structure can be provided simply and inexpensively.
- the guide means for the moving member ensures the movement of the moving member in the correct moving direction, it is possible to realize a highly reliable optical path structure with stable airtightness and prevention of dust intrusion.
- the unwinding / winding device it is possible to ensure that both ends of the moving member are securely accommodated in the device, and to make the optical path structure compact.
- FIG. FIG. 5 is a diagram showing the configuration of the optical path structure of the laser beam machine according to the second embodiment of the present invention.
- both ends of the moving member 4 are connected and coupled to each other and are endless, supported by the support rollers 10a to 10d outside the housing 1, and configured to move together with the optical path tube 6a.
- Configurations of the housing 1 and the Z-axis unit 22 are the same as those in the first embodiment.
- each moving member 4 of the support rollers 10a to 10d has a curved surface with a convex central portion, and the support rollers 10a to 10d have an overall drum shape (crown shape). . Since the support rollers 10a to 10d have a drum shape, they are corrected so that the moving member 4 does not move in a direction orthogonal to the moving direction. Accordingly, the support rollers 10a to 10d can stably support the moving member 4 and guide the movement in the moving direction. In addition, the movable member 4 has a sufficiently large curvature that does not cause plastic deformation.
- the support rollers 10a to 10d are lightweight, the rotational speed is likely to change following the change in the moving speed of the moving member 4, and thus the anti-slip property is excellent. Moreover, since it becomes difficult to generate
- the moving member 4 and the support rollers 10a to 10d are less likely to slip even if the moving member 4 repeats high-speed movement.
- at least a part of the support rollers 10a to 10d may be elastically supported so as to be slightly movable in the moving direction (X-axis direction) of the moving member 4 or in a direction orthogonal to the moving direction (X-axis direction). good.
- the guide means shown in FIG. 3 is provided at a portion where the moving member 4 moves in the X-axis direction on the side without the opening 2 (not shown in FIG. 5) and the seal member 3 of the housing 1.
- the moving member 4 may be guided by providing the same configuration as that of FIG.
- the support rollers 10a to 10d are elastically supported so as to be movable in the moving direction of the moving member 4, and tension rollers 23a and 23b are provided at appropriate positions, so that the moving member 4 can be accelerated or decelerated. It is possible to prevent the moving member 4 from being bent in the moving direction and causing a malfunction, and it is possible to prevent the support rollers 10a to 10d and the moving member 4 from slipping and being worn or damaged.
- FIG. FIG. 6 is a diagram showing a configuration of a third embodiment of the optical path structure of the laser beam machine according to the present invention.
- the difference from the first embodiment is that the scraper 11 and the roller 20 are provided at both ends of the moving member 4 of the housing 1 in the moving direction.
- the scraper 11 is provided so as to abut on the side (inner side) of the moving member 4 that abuts and slides on the seal member 3.
- the roller 20 is provided on the opposite side (outside) of the portion of the scraper 11 that contacts the moving member 4.
- FIG. 7 is a diagram showing a contact state of the scraper 11 and the roller 20 with the moving member 4. As shown in FIG. 7, the scraper 11 and the roller 20 abut over the entire width of the moving member 4.
- the cross section of the scraper 11 has a shape (arrow shape) provided with a lip like an automobile wiper, and the lip portion of the scraper 11 abuts and slides on the moving member 4 as the moving member 4 moves. . Thereby, the dust adhering to the inside of the moving member 4 is removed by the scraper 11. Similarly, dust attached to the outside of the moving member 4 is removed by the roller 20.
- dust attached particularly to the inner side of the moving member 4 can be removed by the scraper 11, so that dust attached to the moving member 4 is prevented from being caught inside the housing 1, and the inside of the housing 1.
- the airtightness and cleanliness of the sealing member 3 can be ensured and the life of the sealing member 3 can be extended.
- FIG. FIG. 8 is a cross-sectional view of the edge in the longitudinal direction of the opening 2 in Embodiment 4 of the optical path structure of the laser beam machine according to the present invention.
- the left side is the inside of the housing 1, and the right side is the outside of the housing 1.
- the sealing member 3 includes a sponge-like elastic body 25a and a resin tape 26a attached to the sponge-like elastic body 25a.
- illustration of the support structure (attachment structure) of the seal member 3 is omitted for simplification of description, the seal member 3 is attached to the housing 1 without a gap at the peripheral inner edge of the opening 2. .
- the seal member 3 is installed so that the resin tape 25a contacts the moving member 4 in a state where the sponge-like elastic body 25a has an appropriate shrinkage margin.
- a pressing member 24 composed of a sponge-like elastic body 25b and a resin tape 26b attached to the sponge-like elastic body 25b is installed.
- the pressing member 24 is installed so that the resin tape 25b contacts the moving member 4 in a state where the sponge-like elastic body 25b has an appropriate shrinkage margin.
- the guide means 8 composed of the rails 17a and 17b and the guide roller 18 is the same as that in the first embodiment.
- the sealing member 3 and the pressing member 24 sandwich the moving member 4 with a certain elasticity.
- the seal member 3 attached to the inner peripheral edge of the opening 2 maintains the airtightness in the housing 1.
- the pressing member 24 ensures that the moving member 4 comes into contact with the resin tape 26 a of the seal member 3.
- latex sponge As the sponge-like elastic bodies 25a and 25b, latex sponge, latex sponge coated with chloroprene rubber, chloroprene sponge, silicon sponge and the like can be applied.
- the latex sponge coated with chloroprene rubber is suitable as the sponge-like elastic bodies 25a and 25b because a highly durable chloroprene rubber is coated on a latex sponge which is inexpensive and rich in elasticity but not highly durable.
- ultrahigh molecular weight polyethylene As the material of the resin tapes 26a and 26b, ultrahigh molecular weight polyethylene, polytetrafluoroethylene, urethane, or the like can be applied. Ultra high molecular weight polyethylene is commercially available and easy to obtain, and since it has high self-lubricity, it has a low coefficient of friction and high mechanical strength and wear resistance. Therefore, it is a material for the resin tapes 26a and 26b. It is suitable as. For example, a test result has been obtained in which a stainless steel belt is used as the moving member 4 and hardly deteriorates or wears even when repeatedly contacted and slid for about 1000 hours at a moving speed of 100 m / min.
- the seal member since the seal member includes a sponge-like elastic body installed inside the opening, contact with the moving member is guaranteed. Moreover, since the resin tape is provided, the sliding frictional resistance with the moving member is reduced and the airtightness is maintained. Since the pressing member installed on the outside is composed of a sponge-like elastic body and resin tape, the sliding frictional resistance against the moving member is reduced and the inner seal member of the moving member is guaranteed to contact the resin tape. can do.
- the sponge-like elastic body By configuring the sponge-like elastic body with latex sponge coated with chloroprene rubber, the sponge-like elastic body retains its elastic force for a long time without deteriorating, so that the sliding contact between the moving member and the resin tape is guaranteed. it can.
- the resin tape made of ultra high molecular weight polyethylene resin has a small coefficient of friction, the sliding resistance is small, and the airtightness and sealing property of the abutting sliding portion with the moving member can be maintained for a long time.
- the opening 2 is provided on the bottom surface of the housing 1 as an example.
- the opening 2 may be provided on the side surface or top surface of the housing 1.
- the moving member 4 is fixed to the optical path tube 6 as an example, the moving member 4 is bent so that the bend block 5 protrudes from the opening 2 or the moving member 4 enters the housing 1. It is also possible to fix to the block 5.
- the optical path structure of the laser beam machine according to the present invention can repeatedly move the optical path at high speed, has no expansion and contraction, has high airtightness, does not breathe, and is in the optical path of external dust. It is useful in that it can prevent the occurrence of intrusion and burnout, and is particularly suitable for a large optical scanning laser processing machine with a large optical path movement.
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Abstract
Description
図1は、本発明にかかるレーザ加工機の光路構造の実施の形態1の構成を示す図である。図2は、レーザ加工機の光路構造の平面図であり、図1での矢印IIを視線方向としている。筐体1は、光路全体を覆うように金属板などで構成されて密閉される。開口2は、筐体1の底面に光路の移動部分に沿って設けられている。シール部材3は、弾性を有するゴム材料などで形成されており、開口2の周囲内側縁部に設けられている。移動部材4は、金属材料などで帯状に形成されており、開口2を塞ぐようにシール部材3に当接し、摺動して移動する。ベンドブロック5aは、レーザビームLを偏向するベンドミラーを備えており、筐体1の内部に設けられる。光路管6aは、ベンドブロック5aに取り付けられており、ベンドミラーによって開口側へ偏向されたレーザビームLの光路を覆い、移動部材4を貫通して筐体1の外へ突き出ている。光路管6aには、移動部材4が固定結合されている。本実施の形態においては、ベンドブロック5a及び光路管6aは、レーザビームLを加工ヘッド12へ導く導光ユニット30をなしている。ベンドブロック5bは、筐体1の内部に設置された固定のベンドブロックであり、光路管6bと接続されている。Z軸ユニット22は、加工ヘッド12を備えており、光路管6aと接続される。Z軸ユニット22は、被加工物であるワーク13に対して焦点を合わせるべく図示のZ軸方向に加工ヘッド12を動作させる機能を有している。また、Z軸ユニット22は、ベンドブロック5a、光路管6a、加工ヘッド12とともに駆動手段7によって図示のX軸方向に駆動されて移動するように構成されている。ここでは、駆動手段7がZ軸ユニット22に固定されたベルト状である構成を示したが、Z軸ユニット22、光路管6a、加工ヘッド12及びベンドブロック5aを一体的に平行移動可能であれば、公知の任意の構成を適用可能である。例えば、Z軸ユニット22にピニオンとこれを駆動するモータとを設け、ラックに沿って移動させるようにすることも可能である。また、Z軸ユニット22にリニアモータを設けて移動させる構成とすることも可能である。
図5は、本発明にかかるレーザ加工機の光路構造の実施の形態2の構成を示す図である。本実施の形態では、移動部材4は両端部が接続・結合されてエンドレス状になっており、支持ローラ10a~10dによって筐体1の外部で支持され、光路管6aとともに移動するように構成されている点で実施の形態1と相違する。筐体1やZ軸ユニット22などの構成は実施の形態1と同様である。
図6は、本発明にかかるレーザ加工機の光路構造の実施の形態3の構成を示す図である。筐体1の移動部材4の移動方向の両端部にスクレーパ11と、ローラ20とが設けられている点で実施の形態1と相違する。
図8は、本発明にかかるレーザ加工機の光路構造の実施の形態4での開口2の長手方向の縁部の断面図である。図8においては、左側が筐体1の内側、右側が筐体1の外側である。本実施の形態においては、シール部材3は、スポンジ状弾性体25aと、スポンジ状弾性体25aに貼り付けられた樹脂製テープ26aとで構成されている。なお、説明の簡略化のためにシール部材3の支持構造(取付構造)の図示は省略しているが、シール部材3は開口2の周囲内側縁部において筐体1に隙間無く取り付けられている。
2 開口
3 シール部材
4 移動部材
5a、5b ベンドブロック
6a、6b 光路管
7 駆動手段
8 案内手段
9a、9b 巻出巻取装置
10a、10b、10c、10d 支持ローラ
11 スクレーパ
12 加工ヘッド
13 ワーク
14 パージガス入口
15 パージガス出口
16 逆止弁
17a、17b レール
18 ガイドローラ
19 ネジ
20 ローラ
21 ビーム遮蔽板
22 Z軸ユニット
23a、23b テンションローラ
24 押付部材
25a、25b スポンジ状弾性体
26a、26b 樹脂製テープ
30 導光ユニット
L レーザビーム
P パージガス
Claims (11)
- レーザビームを加工ヘッドから被加工物に照射してレーザ加工を行うレーザ加工機の光路構造であって、
細長な箱状で長手面の一つに開口を有する筐体と、
前記筐体内を該筐体の長手方向に進行するレーザビームを前記開口側へ偏向するベンドミラーを備え、前記筐体の長手方向へ移動可能に該筐体内に設置されたベンドブロックと、該ベンドブロックから前記開口側へ突出して設けられ、前記ベンドミラーによって前記開口側へ偏向された前記レーザビームの光路を覆う光路管とを含み、該光路管を通過した前記レーザビームを前記加工ヘッドへ導く導光ユニットと、
弾性体で構成され前記開口の縁部に設置されたシール部材と、
前記筐体外において前記シール部材に当接して前記開口を塞ぐ帯状であり、前記シール部材に対して摺動することにより前記開口を塞いだ状態で長手方向に移動可能で、前記導光ユニットに固定された移動部材と、
前記移動部材及び前記導光ユニットを一体的に前記移動部材の長手方向へ移動させる駆動手段とを有することを特徴とするレーザ加工機の光路構造。 - 前記筐体は、前記移動部材の幅方向及び厚さ方向の移動を規制する案内手段を備えることを特徴とする請求項1記載のレーザ加工機の光路構造。
- 前記筐体の長手方向の両端それぞれの近傍に、前記移動部材の巻き出し及び巻き取りを行う巻出巻取装置を有することを特徴とする請求項1記載のレーザ加工機の光路構造。
- 前記移動部材は両端部を接合したエンドレス状であって前記筐体を囲うように配置されており、前記筐体の周囲に設置された支持ローラによって移動が案内されることを特徴とする請求項1記載のレーザ加工機の光路構造。
- 前記支持ローラは、前記移動部材の移動方向へ移動可能に弾性的に設置されていることを特徴とする請求項4記載のレーザ加工機の光路構造。
- 前記移動部材の張力を一定に保つテンションローラを有することを特徴とする請求項4記載のレーザ加工機の光路構造。
- 前記支持ローラは太鼓状であることを特徴とする請求項4記載のレーザ加工機の光路構造。
- 前記移動部材の前記シール部材と当接する側の面と当接するスクレーパを有することを特徴とする請求項1記載のレーザ加工機の光路構造。
- 前記シール部材は、ウレタンゴム製で、前記移動部材と当接する部分がリップ形状となっており、
前記移動部材は、ステンレス鋼帯であることを特徴とする請求項1記載のレーザ加工機の光路構造。 - 前記シール部材は、前記開口の縁部に取り付けられたスポンジ状弾性体と、該スポンジ状弾性体に貼り付けられた樹脂製テープとで構成されており、
前記移動部材を挟んで前記シール部材と対向するように、スポンジ状弾性体に樹脂テープを貼り付けて構成された押付部材が設置されたことを特徴とする請求項1から8のいずれか1項記載のレーザ加工機の光路構造。 - 前記スポンジ状弾性体は、クロロプレンゴムが被覆されたラテックススポンジであり、
前記樹脂製テープは、超高分子量ポリエチレン樹脂を材料として構成されていることを特徴とする請求項10記載のレーザ加工機の光路構造。
Priority Applications (3)
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US13/639,775 US20130032580A1 (en) | 2010-11-29 | 2011-11-11 | Optical path structure of laser processing machine |
CN2011800183789A CN102844145A (zh) | 2010-11-29 | 2011-11-11 | 激光加工机的光路构造 |
JP2012520416A JP5132838B2 (ja) | 2010-11-29 | 2011-11-11 | レーザ加工機の光路構造 |
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JP2010265274 | 2010-11-29 |
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US (1) | US20130032580A1 (ja) |
JP (1) | JP5132838B2 (ja) |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11839861B2 (en) | 2014-01-17 | 2023-12-12 | Genzyme Corporation | Sterile chromatography resin and use thereof in manufacturing processes |
US11912739B2 (en) | 2014-01-17 | 2024-02-27 | Genzyme Corporation | Sterile chromatography and manufacturing processes |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5871013B2 (ja) * | 2011-12-27 | 2016-03-01 | Jfeスチール株式会社 | 方向性電磁鋼板の鉄損改善装置 |
CN110014234A (zh) * | 2018-01-05 | 2019-07-16 | 北京源欧森激光设备有限公司 | 圆模激光切割机 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS632582A (ja) * | 1986-06-19 | 1988-01-07 | Shibuya Kogyo Co Ltd | フオ−カスヘツドの移動を許容する開口部の閉鎖装置 |
JPS6363595A (ja) * | 1986-09-02 | 1988-03-19 | Mitsubishi Electric Corp | レ−ザ光伝送装置 |
JPH01245991A (ja) * | 1988-03-29 | 1989-10-02 | Haitekuno:Kk | レーザー切断装置 |
JPH0577076A (ja) * | 1991-09-18 | 1993-03-30 | Amada Co Ltd | レーザ加工機の光軸防塵装置 |
JP2005103596A (ja) * | 2003-09-30 | 2005-04-21 | Amada Co Ltd | シール機構 |
JP2005230839A (ja) * | 2004-02-18 | 2005-09-02 | Yamazaki Mazak Corp | レーザ加工機 |
JP2007118016A (ja) * | 2005-10-26 | 2007-05-17 | Yamazaki Mazak Corp | レーザ加工機光路系のシール装置 |
JP2007118057A (ja) * | 2005-10-31 | 2007-05-17 | Yamazaki Mazak Corp | レーザ加工機光路系の防塵装置 |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US795651A (en) * | 1905-05-08 | 1905-07-25 | Sylvanus B Roy | Traverse grinder. |
LU71852A1 (ja) * | 1975-02-14 | 1977-01-05 | ||
US4187408A (en) * | 1975-10-24 | 1980-02-05 | Union Carbide Corporation | Method for laser seam welding of moving workpieces |
US4484058A (en) * | 1982-03-25 | 1984-11-20 | United Technologies Corporation | Electron beam hole drilling apparatus |
JPS60170814A (ja) * | 1984-02-16 | 1985-09-04 | Toshiba Corp | ダクト |
US4694733A (en) * | 1985-11-08 | 1987-09-22 | Greenco Corporation | Cable shield for a rodless cylinder |
JPH0710141B2 (ja) * | 1989-09-21 | 1995-02-01 | 株式会社日立製作所 | ケーブルの端末処理方法およびその端末処理装置 |
DE4326338C2 (de) * | 1993-08-05 | 1996-07-18 | Daimler Benz Aerospace Ag | Schweißroboter |
DE19642542B4 (de) * | 1995-11-16 | 2010-07-29 | Norddeutsche Seekabelwerke Gmbh & Co. Kg | Vorrichtung sowie Verfahren zur Erzeugung von Überlängen eines Lichtwellenleiters gegenüber einem metallischen Röhrchen |
WO1999060397A1 (en) * | 1998-05-18 | 1999-11-25 | University Of Washington | Liquid analysis cartridge |
JP4444384B2 (ja) * | 1999-02-22 | 2010-03-31 | 株式会社アマダエンジニアリングセンター | レーザ加工装置 |
GB0017684D0 (en) * | 2000-07-19 | 2000-09-06 | Bae Systems Plc | Tool positioning system |
CH695344A5 (de) * | 2001-06-13 | 2006-04-13 | Rieter Ag Maschf | Vorrichtung mit einem Riemen zur Herstellung eines Wattewickels. |
US6835912B2 (en) * | 2002-05-28 | 2004-12-28 | Trumpf, Inc. | Laser cutting machine with two Y-axis drives |
GB0212659D0 (en) * | 2002-05-31 | 2002-07-10 | Bae Systems Plc | Tool movement and positioning system |
JP4335154B2 (ja) * | 2003-05-20 | 2009-09-30 | 三菱電機株式会社 | レーザ加工装置 |
JP2006156423A (ja) * | 2003-07-09 | 2006-06-15 | Bridgestone Corp | ゴム磁石シートおよびゴム磁石シートの製造方法 |
US7161114B2 (en) * | 2003-10-01 | 2007-01-09 | Trumpf Inc. | Laser cutting installation with parts unloading unit |
JP4357944B2 (ja) * | 2003-12-05 | 2009-11-04 | トヨタ自動車株式会社 | 固体レーザ加工装置およびレーザ溶接方法 |
EP1632305A1 (de) * | 2004-09-04 | 2006-03-08 | Trumpf Werkzeugmaschinen GmbH + Co. KG | Verfahren zur Ermittlung und Verfahren zur Einstellung der gegenseitigen Lage der Achse eines Laserbearbeitungsstrahls und der Achse eines Prozessgasstrahls an einer Laserbearbeitungsmaschine sowie Laserbearbeitungsmaschine mit Einrichtungen zur Umsetzung der Verfahren |
ITTO20050016A1 (it) * | 2005-01-13 | 2006-07-14 | Prima Ind Spa | Macchina operatrice laser |
EP1742307B1 (de) * | 2005-07-08 | 2008-08-20 | Trumpf Werkzeugmaschinen GmbH + Co. KG | Vorrichtung zur Beeinflussung der Polarisation einer Laserstrahlung |
CN101346800B (zh) * | 2005-12-20 | 2011-09-14 | 株式会社半导体能源研究所 | 用于制造半导体装置的激光辐射设备和方法 |
JP5266647B2 (ja) * | 2006-03-23 | 2013-08-21 | 日産自動車株式会社 | レーザ溶接装置およびその調整方法 |
CN101443154B (zh) * | 2006-05-09 | 2012-10-24 | 通快激光与***工程有限公司 | 具有激光束引导装置通风装置的激光加工机和激光加工机的激光束引导装置的通风方法 |
DE102006035647A1 (de) * | 2006-07-31 | 2008-02-07 | Kaindl Flooring Gmbh | Vorrichtung zum Herstellen oder/und Bearbeiten von Paneelen |
JP2008285275A (ja) * | 2007-05-17 | 2008-11-27 | Nakanishi Metal Works Co Ltd | 巻取ベルト式昇降装置 |
DE102007050334A1 (de) * | 2007-10-18 | 2009-04-23 | Efaflex Tor- Und Sicherheitssysteme Gmbh & Co. Kg | Verfahren und Einrichtung zur Steuerung eines vertikal oder horizontal bewegten Tores unter Absicherung der Torschließebene gegenüber Hindernissen |
DE102007055453B4 (de) * | 2007-11-19 | 2019-03-07 | Coast Composites, Inc. | Vorrichtung und Verfahren zum Laserschweißen |
EP2216866A3 (en) * | 2009-02-06 | 2011-07-13 | HID Global GmbH | Method to strip a portion of an insulated wire |
CN201394853Y (zh) * | 2009-03-27 | 2010-02-03 | 兖州煤业股份有限公司 | 输送带切割修整机 |
-
2011
- 2011-11-11 US US13/639,775 patent/US20130032580A1/en not_active Abandoned
- 2011-11-11 CN CN2011800183789A patent/CN102844145A/zh active Pending
- 2011-11-11 WO PCT/JP2011/076093 patent/WO2012073677A1/ja active Application Filing
- 2011-11-11 JP JP2012520416A patent/JP5132838B2/ja active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS632582A (ja) * | 1986-06-19 | 1988-01-07 | Shibuya Kogyo Co Ltd | フオ−カスヘツドの移動を許容する開口部の閉鎖装置 |
JPS6363595A (ja) * | 1986-09-02 | 1988-03-19 | Mitsubishi Electric Corp | レ−ザ光伝送装置 |
JPH01245991A (ja) * | 1988-03-29 | 1989-10-02 | Haitekuno:Kk | レーザー切断装置 |
JPH0577076A (ja) * | 1991-09-18 | 1993-03-30 | Amada Co Ltd | レーザ加工機の光軸防塵装置 |
JP2005103596A (ja) * | 2003-09-30 | 2005-04-21 | Amada Co Ltd | シール機構 |
JP2005230839A (ja) * | 2004-02-18 | 2005-09-02 | Yamazaki Mazak Corp | レーザ加工機 |
JP2007118016A (ja) * | 2005-10-26 | 2007-05-17 | Yamazaki Mazak Corp | レーザ加工機光路系のシール装置 |
JP2007118057A (ja) * | 2005-10-31 | 2007-05-17 | Yamazaki Mazak Corp | レーザ加工機光路系の防塵装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11839861B2 (en) | 2014-01-17 | 2023-12-12 | Genzyme Corporation | Sterile chromatography resin and use thereof in manufacturing processes |
US11912739B2 (en) | 2014-01-17 | 2024-02-27 | Genzyme Corporation | Sterile chromatography and manufacturing processes |
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JPWO2012073677A1 (ja) | 2014-05-19 |
CN102844145A (zh) | 2012-12-26 |
JP5132838B2 (ja) | 2013-01-30 |
US20130032580A1 (en) | 2013-02-07 |
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