WO2012032918A1 - 振動ミラー素子 - Google Patents
振動ミラー素子 Download PDFInfo
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- WO2012032918A1 WO2012032918A1 PCT/JP2011/068782 JP2011068782W WO2012032918A1 WO 2012032918 A1 WO2012032918 A1 WO 2012032918A1 JP 2011068782 W JP2011068782 W JP 2011068782W WO 2012032918 A1 WO2012032918 A1 WO 2012032918A1
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- 230000010355 oscillation Effects 0.000 title abstract 4
- 238000001514 detection method Methods 0.000 claims abstract description 314
- 238000005452 bending Methods 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000000059 patterning Methods 0.000 claims description 4
- 230000035945 sensitivity Effects 0.000 description 27
- 238000007689 inspection Methods 0.000 description 22
- 238000004519 manufacturing process Methods 0.000 description 13
- 238000005259 measurement Methods 0.000 description 10
- 238000000926 separation method Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 7
- 230000009466 transformation Effects 0.000 description 7
- 239000012212 insulator Substances 0.000 description 5
- 229910001020 Au alloy Inorganic materials 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- UYLYBEXRJGPQSH-UHFFFAOYSA-N sodium;oxido(dioxo)niobium Chemical compound [Na+].[O-][Nb](=O)=O UYLYBEXRJGPQSH-UHFFFAOYSA-N 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
Definitions
- the present invention relates to a vibrating mirror element, and more particularly to a vibrating mirror element provided with a detection electrode for detecting the amount of deformation.
- a vibrating mirror element having a detection electrode for detecting the amount of deformation is known.
- Such a vibrating mirror element is disclosed in, for example, Japanese Patent Application Laid-Open No. 2009-229517.
- the mirror section 1 is tilted in the A1 direction and the A2 direction (see FIG. 1) by the torsion bars 2a and 2b, and is supported by the torsion bars 2a and 2b that can be deformed in a twistable manner.
- the deformation of the drive units 4 and 5 is transmitted through the bars 3a and 3b and the torsion bars 2a and 2b, so that the mirror unit 1 is configured to tilt.
- the length L2 in the Y direction of the detection electrode 205 was set to 0.5 mm (500 ⁇ m). That is, the length L2 of the detection electrode 205 in the Y direction is set to a quarter of the length L1 of the drive electrode 204 in the Y direction.
- Example 1 the detection sensitivity was higher than 4 mV / ⁇ m, whereas in Example 3, the detection sensitivity was lower than 3 mV / ⁇ m.
- Example 3 is susceptible to noise due to an unnecessary potential difference in an electric circuit (not shown) to which the detection electrode 205 is connected due to the low detection sensitivity. That is, in Example 3, it is considered difficult to accurately detect the deformation amount in the drive unit.
- the detection sensitivity is high, it is difficult to be affected by noise, so it is considered that the deformation amount in the drive unit can be detected more accurately than in the third embodiment.
- Examples 1 and 2 are more preferable for obtaining the effect of the present invention that ensures sufficient detection sensitivity.
- the inventor of the present application even when the length L2 of the detection electrode 205 in the Y direction is half the length of the inspection member 200 in the Y direction (the length of the driving electrode 204 in the Y direction) L1, It has been found that sufficient detection sensitivity can be secured.
- the inspection member 200 of Example 2 corresponding to the driving units 4 and 5 in the first embodiment of the present invention is the most effective configuration for ensuring sufficient detection sensitivity while increasing the driving force. it is conceivable that.
- the detection electrodes 374 and 384 are formed over substantially the entire area on the upper surfaces (Z1 side) of the piezoelectric layers 373 and 383, respectively.
- the detection electrodes 374 and 384 are both made of Pt or Cr—Au alloy.
- the drive units 304 and 305 include drive portions 304a and 305a and detection portions 370 and 380, respectively, and on the upper surfaces of the drive electrodes 344 and 354, respectively, in the longitudinal direction (
- the detection portions 370 and 380 disposed on the surfaces of the drive portions 304a and 305a can be easily deformed by forming the rectangular detection portions 370 and 380 so as to extend in the Y direction). Can be detected.
- the detection portion 470 including the detection electrode 474 is formed on the lower surface of the base portion 40 of the drive portion 304a and the detection is performed on the lower surface of the base portion 50 of the drive portion 305a.
- An example in which the detection portion 480 including the working electrode 484 is formed will be described.
- the insulating layer 471 and 481 are both made of SiO 2.
- the drive units 404 and 405 are examples of the “first drive unit” and the “second drive unit” of the present invention, respectively, and the piezoelectric layers 473 and 483 are the “detection piezoelectric body” of the present invention. It is an example.
- the detection electrodes 474 and 484 are examples of the “first detection electrode” and the “second detection electrode” in the present invention, respectively.
- the detection electrode 45 (545) is connected to the side surface portion 4a (504a) on the one end side (X1 side) of the drive portion 4 (504) close to the fixed portion 6a.
- the detection electrode 55 (555) is formed in the vicinity of the side surface portion 5a (505a) on the other end side (X2 side) of the drive portion 5 (505) close to the fixed portion 6b.
- the present invention is not limited to this.
- the detection electrodes 645 and 655 are arranged in the longitudinal direction at the approximate center in the short direction (X direction) of the drive units 604 and 605, respectively. You may form so that it may extend in (Y direction).
- the detection electrodes 45 and 55 are symmetrical in the longitudinal direction (Y direction) with the central part 4c of the driving unit 4 and the central part 5c of the driving unit 5 as boundaries.
- this invention is not limited to this.
- the drive unit 804 may be provided with the detection electrode 845 while the drive unit 805 may not be provided with the detection electrode. .
- a detection electrode 845 on one side of the Y direction of the drive unit 804 (Y1 side)
- it may be configured not to detecting electrode 845 provided on the other side (Y2 side).
- the drive units 4 (304, 404) and 5 (305, 405) are provided on both sides in the short direction (X direction) of the mirror unit 1 .
- the present invention is not limited to this.
- the drive unit may be provided only on one side in the X direction of the mirror unit.
- the piezoelectric layer 43 so as to form a substantially entire surface of the piezoelectric layer 43 (53) lower electrode 42 (52) a drive unit 4 arranged on the lower surface (5), the piezoelectric layer 43 (53 The electrode arranged on the upper surface of FIG. 4 is divided into the drive electrode 44 (54) and the detection electrode 45 (55), but the present invention is not limited to this.
- the electrode disposed on the upper surface of the piezoelectric layer is formed on substantially the entire surface of the drive unit, and the electrode disposed on the lower surface of the piezoelectric layer is divided into a drive electrode and a detection electrode. May be.
- the present invention will now Not limited to.
- a drive unit that can tilt and vibrate the mirror unit in a direction different from the A1 and A2 directions may be provided outside the vibrating mirror element. This makes it possible to tilt and vibrate the mirror portion two-dimensionally.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
Description
まず、図1~図6を参照して、本発明の一実施形態による振動ミラー素子100の構成について説明する。
次に、図11および図12を参照して、本発明の第2実施形態による振動ミラー素子300の構造について説明する。この第2実施形態では、上記第1実施形態と異なり、駆動部分304aおよび305aの略全面に渡って、駆動用電極344および354をそれぞれ形成するとともに、駆動用電極344および354の上面上に、検出用電極374を含む検出部分370および検出用電極384を含む検出部分380をそれぞれ形成した例について説明する。
次に、図13および図14を参照して、本発明の第3実施形態による振動ミラー素子400の構造について説明する。この第3実施形態では、上記第2実施形態と異なり、駆動部分304aの基部40の下面上に検出用電極474を含む検出部分470を形成するとともに、駆動部分305aの基部50の下面上に検出用電極484を含む検出部分480を形成した例について説明する。
Claims (20)
- ミラー部(1)と、
前記ミラー部を駆動させる駆動部(4、5、304、305、404、405)とを備え、
前記駆動部には、電圧の印加により前記駆動部を変形させて駆動させるための駆動用電極(44、54、344、354)と、前記駆動部の変形量を検出するための検出用電極(45、55、374、384、474、484)とが配置されている、振動ミラー素子(100、300、400)。 - 前記検出用電極は、前記駆動用電極の長手方向に沿って延びるように形成されている、請求項1に記載の振動ミラー素子。
- 前記検出用電極の長手方向における長さは、前記駆動用電極の長手方向における長さの半分以上である、請求項2に記載の振動ミラー素子。
- 前記検出用電極の長手方向における長さは、前記駆動用電極の長手方向における長さ未満である、請求項2に記載の振動ミラー素子。
- 前記駆動用電極と前記検出用電極とは、互いに絶縁された状態で配置されている、請求項1に記載の振動ミラー素子。
- 前記検出用電極は、前記駆動部の変形に伴って変形するように構成されている、請求項1に記載の振動ミラー素子。
- 前記検出用電極は、前記駆動部の前記ミラー部とは反対側の一方側面(4a、5a)近傍に配置されている、請求項1に記載の振動ミラー素子。
- 前記駆動部は、前記一方側面において、前記駆動部の長手方向に沿って直線状に延びるように形成されているとともに、前記駆動部の前記ミラー部側の他方側面(4b、5b)において、前記駆動部の長手方向の中央(4c、5c)から両端部(4d、4e、5d、5e)に向かって、前記一方側面側に傾斜するように構成されており、
前記検出用電極は、前記駆動部の長手方向に沿って直線状に延びるように形成されている、請求項7に記載の振動ミラー素子。 - 前記検出用電極(374、384、474、484)は、前記駆動用電極(344、354)の長手方向に沿って延びており、
前記駆動用電極および前記検出用電極は、共に、前記長手方向における中央を通り短手方向に延びる直線(B1、B2)を境にして略対称に形成されている、請求項1に記載の振動ミラー素子(300、400)。 - 前記駆動部は、前記駆動部の長手方向の略中央に位置する固定端(4c、5c)と、前記駆動部の長手方向の両端部に位置する一対の自由端(4d、4e、5d、5e)とを含み、
前記駆動部は、前記固定端に対して前記一対の自由端が前記駆動部の表面に対して垂直方向に変位することによって、凹形状および凸形状に撓み変形可能なように構成されており、
前記検出用電極は、前記駆動部の凹形状および凸形状への撓み変形に基づく前記駆動部の変形量を検出するように構成されている、請求項1に記載の振動ミラー素子。 - 前記駆動用電極(44、54)と前記検出用電極(45、55)とは、同一面上に配置されている、請求項1に記載の振動ミラー素子(100)。
- 前記駆動用電極と前記検出用電極とは、同一の金属層をパターニングすることにより形成されている、請求項11に記載の振動ミラー素子。
- 前記駆動用電極は、前記検出用電極の外周部と離間した状態で、前記検出用電極の周囲を取り囲むように配置されている、請求項11に記載の振動ミラー素子。
- 前記駆動部(4、5)は、共通圧電体(43、53)と、前記共通圧電体の一方面上に配置された共通電極(42、52)とを含み、
前記駆動用電極は、前記共通圧電体の他方面上の第1領域に配置されているとともに、前記検出用電極は、前記共通圧電体の他方面上の前記第1領域とは異なる第2領域に配置されており、
前記駆動部では、前記共通電極と前記駆動用電極との間に電圧を印加することにより前記共通圧電体が変形されるように構成されており、
前記検出用電極は、前記共通圧電体の変形によって生じる前記共通電極との電位差を検出するように構成されている、請求項11に記載の振動ミラー素子。 - 前記駆動部(304、305、404、405)は、前記駆動用電極に電圧が印加されることによって変形する駆動用圧電体(343、353)と、前記駆動用圧電体の変形に伴って変形する検出用圧電体(373、383、473、483)とを含み、
前記検出用電極は、前記検出用圧電体の変形によって生じる電圧を検出するように構成されている、請求項1に記載の振動ミラー素子(300、400)。 - 前記駆動用電極は、前記駆動用圧電体の表面の略全域に配置されており、
前記検出用電極は、前記検出用圧電体の表面の略全域に配置されている、請求項15に記載の振動ミラー素子。 - 前記駆動部には、前記駆動用圧電体および前記駆動用電極を有する駆動部分(304a、305a)と、前記検出用圧電体および前記検出用電極とを有する検出部分(370、380、470、480)とが設けられており、
前記検出部分は、前記駆動部分の表面上に配置されている、請求項15に記載の振動ミラー素子。 - 前記駆動部は、第1駆動用電極(44、344)および第1検出用電極(45、374、474)が配置された第1駆動部(4、304、404)と、第2駆動用電極(54、354)および第2検出用電極(55、384、484)が配置された第2駆動部(5、305、405)とを含み、
前記第1駆動用電極および前記第2駆動用電極は、長手方向に略同一の長さを有するとともに、前記第1検出用電極および前記第2検出用電極は、前記長手方向に略同一の長さを有するように構成されている、請求項1に記載の振動ミラー素子。 - 前記ミラー部の両側にそれぞれ一方端部側が接続され、前記ミラー部を支持する一対の第1梁部(2a、2b)と、
前記一対の第1梁部の他方端部側とそれぞれ接続されるとともに、一方端側が前記第1駆動部に接続され、他方端側が前記第2駆動部に接続される一対の第2梁部(3a、3b)とをさらに備え、
前記第1駆動部および前記第2駆動部の変形が、前記一対の第1梁部および前記一対の第2梁部を介して伝達されることによって、前記ミラー部が傾斜するように構成されている、請求項18に記載の振動ミラー素子。 - 前記ミラー部および前記駆動部は、一体的に形成されている、請求項1に記載の振動ミラー素子。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP11823397.2A EP2615485A1 (en) | 2010-09-07 | 2011-08-19 | Oscillation mirror element |
CN2011800430748A CN103097937A (zh) | 2010-09-07 | 2011-08-19 | 振动反射镜器件 |
KR1020137004723A KR20130143553A (ko) | 2010-09-07 | 2011-08-19 | 진동 미러 소자 |
US13/820,327 US20130163061A1 (en) | 2010-09-07 | 2011-08-19 | Vibrating Mirror Element |
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JP2010199681A JP5531867B2 (ja) | 2010-09-07 | 2010-09-07 | 振動ミラー素子 |
JP2010-199681 | 2010-09-07 |
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WO2012032918A1 true WO2012032918A1 (ja) | 2012-03-15 |
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US (1) | US20130163061A1 (ja) |
EP (1) | EP2615485A1 (ja) |
JP (1) | JP5531867B2 (ja) |
KR (1) | KR20130143553A (ja) |
CN (1) | CN103097937A (ja) |
TW (1) | TW201224509A (ja) |
WO (1) | WO2012032918A1 (ja) |
Cited By (1)
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EP2757403A1 (en) * | 2013-01-16 | 2014-07-23 | Funai Electric Co., Ltd. | Vibrating mirror device and electronic device having a projector function |
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JP2014115445A (ja) * | 2012-12-10 | 2014-06-26 | Funai Electric Co Ltd | 光学装置 |
US9470503B2 (en) * | 2014-02-26 | 2016-10-18 | Apple Inc. | Strain-based sensing of mirror position |
CN106324827B (zh) * | 2016-09-29 | 2019-03-12 | 东南大学 | 一种谐振式液体振镜及其驱动方法 |
US11360300B2 (en) * | 2016-11-09 | 2022-06-14 | Dai-Ichi Seiko Co., Ltd. | Movable reflective device |
US11880031B1 (en) | 2020-01-14 | 2024-01-23 | Apple Inc. | Strain-based sensing of dual-axis mirror rotation |
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-
2011
- 2011-08-19 WO PCT/JP2011/068782 patent/WO2012032918A1/ja active Application Filing
- 2011-08-19 CN CN2011800430748A patent/CN103097937A/zh active Pending
- 2011-08-19 EP EP11823397.2A patent/EP2615485A1/en not_active Withdrawn
- 2011-08-19 KR KR1020137004723A patent/KR20130143553A/ko not_active Application Discontinuation
- 2011-08-19 US US13/820,327 patent/US20130163061A1/en not_active Abandoned
- 2011-09-05 TW TW100131889A patent/TW201224509A/zh unknown
Patent Citations (5)
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JP2007199682A (ja) * | 2005-12-27 | 2007-08-09 | Konica Minolta Holdings Inc | 光偏向器および光ビーム走査装置 |
JP2009169195A (ja) * | 2008-01-18 | 2009-07-30 | Brother Ind Ltd | 光スキャナ及び光スキャナの製造方法 |
JP2009265560A (ja) * | 2008-04-30 | 2009-11-12 | Panasonic Corp | 光学反射素子 |
JP2010122413A (ja) * | 2008-11-19 | 2010-06-03 | Panasonic Corp | 光学反射素子 |
JP2010139977A (ja) * | 2008-12-15 | 2010-06-24 | Kyoto Univ | 振動ミラー素子 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2757403A1 (en) * | 2013-01-16 | 2014-07-23 | Funai Electric Co., Ltd. | Vibrating mirror device and electronic device having a projector function |
Also Published As
Publication number | Publication date |
---|---|
KR20130143553A (ko) | 2013-12-31 |
TW201224509A (en) | 2012-06-16 |
US20130163061A1 (en) | 2013-06-27 |
CN103097937A (zh) | 2013-05-08 |
JP2012058367A (ja) | 2012-03-22 |
JP5531867B2 (ja) | 2014-06-25 |
EP2615485A1 (en) | 2013-07-17 |
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