WO2009004722A1 - プローブおよびプローブカード - Google Patents

プローブおよびプローブカード Download PDF

Info

Publication number
WO2009004722A1
WO2009004722A1 PCT/JP2007/063314 JP2007063314W WO2009004722A1 WO 2009004722 A1 WO2009004722 A1 WO 2009004722A1 JP 2007063314 W JP2007063314 W JP 2007063314W WO 2009004722 A1 WO2009004722 A1 WO 2009004722A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe
beam parts
contact point
end region
posterior end
Prior art date
Application number
PCT/JP2007/063314
Other languages
English (en)
French (fr)
Inventor
Koichi Wada
Original Assignee
Advantest Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corporation filed Critical Advantest Corporation
Priority to JP2009521483A priority Critical patent/JP5100751B2/ja
Priority to US12/667,084 priority patent/US8507908B2/en
Priority to KR1020107002103A priority patent/KR101106971B1/ko
Priority to CN200780053525A priority patent/CN101688885A/zh
Priority to PCT/JP2007/063314 priority patent/WO2009004722A1/ja
Priority to TW097124546A priority patent/TW200912326A/zh
Publication of WO2009004722A1 publication Critical patent/WO2009004722A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06727—Cantilever beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

　プローブ（４０）は、被試験半導体ウェハに造り込まれたＩＣデバイスの入出力端子に電気的に接続される接点部（４５）と、接点部（４５）が先端に設けられた配線部（４４）と、配線部（４４）が長手方向に沿って上面に設けられた複数の梁部（４２）と、複数の梁部（４２）をまとめて片持ち支持している台座部（４１）と、を備えており、各梁部（４２）は、当該梁部（４２）の後端領域（４２２）で台座部（４１）に支持され、後端領域（４２２）において隣接する梁部（４２）同士の間に溝（４３Ａ）が設けられている。
PCT/JP2007/063314 2007-07-03 2007-07-03 プローブおよびプローブカード WO2009004722A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2009521483A JP5100751B2 (ja) 2007-07-03 2007-07-03 プローブおよびプローブカード
US12/667,084 US8507908B2 (en) 2007-07-03 2007-07-03 Probe and probe card
KR1020107002103A KR101106971B1 (ko) 2007-07-03 2007-07-03 프로브 및 프로브 카드
CN200780053525A CN101688885A (zh) 2007-07-03 2007-07-03 探针及探针卡
PCT/JP2007/063314 WO2009004722A1 (ja) 2007-07-03 2007-07-03 プローブおよびプローブカード
TW097124546A TW200912326A (en) 2007-07-03 2008-06-30 Probe and probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/063314 WO2009004722A1 (ja) 2007-07-03 2007-07-03 プローブおよびプローブカード

Publications (1)

Publication Number Publication Date
WO2009004722A1 true WO2009004722A1 (ja) 2009-01-08

Family

ID=40225792

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/063314 WO2009004722A1 (ja) 2007-07-03 2007-07-03 プローブおよびプローブカード

Country Status (6)

Country Link
US (1) US8507908B2 (ja)
JP (1) JP5100751B2 (ja)
KR (1) KR101106971B1 (ja)
CN (1) CN101688885A (ja)
TW (1) TW200912326A (ja)
WO (1) WO2009004722A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4555362B2 (ja) * 2008-06-02 2010-09-29 株式会社アドバンテスト プローブ、電子部品試験装置及びプローブの製造方法
TWI465726B (zh) * 2012-01-10 2014-12-21 Star Techn Inc 具有強化探針電性觸點結構之積體電路測試卡
JP6237441B2 (ja) * 2014-04-24 2017-11-29 日本電産リード株式会社 電極構造体、検査治具、及び電極構造体の製造方法
JP2016050860A (ja) * 2014-08-29 2016-04-11 オムロン株式会社 検査端子ユニットおよびプローブカードおよび検査端子ユニットの製造方法
US10739381B2 (en) 2017-05-26 2020-08-11 Tektronix, Inc. Component attachment technique using a UV-cure conductive adhesive
TWI833373B (zh) * 2022-09-28 2024-02-21 研鋐精密電子科技股份有限公司 用於探針卡的通用電路板

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000249722A (ja) * 1999-01-29 2000-09-14 Advantest Corp フォトリソグラフィで形成するコンタクトストラクチャ
JP2002520596A (ja) * 1998-07-08 2002-07-09 カプレス エイピーエス 多探針プローブ
JP2003509695A (ja) * 1999-09-15 2003-03-11 カプレス アクティーゼルスカブ 高分解能位置決めおよび多探針プローブの位置決め用ナノドライブ
JP2005300501A (ja) * 2004-04-16 2005-10-27 Ritsumeikan マルチプローブの製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7304486B2 (en) * 1998-07-08 2007-12-04 Capres A/S Nano-drive for high resolution positioning and for positioning of a multi-point probe
US6343369B1 (en) * 1998-09-15 2002-01-29 Microconnect, Inc. Methods for making contact device for making connection to an electronic circuit device and methods of using the same
US6436802B1 (en) * 1998-11-30 2002-08-20 Adoamtest Corp. Method of producing contact structure
JP2974214B1 (ja) * 1998-12-16 1999-11-10 株式会社双晶テック プローブユニット
US6535003B2 (en) * 1999-01-29 2003-03-18 Advantest, Corp. Contact structure having silicon finger contactor
US6232669B1 (en) 1999-10-12 2001-05-15 Advantest Corp. Contact structure having silicon finger contactors and total stack-up structure using same
US7245135B2 (en) * 2005-08-01 2007-07-17 Touchdown Technologies, Inc. Post and tip design for a probe contact

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002520596A (ja) * 1998-07-08 2002-07-09 カプレス エイピーエス 多探針プローブ
JP2000249722A (ja) * 1999-01-29 2000-09-14 Advantest Corp フォトリソグラフィで形成するコンタクトストラクチャ
JP2003509695A (ja) * 1999-09-15 2003-03-11 カプレス アクティーゼルスカブ 高分解能位置決めおよび多探針プローブの位置決め用ナノドライブ
JP2005300501A (ja) * 2004-04-16 2005-10-27 Ritsumeikan マルチプローブの製造方法

Also Published As

Publication number Publication date
CN101688885A (zh) 2010-03-31
JPWO2009004722A1 (ja) 2010-08-26
US20100176829A1 (en) 2010-07-15
KR101106971B1 (ko) 2012-01-20
KR20100022124A (ko) 2010-02-26
JP5100751B2 (ja) 2012-12-19
US8507908B2 (en) 2013-08-13
TW200912326A (en) 2009-03-16
TWI378242B (ja) 2012-12-01

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