WO2006114843A1 - サーボモータの制御装置 - Google Patents
サーボモータの制御装置 Download PDFInfo
- Publication number
- WO2006114843A1 WO2006114843A1 PCT/JP2005/006912 JP2005006912W WO2006114843A1 WO 2006114843 A1 WO2006114843 A1 WO 2006114843A1 JP 2005006912 W JP2005006912 W JP 2005006912W WO 2006114843 A1 WO2006114843 A1 WO 2006114843A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- control
- voltage
- servo motor
- bus voltage
- signal
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P23/00—Arrangements or methods for the control of AC motors characterised by a control method other than vector control
- H02P23/0077—Characterised by the use of a particular software algorithm
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B11/00—Automatic controllers
- G05B11/01—Automatic controllers electric
- G05B11/26—Automatic controllers electric in which the output signal is a pulse-train
- G05B11/28—Automatic controllers electric in which the output signal is a pulse-train using pulse-height modulation; using pulse-width modulation
Definitions
- the present invention relates to a servo motor control device when a power supply voltage drops and when a power supply voltage is restored.
- Patent Document 1 Japanese Patent Application Publication No. 10-124308
- the servo motor drive device that supplies the commercial power supply to each joint of the robot body that is attached to each joint and driven by the servo motor
- the output voltage of the DC power supply which is the power supply
- an abnormal signal is output, the servo motor is stopped, and the stop position of the servo motor at that time is held, so that the power supply voltage is instantaneously
- a technique is described that accurately recognizes the position of each joint based on a pulse encoder signal even when there is no power failure or abnormal drop.
- Patent Document 1 Japanese Patent Application Publication No. JP-A-2-76697
- the present invention was made in order to solve the problem of power, and by controlling the servo motor when the bus voltage is lowered so that the load applied to the servo motor is reduced according to the bus voltage, Servo motor control device that can withstand a momentary power outage and withstand an instantaneous voltage drop according to the operating conditions of the machine and the motor load, as well as reduce the burden on the machine and stabilize the control performance.
- the purpose is to obtain.
- the present invention measures a bus voltage that has been rectified and smoothed from an AC power source to become a DC voltage, outputs a bus voltage signal, and detects a current flowing in the servo motor, Current detection means for outputting a value signal; a motor shaft position signal that is output from an encoder provided together with the servo motor; the position information of the shaft of the servo motor; a position command; and the bus voltage signal; Switching between position control and speed control according to the bus voltage of the bus voltage signal so as to reduce the current applied to the servo motor when the bus voltage is lower than the first set reference voltage from the current value signal
- the control means for outputting the control signal, the drive control means for outputting the drive voltage based on the control signal, and the bus voltage are both used and input from the drive control means. Motor drive for outputting a predetermined current to the servo motor based on the drive voltage And a circuit.
- the present invention measures a bus voltage that has been rectified and smoothed from an AC power source to become a DC voltage, outputs a bus voltage signal, and detects a current flowing in the servo motor, Current detection means for outputting a value signal; a motor shaft position signal that is output from an encoder provided together with the servo motor; the position information of the shaft of the servo motor; a position command; and the bus voltage signal; Switching between position control and speed control according to the bus voltage of the bus voltage signal so as to reduce the current applied to the servo motor when the bus voltage is lower than the first set reference voltage from the current value signal
- the control means for outputting the control signal, the drive control means for outputting the drive voltage based on the control signal, and the bus voltage are both used and input from the drive control means.
- a motor drive circuit that outputs a predetermined current to the servo motor based on the drive voltage, so that the load applied to the servo motor according to the bus voltage can be reduced according to the bus voltage.
- FIG. 1 is a configuration diagram of a servo motor control apparatus according to Embodiment 1 of the present invention.
- FIG. 2 is a control block diagram of the servo motor control apparatus according to the first embodiment of the present invention.
- FIG. 3 is a flow chart showing a control method when the bus voltage of the servo motor according to the first embodiment of the present invention is lowered.
- FIG. 4 is a diagram showing a state when the bus voltage is lowered in the servo motor control apparatus of Embodiment 1 of the present invention.
- FIG. 1 is a configuration diagram of a servo motor control apparatus according to Embodiment 1 of the present invention.
- the rectifier circuit 2 converts the AC voltage from the AC power source 1 into DC.
- the rectifier circuit 2 is a force that arranges two diodes in parallel in order to convert a three-phase AC voltage into a direct current.
- a double-wave voltage doubler rectifier circuit or a multistage voltage doubler rectifier circuit can be configured.
- the smoothing capacitor 3 is wired in parallel with the rectifier circuit 2 and converts the DC voltage rectified by the rectifier circuit 2 into a smoothed voltage.
- the smoothing capacitor 3 also stores electricity so that the rectified DC voltage can cope with an instantaneous voltage drop.
- the smoothed voltage is hereinafter referred to as bus voltage.
- a bus voltage detecting means 4 is provided to detect the voltage value of the bus voltage.
- a motor drive circuit 7 that drives based on the drive voltage output from the drive control means 6 is arranged in parallel with the smoothing capacitor 3.
- the motor drive circuit 7 includes a transistor 7a and a diode 7b.
- the servo motor is a three-phase motor, one set of three bridge circuits is configured in parallel.
- Motor drive circuit 7 The three wires connected to the output side are connected to each phase of servo motor 5.
- the servo motor 5 includes a motor unit 5a and an encoder 5b that detects the position of the motor shaft.
- a position command such as a command pulse or an operation pattern corresponding to each feed of the machine output from the servo controller 8 is input to the control means 9.
- the control means 9 is output from the bus voltage detection means 4 and is detected and output from the bus voltage signal that is information on the voltage value of the bus voltage and the encoder 5b of the servo motor 5.
- Servo motor 5 mode Based on the motor shaft position signal, which is the position of the motor shaft, and the wiring force between the drive circuit 7 and the servo motor 5, based on the current value signal which is the current value information detected by the current detection means 10. Processing to output a control signal for driving the servo motor 5 from the deviation from the motor shaft position signal is performed.
- the control signal output from the control means 9 is input to the drive control means 6.
- the drive control means 6 outputs a drive voltage corresponding to each transistor 7a so as to drive the servo motor 5 in three phases based on the control signal.
- the control means 9 performs a comparison operation unit 9a that determines switching of control of the servo motor 5 based on the value of the bus voltage signal, a memory 9b that stores predetermined data, and a control method for the plurality of servo motors 5. And a motor control unit 6c that can perform the operation.
- the memory 9b includes a bus voltage reference value storage unit 9d for storing a plurality of bus voltage reference values for performing a comparison operation, and a set time reference value for performing motor control when the bus voltage drops for a predetermined time.
- Set time reference value storage unit 6e to store and droop pulse reference value storage unit 9f to store multiple droop pulse reference values that set the upper limit value of the deviation between the position command value and the actual motor position when the bus voltage drops It is equipped with.
- FIG. 2 is a control block diagram of the servo motor control apparatus according to the first embodiment of the present invention.
- a position command from the servo controller 8 enters the controller 9c.
- the deviation between the position command and the motor shaft position signal that is output from the encoder 5b that detects the shaft position of the servo motor 5a and converted into one that fits within the control unit 9c is changed by the position controller 9g using a predetermined multiplier. After being multiplied by, the difference from the motor shaft speed signal converted by the change is taken to obtain the speed deviation.
- the speed deviation is multiplied by a predetermined multiplier by the speed controller 9h, detected from the current detection means 10, and the deviation from the converted current value that fits in the control unit 9c is taken by the converter 3 ⁇ 4. Current deviation.
- the current deviation is subjected to predetermined conversion by the controller 9i and is output to the drive control means 6 as a control signal.
- the drive control means 6 outputs a drive voltage and is input to the drive circuit 7.
- the drive circuit 7 controls the servo motor 5 by supplying a predetermined current to each phase of the servo motor 5 based on the drive voltage.
- the comparison operation unit 9a to which the bus voltage signal is input specifies the multiplier or conversion equation for the position controller 9b, the speed controller 9h, or the controller 9i according to the value. Make an indication.
- FIG. 3 is a flowchart showing a control method when the bus voltage of the servo motor according to the first embodiment of the present invention is lowered.
- the control circuit 9 of the first embodiment there are a plurality of bus voltage reference values for changing the control to the servo motor 5 in accordance with the decrease in the bus voltage of the input bus voltage signal. And it is memorized in S memory 9b.
- the first set reference voltage VS1 which is a voltage for determining whether to perform motor control different from normal position control
- the second set reference voltage, VS2 for determining whether or not to stop motor control
- the power recovery reference voltage VR for determining whether or not to perform acceleration control for returning to normal motor control can be set as the bus voltage reference value.
- a control method of the calculation unit 9a when the bus voltage drops in the first embodiment will be described with reference to FIG.
- the bus voltage of the bus voltage signal detected and output from the bus voltage detecting means 4 is compared with the first set reference voltage VS1 (slOl). If the bus voltage is higher than the first set reference voltage V S1, the comparison calculation unit 9a gives an instruction to perform a normal positioning servo control operation following the position command (sl02), and the control unit 9c Then, control the position of the servo motor 5 with respect to the motor shaft. If the bus voltage is lower than the first set reference voltage VS 1, the comparison calculation unit 9a does not follow the position command, and for the servo motor 5, the constant motor speed control is performed at a predetermined rotational speed. (Sl03), and the control unit 9c controls the speed of the servo motor 5 based on the instruction.
- the control for the servo motor 5 is left in position control when the bus voltage is lower than the first set reference voltage VS1, the current applied to the servo motor 5 according to the deviation will increase when the deviation becomes large. It becomes larger and causes the phenomenon that the bus voltage drops more.
- the energy supplied to the motor during acceleration is instantaneously increased to about 200 to 300% compared to the steady state.
- the first droop pulse reference value Ptl set as the droop pulse reference value is set as the upper limit of the droop pulse amount of the comparison calculation unit 9a.
- the motor shaft position and control means of the motor shaft position signal output from the encoder section 5b of the servo motor 5 9 Is compared with the first droop pulse reference value Ptl (sl04), and the droop pulse is the first If it becomes larger than the droop pulse reference value Ptl, the comparison calculation unit 9a instructs the motor operation stop processing (sl05), and the control unit 9c stops the operation of the servo motor 5 based on the instruction.
- the controller 9i in the control unit 9c performs a process of outputting 0 for the current deviation.
- the bus voltage is completely restored while maintaining a state that is larger than the first droop pulse reference value Ptl, it is possible to avoid the risk of starting the acceleration operation and destroying the controlled object due to overshoot, etc. Therefore, it can be avoided that the bus voltage drops again due to overload and the bus voltage becomes unstable.
- the comparison calculation unit 9a compares the droop pulse with the first droop pulse reference value Ptl (sl08), and if the droop pulse becomes larger than the first droop pulse reference value Ptl, the comparison calculation unit 9a 9a instructs the motor operation stop process (sl09), and the control unit 9c stops the operation of the servo motor 5 based on the instruction.
- the comparison calculation unit 9a instructs the motor operation stop processing (si 11), and the control unit 9c Based on this instruction, the servo motor 5 is stopped.
- step 104 If the set time tl has not elapsed, the process returns to step 104. If the state does not change, the loop is repeated until the set time tl elapses, but the bus voltage becomes higher than the second set reference voltage VS2. Performs the following processing.
- the arithmetic unit 9a compares the bus voltage detected by the bus voltage detection means 4 with the power recovery reference voltage VR (S112). ) If the bus voltage is lower than the recovery reference voltage VR, an instruction to perform constant motor speed control is given (sl03), and the control unit 9c controls the speed of the servo motor 5 based on the instruction.
- the computing unit 9a instructs acceleration control (si 13), and the control means 9c performs acceleration control on the servo motor 5 based on the acceleration control instruction.
- Motor acceleration control is a control that complies with acceleration conditions that are determined in advance until the deviation between the position of the motor shaft and the position command falls below the second droop pulse reference value Pt2. The control is to reduce the deviation from the position.
- the comparison calculation unit 9a gives an instruction to perform position control (si 14), and the control unit 9c Based on the instruction, the servo motor 5 performs positioning servo operation control that is normal position control.
- FIG. 4 is a diagram illustrating a state when the bus voltage is lowered in the servo motor control apparatus according to the first embodiment of the present invention.
- the vertical axis represents the bus voltage and the horizontal axis represents time.
- the servo motor 5 When the bus voltage drops and is higher than the first set reference voltage VS1 and is restored by voltage, that is, when it corresponds to the dotted line A in Fig. 4, the servo motor 5 is used for normal positioning including position control. Continue servo operation control.
- the first set reference voltage is set to a voltage value that allows normal positioning control even when the servomotor 5 is used at the maximum load. In other words, even if the load on servo motor 5 is maximized, if the voltage value is set so that normal positioning control is possible, even if a voltage drop actually occurs, a sudden increase or decrease in accumulated pulses will not occur. Control Because there is no effect. Therefore, the first set reference voltage VS1 varies depending on the load assumed in the actually used system. Generally, for example, if the maximum load of servo motor 5 is about 300% of the rated load, the first set reference voltage VS1 is set to about 85% of the normal bus voltage.
- the power recovery reference voltage VR is set to the first setting even when the reduction of the bus voltage is taken into account when the servo motor 5 current is started when acceleration control of the servo motor 5 is started.
- the servo motor 5 is used at the maximum load due to the acceleration control of the servo motor 5
- the bus voltage is secured to a voltage value that allows normal positioning control, the drooping pulse suddenly increases. This is because there is no increase or decrease and no effect on control. Therefore, considering that the drop of the bus voltage is generally about 15% of the bus voltage, it may be set to the same level as the normal bus voltage.
- the first accumulated pulse reference value Ptl is acceleration control when, for example, the constant speed control is performed on the servomotor 5, the accumulated pulse is within the first accumulated pulse reference value Ptl. Is set to a value that allows the accumulated pulse to converge within the second accumulated pulse reference value Pt2. Therefore, the first accumulated pulse reference value Ptl depends on the system conditions, particularly the set acceleration of acceleration control.
- the second accumulated pulse reference value Pt2 is equal to or less than the second accumulated pulse reference value Pt2, and the normal positioning servo operation including the position control is performed.
- control is resumed, it is supplied to the servo motor 5 according to the control multiplier determined by the value of the accumulated pulse, the speed at that time, and the acceleration force.
- the current value is not significantly changed before and after that, and the current fluctuation range is set to a value within a predetermined range.
- the second set reference voltage VS2 is set to a voltage value at which the servomotor 5 can perform constant speed control with a rated load. Although the second set reference voltage VS2 varies depending on various system conditions, the servomotor 5 does not give more current than necessary, and the servomotor 5 is a value that can ensure a predetermined constant speed. Generally, the second set reference voltage VS2 is set to about 65% of the bus voltage.
- the comparison calculation unit 9a determines the multiplier or conversion for the position controller 9b, the speed controller 9h, or the controller 9i according to the value.
- the control multiplier in the position controller 9 g may be set to 0, or the current deviation may be directly changed to a predetermined value by the controller 9i.
- the control multiplier in the position controller 9 g may be set to 0, or the current deviation may be directly changed to a predetermined value by the controller 9i.
- processing methods For standby and stop, it seems most direct to change to the specified value directly by the controller 9i.
- various formulas may be used when a predetermined value is set by the controller 9i, or a calculation formula that outputs a predetermined value by the control multiplier of the speed controller 9h. Possible application.
- the motor control can be changed according to the bus voltage when the power supply voltage drops, and the drop in the bus voltage supplied to the servo motor 5 is minimized. It is possible to connect an external capacitor unit or uninterruptible power supply (UPS) that can withstand the momentary power failure. Therefore, it is possible to achieve a low cost of the entire mechanical device.
- UPS uninterruptible power supply
- the bus voltage detecting means 4 for measuring the bus voltage that has been rectified and smoothed from the AC power source 1 to become a DC voltage, and outputting the bus voltage signal, and the servo motor 5 are measured.
- Current detection means 10 for detecting a flowing current and outputting a current value signal; a motor shaft position signal which is information on the position of the axis of the servo motor 5 output from the encoder 5b provided with the servo motor 5; From the position command, bus voltage signal, and current value signal, depending on the bus voltage of the bus voltage signal, the current applied to the servo motor 5 is reduced when the bus voltage is lower than the first set reference voltage VS1.
- Control means 9 that outputs a control signal by switching between position control and speed control, drive control means 6 that outputs a drive voltage based on the control signal, and a drive input from the drive control means 6 while using the bus voltage Electric
- a motor drive circuit 7 that outputs a predetermined current to the servo motor 5 based on the above, so that the control of the servo motor 5 at the time of the bus voltage drop can be arbitrarily changed according to the bus voltage.
- a servo motor control device that can withstand a momentary power outage and a momentary voltage drop according to the operating conditions and the motor load, as well as reduce the load on the machine and stabilize the control performance. be able to.
- the motor control can be changed according to the bus voltage when the power supply voltage drops, and the bus voltage supplied to the motor drops. Therefore, it is easy to secure the withstand capability against an instantaneous power failure without connecting an external capacitor unit or uninterruptible power supply (UPS). Therefore, the low cost of the entire mechanical device can be achieved.
- UPS uninterruptible power supply
- the power recovery reference voltage can be set and the motor acceleration control during power recovery can be set according to the machine load and operating conditions, the load on the machine side can be reduced and stabilized. It is easy to maintain the control performance.
- the comparison calculation unit 9a may give an instruction to the controller of the feedforward term.
- the servo motor control device is suitable for the case where stability is required for the control of the servo motor when the power supply voltage drops instantaneously.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Power Engineering (AREA)
- Control Of Electric Motors In General (AREA)
- Control Of Ac Motors In General (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2005800494053A CN101156312B (zh) | 2005-04-08 | 2005-04-08 | 伺服电动机的控制装置 |
JP2007514363A JP4803175B2 (ja) | 2005-04-08 | 2005-04-08 | サーボモータの制御装置 |
PCT/JP2005/006912 WO2006114843A1 (ja) | 2005-04-08 | 2005-04-08 | サーボモータの制御装置 |
US11/910,708 US7642740B2 (en) | 2005-04-08 | 2005-04-08 | Servomotor controller |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2005/006912 WO2006114843A1 (ja) | 2005-04-08 | 2005-04-08 | サーボモータの制御装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006114843A1 true WO2006114843A1 (ja) | 2006-11-02 |
Family
ID=37214482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/006912 WO2006114843A1 (ja) | 2005-04-08 | 2005-04-08 | サーボモータの制御装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7642740B2 (ja) |
JP (1) | JP4803175B2 (ja) |
CN (1) | CN101156312B (ja) |
WO (1) | WO2006114843A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101598939B (zh) * | 2008-06-04 | 2011-02-09 | 中国科学院自动化研究所 | 多轴运动伺服控制与保护*** |
JPWO2013153607A1 (ja) * | 2012-04-09 | 2015-12-17 | 三菱電機株式会社 | 位置決め装置 |
JP2020198679A (ja) * | 2019-05-31 | 2020-12-10 | ファナック株式会社 | モータ制御装置及び工作機械 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010150339A1 (ja) * | 2009-06-22 | 2010-12-29 | 三菱電機株式会社 | モータ駆動装置 |
JP5689704B2 (ja) * | 2010-08-08 | 2015-03-25 | 日本電産サンキョー株式会社 | モータ制御装置およびモータ制御方法 |
JP4980453B2 (ja) * | 2010-09-06 | 2012-07-18 | ファナック株式会社 | 加工を高精度化するサーボ制御システム |
CN102001189B (zh) * | 2010-10-19 | 2013-09-18 | 南京埃斯顿自动化股份有限公司 | 一种应用于机械曲柄压力机的交流伺服主驱动***的控制方法 |
JP5149410B2 (ja) * | 2011-02-10 | 2013-02-20 | ファナック株式会社 | 交流電源の電源特性に応じてモータの出力を制限するモータ駆動制御装置 |
CN104601061A (zh) * | 2013-10-30 | 2015-05-06 | 中国科学院近代物理研究所 | 基于以太网的电机控制器和控制*** |
JP7001439B2 (ja) * | 2017-11-24 | 2022-01-19 | 川崎重工業株式会社 | 監視方法 |
CN111512541A (zh) * | 2017-12-22 | 2020-08-07 | 东芝三菱电机产业***株式会社 | 电动机驱动装置 |
CN112020824A (zh) * | 2018-04-27 | 2020-12-01 | 松下知识产权经营株式会社 | 螺纹紧固装置用的伺服放大器 |
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JPH05137367A (ja) * | 1991-11-12 | 1993-06-01 | Mitsubishi Electric Corp | モータ制御装置 |
JP2001022446A (ja) * | 1999-07-06 | 2001-01-26 | Denso Corp | サーボ制御装置 |
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US4684868A (en) * | 1985-10-30 | 1987-08-04 | Westinghouse Electric Corp. | Induction motor control apparatus and method for restart when rotating in shutdown |
JPH0276697A (ja) | 1988-09-14 | 1990-03-16 | Fuji Electric Co Ltd | ロボット制御装置 |
US5153492A (en) * | 1989-07-31 | 1992-10-06 | Msi Corporation | Servo amplifier |
US5249161A (en) * | 1992-08-21 | 1993-09-28 | Schlumberger Technology Corporation | Methods and apparatus for preventing jamming of encoder of logging while drilling tool |
JP3755054B2 (ja) * | 1998-02-27 | 2006-03-15 | 三菱電機株式会社 | 同期制御装置 |
US6385500B1 (en) * | 1999-04-16 | 2002-05-07 | Cummins Engine Company, Inc. | Hybrid servomechanism for micro-electrical discharge machining |
CA2401167A1 (en) * | 2001-09-05 | 2003-03-05 | Her Majesty The Queen In Right Of Canada As Represented By The Minister Of National Defence | Method to estimate motor speed for stabilized motor control |
JP4101608B2 (ja) * | 2002-10-17 | 2008-06-18 | 三菱電機株式会社 | サーボ制御システム |
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2005
- 2005-04-08 US US11/910,708 patent/US7642740B2/en not_active Expired - Fee Related
- 2005-04-08 CN CN2005800494053A patent/CN101156312B/zh not_active Expired - Fee Related
- 2005-04-08 WO PCT/JP2005/006912 patent/WO2006114843A1/ja not_active Application Discontinuation
- 2005-04-08 JP JP2007514363A patent/JP4803175B2/ja not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH05137367A (ja) * | 1991-11-12 | 1993-06-01 | Mitsubishi Electric Corp | モータ制御装置 |
JP2001022446A (ja) * | 1999-07-06 | 2001-01-26 | Denso Corp | サーボ制御装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101598939B (zh) * | 2008-06-04 | 2011-02-09 | 中国科学院自动化研究所 | 多轴运动伺服控制与保护*** |
JPWO2013153607A1 (ja) * | 2012-04-09 | 2015-12-17 | 三菱電機株式会社 | 位置決め装置 |
JP2020198679A (ja) * | 2019-05-31 | 2020-12-10 | ファナック株式会社 | モータ制御装置及び工作機械 |
JP7272868B2 (ja) | 2019-05-31 | 2023-05-12 | ファナック株式会社 | モータ制御装置及び工作機械 |
Also Published As
Publication number | Publication date |
---|---|
US20090079379A1 (en) | 2009-03-26 |
CN101156312A (zh) | 2008-04-02 |
JP4803175B2 (ja) | 2011-10-26 |
CN101156312B (zh) | 2010-08-25 |
JPWO2006114843A1 (ja) | 2008-12-11 |
US7642740B2 (en) | 2010-01-05 |
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