WO2006053543A1 - Elektrische messung der dicke einer halbleiterschicht - Google Patents
Elektrische messung der dicke einer halbleiterschicht Download PDFInfo
- Publication number
- WO2006053543A1 WO2006053543A1 PCT/DE2005/002063 DE2005002063W WO2006053543A1 WO 2006053543 A1 WO2006053543 A1 WO 2006053543A1 DE 2005002063 W DE2005002063 W DE 2005002063W WO 2006053543 A1 WO2006053543 A1 WO 2006053543A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- quadrupole
- measured
- arrangement
- measurement
- semiconductor layer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/041—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body
Definitions
- the invention relates to a method for the electrical measurement of the thickness of semiconductor layers and an associated arrangement that can be used as a test structure, manufactured or manufactured in the normal component process of semiconductor structures using conventional test systems.
- the trained as a test structure for example, annular arrangement, allows safe measurement and suppression of interfering interactions with adjacent structures.
- JP-A 10 154 735 shows a special method for measuring thin SOI layers by means of siliconized regions.
- the process requires special technological steps and is not generally applicable and is not intended or suitable for thicker semiconductor layers and for EPI layers and membranes.
- the purpose of the invention is the realization of a measuring method for determining the thickness of semiconductor layers in the semiconductor manufacturing process using automatic test systems.
- the method should be generally applicable, for example, for the thickness measurement of active semiconductor layers, on z. SOI disks, EPI layers with inverse conductivity type and for membrane thickness measurement.
- the invention has for its object to provide an electrical method for measuring the thickness of semiconductor layers, in which the Meßcard ist done using a common probe card, since conventional test systems only electrical
- Claims 1 and 6 show the advantages that for the production of the necessary for the application of the method contacts on the semiconductor layer no additional
- Figure 1 is a schematic representation of an annular arrangement of six nested circular contact areas A1 to F1;
- Figure 2 is a schematic representation of a linear array with six straight contact strips A2 to F2 and a surrounding protective frame S2;
- Figure 3 is a schematic representation of a punctiform arrangement with six
- the six annular, preferably metallic contact areas A1 to F1 are concentric with one another. They lie on the surface of a semiconductor layer 10, 11, 12.
- the two "in the middle" lying contact areas C1 and D1 are used twice, once for applying the measuring current and once for potential measurement.
- the measuring paths of the two successive measurements are B1-C1 and D1-E1. Same conditions are in the contact areas in Figure 2 and Figure 3 before.
- index "i" used below refers to the contact areas in three described different contact arrangements on the surface and runs for the
- Areas A to F related to the three different arrangements of contact areas.
- the wiring of the individual contact areas is the same for all three arrangements.
- the respective measuring tips for current or voltage are not shown separately, but readily apparent to those skilled in the art without an image.
- a frame S2, S3 of a respective test structure is provided for electrical shielding to other surrounding test elements.
- the execution of the 6 contact regions of the double quadrupole arrangement can be carried out as a metal-semiconductor contact or as a diffusion region with the highest possible conductivity, which is then also connected via metal contacts.
- the geometric arrangement of the six contact regions can preferably be annular, in which case additional shielding is not required, as shown in FIG.
- a respective method for the electrical measurement of the thickness of a semiconductor layer 10, 11, 12 by means of the two interleaved quadrupole arrangements takes place in two steps.
- the measured value is determined primarily by the sheet resistance of the semiconductor layer 11 to be measured.
- the other measurement of the measured value is determined primarily by the sheet resistance of the semiconductor layer 11 to be measured.
- the method of measuring the two quadrupole arrangements is equally applicable to at least three types of contact areas shown herein as an annular array in the form of six nested circular contact areas, six rectilinear parallel contact strips, and six point contacts in-line.
- A3 Outer contact point, one side
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Power Engineering (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Automation & Control Theory (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/576,639 US20080100311A1 (en) | 2004-11-16 | 2005-11-16 | Electrical Measurement Of The Thickness Of A Semiconductor Layer |
DE112005003278T DE112005003278A5 (de) | 2004-11-16 | 2005-11-16 | Elektrische Messung der Dicke einer Halbleiterschicht |
EP05814654A EP1819982A1 (de) | 2004-11-16 | 2005-11-16 | Elektrische messung der dicke einer halbleiterschicht |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004055181A DE102004055181B3 (de) | 2004-11-16 | 2004-11-16 | Verfahren und Anordnung zur elektrischen Messung der Dicke von Halbleiterschichten |
DE102004055181.2 | 2004-11-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006053543A1 true WO2006053543A1 (de) | 2006-05-26 |
Family
ID=35764705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2005/002063 WO2006053543A1 (de) | 2004-11-16 | 2005-11-16 | Elektrische messung der dicke einer halbleiterschicht |
Country Status (4)
Country | Link |
---|---|
US (1) | US20080100311A1 (de) |
EP (1) | EP1819982A1 (de) |
DE (2) | DE102004055181B3 (de) |
WO (1) | WO2006053543A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006002753B4 (de) * | 2006-01-20 | 2010-09-30 | X-Fab Semiconductor Foundries Ag | Verfahren und Anordnung zur Bewertung der Unterätzung von tiefen Grabenstrukturen in SOI-Scheiben |
US8906710B2 (en) * | 2011-12-23 | 2014-12-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Monitor test key of epi profile |
CN103235190B (zh) * | 2013-04-19 | 2015-10-28 | 重庆金山科技(集团)有限公司 | 一种电阻抗测试方法 |
US10003149B2 (en) | 2014-10-25 | 2018-06-19 | ComponentZee, LLC | Fluid pressure activated electrical contact devices and methods |
US9577358B2 (en) * | 2014-10-25 | 2017-02-21 | ComponentZee, LLC | Fluid pressure activated electrical contact devices and methods |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3735254A (en) * | 1970-06-06 | 1973-05-22 | Philips Corp | Method of determining the sheet resistance and measuring device therefor |
US4218650A (en) * | 1978-06-23 | 1980-08-19 | Nasa | Apparatus for measuring semiconductor device resistance |
JPS5737846A (en) * | 1980-08-20 | 1982-03-02 | Nec Corp | Measuring device for thickness of semiconductor layer |
WO1994011745A1 (en) * | 1992-11-10 | 1994-05-26 | David Cheng | Method and apparatus for measuring film thickness |
US20040183554A1 (en) * | 2003-03-18 | 2004-09-23 | International Business Machines Corporation | Reduction of positional errors in a four point probe resistance measurement |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4703252A (en) * | 1985-02-22 | 1987-10-27 | Prometrix Corporation | Apparatus and methods for resistivity testing |
DE19619686C2 (de) * | 1996-04-18 | 1998-04-09 | Fraunhofer Ges Forschung | Halbleiter- oder hybridtechnologiebasierte Meßanordnung mit spezieller Impedanzanordnung |
US6434217B1 (en) * | 2000-10-10 | 2002-08-13 | Advanced Micro Devices, Inc. | System and method for analyzing layers using x-ray transmission |
JP3928478B2 (ja) * | 2002-05-22 | 2007-06-13 | 株式会社島津製作所 | 膜厚測定方法及び膜厚測定装置 |
US7212016B2 (en) * | 2003-04-30 | 2007-05-01 | The Boeing Company | Apparatus and methods for measuring resistance of conductive layers |
KR100556529B1 (ko) * | 2003-08-18 | 2006-03-06 | 삼성전자주식회사 | 다층 박막의 두께 측정 방법 및 이를 수행하기 위한 장치 |
-
2004
- 2004-11-16 DE DE102004055181A patent/DE102004055181B3/de active Active
-
2005
- 2005-11-16 US US11/576,639 patent/US20080100311A1/en not_active Abandoned
- 2005-11-16 WO PCT/DE2005/002063 patent/WO2006053543A1/de active Application Filing
- 2005-11-16 DE DE112005003278T patent/DE112005003278A5/de not_active Ceased
- 2005-11-16 EP EP05814654A patent/EP1819982A1/de not_active Withdrawn
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3735254A (en) * | 1970-06-06 | 1973-05-22 | Philips Corp | Method of determining the sheet resistance and measuring device therefor |
US4218650A (en) * | 1978-06-23 | 1980-08-19 | Nasa | Apparatus for measuring semiconductor device resistance |
JPS5737846A (en) * | 1980-08-20 | 1982-03-02 | Nec Corp | Measuring device for thickness of semiconductor layer |
WO1994011745A1 (en) * | 1992-11-10 | 1994-05-26 | David Cheng | Method and apparatus for measuring film thickness |
US20040183554A1 (en) * | 2003-03-18 | 2004-09-23 | International Business Machines Corporation | Reduction of positional errors in a four point probe resistance measurement |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 006, no. 107 (E - 113) 17 June 1982 (1982-06-17) * |
Also Published As
Publication number | Publication date |
---|---|
DE112005003278A5 (de) | 2007-09-27 |
US20080100311A1 (en) | 2008-05-01 |
DE102004055181B3 (de) | 2006-05-11 |
EP1819982A1 (de) | 2007-08-22 |
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