WO2006040865A1 - 静圧形ノンコンタクトガスシール - Google Patents
静圧形ノンコンタクトガスシール Download PDFInfo
- Publication number
- WO2006040865A1 WO2006040865A1 PCT/JP2005/013117 JP2005013117W WO2006040865A1 WO 2006040865 A1 WO2006040865 A1 WO 2006040865A1 JP 2005013117 W JP2005013117 W JP 2005013117W WO 2006040865 A1 WO2006040865 A1 WO 2006040865A1
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- Prior art keywords
- seal
- gas
- ring
- stationary
- sealing
- Prior art date
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
- F16J15/3404—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal
- F16J15/3408—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface
- F16J15/3412—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface with cavities
- F16J15/342—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface with cavities with means for feeding fluid directly to the face
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
- F16J15/3436—Pressing means
- F16J15/3448—Pressing means the pressing force resulting from fluid pressure
Definitions
- the present invention is a static pressure that is suitably used in rotating equipment such as turbines, blowers, compressors, agitators, and rotary valves that handle various gases such as toxic gases, flammable gases, explosive gases, and powder mixed gases.
- the present invention relates to a non-contact gas seal.
- the opening force acting in the direction to open the space between the sealing end faces on the stationary seal ring due to the fluid pressure balances the opening force generated by the opening force generating means and the closing force generated by the closing force generating means, so that the sealing end faces are not in contact with each other.
- Patent Document 1 There is known one configured to be held by the device (for example, see Patent Document 1).
- the sheet introduced between the sealing end faces The pressure of the gas gas is set higher than this in accordance with the pressure of the sealed fluid region, and the panel force (spring load) of the spring that determines the closing force is appropriate for the clearance between the sealed end faces (generally 5 to 15 / ⁇ ⁇ ), and is set according to the pressure of the seal gas.
- the conventional gas seal is similar to the dynamic pressure type non-contact gas seal in which the sealed end face is maintained in a non-contact state by generating a dynamic pressure by the sealed fluid.
- the sealed fluid can be satisfactorily sealed over a long period of time without causing the seizure of the sealed end surfaces by holding the sealed end surfaces in a non-contact state.
- the conventional gas seal cannot be sealed with a hydrodynamic non-contact gas seal. ⁇ ⁇ It can seal gas well, compared to a hydrodynamic non-contact gas seal. Therefore, it can be used for a wide range of applications.
- a dynamic pressure type non-contact gas seal forms a dynamic pressure generating groove on one of the relatively rotating sealed end faces, and the dynamic pressure generating groove generates a dynamic pressure by a sealed fluid between the sealed end faces. Is generated to keep the sealed end surfaces in a non-contact state, and basically allows the sealed fluid to leak from between the sealed end surfaces to the outside of the machine. Therefore, if the fluid to be sealed is of a property that does not allow leakage to the outside, such as toxic gas, flammable gas, explosive gas, etc., the hydrodynamic non-contact gas seal cannot be used. .
- the sealing gas also blows the force between the sealed end faces into the sealed fluid region (and the non-sealed fluid region), thereby preventing leakage of the sealed fluid. Since it has a completely blocking structure, it can be suitably used in rotating equipment that handles gases such as toxic gases, flammable gases, and explosive gases that are not allowed to leak.
- Patent Document 1 Japanese Patent Laid-Open No. 2000-329238 (FIG. 1)
- the conventional gas seal uses a spring as a closing means.
- the closing by the spring always works. Therefore, when the supply of the seal gas stops unexpectedly as described above and the opening force due to the seal gas disappears, the stationary seal ring is suddenly moved to the rotating seal ring by the spring biasing force (closing force). Violently collide with the rotating seal ring. As a result, the sealed end face may be damaged or broken. Such a problem becomes prominent particularly under high pressure conditions where the pressure of the sealed fluid is high. In other words, under high pressure conditions, the pressure of the sealing gas must be increased according to the pressure of the fluid to be sealed, so the spring load that balances the opening force of the sealing gas can naturally be increased. I do not get. Therefore, when the supply of the sealing gas is stopped, the stationary sealing ring collides with the rotating sealing ring extremely violently, and the degree of damage and breakage of the sealing end surface becomes larger.
- the present invention has been made in view of such points, and even when the supply of the sealing gas between the sealed end faces is unexpectedly stopped, the sealed end faces collide violently and damage the sealed end faces. Therefore, it is an object of the present invention to provide a static pressure type non-contact gas seal that can be used safely without being damaged.
- the present invention relates to a cylindrical seal case, a rotary seal ring fixed to a rotary member such as a rotary shaft, and the axial direction in a state of concentrically facing the rotary seal ring on the inner periphery of the seal case
- a stationary sealing ring is provided by supplying a sealing gas between a sealing end face, which is the opposite end face of both sealing rings, from a series of sealing gas passages penetrating the sealing case and the stationary sealing ring.
- an opening force generating means for generating an opening force acting in a direction to open between the sealing end faces, and a closing force generating means for generating a closing force acting in the direction to close the sealing end faces on the stationary sealing ring.
- a back pressure chamber which is an annular space closed by two O-rings, is formed between the opposed peripheral surfaces of the seal case and the stationary seal ring.
- the seal gas passage is an annular space formed between the opposed peripheral surfaces of the seal case and the stationary seal ring, and is interposed between the opposed peripheral surfaces.
- the formed static pressure generating groove and the sealed ring side passage through the stationary sealing ring, the upstream end opening to the communication space and the downstream end opening to the static pressure generating groove are disposed in the sealing ring side path. It is preferable to comprise an aperture.
- the back pressure chamber can also be used as a communication space for the seal gas passage.
- the first, second and third O-rings are arranged between the opposing peripheral surfaces of the seal case and the stationary sealing ring, and the first and second O-rings are provided between the opposing peripheral surfaces.
- a communication space of the sealed seal gas passage and a back pressure chamber closed by the second and third O-rings are formed, and a part of the seal gas supplied to the seal gas supply passage force seal gas passage is back pressure chamber. It is preferable to configure so as to be introduced into the system.
- an auxiliary back pressure chamber which is closed by two O-rings and separated from the back pressure chamber, is formed between the opposed peripheral surfaces of the seal case and the stationary seal ring, and the sealed fluid region and the auxiliary seal chamber are provided in the stationary seal ring.
- a through-hole communicating with the back pressure chamber is formed so that a closing force is generated to press the stationary seal ring to the rotating seal ring by the pressure of the sealed fluid introduced from the through hole into the auxiliary back pressure chamber. It is preferable to configure.
- an elastic member that urges the stationary seal ring in the direction to separate the rotary seal ring force is interposed between the seal case and the stationary seal ring, so that the rotary seal of the stationary seal ring is sealed when the seal gas supply is stopped. It is also preferable to configure so as to prevent sudden movement in the ring direction.
- the elastic member a spring or an O-ring is suitable.
- a seal gas introduction passage in which the pressure holding chamber and the back pressure chamber or the communication space are communicated with the static sealing ring and the throttle is disposed.
- the stationary seal ring is configured to prevent a sudden movement in the direction of the rotary seal ring when the supply is stopped.
- a dynamic pressure generating groove is formed on the sealing end face of the rotary seal ring to reduce the static pressure by the sealing gas between the sealing end faces.
- FIG. 1 is a longitudinal side view showing a first gas seal.
- FIG. 2 is a longitudinal side view showing a second gas seal.
- FIG. 3 is a longitudinal side view showing a third gas seal.
- FIG. 4 is a longitudinal side view showing a fourth gas seal.
- FIG. 5 is a vertical side view showing a fifth gas seal.
- FIG. 6 is a longitudinal side view showing a sixth gas seal.
- FIG. 7 is a longitudinal side view showing a seventh gas seal.
- FIG. 8 is a vertical side view showing an eighth gas seal.
- FIG. 9 is a longitudinal side view showing a ninth gas seal.
- FIG. 10 is a longitudinal side view showing a tenth gas seal.
- FIG. 11 is a longitudinal side view showing an eleventh gas seal.
- FIG. 12 is a vertical sectional side view showing a twelfth gas seal.
- FIG. 13 is a longitudinal side view showing an enlarged main part of the first gas seal.
- FIG. 14 is a front view showing a stationary sealing ring of the first gas seal.
- FIG. 15 is a longitudinal side view showing an enlarged main part of a third gas seal.
- FIG. 16 is an enlarged vertical side view of the main part of the twelfth gas seal.
- FIG. 17 is a front view of a half-rod showing a rotary seal ring of the twelfth gas seal.
- FIG. 18 is a longitudinal sectional side view showing a thirteenth gas seal.
- FIGS. 1 to 12 and FIG. 18 are longitudinal side views showing the hydrostatic non-contact gas seal of the present invention.
- the hydrostatic non-contact gas seal shown in FIG. 2 is called “second gas seal 102", and the hydrostatic non-contact gas seal shown in Fig. 3 is called “third gas seal 103".
- the static pressure type non-contact gas seal shown in Fig. 4 is called “fourth gas seal 104”, and the static pressure type non-contact gas seal shown in Fig. 5 is called “fifth gas seal 105", shown in Fig. 6.
- the static pressure type non-contact gas seal is called “sixth gas seal 106”, the static pressure type non-contact gas seal shown in FIG.
- FIG. 7 is called “seventh gas seal 107”, and the static pressure type non-contact gas seal shown in FIG. The seal is called “Eighth Gas Seal 108" and is shown in Fig. 9.
- the to static pressure type non-contact gas seal is referred to as "the ninth gas seal 109 ', the static pressure type non-contact gas seal shown in FIG. 10"
- the static pressure non-contact gas seal shown in FIG. 11 is called “ ⁇ -gas seal 111”, and the static pressure non-contact gas seal shown in FIG.
- the static pressure type non-contact gas seal shown in FIG. 18 is called “13th gas seal 113”.
- FIG. 13 is an enlarged vertical side view showing the main part of the first gas seal 101
- FIG. 14 is a front view of a stationary sealing ring in the gas seal 101
- FIG. 13 is an enlarged vertical side view showing the main part of the first gas seal 101
- FIG. 14 is a front view of a stationary sealing ring in the gas seal 101
- FIG. 16 is an enlarged vertical side view of the main part of the twelfth gas seal 112
- FIG. 17 is an enlarged side view of the rotary seal ring of the gas seal 112. It is a front view.
- front and rear refer to the left and right in FIGS. 1 to 12, and upper and lower refer to the upper and lower in FIG.
- the first gas seal 101 includes a seal case 1 as shown in FIG. 1, a rotary seal ring 3 fixed to a rotary shaft 2 as a rotary member, and a state in which the seal case 1 faces the rotary seal ring 3. It is the opposite end face of both seal rings 3 and 4 from a stationary seal ring 4 held axially movable (movable back and forth) and a series of seal gas passages 5 passing through seal case 1 and stationary seal ring 4 By supplying a sealing gas 6 between the sealing end faces 3a and 4a, an opening force generating means 7 for generating an opening force acting on the stationary sealing ring 4 in the opening direction between the sealing end faces 3a and 4a and a stationary sealing ring 4 are provided.
- Closing means 8 for generating a closing force acting in a closing direction between the sealed end faces 3a, 4a, and holding the sealed end faces 3a, 4a in a non-contact state, while maintaining the outer periphery of the sealed end faces 3a, 4a.
- the sealed fluid region H that is the side region and the non-sealed fluid region L that is the inner peripheral region are shielded. It is configured to Le.
- the sealed fluid region H is a high-pressure gas region that communicates with the inside of the rotating device in which the first gas seal 101 is installed
- the non-sealed fluid region L is an atmosphere that communicates with the outside of the rotating device. It is an area.
- the seal case 1 has a cylindrical shape that concentrically surrounds the rotating shaft 2 that protrudes horizontally from the housing 9 of the rotating device as shown in FIG. 1, and is attached to the rear end of the housing 9. Yes.
- the rotary seal ring 3 is fixed to a rotary shaft 2 as shown in FIG. 1 via cylindrical fixing members 10 and 11.
- the rotating sealing ring 3 is an annular body formed on a sealing end surface (hereinafter also referred to as “rotating side sealing end surface”) 3a having a rear end surface which is a smooth surface orthogonal to the axis.
- the stationary seal ring 4 is axially connected to the inner peripheral portion of the seal case 1 via the first and second O-rings 12 and 13 while concentrically facing the rotary seal ring 3 as shown in FIG. It is held so that it can move in the direction.
- the stationary seal ring 4 is an annular body composed of first, second, third and fourth annular portions 14, 15, 16, 17 having different outer diameters as shown in FIG.
- the front end face of 14 is formed on a sealed end face (hereinafter also referred to as a “static side sealed end face”) 4a which is a smooth surface orthogonal to the axis.
- the outer diameter D4 of the fourth annular portion 17 at the rearmost position following D3 and the rear position is set so that D1 ⁇ D2, D4 ⁇ D2 ⁇ D3.
- the outer diameter D1 of the stationary side sealing end surface 4a is set smaller than the outer diameter of the rotating side sealing end surface 3a, and the inner diameter of the stationary side sealing end surface 4a is set larger than the inner diameter of the rotation side sealing end surface 3a.
- the stationary seal ring 4 is prevented from rotating relative to the seal case 1 in a state that allows axial movement within a predetermined range by the engaging action of the drive pin 26 implanted in the seal case 1.
- the first and second O-rings 12, 13 are inserted between the opposed peripheral surfaces of the stationary sealing ring 4 and the sealing case 1 as shown in FIG.
- a secondary seal is provided between the stationary seal ring 4 and the seal case 1 while allowing the seal ring 4 to move forward and backward (in the axial direction) within a predetermined range. That is, the first O-ring 12 is loaded between the outer peripheral surface of the second annular portion 15 and the inner peripheral surface of the seal case 1, and the forward movement thereof also causes the outer peripheral surface force of the second annular portion 15 to be The first annular locking surface la formed on the inner peripheral portion of the seal case 1 is blocked in a range where it does not come off.
- the second O-ring 13 is loaded between the outer peripheral surface of the fourth annular portion 17 and the inner peripheral surface of the seal case 1, and the rearward movement thereof deviates from the outer peripheral surface of the fourth annular portion 17. In the range, it is blocked by the second annular locking surface lb formed on the inner periphery of the seal case 1.
- an annular communication space 18 closed by the first and second O-rings 12 and 13 is formed between the opposed peripheral surfaces of the stationary seal ring 4 and the seal case 1.
- the opening force generating means 7 includes a series of seal gas passages 5 passing through the seal case 1 and the stationary seal ring 4 as shown in FIG. 1 and the pressure in the sealed fluid region H (hereinafter referred to as "sealed fluid pressure").
- the seal gas passage 5 is an annular space formed between the opposed peripheral surfaces of the seal case 1 and the stationary seal ring 4 as shown in Fig. 12, and includes two O's interposed between the opposed peripheral surfaces.
- the static pressure generating groove 22 is a shallow concave groove which is continuous or intermittent in a concentric ring shape with the stationary side sealing end face 4a, and the latter is adopted in this example. That is, the static pressure generating groove 22 is composed of a plurality of arc-shaped concave grooves 22a arranged concentrically with the stationary-side sealed end face 4a as shown in FIG.
- each branch portion 23a is formed in each arc-shaped concave groove 22a constituting the static pressure generating groove 22 as shown in FIGS. Is open
- the restrictor 24 has a restricting function such as an orifice, a capillary tube, a porous member, and the like, and is disposed in a portion of the hermetic ring-side passage 23 except for the branch portion 23a.
- the throttle 24 can be disposed at an appropriate position in the seal gas passage 5. As will be described later, when the communication space 18 and the back pressure chamber 25 are used together, the communication space 18 in the seal gas passage 5 is used. It is arranged in the seal ring passage 23 on the further downstream side.
- the seal gas supply device 20 includes a seal gas 6 having a pressure P1 higher than the sealed fluid pressure P from the seal gas supply pipe 19 connected to the upstream end of the case side passage 21, the case side passage 21, and the communication space 18. Then, the fluid is supplied to the static pressure generating groove 22 through the seal ring side passage 23 and the restrictor 24.
- a gas that is harmless even if it flows into the regions H and L and does not adversely affect the sealed fluid (fluid in the sealed fluid region H) is selected as appropriate according to the sealing conditions. To do. In this example, clean nitrogen gas that is inert to various substances and harmless to the human body is used.
- the seal gas 6 is normally supplied during operation of the rotating device (during driving of the rotating shaft 2), and the supply is stopped after the operation is stopped.
- Rotating machine The operation of the vessel is started after the supply of the seal gas 6 is started and after the sealed end faces 3a and 4a are maintained in a proper non-contact state. This is performed after the operation of the rotating equipment is stopped and the rotating shaft 2 is completely stopped.
- the pressure P1 of the sealing gas 6 is generally set or controlled so as to be higher than the sealed fluid pressure P by about 0.5 to 1.5 bar.
- the seal gas 6 is supplied from the seal gas passage 5 between the seal end faces 3 a and 4 a, so that the stationary seal ring 4 is separated from the rotary seal ring 3.
- An opening force is generated in the direction in which the sealing end faces 3a and 4a are opened.
- the closure generating means 8 includes a back pressure chamber 25 as an annular space closed by two O-rings 12 and 13 between the opposed peripheral surfaces of the seal case 1 and the stationary seal ring 4 as shown in FIG. Then, a part of the seal gas 6 supplied to the seal gas passage 5 or a part of the seal gas 6 flowing in the seal gas passage 5 is introduced into the back pressure chamber 25, and the seal gas 6 is introduced into the stationary seal ring 4. It is configured to generate the closing force by applying a back pressure due to the above, and does not have a spring for generating the closing force unlike a conventional gas seal.
- the communication space 18 that is a constituent part of the seal gas passage 5 as shown in FIG. 13 is also used as the back pressure chamber 25.
- the sealing gas 6 is supplied to the back pressure chamber 25
- the back pressure chamber 25 is transferred to the stationary sealing ring 4 (considering the influence of the sealed fluid pressure P in the case of DK D2).
- the shape is such that a closing force acting in the direction of pressing, that is, the direction of closing the sealed end faces 3a, 4a acts.
- the stationary sealing ring 4 includes a thrust force (first thrust force) F1 due to the sealed fluid pressure P acting on the front end face 4b of the second annular portion 15 as shown in FIG.
- the sealing gas 6 introduced into the generating groove 22 generates an opening force that acts in the opening direction between the sealing end faces 3a and 4a. This opening force is due to the static pressure generated by the sealing gas 6 introduced between the sealing end faces 3a and 4a.
- the sealing gas 6 introduced into the back pressure chamber 25, which is also used as the communication space 18, is a closing force that acts on the stationary sealing ring 4 in the direction of closing the sealing end faces 3a, 4a. The closing force of the magnitude to act acts.
- the sealed end faces 3a and 4a are held in a non-contact state with an appropriate gap due to the balance between the opening force and the closing force. That is, the seal gas 6 introduced into the static pressure generating groove 22 forms a static pressure fluid film that balances the closing force between the sealed end faces 3a and 4a, and the presence of this fluid film causes the sealing end faces 3a and 4a to The inner and outer diameter side regions H and L are shielded and sealed.
- the gap between the sealed end faces 3 a and 4 a is determined by the non-contact between the opening force and the closing force, as in the case of a conventional gas seal using a spring. It can be held in a non-contact state with an appropriate gap.
- the gap is automatically adjusted even if the gap between the sealed end faces 3a and 4a changes. Is held properly. In other words, when the gap between the sealed end faces 3a and 4a becomes larger than the appropriate gap due to vibration of the rotating equipment, etc., the amount of seal gas flowing out from the static pressure generating groove 22 between the sealed end faces 3a and 4a and the restrictor 24 pass through. Therefore, the amount of seal gas supplied to the static pressure generating groove 22 becomes unbalanced, and the pressure in the static pressure generating groove 22 is low.
- the gap between the sealing end faces 3a and 4a is changed to be small, and the gap is adjusted to an appropriate value.
- the gap between the sealed end faces 3a and 4a becomes smaller than the appropriate gap, the pressure in the groove 22 increases due to the restriction function by the restrictor 24 as described above, and the opening force becomes the closing force.
- the gap becomes larger and the gap between the sealed end faces 3a and 4a is changed to be larger, and the gap is adjusted to an appropriate one.
- the first gas seal 101 is provided between the sealed end faces 3a and 4a in the same manner as the conventional gas seal using the spring as the closing means when the supply of the seal gas 6 is properly performed. Can be satisfactorily sealed in the sealed fluid region H while maintaining a non-contact state with an appropriate gap.
- the first gas seal 101 is sealed during operation (or when operation is completely stopped at the V stage) due to a failure of the seal gas supply device 20 or the like, an operation error, or the like.
- the problem described at the beginning does not occur! /.
- the stationary sealing ring 4 has the sealing end surfaces 3a and 4a that do not displace the state force when the supply of the sealing gas 6 stops. It will be held in a non-contact state. As a result, the supply of the seal gas 6 stops unexpectedly, so that the sealed end faces 3a and 4a do not collide violently and are damaged or broken as described at the beginning.
- the opening force and the closing force due to the sealing gas 6 are regenerated, and the sealed end surfaces 3a and 4a are maintained in an appropriate non-contact state.
- the sealing end surfaces 3a and 4a may be opened more than necessary due to the opening force, and it may not be possible to restore a proper non-contact state.
- the closing force by the seal gas 6 supplied to the back pressure chamber 25 without passing through the restrictor 24 is the opening force. It occurs before the occurrence of.
- the second gas seal 102 is characterized in that the seal case 1 as shown in Fig. 2 has a double cylinder structure having an outer diameter cylinder part lc and an inner diameter cylinder part Id.
- the outer diameter of the fourth annular portion 17 coincides with the outer diameter of the third annular portion 16
- the second O-ring 13 is formed on the inner peripheral surface of the fourth annular portion 17 and the outer periphery of the inner diameter cylindrical portion Id. Except for the point that it is disposed between the first gas cylinder 101 and the first gas cylinder 101, the same function as the first gas cylinder 101 is exhibited.
- the back surface of the stationary seal ring 4 (the rear end surface of the fourth annular portion 17) 4e can be used as a pressure receiving surface for generating the third thrust force F3 entirely. Due to the shape of the stationary seal ring 4, even when the first gas seal 101 cannot secure the closing force necessary to balance the opening force, it is possible to ensure a sufficient closing force. Thus, the shape of the back pressure chamber 25 that also serves as the communication space 18 can be changed as appropriate by devising the shape of the stationary seal ring 4 and the arrangement of the second O-ring 13.
- the closing of the second gas seal 102 is a sealed fluid that acts on the front end surface 4b of the second annular portion 15 from the third thrust force F3 caused by the seal gas pressure P1 acting on the rear end surface 4e of the fourth annular portion 17.
- the first thrust force F1 due to the pressure P and the first varnish thrust force F2 due to the seal gas pressure P1 acting on the front end face 4c of the third annular portion 16 are subtracted. However, when the outer diameters of the first and second annular portions 14 and 15 are the same, the first thrust force F1 is not generated.
- first and second gas seals 101 and 102 are configured such that the back pressure chamber 25 is also used as the communication space 18.
- the third gas seal 103 is not used as both 18, 25. It's easy to do that.
- first, second, and third O-rings 12, 13, and 28 are provided between the opposed peripheral surfaces of the seal case 1 and the stationary seal ring 4 as shown in FIGS.
- the communication air of the seal gas passage 5 that is disposed and is closed by the first and second O-rings 12, 13 between the opposed peripheral surfaces. 18 and a back pressure chamber 25 closed by the second and third O-rings 13 and 28 are defined, and a part of the seal gas 6 supplied from the seal gas supply passage 19 to the seal gas passage 5 is back-pressured. It is configured to be introduced into the chamber 25, and has the same structure as the first gas seal 101 except that this point and the seal case 1 have a double cylinder structure similar to the second gas seal 102.
- the stationary seal ring 4 is formed in a shape in which the outer diameter of the fourth annular portion 17 matches the outer diameter of the second annular portion 15, and the first and second O-rings 12, 13 are made the second and second Load between the outer peripheral surface of the four annular parts 15, 1 7 and the outer peripheral cylinder part lc of the seal case 1 and the third O-ring 28 with the inner peripheral surface of the fourth annular part 17 and the seal case.
- the communication space 18 and the back pressure chamber 25 are separated from each other by a second O-ring 13 so as to be separated from the outer peripheral surface of the inner diameter cylindrical portion Id.
- a closing gas passage 5 a that communicates with the back pressure chamber 25 independently of the sealing gas passage 5 is formed in the seal case 1, and the sealing gas supply passage 19
- the branched closing gas supply passage 19a is connected to the closing gas passage 5a, and a part of the sealing gas 6 supplied from the sealing gas supply passage 19 to the sealing gas passage 5 is closed.
- a closing force that balances the opening force is generated in the same manner as the first and second gas seals 101 and 102.
- the closing of the third gas seal 103 is the sealed fluid pressure acting on the front end face 4b of the second annular portion 15 from the third thrust force F3 due to the seal gas pressure P1 acting on the rear end face 4e of the fourth annular portion 17
- the first thrust force F1 due to P is subtracted and the result is obtained, and the thrust force is not generated by the seal gas 6 introduced into the communication space 18.
- the outer diameters of the first and second annular portions 14, 15 are the same, the first thrust force F1 is not generated.
- the fourth gas seal 104 is loaded with the fourth O-ring 33 at the first O-ring loading position in the second gas seal 102 as shown in FIG.
- a pressure holding chamber 30 is formed, and a seal gas introduction path 32 in which the pressure holding chamber 30 and the back pressure chamber 25 serving as the communication space 18 are communicated with the stationary seal ring 4 and the restrictor 31 is disposed. Except for the points formed, it has the same structure as the second gas seal 102.
- the restrictor 31 has a function of restricting orifices, capillaries, porous members, etc., like the restrictor 24 disposed in the seal gas passage 5.
- the seal gas 6 is introduced into the pressure holding chamber 30 from the back pressure chamber 25 that also serves as the communication space 18 through the seal gas introduction path 32 and is introduced into the pressure holding chamber 30.
- the thrust gas in the direction separating the stationary seal ring 4 from the rotary seal ring 3 is generated by the seal gas 6. This thrust force is due to the seal gas pressure P1 acting on the front end face 4c of the third annular portion 15, and is functionally equivalent to the first varnish thrust force F2 when the seal gas 3 is supplied.
- a communication space 18 closed by the first and second O-rings 12 and 13 is formed between the inner peripheral surface of the fourth annular portion 16 and the outer peripheral surface of the inner diameter cylindrical portion lc of the seal case 1.
- a back pressure chamber 25 closed by the second and third O-rings 12 and 28 is formed, the closing generation means 8 is configured in the same manner as the third gas seal 103, and the pressure holding chamber 30 is the restrictor 31.
- the communication space 18 is communicated by a seal gas introduction path 32 having Even in the case of the powerful structure, as in the case of the fourth gas seal 104, when the supply of the seal gas 6 is stopped, the seal gas pressure P1 remaining in the pressure holding chamber 30 causes the stationary seal ring 4 to move in the direction of the rotational seal ring. A resistance force is generated to prevent the stationary seal ring 4 from moving in the direction of the rotating seal ring when the supply of the seal gas 6 is stopped.
- the fifth gas seal 105 may be communicated with the back pressure chamber 25 via the restrictor 31 and the seal gas introduction path 32.
- the sixth, seventh, eighth and ninth gas seals 106, 107, 108, 109 are connected to the stationary seal ring 4 from the rotary seal ring 3 between the seal case 1 and the stationary seal ring 4. It is configured to prevent sudden movement of the stationary seal ring 4 in the direction of the rotary seal ring when the supply of the seal gas 6 is stopped by interposing elastic members 34, 35 energizing in the direction of separation. is there.
- the sixth or seventh gas seals 106 and 107 separate the stationary seal ring 4 from the rotary seal ring 3 between the seal case 1 and the stationary seal ring 4 as shown in FIG. 6 or FIG.
- the spring 34 which is an elastic member urging in the direction
- the urging force of the spring 34 suddenly moves the stationary seal ring 4 in the direction of the rotary seal ring. It is configured to prevent unwanted movement.
- the urging force by the spring 34 is necessary to prevent sudden movement of the stationary seal ring 4 when the opening force by the opening force generating means 7 and the closing force by the closing force generating means 8 disappear. And set enough Needless to say, the balance between the opening force and the closing force for maintaining a proper non-contact state between the sealed end faces 3a and 4a should not be impaired.
- the eighth or ninth gas seal 108, 109 is a seal case 1 as shown in FIG. 8 or FIG. 9 (in the eighth gas seal 108, it is an inner diameter cylindrical portion Id, and the ninth gas seal 108 109 is the outer diameter cylinder part lc) and the stationary seal ring 4 is provided with an O-ring 35, which is an elastic member that urges the stationary seal ring 4 away from the rotary seal ring 3.
- the urging force (elastic deformation in the axial direction) by the O-ring 35 is used to prevent the stationary seal ring 4 from moving suddenly in the direction of the rotary seal ring. It is configured as follows.
- the O-ring 35 is also used as the first O-ring 12 for sealing the back pressure chamber 25 that also serves as the communication space 18. Further, the urging force by the O-ring 35 can prevent the stationary seal ring 4 from moving suddenly when the opening force by the opening force generating means 7 and the closing force by the closing force generating means 8 disappear. Needless to say, it should be set to be necessary and sufficient, and it should not impair the balance between the opening force and the closing force for keeping the sealed end faces 3a and 4a in a proper non-contact state.
- the sealing gas pressure P1 acting on the back pressure chamber 25 may be opened. Force that may be necessary and sufficient to balance with force may not be secured Force in this case, a closing force by sealed fluid pressure P such as the tenth gas seal 110 may be added.
- the tenth gas seal 110 is closed by two O-rings 28 and 36 between the opposed peripheral surfaces of the inner diameter cylindrical portion Id of the seal case 1 and the stationary seal ring 4 as shown in FIG.
- An auxiliary back pressure chamber 37 that is separated from the back pressure chamber 25 is formed, and a through hole 38 that connects the sealed fluid region H and the auxiliary back pressure chamber 37 is formed in the stationary sealing ring 4,
- a sealing force that presses the stationary seal ring 4 to the rotary seal ring 3 is generated by the sealed fluid pressure P introduced into the auxiliary back pressure chamber 37.
- the tenth gas seal 110 has the same structure as the third gas seal 103 except that the auxiliary back pressure chamber 37 and the through hole 38 are provided.
- the above-mentioned fears can be effectively eliminated by providing elastic rods 34, 35 such as sixth, seventh, eighth or ninth gas cylinders 106, 107, 108, 109. be able to.
- the eleventh gas seal 111 is an example.
- the ⁇ -gas seal 111 is separated from the rotary seal ring 3 between the seal case 1 and the static seal ring 4 in the same manner as the sixth gas seal 106 shown in FIG.
- the structure is the same as that of the tenth gas seal 110 except that a spring 34 urging in the direction is provided.
- the opening force generating means 7 is sealed between the sealed end faces 3a, 4a by the seal gas 6.
- the twelfth gas seal 112 is an example of a composite non-contact gas seal configured to generate such an opening force due to static pressure and dynamic pressure. That is, the twelfth gas seal 112 has a dynamic pressure generating groove 41 formed on the rotation-side sealed end face 3a as shown in FIG. 12, and the dynamic pressure generating groove 41 moves between the sealed end faces 3a and 4a. It is devised to generate an opening due to pressure. Except for this point, it has the same structure as the first gas seal 101.
- the shape of the dynamic pressure generating groove 41 can be appropriately set according to the sealing conditions and the like.
- the dynamic pressure generating groove 41 is formed on the rotation-side sealing end surface 3a as shown in FIG. Force of the part facing the static pressure generating groove 22
- the first group portion 42a extending in an inclined direction in the outer diameter direction and in the direction opposite to the rotation direction (direction i) of the rotary seal ring 3 and the inner diameter direction and rotary seal ring 3
- a plurality of groups 42 composed of second group portions 42b extending in a slanting direction in the direction opposite to the rotational direction (i direction) is configured in parallel with the circumferential direction of the sealed end surface 3a.
- Each group 42 is a groove having a constant depth of 1 to: L0 m, its outermost diameter side end (outer diameter side end of the first group portion 42a) and innermost diameter side end (second group).
- the end portion on the inner diameter side of the portion 42b) is located in the overlapping region of the both sealed end faces 3a and 4a. That is, the inner and outer diameters e and f of the dynamic pressure generating groove 41 as shown in Fig.
- the inner diameter of the side sealing end face 3a) and the outer diameter b of the static pressure generating groove 22 (arc-shaped concave groove 22a) and its inner diameter c are within the range where b ⁇ f ⁇ a, d ⁇ e ⁇ c. It is set appropriately. In this example, 0.5 ⁇ (fb) / (ab) ⁇ 0.9 or 0.5 ⁇ (c-e) / (c-d) ⁇ 0.9 is set to be satisfied. .
- Each group 42 has a substantially square shape in which the first group portion 42a and the second group portion 42b coincide with each other at the base end as shown in FIG. As shown in the figure, the base end portions of the first group portion 42a and the second group portion 42b have a zigzag shape that lies in the circumferential direction.
- the twelfth gas seal 112 which is such a composite non-contact gas seal
- dynamic pressure is generated by the dynamic pressure generating groove 41 in addition to the static pressure by the seal gas 6 between the sealed end faces 3a and 4a.
- the static force and the dynamic pressure generate an opening force for keeping the sealed end surfaces 3a and 4a in a non-contact state. Accordingly, even when a situation occurs in which the sealed end faces 3a and 4a cannot be held in an appropriate non-contact state depending on the static pressure by the seal gas 6, the proper non-contact state can be maintained by the dynamic pressure.
- the required supply amount of the seal gas 6 can be reduced by the static pressure of the seal gas 6.
- the dynamic pressure generating groove 41 is open outside the overlapping region of the sealed end faces 3a and 4a, the innermost end and the outermost end of each group 42 are sealed end faces 3a and 4a. In addition to functioning as a weir for the seal gas 6 introduced between them, it acts to narrow the leakage gap formed between the sealed end faces 3a and 4a.
- the leakage amount of the seal gas 6 introduced between the sealed end faces 3a and 4a into the sealed fluid region H is suppressed, and the trapping characteristic of the seal gas 6 by the dynamic pressure generating groove 41 becomes extremely good. . Therefore, the consumption of the seal gas 6 can be reduced, and even if there are particles accompanying the seal gas 6, the intrusion can be suppressed as much as possible.
- dynamic pressure is generated even if the rotary sealing ring 3 rotates in either the forward rotation direction or the reverse rotation direction in the dynamic pressure generating groove 41. It may be a shape that can be used.
- the shape of the dynamic pressure generating groove 41 can be arbitrarily set according to the sealing conditions and the like, and various shapes of the conventional force have been proposed.
- a dynamic pressure generating groove unit composed of a first dynamic pressure generating groove and a second dynamic pressure generating groove, which are arranged in the radial direction and symmetrical with respect to the diameter line, is predetermined in the circumferential direction on the rotary side sealing end surface 3a.
- the configuration is such that dynamic pressure is generated by the second dynamic pressure generating groove.
- the first and second dynamic pressure generating grooves for example, L-shaped grooves having a constant groove depth and groove width can be employed.
- the static pressure type non-contact gas seal of the present invention is a rotating device (for example, a substrate using a rotating table (semiconductor wafer, substrate of an electronic device) that requires advanced anti-contamination measures such as semiconductor related devices. , A liquid crystal substrate, a photomask, a glass substrate, etc.) A force that can be suitably used as a sealing device of a processing apparatus that performs a cleaning process, etc.)
- a thirteenth gas seal 113 is a rotary table as shown in FIG.
- a processing region H which is a sealed fluid region where the rotary table 202 is disposed and a region L in the plastic cover 204 which is a non-sealing fluid region. It is a sealing device for a processing device provided to shield the gap
- the driving unit 203 of the rotary table 202 as shown in FIG. 18 is covered with a cylindrical plastic cover 204, and a semiconductor wafer, an electronic device substrate, a liquid crystal substrate, and a photomask.
- the drive unit 203 is connected to the rotary table 202 and extends in the vertical direction.
- the bearing 203 supports the rotary shaft 203a in a rotatable manner, the drive means for the rotary shaft 203a, and the cover inner region.
- a support machine frame 203b supported by L is provided, and the rotary table 202 is driven to rotate.
- the turntable 202 is made of silicon carbide, and has a shape of a rotating body such as a disc disposed horizontally in the processing region H.
- the plastic cover 204 has a cylindrical shape with a top opening formed integrally with a chemical-resistant plastic (in this example, PTFE is used) as shown in FIG. 1, and is disposed on the lower surface side of the rotary table 202.
- An appropriate labyrinth seal 205 as shown in FIG. 18 can be provided between the rotary table 202 and the plastic cover 204 as needed.
- the thirteenth gas seal 113 is arranged in a plastic cover 204 as shown in FIG. 18, and is attached to the cylindrical seal case 1 attached to the support machine frame 203b of the drive unit 203.
- the rotary seal ring 3 fixed to the rotary table 202 as a rolling member, and the stationary seal ring held axially movable (movable in the front-rear direction) while concentrically facing the rotary seal ring 3 and facing the seal case 1 4 and a series of seal gas passages 5 penetrating the seal case 1 and the stationary seal ring 4, by supplying a seal gas 6 between the seal end faces 3a and 4a which are the opposite end faces of the seal rings 3 and 4, respectively.
- An opening force generating means 7 for generating an opening force acting on the ring 4 in the direction to open the space between the sealed end faces 3a and 4a, and a direction to close the space between the sealed end faces 3a and 4a on the stationary seal ring 4.
- a closure generating means 8 for generating an operating closure, and the process H, which is the outer peripheral side region of the sealed end faces 3a, 4a, and the inside thereof, while keeping the sealed end faces 3a, 4a in a non-contact state. It is configured to shield and seal the in-cover region L, which is the peripheral region, and has the same structure as the first gas seal 101 except for the points described below. Note that the same components as those of the first gas seal 101 are denoted by the same reference numerals in FIG. 18, and detailed description thereof will be omitted.
- the seal case 1 is made of a metal made of a cylindrical upper sealing ring holding portion 61 and an annular mounting portion 63 in which the lower end portion force of the lower sealing ring holding portion 62 projects inward.
- the lower sealing ring holding part 62 and the attaching part 63 are an integral structure, and the upper sealing ring holding part 61 and the upper sealing ring holding part 61 are separate structures and are connected by an appropriate connector.
- the seal case 1 has its lower end (the lower end of the lower sealing ring holding portion 62) abutted with the cover step 204a and its outer peripheral portion (the outer periphery of the upper and lower sealing ring holding portion 61) is placed on the upper end side of the plastic cover 204. It is attached to the support machine frame 203b via the mounting part 63 in a state where it is in close contact with the inner peripheral part (inner peripheral part above the cover step part 204a) via the O-ring 206 made of fluoro rubber. .
- the rotary seal ring 3 is an annular body formed of a material (for example, silicon carbide) harder than the constituent material (for example, carbon) of the stationary seal ring 4, and a rotary table as shown in FIG.
- the lower surface of 202 is fixed concentrically with the rotating shaft 203a.
- the lower end face of the rotary seal ring 3 is a sealed end face (rotary side seal end face) 3a which is a smooth annular face.
- the stationary seal ring 4 is axially connected to the inner peripheral portion of the seal case 1 via the first and second O-rings 12 and 13 in a state of being concentrically opposed to the rotary seal ring 3 as shown in FIG. It is held so that it can move in the direction (movable in the vertical direction).
- the stationary seal ring 4 has the same structure as that of the first gas seal 101, and the first, second, third and fourth annular portions 14, 14 having different outer diameters as shown in FIG.
- the upper end surface of the first annular portion 14 is formed as a sealed end surface (stationary side sealed end surface) 4a which is a smooth surface orthogonal to the axis.
- the stationary seal ring 4 prevents relative rotation with respect to the seal case 1 while allowing axial movement within a predetermined range by the engaging action of the drive pins 26 installed in the mounting portion 63 of the seal case 1. Being sung.
- the first and second O-rings 12, 13 were appropriately compressed between the opposed peripheral surfaces of the stationary seal ring 4 and the upper and lower seal ring holding portions 61, 62 of the seal case 1 as shown in FIG.
- the secondary seal is provided between the stationary seal ring 4 and the seal case 1 while allowing the vertical movement (axial movement) of the stationary seal ring 4 within a predetermined range.
- an annular communication space 18 closed by the first and second O-rings 12 and 13 is formed.
- the opening force generating means 7 includes a series of seal gas passages 5 penetrating the seal case 1 and the stationary seal ring 4, and pressure in the processing region H. Force (sealed fluid pressure)
- the seal gas supply device 20 supplies the seal gas 6 having a predetermined pressure PI (> P) higher than P from the seal gas supply passage 19 to the seal gas passage 5.
- the seal gas passage 5 is an annular space formed between the opposed peripheral surfaces of the seal case 1 and the stationary seal ring 4 as shown in FIG.
- the case-side passage 21 includes a first gas passage 21a that penetrates the lower sealing ring holding portion 62 in the axial direction as shown in FIG. 18, and an upper sealing ring holding portion 61 from its lower end portion to its inner peripheral portion. It consists of a second gas passage 21b that penetrates.
- the upper end of the first gas passage 21a and the lower end of the second gas passage 21b are connected to each other in a state where they are sealed by a fluororubber O-ring 21c interposed between the upper and lower sealing ring holding portions 61 and 62. Has been.
- the upper end (downstream end) of the second gas passage 21b is in communication with the communication space 18.
- the seal gas supply path 19 includes a first supply path 19a formed in a plastic cover 204 as shown in FIG. 18, and a second supply path 19b connecting the seal gas supply apparatus 20 to the first supply path 19a.
- the first supply channel 19a penetrates the plastic cover 204 in the vertical direction (the axial direction of the plastic cover 204), and opens the upper end portion (downstream end) of the cover step portion 204a and the lower end portion (upstream end portion). ) Is connected to the second supply path 19b.
- a coating layer made of a chemical resistant plastic such as PFA or PTFE is formed on the surface of the seal case 1 and the inner surface of the case side passage 21.
- the closure generating means 8 is closed by two O-rings 12 and 13 between the opposed peripheral surfaces of the seal case 1 and the stationary seal ring 4.
- a back pressure chamber 25 that is also used as the communication space 18 is formed, and a part of the seal gas 6 supplied to the seal gas passage 5 or a part of the seal gas 6 flowing in the seal gas passage 5 is formed in the back pressure chamber 25.
- the closed force is generated by applying a back pressure by the seal gas 6 to the stationary seal ring 4.
- the thirteenth gas seal 113 configured as described above, a sealing function similar to that of the first gas seal 101 is exhibited, and the processing region H and the in-cover region L are completely blocked. It will be different.
- both the sealing end surfaces 3a and 4a are held in a non-contact state by the sealing gas 6, particles such as abrasion powder due to the contact between the sealing end surfaces 3a and 4a are not generated. Accordingly, dust generated in the cover inner region L does not enter the processing region H, and the processing region H is kept clean. On the contrary, the processing residue generated in the processing region H does not enter the cover inner region L, and the drive system of the rotating shaft 2a does not cause trouble.
- the rotary table 202 is arranged. Between the processing area H and the in-cover area L in which the driving means of the rotating shaft 203a and the like are disposed. It is possible to maintain a clean atmosphere in which generation of ions is completely prevented, to perform good processing such as substrate cleaning, and to realize a high level of contamination prevention measures.
- the cleaning liquid residue generated in the processing area H can be used in the processing area H, and problems such as leakage of harmful substances leaking into the cover inner area L and adversely affecting the drive system of the rotary shaft 203a can be eliminated. .
- the case side passage 21 and the first supply passage 19a are arranged in a first manner as indicated by a chain line in FIG.
- the downstream end of the supply passage 19a is opened to the inner peripheral surface of the plastic cover 204, and the case side passage 21 is formed in the upper sealing ring holding portion 61 so as to penetrate in the radial direction.
- the static pressure type non-contact gas seal of the present invention includes the first, second, third, fourth, fifth, sixth, seventh, eighth, ninth, tenth, eleventh, 12th and 13th gas seals 1 01, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113 Improvements and modifications can be made as appropriate without departing from the scope.
- a seal device between both regions H and L is a tenth structure having the same structure as the first gas seal 101.
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Sealing (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/664,780 US7726659B2 (en) | 2004-10-08 | 2005-07-15 | Static pressure type non-contact gas seal |
EP05766291A EP1798455B1 (en) | 2004-10-08 | 2005-07-15 | Static pressure type non-contact gas seal |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004296341A JP4336286B2 (ja) | 2004-10-08 | 2004-10-08 | 静圧形ノンコンタクトガスシール |
JP2004-296341 | 2004-10-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006040865A1 true WO2006040865A1 (ja) | 2006-04-20 |
Family
ID=36148167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2005/013117 WO2006040865A1 (ja) | 2004-10-08 | 2005-07-15 | 静圧形ノンコンタクトガスシール |
Country Status (6)
Country | Link |
---|---|
US (1) | US7726659B2 (ja) |
EP (1) | EP1798455B1 (ja) |
JP (1) | JP4336286B2 (ja) |
KR (1) | KR100767865B1 (ja) |
TW (1) | TWI269006B (ja) |
WO (1) | WO2006040865A1 (ja) |
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US11506217B2 (en) | 2020-01-21 | 2022-11-22 | John Crane Uk Limited | Porous carbon containment or separation seal |
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2009066664A1 (ja) * | 2007-11-20 | 2009-05-28 | Eagle Industry Co., Ltd. | メカニカルシール及びタンデムシール |
US20100270749A1 (en) * | 2007-11-20 | 2010-10-28 | Eagle Industry Co., Ltd. | Mechanical seal device and tandem seal device |
US8585060B2 (en) | 2007-11-20 | 2013-11-19 | Eagle Industry Co., Ltd. | Tandem seal device |
JP5372772B2 (ja) * | 2007-11-20 | 2013-12-18 | イーグル工業株式会社 | タンデムシール |
EP2063156A1 (de) | 2007-11-23 | 2009-05-27 | Burgmann Industries GmbH & Co. KG | Doppel-Dichtungsanordnung |
EP2063157A1 (de) | 2007-11-23 | 2009-05-27 | Burgmann Industries GmbH & Co. KG | Gleitringdichtungsanordnung |
US7823885B2 (en) | 2007-11-23 | 2010-11-02 | Eagleburgmann Germany Gmbh & Co. Kg | Dual seal assembly |
US7862046B2 (en) | 2007-11-23 | 2011-01-04 | Eagleburgmann Germany Gmbh & Co. Kg | Mechanical seal assembly |
JP2010216587A (ja) * | 2009-03-17 | 2010-09-30 | Eagle Ind Co Ltd | シール装置 |
CN102853085A (zh) * | 2012-09-24 | 2013-01-02 | 北京化工大学 | 气体端面密封抗干扰装置及抗干扰方法 |
CN113494607A (zh) * | 2021-07-08 | 2021-10-12 | 西华大学 | 一种双o形圈c形滑环式组合密封结构 |
Also Published As
Publication number | Publication date |
---|---|
KR20060060686A (ko) | 2006-06-05 |
TW200619534A (en) | 2006-06-16 |
TWI269006B (en) | 2006-12-21 |
EP1798455A4 (en) | 2009-08-05 |
EP1798455B1 (en) | 2012-05-23 |
KR100767865B1 (ko) | 2007-10-17 |
US7726659B2 (en) | 2010-06-01 |
JP4336286B2 (ja) | 2009-09-30 |
JP2006105365A (ja) | 2006-04-20 |
EP1798455A1 (en) | 2007-06-20 |
US20080111315A1 (en) | 2008-05-15 |
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