WO2005085360A1 - Composition contenant une poudre inorganique, un film de transfert et un procédé de formation de frittage inorganique - Google Patents

Composition contenant une poudre inorganique, un film de transfert et un procédé de formation de frittage inorganique Download PDF

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Publication number
WO2005085360A1
WO2005085360A1 PCT/JP2005/003995 JP2005003995W WO2005085360A1 WO 2005085360 A1 WO2005085360 A1 WO 2005085360A1 JP 2005003995 W JP2005003995 W JP 2005003995W WO 2005085360 A1 WO2005085360 A1 WO 2005085360A1
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Prior art keywords
inorganic powder
inorganic
forming
containing composition
powder
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PCT/JP2005/003995
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English (en)
Japanese (ja)
Inventor
Satoshi Iwamoto
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Jsr Corporation
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Priority claimed from JP2004065662A external-priority patent/JP2005255716A/ja
Priority claimed from JP2004067552A external-priority patent/JP2005257906A/ja
Application filed by Jsr Corporation filed Critical Jsr Corporation
Publication of WO2005085360A1 publication Critical patent/WO2005085360A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18—Manufacture of films or sheets
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00—Use of organic ingredients
    • C08K5/04—Oxygen-containing compounds
    • C08K5/10—Esters; Ether-esters
    • C08K5/101—Esters; Ether-esters of monocarboxylic acids
    • C08K5/103—Esters; Ether-esters of monocarboxylic acids with polyalcohols
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L101/00—Compositions of unspecified macromolecular compounds

Definitions

  • the present invention relates to an inorganic powder-containing composition, a transfer film, and a method for forming an inorganic sintered body.
  • the present invention relates to a novel inorganic powder-containing composition and a method for forming an inorganic sintered body using the composition.
  • the inorganic powder-containing composition of the present invention is excellent in the thermal decomposability of the organic component during firing, and the organic component hardly remains in the formed inorganic sintered body. Therefore, it is useful as a member for field emission display (FED), plasma display panel (PDP), and inorganic electorescence (inorganic EL), particularly as a material for forming a conductive member or a material for forming a partition wall.
  • FED field emission display
  • PDP plasma display panel
  • inorganic EL inorganic electorescence
  • a field emission display is a display that emits electrons from a cathode into a vacuum by applying an electric field and irradiates the electrons on a phosphor on an anode to emit light and display.
  • a method of forming a pattern of a member such as an electrode or a partition used in such a display there are (1) a screen printing method of forming a pattern by screen printing using a paste-like composition for forming a member, and (2) a photosensitive method.
  • a photolithography method for example, Patent Documents 1 and 2 in which a composition layer for forming a member is formed, and a pattern is formed by irradiating ultraviolet rays through a photomask and then developing.
  • baking is performed at a high temperature to remove organic components such as resin, thereby forming members such as electrodes and partition walls.
  • a member pattern is formed by using the photolithography method, starting with a member of a large substrate and a member of high definition.
  • the panel performance of the display is inferior.
  • the degree of vacuum decreases with time and the luminance of the panel decreases accordingly (Patent Document 3).
  • the composition for forming a photosensitive member used in a photolithography method contains an unsaturated compound that is crosslinked by a photopolymerization initiator, and therefore, it is required to improve the performance of removing organic components during firing. ing.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 9-142878
  • Patent Document 2 JP-A-10-64435
  • Patent Document 3 JP-A-8-171877
  • the present invention has an excellent thermal decomposition property of an organic component during firing of a member pattern such as an electrode pattern and a partition pattern, and an inorganic component in which an organic component hardly remains in an inorganic sintered body such as a formed electrode or a partition. It is an object of the present invention to provide a powder-containing composition and a method for forming an inorganic sintered body using the same.
  • the inorganic powder-containing composition according to the present invention comprises (A) an inorganic powder, (B) an alkali-soluble resin, (C) a compound represented by the following formula (1) (hereinafter, referred to as "compound (C1) And at least one compound selected from the group consisting of a compound represented by the following formula (2) (hereinafter also referred to as “compound (C2)”). And (D) a photopolymerization initiator.
  • R 1 is a hydrogen atom, a hydroxyl group, an alkyl group having 114 carbon atoms or a hydroxyalkyl group having 114 carbon atoms.
  • a and b are each independently
  • the inorganic powder (A) is preferably a conductive inorganic powder or a glass powder. It is preferable that the alkali-soluble resin (B) is a methacrylate copolymer.
  • the transfer film according to the present invention is characterized by comprising a support film and a layer formed on the support film using the inorganic powder-containing composition.
  • an electrode in the method of forming an inorganic sintered body, can be formed by forming a layer using the composition containing a conductive inorganic powder.
  • a partition can be formed by forming a layer using the glass powder-containing composition.
  • the inorganic powder-containing composition according to the present invention is excellent in the thermal decomposability of the organic component during firing of the member pattern, and the organic component hardly remains in the formed inorganic sintered body such as the electrodes and the partition walls. .
  • the transfer film according to the present invention has a layer obtained from the inorganic powder-containing composition formed on a support film, and has excellent handling properties. By using this transfer film, it is possible to obtain a member forming coating film having excellent film thickness uniformity.
  • the method for forming an inorganic sintered body according to the present invention includes a method for forming a field emission display (FED), a plasma display panel (PDP), and a member for inorganic electorescence (inorganic EL), in particular, electrodes and partition walls. It is suitably used for forming.
  • FED field emission display
  • PDP plasma display panel
  • inorganic EL member for inorganic electorescence
  • the inorganic powder-containing composition according to the present invention comprises (A) an inorganic powder, (B) an alkali-soluble resin, (C) a compound represented by the above formula (1) or (2), and (D) light Contains a polymerization initiator.
  • Examples of the inorganic powder used in the present invention include a conductive inorganic powder and a glass powder.
  • glass powder examples include (1) a mixture of zinc oxide, boron oxide, and silicon oxide (ZnO—B O —SiO system), and (2) a mixture of lead oxide, boron oxide, and silicon oxide (PbO— BO- (SiO-based), (3) a mixture of lead oxide, boron oxide, silicon oxide, and aluminum oxide (Pb
  • the softening point of the glass powder is preferably in the range of 400 to 600 ° C. from the viewpoint of the firing temperature in forming the inorganic sintered body. Further, the average particle size of the glass powder is preferably in the range of 0.5 to 2.5 zm.
  • the glass powder can be used in combination with an inorganic oxide such as aluminum oxide, chromium oxide, manganese oxide, titanium oxide, zirconium oxide, silicon oxide, cerium oxide, and cobalt oxide.
  • an inorganic oxide such as aluminum oxide, chromium oxide, manganese oxide, titanium oxide, zirconium oxide, silicon oxide, cerium oxide, and cobalt oxide.
  • the content of the inorganic oxide used in combination is preferably 30% by weight or less based on the total amount of the inorganic powder (A) (glass powder + inorganic oxide).
  • the conductive inorganic powder examples include particles of Ag, Au, Cu, Al, Ag_Pd alloy, Cr, Ni, and the like. These conductive inorganic powders can be used alone or in combination of two or more.
  • the particle diameter of the conductive inorganic powder is preferably 10 / m or less from the viewpoint of imparting sufficient conductivity to the obtained electrode.
  • the conductive inorganic powder can be used in combination with a glass frit.
  • a glass frit for example, in addition to the above glass powder (1)-(4), (5) a mixture of bismuth oxide, boron oxide, silicon oxide, and aluminum oxide (BiO-BO-SiO- Al O) and others.
  • the softening point of these glass frits is preferably in the range of 400 to 600 ° C.
  • the content of the glass frit used in combination is 50% by mass or less, preferably 30% by mass or less, based on the total amount of the inorganic powder (A) (conductive inorganic powder + glass frit).
  • the inorganic powder-containing composition according to the present invention includes a glass paste composition when the inorganic powder (A) is a glass powder, and a conductive composition when the inorganic powder (A) is a conductive inorganic powder. It becomes a thing.
  • alkali-soluble refers to a property of being dissolved by an alkaline developer and having such a solubility that the development using an alkaline developer is performed.
  • Such alkali-soluble resins include, for example, (meth) acrylic resins, hydroxys Examples include a tylene resin, a novolak resin, and a polyester resin.
  • alkali-soluble resins preferred are the following copolymers of monomer (a) and monomer (and copolymers of monomer (a), monomer (b) and monomer (c), and the like.
  • (Meth) acrylic resins are preferred, and more preferably a methacrylate copolymer obtained by copolymerizing a methacrylate monomer from the viewpoint of excellent thermal decomposability during firing.
  • Acrylic acid methacrylic acid, maleic acid, fumaric acid, crotonic acid, itaconic acid, citraconic acid, mesaconic acid, cinnamic acid, succinic acid mono (2- (meth) atalyloic quichetyl), hexahydrophthalic acid mono (2- (Meta) ataryloy mouth quichetyl), monophthalic acid (2- (meta) ataliloyloxyshetyl), ⁇ - carboxy-polyproprotatonone mono (meta) acrylate.
  • Hydroxyl-containing monomers such as 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate; o-hydroxystyrene, m-hydroxystyrene, p-hydroxy A class of phenolic hydroxyl-containing monomers such as styrene.
  • copolymer of the monomer (a) and the monomer (c) and the copolymer of the monomer (a), the monomer (b) and the monomer (c) are composed of a monomer derived from the monomer (a).
  • the presence of the unit makes the compound soluble in alkali.
  • copolymers of monomer (a), monomer (b) and monomer (c) have excellent dispersion stability of inorganic powder (A) and dissolve in alkali developer described later. It is particularly preferable from the viewpoint of excellent properties.
  • the copolymer of the monomer (a) and the monomer (c) contains a structural unit derived from the monomer (a) in an amount of preferably 5 to 60% by mass, particularly preferably 10 to 40% by mass. I do. However, the total amount of the structural units derived from the monomer (a) and the monomer (c) shall be 100% by mass.
  • the copolymer of the monomer (a), the monomer (b) and the monomer (c) preferably contains 5 to 60% by mass, more preferably 10 40% by mass of the structural unit derived from the monomer (a). in containing the monomer (b) a constituent unit derived from preferably 1 one 50% by weight, particularly preferably in an amount of 5 30 wt 0/0.
  • the total amount of the structural units derived from the monomer (a), the monomer (b) and the monomer (c) is 100% by mass.
  • the constitutional unit derived from each of the above monomers is particularly preferably in the above range in terms of excellent dispersion stability of the inorganic particles and excellent solubility in an alkali developing solution described later.
  • the alkali-soluble resin (B) is obtained by copolymerizing the monomer (a) and the monomer (c) or the monomer (a), the monomer (b), and the monomer (c) by a conventionally known method. Can be manufactured.
  • the copolymer of the monomer (a) and the monomer (c) is preferably 5 to 60% by mass based on 100% by weight of the total amount of the monomer (a) and the monomer (c). %, particularly preferred properly is prepared using an amount of 10- 40 wt 0/0.
  • the copolymer of the monomer (a), the monomer (b) and the monomer (c) has a total amount of the monomer (a), the monomer (b) and the monomer (c) of 100% by mass.
  • the monomer (a) in an amount of preferably 5 to 60% by weight, particularly preferably 10 to 40% by weight, and the monomer (b) preferably in an amount of 1 to 50% by weight, particularly preferably 5 to 30% by weight. Is done.
  • the amount of each monomer is particularly preferably in the above range from the viewpoint that a copolymer having the above structural unit can be obtained.
  • alkali-soluble resin (B) glycidyl methacrylate or (meth) atalyliroxhetyl isocyanate is added to the alkali-soluble resin, and the alkali-soluble resin is polymerized by kneading. May be used.
  • the weight average molecular weight (Mw) of the alkali-soluble resin (B) is preferably 5,000 to 5,000,000, more preferably 10,000, and more preferably 10,000 to 300,000.
  • the Mw force S is preferably in the above range, since the solubility in an alkali developing solution is excellent and the film strength is sufficiently maintained when a transfer film is formed.
  • the content of the alkali-soluble resin (B) used in the present invention is usually 11 to 200 parts by mass, preferably 5 to 100 parts by mass with respect to 100 parts by mass of the inorganic powder (A). Particularly preferred is 10-80 parts by weight.
  • the compound (C) used in the present invention is at least one compound selected from the group consisting of the compound represented by the above formula (1) and the compound represented by the above formula (2). And has the effect of crosslinking the exposed portions of the coating film obtained from the composition containing an inorganic powder according to (1).
  • Examples of the compound (C1) represented by the formula (1) include trimetarylate such as trimethylolpropane triatalylate, pentaerythritol trimetatalate, and glycerin trimetatalate. These can be used alone or in combination of two or more. Among them, particularly preferred is trimethylolpropane trimethatalate.
  • Examples of the compound (C2) represented by the formula (2) include ethylene glycol dimethacrylate, ethylene glycol dimethacrylate, propylene glycol dimethacrylate, polyethylene glycol dimethacrylate, and polypropylene glycol dimethacrylate. 1,3-butanediolesimethacrylate, 1,4-butanediol dimethacrylate, neopentylglycol dimethacrylate, 1,6-hexanediol dimethacrylate, 1,9-nonanediol dimethacrylate, 1,10- Examples include dimetharate such as decanediol dimetharate and glycerol dimetharate. These can be used alone or in combination of two or more. Of these, particularly preferred are ethylene glycol dimethacrylate, diethylene glycol dimethacrylate, propylene glycol dimethacrylate, and glycerol dimethacrylate.
  • the compound (C) either the compound (C1) or the compound (C2) may be used, but it is preferable to use them in combination.
  • the sum of the compounds (C1) and (C2) shall be 1. It is preferable that the mass ratio is within the above range, since the pattern accuracy of the formed inorganic sintered body is excellent.
  • the content of the compound (C) is 100 parts by mass with respect to 100 parts by mass of the alkali-soluble resin (B). Parts by mass or less, and more preferably 20 to 80 parts by mass. If the amount is less than 20 parts by mass, it may be difficult to form a pattern of the inorganic sintered body due to poor curing of the exposed portion. On the other hand, if it exceeds 100 parts by mass, the deformation of the pattern of the inorganic sintered body during firing may be large.
  • Examples of the photopolymerization initiator (D) include benzyl, benzoin, benzophenone, camphorquinone, 2-hydroxy-2-methynole-1-phenyl-2-propane_1-one, 1-hydroxycyclohexylphenyl ketone, , 2-Dimethoxy_2_phenylacetophenone, 2_methyl_ [4 '-(methylthio) phenyl]-2-morpholino-1-propanone, 2-benzyl-2-dimethylamino_1_ (4-morpholino Carbonyl compounds such as phenyl) -butan-1-one; azo compounds or azide compounds such as azoisobutyronitrile and 4_azidobenzaldehyde; organic sulfur compounds such as mercaptan disulfide; benzoyl peroxide, dibenzoyl peroxide I-tert-butylperoxide, tert-butylhydride peroxide, cumenehydride per
  • the content of the photopolymerization initiator (D) is usually 1 to 100 parts by mass, preferably 5 to 50 parts by mass with respect to 100 parts by mass of the compound (C). It is preferable that the content is within the above range, since the accuracy of the pattern of the formed inorganic sintered body is excellent.
  • the inorganic powder-containing composition according to the present invention usually contains a solvent in order to impart appropriate fluidity or plasticity and good film-forming properties.
  • a solvent has good affinity for the inorganic powder (A) and good solubility of the alkali-soluble resin, and can impart appropriate viscosity to the inorganic powder-containing composition, and can be dried by drying. Preferably, it can be easily removed by evaporation.
  • Particularly preferred solvents include ketones, alcohols, and esters having a standard boiling point (boiling point at 1 atm) of 100 to 200 ° C.
  • ketones examples include getyl ketone, methyl butyl ketone, dipropyl ketone, and cyclohexanone.
  • alcohols examples include alcohols such as n-pentanol, 4-methinolene 2-pentanol, cyclohexanol, and diacetone alcohol; ethylene glycol monomethyl ether, ethylene glycol monomethyl ether ether, ethylene glycol monoethyl alcohol, and the like.
  • ether alcohols such as phenol glycolone monomethinoleate and propylene glycolone monoethylene phenol.
  • esters examples include alkyl esters of saturated aliphatic monocarbonates such as mono-n-butyl acetate and amyl acetate; lactate esters such as ethyl lactate and n-butyl lactate; Athenole esters such as tinoreserosonolebu acetate, propylene glycolone monomethinoleate enorea acetate, etinole 3-ethoxypropionate, and the like.
  • methyl butyl ketone, cyclohexanone, diacetone alcohol, ethylene glycol monobutyl ether, propylene glycol monomethyl ether, ethyl lactate, propylene glycol monomethyl ether acetate, ethinoleate 3-ethoxypropionate and the like are preferred.
  • solvents other than the above-mentioned solvents include turpentine oil, ethyl ethyl solvate, methyl ethyl solvate, terpineol, butyl carbitol acetate, butynolecanolebitone, isopropyl alcohol, benzyl alcohol and the like.
  • the content of the solvent (E) in the composition containing an inorganic powder according to the present invention can be appropriately selected within a range where good film-forming properties (fluidity or plasticity) can be obtained.
  • the amount is usually from 90 to 90% by mass, and preferably from 5 to 70% by mass, based on the total amount of the composition containing the inorganic powder.
  • the inorganic powder-containing composition according to the present invention as an optional component, a plasticizer, a dispersant, Contains various additives such as development accelerator, adhesion aid, antihalation agent, leveling agent, storage stabilizer, defoamer, antioxidant, ultraviolet absorber, sensitizer, and chain transfer agent. Good.
  • the inorganic powder-containing composition according to the present invention comprises the inorganic powder (A), an alkali-soluble resin (B), a compound (C), a photopolymerization initiator (D), and, if necessary, a solvent (E).
  • the additive (F) can be prepared by kneading using a kneading machine such as a roll kneader, a mixer, a homomixer, a ball mill, a bead mill and the like.
  • composition containing inorganic powder prepared as described above is a paste-like composition having fluidity suitable for application, and its rice occupancy is usually 100-1,000,000. , 000cp, preferably 500 to 300, OOOcp.
  • the transfer film according to the present invention is composed of a support film and a layer obtained on the support film from the composition containing an inorganic powder.
  • a transfer film is obtained, for example, by applying the above-mentioned inorganic powder-containing composition on a support film and drying the coating film.
  • the support film constituting the transfer film is preferably a resin film having heat resistance and solvent resistance and having flexibility.
  • the paste-like composition can be applied by a roll coater, and the inorganic powder-containing composition can be stored and supplied in a rolled state.
  • the resin forming the support film examples include polyethylene terephthalate, polyester, polyethylene, polypropylene, polystyrene, polyimide, fluorine-containing resins such as polyvinyl alcohol, polyvinyl chloride, and polyfluoroethylene, nylon, and cellulose. That can be S.
  • the thickness of the supporting film is, for example, 20 lOOxm.
  • the surface of the support film to which the composition containing an inorganic powder is applied is preferably subjected to a release treatment. Thereby, in the transfer step described later, the operation of peeling the support film can be easily performed.
  • the composition can efficiently form a coating film having excellent uniformity in film thickness.
  • Preferred examples include a coating method using a roll coater, a coating method using a doctor blade, a coating method using a curtain coater, a coating method using a die coater, and a coating method using a wire coater.
  • the drying conditions of the coating film applied as described above are, for example, about 0.5 to 30 minutes at 50 150 ° C, and the residual ratio of the solvent after drying (the drying Content) is usually within 2% by mass.
  • the thickness of the coating film formed on the support film as described above varies depending on the content and size of the inorganic powder (A), the use of the inorganic sintered body, and the like. In the case of a coating film for forming a partition wall, for example, it is 5 to 50 zm.
  • a protective film layer which may be provided on the surface of the coating film for forming an inorganic sintered body a polyethylene film, a polyvinyl alcohol-based film, and the like can be given.
  • the inorganic sintered body when a glass paste composition is used as the inorganic powder-containing composition, a partition can be formed, and when a conductive composition is used, electrodes and the like can be formed. Can be formed.
  • a method for forming a layer (a coating film for forming an inorganic sintered body) using the composition containing an inorganic powder on a substrate a method for applying the composition containing an inorganic powder on a substrate, and a method according to the present invention.
  • a method of transferring a coating film for forming an inorganic sintered body onto a substrate by using a transfer film is exemplified.
  • a method using a transfer film is preferred, and a coating film for forming an inorganic sintered body having excellent film thickness uniformity can be easily formed. Can be achieved.
  • the radiation used is not particularly limited, but examples thereof include ultraviolet light such as a low-pressure mercury lamp, a high-pressure mercury lamp, a metal halide lamp, and a g-ray / gamma-ray stepper.
  • ultraviolet light such as a low-pressure mercury lamp, a high-pressure mercury lamp, a metal halide lamp, and a g-ray / gamma-ray stepper.
  • an electron beam, a laser beam and the like can also be used.
  • the radiation is ultraviolet light
  • the irradiation dose is usually 50-2000mjZcm.
  • Examples of the effective component of the alkaline developer include lithium hydroxide, sodium hydroxide, potassium hydroxide, sodium hydrogen phosphate, diammonium hydrogen phosphate, dipotassium hydrogen phosphate, disodium hydrogen phosphate, and phosphoric acid.
  • Inorganic alkaline compounds such as lium and ammonia; tetramethylammonium hydroxide, trimethylhydroxyethylammonium hydroxide, monomethylamine, dimethylamine, trimethinoleamine, monoethylamine, getylamine, triethylamine, monoisopropylamine Reamin, diisopropyl ⁇ Min, organic alkaline compounds such as ethanol ⁇ Min, and the like.
  • the alkaline developer can be prepared by dissolving one or more of the alkaline compounds in water or the like.
  • concentration of the alkaline compound in the alkaline developer is usually from 0.001 to 10% by mass, preferably from 0.01 to 5% by mass.
  • the weight average molecular weight is the weight average molecular weight in terms of polystyrene measured by gel permeation chromatography (GPC) manufactured by Tosoh Corporation (device model name: HLC-802A). Amount.
  • the obtained copolymer (P1) had a polymerization conversion of 97% and a weight average molecular weight (Mw) in terms of polystyrene of 70,000.
  • a copolymer (P 2) was obtained in the same manner as in Synthesis Example 1 except that 35 parts of hexahydrophthalic acid mono (2-methacryloyl mouth xicetyl) was used in place of monosuccinic acid (2-methacryloy mouth mouth).
  • the obtained copolymer (P2) had a polymerization conversion of 97% and a weight average molecular weight (Mw) in terms of polystyrene of 66,000.
  • the obtained conductive composition (E1) was applied on a supporting film (200 mm in width, 30 m in length, 38 ⁇ m in thickness) using a die coater. 5 minutes to remove the solvent, and obtain a transfer film (F 1) having a 10 zm-thick electrode-forming coating film.
  • thermocompression bonding using a heating roller to form a coating film for electrode formation on a glass substrate.
  • the pressing conditions were as follows: the surface temperature of the heating roller was 90 ° C., the roll pressure was 2 kg / cm 2 , and the moving speed of the heating roller was 0.5 mZ.
  • i-line wavelength 365 nm
  • the glass substrate on which the electrode pattern was formed was fired in a firing furnace at a temperature of 590 ° C. for 15 minutes to remove organic components, thereby forming an electrode.
  • the conductive composition (E1) cured with ultraviolet light of 400 mj / cm 2 was placed on a thermobalance, When the temperature was raised at a rate of 20 ° C / min and the weight loss was measured, the weight loss was completed by 380 ° C, and the thermal decomposability of the organic components was good.
  • a conductive composition (E3) was produced in the same manner as in Example 1 except that 12.5 parts of glycerol dimethacrylate was used instead of propylene glycol dimethacrylate, and an electrode was formed thereafter. Was. As a result, an electrode could be formed in the same manner as in Example 1.
  • Example 1 Same as Example 1 except that 12.5 parts of trimethylolpropane triatalylate was used instead of trimethylolpropane trimetharate, and 12.5 parts of propylene glycol diatalylate was used instead of propylene glycol dimethacrylate. Then, a conductive composition (CE1) was manufactured, and then an electrode was formed. As a result, a target electrode could be formed as in Example 1.
  • the obtained glass paste composition (G1) was applied using a die coater on a support film (200 mm in width, 30 m in length, 38 ⁇ in thickness) composed of a PET film, and the coating was coated at 100 ° C. After drying at C for 5 minutes to remove the solvent, a transfer film (F1) having a glass sintered body forming coating film having a thickness of S10 / m was prepared.
  • the coating film for forming a glass sintered body of the obtained transfer film (F1) is applied to the surface of the glass substrate.
  • the sheets were overlapped so as to be in contact with each other, transferred by thermocompression bonding using a heating roller, and a coating film for forming a glass sintered body was formed on a glass substrate.
  • the crimping conditions are as follows: the surface temperature of the heating roller is 90 ° C, The moving speed of the heating roller was set to 0.5 mZ.
  • the support film was exposed to ultraviolet light (i-line: wavelength 365 nm) of 800 mJ / cm 2 from the support film side, and then the support film was peeled off.
  • i-line wavelength 365 nm
  • development processing is performed by a shower method using a 0.6% by mass aqueous solution of sodium carbonate (30 ° C.) as a developing solution, and then a shower of ultrapure water is applied for 1 minute to remove unexposed portions of ultraviolet rays. Removed. Further, a drying process was performed to form a partition pattern on the substrate.
  • the glass substrate on which the partition pattern was formed was baked in a firing furnace at a temperature of 590 ° C. for 15 minutes to remove organic components, thereby forming a partition made of a sintered glass body. .
  • the glass paste composition (G1) cured with 800 mj / cm 2 ultraviolet light was placed on a thermobalance. The sample was placed, the temperature was increased at a rate of 20 ° C / min, and the weight loss was measured. The weight reduction was completed by 380 ° C, and the thermal decomposability of the organic components was good.
  • the glass paste composition (P) was prepared in the same manner as in Example 4 except that 40 parts of the copolymer (P2) obtained in Synthesis Example 2 was used instead of the copolymer (P1) obtained in Synthesis Example 1. G2) was manufactured, and then a partition was formed. As a result, partition walls could be formed in the same manner as in Example 4.
  • the weight loss was measured in the same manner as in Example 4, the weight loss was completed up to 380 ° C. as in Example 4, and the thermal decomposability of the organic component was good.
  • a glass paste composition (G3) was produced in the same manner as in Example 4, except that 12.5 parts of glycerol dimetharate was used instead of propylene glycol dimetharate, and thereafter, partition walls were formed.
  • partition walls could be formed in the same manner as in Example G.
  • the weight loss was measured in the same manner as in Example 4, the weight loss was completed up to 380 ° C. as in Example 4, and the thermal decomposability of the organic component was good.
  • Example 4 Glass was prepared in the same manner as in Example 4 except that 10 parts of trimethylolpropane triatalylate was used instead of trimethylolpropane trimethacrylate, and 10 parts of propylene glycol diacrylate was used instead of propylene glycol dimethacrylate.
  • a paste composition (CG1) was manufactured, and then a partition was formed. As a result, a desired partition wall could be formed in the same manner as in Example 4.
  • the present invention relates to a novel composition containing an inorganic powder.
  • the inorganic powder-containing composition according to the present invention is excellent in the thermal decomposability of the organic component at the time of firing, and the organic component hardly remains in the formed inorganic sintered body such as the electrodes and the partition walls. Therefore, it is useful as a member forming material for field emission display (FED), plasma display panel (PDP), and inorganic electorescence (inorganic EL), particularly as an electrode forming material and a partition forming material.
  • FED field emission display
  • PDP plasma display panel
  • inorganic EL inorganic electorescence

Abstract

Une poudre inorganique contenant une composition comprenant (A) une poudre inorganique, (B) une résine alcalino-soluble, (C) un composé spécifique méthacrylate, et (D) un initiateur de polymérisation. Il est également prévu un procédé de formation d'un frittage inorganique caractérisé par l'utilisation de la composition contenant de la poudre inorganique.
PCT/JP2005/003995 2004-03-09 2005-03-08 Composition contenant une poudre inorganique, un film de transfert et un procédé de formation de frittage inorganique WO2005085360A1 (fr)

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JP2004065662A JP2005255716A (ja) 2004-03-09 2004-03-09 ガラスペースト組成物、転写フィルムおよびガラス焼結体の形成方法
JP2004-065662 2004-03-09
JP2004067552A JP2005257906A (ja) 2004-03-10 2004-03-10 導電性組成物、転写フィルムおよび電極の形成方法
JP2004-067552 2004-03-10

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CN104078101A (zh) * 2014-06-30 2014-10-01 合肥中南光电有限公司 一种氧化铝/氧化钡复合的导电银浆及其制作方法
CN104091627A (zh) * 2014-06-30 2014-10-08 合肥中南光电有限公司 一种晶体硅太阳能电池用无铅导电银浆及其制作方法

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JP4432993B2 (ja) * 2007-04-16 2010-03-17 ソニー株式会社 パターン形成方法および半導体装置の製造方法

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JP2001100407A (ja) * 1999-09-30 2001-04-13 Sumitomo Bakelite Co Ltd 感光性銀ペースト及びそれを用いた画像表示装置
JP2001264973A (ja) * 2000-03-22 2001-09-28 Jsr Corp 無機粒子含有感光性組成物および感光性フィルム
JP2001264972A (ja) * 2000-03-22 2001-09-28 Jsr Corp 転写フィルム
JP2002167515A (ja) * 2000-11-30 2002-06-11 Jsr Corp 無機粒子含有樹脂組成物および転写フィルム

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* Cited by examiner, † Cited by third party
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CN104078100A (zh) * 2014-06-30 2014-10-01 合肥中南光电有限公司 一种石墨粉/方解石复合的低卤素含量导电银浆及其制作方法
CN104078101A (zh) * 2014-06-30 2014-10-01 合肥中南光电有限公司 一种氧化铝/氧化钡复合的导电银浆及其制作方法
CN104091627A (zh) * 2014-06-30 2014-10-08 合肥中南光电有限公司 一种晶体硅太阳能电池用无铅导电银浆及其制作方法
CN104078101B (zh) * 2014-06-30 2016-07-06 合肥中南光电有限公司 一种氧化铝/氧化钡复合的导电银浆及其制作方法

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