WO2003087707A3 - Metallization of carbon nanotubes for field emission applications - Google Patents

Metallization of carbon nanotubes for field emission applications Download PDF

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Publication number
WO2003087707A3
WO2003087707A3 PCT/US2003/011053 US0311053W WO03087707A3 WO 2003087707 A3 WO2003087707 A3 WO 2003087707A3 US 0311053 W US0311053 W US 0311053W WO 03087707 A3 WO03087707 A3 WO 03087707A3
Authority
WO
WIPO (PCT)
Prior art keywords
carbon nanotubes
metallized carbon
methods
metallization
field emission
Prior art date
Application number
PCT/US2003/011053
Other languages
French (fr)
Other versions
WO2003087707A2 (en
Inventor
Dongsheng Mao
Zvi Yaniv
Richard Lee Fink
Original Assignee
Nano Proprietary Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/372,006 external-priority patent/US20040018371A1/en
Priority to KR1020047014088A priority Critical patent/KR100836538B1/en
Priority to KR1020087006750A priority patent/KR100907758B1/en
Priority to DE60330710T priority patent/DE60330710D1/en
Priority to EP03746707A priority patent/EP1579467B1/en
Priority to AU2003232001A priority patent/AU2003232001A1/en
Application filed by Nano Proprietary Inc filed Critical Nano Proprietary Inc
Priority to AT03746707T priority patent/ATE453203T1/en
Priority to JP2003584609A priority patent/JP4727928B2/en
Priority to CN038082497A priority patent/CN1732549B/en
Priority to CA002477299A priority patent/CA2477299A1/en
Publication of WO2003087707A2 publication Critical patent/WO2003087707A2/en
Publication of WO2003087707A3 publication Critical patent/WO2003087707A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1633—Process of electroless plating
    • C23C18/1635—Composition of the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
    • C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
    • C23C18/36—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents using hypophosphites
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30469—Carbon nanotubes (CNTs)
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/832—Nanostructure having specified property, e.g. lattice-constant, thermal expansion coefficient
    • Y10S977/838—Magnetic property of nanomaterial
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/939—Electron emitter, e.g. spindt emitter tip coated with nanoparticles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913—Rod, strand, filament or fiber
    • Y10T428/2918—Rod, strand, filament or fiber including free carbon or carbide or therewith [not as steel]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913—Rod, strand, filament or fiber
    • Y10T428/2933—Coated or with bond, impregnation or core
    • Y10T428/2938—Coating on discrete and individual rods, strands or filaments
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913—Rod, strand, filament or fiber
    • Y10T428/2933—Coated or with bond, impregnation or core
    • Y10T428/294—Coated or with bond, impregnation or core including metal or compound thereof [excluding glass, ceramic and asbestos]
    • Y10T428/2958—Metal or metal compound in coating

Abstract

The present invention is directed towards metallized carbon nanotubes (104), methods for making metallized carbon nanotubes (104) using an electroless plating technique (Fig. 4), methods for dispensing metallized carbon nanotubes onto a substrate (101), and methods for aligning magnetically-active metallized carbon nanotubes (Fig. 2). The present invention is also directed towards cold cathode field emitting materials comprising metallized carbon nanotubes, and methods of using metallized carbon nanotubes as cold cathode field emitters (Fig. 3).
PCT/US2003/011053 2002-04-12 2003-04-11 Metallization of carbon nanotubes for field emission applications WO2003087707A2 (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
CA002477299A CA2477299A1 (en) 2002-04-12 2003-04-11 Metallization of carbon nanotubes for field emission applications
KR1020087006750A KR100907758B1 (en) 2002-04-12 2003-04-11 Metallization of Carbon Nanotubes for Field Emission Applications
DE60330710T DE60330710D1 (en) 2002-04-12 2003-04-11 METALIZATION OF CARBON NANOTUBES FOR FIELD EMISSION APPLICATIONS
EP03746707A EP1579467B1 (en) 2002-04-12 2003-04-11 Metallization of carbon nanotubes for field emission applications
AU2003232001A AU2003232001A1 (en) 2002-04-12 2003-04-11 Metallization of carbon nanotubes for field emission applications
KR1020047014088A KR100836538B1 (en) 2002-04-12 2003-04-11 Metallization of carbon nanotubes for field emission applications
AT03746707T ATE453203T1 (en) 2002-04-12 2003-04-11 METALLIZATION OF CARBON NANOTUBE FOR FIELD EMISSION APPLICATIONS
JP2003584609A JP4727928B2 (en) 2002-04-12 2003-04-11 Metallization of carbon nanotubes for field emission applications
CN038082497A CN1732549B (en) 2002-04-12 2003-04-11 Field emission device cathode device, its manufacture method and apparatus containing the device

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US37206702P 2002-04-12 2002-04-12
US60/372,067 2002-04-12
US41724602P 2002-10-09 2002-10-09
US60/417,246 2002-10-09
US10/372,006 2003-02-21
US10/372,006 US20040018371A1 (en) 2002-04-12 2003-02-21 Metallization of carbon nanotubes for field emission applications
US10/406,928 2003-04-04
US10/406,928 US6975063B2 (en) 2002-04-12 2003-04-04 Metallization of carbon nanotubes for field emission applications

Publications (2)

Publication Number Publication Date
WO2003087707A2 WO2003087707A2 (en) 2003-10-23
WO2003087707A3 true WO2003087707A3 (en) 2005-08-04

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/011053 WO2003087707A2 (en) 2002-04-12 2003-04-11 Metallization of carbon nanotubes for field emission applications

Country Status (6)

Country Link
US (1) US6975063B2 (en)
EP (1) EP1579467B1 (en)
KR (1) KR100907758B1 (en)
AU (1) AU2003232001A1 (en)
CA (1) CA2477299A1 (en)
WO (1) WO2003087707A2 (en)

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Also Published As

Publication number Publication date
KR100907758B1 (en) 2009-07-15
US20040013597A1 (en) 2004-01-22
EP1579467A2 (en) 2005-09-28
AU2003232001A1 (en) 2003-10-27
EP1579467A4 (en) 2005-12-21
AU2003232001A8 (en) 2003-10-27
KR20080029019A (en) 2008-04-02
WO2003087707A2 (en) 2003-10-23
US6975063B2 (en) 2005-12-13
CA2477299A1 (en) 2003-10-23
EP1579467B1 (en) 2009-12-23

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