WO2000044092A1 - Vibreur et dispositif electronique comportant un vibreur - Google Patents

Vibreur et dispositif electronique comportant un vibreur Download PDF

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Publication number
WO2000044092A1
WO2000044092A1 PCT/JP2000/000238 JP0000238W WO0044092A1 WO 2000044092 A1 WO2000044092 A1 WO 2000044092A1 JP 0000238 W JP0000238 W JP 0000238W WO 0044092 A1 WO0044092 A1 WO 0044092A1
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Prior art keywords
vibrator
electrode
vibrating rod
vibrating
axis
Prior art date
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PCT/JP2000/000238
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English (en)
Japanese (ja)
Inventor
Fumitaka Kitamura
Original Assignee
Seiko Epson Corporation
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Filing date
Publication date
Application filed by Seiko Epson Corporation filed Critical Seiko Epson Corporation
Priority to JP2000595424A priority Critical patent/JP4852195B2/ja
Publication of WO2000044092A1 publication Critical patent/WO2000044092A1/fr

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks

Definitions

  • the present invention relates to a vibrator, for example, a vibrator such as a tuning-fork type quartz vibrator or a gyro sensor, and an electronic device mounted with the vibrator.
  • a vibrator for example, a vibrator such as a tuning-fork type quartz vibrator or a gyro sensor, and an electronic device mounted with the vibrator.
  • tuning-fork type crystal resonator which is a resonator, has been formed, for example, as shown in FIG.
  • the tuning-fork type quartz vibrating piece 10 has, for example, a resonance frequency of 32.768 kHz, which is a high-precision vibrator, and is widely used in watches and other clock-equipped devices. Commonly used.
  • the tuning-fork type quartz vibrating piece 10 has a base 11, and the vibrating rod 12 extends upward from the base 11 in the figure. There is a book.
  • each of the vibrating rods 12 and 12 is usually about 0.23 mm as shown in the figure, and the width of the base 11 is usually about 0.69 mm as shown in the figure. It has become.
  • the total length of the base 11 and the vibrating rod 12 is usually about 3.6 mm as shown in the figure.
  • FIG. 12 is a schematic cross section taken along line AA ′ of FIG. 11. Electrodes 13 a and 13 b were formed on four sides of 12. That is, the electrodes 13a are arranged on the upper and lower portions of the vibrating rod 12 in the figure, and the electrodes 13b are disposed on both sides 13b, 13b of the vibrating rod 12.
  • voltages having different polarities are alternately applied to the electrodes 13a and 13b. For example, at one moment, a positive voltage is applied to 13a and a negative voltage is applied to 13b. It is. When a voltage is applied to the vibrating rod 12, an electric field is generated inside the vibrating rod 12, as indicated by an arrow in FIG.
  • the tuning-fork type crystal vibrating piece 10 that vibrates in this manner is housed in a protector (not shown), and is used as a surface mount device (SMD) or the like as an oscillation source of an oscillation circuit such as a clock.
  • SMD surface mount device
  • a tuning fork type crystal resonator 10 having a length of about 5 mm in the longitudinal direction and a length of about 2 mm in the short direction is used.
  • the thickness of the above-mentioned tuning-fork type quartz vibrating piece 10 in the vertical direction in FIG. 12 is about 0.1 mm, and the above-mentioned SMD package is also used for this tuning-fork type quartz vibrating piece 10. It has a thickness corresponding to the thickness.
  • such a tuning-fork type crystal vibrating piece 10 has a low CI value (crystal impedance or equivalent) in order to maintain a stable oscillation frequency (for example, 32.768 kHz) and to suppress the vibration loss of the vibrating rod 12. It is necessary to maintain the series resistance (Rr).
  • an object of the present invention is to provide a small-sized vibrator in which the CI value is suppressed to a low value and which is easy to process. Disclosure of the invention
  • a vibrator having a vibrating rod made of at least one or more piezoelectric materials, wherein a groove is formed on one or both of a front surface and a back surface of the vibrating rod. This is achieved by a vibrator characterized in that a groove is formed and an electrode is formed in this groove.
  • a groove is formed on one or both of the front surface and the back surface of the vibrating rod, and an electrode is formed in the groove, so that processing is easy.
  • the vibrating rod is uniformly and strongly distributed in the depth direction, so that an increase in CI value can be suppressed.
  • the vibrator is a tuning-fork type quartz vibrator.
  • an electric field generated from the electrode disposed on the vibrating rod is widely distributed on the vibrating rod, and an increase in CI value can be suppressed.
  • a vibrator having a plurality of vibrating rods, wherein a groove is formed on a first surface and a second surface of the vibrating rod.
  • a first electrode is formed on at least a part of the groove, and a second electrode is formed on at least a part of a surface of the vibrating rod other than the surface on which the groove is formed. This is achieved by the oscillator.
  • the vibrating rod is formed.
  • An electric field generated between a second electrode formed on at least a part of a surface other than the surface on which the groove is formed and a first electrode of the groove is formed in the depth direction of the vibrating rod.
  • the distribution is strong and constant, and the rise of the CI value of the vibrating rod of the vibrator can be suppressed.
  • the first electrode is formed at least near a root of the vibrating rod. It is.
  • the first electrode is formed at least near the root of the vibrating rod, an electric field required to vibrate the vibrating rod can be obtained.
  • the first electrode is a vibrator formed only on a side surface of the groove.
  • a vibrator in which a through hole is formed in a part of the groove.
  • the relationship between the width of the vibrating rod and the thickness of the vibrating rod is 0.6 x ( The vibrator is set as follows: (the vibrating rod) ⁇ (width of the vibrating rod).
  • the relationship between the width of the vibrating rod and the thickness of the vibrating rod is set as 0.6 x (the vibrating rod) ⁇ (the width of the vibrating rod). Therefore, unlike the conventional configuration of (1.0 X thickness of vibrating rod, width of vibrating rod), the width of the vibrating rod can be made sufficiently smaller than the thickness of the vibrating rod. In addition, the size of the entire vibrator can be reduced.
  • the vibrator in the configuration set forth in claim 3, the vibrator is formed such that each of the vibrating fine rods has substantially the same structure.
  • each of the vibrating rods is formed to have substantially the same structure.
  • vibration leakage can be prevented and a highly accurate vibrator can be obtained.
  • a vibrator in which the second electrode is formed on a plurality of surfaces.
  • a third electrode for connecting the second electrode t is formed on the first surface. This is a vibrator.
  • a third electrode for connecting the second electrodes is formed on the second surface. This is a vibrator.
  • a third electrode for connecting the second electrodes to each other is provided on a surface of a tip end of the vibrating rod. This is a vibrator formed.
  • the frequency of the vibrator is set in a range of 1 KHz to 200 KHz by a vibrator. is there.
  • the vibration wherein the frequency of the vibrator is set in a range of 16 KHz to 120 KHz. I am a child.
  • the vibrator wherein the frequency of the vibrator is set in a range of 16 KHz to 33 KHz. It is.
  • the first electrode, the second electrode, or the second electrode in the configuration according to any one of claims 3 to 12, the first electrode, the second electrode, or the second electrode.
  • the vibrator has an insulating film formed on the surface of the third electrode.
  • an insulating film is formed on a surface of the first electrode, the second electrode, or the third electrode. Therefore, even if the entire vibrator is downsized, the first electrode is formed. The pole, the second electrode, or the third electrode can be prevented from being short-circuited by a foreign substance or the like.
  • the insulating film is a vibrator made of an oxide film or a nitride film.
  • the insulating film is made of an oxide film or a nitride film
  • the first electrode, the second electrode, or the third electrode may be exposed to foreign matter even if the entire vibrator is downsized. Can be prevented.
  • the object is, according to the invention of claim 18, a vibrator formed by a plurality of vibrating fine rods, wherein a through hole is formed in a part of the vibrating fine rod; This is achieved by a vibrator in which a first electrode is formed on at least a part of the vibrating bar, and a second electrode is formed at least on a surface of the vibrating fine bar facing the first electrode.
  • the relationship between the width of the vibrating rod and the thickness of the vibrating rod is 0.6 x (the The vibrator is configured such that the thickness of the vibrating rod is ⁇ (the width of the vibrating rod).
  • the relationship between the width of the vibrating rod and the thickness of the vibrating rod is set as 0.6 x (thickness of the vibrating rod) ⁇ (width of the vibrating rod).
  • the width of the vibrating rod is sufficient for the thickness of the vibrating rod. Since it can be made small, the whole vibrator can be downsized.
  • the vibrator is formed by each of the vibrating fine rods having substantially the same structure.
  • each of the vibrating rods is formed to have substantially the same structure, vibration leakage can be prevented, and a highly accurate vibrator can be obtained.
  • the object has a rectangular coordinate system in which an electric axis is an X axis, a mechanical axis is a Y axis, and an optical axis is a Z axis, and the X axis and the Y axis are A vibrator in which a base is formed and a plurality of vibrating rods are arranged from the base along the Y-axis, wherein a first surface and a second surface of the plurality of vibrating rods are provided.
  • a vibrator having a groove formed on the surface of the groove, a first electrode formed on at least a part of the groove, and a second electrode formed on a surface other than the surface on which the groove is formed; To Is achieved.
  • a groove is formed on the first surface and the second surface of the plurality of vibrating rods, and a first electrode is formed on at least a part of the groove. Since the second electrode is formed on a surface other than the surface on which the portion is formed, a gap between the second electrode provided on the vibrating rod of the high-precision vibrator and the first electrode of the groove is provided.
  • the electric field generated by the vibration is uniformly and strongly distributed in the depth direction of the vibrating rod, and it is possible to suppress an increase in the CI value of the vibrating rod of the vibrator with high precision.
  • a cross section of the vibrating rod in a plane formed by the X axis and the Z axis is substantially H-shaped. This is a vibrator formed on the substrate.
  • the vibrating rod has a substantially H-shaped cross section in a plane formed by the X axis and the Z axis. Therefore, the first electrode and the second electrode of the groove portion are formed. The electric field generated therebetween can be uniformly and strongly distributed in the depth direction by the vibrating rod.
  • the first surface and the second surface are formed by the X axis and the Y axis.
  • a vibrator that is a surface.
  • the first electrode and the second electrode are formed by stacking a plurality of layers formed of different materials.
  • This is a vibrator, which is a laminated film formed.
  • the first electrode and the second electrode are a laminated film in which a plurality of layers formed of different materials are laminated, adhesion between these laminated layers is improved. Can be increased.
  • the vibrator comprising an oxide film formed on a surface of the first electrode and the second electrode. so is there.
  • the configuration since an oxide film is formed on the surfaces of the first electrode and the second electrode, even if the entire vibrator is downsized, the first electrode and the second electrode In other words, it is possible to prevent the third electrode from being short-circuited by a foreign substance or the like.
  • the first electrode and the second electrode are formed of chromium, gold, aluminum, nickel, or titanium.
  • FIG. 1 is a perspective view of a vibrator according to a first embodiment of the present invention.
  • FIG. 2 is a sectional view of a vibrating rod of the vibrator of FIG.
  • FIG. 3 is a perspective view of a tuning-fork type crystal resonator without electrodes according to the second embodiment.
  • FIG. 4 is a tuning fork-type crystal resonator in which electrodes are attached to the tuning-fork type crystal resonator of FIG.
  • FIG. 3 is a perspective view of a crystal resonator.
  • FIG. 5 is a diagram showing dimensions and the like of the tuning-fork type quartz resonator of FIG.
  • FIG. 6 (a) is a cross-sectional view showing the arrangement of the vibrating rods and electrodes of the tuning-fork type quartz resonator of FIG.
  • FIG. 6 (b) is a cross-sectional view different from FIG. 6 (a) and showing an example of an arrangement state of another electrode.
  • FIG. 6 (c) is a cross-sectional view showing an example of an arrangement state of another electrode, which is different from FIGS. 6 (a) and (b).
  • FIG. 7 is a schematic sectional view showing the arrangement of a vibrating rod having a through hole and electrodes.
  • FIG. 8 is a diagram showing a relationship between a groove in a tuning-fork type quartz resonator and atmospheric CI.
  • FIG. 9 is a perspective view showing another example of groove formation.
  • FIG. 10 is a sectional view showing an example in which the number of grooves formed in the vibrating rod is increased.
  • FIG. 11 is a diagram showing dimensions and the like of a conventional vibrator.
  • FIG. 12 is a cross-sectional view of a vibrating rod of a conventional vibrator.
  • FIG. 13 is a cross-sectional view showing a state in which the width of the vibrating rod of the conventional vibrator is reduced.
  • FIG. 1 is a diagram showing a vibrator according to a first embodiment of the present invention.
  • FIG. 1 shows the appearance of a tuning-fork type vibrator 100 made of a 32 KHz crystal used for a watch as an example.
  • the vibrator 100 is generally composed of two vibrating fine rods 120 and a fixed part 130 as a base.
  • the fixing portion 130 is provided for fixing to a package and forming a pad portion for taking out an electrode to the outside.
  • the two vibrating rods 120 vibrate in a direction in which they approach or move away from each other.
  • a groove 120a is formed on one or both of the front and back surfaces of the vibrating rod 120.
  • processing using photolithography using an etching liquid capable of dissolving the material of the vibrator 100 is used.
  • a crystal resonator can be processed with a hydrofluoric acid-based etching solution.
  • the groove 120a is formed to a part of the fixed portion 130, but this is not limited depending on the characteristics of the vibrator 100 and the processing process.
  • the length of the groove 120a is set, the CI value is reduced by providing the groove 120a over the entire length of the vibrating rod 120 as long as possible.
  • the length of the groove 120a is adjusted according to the specifications of the vibrator.
  • it is necessary to adjust the frequency by attaching a weight material to the tip of the vibrating rod 120, or to adjust the frequency, etc. There is no need to provide 0a.
  • FIG. 2 is a cross-sectional view of vibrating rod 120 in vibrator 100 according to the present embodiment.
  • the electric field 160 is distributed over the entire vibrating rod 120 in the depth direction. That is, since the electrode 140a is formed into the groove 120a, the electric field 160 is easily distributed in the depth direction. In this case, the depth of the groove 120a is better.
  • the equivalent series resistance (CI value) was measured at atmospheric pressure. However, it was 1 gigaohm.
  • the tuning-fork type vibration according to the present embodiment in which the edge of the vibrating rod 120 is left at 15 micrometer and the depth 120 micrometer groove 120 is formed on both surfaces of the vibrating rod 120 For element 100, the equivalent series resistance (CI value) in the atmosphere was 600 kOhm, indicating that it had the same characteristics as a normal tuning fork resonator.
  • the groove 120a may be connected on the front surface and the back surface. That is, a structure in which a slit is inserted in the vibrating rod 120 may be used.
  • the present embodiment it is possible to supply a vibrator having good characteristics without reducing the thickness of vibrator 1 • 0. Furthermore, since the thickness is not different from the conventional one, it is easy to handle and has an effect that the yield does not decrease. And, a small and inexpensive vibrator 1 • 0 can be supplied.
  • FIG. 3 is a schematic perspective view showing a tuning-fork type quartz crystal resonator 200 according to the second embodiment without electrodes.
  • the tuning-fork type crystal resonator 200 is formed by cutting out, for example, a single crystal of quartz and applying it to a tuning-fork type. At this time, the crystal is cut from a single crystal of crystal such that the X axis shown in FIG. 3 is the electric axis, the Y axis is the mechanical axis, and the Z axis is the optical axis.
  • the electric shaft in the X-axis direction in FIG. 3
  • a tuning fork type crystal resonator 200 suitable for a watch and a general device with a watch requiring high accuracy is obtained.
  • the XY plane consisting of the X and Y axes is rotated about every time
  • the tuning-fork type crystal resonator 200 is formed as a so-called crystal Z plate inclined by 5 to 5 degrees.
  • This tuning-fork type crystal resonator 200 is similar to the tuning-fork type resonator 100 according to the first embodiment described above, and has a fixed portion 230 as a base and a fixed portion 230 from the fixed portion 230.
  • grooves 220a are formed on the first and second surfaces of the two vibrating rods 220, respectively, as shown in FIG.
  • the thus formed tuning-fork type quartz crystal resonator 200 shown in FIG. 3 has an electrode 240 a as a first electrode and an electrode 240 a as a second electrode. 40b, and the electrode 240c as the third electrode will be arranged. That is, when arranging the electrodes from the fixed portion 230 to the vibrating rod 22 °, the electrodes are placed on the side surfaces of the vibrating rod 220 and the first and second surfaces, respectively, with electrodes 240b, 240 a is provided.
  • the electrode 240 a is also provided inside the groove 220 a of the vibrating rod 220 such an electrode 240 a, 240 b is provided with the electrode 240 a, It is provided for generating an electric field between 240 b and vibrating the vibrating fine rod 220 as a piezoelectric body. Further, the electrode 240c is provided for connecting the second electrodes formed on the two side surfaces of the vibrating rod 220, that is, the electrodes 240b.
  • Each of the electrodes 240a, 240b, and 240c is formed of a plurality of layers, for example, two layers, and is formed of Cr as a base and Au as an upper layer. In this case, Ni or Ti may be used instead of Cr.
  • the electrodes 240a, 240b, and 240c may be composed of one layer, and in this case, for example, the A1 layer is used.
  • an electrode whose surface is anodically oxidized with an A1 electrode, or an electrode in which a Cr electrode is used and an SiO 2 layer or the like is formed as a protective film on this Cr layer can also be used.
  • the electrode 240a is provided inside the groove 220a as shown in FIG. 4, but is not limited to this, and is divided into a plurality of portions of the groove 220a. It may be arranged, or may be formed only on the side surface or bottom surface of the groove 220a. Further, the electrode 24 Ob is disposed on the side surface of the vibrating rod 220 as shown in FIG. 4, but is not limited to this, and as shown in FIG. May be formed on a plurality of surfaces of the vibrating rod 220.
  • the tuning-fork type crystal resonator 200 formed as described above has a smaller size than a conventional 32.768-kHz tuning-fork type crystal resonator, for example, despite its resonance frequency of 32.768 kHz. Has become. For example, it is configured as shown in FIG.
  • the length of the tuning-fork type crystal unit 200 shown in FIG. 5 in the Y-axis direction is, for example, about 2.2 mm, and the width of the tuning-fork type crystal unit 200 in the X-axis direction is about 0. It is about 56mm.
  • This dimension is significantly smaller than the dimensions of the conventional tuning-fork type quartz vibrating piece 10 shown in FIG. 10, which are 3.6 mm (Y-axis direction) and 0.69 mm (X-axis direction).
  • the length of the vibrating rod 220 shown in FIG. 5 in the X-axis direction is, for example, about 1.6 mm
  • the width of each vibrating rod 220 in the X-axis direction is, for example, about 0.1 mm. It has become.
  • the size of the vibrating rod 220 is significantly smaller than the dimensions of the vibrating rod 12 shown in FIG. 10, which are 2.4 mm (Y-axis direction) and 0.23 mm (X-axis direction). I have.
  • the thickness of the tuning-fork type crystal unit in the Z-axis direction of the tuning-fork type crystal unit 200 is, for example, about 0.1 mm, which is equivalent to the thickness of the conventional tuning-fork type crystal unit 200. It is almost the same.
  • the groove 220a is formed in the vibrating rod 220 of the tuning-fork type crystal resonator 200 according to the present embodiment, as described above. For example, it is formed to have a length of about 1.3 mm in the axial direction. As shown in FIG. 5, the width of the groove 220a in the X-axis direction is, for example, about 0.07 mm, and the depth in the Z-axis direction is, for example, about 0.02 mm.
  • the thickness of the electrodes 240a, 240b, 240c arranged in such a small tuning-fork type quartz resonator 200 is, for example, 100 A for the lower layer Cr and 1000 A for the upper layer Au.
  • FIG. 6 (a) shows the result.
  • the grooves 220a are provided in the vertical direction in the figure on the vibrating rod 220, respectively, so that the cross-sectional shape thereof is substantially H-shaped.
  • the electrodes 240a are provided in the grooves 220a at these two places.
  • Electrodes 240b are provided on both sides of the vibrating rod 220, respectively.
  • the electrodes 240a and 240b are connected to a power source (not shown), and the electrodes 240a and 240b alternately have voltages having different polarities. Is applied. Then, for example, when a positive voltage is applied to the electrode 240a and a negative voltage is applied to the electrode 240b, an electric field is generated as shown by an arrow in FIG. 2 of the first embodiment. Will be.
  • the generation of this electric field causes the vibrating rod 220 to vibrate, and is used as a component of the oscillation source of, for example, a mobile phone or an IC card in which the tuning-fork type crystal resonator 220 is used.
  • the arrangement of the electrodes 240a and 240b with respect to the vibrating rod 220 as described above is not limited to the embodiment shown in FIG. 6 (a), but also to the arrangement shown in FIG. 6 (b). Or as shown in Fig. 6 (c).
  • groove 220 a is provided in vibrating rod 220, but this is not restrictive, and groove 220 a may be a through hole.
  • the vibrating fine rod 220 ′ having a through hole has a configuration in which, for example, electrodes 240a and 240b are arranged to face each other as shown in FIG.
  • FIG. 7 is a schematic view showing a cross section of a vibrating rod 220 ′ having a through hole.
  • the electrode 240a may be arranged in all of the through holes. Alternatively, the electrode 240a may be arranged in a plurality of places of the through hole. .
  • the resonance frequency becomes higher, and the stable resonance frequency becomes higher.
  • the electrode 23 b cannot be made large as shown in FIG. 12, so that the electric field generated between the electrode 23 a and the electrode 23 b is strong and constant in the depth direction of the vibrating rod 22. It was not distributed, and the intensity of the electric field was reduced. As a result, the vibration of the vibrating rod 22 was weakened and the vibration loss was increased.
  • the C I value of an ordinary tuning-fork type crystal resonator is preferably from 301 to 60 1 ⁇ 0 in a vacuum, and is about 400 ⁇ when the C I value in the atmosphere is shown as a reference value.
  • the CI value of the tuning fork type crystal resonator 200 according to the present embodiment in the case where the groove 220 is not provided in the vibrating rod 220 of the tuning fork crystal resonator 200 is 100 in air as shown in FIG. 0 ⁇ , which is much higher than the above-mentioned reference value of 400 ⁇ .
  • the depth of the groove 220a was set to 0.02 mm (20 jm), so that the CI value was 42.5 ⁇ , Since the value is close to the preferred value of 400 ⁇ ⁇ , the CI value stays within the appropriate range, making it suitable for use in oscillators for mobile phones and IC cards.
  • forming the groove 220a in the vibrating rod 220 in this way is much more excellent in terms of additivity than when the thickness of the vibrating rod 220 is reduced. Thus, the yield of the manufactured tuning-fork type crystal resonator 200 is improved.
  • the depth of the groove 220a is set to 0.02 mm in consideration of the ease of processing and the like, but as is clear from the table of FIG. As the depth of “a” is deeper, the CI value is lower, and at least at a depth of 0.035 mm, the value is 3333 ⁇ . In this case, the C I value at least in vacuum was 40 ⁇ .
  • the vibrating rod 2 220 is provided with the grooves 220 a and 220 a of two places, and the electrodes 240 a are arranged respectively.
  • the electrode 240 a can be arranged larger, so that an electric field is applied to the vibrating rod 2 as shown in FIG. 2 of the first embodiment. It is distributed uniformly and strongly in the depth direction of 20 and vibration loss can be kept low. This reduction in vibration loss Is also evident from the CI values shown in FIG.
  • the groove 220 a is provided only in the vibrating rod 220 as shown in FIG. 6 (a). However, as shown in FIG. A groove 320a may be formed over the fixing portion 330. In this case, since the stress due to vibration can be confined in the groove 320a, when the vibrator is fixed, the fluctuation of the frequency can be suppressed.
  • the 32.768 kHz tuning-fork type crystal resonator 200 with a CI value within the appropriate range 200, 300 is packaged in a small package, for example, 3.2 mm (Y-axis direction), 1 6 mm (X-axis direction) 0.9 mm (Z-axis direction) makes it possible to use it for small mobile phones and IC cards.
  • the description has been given by taking as an example a tuning fork type crystal resonator 200 of 32.738 kHz, but a tuning fork type crystal resonator of 15 kHz to 150 kHz is described. Clearly, it is applicable.
  • the tuning-fork type resonator 100 and the tuning-fork type crystal resonator 200 according to each of the above-described embodiments can be used not only for small mobile phones and IC cards but also for other electronic devices such as gyros and mobile information. It is clear that the present invention can be used for terminals, televisions, video equipments, so-called boomboxes, personal computer built-in clocks, and clocks.
  • the present invention is suitable for use as a vibrator, for example, a vibrator such as a tuning-fork type crystal vibrator or a gyro sensor, and an electronic apparatus equipped with the vibrator.
  • a vibrator such as a tuning-fork type crystal vibrator or a gyro sensor
  • an electronic apparatus equipped with the vibrator.

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

Vibreur comportant des tiges vibrantes dont les surfaces supérieure et/ou inférieure présentent des rainures (120a) dans lesquelles sont formées des électrodes. Ce vibreur, qui peut être de petite taille, a une impédance de cristal faible.
PCT/JP2000/000238 1999-01-20 2000-01-19 Vibreur et dispositif electronique comportant un vibreur WO2000044092A1 (fr)

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JP2000595424A JP4852195B2 (ja) 1999-01-20 2000-01-19 音叉型水晶振動子

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JP11/11774 1999-01-20
JP1177499 1999-01-20

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Cited By (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1202453A2 (fr) * 2000-10-31 2002-05-02 Piedek Technical Laboratory Résonateur à cristal de quartz selon un mode de flexion
EP1223674A2 (fr) 2000-12-25 2002-07-17 Seiko Epson Corporation Elément vibrant, vibrateur, oscillateur et équipement électronique
JP2002340559A (ja) * 2001-05-11 2002-11-27 Piedekku Gijutsu Kenkyusho:Kk 水晶角速度センサ
JP2003060482A (ja) * 2001-08-10 2003-02-28 River Eletec Kk 音叉型水晶振動片
JP2003273700A (ja) * 2002-01-11 2003-09-26 Piedekku Gijutsu Kenkyusho:Kk 水晶発振器と水晶発振器の製造方法
JP2004260718A (ja) * 2003-02-27 2004-09-16 Seiko Epson Corp 音叉型振動片及び音叉型振動片の製造方法並びに圧電デバイス
US6806797B2 (en) 2002-03-25 2004-10-19 Seiko Epson Corporation Tuning-fork piezoelectric resonator element, production method therefor, and piezoelectric device
JP2004328701A (ja) * 2003-04-28 2004-11-18 Piedekku Gijutsu Kenkyusho:Kk 水晶発振器の製造方法
JP2005016976A (ja) * 2003-06-23 2005-01-20 Seiko Epson Corp 振動片の製造方法、振動子、ジャイロセンサおよび電子機器
JP2005168066A (ja) * 2002-01-11 2005-06-23 Piedekku Gijutsu Kenkyusho:Kk 電子機器
JP2006060727A (ja) * 2004-08-24 2006-03-02 River Eletec Kk 音叉型水晶振動子及びその製造方法
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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5633319B2 (ja) 2010-03-17 2014-12-03 セイコーエプソン株式会社 振動片、センサー素子、センサーおよび電子機器
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JP7030331B2 (ja) * 2018-03-28 2022-03-07 リバーエレテック株式会社 Ａｅセンサ素子及びａｅセンサ

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5252597A (en) * 1975-10-27 1977-04-27 Citizen Watch Co Ltd Bend type piezoelectric vibrator
JPS5261985A (en) * 1975-11-18 1977-05-21 Citizen Watch Co Ltd Piezoelectric flection oscillator
JPS5371593A (en) * 1976-12-08 1978-06-26 Seiko Instr & Electronics Ltd Piezo-vibrator and its manufacture
JPS55138916A (en) * 1979-04-18 1980-10-30 Seiko Instr & Electronics Ltd Composite crystal resonator
JPS5665517A (en) * 1979-10-15 1981-06-03 Ebauches Sa Piezoelectric vibrator
JPH0232229U (fr) * 1988-08-23 1990-02-28
JPH06112760A (ja) * 1992-09-25 1994-04-22 Seiko Electronic Components Ltd 捩り水晶振動子

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52135283A (en) * 1976-05-07 1977-11-12 Seiko Epson Corp Tuning fork type crystal resonator
JPS60149241A (ja) * 1984-01-13 1985-08-06 Matsushita Electric Works Ltd デ−タ伝送装置
JP3322153B2 (ja) * 1997-03-07 2002-09-09 セイコーエプソン株式会社 音叉型水晶振動片

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5252597A (en) * 1975-10-27 1977-04-27 Citizen Watch Co Ltd Bend type piezoelectric vibrator
JPS5261985A (en) * 1975-11-18 1977-05-21 Citizen Watch Co Ltd Piezoelectric flection oscillator
JPS5371593A (en) * 1976-12-08 1978-06-26 Seiko Instr & Electronics Ltd Piezo-vibrator and its manufacture
JPS55138916A (en) * 1979-04-18 1980-10-30 Seiko Instr & Electronics Ltd Composite crystal resonator
JPS5665517A (en) * 1979-10-15 1981-06-03 Ebauches Sa Piezoelectric vibrator
JPH0232229U (fr) * 1988-08-23 1990-02-28
JPH06112760A (ja) * 1992-09-25 1994-04-22 Seiko Electronic Components Ltd 捩り水晶振動子

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