US8251636B2 - Lid closing method for closed container and lid opening/closing system for closed container - Google Patents

Lid closing method for closed container and lid opening/closing system for closed container Download PDF

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US8251636B2
US8251636B2 US12/627,369 US62736909A US8251636B2 US 8251636 B2 US8251636 B2 US 8251636B2 US 62736909 A US62736909 A US 62736909A US 8251636 B2 US8251636 B2 US 8251636B2
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door
lid
opening portion
pod
sensor
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US20100135755A1 (en
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Mutsuo Sasaki
Toshihiko Miyajima
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TDK Corp
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TDK Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover

Definitions

  • the present invention relates to what is called a front-opening interface mechanical standard (FIMS) system that is used to transfer wafers stored in an interior of a transfer container called a pod between semiconductor processing apparatuses in a semiconductor manufacturing process, etc. More specifically, the present invention relates to a pod called a front-opening unified pod (FOUP) or a closed container for storing wafers and a method of fixedly attaching a lid to such a pod from which the lid has been detached to close an opening of the pod in an FIMS system for opening/closing the lid of the pod to allow transfer of wafers into/out of the pod.
  • the present invention also relates to a lid opening/closing system that preferably carries out the method.
  • the semiconductor manufacturing process had been performed in what is called a clean room that is constructed by establishing a high degree of cleanliness in the room in which semiconductor wafers are handled.
  • a clean room that is constructed by establishing a high degree of cleanliness in the room in which semiconductor wafers are handled.
  • a method of keeping highly clean only an interior of a processing apparatus, a pod (container for storing wafers), and a mini-environment through which substrates are transferred between the pod and the processing apparatus has been adopted.
  • the pod includes a substantially cubical main body (closed container) which has shelves provided therein so as to be capable of holding a plurality of wafers in a parallel and separated state and an opening provided on one of the sides or external walls thereof through which wafers can be transferred into/out of the pod, and a lid for closing the opening.
  • the pods as described above which have an opening provided not on the bottom but on one lateral side thereof (i.e. side to be just opposed to the mini-environment) are collectively called front-opening unified pods (FOUPs).
  • the present invention mainly pertains to technologies that use the FOUP.
  • a structure that defines the above-mentioned mini-environment includes a first opening portion to be opposed to the opening of the pod, a door that closes the first opening portion, another processing apparatus side opening portion provided on the semiconductor processing apparatus side, and a transferring robot that is adapted to enter the interior of the pod through the first opening portion to hold a wafer and transfer the wafer into the processing apparatus through the another processing apparatus side opening portion.
  • the structure that defines the mini-environment further has a support table for supporting the pod such that the opening portion of the pod is placed just in front of the door.
  • the support table On the top surface of the support table, there are provided positioning pins to be fitted into positioning holes provided on the bottom surface of the pod to regulate the placement position of the pod and a clamp unit for engaging a clamped portion provided on the bottom surface of the pod to fix the pod onto the support table.
  • the support table is adapted to be movable toward and away from the door over a predetermined distance.
  • FIMS front-opening interface mechanical standard
  • a lid of a conventional pod is provided with an engagement tongue that is extendable/retractable outwardly beyond/into the outer periphery of the lid, and a receiving hole with which the engagement tongue engages is provided at a position in the pod corresponding the engagement tongue.
  • the engagement tongue and the receiving hole function as an engagement means for fixedly attaching the lid to the pod.
  • the pod and the lid are brought into an engagement state and a disengaged state by extension and retraction of the tongue.
  • the tongue provided on the lid may sometimes fail to be inserted precisely into the receiving hole on the pod due to the presence of a foreign matter(s) between the opening and the lid or a positional displacement resulting from accumulation of errors such as a positional error of the pod on the support table and an operation error of the door etc.
  • subsequent operations such as transportation of the pod are performed, and there is a fear in that the lid is dislocated or detached from the pod, for example, during transportation of the pod.
  • a countermeasure to the above-mentioned situation that has been under development currently is to arrange a sensor that detects the state of the tongue to detect displacement of the tongue from a normal position, thereby reliably determining whether or not the opening is closed successfully, as disclosed in Japanese Patent Application Laid-Open No. 2001-077177.
  • pods that are currently used are not provided with such a mechanism for detecting the tongue.
  • it is necessary to replace or modify all the pods.
  • it may be sometimes difficult to provide the above-mentioned mechanism depending on a shape, etc. of the pod.
  • the present invention has been made in view of the above-mentioned situation, and an object of the present invention is therefore to provide a lid closing method for a closed container of detecting whether steady engagement of the lid with the pod is achieved in the operation of attaching the lid to the pod to close the opening and enabling removal of the pod from the FIMS after the detection, and a lid opening/closing system for a closed container that is carried out by the lid closing method.
  • a lid closing method which is applied to a lid opening/closing system that opens and closes a lid of a closed container to allow transfer of an object to be stored into/out of an interior of the closed container, the closed container including the lid, having an opening to be closed by the lid on one lateral side thereof, and being capable of storing therein the object to be stored, the lid closing method being used for closing the opening by the lid, the lid and the closed container including an engagement means for fixedly attaching the lid to the closed container by an operation from outside one of the lid and the closed container, the lid opening/closing system including: a mini-environment having an opening portion; a door that is movable between a position at which the door nearly closes the opening portion and a position at which the door leaves the opening portion open, and includes a lid holding means for holding the lid; a docking plate on which the closed container is allowed to be placed in such a way that the opening is opposed to the
  • the docking plate driving means include a cylinder mechanism, and that a drive force for driving the docking plate by the docking plate driving means be set smaller than a drive force exerted when the door is moved to nearly close the opening portion.
  • the door be swingably supported by a door arm for supporting the door at one end thereof, a door open/close actuator coupled to another end of the door arm to drive the door arm, and a rotation center for rotatably and pivotally supporting the door arm between the door and the door open/close actuator, and that determination whether or not the door is present at the position at which the door nearly closes the opening portion be made based on a signal that is obtained from a door-position detecting sensor arranged between the rotation center in the door arm and the door.
  • the door-position detecting sensor include: a door recessed portion formed in a front surface of the door arm that is opposed to a surface of a chassis having the opening portion formed therein, the chassis defining the mini-environment; a movable dog which is received in the door recessed portion and has a tip end projecting from the front surface of the door arm; a biasing means received in the door recessed portion, for imparting a biasing force in a projecting direction to the movable dog; and a movable-dog-position detecting sensor for outputting a signal corresponding to a projecting amount from the front surface of the door arm of the movable dog according to a position at which the movable dog stops.
  • the door-position detecting sensor include: a door sensor dog that projects from the door arm; and a photo sensor which is provided on a chassis defining the mini-environment, and is arranged in a sensor recessed space constituting a recessed portion that allows entrance of the door sensor dog thereinto, the door-position detecting sensor outputting a signal while the signal is switched between two modes according to the entrance of the door sensor dog into the sensor recessed space.
  • a lid opening/closing system that opens and closes a lid of a closed container to allow transfer of an object to be stored into/out of an interior of the closed container, the closed container including the lid, having an opening to be closed by the lid on one lateral side thereof, and being capable of storing therein the object to be stored, the lid and the closed container including an engagement means for fixedly attaching the lid to the closed container by an operation from outside one of the lid and the closed container, the lid opening/closing system including: a mini-environment having a first opening portion; a door that is movable between a position at which the door nearly closes the opening portion and a position at which the door leaves the opening portion open, and includes a lid holding means for holding the lid; a docking plate on which the closed container is allowed to be placed in such a way that the opening is opposed to the opening portion, the docking plate being movable toward and away from the opening portion together with
  • the docking plate driving means include a cylinder mechanism, and that a drive force for driving the docking plate by the docking plate driving means be set smaller than a drive force exerted when the door is moved to nearly close the opening portion.
  • the present invention it is possible to reliably detect whether or not a tongue of the lid engages with a main body of a pod irrespective of the size of the pod and the like. Therefore, for example, a risk of dislocation of the lid during pod transportation can be eliminated, and the pod transportation speed can be increased.
  • the variety of options in the operation condition of the pod transportation system or the variety of options in the transportation system itself can be increased. Further, basically, it is unnecessary to provide a special mechanism on the pod, and hence a conventional pod or the like can be used as it is. For that reason, no additional cost is imposed on a user of the system.
  • the present invention by adding a sensor for detecting a stop position of the door to a conventional apparatus, and by using signals obtained from the sensor, a dock sensor described below, etc., it is possible to perform simple detection of a fixation condition of the lid by correcting a flow on control. Therefore, without making significant change to a mechanical structure of the conventional apparatus, it is possible to carry out the present invention.
  • FIG. 1 is a side cross sectional view illustrating a general structure of a load port apparatus according to an embodiment of the present invention.
  • FIG. 2 is an enlarged side cross sectional view illustrating, in a manner similar to FIG. 1 , a main portion of the general structure of the load port apparatus according to the embodiment of the present invention.
  • FIG. 3 is an enlarged schematic view illustrating components provided in vicinities of a door and a first opening portion in the load port apparatus illustrated in FIG. 1 .
  • FIG. 4A is a view illustrating, while focusing on a door-position detecting sensor, a state in which a lid 33 is normally attached to a pod 31 in the structure illustrated in FIG. 1 .
  • FIG. 4B is a view illustrating, in a manner similar to FIG. 4A , a state in which the lid 33 is not normally attached to the pod 31 .
  • FIG. 5A is a view illustrating, while focusing on a dock sensor, the state in which the lid 33 is normally attached to the pod 31 in the structure illustrated in FIG. 1 .
  • FIG. 5B is a view illustrating, in a manner similar to FIG. 5A , the state in which the lid 33 is not normally attached to the pod 31 .
  • FIG. 6 is a block diagram illustrating a general configuration of an FIMS system according to the embodiment of the present invention.
  • FIG. 7 is a flow chart illustrating a lid closing method for a pod as a closed container according to the embodiment of the present invention.
  • FIG. 8 is an enlarged schematic view illustrating, in a manner similar to FIG. 4A , etc., the components provided in the vicinities of the door and the first opening portion in the load port apparatus illustrated in FIG. 1 .
  • FIG. 9A shows a variation embodiment of a structure shown in FIG. 4A , showing a view illustrating, while focusing on a door-position detecting sensor, a state in which a lid 33 is normally attached to a pod 31 .
  • FIG. 9B is a view illustrating, in a manner similar to FIG. 9A , a state in which the lid 33 is not normally attached to the pod 31 .
  • FIG. 1 is a side cross sectional view illustrating a general structure of an FIMS system 1 according to the embodiment of the present invention.
  • FIG. 2 is an enlarged view illustrating a pod support portion, a door, a pod, a lid, etc. of this system 1 in a manner similar to FIG. 1 .
  • FIG. 3 is a schematic view illustrating the pod support portion, the door, etc. in a state in which an opening of the pod is closed by the lid.
  • FIG. 4A is an enlarged view of components provided in a vicinity of the door in the structure illustrated in FIG.
  • FIG. 4B is a view illustrating a state in which the lid is pressed against the opening of the pod in the same structure as that of FIG. 4A while the lid is not in the normal state.
  • FIG. 5A is a view illustrating the state illustrated in FIG. 4A such that components for illustration cover the pod and a docking plate drive system. Further, FIG. 5B is a view corresponding to FIG. 4B .
  • the FIMS system 1 includes a chassis 5 that defines a mini-environment 3 and a pod support portion 21 provided adjacent to the chassis 5 .
  • the chassis 5 is provided with a fan 7 , a robot 9 , a first opening portion 11 , a second opening portion 13 , and a door system 15 .
  • the fan 7 is provided on the chassis 5 in the upper portion of the mini-environment 3 to introduce air in a space outside the chassis 5 into the mini-environment.
  • the bottom portion of the chassis 5 has a structure that allows the air to flow to the exterior. Thus, dust particles and the like generated in the mini-environment 3 are brought by the air flow and discharged to an exterior space from the bottom portion of the chassis 5 .
  • a robot arm 9 a of the robot 9 can extend to the exterior of the mini-environment through the first opening portion 11 and the second opening portion 13 . While the first opening portion 11 is closed, in a way, by a door 15 a of the door system 15 , a gap is left between the outer periphery of the door 15 a and the inner peripheral surface of the first opening portion 11 . Thus, the door 15 a can nearly close the first opening portion 11 . Further, as described below, at a position at which the door nearly closes the first opening portion, the door 15 a performs an operation of sucking and holding a lid fixedly attached to a pod 31 , or an operation of attaching the lid 33 to a predetermined position of the pod 31 .
  • the second opening portion 13 leads to an interior of a wafer processing apparatus 17 .
  • the detailed description of the wafer processing apparatus 17 is omitted in this specification, because the wafer processing apparatus 17 has no direct bearing on the present invention. Further, the second opening portion 13 does not exert special effects as features of the present invention, and hence the “opening portion” referred in the present invention represents the first opening portion 11 .
  • the pod support portion 21 includes a docking plate 23 , a pod fixation system 25 , and a docking plate drive system 27 .
  • the upper surface of the docking plate 23 is substantially flat, and some portions of the pod fixation system 25 are provided on the upper surface thereof.
  • the pod 31 described in “BACKGROUND OF THE INVENTION” section is placed on the upper surface of the docking plate 23 , and the above-mentioned portions (specifically, in the form of pins) of the pod fixation system 25 engage with engaged portions (not shown) provided on the bottom surface of the pod 31 .
  • the pod 31 is fixed at a predetermined position on the docking plate 23 .
  • the docking plate 23 is provided such that an opening 31 a of the pod 31 is just opposed to the above-mentioned first opening portion 11 when the pod 31 is placed on the upper surface of the docking plate 23 .
  • the docking plate drive system 27 drives the docking plate 23 and the pod 31 fixed at the predetermined position thereon toward and away from the first opening portion 11 by using a guide rail 27 a and a drive cylinder 27 b . That is, the docking plate drive system 27 serving as a docking plate driving means can move the pod 31 toward and away from the first opening portion 11 .
  • the docking plate drive system 27 arranges, when located at a position close to the opening portion, the pod 31 at a first position at which the lid 33 is to be detached and a wafer is transferred into/out of the pod, and arranges, when located at a position away from the opening portion, the pod 31 at a second position at which loading and unloading of the pod 31 is to be performed.
  • One end of the drive cylinder 27 b is fixed to a support table body 21 a
  • the other end or an end of an extendable/retractable cylinder is fixed to the docking plate 23 .
  • the docking plate 23 is slidably supported on the guide rail 27 a so that the docking plate 23 can slide on the guide rail 27 a with extension/retraction of the cylinder end of the drive cylinder 27 b.
  • a photo sensor 6 for detecting the position of the door 15 a in association with a door sensor dog 15 g described below.
  • the photo sensor 6 is arranged in a sensor recessed space 6 b which is formed in the chassis 5 so as to be capable of receiving the door sensor dog 15 g projecting from a door arm 15 b .
  • the sensor recessed space 6 b is formed by drilling a wall surface on the mini-environment side of the chassis 5 toward a wall surface side on which the pod support portion 21 is provided, and the photo sensor 6 is arranged such that sensor light crosses a forming direction of the sensor recessed space 6 b .
  • the photo sensor 6 be arranged on the pod support portion 21 side (on a deep portion of the space).
  • the photo sensor 6 outputs an ON signal indicating that the door 15 a is to perform the operation of attaching the lid 33 to the pod 31 .
  • the photo sensor 6 outputs an OFF signal.
  • the structure including the photo sensor 6 and the door sensor dog 15 g is used as a door-position detecting sensor.
  • the door-position detecting sensor is not limited to this combination.
  • there may be adopted a variety of well-known combinations such as a combination of a contact sensor and a sensor pressing pin.
  • the ON signal is output only when the door finally stops.
  • a latch system (mechanism) 15 e is provided on the exterior space side surface of the door 15 a (surface opposed to the pod 31 ).
  • the latch system 15 e engages with a portion to be latched (not shown) provided on the front surface of the lid 33 of the pod 31 , to thereby rotate.
  • the latch system 15 e causes an engagement tongue connected to the portion to be latched to retract from a receiving hole formed in the pod 31 , or causes the engagement tongue in a disengaged state to enter the receiving hole.
  • the lid 33 can be attached to or detached from the pod 31 .
  • Suction pads 15 k are supplied with a negative pressure from a negative pressure supplying (providing) source 8 (see FIG.
  • the door system 15 includes the door arm 15 b , a door open/close actuator 15 c , and a door up/down system 15 d .
  • the door arm 15 b is a rod-like member.
  • the door arm 15 b supports the door 15 a at one end thereof and is coupled to the door open/close actuator 15 c at the other end thereof.
  • the door arm 15 b is pivotally supported by a pivot shaft at an appropriate intermediate position so as to be swingable about that position.
  • the door arm 15 b is swung about the rotation center axis by the door open/close actuator 15 c , and thus one end of the door arm 15 b and the door 15 a supported thereon are moved toward or away from the first opening portion 11 .
  • the door up/down system 15 d supports the door open/close actuator 15 c and the pivot shaft of the door arm 15 b , and has a vertical movement actuator to move the door open/close actuator, and the door arm 15 b and the door 15 a which are supported thereby in a vertical direction along a guide extending in the vertical direction.
  • the door arm 15 b is provided with the above-mentioned door sensor dog 15 g which is arranged so as to be opposed to the chassis 5 and correspond to the sensor recessed space 6 b .
  • the door sensor dog 15 g projects perpendicularly to an extending surface of the door arm 15 b (surface of the door 15 a for closing the first opening portion 11 ). More specifically, the door sensor dog 15 g is arranged between the rotation center of the door arm 15 b and the door 15 a .
  • the door open/close actuator 15 c and the door-position detecting sensor are separated from each other, and hence it is possible to achieve precise detection of a slight inclination, displacement, etc.
  • FIG. 6 is a block diagram illustrating a configuration of the FIMS system 1 .
  • the above-mentioned fan 7 , robot 9 , door system 15 , pod fixation system 25 , and docking plate drive system 27 are controlled by a control device 2 .
  • the latch system 15 e , the door open/close actuator 15 c , and the door up/down system 15 d in the door system 15 may be controlled independently from each other. However, in the actual operation, they are controlled so as to operate according to a sequence time chart.
  • the suction pads 15 k function as a lid holding means for holding the lid 33 by vacuum suction.
  • the docking plate drive system 27 turns on and off the driving of the drive cylinder 27 b . It is necessary to detect, with reliability, two predetermined positions of the docking plate 23 driven by the operation of the drive cylinder 27 , that is, a load position that allows placement of the pod 31 and a dock position that allows transfer of wafers from/into the pod 31 .
  • a load sensor 27 d that detects placement of the pod 31 on the docking plate 23 and presence of the docking plate 23 at the position allowing loading and unloading of the pod 31 with respect to the docking plate 23 .
  • a dock sensor 27 c that detects whether or not the docking plate 23 is present at the dock position (position at which the pod 31 is moved closest to the first opening portion 11 and wafers 35 stored in the pod 31 are transferred from/into the pod 31 ).
  • the dock sensor 27 c is constituted by a contact sensor, and outputs the OFF signal to transmit the same to the control device 2 even when the forward end of the docking plate 23 is slightly displaced from its reference position. That is, the dock sensor 27 c outputs the signal according the displacement of the forward end of the docking plate 23 from the reference position, and functions as a displacement detecting means in association with the control device 2 .
  • FIGS. 4A , 4 B, 5 A, and 5 B there is described how the above-mentioned photo sensor 6 and the dock sensor 27 c operate when the lid 33 is attached to the pod 31 .
  • the lid 33 fits into a receiving recess for the lid 33 which is formed in the pod 31 , and each of the door 15 a and the door arm 15 b supporting the door 15 a takes a predetermined posture to close the first opening portion 11 .
  • the door sensor dog 15 g enters the sensor recessed space 6 b by a predetermined depth, and the photo sensor 6 transmits a sequence of OFF-ON-OFF signals to the control device 2 at predetermined timing.
  • the lid 33 may be sometimes pushed into the receiving recess of the pod 31 while being inclined due to a failure to fixedly attach the pod 31 or to hold the lid 33 by the door 15 a , abnormality of operation of the door 15 a , etc.
  • the engagement tongue does not appropriately engage with the receiving hole, with the result that the lid 33 may fall down at the time of transportation of the pod.
  • the door sensor dog 15 g can not enter the sensor recessed space 6 b by the predetermined depth. Therefore, the photo sensor 6 can not output the last OFF signal in the sequence of OFF-ON-OFF signals at the predetermined timing, or the photo sensor 6 outputs signals different from the normal signals (for example, signals having timing different from that of the normal signals). By comparing such signals with the normal signals in the control device 2 , it is possible to detect the attached state of the lid 33 with respect to the pod 31 .
  • a drive source for exerting a drive force in the docking plate drive system 27 is constituted by an air cylinder or the like, and the drive force is set smaller than the above-mentioned pressing force of the door 15 a.
  • the pressing force of the door 15 a does not act on the pod 31 , the docking plate 23 , etc.
  • the pressing force which acts on the lid 33 according to an extent of displacement when the lid is inclined, is applied to the pod 31 , etc.
  • the pressing force acts on the docking plate 23 , and pushes and returns the docking plate 23 in a direction from the forward end toward the rear end thereof (toward a load position at which the pod 31 is placed on the pod support portion 21 , or an unload position at which the pod 31 is brought away from the pod support portion 21 ).
  • FIG. 5A illustrates a state in which the lid 33 is appropriately attached to the pod 31
  • FIG. 5B schematically illustrates a state in which the lid 33 is not appropriately attached to the pod 31 because the lid 33 is inclined.
  • the pressing force indicated by an arrow A acts on the pod 31
  • the dock sensor 27 c outputs the OFF signal due to the pressing force.
  • the pressing force indicated by the arrow A corresponds to the drive force exerted when the door 15 a moves for closing the first opening portion 11 , and the pressing force can act on the lid 33 , etc. by the time the door 15 a nearly closes the first opening portion 11 and stops.
  • the operation of the FIMS system 1 in actual wafer processing operations is described.
  • the pod 31 containing the predetermined number of wafers and filled with clean air is placed on the docking plate 23 .
  • the pod fixation system 25 operates to achieve the predetermined placed position of the pod 31 on the docking plate 23 .
  • the docking plate drive system 27 operates to move the pod 31 toward the first opening portion 11 .
  • the pod 31 that is made integral with the docking plate 23 by the pod fixation system 25 is moved by driving the docking plate 23 by the drive cylinder 27 b .
  • the door 15 a is kept stationary at the position at which the door 15 a nearly closes the first opening portion 11 .
  • the driving operation is completed when the lid 33 of the pod 31 is brought into contact with a contact surface of the door 15 a , and a predetermined positional relationship between the docking plate 23 and the first opening portion 11 is achieved.
  • the latch system 15 e engages with the portion to be latched on the front surface of the lid 33 to rotate, and thus the lid 33 can be attached to or detached from the pod 31 .
  • the suction pads 15 k suck the lid 33 , and the lid 33 is held by the door 15 a.
  • the door open/close actuator 15 c starts to operate.
  • the door arm 15 b swings to move the door 15 a that holds the lid 33 from the first opening portion 11 to the interior of the mini-environment 3 .
  • the door up/down system 15 d starts to operate, and thus the door 15 a is moved downward together with the door open/close actuator 15 c .
  • the first opening portion 11 is fully opened, and the mini-environment 3 is in communication with the interior of the pod 31 through the first opening portion 11 .
  • the robot 9 starts to operate, and transfers the wafers 35 from the interior of the pod 31 to the wafer processing apparatus 17 through the second opening portion 13 , using the robot arm 9 a . Further, while this state is maintained, the robot 9 also transfers, into the interior of the pod 31 , wafers that have undergone a certain processing in the interior of the wafer processing apparatus 17 . Basically, by reversing the above-mentioned procedure, the lid 33 is attached to the pod 31 , and the pod 31 can be detached from the FIMS system 1 .
  • FIG. 7 is a flow chart illustrating operations performed by the control device 2 in the unloading operation according to this embodiment.
  • the door system 15 operates to attach the lid 33 to the opening 31 a of the pod 31 that is kept stationary at the dock position (Step S 1 ).
  • the door-position detecting sensor including the above-mentioned photo sensor 6 transmits the sequence of OFF-ON-OFF signals to the control device 2 at the predetermined timing in the operation of attaching the lid 33 .
  • the dock sensor 27 c transmits, to the control device 2 , the signal indicating whether or not the forward end of the docking plate is present at its reference position (Step S 2 ).
  • the control device 2 compares the signals output from the photo sensor and the dock sensor with the normal signals (Step S 3 ).
  • the control device 2 outputs the information indicating the abnormality to stop the apparatus (Step S 4 ).
  • the operation of the latch system 15 e is performed and the lid 33 is fixedly attached to the pod 31 (Step S 5 ).
  • the position of the door and the position of the docking plate do not change.
  • the lid 33 may return to the normal position by an operation of projecting the engagement tongue by the latch system 15 e , or the engagement tongue may not be received in the receiving hole and the stop position of the door or the docking plate is shifted at this stage.
  • the control device 2 determines again the signals output from the door-position detecting sensor and the dock sensor 27 c at this stage (Steps S 6 and S 7 ). At this time, when the result that the position of the door is inappropriate or the forward end of the docking plate is displaced from the reference position is obtained, the control device 2 outputs the information indicating the abnormality to stop the apparatus (Step S 8 ). When the control device 2 determines by the signals output from all sensors that there is no problem, the holding of the lid 33 by the door 15 a is released (Step S 9 ), and the docking plate drive system 27 moves the pod 31 to the unload position.
  • the control device 2 By performing the above-mentioned operations by the control device 2 , it is possible to fixedly attach the lid 33 to the pod 31 precisely and reliably.
  • the engagement tongue is not received in the receiving hole and the positions of the door and the docking plate may be present at the predetermined positions owing to minute deformation of the lid itself.
  • the present invention can be implemented only by arranging the door-position detecting sensor to a conventional apparatus and by adding, to the operation flow in the conventional apparatus, a step of determining whether the signals from the door-position detecting sensor and the dock sensor indicate ON or OFF and a step of performing fixation operation of the lid again according to the results of determination. Further, it is unnecessary to particularly add a new structure to the pod, and it is possible to implement the present invention by using a conventional pod as it is.
  • the dock sensor 27 c is used as a displacement detecting means for detecting displacement of the docking plate 23 , etc.
  • appropriate detection of displacement by the dock sensor 27 c may be impossible due to its position.
  • not only a signal from the dock sensor may be used, but also a signal from what is called an undock sensor (not shown) that is provided so as to detect a certain amount of displacement of the docking plate from the dock position may be used in combination with the signal from the dock sensor.
  • the fixation state of the lid can be determined based on displacement of the pod in a specific zone according to the type of the pod to be used. Therefore, it is possible to detect the fixation state of the lid on the pod irrespective of the shape of the pod.
  • the lid 33 may be fixedly attached to the pod 31 through the intermediation of an elastic member. In this case, when the docking plate 23 or the like does not undergo displacement of an amount equal to or larger than a deformation amount of the elastic member in the actual operation, it may be impossible to determine whether or not the fixation state of the lid 33 is appropriate. In those cases, it is preferred that, instead of the drive cylinder 27 b , a so-called servomotor be used as a drive source.
  • a servomotor capable of controlling torque may be used. With use of this servomotor, a change in torque when the docking plate temporarily moves may be obtained in advance, and the fixation state of the lid may be detected by comparing a difference between the change in torque and the actually-obtained torque. That is, a memory and a comparative circuit are provided in a control unit.
  • Normal fluctuation in torque is stored in the memory, and the comparative circuit compares the fluctuation in the actually-obtained torque with the fluctuation in torque stored in the memory, and determines that the lid is not fixedly attached appropriately when a different point exceeds a threshold value as the result of the comparison.
  • the above-mentioned operations are performed in the Step S 3 or S 7 . In this case, even when no displacement exists practically, it is possible to detect the fixation state of the lid. Note that, in the present invention, such a change in torque is also defined as the displacement of the pod.
  • the above-mentioned dock sensor, the undock sensor, the encoder, a detection mechanism for detecting the change in torque, and a member such as a timer additionally provided thereto are collectively defined as the displacement detecting means.
  • the displacement detecting means As described above, it is possible to detect whether or not the fixation state of the lid is appropriate irrespective of the shape of the pod.
  • the displacement detecting means there may be adopted a member such as a photoelectric sensor for detecting the actual displacement of the pod. That is, the displacement detecting means according to the present invention can be replaced by various structures capable of detecting the minute displacement of the docking plate or the pod, or detecting the change in load torque applied to one or both of the docking plate and the pod.
  • fixation means for fixedly attaching the lid to the pod the structure including the engagement tongue provided on the lid and the receiving hole formed in the pod is exemplified.
  • the fixation means for fixedly attaching the lid integrally with the pod according to the present invention is not limited to the fixation means according to this embodiment.
  • the engagement tongue and the receiving hole may be provided so as to interchange their positions with each other.
  • fixation means which are different from the above-mentioned fixation means and capable of performing fixation and release by an operation from outside the fixation means.
  • the lid holding means is not limited to the suction pads, and other various means such as a holding means using a so-called latch may be used. Note that, when another lid holding means is used, it is required that the docking plate driving means and the lid holding means be designed in such a way that the driving force supplied from the drive cylinder is weaker than the lid holding force of the lid holding means in the process of determining the fixation state of the lid.
  • FIGS. 9A and 9B are variations of the structure shown in FIGS. 4A and 4B , respectively.
  • the door arm 15 b is pivotably supported by a supporting member 15 h so as to be swingable (rotatable) about a shaft 15 i corresponding to the rotation center.
  • the supporting member 15 h is fixed to the door open/close actuator 15 c , penetrates a wall portion of the door arm 15 b toward inside of the door arm 15 b from the door open/close actuator 15 c and projects horizontally.
  • the supporting member 15 h moves upward or downward together with the door open/close actuator 15 c .
  • a rod 15 j extending projectably from the door open/close actuator 15 c is coupled to an end of the door arm 15 b which is arranged at the opposite side of the door 15 a , in which the shaft 15 i is positioned between the door 15 a and the end of the door arm 15 b .
  • the photo sensor 6 is mounted on an inner wall portion of the door arm 15 b via an attaching member. That is, the photo sensor 6 includes a light receiving portion and a light emitting portion, and the photo sensor 6 is fixed to the door arm 15 b such that light emitted from the light emitting portion of the photo sensor 6 impinges on the light receiving portion.
  • the photo sensor 6 is movable in conjunction with the swing movement of the door arm 15 b . That is, when the door 15 a opens or closes, the photo sensor 6 is swung in conjunction with the swing of the door arm 15 b supporting the door 15 a about the rotation center.
  • the door sensor dog 15 g is fixed to the supporting member 15 h pivotably supporting the door arm 15 b .
  • the door sensor dog 15 g is integrally coupled to the supporting member 15 h from the door open/close actuator 15 c inside the door arm 15 b so as to project upwardly toward the photo sensor 6 .
  • the structure including the photo sensor 6 and the door sensor dog 15 g is used as the door position detecting sensor.
  • the door sensor dog 15 g is fixed to the door open/close actuator 15 c so as to satisfy following three states. First, in a first state where the pod 31 is not closed by the lid 33 held by the door 15 a , light impinging on the light receiving portion of the photo sensor 6 is not blocked by the door sensor dog 15 g so that the photo sensor 6 generates the OFF signal and transmits it to the control device 2 . Next, as shown in FIG. 9A , in a normal operation of attaching the lid 33 to the pod 31 , the photo sensor 6 moves in conjunction with the swing of the door arm 15 b .
  • a second state where the pod 31 is closed by the lid 33 in a predetermined state light impinging on the light receiving portion of the photo sensor 6 is blocked by the door sensor dog 15 g so that the photo sensor transmits the ON signal to the control device 2 .
  • the predetermined state indicates such state that the opening 31 a of the pod 31 is closed by the lid 33 with a correct posture, for example.
  • the lid 33 may be sometimes pushed into the receiving recess of the pod 31 while being inclined due to a failure to fixedly attach the pod 31 or to hold the lid 33 by the door 15 a , abnormality of operation of the door 15 a , etc.
  • the opening 31 a of the pod 31 is not closed by the lid 33 with a correct posture, even when the latch system 15 e is operated in this state, the engagement tongue does not appropriately engage with the receiving hole, with the result that the lid 33 may fall down at the time of transportation of the pod.
  • a signal outputted when the pod 31 is closed by the lid 33 in the predetermined state is called the ON signal.
  • the pod 31 In a state other than the predetermined state, the pod 31 is not closed by the lid 33 or the pod 31 is closed by the lid 33 in an abnormal state. A signal outputted in such state is called the OFF signal. Therefore, light impinging on the light receiving portion of the photo sensor 6 is blocked by the door sensor dog 15 g only when the opening 31 a is closed by the lid 33 in the predetermined state. That is, the photo sensor 6 can switch the outputted signal in accordance with whether or not light impinging on the light receiving portion of the photo sensor 6 is blocked by the door sensor dog 15 g .
  • a state of the signal outputted from the photo sensor 6 (the ON signal or the OFF signal) is determined by the control device 2 . That is, the presence of the door 15 a at the position at which the door 15 a closes the opening portion is determined by the control device 2 . Further, the latch system 15 e is operated only when the ON signal is outputted. On the other hand, the latch system 15 e is not operated when the OFF signal is outputted. That is, only when the opening 31 a of the pod 31 is correctly closed by the lid 33 , the latch system 15 e is operated so that a possibility of a correct engagement of the engagement tongue with the receiving hole increases.
  • Step S 6 and S 7 in FIG. 7 it is determined by the control device 2 that the door 15 a is not displaced and the door 15 a is positioned at the position at which the door 15 a closes the opening portion 11 , even when the latch system 15 e is operated. This determination is performed in order to confirm whether such problem that the engagement tongue of the lid 33 does not correctly engage with the receiving hole of the pod 31 though the latch system 15 e has been normally operated does not happen.
  • the latch system 15 e When the pod 31 is not closed by the lid 33 or the pod 31 is closed by the lid 33 in an abnormal state, the latch system 15 e is not operated and a treatment required to close correctly the opening 31 a of the pod 31 by the lid 33 can be performed.
  • a simple structure including the photo sensor and the sensor dog it is possible to detect the attaching state of the lid 33 to the pod 31 by switching a signal outputted from the photo sensor 6 and monitoring the change of the signal in accordance with whether or not light impinging on the light receiving portion of the photo sensor 6 is blocked by the door sensor dog 15 g.
  • one of the light emitting portion and the light receiving portion of the photo sensor 6 is fixed to the door arm 15 b , becomes movable in conjunction with the swing of the door arm 15 b and the other is fixed to the supporting member 15 h pivotably supporting the door arm 15 b at the shaft 15 i corresponding to the rotation center as the door sensor dog 15 g .
  • the door sensor dog 15 g is not required.
  • the structure is illustrated in which the door-position detecting sensor is arranged in the divided form on the door arm 15 b and a chassis wall 5 a of the chassis 5 defining the mini-environment, the chassis wall 5 a having the opening portion 11 formed therein.
  • the door-position detecting sensor may be arranged on one of the door arm 15 b and the chassis wall 5 a .
  • FIG. 8 illustrates a mode according to this embodiment in which the door-position detecting sensor is arranged on the door arm.
  • FIG. 8 illustrates, in a manner similar to FIG. 4A , etc., a state in which the door 15 a does not close the first opening portion 11 yet.
  • a movable sensor 36 of a so-called plunger type is arranged on the front surface of the door arm 15 b opposed to the chassis wall 5 a having the first opening portion 11 formed therein.
  • the movable sensor 36 includes a door recessed portion 36 a formed in the front surface of the above-mentioned door arm 15 b , a movable dog 36 b , a biasing means 36 c including an elastic member such as a spring, a movable dog detecting sensor 36 d , and a dog-position regulating means 36 e .
  • the movable dog 36 b extends in a direction perpendicular to the front surface of the door arm 15 b , and includes a pin-like member provided in the direction perpendicular thereto.
  • the biasing means 36 c is received in the interior of the door recessed portion 36 a .
  • One end of the biasing means 36 c is brought into contact with the inner wall of the door recessed portion 36 a , whereas the other end thereof is brought into contact with the movable dog 36 b .
  • the dog-position regulating means 36 e is provided with a through hole that allows the tip end of the movable dog 36 b to pass therethrough.
  • the dog-position regulating means 36 e regulates the projecting amount of the movable dog 36 b from the front surface of the door arm 15 b .
  • the above-mentioned biasing means 36 c imparts a biasing force to the movable dog 36 b in the chassis wall 5 a direction, and thus a part of the movable dog 36 b is brought into contact with the dog-position regulating means 36 e to maintain a state of projecting by a predetermined amount.
  • the tip end (end opposed to the chassis wall 5 a ) of the movable dog 36 b is brought into contact with the corresponding chassis wall 5 a , and the movable dog 36 b is pushed into the door recessed portion 36 a while reducing the projecting amount thereof.
  • the movable dog detecting sensor 36 d constituted by, for example, a contact sensor or a photo sensor is arranged.
  • the movable dog detecting sensor 36 d outputs a signal corresponding the position of the door 15 a .
  • the door-position detecting sensor be arranged not on a side of the rotation center for rotating movement in the door arm 15 b but on a region in the door arm 15 b adjacent to its bonded portion with the door 15 a . More specifically, it is preferred that the door-position detecting sensor be arranged in a region which is adjacent to the door 15 a and opposed to a region on the mini-environment 3 side of the chassis wall 5 a , or, in a region on the mini-environment 3 side corresponding to a region on the exterior space side of the chassis wall 5 a in which the docking plate drive system 27 is provided.
  • the region is a space in which the rotating movement and the up/down movement of the door 15 a are not obstructed, and allows a sensor, a recessed space, etc. to be easily provided therein. In comparison with the conventional structure, the region may be least affected in view of keeping cleanliness of the FIMS system. Further, the door-position detecting sensor can be arranged in a region in which the movement of the door 15 a for closing the first opening portion 11 is not obstructed, that is, a region which is farthest away from the rotation center of the door arm 15 b and allows the door-position detecting sensor to be placed therein, and hence the displacement of the door 15 a is enlargingly detected. Therefore, it is possible to detect a posture of the door or the change in the posture of the door with high accuracy.

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US12/627,369 2008-11-28 2009-11-30 Lid closing method for closed container and lid opening/closing system for closed container Active 2030-10-21 US8251636B2 (en)

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JP5718379B2 (ja) * 2013-01-15 2015-05-13 東京エレクトロン株式会社 基板収納処理装置及び基板収納処理方法並びに基板収納処理用記憶媒体
JP2015142008A (ja) * 2014-01-29 2015-08-03 Tdk株式会社 ロードポート装置
US20150311100A1 (en) * 2014-04-23 2015-10-29 Tdk Corporation Load port unit and efem system
TWI756361B (zh) * 2017-02-22 2022-03-01 日商東京威力科創股份有限公司 基板收納處理裝置、基板收納處理方法及記錄媒體
US10790177B2 (en) * 2017-11-14 2020-09-29 Taiwan Semiconductor Manufacturing Co., Ltd. Systems, devices, and methods for using a real time environment sensor in a FOUP
CN113571442B (zh) * 2020-04-29 2023-09-29 长鑫存储技术有限公司 晶圆处理装置及晶圆传送方法
JP2024072356A (ja) * 2022-11-16 2024-05-28 シンフォニアテクノロジー株式会社 ロードポート、及び蓋の傾き検知方法
JP2024072951A (ja) * 2022-11-17 2024-05-29 シンフォニアテクノロジー株式会社 ロードポート、及び蓋の閉止状態判定方法
CN116666284B (zh) * 2023-06-28 2024-06-21 江苏圣创半导体科技有限公司 一种晶圆载入机

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