TWI738645B - 熔射用材料、熔射被膜及附熔射被膜之構件 - Google Patents

熔射用材料、熔射被膜及附熔射被膜之構件 Download PDF

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Publication number
TWI738645B
TWI738645B TW105110773A TW105110773A TWI738645B TW I738645 B TWI738645 B TW I738645B TW 105110773 A TW105110773 A TW 105110773A TW 105110773 A TW105110773 A TW 105110773A TW I738645 B TWI738645 B TW I738645B
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TW
Taiwan
Prior art keywords
rare earth
earth element
particles
spray coating
plasma
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TW105110773A
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English (en)
Chinese (zh)
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TW201639979A (zh
Inventor
長山将之
伊部博之
都築一志
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日商東京威力科創股份有限公司
日商福吉米股份有限公司
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=57550566&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TWI738645(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 日商東京威力科創股份有限公司, 日商福吉米股份有限公司 filed Critical 日商東京威力科創股份有限公司
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  • Coating By Spraying Or Casting (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Drying Of Semiconductors (AREA)
TW105110773A 2015-05-08 2016-04-06 熔射用材料、熔射被膜及附熔射被膜之構件 TWI738645B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2015-095517 2015-05-08
JP2015095517 2015-05-08
JP2016043941A JP6722006B2 (ja) 2015-05-08 2016-03-07 溶射用材料、溶射皮膜および溶射皮膜付部材
JP2016-043941 2016-03-07

Publications (2)

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TW201639979A TW201639979A (zh) 2016-11-16
TWI738645B true TWI738645B (zh) 2021-09-11

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ID=57550566

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TW105110773A TWI738645B (zh) 2015-05-08 2016-04-06 熔射用材料、熔射被膜及附熔射被膜之構件

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JP (1) JP6722006B2 (ja)
TW (1) TWI738645B (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018083854A1 (ja) 2016-11-02 2018-05-11 日本イットリウム株式会社 成膜用材料及び皮膜
WO2018217062A1 (ko) * 2017-05-26 2018-11-29 아이원스 주식회사 플로라이드화 이트륨 옥사이드 코팅막의 형성 방법 및 이에 따른 플로라이드화 이트륨 옥사이드 코팅막
WO2019132550A1 (ko) * 2017-12-29 2019-07-04 아이원스 주식회사 코팅막의 형성 방법 및 이에 따른 코팅막
KR20210135225A (ko) * 2019-03-07 2021-11-12 닛폰 이트륨 가부시키가이샤 소결체
WO2024101367A1 (ja) * 2022-11-11 2024-05-16 Ａｇｃ株式会社 イットリウム質保護膜およびその製造方法ならびに部材

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014002580A1 (ja) * 2012-06-27 2014-01-03 日本イットリウム株式会社 溶射材料及びその製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4160224B2 (ja) * 1998-12-21 2008-10-01 信越化学工業株式会社 オキシハロゲン化物系部材
US9017765B2 (en) * 2008-11-12 2015-04-28 Applied Materials, Inc. Protective coatings resistant to reactive plasma processing
US20130115418A1 (en) * 2011-11-03 2013-05-09 Coorstek, Inc. Multilayer rare-earth oxide coatings and methods of making
JP5939084B2 (ja) * 2012-08-22 2016-06-22 信越化学工業株式会社 希土類元素オキシフッ化物粉末溶射材料の製造方法
JP5636573B2 (ja) * 2013-01-18 2014-12-10 日本イットリウム株式会社 溶射材料
US20150307715A1 (en) * 2013-08-08 2015-10-29 Nippon Yttrium Co., Ltd. Slurry for thermal spraying
JP5911036B1 (ja) * 2014-11-21 2016-04-27 日本イットリウム株式会社 焼結体

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014002580A1 (ja) * 2012-06-27 2014-01-03 日本イットリウム株式会社 溶射材料及びその製造方法

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Publication number Publication date
JP2016211072A (ja) 2016-12-15
TW201639979A (zh) 2016-11-16
JP6722006B2 (ja) 2020-07-15

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