TWI693731B - 高頻超音波壓電元件、其製造方法以及包含該高頻超音波壓電元件的高頻超音波探頭 - Google Patents
高頻超音波壓電元件、其製造方法以及包含該高頻超音波壓電元件的高頻超音波探頭 Download PDFInfo
- Publication number
- TWI693731B TWI693731B TW105119414A TW105119414A TWI693731B TW I693731 B TWI693731 B TW I693731B TW 105119414 A TW105119414 A TW 105119414A TW 105119414 A TW105119414 A TW 105119414A TW I693731 B TWI693731 B TW I693731B
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- Taiwan
- Prior art keywords
- piezoelectric
- piezoelectric element
- lower electrode
- frequency ultrasonic
- concave portion
- Prior art date
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- 239000000523 sample Substances 0.000 title claims description 38
- 238000002604 ultrasonography Methods 0.000 title abstract description 14
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- 238000000034 method Methods 0.000 claims abstract description 25
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- 239000011248 coating agent Substances 0.000 claims abstract description 9
- 238000000576 coating method Methods 0.000 claims abstract description 9
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- 238000003491 array Methods 0.000 claims description 2
- 239000007921 spray Substances 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 109
- 239000000463 material Substances 0.000 description 15
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 9
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
- H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/093—Forming inorganic materials
- H10N30/097—Forming inorganic materials by sintering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/13—Tomography
- A61B8/14—Echo-tomography
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Dispersion Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015126268A JP6122066B2 (ja) | 2015-06-24 | 2015-06-24 | 高周波超音波圧電素子、その製造方法、及びそれを含む高周波超音波プローブ |
JPJP2015-126268 | 2015-06-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201705560A TW201705560A (zh) | 2017-02-01 |
TWI693731B true TWI693731B (zh) | 2020-05-11 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW105119414A TWI693731B (zh) | 2015-06-24 | 2016-06-21 | 高頻超音波壓電元件、其製造方法以及包含該高頻超音波壓電元件的高頻超音波探頭 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6122066B2 (ja) |
TW (1) | TWI693731B (ja) |
WO (1) | WO2016208425A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101965171B1 (ko) * | 2018-08-24 | 2019-08-13 | (주)비티비엘 | 초음파센서의 제조방법 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012011024A (ja) * | 2010-07-01 | 2012-01-19 | Konica Minolta Medical & Graphic Inc | 超音波探触子、および超音波診断装置 |
JP2013168573A (ja) * | 2012-02-16 | 2013-08-29 | Mitsubishi Heavy Ind Ltd | 超音波厚みセンサの製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH071920Y2 (ja) * | 1988-05-10 | 1995-01-18 | 東レ株式会社 | 超音波トランスデューサ |
JP2002008939A (ja) * | 2000-04-13 | 2002-01-11 | Fujitsu Ltd | 選択的コーティングによるセラミック体の製造方法 |
JP4759117B2 (ja) * | 2000-06-22 | 2011-08-31 | 日本特殊陶業株式会社 | 金属酸化物膜付き基板及び金属酸化物膜付き基板の製造方法 |
JP2004111835A (ja) * | 2002-09-20 | 2004-04-08 | Canon Inc | 圧電体素子の製造方法、圧電体素子及びインクジェット式記録ヘッド |
JP2005327919A (ja) * | 2004-05-14 | 2005-11-24 | Seiko Epson Corp | デバイスの製造方法及びデバイス、電気光学素子、プリンタ |
US7449821B2 (en) * | 2005-03-02 | 2008-11-11 | Research Triangle Institute | Piezoelectric micromachined ultrasonic transducer with air-backed cavities |
JP5540361B2 (ja) * | 2011-06-07 | 2014-07-02 | 日立Geニュークリア・エナジー株式会社 | 超音波センサ及びその製造方法 |
JP2013207155A (ja) * | 2012-03-29 | 2013-10-07 | Mitsubishi Materials Corp | 強誘電体薄膜の製造方法 |
JP6132337B2 (ja) * | 2013-04-24 | 2017-05-24 | 国立大学法人電気通信大学 | 超音波診断装置及び超音波画像構築方法 |
-
2015
- 2015-06-24 JP JP2015126268A patent/JP6122066B2/ja active Active
-
2016
- 2016-06-10 WO PCT/JP2016/067395 patent/WO2016208425A1/ja active Application Filing
- 2016-06-21 TW TW105119414A patent/TWI693731B/zh not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012011024A (ja) * | 2010-07-01 | 2012-01-19 | Konica Minolta Medical & Graphic Inc | 超音波探触子、および超音波診断装置 |
JP2013168573A (ja) * | 2012-02-16 | 2013-08-29 | Mitsubishi Heavy Ind Ltd | 超音波厚みセンサの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TW201705560A (zh) | 2017-02-01 |
JP6122066B2 (ja) | 2017-04-26 |
JP2017011144A (ja) | 2017-01-12 |
WO2016208425A1 (ja) | 2016-12-29 |
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