TWI666749B - 封裝基板及封裝結構 - Google Patents

封裝基板及封裝結構 Download PDF

Info

Publication number
TWI666749B
TWI666749B TW103105445A TW103105445A TWI666749B TW I666749 B TWI666749 B TW I666749B TW 103105445 A TW103105445 A TW 103105445A TW 103105445 A TW103105445 A TW 103105445A TW I666749 B TWI666749 B TW I666749B
Authority
TW
Taiwan
Prior art keywords
thickness
layers
circuit
patent application
scope
Prior art date
Application number
TW103105445A
Other languages
English (en)
Other versions
TW201533879A (zh
Inventor
林長甫
姚進財
莊旻錦
劉科震
黃富堂
Original Assignee
矽品精密工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 矽品精密工業股份有限公司 filed Critical 矽品精密工業股份有限公司
Priority to TW103105445A priority Critical patent/TWI666749B/zh
Priority to CN201410089672.4A priority patent/CN104851870B/zh
Priority to US14/453,977 priority patent/US9900996B2/en
Publication of TW201533879A publication Critical patent/TW201533879A/zh
Application granted granted Critical
Publication of TWI666749B publication Critical patent/TWI666749B/zh

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0296Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0296Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
    • H05K1/0298Multilayer circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • H05K1/181Printed circuits structurally associated with non-printed electric components associated with surface mounted components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0183Dielectric layers
    • H05K2201/0191Dielectric layers wherein the thickness of the dielectric plays an important role
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09654Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/09736Varying thickness of a single conductor; Conductors in the same plane having different thicknesses
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/20Details of printed circuits not provided for in H05K2201/01 - H05K2201/10
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03Metal processing
    • H05K2203/0353Making conductive layer thin, e.g. by etching
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03Metal processing
    • H05K2203/0369Etching selective parts of a metal substrate through part of its thickness, e.g. using etch resist
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/284Applying non-metallic protective coatings for encapsulating mounted components

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Packaging Frangible Articles (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

一種封裝基板及封裝結構,該封裝基板係包括複數介電層及複數與各該介電層交互堆疊之線路層,其中,至少二該線路層具有厚度差。本發明能有效避免基板的翹曲現象。

Description

封裝基板及封裝結構
本發明係有關於一種封裝基板及封裝結構,尤指一種包括複數交互堆疊之介電層與線路層之封裝基板及封裝結構。
現行之覆晶技術因具有縮小晶片封裝面積及縮短訊號傳輸路徑等優點,目前已經廣泛應用於晶片封裝領域,例如:晶片尺寸構裝(Chip Scale Package,CSP)、晶片直接貼附封裝(Direct Chip Attached,DCA)以及多晶片模組封裝(Multi-Chip Module,MCM)等型態的封裝模組,其均可利用覆晶技術而達到封裝的目的。
第1圖所示者,係為習知的覆晶式封裝基板之剖視圖,如圖所示,該封裝基板1之內部具有複數線路層11,且各該線路層11的厚度均相同,例如19微米(μm)的厚度。
然而,於覆晶封裝製程的溫度循環(temperature cycle)測試中,因為晶片與封裝基板之熱膨脹係數的差異甚大或受熱不對稱等原因,所以封裝基板容易發生翹曲(warpage),導致許多問題,例如:晶片外圍的凸塊無法與封裝基板上對應的接點形成良好的接合,進而使得產品良率降低。
雖然增加所有該線路層的厚度可減緩封裝基板的翹曲現象,但卻會使得封裝基板的整體厚度增加,進而導致最終封裝結構的 整體厚度增加,不符合現今電子產品之輕薄短小的趨勢。
因此,如何避免上述習知技術中之種種問題,實為目前業界所急需解決的課題。
有鑒於上述習知技術之缺失,本發明提供一種封裝基板,係包括:複數介電層;以及複數與各該介電層交互堆疊之線路層,其中,至少二該線路層具有厚度差。
本發明復提供一種封裝結構,係包括:封裝基板,係包括複數介電層及複數與各該介電層交互堆疊之線路層,至少二該線路層具有厚度差;以及晶片,係接置於該封裝基板之上表面上。
於前述之封裝基板與封裝結構中,位於或接近該封裝基板之上表面的該線路層之厚度係大於位於或接近該封裝基板之下表面之該線路層之厚度,該上表面與下表面係分別為置晶側與非置晶側,最接近該上表面之線路層之厚度係大於其他所有該線路層之厚度,最接近該下表面之線路層之厚度係小於其他所有該線路層之厚度,除最接近該上表面之線路層與最接近下表面之線路層外,其餘的線路層係具有相同之厚度。
於另一實施例中,該等線路層之厚度係由該上表面逐漸往該下表面減少,接近該上表面之半數之線路層之厚度總和係大於接近該下表面之半數之線路層之厚度總和。
於本發明之封裝基板與封裝結構中,該等線路層中之最厚者與最薄者的厚度的比係為1.2:1至2:1,該等線路層中之最厚者與最薄者的厚度的比較佳係為1.5:1。
所述之封裝基板與封裝結構中,該等線路層中之最厚者與最 薄者的厚度的差係為3至15微米,該等線路層中之最厚者與最薄者的厚度的差較佳係為5至10微米。
又依上所述之封裝基板與封裝結構,該等線路層之數量係為單數或雙數。一該介電層係為核心板,且該等線路層係以該核心板為中心之方式對稱分佈於該核心板之相對兩表面上。
由上可知,本發明係調整封裝基板中之部分線路層的厚度,使部分線路層的厚度較厚,以增加封裝基板的整體剛性,減少基板翹曲的發生;此外,由於部分線路層的厚度較薄,故可使所有線路層的厚度總和不增加,進而能避免封裝基板及封裝結構的整體厚度增加。
1‧‧‧封裝基板
11、22‧‧‧線路層
2‧‧‧封裝基板
2a‧‧‧上表面
2b‧‧‧下表面
21‧‧‧介電層
21’‧‧‧核心板
31‧‧‧晶片
32‧‧‧封裝膠體
第1圖所示者係為習知的覆晶式封裝基板之剖視圖;第2圖所示者係本發明之封裝基板之剖視圖;以及第3圖所示者係本發明之封裝結構之剖視圖。
以下藉由特定的具體實施例說明本發明之實施方式,熟悉此技藝之人士可由本說明書所揭示之內容輕易地瞭解本發明之其他優點及功效。
須知,本說明書所附圖式所繪示之結構、比例、大小等,均僅用以配合說明書所揭示之內容,以供熟悉此技藝之人士之瞭解與閱讀,並非用以限定本發明可實施之限定條件,故不具技術上之實質意義,任何結構之修飾、比例關係之改變或大小之調整,在不影響本發明所能產生之功效及所能達成之目的下,均應仍落在本發明所揭示之技術內容得能涵蓋之範圍內。同時,本說明書 中所引用之用語,亦僅為便於敘述之明瞭,而非用以限定本發明可實施之範圍,其相對關係之改變或調整,在無實質變更技術內容下,當亦視為本發明可實施之範疇。
請參閱第2圖,係本發明之封裝基板之剖視圖。如圖所示,該封裝基板2係包括:複數介電層21;以及複數與各該介電層21交互堆疊之線路層22,其中,至少二該線路層22具有厚度差,其中,一該介電層21可為核心板21’,且該等線路層22係以該核心板21’為中心之方式對稱分佈於該核心板21’之相對兩表面上。
前述之封裝基板中,位於或接近該封裝基板2之上表面2a的該線路層22之厚度係大於位於或接近該封裝基板2之下表面2b之該線路層22之厚度,該上表面2a與下表面2b係分別為置晶側與非置晶側。
依前所述之封裝基板,最接近該上表面2a之線路層22之厚度係大於其他所有該線路層22之厚度,最接近該下表面2b之線路層22之厚度係小於其他所有該線路層22之厚度,除最接近該上表面2a之線路層22與最接近下表面2b之線路層22外,其餘的線路層22係具有相同之厚度。例如,該等線路層22之層數為6,該等線路層22之厚度由該上表面2a至該下表面2b分別是26微米、19微米、19微米、19微米、19微米與12微米。
於另一實施例中,該等線路層22之厚度係由該上表面2a逐漸往該下表面2b減少。例如,該等線路層22之層數為6,該等線路層22之厚度由該上表面2a至該下表面2b分別是26微米、23微米、19微米、19微米、15微米與12微米。
於另一實施例中,接近該上表面2a之半數之線路層22之厚度總和係大於接近該下表面2b之半數之線路層22之厚度總和。例如,該等線路層22之層數為6,該等線路層22之厚度由該上表面2a至該下表面2b分別是26微米、24微米、20微米、18微米、14微米與12微米。
再者,於一實施例中,如第2圖所示,該等線路層22之層數為6,該等線路層22之厚度由該上表面2a至該下表面2b分別是22微米、22微米、22微米、16微米、16微米與16微米。
又依前所述之封裝基板,該等線路層22中之最厚者與最薄者的厚度的比係為1.2:1至2:1,該等線路層22中之最厚者與最薄者的厚度的比係較佳為1.5:1。
又於所述之封裝基板中,該等線路層22中之最厚者與最薄者的厚度的差係為3至15微米,該等線路層22中之最厚者與最薄者的厚度的差係較佳為5至10微米。
於本發明之封裝基板中,該等線路層22之數量係為單數或雙數。
請參閱第3圖,係本發明之封裝結構之剖視圖。如圖所示,其主要係於本發明之封裝基板2之上表面2a上接置有晶片31,並形成有包覆該晶片31的封裝膠體32,至於其餘技術特徵大致如前所述,故不再為文贅述。
綜上所述,相較於習知技術,本發明係調整封裝基板中之部分線路層的厚度,使部分線路層的厚度較厚,以增加封裝基板的整體剛性,減少基板翹曲的發生(約減少5至25%),進而提高產品的良率;此外,由於並非增厚所有線路層的厚度,或者,由於 可使部分線路層的厚度減少,即部分線路層的厚度較薄,故可使所有線路層的厚度總和不增加,進而能避免封裝基板及封裝結構的整體厚度增加,而能符合現今電子產品之輕薄短小的趨勢。
上述實施例係用以例示性說明本發明之原理及其功效,而非用於限制本發明。任何熟習此項技藝之人士均可在不違背本發明之精神及範疇下,對上述實施例進行修改。因此本發明之權利保護範圍,應如後述之申請專利範圍所列。

Claims (23)

  1. 一種封裝基板,係包括:複數介電層;以及複數與各該介電層交互堆疊之線路層,其中,位於該封裝基板之上表面之該線路層與下表面之該線路層之厚度不相同,位於該上表面與下表面之其中一者之該線路層的厚度大於其他線路層之厚度,位於該上表面與下表面之另一者之該線路層的厚度小於其他線路層之厚度。
  2. 如申請專利範圍第1項所述之封裝基板,其中,位於該封裝基板之上表面的該線路層之厚度係大於位於該封裝基板之下表面之該線路層之厚度。
  3. 如申請專利範圍第2項所述之封裝基板,其中,該上表面與下表面係分別為置晶側與非置晶側。
  4. 如申請專利範圍第2項所述之封裝基板,其中,位於該上表面之線路層之厚度係大於其他所有該線路層之厚度,位於該下表面之線路層之厚度係小於其他所有該線路層之厚度,除位於該上表面之線路層與位於該下表面之線路層外,其餘的線路層係具有相同之厚度。
  5. 如申請專利範圍第2項所述之封裝基板,其中,該等線路層之厚度係由該上表面逐漸往該下表面減少。
  6. 如申請專利範圍第2項所述之封裝基板,其中,接近該上表面之半數之線路層之厚度總和係大於接近該下表面之半數之線路層之厚度總和。
  7. 如申請專利範圍第2項所述之封裝基板,其中,該等線路層中之最厚者與最薄者的厚度的比係為1.2:1至2:1。
  8. 如申請專利範圍第7項所述之封裝基板,其中,該等線路層中之最厚者與最薄者的厚度的比係為1.5:1。
  9. 如申請專利範圍第2項所述之封裝基板,其中,該等線路層中之最厚者與最薄者的厚度的差係為3至15微米。
  10. 如申請專利範圍第9項所述之封裝基板,其中,該等線路層中之最厚者與最薄者的厚度的差係為5至10微米。
  11. 如申請專利範圍第2項所述之封裝基板,其中,該等線路層之數量係為單數或雙數。
  12. 如申請專利範圍第2項所述之封裝基板,其中,該複數介電層之其中一者係為核心板,且該等線路層之層數係以該核心板為中心之方式對稱分佈於該核心板之相對兩表面上。
  13. 一種封裝結構,係包括:封裝基板,係包括複數介電層及複數與各該介電層交互堆疊之線路層,其中,位於該封裝基板之上表面之該線路層與下表面之該線路層之厚度不相同,位於該上表面與下表面之其中一者之該線路層的厚度大於其他線路層之厚度,位於該上表面與下表面之另一者之該線路層的厚度小於其他線路層之厚度;以及晶片,係接置於該封裝基板之上表面上。
  14. 如申請專利範圍第13項所述之封裝結構,其中,位於該封裝基板之上表面的該線路層之厚度係大於位於該封裝基板之下表面之該線路層之厚度。
  15. 如申請專利範圍第14項所述之封裝結構,其中,位於該上表面之線路層之厚度係大於其他所有該線路層之厚度,位於該下表面之線路層之厚度係小於其他所有該線路層之厚度,除位於該上表面之線路層與位於該下表面之線路層外,其餘的線路層係具有相同之厚度。
  16. 如申請專利範圍第14項所述之封裝結構,其中,該等線路層之厚度係由該上表面逐漸往該下表面減少。
  17. 如申請專利範圍第14項所述之封裝結構,其中,接近該上表面之半數之線路層之厚度總和係大於接近該下表面之半數之線路層之厚度總和。
  18. 如申請專利範圍第14項所述之封裝結構,其中,該等線路層中之最厚者與最薄者的厚度的比係為1.2:1至2:1。
  19. 如申請專利範圍第18項所述之封裝結構,其中,該等線路層中之最厚者與最薄者的厚度的比係為1.5:1。
  20. 如申請專利範圍第14項所述之封裝結構,其中,該等線路層中之最厚者與最薄者的厚度的差係為3至15微米。
  21. 如申請專利範圍第20項所述之封裝結構,其中,該等線路層中之最厚者與最薄者的厚度的差係為5至10微米。
  22. 如申請專利範圍第14項所述之封裝結構,其中,該等線路層之數量係為單數或雙數。
  23. 如申請專利範圍第14項所述之封裝結構,其中,該複數介電層之其中一者係為核心板,且該等線路層之層數係以該核心板為中心之方式對稱分佈於該核心板之相對兩表面上。
TW103105445A 2014-02-19 2014-02-19 封裝基板及封裝結構 TWI666749B (zh)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW103105445A TWI666749B (zh) 2014-02-19 2014-02-19 封裝基板及封裝結構
CN201410089672.4A CN104851870B (zh) 2014-02-19 2014-03-12 封装基板及封装结构
US14/453,977 US9900996B2 (en) 2014-02-19 2014-08-07 Package substrate and structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103105445A TWI666749B (zh) 2014-02-19 2014-02-19 封裝基板及封裝結構

Publications (2)

Publication Number Publication Date
TW201533879A TW201533879A (zh) 2015-09-01
TWI666749B true TWI666749B (zh) 2019-07-21

Family

ID=53799393

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103105445A TWI666749B (zh) 2014-02-19 2014-02-19 封裝基板及封裝結構

Country Status (3)

Country Link
US (1) US9900996B2 (zh)
CN (1) CN104851870B (zh)
TW (1) TWI666749B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3429323A4 (en) * 2016-03-07 2019-03-27 Mitsubishi Electric Corporation ELECTRONIC CONTROL DEVICE

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998020555A1 (en) * 1996-11-08 1998-05-14 W.L. Gore & Associates, Inc. Method for minimizing warp in the production of electronic assemblies
WO2003063238A1 (fr) * 2002-01-25 2003-07-31 Sony Corporation Module haute frequence et son procede de fabrication
TW200528004A (en) * 2004-02-04 2005-08-16 Ibiden Co Ltd Multilayer printed wiring board
TW200628040A (en) * 2003-07-29 2006-08-01 Matsushita Electric Ind Co Ltd Multi-layer circuit board and the manufacturing method of the multi-layer circuit board
WO2009037939A1 (ja) * 2007-09-20 2009-03-26 Ibiden Co., Ltd. プリント配線板及びその製造方法
TWI365020B (en) * 2008-03-27 2012-05-21 Unimicron Technology Corp Method of fabricating package substrate having semiconductor component embedded therein

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6326557B1 (en) * 2001-03-06 2001-12-04 Mitac International Corp. Multi-layer circuit board
JP5026400B2 (ja) * 2008-12-12 2012-09-12 新光電気工業株式会社 配線基板及びその製造方法
JP5830400B2 (ja) * 2012-02-02 2015-12-09 ルネサスエレクトロニクス株式会社 半導体装置、および半導体装置の製造方法
US9768102B2 (en) * 2012-03-21 2017-09-19 STATS ChipPAC Pte. Ltd. Integrated circuit packaging system with support structure and method of manufacture thereof
US9230896B2 (en) * 2012-06-05 2016-01-05 Stats Chippac, Ltd. Semiconductor device and method of reflow soldering for conductive column structure in flip chip package
JP2014090080A (ja) * 2012-10-30 2014-05-15 Ibiden Co Ltd プリント配線板、プリント配線板の製造方法及び電子部品

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998020555A1 (en) * 1996-11-08 1998-05-14 W.L. Gore & Associates, Inc. Method for minimizing warp in the production of electronic assemblies
WO2003063238A1 (fr) * 2002-01-25 2003-07-31 Sony Corporation Module haute frequence et son procede de fabrication
TW200628040A (en) * 2003-07-29 2006-08-01 Matsushita Electric Ind Co Ltd Multi-layer circuit board and the manufacturing method of the multi-layer circuit board
TW200528004A (en) * 2004-02-04 2005-08-16 Ibiden Co Ltd Multilayer printed wiring board
WO2009037939A1 (ja) * 2007-09-20 2009-03-26 Ibiden Co., Ltd. プリント配線板及びその製造方法
TWI365020B (en) * 2008-03-27 2012-05-21 Unimicron Technology Corp Method of fabricating package substrate having semiconductor component embedded therein

Also Published As

Publication number Publication date
CN104851870B (zh) 2018-01-12
TW201533879A (zh) 2015-09-01
CN104851870A (zh) 2015-08-19
US9900996B2 (en) 2018-02-20
US20150237717A1 (en) 2015-08-20

Similar Documents

Publication Publication Date Title
US8986806B1 (en) Warpage control stiffener ring package and fabrication method
US20130099385A1 (en) Packages and Methods for Forming the Same
TWI652774B (zh) 電子封裝件之製法
TWI529906B (zh) 半導體封裝件之製法
TWI488270B (zh) 半導體封裝件及其製法
TWI666749B (zh) 封裝基板及封裝結構
TW201316462A (zh) 封裝件及其製法
TWI548052B (zh) 半導體中介板及封裝結構
TWI567911B (zh) 具改良佈線結構之球柵陣列封裝結構及其基板
TWI603505B (zh) 封裝基板
TWI788099B (zh) 電子封裝件及其封裝基板
TWI539566B (zh) 封裝基板及封裝結構
US20130119540A1 (en) Semiconductor package and method for manufacturing the same
TW571407B (en) Construction of a package with multiple modules
TWI573230B (zh) 封裝件及其封裝基板
TWI499020B (zh) 半導體基板之製法
TWI529898B (zh) 半導體封裝件及其製法
TWI612590B (zh) 電子封裝件及其製法
TWI503932B (zh) 設置於膠層上的半導體封裝件及其製法
TWI592063B (zh) 線路結構及其製法
TWI545714B (zh) 電子封裝件及其製法
TWI433288B (zh) 半導體晶片封裝結構及其製法暨用於半導體晶片封裝結構之封裝基板結構
TWI480986B (zh) 半導體封裝件及其製法
US20150216066A1 (en) Integrated circuit package having improved coplanarity
TWI595608B (zh) 半導體封裝件及其製法